Detection device and detection method

Abstract

The invention provides detection equipment which is applied to the field of detection, such as the field of spectrum detection. The detection equipment comprises an optical coupler, a scattering assembly, a detector and a processor. The optical coupler is used for receiving a to-be-detected light beam and coupling the to-be-detected light beam to the scattering assembly. The scattering assembly is used for scattering the to-be-detected light beams and outputting a plurality of scattered to-be-detected light beams to the detector at different angles in a time division manner. The plurality of scattered light beams to be detected are in one-to-one correspondence with the plurality of angles. The detector is used for detecting a plurality of different areas in the plurality of scattered light beams to be detected to obtain a plurality of paths of electric signals. The detector is further used for transmitting multiple paths of electric signals to the processor. And the processor is used for calculating the multiple paths of electric signals to obtain related information of the light beam to be detected. In the technical scheme provided by the invention, by adjusting the output direction of the to-be-detected light beam, the related information of the to-be-detected light beam can be obtained through the detector in a time division manner, so that the cost of the detection equipment is reduced.

Description

Technical Field

[0001] The present application relates to the field of detection, and in particular to detection equipment and detection methods. Background Art

[0002] The spectrometer is used to obtain the spectral information of the light beam to be detected. The spectrometer includes a scattering medium and a multi-channel detector. The scattering medium is used to scatter the light beam to be detected and generate a characteristic scattering distribution diagram. The scattering medium is pressed from particles with a smaller average particle size and has a lower preparation cost. The smaller average particle size ensures that light of different wavelengths undergoes different optical paths when penetrating the scattering medium, thereby generating speckle patterns with different distributions. The multi-channel detector is used to obtain multi-channel electrical signals corresponding to different multiple areas in the speckle pattern. By calculating the multi-channel electrical signals, the spectral information of the light beam to be detected can be obtained. However, the cost of the detector is high, which leads to the high cost of the spectrometer. Summary of the invention

[0003] The present application provides a detection device and a detection method, which can obtain relevant information of the light beam to be detected in a time-division manner through a detector by adjusting the output direction of the light beam to be detected, thereby reducing the cost of the detection device.

[0004] The first aspect of the present application provides a detection device. The detection device includes an optical coupler, a scattering component, a detector and a processor. The optical coupler is used to receive a light beam to be detected and couple the light beam to be detected to the scattering component. The scattering component is used to scatter the light beam to be detected and output multiple scattered light beams to be detected to the detector at different angles. The multiple scattered light beams to be detected correspond to the multiple angles one-to-one. For example, at a first moment, the scattering component is used to output a first scattered light beam to be detected to the detector at a first angle; at a second moment, the scattering component is used to output a second scattered light beam to be detected to the detector at a second angle. The detector is used to detect different multiple regions in the multiple scattered light beams to be detected to obtain multiple electrical signals. Multiple regions correspond to multiple electrical signals one-to-one. Multiple regions correspond to multiple scattered light beams to be detected one-to-one. The detector is also used to transmit multiple electrical signals to the processor. The processor is used to calculate the multiple electrical signals to obtain relevant information of the light beam to be detected.

[0005] In an optional manner of the first aspect, the scattering component includes a scattering medium and an optical modulator. The scattering medium is used to receive the light beam to be detected from the optical coupler, scatter the light beam to be detected, and cause the scattered light beam to be detected to be incident on the optical modulator. The optical modulator is used to output multiple scattered light beams to be detected to the detector at different angles. The multiple scattered light beams to be detected correspond to the multiple angles one by one. In the present application, the relative state between the light beam to be detected and the scattering medium remains unchanged, and the system stability is higher.

[0006] In an optional manner of the first aspect, the scattering component includes an optical modulator and a scattering medium. The optical modulator is used to receive a light beam to be detected from an optical coupler and output multiple light beams to be detected to the scattering medium at different angles. The multiple light beams to be detected correspond to the multiple angles one-to-one. The scattering medium is used to scatter the multiple light beams to be detected to obtain multiple scattered light beams to be detected. The multiple light beams to be detected correspond to the multiple scattered light beams to be detected one-to-one. The scattering medium is also used to make the multiple scattered light beams to be detected incident on the detector. In the present application, the positions of the scattering medium and the detector are relatively fixed. Therefore, multiple areas correspond to the same scattering area of ​​the scattering medium. Therefore, the present application can reduce the area of ​​the scattering medium, thereby reducing the hardware cost of the detection device. In an optional manner of the first aspect, the detector is a linear array detector. The optical modulator is a one-dimensional optical modulator. The photosensitive surface of the detector is located in a first plane. The optical modulator is used to change the output direction of the scattered light beam to be detected or so that the light spot of the scattered light beam to be detected irradiated on the first plane moves along the first direction. For example, at a first moment, the first light spot of the first scattered light beam to be detected irradiated on the first plane is located at a first position. The output direction of the scattered light beam to be detected is changed, and at the second moment, the second light spot of the second scattered light beam to be detected irradiated on the first plane is located at the second position. In the present application, by using a one-dimensional light modulator, the hardware cost of the detection device can be reduced.

[0007] In an optional manner of the first aspect, the difference between the first width of the light spot of the scattered light beam to be detected irradiated on the first plane and the second width of the photosensitive surface of the detector is less than or equal to 50 percent of the first width. The direction of the first width and the direction of the second width are perpendicular to the first direction. When the difference between the first width and the second width is too large, a large amount of energy of the light beam to be detected is wasted, resulting in a lower light beam energy used to obtain relevant information. The lower the light beam energy used to obtain relevant information, the lower the reliability of the relevant information. Therefore, the present application can improve the reliability of the relevant information obtained.

[0008] In an optional manner of the first aspect, the plurality of regions include a first region and a second region, and the first region and the second region include an overlapping region. Wherein, when the optical modulator is in a first state, the detector is used to detect the first region of the light beam to be detected; when the optical modulator is in a second state, the detector is used to detect the second region of the light beam to be detected. When there is no overlapping region between the first region and the second region, the change between the first state and the second state is large. When there is an overlapping region between the first region and the second region, the change between the first state and the second state is small. For example, the optical modulator is a reflector, the first state is the first angle of the reflector, and the second state is the second angle of the reflector. When there is an overlapping region between the first region and the second region, the change between the first angle and the second angle is small. The smaller the state change, the lower the hardware cost of the optical modulator. Therefore, the present application can reduce the hardware cost of the detection equipment.

[0009] In an optional manner of the first aspect, the area of ​​the overlapping region is less than or equal to 90 percent of the area of ​​the first region. When the area of ​​the overlapping region accounts for too large a proportion, the reliability of the obtained relevant information will be affected. Therefore, the present application can improve the reliability of the obtained relevant information.

[0010] In an optional manner of the first aspect, the detection device also includes a focus adjuster. The focus adjuster is located on the optical transmission path between the scattering component and the detector. The focus adjuster is used to change the focal length of the light beam to be detected after scattering. Assume that the multi-channel electrical signal is equal to the h-channel electrical signal. In practical applications, the value of h can be changed according to the accuracy requirements of the measurement. By changing the focal length through the value of h, the utilization rate of the light beam to be detected can be improved, that is, the proportion of light beam energy used to obtain relevant information can be increased. The utilization rate of the light beam to be detected affects the reliability of the relevant information. Therefore, the present application can improve the reliability of the relevant information obtained.

[0011] In an optional manner of the first aspect, the focusing range of the focus adjuster is between 1 mm and 5 mm.

[0012] In an optional manner of the first aspect, the detection device further comprises a mask. The mask is located on the light transmission path between the scattering component and the detector. The mask can be used to replace part of the calculation functions implemented by the software. Therefore, by adding the mask, the efficiency of obtaining relevant information can be improved.

[0013] In an optional manner of the first aspect, the photosensitive surface of the detector is located on the first plane, and the ratio of the size of the light spot of the light beam to be detected irradiating the first plane to the size of the photosensitive surface is between 1000 and 1000000.

[0014] In an optional manner of the first aspect, the detection device further includes a temperature controller. The temperature controller is used to keep the temperature of the scattering medium within a target range. The temperature of the scattering medium will affect the weight matrix of the scattering medium. When the temperature change causes the weight matrix to change, but the processor obtains relevant information based on the original weight matrix, it will affect the reliability of the relevant information. Therefore, by adding a temperature controller, the reliability of the obtained relevant information can be improved.

[0015] In an optional manner of the first aspect, the detection device also includes a first seismic isolator and a second seismic isolator. The first seismic isolator is used to reduce the vibration of the scattering medium. The second seismic isolator is used to reduce the vibration of the optical modulator. The vibration of the optical modulator and the scattering medium will affect the reliability of the relevant information. Therefore, by adding the seismic isolator, the reliability of the obtained relevant information can be improved.

[0016] In an optional manner of the first aspect, the processor includes a collector, a memory, and a controller. The collector is used to receive multiple electrical signals from the detector and transmit the multiple electrical signals to the memory. The memory is used to store the multiple electrical signals. The controller is used to obtain the multiple electrical signals from the memory, calculate the multiple electrical signals, and obtain relevant information of the light beam to be detected.

[0017] In an optional manner of the first aspect, the processor is further configured to generate a control signal after obtaining each of the multiple electrical signals. The optical modulator is configured to adjust the output angle of the scattered light beam to be detected according to the control signal.

[0018] In an optional manner of the first aspect, the detection device further comprises a light source. The light source is used to irradiate the target light beam to the object to be detected. The light beam to be detected is the reflected light or the transmitted light of the target light beam.

[0019] The second aspect of the present application provides a detection method. The detection method is applied to a detection device. The detection method includes the following steps: the detection device scatters the light beam to be detected to obtain the scattered light beam to be detected; the detection device detects the first area of ​​the scattered light beam to be detected through a detector to obtain a first electrical signal; the detection device changes the output direction of the scattered light beam to be detected so that the light spot of the scattered light beam to be detected moves relative to the photosensitive surface of the detector; the detection device detects the second area of ​​the scattered light beam to be detected through the detector to obtain a second electrical signal; the detection device obtains relevant information of the light beam to be detected based on the first electrical signal and the second electrical signal.

[0020] In an optional manner of the second aspect, the first area and the second area include an overlapping area. The detection device obtains relevant information of the light beam to be detected based on h electrical signals. The h electrical signals include the first electrical signal and the second electrical signal, and h is an integer greater than or equal to 2. The detection method also includes the following steps: the detection device adjusts the area size of the overlapping area according to the value of h. In practical applications, the area size of the overlapping area will affect the accuracy of the relevant information. In the present application, adjusting the area size of the overlapping area can improve the accuracy of the obtained relevant information.

[0021] In an optional manner of the second aspect, the detection device obtains relevant information of the light beam to be detected based on h electrical signals. The h electrical signals include a first electrical signal and a second electrical signal, and h is an integer greater than or equal to 2. The detection method also includes the following steps: the detection device adjusts the size of the light spot of the light beam to be detected according to the value of h. In practical applications, the size of the light spot will affect the utilization rate of the light beam to be detected. The utilization rate of the light beam to be detected will affect the accuracy of the relevant information. In the present application, adjusting the size of the light spot according to the value of h can improve the accuracy of the relevant information obtained.

[0022] It should be understood that there are similarities between the description of the detection method and the inspection device described in the aforementioned first aspect or any one of the optional embodiments of the first aspect. Therefore, the description of the detection method can refer to the inspection device described in the aforementioned first aspect or any one of the optional embodiments of the first aspect. For example, the scattering component includes a scattering medium and an optical modulator. The detection device scatters the light beam to be detected through the scattering medium. The detection device changes the output direction of the scattered light beam to be detected through the optical modulator. For another example, the detection device includes a focuser. The detection device adjusts the focuser according to the value of h to adjust the size of the light spot of the scattered light beam to be detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A first structural schematic diagram of a detection device provided in an embodiment of the present application;

[0024] Figure 2a A first structural schematic diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0025] Figure 2b A second structural schematic diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0026] Figure 3 A third structural schematic diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0027] Figure 4a A second structural schematic diagram of the detection device provided in the embodiment of the present application;

[0028] Figure 4bA third structural schematic diagram of the detection device provided in the embodiment of the present application;

[0029] Figure 5 A fourth structural schematic diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0030] Figure 6 A fifth structural schematic diagram of a light spot and a photosensitive surface provided in an embodiment of the present application;

[0031] Figure 7 A fourth structural schematic diagram of the detection device provided in an embodiment of the present application;

[0032] Figure 8 A schematic diagram of the structure of a mask provided in an embodiment of the present application;

[0033] Fig. 9 A schematic diagram of the working process of the detection device provided in the embodiment of the present application;

[0034] Fig.10 A schematic diagram of the process of the detection method provided in the embodiment of the present application. DETAILED DESCRIPTION

[0035] The present application provides a detection device and a detection method. By adjusting the output direction of the light beam to be detected, the relevant information of the light beam to be detected can be obtained by the detector in a time-division manner, thereby reducing the cost of the detection device. It should be understood that the "first", "second", etc. used in the present application are only used for the purpose of distinguishing the description, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying order. In addition, for the sake of simplicity and clarity, reference numbers and / or letters are repeated in multiple figures of the present application. Repetition does not indicate a strict limiting relationship between various embodiments and / or configurations.

[0036] The detection device provided in the present application is applied to the detection field, such as the spectral detection field. In the spectral detection field, the spectral information of the light beam to be detected can be obtained by a spectrometer. Specifically, the spectrometer includes a scattering medium and a multi-channel detector. The light beam to be detected through the scattering medium forms a speckle pattern. Each detector is used to detect information of different areas in the speckle pattern to obtain a multi-channel electrical signal. By calculating the multi-channel electrical signals, the spectral information of the light beam to be detected can be obtained. However, the cost of the detector is high, which leads to a high cost of the spectrometer.

[0037] To this end, the present application provides a detection device. Figure 1 This is a first structural diagram of the detection device provided in the embodiment of the present application. Figure 1 As shown, the detection device 100 includes an optical coupler 101, a scattering component 102, a detector 103 and a processor 104. The various structures in the detection device 100 are described below.

[0038] The optical coupler 101 is also called a coupler or a coupling module. The optical coupler 101 includes but is not limited to structures such as a lens group, an optical fiber and its array, and a reflector group. The optical coupler 101 is used to collect the light beam to be detected and guide the collected light beam to be detected to the scattering component 102. There is a stable space or optical fiber optical path between the optical coupler 101 and the scattering component 102 for transmitting the light beam to be detected. Among them, the stable space refers to air, special gas or vacuum.

[0039] The scattering component 102 is used to receive the light beam to be detected from the optical coupler 101, scatter the light beam to be detected, and obtain the scattered light beam to be detected. The scattering component 102 is also used to output multiple scattered light beams to be detected to the detector 103 at different angles. The multiple scattered light beams to be detected correspond to the multiple angles. For example, Figure 1 In the example, at the first moment, the scattering component 102 is used to output the first scattered light beam to be detected to the detector 103 at a first angle, and the first scattered light beam to be detected is also called light beam 1; at the second moment, the scattering component 102 is used to output the second scattered light beam to be detected to the detector 103 at a second angle, and the second scattered light beam to be detected is also called light beam 2. The solid lines with arrows in the figure represent light beam 1 and light beam 2. Light beam 1 and light beam 2 are irradiated onto the first plane to form a light spot. The position of the arrows of the solid lines represents the center position of the light spot.

[0040] The photosensitive surface of the detector 103 is located in the first plane. The area of ​​the spot of the scattered light beam to be detected is larger than the area of ​​the photosensitive surface. Therefore, at different times, the detector 103 can detect different areas of the scattered light beam to be detected. The detector 103 is also called a photodetector, which is used to convert an optical signal into an electrical signal. In an embodiment of the present application, the detector 103 is used to detect different areas of multiple scattered light beams to be detected in time division to obtain multiple electrical signals. Multiple areas correspond to multiple electrical signals one by one. Multiple areas correspond to multiple scattered light beams to be detected one by one. For example, at a first moment, the detector 103 is used to detect the first area of ​​the light beam 1 to obtain a first electrical signal; at a second moment, the detector 103 is used to detect the second area of ​​the light beam 2 to obtain a second electrical signal. In an embodiment of the present application, since the scattered light beam to be detected is measured in a time division manner, the detector 103 can include fewer pixels, thereby reducing the cost of the detector 103. For example, the detector 103 is a single-pixel or line array detector. A single-pixel detector refers to a detector that includes only one pixel. A line array detector refers to a detector that includes only one column of pixels. The detector 103 is also used to transmit multiple electrical signals to the processor 104 .

[0041] The processor 104 can be a central processing unit (CPU), a network processor (NP) or a combination of a CPU and a NP. The processor 104 can further include a hardware chip or other general-purpose processor. The above-mentioned hardware chip can be an application specific integrated circuit (ASIC), a programmable logic device (PLD) or a combination thereof. The processor 104 is used to calculate multiple electrical signals to obtain relevant information of the light beam to be detected. The processor 104 can also be used to output a clock signal. The scattering component 102 is used to adjust the output angle of the scattered light beam to be detected according to the clock signal.

[0042] according to Figure 1 It can be seen from the description that the scattered light beam to be detected forms a light spot on the first plane. Figure 2a This is a first structural schematic diagram of a light spot and a photosensitive surface provided in an embodiment of the present application. Figure 2a As shown, at the first moment, the light beam 1 irradiates the first plane to form a light spot 201. The area of ​​the photosensitive surface 202 of the detector 103 is smaller than the area of ​​the light spot 201. In practical applications, in order to ensure measurement accuracy and provide a certain adjustment margin, the size ratio of the light spot 201 to the size of the photosensitive surface 202 can be between 1000 and 1000000. The photosensitive surface 202 is within the range of the light spot 201. Figure 2b This is a second structural schematic diagram of the light spot and the photosensitive surface provided in the embodiment of the present application. Figure 2b As shown, at the second moment, the light beam 2 irradiates the first plane, forming a light spot 203. Since the center position of the light spot of the light beam 1 is different from the center position of the light spot of the light beam 2, the position of the photosensitive surface 202 moves relative to the position of the light spot. Figure 2a and Figure 2b In the example, the light spot 203 can be understood as the light spot 201 moving in the negative direction of the X-axis. Ignore the change in the shape and area of ​​the light spot caused by the angle change of the scattered light beam to be detected, that is, assume that the area and shape of the light spot 203 are the same as those of the light spot 201. Figure 2b and Figure 2a In the example, Figure 2b The photosensitive surface 202 in the Figure 2a The photosensitive surface 202 in the image is moved in the positive direction of the X-axis relative to the light spot 201.

[0043] Figure 3 The third structural schematic diagram of the light spot and the photosensitive surface provided in the embodiment of the present application. Figure 3As shown in FIG. 1 , due to the movement of the light spot 201, the relative position of the photosensitive surface 202 will change. Figure 3 In the example, at the first moment, the photosensitive surface 202 is located at position 1. Driven by the clock signal, the scattering component 102 changes the output angle of the light beam so that the light spot 201 moves in the negative direction of the X-axis. At the second moment, the photosensitive surface 202 is located at position 2. The above process is repeated until the fifth moment, when the photosensitive surface 202 is located at position 5. The scattering component 102 changes the position of the light spot 201 again, so that the light spot 201 moves in the positive direction of the X-axis and the positive direction of the Y-axis. At the sixth moment, the photosensitive surface 202 is located at position 6. The above process is repeated so that the photosensitive surface 202 is located in multiple different areas of the light spot 201. In each area, the detector 103 obtains one electrical signal through the photosensitive surface 202 to obtain multiple electrical signals.

[0044] according to Figure 1 As can be seen from the description, the scattering component 102 is used to realize the function of scattering and changing the output direction of the light beam. The scattering component 102 can include a scattering medium and an optical modulator. The scattering medium is used to realize the function of scattering. The scattering medium is also called a scattering module. The scattering medium can be a nanoparticle tablet, a multimode optical fiber or a diffraction optical array structure, etc. The optical modulator is used to realize the function of changing the output direction of the light beam. The optical modulator is also called a scattered light modulation module. The optical modulator can be a transmissive liquid crystal spatial light modulator, a reflective liquid crystal spatial light modulator, a digital micromirror based on micro-electro-mechanical system (MEMS) technology and its array, a magneto-optical spatial light modulator, a rotating mirror system or an electro-optical microcavity array, etc. In practical applications, the scattering medium and the optical modulator can be at different positions in the detection device 100, which is described below.

[0045] Figure 4a This is a second structural diagram of the detection device provided in the embodiment of the present application. Figure 4a As shown, in Figure 1 Based on the scattering component 102, the scattering component 102 includes a scattering medium 401 and an optical modulator 402. The scattering medium 401 is used to receive the light beam to be detected from the optical coupler 101, scatter the light beam to be detected, and obtain the scattered light beam to be detected. The scattering medium 401 is also used to irradiate the scattered light beam to be detected to the optical modulator 402. The optical modulator 402 is used to output multiple scattered light beams to be detected to the detector 103 at different angles and in different time divisions. Figure 4a In the example of FIG. 4 , by changing the angle of the light modulator 402 , the output angle of the light beam can be changed.

[0046] Figure 4b This is a third structural schematic diagram of the detection device provided in this embodiment of the application. Figure 4bAs shown, in Figure 1 On the basis of, the scattering component 102 includes a scattering medium 401 and an optical modulator 402. The optical modulator 402 is used to receive the light beam to be detected from the optical coupler 101. The optical modulator 402 is also used to output multiple light beams to be detected to the scattering medium 401 at different angles. For example, at a first moment, the optical modulator 402 is used to transmit a first light beam to be detected to the scattering medium 401 at a first angle; at a second moment, the optical modulator 402 is used to transmit a second light beam to be detected to the scattering medium 401 at a second angle. Figure 4b In the example, by changing the angle of the light modulator 402, the output angle of the light beam can be changed. The scattering medium 401 is used to receive multiple light beams to be detected in time division, scatter the multiple light beams to be detected, and obtain multiple scattered light beams to be detected. The multiple scattered light beams to be detected correspond to the multiple light beams to be detected one by one. The scattering medium 401 is also used to output multiple scattered light beams to be detected to the detector 103 in time division at different angles.

[0047] According to the aforementioned Figure 1 As can be seen from the description, the processor 104 is used to obtain relevant information of the light beam to be detected according to the multi-channel electrical signals. In practical applications, the processor 104 can be used to obtain relevant information of the light beam to be detected according to the weight matrix of the scattering medium 401 and the multi-channel electrical signals.

[0048]

[0049] The weight matrix 1 of the scattering medium 401 includes m rows and n columns. Therefore, the weight matrix 1 includes m×n values. m and n are integers greater than 0. The scattering medium 401 includes m scattering regions. Each of the m scattering regions corresponds to a row of values ​​in the weight matrix 1. The values ​​corresponding to each scattering region depend on the physical properties of the scattering medium in the scattering region. The weight matrix can be obtained by measurement. The embodiment of the present application does not limit the way in which the processor 104 obtains the weight matrix 1. Figure 4a and Figure 4b In the detection device, the processor 104 can obtain the relevant information of the light beam to be detected in a similar manner. This is described below.

[0050] exist Figure 4a In the detection device, the areas detected by the detector 103 at different times correspond to different scattering areas in the scattering medium 401. For example, Figure 3 Position 1 in the figure is the first area of ​​the light spot 201 detected by the detector 103 at the first moment. The first area of ​​the light spot 201 is obtained through the first scattering area of ​​the scattering medium 401; Figure 3Position 2 in the figure is the second area of ​​the light spot 201 detected by the detector 103 at the second moment. The second area of ​​the light spot 201 is obtained by passing through the second scattering area of ​​the scattering medium 401. Therefore, the multiple areas detected by the detector 103 correspond to the different multiple scattering areas in the scattering medium 401. The processor 104 can obtain the relevant information of the light beam to be detected according to the following formula.

[0051]

[0052] Among them, the processor 104 obtains h electrical signals from the detector 103. The h electrical signals are K1, k2, ..., Kh. Formula set 1 includes h formulas. The h formulas correspond to the h electrical signals one by one. h is an integer less than or equal to m. The value of h is greater than or equal to the value of n. Through the above h formulas, the processor 104 can obtain n λ values. The n λ values ​​are λ1, λ2, ..., λn. Among them, the value of λ1 can be used to characterize the energy intensity of the light beam to be detected at the wavelength λ1. The processor 104 can also be used to establish a correspondence between n λ values ​​and n wavelengths. The corresponding relationship is the spectral information of the light beam to be detected. In an embodiment of the present application, the relevant information of the light beam to be detected can be n λ values ​​or a corresponding relationship.

[0053] exist Figure 4b In the detection device, the areas detected by the detector 103 at different times correspond to the same scattering area in the scattering medium 401. However, since the angles of the light beam to be detected incident on the same scattering area at different times are different, the light beam to be detected at different incident angles will also produce different weight values. Figure 4b In the detection device, the processor 104 can obtain a weight matrix 2 similar to the weight matrix 1. The weight matrix 2 can be obtained by measurement. The embodiment of the present application does not limit the manner in which the processor 104 obtains the weight matrix 2. The processor 104 can obtain relevant information of the light beam to be detected through a formula set similar to the above formula set 1.

[0054] according to Figure 4a and Figure 4b As can be seen from the description, the detection device 100 can change the output angle of the scattered light beam to be detected through the light modulator 402. Figure 4a In the example of , the light modulator 402 is used to directly change the output angle of the scattered light beam to be detected. Figure 4bIn the example of , the optical modulator 402 is used to change the output angle of the scattered light beam to be detected by changing the output angle of the light beam to be detected. In general, the greater the change in the output angle of the scattered light beam to be detected, the longer the adjustment time required for the optical modulator 402, or the higher the hardware cost of the optical modulator 402. In order to reduce the adjustment time or reduce the hardware cost, the multiple areas detected by the detector 103 can include overlapping areas. Figure 5 This is a fourth structural schematic diagram of the light spot and the photosensitive surface provided in the embodiment of the present application. Figure 5 As shown, at the first moment, the light beam 1 irradiates the first plane to form a light spot 201. The position of the photosensitive surface 202 of the detector 103 relative to the light spot 201 is position 1. At the second moment, the position of the photosensitive surface 202 relative to the light spot 201 is position 2. Position 1 can also be called the first area of ​​the light spot 201 or the first area of ​​the light beam 1. Position 2 can also be called the second area of ​​the light spot 201 or the first area of ​​the light beam 2. Figure 5 As shown, the solid line box represents the first area, and the dotted line box represents the second area. There is an overlapping portion between the first area and the second area. In practical applications, when the area of ​​the overlapping area accounts for too large a proportion, it will affect the reliability of the relevant information obtained about the light beam to be detected. Therefore, the area of ​​the overlapping area can be less than or equal to 90 percent of the area of ​​the first area.

[0055] According to the foregoing description, the processor 104 can be used to obtain relevant information of the light beam to be detected according to the h-circuit electrical signal. In practical applications, the value of h can be changed according to the accuracy requirements of the measurement. When there is an overlapping area between the first area and the second area, the processor 104 can also be used to adjust the area size of the overlapping area according to the value of h. For example, when the value of h becomes smaller, the processor 104 is used to reduce the area of ​​the overlapping area; when the value of h becomes larger, the processor 104 is used to increase the area of ​​the overlapping area.

[0056] according to Figure 1 As can be seen from the description, the detector 103 can be a single pixel or a linear array detector. When the detector 103 is a single pixel detector, in order to measure the main area of ​​the light spot 201 as closely as possible, the light modulator 402 needs to be a two-dimensional light modulator. The two-dimensional light modulator can drive the light spot 201 to move along two dimensions. For example, Figure 3 In the example, the light modulator 402 can drive the light spot 201 to move along the X-axis direction and the Y-axis direction. In the embodiment of the present application, when the detector 103 is a linear array detector, the light modulator 402 can be a one-dimensional light modulator. A one-dimensional light modulator can only drive the light spot 201 to move along one dimension. Figure 6 This is a fifth structural schematic diagram of the light spot and the photosensitive surface provided in the embodiment of the present application. Figure 6As shown, the photosensitive surface 202 of the detector 103 is rectangular. The detector 103 has a plurality of pixels distributed along the Y-axis. By adjusting the light modulator 402, the light spot 201 can be moved along the negative direction of the X-axis. The negative direction of the X-axis is also called the first direction. For example, Figure 6 In the example, at the first moment, the photosensitive surface 202 is located at position 1. By adjusting the light modulator 402, the light spot 201 moves in the negative direction of the X-axis. At the second moment, the photosensitive surface 202 is located at position 2. Repeat the above process so that the photosensitive surface 202 is located in multiple different areas of the light spot 201. In practical applications, the hardware cost of a two-dimensional light modulator is generally higher than the hardware cost of a one-dimensional light modulator. Therefore, the embodiment of the present application can reduce the hardware cost of the detection device 100. In addition, by using a linear array of detectors, the detection efficiency can be improved.

[0057] In practical applications, the energy of the light beam used to obtain relevant information is related to the reliability of the relevant information obtained. The lower the energy of the light beam used to obtain relevant information, the lower the reliability of the relevant information. Therefore, the embodiment of the present application can improve the reliability of relevant information by increasing the energy of the light beam used to obtain relevant information. For example, Figure 6 As shown, the first width of the light spot 201 of the scattered light beam to be detected irradiated on the first plane is d2. The second width of the photosensitive surface 202 of the detector 103 is d1. The direction of the second width is perpendicular to the direction of the first width. The difference between d2 and d1 is less than or equal to 50 percent of d2.

[0058] According to the above description, the value of h can be changed according to the accuracy requirements of the measurement. When the value of h becomes smaller, the energy of the light beam used to obtain relevant information will be reduced, thereby affecting the reliability of the relevant information. Therefore, the detection device 100 can also include a focuser. The focuser is used to change the size of the light spot on the first plane irradiated by the scattered light beam to be detected. Figure 7 This is a fourth structural diagram of the detection device provided in the embodiment of the present application. Figure 7 As shown, in Figure 4a On the basis of, the detection device 100 also includes a focuser 703. The focuser 703 is located on the light transmission path between the scattering component 102 and the detector 103. The focusing range of the focuser 703 can be between 1 mm and 5 mm. When the detection device 100 also includes the focuser 703, the processor 104 can also be used to adjust the focuser 703 according to the value of h, so that the size of the light spot 201 changes. For example, when the h value becomes smaller, the processor 104 is used to adjust the focuser 703 so that the area of ​​the light spot 201 becomes smaller; when the h value becomes larger, the processor 104 is used to adjust the focuser 703 so that the area of ​​the light spot 201 becomes larger.

[0059] like Figure 7 As shown, the detection device 100 further includes a mask 704. The mask 704 is located on the light transmission path between the scattering component 102 and the detector 103. The mask 704 can be used to replace part of the calculation functions implemented by software. Figure 8 This is a schematic diagram of the structure of the mask provided in the embodiment of the present application. Figure 8 As shown, the mask 704 includes different areas in which black and white are alternately distributed. For example, area 1 and area 4 of the mask 704 are black areas. The black area blocks the scattered light beam to be detected. Area 2 and area 3 of the mask 704 are white areas. The white area allows the scattered light beam to be detected to pass through. When the four areas (area 1, area 2, area 3 and area 4) correspond to the first area of ​​the light spot 201, the mask 704 is equivalent to performing frequency domain filtering on the first electrical signal. Therefore, by adding a mask, the embodiment of the present application can improve the efficiency of obtaining relevant information.

[0060] In practical applications, the detection device 100 may also include a light source. For example, when the detection device 100 is an absorption coefficient measuring device, the detection device 100 is used to detect the absorption ratio of the object to be detected to light. Figure 7 As shown, the light source 701 is used to output a target light beam. The target light beam is irradiated to the object to be detected 702. The object to be detected 702 is used to reflect or transmit the target light beam. The light beam to be detected obtained by the optical coupler 101 is the reflected light or the transmitted light of the target light beam.

[0061] In practical applications, the temperature of the scattering medium 401 will affect the weight matrix of the scattering medium 401. When the temperature change causes the weight matrix to change, but when the processor obtains relevant information based on the original weight matrix, it will affect the reliability of the relevant information. Therefore, the detection device 100 can also include a temperature controller. The temperature controller is used to keep the temperature of the scattering medium 401 within the target range. Similarly, the vibration of the optical modulator 402 and the scattering medium 401 will also cause the weight matrix to change. When the processor 104 is used to obtain relevant information based on the original weight matrix, it will affect the reliability of the obtained relevant information. Therefore, the detection device 100 can also include a first seismic isolator and a second seismic isolator. The seismic isolator can be a spring or a gasket, etc. The first seismic isolator is used to reduce the vibration of the scattering medium 401. The second seismic isolator is used to reduce the vibration of the optical modulator 402.

[0062] Fig. 9 This is a schematic diagram of the working process of the detection device provided in the embodiment of the present application. Fig. 9As shown, the detector 103 is used to receive an operation instruction, and detect the first area of ​​the scattered light beam to be detected according to the operation instruction to obtain a first electrical signal. The detector 103 is also used to output the first electrical signal to the processor 104. After obtaining the first electrical signal, the processor 104 is used to output a clock signal. The clock signal can also be called a control signal. The optical modulator 402 is used to adjust the output angle of the scattered light beam to be detected according to the clock signal. After adjusting the output angle, the detector 103 is used to detect the second area of ​​the scattered light beam to be detected to obtain a second electrical signal. The detector 103 is also used to output a second electrical signal to the processor 104. After obtaining the second electrical signal, the processor 104 is used to output the clock signal again. The above process is repeated until the processor 104 obtains h-way electrical signals. The processor 104 is used to obtain relevant information of the light beam to be detected based on the h-way electrical signals.

[0063] In practical applications, the processor 104 can include a collector, a memory and a controller. The collector is used to receive multiple electrical signals from the detector 103 and transmit the multiple electrical signals to the memory. The memory can be a volatile memory or a non-volatile memory, or can include both volatile and non-volatile memories. The non-volatile memory can be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), or a flash memory. The volatile memory can be a random access memory (RAM). The memory is used to store multiple electrical signals. The controller is used to obtain multiple electrical signals from the memory, calculate the multiple electrical signals, and obtain relevant information of the light beam to be detected.

[0064] It should be understood that the aforementioned Figures 1 to 8 These are just a few examples of the detection devices provided in the embodiments of the present application. In practical applications, those skilled in the art can make adaptive modifications to the detection devices as needed. Figure 1 In the embodiment, the detection device 100 further includes a filter or an attenuation plate between the detector 103 and the scattering component 102. The filter is used to isolate stray light. The attenuation plate is used to control the amount of light entering to prevent the detector 103 from being saturated. Figure 3 In the embodiment, when the photosensitive surface 202 is at position 5, the scattering component 102 moves the light spot 201 in the positive direction of the Y axis so that position 6 of the photosensitive surface 202 is located directly below position 5. In this case, the time for the scattering component 102 to adjust the light spot position can be reduced.

[0065] The above describes the detection device provided by the present application. The following describes the detection method provided by the present application. Fig.10The following is a flow chart of the detection method provided in the embodiment of the present application. Fig.10 As shown, the detection method includes the following steps.

[0066] In step 1001, a detection device scatters a light beam to be detected to obtain a scattered light beam to be detected.

[0067] The detection device includes a scattering medium. The scattering medium is also called a scattering module. The scattering medium can be a nanoparticle pressed sheet, a multimode optical fiber, or a diffraction optical array structure. The detection device scatters the light beam to be detected through the scattering medium to obtain the scattered light beam to be detected.

[0068] In step 1002, a detection device detects a first area of ​​a scattered light beam to be detected by a detector to obtain a first electrical signal.

[0069] The detection device includes a detector. The detector is also called a photodetector. The photosensitive surface of the detector is located on a first plane. The size of the light spot of the scattered light beam to be detected on the first plane is larger than the size of the photosensitive surface. The photosensitive surface is inside the light spot. The area where the photosensitive surface is located corresponds to the first area of ​​the light spot and also corresponds to the first area of ​​the scattered light beam to be detected. The detection device detects the first area of ​​the scattered light beam to be detected through the detector to obtain a first electrical signal.

[0070] In step 1003, the detection device changes the output direction of the scattered light beam to be detected, so that the light spot of the scattered light beam to be detected moves relative to the photosensitive surface of the detector.

[0071] The detection device includes a light modulator. The light modulator can be a transmissive liquid crystal spatial light modulator, a reflective liquid crystal spatial light modulator, a digital micromirror based on MEMS technology and its array, a magneto-optical spatial light modulator, a rotating mirror system or an electro-optical microcavity array. The detection device changes the output direction of the scattered light beam to be detected through the light modulator, so that the light spot of the scattered light beam to be detected moves relative to the photosensitive surface of the detector. For example, at the first moment, the photosensitive surface is located at the position 1 of the light spot; at the second moment, the photosensitive surface is located at the position 2 of the light spot.

[0072] In step 1004, the detection device detects the second area of ​​the scattered light beam to be detected through a detector to obtain a second electrical signal.

[0073] After the light spot moves relative to the photosensitive surface of the detector, the area where the photosensitive surface is located corresponds to the second area of ​​the light spot and also corresponds to the second area of ​​the scattered light beam to be detected. The detection device detects the second area of ​​the scattered light beam to be detected through the detector to obtain a second electrical signal.

[0074] In step 1005, the detection device obtains relevant information of the light beam to be detected according to the first electrical signal and the second electrical signal.

[0075] The detection device can obtain relevant information of the light beam to be detected based on the weight matrix of the scattering medium and the multi-channel electrical signal. For example, the weight matrix includes m rows and n columns. The weight matrix includes m×n values. m and n are integers greater than 0. The scattering medium includes m scattering areas. Each scattering area of ​​the m scattering areas corresponds to a row of values ​​in the weight matrix. The value corresponding to each scattering area depends on the physical properties of the scattering medium in the scattering area. Alternatively, the target scattering area of ​​the scattering medium corresponds to m different incident angles. Each of the m different incident angles corresponds to a row of values ​​in the weight matrix. The value corresponding to each incident angle depends on the physical properties of the target scattering area. The weight matrix can be obtained by measurement. The embodiment of the present application does not limit the way in which the detection device obtains the weight matrix. The relevant information of the light beam to be detected is the n energy intensities of the light beam to be detected at n wavelengths. The n energy intensities correspond to the n wavelengths one-to-one. Alternatively, the relevant information of the light beam to be detected is the correspondence between the n energy intensities and the n wavelengths.

[0076] It should be understood that Fig.10 The detection method and the aforementioned Figures 1 to 9 There are similarities between the descriptions of the detection equipment in any of the figures. Fig.10 For a description of the detection method, please refer to the aforementioned Figures 1 to 9 The description of the detection device in any of the figures in FIG. For example, the first area and the second area include an overlapping area. The detection method further includes the following steps: the detection device adjusts the size of the overlapping area according to the value of h. For another example, the detection device adjusts the focuser according to the value of h to change the size of the light spot of the scattered light beam to be detected.

[0077] The above are only specific implementation methods of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered by the protection scope of the present application.

Claims

1. A detection device, characterized in that: The invention comprises an optical coupler, a scattering element, a detector and a processor, wherein: The optical coupler is used to receive the light beam to be detected and couple the light beam to be detected to the scattering component; The scattering component is used to scatter the light beam to be detected, and output a plurality of scattered light beams to be detected to the detector at different angles, wherein the plurality of scattered light beams to be detected correspond to the plurality of angles one by one; The detector is used to detect multiple different regions in the multiple scattered light beams to be detected, obtain multiple electrical signals, and transmit the multiple electrical signals to the processor, wherein the multiple regions correspond to the multiple electrical signals one by one, and the multiple regions correspond to the multiple scattered light beams to be detected one by one; The processor is used to calculate the multiple electrical signals to obtain relevant information of the light beam to be detected.

2. The detection device according to claim 1, characterized in that: The scattering component comprises a scattering medium and a light modulator, wherein: The scattering medium is used to receive the light beam to be detected from the optical coupler, scatter the light beam to be detected, and make the scattered light beam to be detected incident on the optical modulator; The light modulator is used to output a plurality of scattered light beams to be detected to the detector at different angles.

3. The detection device according to claim 1, characterized in that: The scattering component comprises a light modulator and a scattering medium, wherein: The optical modulator is used to receive the light beam to be detected from the optical coupler, and output a plurality of light beams to be detected to the scattering medium at different angles; The scattering medium is used to scatter the multiple light beams to be detected to obtain multiple scattered light beams to be detected, and the multiple scattered light beams to be detected are incident on the detector, and the multiple light beams to be detected and the multiple scattered light beams to be detected correspond one to one.

4. The detection device according to any one of claims 1 to 3, characterized in that: The detector is a linear array detector, and the light modulator is a one-dimensional light modulator.

5. The detection device according to claim 4, characterized in that: The photosensitive surface of the detector is located on a first plane, and a difference between a first width of a light spot of the scattered light beam to be detected irradiated on the first plane and a second width of the photosensitive surface is less than or equal to 50 percent of the first width.

6. The detection device according to any one of claims 1 to 5, characterized in that: The plurality of regions include a first region and a second region, and the first region and the second region include an overlapping region.

7. The detection device according to claim 6, characterized in that: The area of ​​the overlapping region is less than or equal to 90 percent of the area of ​​the first region.

8. The detection device according to any one of claims 1 to 7, characterized in that: The detection device further comprises a focuser, which is located on the light transmission path between the scattering component and the detector, wherein: The focus adjuster is used to change the focal length of the scattered light beam to be detected.

9. The detection device according to any one of claims 1 to 8, characterized in that: The detection device further comprises a mask, which is located on the light transmission path between the scattering component and the detector.

10. The detection device according to any one of claims 1 to 4 and 6 to 9, characterized in that: The photosensitive surface of the detector is located in a first plane, and the ratio of the size of the light spot of the scattered light beam to be detected irradiating the first plane to the size of the photosensitive surface is between 1000 and 1000000.

11. The detection device according to any one of claims 1 to 10, characterized in that: The detection device also includes a temperature controller, wherein: The temperature controller is used to maintain the temperature of the scattering medium within a target range.

12. The detection device according to any one of claims 1 to 11, characterized in that: The detection device further comprises a first seismic isolator and a second seismic isolator, wherein: The first seismic isolator is used to reduce the vibration of the scattering medium; The second seismic isolator is used to reduce the vibration of the optical modulator.

13. A detection method, characterized in that: include: Scattering the light beam to be detected to obtain the scattered light beam to be detected; Detecting the first area of ​​the light beam to be detected after scattering by a detector to obtain a first electrical signal; Changing the output direction of the scattered light beam to be detected so that the light spot of the scattered light beam to be detected moves relative to the photosensitive surface of the detector; Detecting a second area of ​​the light beam to be detected after scattering by the detector to obtain a second electrical signal; The relevant information of the light beam to be detected is obtained according to the first electrical signal and the second electrical signal.

14. The detection method according to claim 13, characterized in that: The first region and the second region include an overlapping region; The obtaining the relevant information of the light beam to be detected according to the first electrical signal and the second electrical signal comprises: obtaining the relevant information of the light beam to be detected according to h electrical signals, the h electrical signals comprising the first electrical signal and the second electrical signal, where h is an integer greater than or equal to 2; The method further comprises: The size of the overlapping region is adjusted according to the value of h.

15. The detection method according to claim 13 or 14, characterized in that: The obtaining the relevant information of the light beam to be detected according to the first electrical signal and the second electrical signal comprises: obtaining the relevant information of the light beam to be detected according to h electrical signals, the h electrical signals comprising the first electrical signal and the second electrical signal, where h is an integer greater than or equal to 2; The method further comprises: The size of the light spot of the light beam to be detected after scattering is adjusted according to the value of h.

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