Spectroscopic analysis device and spectroscopic analysis method

Abstract

The invention relates to a spectroscopic analysis apparatus and a spectroscopic analysis method. A spectroscopic analysis device (1) according to the present invention is provided with: an irradiation unit (10) that irradiates an object to be measured with irradiation light; a light receiving unit (40) that receives reflected light from the object to be measured on the basis of the irradiation light; and a control unit (80) for analyzing the optical characteristics of the object to be measured on the basis of the reflected light, the control unit (80) acquiring environmental information of a measurement environment including an observation window (W) that guides the irradiation light toward the object to be measured, and correcting a parameter indicating the optical characteristics on the basis of the environmental information.

Description

[0001] Cross-references of related applications

[0002] This application claims the benefit of priority based on Japanese Patent Application No. 2023-139270 filed in Japan on August 29, 2023, the disclosure of which is hereby incorporated by reference in its entirety. Technical Field

[0003] The present invention relates to a spectroscopic analysis device and a spectroscopic analysis method. Background Art

[0004] Currently, there are known technologies for analyzing the optical characteristics of an object to be measured. For example, Patent Document 1 discloses a reflectance correction method for a reflectometer or a reflection concentration meter, which achieves high-precision measurement in a short time without stabilizing the irradiation output based on feedback control, and does not increase the cost or enlarge the measuring device due to stabilizing the irradiation output.

[0005] Patent Document 1: Japanese Patent No. 5540354

[0006] However, in the prior art, an optical system is assumed in which irradiation light from a light source is directly irradiated onto the object to be measured, and the influence of an observation window for guiding irradiation light to the object to be measured is not considered when analyzing the optical characteristics of the object to be measured. Summary of the invention

[0007] An object of the present invention is to provide a spectroscopic analysis device and a spectroscopic analysis method capable of more accurately analyzing optical characteristics of an object to be measured by taking the influence of an observation window into consideration.

[0008] Several embodiments involve a spectroscopic analysis device comprising: an irradiation unit that irradiates irradiation light to an object to be measured; a light receiving unit that receives reflected light from the object to be measured based on the irradiation light; and a control unit that analyzes the optical characteristics of the object to be measured based on the reflected light, the control unit obtaining environmental information of a measurement environment including an observation window that guides the irradiation light to the object to be measured, and correcting parameters representing the optical characteristics based on the environmental information.

[0009] Thus, the spectroscopic analysis device can analyze the optical characteristics of the object to be measured more accurately by taking into account the influence of the observation window. The spectroscopic analysis device obtains environmental information of the measurement environment including the observation window that guides the irradiated light to the object to be measured, and corrects the parameters representing the optical characteristics based on the environmental information, thereby being able to obtain the parameters representing the optical characteristics of the object to be measured in a state where the influence of the observation window is eliminated. Even if the reference material and the object to be measured are measured at different positions, the spectroscopic analysis device can correct the parameters representing the optical characteristics of the object to be measured to the correct value.

[0010] In the spectroscopic analysis device according to one embodiment, the control unit may construct a conversion model for correcting the parameter in the measurement environment to the parameter in a reference environment that does not pass through the observation window.

[0011] Thus, even if the reference substance and the object to be measured are measured at different positions, the spectroscopic analysis device can convert the parameters representing the optical characteristics of the object to be measured into correct values. As a result, it is possible to accurately perform the conversion from, for example, the reflectance of light obtained as an optical characteristic to other physical quantities. For example, absorbance conversion and Kubel-Munk conversion can be accurately performed.

[0012] In one embodiment of the spectroscopic analysis device, the control unit may construct the transformation model using at least one reference substance. Thus, the spectroscopic analysis device can improve the accuracy of the correction of the parameters representing the optical characteristics of the measured object based on the transformation model. The spectroscopic analysis device can more accurately correct the parameters representing the optical characteristics of the measured object obtained under the measurement environment to the parameters representing the optical characteristics under the reference environment.

[0013] In the spectroscopic analysis device according to one embodiment, the control unit may construct the conversion model using three or more reference substances having mutually different optical characteristics.

[0014] Thus, when the parameters representing the optical characteristics of the measured object are corrected using the transformation model, the spectroscopic analysis device can also correct the nonlinear relationship with respect to the optical characteristics. Therefore, the spectroscopic analysis device can improve the correction accuracy related to the parameters representing the optical characteristics of the measured object. For example, in the case where the optical characteristics under the reference environment are nonlinear with respect to the optical characteristics under the measurement environment, the accuracy of the correction related to the parameters representing the optical characteristics of the measured object can be expected to be improved by increasing the number of reference materials. The accuracy of the constructed transformation model is improved by measuring a wide range of multiple reference materials with various reflectance values.

[0015] In one embodiment of the spectroscopic analysis device, the control unit may construct the transformation model as a regression model by setting the parameter of the reference substance under the measurement environment as an explanatory variable and the parameter of the reference substance under the reference environment as a target variable. Thus, the spectroscopic analysis device can easily construct a transformation model having a function of transforming the parameter representing the optical characteristics of the object to be measured under the measurement environment into the parameter representing the optical characteristics of the object to be measured under the reference environment.

[0016] In one embodiment of the spectroscopic analysis device, the control unit may determine the correction coefficient corresponding to the environmental information when constructing the conversion model. Thus, the spectroscopic analysis device can perform a correction process when converting the parameters representing the optical characteristics of the object under the measurement environment into the parameters representing the optical characteristics of the object under the reference environment using a simpler calculation formula.

[0017] In the spectroscopic analysis device according to one embodiment, the control unit may refer to the transformation model associated with the observation window from among the transformation models constructed for each type of the observation window to calibrate the parameter of the object to be measured.

[0018] Thus, the spectroscopic analysis device can more accurately calibrate the parameters representing the optical characteristics of the object to be measured according to the observation window used in real time when measuring the optical characteristics of the object to be measured. The spectroscopic analysis device can more accurately calibrate the parameters representing the optical characteristics of the object to be measured using the optimal transformation model corresponding to the currently used observation window.

[0019] In the spectroscopic analysis device according to one embodiment, when evaluating the conversion model, the control unit may notify a user that the conversion model is updated if it is determined that the evaluation index of the conversion model has reached a threshold value.

[0020] Thus, for example, when the parameter representing the corrected optical characteristic of the measured object still shows an abnormal value and the transformation model does not function accurately, the spectroscopic analysis device can prompt the user to reconstruct the transformation model. The user can also cause the spectroscopic analysis device to re-execute a series of processes related to the construction of the transformation model in a manner of updating the transformation model with lower accuracy to the transformation model with higher accuracy.

[0021] In the spectroscopic analysis device according to one embodiment, the control unit may execute a process of updating the conversion model. Thus, the spectroscopic analysis device can maintain the accuracy of the conversion model at a high level.

[0022] Several embodiments involve a spectroscopic analysis method that includes the following steps: irradiating an object to be measured with irradiation light; receiving reflected light from the object to be measured based on the irradiation light; and analyzing optical properties of the object to be measured based on the reflected light. In the step of analyzing the optical properties, parameters representing the optical properties are corrected based on environmental information of a measurement environment including an observation window that guides the irradiation light to the object to be measured.

[0023] Thus, the spectroscopic analysis device that performs the spectroscopic analysis method can analyze the optical characteristics of the object to be measured more accurately by taking into account the influence of the observation window. The spectroscopic analysis device obtains environmental information of the measurement environment including the observation window that guides the irradiated light to the object to be measured, and corrects the parameters representing the optical characteristics based on the environmental information, thereby being able to obtain the parameters representing the optical characteristics of the object to be measured in a state where the influence of the observation window is eliminated. Even if the reference material and the object to be measured are measured at different positions, the spectroscopic analysis device can correct the parameters representing the optical characteristics of the object to be measured to the correct value.

[0024] Effects of the Invention

[0025] According to the present invention, it is possible to provide a spectroscopic analysis device and a spectroscopic analysis method capable of more accurately analyzing the optical characteristics of a measurement object by taking the influence of an observation window into consideration. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram showing an example of the structure of a spectroscopic analysis device according to one embodiment of the present invention.

[0027] Figure 2 Yes Figure 1 A flowchart for explaining a first example of the operation of the spectroscopic analysis device.

[0028] Figure 3 Yes Figure 1 A flowchart for explaining a second example of the operation of the spectroscopic analysis device.

[0029] Figure 4 Yes Figure 1 A flowchart for explaining a third example of the operation of the spectroscopic analysis device.

[0030] Figure 5 Yes Figure 1 A flowchart for explaining a fourth example of the operation of the spectroscopic analysis device.

[0031] Figure 6 This is a schematic diagram showing an example of the optical characteristics of a reference substance.

[0032] Figure 7 It is a schematic diagram showing an example of the optical characteristics of the object to be measured.

[0033] Figure 8 This is a schematic diagram showing an example of the absorbance of the object to be measured. DETAILED DESCRIPTION

[0034] The background and problems of the prior art are described in more detail.

[0035] In the reflectivity and reflection concentration measurement method with a correction function described in Patent Document 1, two types of correction reflectivity reference plates with known reflectivity are used. The IS characteristics of the reflected light sensor output value S corresponding to the respective irradiation light amounts I are measured in advance. The relationship between the a and b values ​​and the variable factor of the relationship S = aR + b is understood, and the Ia, b characteristics and Sa, b characteristics as their causal relationship are stored in a memory. During calibration, the irradiation light amount I0 at this time is detected, and the accurate a and b values ​​during calibration based on the two types of correction reflectivity reference plates are determined based on its value and the stored causal relationship. Thus, the relationship S = aR + b is established.

[0036] Next, the reflected light amount sensor output value S of the measured object is measured. The reflectance R is calculated using the reflectance R formula R = S / ab / a. Alternatively, the reflectance R value is used to calculate the reflection density D = -log 10 R is calculated.

[0037] However, in the prior art described in Patent Document 1, an optical system is envisioned in which the irradiation light from the light source is directly irradiated onto the object to be measured. In this prior art, when analyzing the optical characteristics of the object to be measured, the influence of the observation window for guiding the irradiation light from the light source to the object to be measured arranged inside the sample chamber is not considered. Furthermore, the situation of using different observation windows and changing the measurement environment such as the material and thickness of the observation windows is not envisioned.

[0038] In the above-mentioned prior art, a linear relationship S=aR+b is established between the reflectivity R and the reflected light sensor output value S, but when it is necessary to correct the nonlinear relationship with respect to the reflectivity R, it is necessary to use three or more reflectivity reference plates. Furthermore, in the above-mentioned prior art, the wavelength dependency of light is not considered in the correction formula.

[0039] Hereinafter, one embodiment of the present invention will be mainly described with reference to the drawings.

[0040] Figure 1 1 is a schematic diagram showing an example of the structure of a spectroscopic analysis device 1 according to an embodiment of the present invention. Figure 1 An example of the structure and function of the spectroscopic analysis device 1 will be mainly described.

[0041] A spectroscopic analysis device 1 according to one embodiment analyzes the optical characteristics of an object to be measured arranged inside a sample chamber S. More specifically, the spectroscopic analysis device 1 irradiates the object to be measured with irradiation light through an observation window W provided in the sample chamber S. The spectroscopic analysis device 1 receives reflected light from the object to be measured based on the irradiation light. The spectroscopic analysis device 1 analyzes the optical characteristics of the object to be measured based on the received reflected light.

[0042] In the present invention, the "sample chamber S" includes, for example, any space having the function of storing or transporting the object to be measured. The sample chamber S is composed of a container and a pipe, etc. The "observation window W" includes, for example, any window having the function of transmitting light at the wavelength of the irradiation light used so that the spectroscopic analysis device 1 can use light to analyze the optical characteristics of the object to be measured arranged inside the sample chamber S. The observation window W is formed of materials such as acrylic resin, glass, sapphire and diamond. In order to fully improve the impact resistance and pressure resistance, etc., the observation window W can have a thickness greater than or equal to 10 mm.

[0043] The "object to be measured" includes any object such as a solid, a liquid, and a slurry. For example, when the spectroscopic analysis device 1 analyzes the optical characteristics of the object to be measured using the diffuse reflection method, the object to be measured includes an object that produces diffuse reflection. The "optical characteristics" include the wavelength dependence of the reflectivity of light, etc. As an example, the spectroscopic analysis device 1 analyzes the reflectivity spectrum of the light of the object to be measured based on the diffuse reflection method.

[0044] The spectroscopic analysis device 1 includes an irradiation unit 10 , a light guiding unit 20 , a light focusing unit 30 , a light receiving unit 40 , a storage unit 50 , an input unit 60 , an output unit 70 , and a control unit 80 .

[0045] The irradiation unit 10 has a light source such as a lamp, a light emitting diode (LED), and a semiconductor laser. The lamp includes a halogen lamp, an incandescent lamp, and a xenon lamp. The irradiation unit 10 irradiates the object to be measured with irradiation light having a wavelength corresponding to the optical characteristics of the object to be analyzed by the spectroscopic analysis device 1. The wavelength of the irradiation light irradiated by the irradiation unit 10 includes, for example, a wavelength at which the irradiation light is reflected by the object to be measured. The wavelength of the irradiation light includes, for example, an ultraviolet region, a visible region, a near infrared region, and other infrared regions.

[0046] The light guide unit 20 includes any optical element for guiding light. The optical element includes an optical fiber, an optical coupler, and a reflector. The light guide unit 20 guides the irradiated light irradiated from the light source of the irradiation unit 10 to the light focusing unit 30. The light guide unit 20 guides the irradiated light to the object to be measured arranged inside the sample chamber S via the light focusing unit 30 and the observation window W. The light guide unit 20 receives the reflected light from the object to be measured arranged inside the sample chamber S via the observation window W and the light focusing unit 30. The light guide unit 20 guides the received reflected light from the object to be measured to the light receiving unit 40. The light guide unit 20 has the function of guiding the irradiated light from the irradiation unit 10 to the object to be measured, and the function of guiding the reflected light from the object to be measured to the light receiving unit 40.

[0047] The light focusing unit 30 includes any optical element for focusing light. The optical element includes an optical lens, an integrating sphere, and the like. The light focusing unit 30 focuses the irradiation light from the irradiation unit 10 guided by the light guide unit 20 and efficiently irradiates the object to be measured arranged inside the sample chamber S. The light focusing unit 30 efficiently focuses the reflected light from the object to be measured, which is emitted from the sample chamber S through the observation window W, on the light guide unit 20.

[0048] The light receiving unit 40 has a photodetector including a photoreceiving element such as a photodiode. The light receiving unit 40 receives reflected light based on the irradiation light irradiated to the object to be measured by the irradiation unit 10, and the reflected light is the reflected light showing the optical characteristics of the object to be measured. The photodetector of the light receiving unit 40 receives the reflected light from the object to be measured guided by the focusing unit 30 and the light guiding unit 20, converts it into an electrical signal, and outputs it to the control unit 80 and the like. The wavelength band that can be received by the photodetector of the light receiving unit 40 includes the wavelength band of the reflected light. The photodetector of the light receiving unit 40 has detection sensitivity for the wavelength of the reflected light. The light receiving unit 40 has a function of detecting the intensity of the reflected light. On this basis, the light receiving unit 40 can also have a spectroscopic function such as a diffraction grating, an interferometer, and a filter.

[0049] The storage unit 50 includes storage devices such as HDD (Hard Disk Drive), SSD (Solid State Drive), EEPROM (Electrically Erasable Programmable Read-Only Memory), ROM (Read-Only Memory), and RAM (Random Access Memory). The storage unit 50 stores information required to realize the operation of the spectroscopic analysis device 1. The storage unit 50 stores information obtained by the operation of the spectroscopic analysis device 1. For example, the storage unit 50 stores system programs, application programs, and various data obtained by any method such as communication.

[0050] The storage unit 50 can function as a main storage device, an auxiliary storage device, or a cache. The storage unit 50 is not limited to being built in the spectroscopic analysis device 1, and may include an external storage device connected to a digital input / output port such as a USB (Universal Serial Bus).

[0051] The input unit 60 includes one or more input interfaces for detecting user input and obtaining input information based on user operation. The input interface includes physical keys, capacitive keys, a touch screen integrated with the display of the output unit 70, a camera or other shooting component, and a microphone for receiving voice input.

[0052] The output unit 70 includes one or more output interfaces for outputting information and notifying the user. The output interface includes a display for outputting information in the form of images, a speaker for outputting information in the form of voice, and an oscillator for outputting information by vibration. The display includes an LCD (Liquid Crystal Display) and an organic EL (Electro Luminescence) display.

[0053] The control unit 80 includes more than or equal to 1 processor. In the present invention, the "processor" is a general-purpose processor or a dedicated processor that performs a special processing, but is not limited to this. The control unit 80 includes, for example, a CPU (Central Processing Unit). The control unit 80 is connected to each structural unit constituting the spectroscopic analysis device 1 in a communicative manner to control the operation of the entire spectroscopic analysis device 1. The control unit 80 analyzes the optical characteristics of the object to be measured based on the reflected light received by the light receiving unit 40. On the basis of this analysis processing, the control unit 80 also performs various calculation processing such as correction processing of parameters representing the optical characteristics described later.

[0054] Figure 2 Yes Figure 1 The flowchart for explaining the first example of the operation of the spectroscopic analysis device 1 is shown in FIG. Figure 2 Mainly for the use of Figure 1 An example of a spectroscopic analysis method performed by the spectroscopic analysis device 1 will be described. Figure 2 The flowchart shown shows an example of a basic processing flow when the control unit 80 of the spectroscopic analysis device 1 analyzes the optical characteristics of the object to be measured.

[0055] In step S101, the control unit 80 of the spectroscopic analysis device 1 acquires environmental information of a measurement environment including an observation window W that guides irradiation light from the irradiation unit 10 from the outside of the sample chamber S to the object to be measured inside. For example, the control unit 80 acquires the environmental information as input information input by a user using the input unit 60 of the spectroscopic analysis device 1.

[0056] In the present invention, "environmental information" includes the type of observation window W. Regarding the type of observation window W, for example, structures with different elements such as the surface roughness, thickness and composition of the observation window W are defined as different types. For example, the case where the operator marks 1, 2... and numbers on the observation windows W manufactured by the same manufacturer through the same manufacturing method is called a type. In addition, the environmental information may also include the focal length of the focusing unit 30, the wavelength of the irradiation light irradiated from the irradiation unit 10, and the measurement position of the object to be measured arranged inside the sample chamber S. The "measurement environment" includes, for example, the environment inside and around the sample chamber S where the object to be measured is placed when the spectroscopic analysis device 1 is to analyze the optical properties of the object to be measured.

[0057] In step S102 , the control unit 80 of the spectroscopic analysis device 1 controls the irradiation unit 10 so that the irradiation unit 10 irradiates the object to be measured with irradiation light.

[0058] In step S103 , the control unit 80 of the spectroscopic analysis device 1 causes the light receiving unit 40 to receive reflected light based on the irradiated light irradiated in step S102 and indicating the optical characteristics of the object to be measured.

[0059] In step S104, the control unit 80 of the spectroscopic analysis device 1 analyzes the optical characteristics of the object to be measured based on the reflected light received in step S103. In the step of analyzing the optical characteristics in step S104, the control unit 80 calibrates the parameters representing the optical characteristics of the object to be measured based on the environmental information acquired in step S101. For example, the control unit 80 refers to the parameters representing the optical characteristics of the object to be measured actually measured in the measurement environment. Figure 3 The parameters are corrected to represent the optical characteristics of the object to be measured in the reference environment without passing through the observation window W using the conversion model described later. In the present invention, the "reference environment" includes, for example, the environment outside the sample chamber S that is not affected by the measurement environment. The "parameter representing the optical characteristics" includes at least one of the values ​​of the reflectivity or absorbance of light for each wavelength or the reflected light power. The "reflected light power" includes, for example, the power of the light after it is reflected by a predetermined object.

[0060] Figure 3 Yes Figure 1 A flowchart for explaining a second example of the operation of the spectroscopic analysis device 1. Figure 3 The flowchart shown in the figure shows that before analyzing the optical characteristics of the object to be measured, a pre-built Figure 2 This is an example of a processing flow when the conversion model is used in the process of step S104.

[0061] In step S201 , the control unit 80 of the spectroscopic analysis device 1 uses the light receiving unit 40 to measure the first reflected light power P1 of the reference substance at the reference position.

[0062] In the present invention, the "reference position" includes, for example, a predetermined position under a reference environment. Figure 1 As shown, the reference position includes, for example, a position L1 between the focusing unit 30 of the spectroscopic analysis device 1 and the observation window W, and a position L2 on the outer surface of the observation window W located outside the sample chamber S. The "reference substance" includes any substance whose light reflectance is approximately 100%. The reference substance includes a standard white plate, barium sulfate, and a gold reflector that have a function of reflecting light at a high reflectance.

[0063] For example, the reference substance may be mounted on the front end of the observation window W side of the cylindrical outer frame that covers the optical path of the spectroscopic analysis device 1 from the front end of the light guide unit 20 to the light focusing unit 30 and arranged at the position L1, or may be mounted on any other optical bracket and arranged at the position L1. The reference substance may be fixed to the outer surface of the observation window W by any method and arranged at the position L2.

[0064] In step S202, the control unit 80 of the spectroscopic analysis device 1 measures the second reflected light power P2 of the reference material at the reference position using the light receiving unit 40. In the present invention, the "reference material" includes a material having a function of reflecting light at an arbitrary reflectivity. The reference material may include a solid object such as a standard reflector plate, or a fluid such as a liquid.

[0065] The control unit 80 measures the second reflected light power P2 for each of a plurality of reference materials having different optical characteristics. The plurality of reference materials include materials having various reflectivities in a manner including a range of reflectivities that can be achieved by the measured object, from a material that reflects light at a relatively high reflectivity to a material that hardly reflects light. As a method for measuring the second reflected light power P2 for a plurality of reference materials, a method can be considered in which a plurality of reference materials having different reflectivities are arranged on a disk, and the disk is rotated to change the reference materials located on the optical path.

[0066] In step S203, the control unit 80 of the spectroscopic analysis device 1 measures the third reflected light power P3 of the reference substance at the measurement position where the object to be measured is arranged inside the sample chamber S using the light receiving unit 40. When measuring the first reflected light power P1, the second reflected light power P2, and the third reflected light power P3, the control unit 80 adjusts the output of the irradiation unit 10 so that the light power of the irradiation light irradiated from the irradiation unit 10 immediately after being emitted from the light guide unit 20 is the same. In step S203, the same reference substances as those used in step S202 are used.

[0067] The processing of step S203 is performed using the sample chamber S and the observation window W before the measured object is stored or transported, or using a simulated measurement environment that simulates the arrangement of the sample chamber S and the observation window W when the measured object is stored or transported. For example, a solid object such as a standard reflector can be pressed against the observation window W inside the sample chamber S, or can be fixed by any method inside the sample chamber S to be separated from the observation window W, thereby arranging the reference substance at the measurement position. Alternatively, the reference substance can be arranged at the measurement position by filling the inside of the sample chamber S as a fluid such as a liquid.

[0068] The process of step S203 is executed according to the type of observation window W. That is, the process of step S203 is executed for each of the plurality of observation windows W when the analysis of the optical characteristics of the object to be measured is executed for a plurality of observation windows W having different characteristics.

[0069] In step S204 , the control unit 80 of the spectroscopic analysis device 1 constructs a conversion model for correcting the parameters representing the optical characteristics of the object under the measurement environment to the parameters representing the optical characteristics of the object under the reference environment without the observation window W.

[0070] For example, the control unit 80 constructs a transformation model using a plurality of reference substances having different optical properties used in step S202 and step S203. The control unit 80 constructs a transformation model using, for example, three or more reference substances. The control unit 80 constructs a transformation model as a regression model by setting a parameter representing the optical properties of the reference substance under the measurement environment as an explanatory variable and a parameter representing the optical properties of the reference substance under the reference environment as a target variable.

[0071] For example, the control unit 80 calculates the reflectivity P2 / P1 of the reference material at the reference position by dividing the second reflected light power P2 by the first reflected light power P1. The control unit 80 calculates the reflectivity P3 / P1 of the reference material at the measurement position by dividing the third reflected light power P3 by the first reflected light power P1. The control unit 80 constructs a transformation model for transforming the reflectivity P3 / P1 into the reflectivity P2 / P1. The control unit 80 sets the reflectivity P3 / P1 as an explanatory variable and the reflectivity P2 / P1 as a target variable to construct a transformation model such as a linear regression model and a nonlinear regression model.

[0072] The control unit 80 determines the correction coefficient according to the environmental information when constructing the transformation model. That is, the control unit 80 constructs the transformation model for each of the plurality of observation windows W and determines the correction coefficient according to the observation window W, similar to the process of step S203.

[0073] In step S205, the control unit 80 of the spectroscopic analysis device 1 stores the conversion model constructed in step S204 in the storage unit 50. The control unit 80 stores a database generated by associating the conversion model constructed for each type of observation window W with the corresponding observation window W in the storage unit 50.

[0074] Figure 4 Yes Figure 1 A flowchart for explaining a third example of the operation of the spectroscopic analysis device 1. Figure 4 The flowchart shown is for Figure 2 The process of step S104 of the flowchart shown is further subdivided and shown as an example.

[0075] In step S301, the control unit 80 of the spectroscopic analysis device 1 refers to the Figure 3 In step S205, the control unit 80 stores the database related to the transformation model in the storage unit 50. Figure 3 In the transformation model constructed for each type of observation window W in step S204, reference is made to Figure 2 The transformation model associated with the observation window W determined as environmental information by the user using the input unit 60 in step S101.

[0076] In step S302, the control unit 80 of the spectroscopic analysis device 1 calibrates the parameters representing the optical characteristics of the object to be measured using the transformation model referred to in step S301. Figure 3 The fourth reflected light power P4 of the object to be measured at the measurement position is measured by the light receiving unit 40 in the same measurement environment as the measurement environment used in step S203. The control unit 80 calculates the reflectivity P4 / P1 of the object to be measured at the measurement position by dividing the fourth reflected light power P4 by the first reflected light power P1. The first reflected light power P1 used here is not Figure 3 The values ​​are not values ​​measured in the conversion model construction process shown in the flowchart of FIG. 1 , but values ​​measured by the control unit 80 of the spectroscopic analysis device 1 using the reference substance at the reference position when analyzing the optical characteristics of the object to be measured.

[0077] The control unit 80 applies the conversion model referred to in step S301 to the reflectivity P4 / P1, and corrects it to a parameter representing the optical characteristics of the object to be measured in the reference environment without passing through the observation window W. For example, the control unit 80 applies a correction coefficient corresponding to the observation window W to the reflectivity P4 / P1, and corrects it to a parameter representing the optical characteristics of the object to be measured in the reference environment without passing through the observation window W.

[0078] Figure 5 Yes Figure 1 A flowchart for explaining a fourth example of the operation of the spectroscopic analysis device 1. Figure 5 The flowchart shown represents Figure 3 The processing flow of the evaluation association of the conversion model stored in the storage unit 50 in step S205 is as follows.

[0079] In step S401, the control unit 80 of the spectroscopic analysis device 1 determines Figure 3 The control unit 80 determines whether the evaluation index of the transformation model stored in the storage unit 50 in step S205 reaches the threshold. If it is determined that the evaluation index reaches the threshold, the control unit 80 executes the process of step S402. If it is determined that the evaluation index does not reach the threshold, the control unit 80 ends the process.

[0080] In the present invention, the “evaluation index” may include, for example, MSE (Mean Squared Error), RMSE (Root Mean Squared Error), MAE (Mean Absolute Error), and R 2 The indexes for evaluating the regression model, etc., may include the parameters themselves representing the optical characteristics of the object to be measured after correction using the transformation model.

[0081] In step S402, if it is determined in step S401 that the evaluation index has reached the threshold, the control unit 80 of the spectroscopic analysis device 1 notifies the user that the transformation model is updated. For example, the control unit 80 notifies the user through the output unit 70 that the transformation model with a low evaluation based on the evaluation index and a low accuracy is updated to a transformation model with a high accuracy. If the user confirms the notification output from the output unit 70, the spectroscopic analysis device 1 is caused to execute the transformation model based on the evaluation index again. Figure 3 A series of processes related to the construction of the conversion model shown in the flowchart shown in FIG.

[0082] Below, refer to Figures 6 to 8 According to Figure 3 An example of the optical properties of a reference material obtained when constructing a transformation model is described in the flowchart shown in FIG. Figure 4 The flowchart shown in the figure explains an example of the optical characteristics of the object to be measured before and after correction by the conversion model and the absorbance of the object to be measured corresponding thereto. Next, as an example of the optical characteristics, the wavelength dependence of the reflectance of light is shown.

[0083] Figure 6 This is a schematic diagram showing an example of the optical characteristics of a reference substance. Figure 6 Shown in accordance with Figure 3The flowchart shown is an example of the optical properties of the reference material obtained when constructing the transformation model. Figure 6 (a) shows the wavelength dependence of the reflectance (P2 / P1×100) of light at a reference position for a plurality of reference substances. Numbers 1 to 7 are given to the graphs corresponding to the plurality of reference substances, respectively. Figure 6 (b) shows the wavelength dependence of the light reflectance (P3 / P1×100) at the measurement position for various reference materials. Figure 6 The corresponding curve graph of (a) is also labeled with numbers 1 to 7.

[0084] Figure 7 It is a schematic diagram showing an example of the optical characteristics of the object to be measured. Figure 7 Shown in accordance with Figure 4 The flowchart shown is an example of the optical characteristics of the object to be measured before and after correction using the transformation model. Figure 7 (a) shows the wavelength dependence of the reflectance (P4 / P1×100) of light before correction using the transformation model. Figure 7 (b) shows the wavelength dependence of the reflectance of light after correction using the transformation model.

[0085] Figure 8 This is a schematic diagram showing an example of the absorbance of the object to be measured. Figure 8 (a) indicates that Figure 7 (a) The absorbance spectrum corresponding to the reflectance spectrum. Figure 8 (b) indicates that Figure 7 (b) The absorbance spectrum corresponding to the reflectance spectrum.

[0086] As described above, the reflectivity of light is calculated by dividing the fourth reflected light power P4 of the object to be measured by the first reflected light power P1 of the reference material whose reflectivity is known. At this time, if the reference material and the object to be measured are arranged at the same position, the same environment can be obtained. Therefore, a correct value can be obtained as the reflectivity of light.

[0087] However, it is not easy to place the reference material at the same position as the object to be measured after starting a process, sometimes accompanied by production line cleaning and production line disassembly. Therefore, as a regular calibration, it is necessary to measure the reference material at a position different from the object to be measured. For example, a situation is assumed in which the object to be measured is inside the sample chamber S and the reference material is at position L1 outside the sample chamber S.

[0088] At this time, the reflectance of the light of the object to be measured may not show a correct value due to the different environments such as the position of the focus of the light collecting unit 30 and the presence or absence of the observation window W. Figure 7As shown in (a), sometimes the light reflectance shows a value greater than or equal to 100%. As a result, sometimes the absorbance conversion and Kubel-Munk conversion are hindered and the correct value cannot be obtained. For example, Figure 8 As shown in (a), the absorbance of the measured object sometimes shows a negative value. Furthermore, if the observation window W is changed to a different structure to change the measurement environment, the reflectance spectrum obtained as the optical characteristics of the measured object will also change, so it is not easy to compare the measured values ​​related to the optical characteristics of the measured object.

[0089] As described above, when measuring the reference substance and the object to be measured, the environment including the optical path is different, which may cause abnormal values ​​of the spectrum of optical characteristics. Figure 3 The flowchart shown in the figure uses the transformation model constructed using the reference material to eliminate such abnormal values. Figure 3 In step S203, the sample chamber S and the observation window W before the measured object is stored or transported are used, or a simulated measurement environment is used that simulates the arrangement of the sample chamber S and the observation window W when the measured object is stored or transported. Different parts of the environment are corrected based on the above-mentioned transformation model, thereby obtaining the correct value of the spectrum of the optical characteristic.

[0090] For example, you will have Figure 6 A variety of reference materials with various optical properties are used to construct the transformation model. Figure 6 As shown in (a), when the optical properties of the reference material are measured at the same reference position as the reference material, the reflectance of light shows a correct value. Figure 6 As shown in (b), when the optical properties of the reference material are measured at a measurement position different from the reference position, an abnormal value is generated for the same reason as described above. The control unit 80 of the spectroscopic analysis device 1 Figure 6 The reflectivity P3 / P1 shown in (b) is set as an explanatory variable, and Figure 6 The reflectance P2 / P1 shown in (a) is set as the target variable, and a transformation model such as a linear regression model and a nonlinear regression model is constructed.

[0091] If we use the constructed transformation model to represent Figure 7 The optical characteristics of the object to be measured are corrected by the parameters shown in (a). Figure 7 As shown in (b), the light reflectance shows a generally correct value of less than or equal to 100%. Figure 8 As shown in (b), the absorbance of the object to be measured becomes positive and shows a normal correct value.

[0092] According to the spectroscopic analysis device 1 involved in the above embodiment, the optical characteristics of the object to be measured can be analyzed more accurately by taking into account the influence of the observation window W. The spectroscopic analysis device 1 obtains environmental information of the measurement environment including the observation window W that guides the irradiation light to the object to be measured, and corrects the parameters representing the optical characteristics based on the environmental information, thereby being able to obtain the parameters representing the optical characteristics of the object to be measured while eliminating the influence of the observation window W. Even if the spectroscopic analysis device 1 measures the reference substance and the object to be measured at different positions, the parameters representing the optical characteristics of the object to be measured can be corrected to correct values.

[0093] Furthermore, even when the optical characteristics of the object to be measured are measured by changing the measurement environment such as the observation window W, the spectroscopic analysis device 1 can correct the signal value obtained for the optical characteristics under each different measurement environment and make it match the reference environment. Therefore, the spectroscopic analysis device 1 can easily compare signal values ​​that are difficult to compare due to different measurement environments as signal values ​​under the same reference environment.

[0094] The spectroscopic analysis device 1 constructs a conversion model for correcting the parameters representing the optical characteristics of the object to be measured under the measurement environment to the parameters representing the optical characteristics under the reference environment not passing through the observation window W. Thus, even if the reference substance and the object to be measured are measured at different positions, the spectroscopic analysis device 1 can convert the parameters representing the optical characteristics of the object to be measured to the correct values. As a result, it is possible to accurately perform the conversion from the reflectance of light obtained as an optical characteristic to other physical quantities. For example, absorbance conversion and Kubel-Munk conversion can be accurately performed.

[0095] The spectroscopic analysis device 1 constructs a transformation model using at least one reference substance, thereby improving the accuracy of calibrating the parameters representing the optical characteristics of the object to be measured based on the transformation model. The spectroscopic analysis device 1 can accurately calibrate the parameters representing the optical characteristics of the object to be measured obtained under the measurement environment using the parameters representing the optical characteristics under the reference environment.

[0096] The spectroscopic analysis device 1 constructs a transformation model using three or more reference materials having different optical characteristics, so that when the parameters representing the optical characteristics of the object to be measured are corrected using the transformation model, the nonlinear relationship with respect to the optical characteristics can also be corrected. As a result, the spectroscopic analysis device 1 can improve the correction accuracy related to the parameters representing the optical characteristics of the object to be measured. For example, in the case where the optical characteristics under the reference environment are nonlinear with respect to the optical characteristics under the measurement environment, the accuracy of the correction related to the parameters representing the optical characteristics of the object to be measured can be expected to be improved by increasing the number of reference materials. The accuracy of the constructed transformation model is improved by measuring a variety of reference materials having various reflectance values ​​over a wide range.

[0097] The spectroscopic analysis device 1 sets the parameters representing the optical characteristics of the reference substance under the measurement environment as explanatory variables and the parameters representing the optical characteristics of the reference substance under the reference environment as target variables, and constructs a transformation model as a regression model. Thus, the spectroscopic analysis device 1 can easily construct a transformation model having a function of transforming the parameters representing the optical characteristics of the object to be measured under the measurement environment into the parameters representing the optical characteristics of the object to be measured under the reference environment.

[0098] The spectroscopic analysis device 1 determines the correction coefficient according to the environmental information when constructing the conversion model. Thus, the spectroscopic analysis device 1 can perform the correction process when converting the parameters representing the optical characteristics of the object under the measurement environment into the parameters representing the optical characteristics of the object under the reference environment using simpler calculation formulas.

[0099] The spectroscopic analysis device 1 refers to the transformation model associated with the observation window W from among the transformation models constructed for each type of observation window W, and corrects the parameters representing the optical characteristics of the object to be measured. Thus, the spectroscopic analysis device 1 can correct the parameters representing the optical characteristics of the object to be measured more accurately in accordance with the observation window W used in real time when measuring the optical characteristics of the object to be measured. The spectroscopic analysis device 1 can correct the parameters representing the optical characteristics of the object to be measured more accurately using the optimal transformation model corresponding to the observation window W currently used.

[0100] If it is determined that the evaluation index of the transformation model reaches the threshold value, the spectroscopic analysis device 1 notifies the user that the transformation model is updated. Thus, for example, when the parameter representing the corrected optical characteristics of the measured object still shows an abnormal value and the transformation model does not function accurately, the spectroscopic analysis device 1 can urge the user to rebuild the transformation model. The user can also cause the spectroscopic analysis device 1 to execute a series of processes related to the construction of the transformation model again in a manner of updating a transformation model with lower accuracy to a transformation model with higher accuracy.

[0101] The spectroscopic analysis device 1 can maintain the accuracy of the transformation model well by executing the process of updating the transformation model. Furthermore, since the optical characteristics include the wavelength dependence of the reflectance of light, the spectroscopic analysis device 1 can form a correction formula for the wavelength dependence of the reflectance of light, and can improve the accuracy of the correction of the parameters representing the optical characteristics of the object to be measured.

[0102] The present invention can be implemented in other prescribed ways other than the above-mentioned embodiments without departing from its spirit or its essential features, which is obvious to those skilled in the art. Therefore, the previous description is illustrative and is not limited thereto. The disclosed scope is not defined by the previous description, but by the additional technical solutions. Several changes within the equivalent scope of all changes are included therein.

[0103] For example, the shape, pattern, size, arrangement, orientation, type, and number of the above-mentioned structural parts are not limited to the above-mentioned description and the illustrated contents in the drawings. The shape, pattern, size, arrangement, orientation, type, and number of the structural parts can be arbitrarily configured as long as they can achieve their functions. The structural elements of the illustrated spectroscopic analysis device 1 are functional concepts, and the specific forms of the structural elements are not limited to the illustrated forms.

[0104] The functions and the like included in each of the above-mentioned components or steps and the like can be rearranged in a theoretically non-contradictory manner, and a plurality of components or steps and the like can be combined into one or divided.

[0105] For example, a general-purpose electronic device such as a smartphone or a computer can also function as the spectroscopic analysis device 1 according to one embodiment described above. Specifically, a program describing the processing contents of each function of the spectroscopic analysis device 1 according to one embodiment is stored in a memory of the electronic device, and the program is read and executed by a processor of the electronic device. Therefore, the present invention can also be implemented as a program that can be executed by a processor.

[0106] Alternatively, the present invention may be implemented as a non-transitory computer-readable medium storing a program executable by one or more processors for causing the spectroscopic analysis device 1 according to one embodiment to perform various functions. It is understood that the scope of the present invention also includes these aspects.

[0107] In the above embodiment, the spectroscopic analysis device 1 constructs a transformation model for correcting the parameters representing the optical characteristics under the measurement environment to the parameters representing the optical characteristics under the reference environment not passing through the observation window W, but the present invention is not limited thereto. The spectroscopic analysis device 1 may perform the correction process of the parameters representing the optical characteristics of the object to be measured by any other method not based on the construction of the transformation model.

[0108] In the above embodiment, it is described that the spectroscopic analysis device 1 constructs a transformation model using a plurality of reference substances having different optical properties, but the present invention is not limited thereto. The spectroscopic analysis device 1 may construct a transformation model using only one reference substance. For example, if the optical properties of the reference substance can be changed by changing conditions such as temperature, the spectroscopic analysis device 1 may change the conditions and realize a plurality of different optical properties using only one reference substance.

[0109] In the above embodiment, the spectroscopic analysis device 1 constructs a transformation model using three or more reference substances having different optical characteristics, but the present invention is not limited thereto. The spectroscopic analysis device 1 may construct a transformation model using two reference substances having different optical characteristics.

[0110] In the above embodiment, the spectroscopic analysis device 1 uses the parameter representing the optical characteristics of the reference substance under the measurement environment as the explanatory variable and the parameter representing the optical characteristics of the reference substance under the reference environment as the target variable to construct the transformation model as a regression model, but the present invention is not limited thereto. The spectroscopic analysis device 1 may construct the transformation model as any other model based on machine learning or other statistical processing.

[0111] In the above embodiment, the spectroscopic analysis device 1 determines the correction coefficient according to the environmental information when constructing the transformation model, but the present invention is not limited thereto. The spectroscopic analysis device 1 may perform calibration processing of the parameters representing the optical characteristics of the object to be measured based on any other calibration formula different from the calibration formula using the correction coefficient.

[0112] In the above-mentioned embodiment, it is described that the spectroscopic analysis device 1 refers to the transformation model associated with the observation window W from the transformation model constructed for each type of the observation window W to calibrate the parameters representing the optical characteristics of the object to be measured, but it is not limited to this. The spectroscopic analysis device 1 can automatically determine the observation window W and refer to the optimal transformation model by any other method instead of the input information from the user using the input unit 60 or on this basis. The spectroscopic analysis device 1 may not originally generate a database that associates the transformation model constructed for each type of the observation window W and the corresponding observation window W with each other. In this case, the spectroscopic analysis device 1 can perform the correction processing of the parameters representing the optical characteristics of the object to be measured using the same transformation model without depending on the observation window W.

[0113] In the above embodiment, it is described that if it is determined that the evaluation index of the transformation model reaches the threshold, the spectroscopic analysis device 1 notifies the user to update the transformation model, but the present invention is not limited to this. The spectroscopic analysis device 1 may not perform such determination processing and notification processing. Accordingly, the spectroscopic analysis device 1 may not perform the processing of updating the transformation model.

[0114] In the above-mentioned embodiment, it is described that the optical characteristics include the wavelength dependence of the reflectivity of light, but it is not limited to this. The optical characteristics may also include the reflectivity of light of a specific wavelength instead of the wavelength dependence, such as the reflectivity spectrum. The optical characteristics may replace the characteristics related to the reflection of light or include any other characteristics related to the absorption, transmission, and scattering of light on this basis. For example, the optical characteristics may include the wavelength dependence of the absorptivity, transmittance, and scattering coefficient of light, and may also include the absorptivity, transmittance, and scattering coefficient of light of a specific wavelength.

[0115] In the above-mentioned embodiment, it is described that the spectroscopic analysis device 1 obtains the environmental information as input information input by the user using the input unit 60, but it is not limited to this. The spectroscopic analysis device 1 can obtain the environmental information by any other method. For example, the spectroscopic analysis device 1 obtains the product model name of the optical probe including the focusing unit 30 installed in the light guide unit 20 through the input from the user using the input unit 60 as information. Based on the obtained product model name, the spectroscopic analysis device 1 can refer to the product information of the corresponding optical probe pre-stored in the storage unit 50 and obtain the environmental information based on the product information. Alternatively, the spectroscopic analysis device 1 can obtain the product information of the corresponding optical probe through any method such as communication based on the obtained product model name, and obtain the environmental information based on the product information.

[0116] In the above embodiment, the reference position includes, for example, the position L1 between the light focusing unit 30 of the spectroscopic analysis device 1 and the observation window W and the position L2 on the outer surface of the observation window W outside the sample chamber S, but the present invention is not limited thereto. The reference position may include any other position where the light guide unit 20 branches the optical path of the irradiation light so that a part of the irradiation light can reach.

[0117] In the above-mentioned embodiment, the spectroscopic analysis device 1 is described as executing Figure 3 The process of step S202 in the flowchart shown is not limited thereto. When the reflectance of light of the reference substance is known, the spectroscopic analysis device 1 may omit the process of step S202 and construct a transformation model using the known reflectance as a target variable.

[0118] In the above embodiment, the spectroscopic analysis device 1 constructs a conversion model for converting the reflectance P3 / P1 to the reflectance P2 / P1, but the present invention is not limited thereto. The spectroscopic analysis device 1 may construct a conversion model for converting the third reflected light power P3 to the second reflected light power P2.

[0119] The following is an example of a part of the embodiment of the present invention, but it should be noted that the embodiment of the present invention is not limited thereto.

[0120] [Note 1]

[0121] A spectroscopic analysis device, wherein:

[0122] The spectroscopic analysis device comprises:

[0123] an irradiation unit for irradiating an object to be measured with irradiation light;

[0124] a light receiving unit that receives reflected light from the object to be measured based on the irradiated light; and

[0125] a control unit that analyzes the optical characteristics of the object to be measured based on the reflected light,

[0126] The control unit acquires environmental information of a measurement environment including an observation window that guides the irradiation light to the object to be measured, and corrects the parameter representing the optical characteristic based on the environmental information.

[0127] [Note 2]

[0128] The spectroscopic analysis device according to Appendix 1, wherein:

[0129] The control unit constructs a conversion model for correcting the parameters in the measurement environment to the parameters in a reference environment that does not pass through the observation window.

[0130] [Note 3]

[0131] The spectroscopic analysis device according to Appendix 2, wherein:

[0132] The control unit constructs the conversion model using at least one reference substance.

[0133] [Note 4]

[0134] The spectroscopic analysis device according to Appendix 3, wherein:

[0135] The control unit constructs the conversion model using three or more reference substances having mutually different optical properties.

[0136] [Note 5]

[0137] The spectroscopic analysis device according to Appendix 3 or 4, wherein:

[0138] The control unit constructs the transformation model as a regression model by using the parameter of the reference substance under the measurement environment as an explanatory variable and the parameter of the reference substance under the reference environment as a target variable.

[0139] [Note 6]

[0140] The spectroscopic analysis device according to any one of Supplementary Notes 2 to 5, wherein:

[0141] The control unit determines a correction coefficient according to the environmental information when constructing the conversion model.

[0142] [Note 7]

[0143] The spectroscopic analysis device according to any one of Supplementary Notes 2 to 6, wherein:

[0144] The control unit calibrates the parameter of the object to be measured by referring to the transformation model associated with the observation window from among the transformation models constructed for each type of the observation window.

[0145] [Note 8]

[0146] The spectroscopic analysis device according to any one of Supplementary Notes 2 to 7, wherein:

[0147] When evaluating the conversion model, the control unit notifies a user that the conversion model is updated if it is determined that the evaluation index of the conversion model reaches a threshold value.

[0148] [Note 9]

[0149] The spectroscopic analysis device according to Supplementary Note 8, wherein:

[0150] The control unit executes a process of updating the conversion model.

[0151] [Note 10]

[0152] A spectroscopic analysis method, wherein:

[0153] The spectroscopic analysis method comprises the following steps:

[0154] irradiating the irradiation light to the object to be measured;

[0155] receiving reflected light from the object to be measured based on the irradiated light; and

[0156] analyzing the optical characteristics of the object to be measured based on the reflected light,

[0157] In the step of analyzing the optical characteristics, a parameter representing the optical characteristics is corrected based on environmental information of a measurement environment including an observation window that guides the irradiation light to the object to be measured.

[0158] Description of the label

[0159] 1 Spectroscopic analysis device

[0160] 10 Irradiation Department

[0161] 20 Light guide

[0162] 30 Spotlight Department

[0163] 40 Light receiving part

[0164] 50 Storage

[0165] 60 Input section

[0166] 70 Output

[0167] 80 Control Department

[0168] L1 Position

[0169] L2 Position

[0170] P1 1st reflected light power

[0171] P2 Second reflected light power

[0172] P3 The third reflected light power

[0173] P4 4th reflected light power

[0174] S Sample Room

[0175] W Observation Window

Claims

1. A spectroscopic analysis device, wherein: The spectroscopic analysis device comprises: an irradiation unit for irradiating an object to be measured with irradiation light; a light receiving unit that receives reflected light from the object to be measured based on the irradiated light; as well as a control unit that analyzes the optical characteristics of the object to be measured based on the reflected light, The control unit acquires environmental information of a measurement environment including an observation window that guides the irradiation light to the object to be measured, and corrects the parameter representing the optical characteristic based on the environmental information.

2. The spectroscopic analysis device according to claim 1, wherein: The control unit constructs a conversion model for correcting the parameters in the measurement environment to the parameters in a reference environment that does not pass through the observation window.

3. The spectroscopic analysis device according to claim 2, wherein: The control unit constructs the conversion model using at least one reference substance.

4. The spectroscopic analysis device according to claim 3, wherein: The control unit constructs the conversion model using three or more reference substances having mutually different optical properties.

5. The spectroscopic analysis device according to claim 3 or 4, wherein: The control unit constructs the transformation model as a regression model by using the parameter of the reference substance under the measurement environment as an explanatory variable and the parameter of the reference substance under the reference environment as a target variable.

6. The spectroscopic analysis device according to any one of claims 2 to 4, wherein: The control unit determines a correction coefficient according to the environmental information when constructing the conversion model.

7. The spectroscopic analysis device according to any one of claims 2 to 4, wherein: The control unit calibrates the parameter of the object to be measured by referring to the transformation model associated with the observation window from among the transformation models constructed for each type of the observation window.

8. The spectroscopic analysis device according to any one of claims 2 to 4, wherein: When evaluating the conversion model, the control unit notifies a user that the conversion model is updated if it is determined that the evaluation index of the conversion model reaches a threshold value.

9. The spectroscopic analysis device according to claim 8, wherein: The control unit executes a process of updating the conversion model.

10. A spectroscopic analysis method, wherein: The spectroscopic analysis method comprises the following steps: irradiating the irradiation light to the object to be measured; receiving reflected light from the object to be measured based on the irradiated light; as well as analyzing the optical characteristics of the object to be measured based on the reflected light, In the step of analyzing the optical characteristics, a parameter representing the optical characteristics is corrected based on environmental information of a measurement environment including an observation window that guides the irradiation light to the object to be measured.

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