Ionization chamber, ion source and isotope electromagnetic separator

Abstract

The invention relates to the technical field of isotope electromagnetic separators, and provides an ionization chamber, an ion source and an isotope electromagnetic separator, the ionization chamber is used for the ion source, the ionization chamber comprises a box body and a cover box, a mounting groove and a working medium gas inlet are formed in the box body, and the surface, with the largest area, of the box body is arranged in a penetrating mode to form a mounting opening; the mounting opening and the working medium gas inlet are both communicated with the mounting groove; the box cover is detachably connected with the box body and used for opening or closing the mounting opening, an ion outlet seam is formed in the box cover, the box body and the box cover jointly define an ionization cavity in the state that the box cover closes the mounting opening, and the ion outlet seam is communicated with the ionization cavity. According to the ionization chamber, the ion source and the isotope electromagnetic separator provided by the invention, the installation difficulty of parts can be reduced, and cleaning is convenient.

Description

Technical Field

[0001] The present application relates to the technical field of isotope electromagnetic separators, and in particular to an ionization chamber, an ion source and an isotope electromagnetic separator. Background Art

[0002] Isotope electromagnetic separator uses isotope electromagnetic separation to separate isotopes, which is a widely used separation technology. In the process of electromagnetic separation, the ion source is used to generate a stable and high-quality ion beam. After being deflected by the electromagnetic, these ions will be separated according to their mass and charge ratio. When the deflected ion beam reaches the receiver position, it will pass through the holes on the receiver panel and finally fall into the preset collection pocket. In this process, the ionization chamber plays a vital role as a key component of the ion source of the isotope electromagnetic separator.

[0003] The function of the ionization chamber is to ionize the working fluid gas entering it into plasma. Therefore, the structure of the ionization chamber directly affects the stability and intensity of the ion beam, and then affects the reception blockage and reception amount of the isotope.

[0004] In the related art, the ionization chamber is an integrated structure. When installing related components, they need to be inserted into the ionization chamber through the openings on the ionization chamber for installation, which makes the installation difficult. Summary of the invention

[0005] In view of this, the embodiments of the present application hope to provide an ionization chamber, an ion source and an isotope electromagnetic separator that can reduce the difficulty of installing components.

[0006] In order to achieve the above-mentioned purpose, the technical solution of the embodiment of the present application is implemented as follows:

[0007] In one aspect, an embodiment of the present application discloses an ionization chamber for an ion source, wherein the ionization chamber comprises:

[0008] A box body is formed with a mounting groove and a working gas inlet, a surface of the box body with the largest area is penetrated to form a mounting port, and the mounting port and the working gas inlet are both connected to the mounting groove;

[0009] A box cover is detachably connected to the box body and is used to open or close the installation opening. The box cover forms an ion outlet slit. When the box cover closes the installation opening, the box body and the box cover jointly define an ionization chamber, and the ion outlet slit is connected to the ionization chamber.

[0010] In one embodiment, the box cover and the box body are connected by snap-fit.

[0011] In one embodiment, the box cover includes a cover body and a fastener, the cover body is formed with the ion outlet gap, the cover body is used to close or open the installation port, and when the cover body closes the installation port, the fastener is used to lock or unlock the cover body and the box body.

[0012] In one embodiment, a first slot and a socket connected to the first slot are formed on one side of the cover body, and a second slot is formed on one side of the box body. When the box cover closes the installation port, the first slot is aligned and connected to the second slot, and the fastener is configured to be able to selectively insert into the slot through the socket or remove from the slot from the socket to lock or unlock the cover body and the box body.

[0013] In one embodiment, the arrangement direction of the installation port and the working gas inlet is a first direction, the box body includes a first plate and a slider, a portion of the first plate is recessed along the first direction to form a first groove, a groove bottom wall of the first groove is formed with the working gas inlet, the slider is arranged around the groove opening of the first groove to enclose a second groove, the second groove is penetrated along the first direction away from the side of the first groove to form the installation port, and the first groove and the first groove together define the installation groove;

[0014] The cover body includes a second plate and a surrounding plate, a portion of the second plate is recessed along the first direction to form a sink, a step portion is formed around the groove opening of the sink, the bottom wall of the sink is formed with the ion outlet slot, the surrounding plate is arranged around the step portion to define a slide, the slide penetrates through one side along the second direction to form an escape opening, the slider is slidably matched with the slide through the escape opening, so that the mounting groove and the sink jointly define the ionization chamber, wherein the first direction, the second direction and the third direction are perpendicular to each other.

[0015] In one embodiment, the sink groove penetrates the second plate along one side of the second direction to form a first communication port, and the second groove penetrates the slider along one side of the second direction to form a second communication port, and when the cover body closes the installation port, the first communication port and the second communication port jointly define an operation port, and the fastener is configured to close the operation port when the cover body and the box body are locked or to open the operation port when the cover body and the box body are unlocked.

[0016] In one embodiment, the buckling member is formed with a through opening penetrating along the second direction, and when the buckling member locks the cover body and the box body, the through opening is aligned and communicated with the operation opening.

[0017] In one embodiment, the opening size of the ion outlet slit is between 2 mm and 20 mm.

[0018] Another aspect of the present application discloses an ion source, comprising the ionization chamber in any one of the above embodiments.

[0019] Another aspect of the embodiments of the present application discloses an isotope electromagnetic separator, including the ion source in the above embodiments.

[0020] The embodiments of the present application disclose an ionization chamber, an ion source and an isotope electromagnetic separator. A mounting groove, a working gas inlet and a mounting port are formed in a box body. The mounting port and the working gas inlet are both connected to the mounting groove, and the mounting port is formed by penetrating a surface of the box body with the largest area. On the one hand, related components such as a heating wire, an insulating ceramic sheet and other parts can be installed on the groove wall of the mounting groove through the mounting port. Since the mounting port is formed by penetrating a surface of the box body with the largest area, a larger operating space can be reserved for operators to perform installation. In this way, the difficulty of installing related components can be reduced and the installation efficiency can be improved. On the other hand, the working gas can enter the mounting groove from the working gas inlet, which can prepare for the subsequent ionization of the working gas. By setting a box cover, the box cover and the box body are detachably connected, and an ion outlet slit is formed on the box cover. When the box cover closes the installation opening, the box body and the box cover jointly define an ionization chamber, and the ion outlet slit is connected to the ionization chamber. On the one hand, when it is necessary to install or repair and replace parts, the box cover can be operated to open the installation opening to expose the inner surfaces of the box body and the box cover, which is convenient for operators to operate and has good flexibility. On the other hand, when replacing the collection elements and processes, there is no need to perform complicated and tedious cleaning and installation work. The box body and the box cover can be cleaned and dried after removing the box cover, and then reinstalled. By newly installing it, an ionization chamber suitable for the next separation can be formed to reduce the influence of the residues of the previous separation on the next separation work, so that the purity of the separated isotopes can be improved; on the other hand, by arranging an ion outlet slit in the box body, when the box cover closes the installation port, the ion outlet slit can be connected with the ionization chamber. In this way, the box cover can not only seal the installation port and provide a better sealing ring for the generation of the ion beam, but also make the box body as a part of the extraction element through the ion outlet slit, so that it has the function of changing the shape of the electric field, so as to improve the stability and beam intensity of the ion beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the structure of an ionization chamber provided in an embodiment of the present application;

[0022] Figure 2 A schematic diagram of the structure of a box body and a cover body provided in another embodiment of the present application, wherein the cover body closes the installation opening, and the fastener unlocks the cover body and the box body;

[0023] Figure 3 for Figure 2 A schematic diagram of the structure of the box body;

[0024] Figure 4 for Figure 2 A schematic diagram of the structure of the cover body;

[0025] Figure 5 A schematic structural diagram of a fastening member provided in yet another embodiment of the present application.

[0026] Description of Reference Numerals

[0027] 100, ionization chamber; 1, box body; 1a, mounting slot; 1b, working gas inlet; 1c, mounting port; 1d, second slot; 1e, first through-port; 11, first plate; 11a, first slot; 12, slider; 12a, second slot; 12b, second connecting port; 12c, ionization hole; 2, box cover; 2a, ion outlet slit; 21, cover body; 21a, first slot; 21b, socket; 21c, first through-port; 211, second plate; 211a, sink; 211b, step; 211c, first connecting port; 212, enclosure; 212a, slide; 212b, avoidance port; 212c, through hole; 22, fastener; 22a, through-port; 221, first surface; 222, transition surface; 223, second surface; A, wedge block. DETAILED DESCRIPTION

[0028] It should be noted that, in the absence of conflict, the embodiments and technical features in the embodiments of the present application can be combined with each other, and the detailed description in the specific implementation method should be understood as an explanation of the purpose of the present application and should not be regarded as an improper limitation on the present application.

[0029] The present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The descriptions of "first", "second", etc. in the embodiments of the present application are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly including at least one feature. In the description of the embodiments of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically limited.

[0030] In order to better understand the ion source provided by the present application, the isotope electromagnetic separator is first described.

[0031] On the one hand, an embodiment of the present application provides an isotope electromagnetic separator, including an ion source in any one of the following embodiments.

[0032] The isotope electromagnetic separator also includes a receiver device, a vacuum device, a detection device and a control device. The receiver device is arranged in the vacuum device, and the ion beam emitted by the ion source will fall into the collection pocket of the receiver through the holes on the panel of the receiver device. The detection device includes a spectral line scanning device, a beam emittance meter and an angle measuring instrument. The control device includes a spectral line scanning device control system connected to the spectral line scanning device, a beam emittance meter control system connected to the beam emittance meter and an angle measuring instrument control system connected to the angle measuring instrument.

[0033] Another aspect of the present application embodiment provides an ion source, including the ionization chamber 100 in any one of the following embodiments.

[0034] The ion source further includes a crucible connected to the ionization chamber 100 , and the crucible is used for gasifying the working medium, and then the working medium enters the ionization chamber 100 for ionization.

[0035] Another aspect of the present application embodiment provides an ionization chamber 100 for use as an ion source, see Figures 1 to 5 The ionization chamber 100 includes a box body 1 and a box cover 2. The box body 1 is formed with a mounting groove 1a and a working gas inlet 1b. The largest surface of the box body 1 is penetrated to form a mounting port 1c. The mounting port 1c and the working gas inlet 1b are both connected to the mounting groove 1a. The box cover 2 is detachably connected to the box body 1 and is used to open or close the mounting port 1c. The box cover 2 forms an ion outlet slit 2a. When the box cover 2 closes the mounting port 1c, the box body 1 and the box cover 2 jointly define an ionization chamber, and the ion outlet slit 2a is connected to the ionization chamber.

[0036] The ionization chamber 100 provided in the present application forms a mounting groove 1a, a working gas inlet 1b and a mounting port 1c in a box body 1. The mounting port 1c and the working gas inlet 1b are both connected to the mounting groove 1a, and the mounting port 1c is formed by penetrating a surface of the box body 1 with the largest area. On the one hand, related components such as a heating wire, an insulating ceramic sheet and other parts can be installed on the groove wall of the mounting groove 1a through the mounting port 1c. Since the mounting port 1c is formed by penetrating a surface of the box body 1 with the largest area, a larger operating space can be reserved for operators to install. In this way, the difficulty of installing related components can be reduced and the installation efficiency can be improved. On the other hand, the working gas can enter the mounting groove 1a from the working gas inlet 1b, which can prepare for the subsequent ionization of the working gas. By setting the box cover 2, the box cover 2 is detachably connected to the box body 1, and the box cover 2 is formed with an ion outlet slit 2a. When the box cover 2 closes the installation opening 1c, the box body 1 and the box cover 2 jointly define the ionization chamber, and the ion outlet slit 2a is connected to the ionization chamber. On the one hand, when it is necessary to install or repair and replace parts, the box cover 2 can be operated to open the installation opening 1c to expose the inner surfaces of the box body 1 and the box cover 2, which is convenient for operators to operate and has good flexibility. On the other hand, when replacing the collection elements and processes, there is no need to perform complicated and tedious cleaning and installation work. The box body 1 and the box cover 2 can be cleaned and dried after removing the box cover 2, and then the box body 1 and the box cover 2 can be replaced. After reinstallation, the ionization chamber 100 suitable for the next separation can be formed to reduce the influence of the residues of the previous separation on the next separation work, so that the purity of the separated isotopes can be improved; on the other hand, by arranging the ion outlet slit 2a on the box body 1, when the box cover 2 closes the installation port 1c, the ion outlet slit 2a can be connected with the ionization chamber. In this way, the box cover 2 can not only seal the installation port 1c and provide a better sealing ring for the generation of the ion beam, but also make the box body 1 as a part of the extraction element through the ion outlet slit 2a, so that it has the function of changing the shape of the electric field, so as to improve the stability and beam intensity of the ion beam.

[0037] The ion source provided in the present application, based on the many advantages of the ionization chamber 100, also has the advantages of easy installation, good flexibility, and convenient cleaning.

[0038] The isotope electromagnetic separator provided in the present application, based on the many advantages of the ionization chamber 100, also has the advantages of easy installation, good flexibility and easy cleaning. In this way, the flexibility and separation efficiency of the isotope electromagnetic separator can be improved to ensure the production of isotopes.

[0039] It should be noted that the overall internal space of the ionization chamber is extremely limited. The ionization chamber in the prior art is an integrated design, so when installing components in the ionization chamber, an insertion installation method is adopted. This installation method greatly limits the installation of components inside the ionization chamber, especially when it is necessary to install in the middle and bottom of the ionization chamber (with the insertion port as the top), the insertion method from the insertion port makes it almost impossible to operate and confirm the components that need to be placed in the middle and bottom of the ionization chamber, and the installation is extremely difficult. The ionization chamber 100 provided in the embodiment of the present application splits the ionization chamber 100 into two pieces, and the airtightness of the overall ionization chamber 100 can still be guaranteed on the basis of the split disassembly and assembly operation.

[0040] For example, in one embodiment, please refer to Figure 2 The shape of the ionization chamber 100 is not limited. For example, the shape of the ionization chamber 100 can be a cuboid or a cube.

[0041] In one embodiment, the box cover 2 is connected to the box body 1 by snap-fit ​​connection. On the one hand, the snap-fit ​​connection can effectively improve the connection strength between the box body 1 and the box cover 2, and reduce the situation of accidental opening due to vibration or impact; on the other hand, the snap-fit ​​connection can improve the sealing performance of the ionization chamber to a certain extent, reduce the entry of water vapor or dust, and improve the reliability of ionization; on the other hand, the snap-fit ​​connection reduces the use of fasteners such as nuts, studs, and screws, thereby reducing the manufacturing cost of the ionization chamber 100.

[0042] In one embodiment, please refer to Figures 1 to 5 The box cover 2 includes a cover body 21 and a fastener 22. The cover body 21 is formed with an ion outlet slit 2a. When the box cover 2 closes the installation opening 1c, the cover body 21 is used to close or open the installation opening 1c, and the fastener 22 is used to lock or unlock the cover body 21 and the box body 1.

[0043] Here, during installation, the cover body 21 is first placed on the installation opening 1c, and then the cover body 21 and the box body 1 are locked by the fastener 22, so that the box body 1, the cover body 21 and the fastener 22 are connected as one. In this way, the connection strength of the three can be improved, and the sealing performance of the ionization chamber can be improved to a certain extent; during disassembly, the cover body 21 and the box body 1 can be unlocked by the fastener 22 first, and then the installation opening 1c can be opened by the cover body 21. In this way, the accidental opening of the cover body 21 can be reduced.

[0044] In one embodiment, please refer to Figures 1 to 5A first slot 21a and a socket 21b connected to the first slot 21a are formed on one side of the cover body 21, and a second slot 1d is formed on one side of the box body 1. When the box cover 2 closes the installation opening 1c, the first slot 21a is aligned and connected with the second slot 1d, and the fastener 22 is configured to be able to selectively insert into the slot through the socket 21b or disengage from the slot from the socket 21b to lock or unlock the cover body 21 and the box body 1.

[0045] Exemplarily, the arrangement direction of the mounting port 1c and the working gas inlet is the first direction, and two wedge blocks A are formed on one side of the cover body 21 and the box body 1 along the second direction, and the two wedge blocks A on the cover body 21 are arranged at intervals along the third direction to define a first slot 21a, and the projection shape of the first slot 21a along the first direction is roughly "trapezoidal"; the first slot 21a penetrates the two wedge blocks A along the first direction to form a socket 21b and a first through-opening 21c1e; the two wedge blocks A on the box body 1 are arranged at intervals along the third direction to define a second slot 1d, and the projection shape of the second slot 1d along the first direction is roughly "trapezoidal"; the second slot 1d penetrates one side of the two wedge blocks A along the first direction to form a second through-opening. The fastener 22 includes a first surface 221, a second surface 223 and a transition surface 222. The first surface 221 is arranged on one side of the second surface 223 along the second direction. The projection area of ​​the first surface 221 along the second direction is located within the projection area of ​​the second surface 223. The transition surface 222 connects the periphery of the first surface 221 and the second surface 223, so that the projection cross-section of the fastener 22 along the first direction is roughly "trapezoidal". When the box cover 2 closes the installation opening 1c, the first through opening 21c1e is aligned and communicated with the second through opening, and the fastener 22 can be inserted into the first slot 21a and the second slot 1d through the socket 21b.

[0046] In this way, when installing the box body 1 and the cover body 21, the first slot 21a and the second slot 1d can be aligned first, and then the fastening member 22 can be inserted from the socket 21b into the first slot 21a and the second slot 1d. The first slot 21a and the second slot 1d can be in contact with the fastening member 22 to improve the connection strength between the cover body 21 and the box body 1; when the cover body 21 and the box body 1 need to be disassembled, the fastening member 22 can be pulled out from the first slot 21a and the second slot 1d through the socket 21b to unlock the cover body 21 and the box body 1. In this way, the cover body 21 and the box body 1 are locked or unlocked by plugging and unplugging, so that the installation and disassembly of the ionization chamber 100 becomes relatively simple, so as to facilitate the adjustment of the components installed in the installation slot 1a.

[0047] Exemplarily, the first direction may be the top-bottom direction, that is, the box body 1 may be a bottom box, the cover body 21 may be a top cover, and the cover body 21 is installed from top to bottom on the box body 1. The first direction may also be the thickness direction of the box body 1, the second direction may be the length direction of the box body 1, and the third direction may be the width direction of the box body 1.

[0048] Exemplarily, in one embodiment, Figure 2 R1 may be the first direction, R2 may be the second direction, and R3 may be the third direction.

[0049] In one embodiment, please refer to Figure 3 , the arrangement direction of the mounting port 1c and the working gas inlet 1b is the first direction, the box body 1 includes a first plate 11 and a slider 12, a portion of the first plate 11 is recessed along the first direction to form a first groove 11a, a working gas inlet 1b is formed on the bottom wall of the first groove 11a, the slider 12 is arranged around the groove opening of the first groove 11a to enclose a second groove 12a, the second groove 12a is penetrated along the side away from the first groove 11a in the first direction to form the mounting port 1c, and the first groove 11a and the first groove 11a together define the mounting groove 1a.

[0050] Exemplarily, the middle portion of the first plate 11 is recessed along the first direction away from the cover body 21 to form a first groove 11a, and a working gas inlet 1b is formed on the bottom wall of the first groove 11a, and the slider 12 is arranged around the groove opening of the first groove 11a, that is, the edge area of ​​the first plate 11, to enclose a second groove 12a, and the second groove 12a is penetrated along the side of the first groove 11a away from the first groove 11a in the first direction to form an installation opening 1c, and the first groove 11a and the second groove 12a jointly define the installation groove 1a along the first direction.

[0051] See also Figure 2 and Figure 4 The cover body 21 includes a second plate 211 and a surrounding plate 212. A portion of the second plate 211 is recessed along the first direction to form a sink 211a. A step portion 211b is formed around the groove opening of the sink 211a. An ion outlet slit 2a is formed on the bottom wall of the sink 211a. The surrounding plate 212 is arranged around the step portion 211b to define a slide 212a. The slide 212a penetrates through one side along the second direction to form an avoidance opening 212b. The slider 12 slides with the slide 212a through the avoidance opening 212b, so that the installation groove 1a and the sink 211a jointly define an ionization chamber, wherein the first direction, the second direction and the third direction are perpendicular to each other.

[0052] Exemplarily, the middle part of the second plate 211 can be recessed along the first direction away from the box body 1 to form a sink 211a, the non-recessed part of the side of the sink 211a forms a step portion 211b, the bottom wall of the sink 211a forms a lining outlet seam, the enclosure 212 can be arranged around the edge of the step portion 211b, and the inner side of the enclosure 212 along the second direction and the third direction defines a slide 212a, and the slide 212a penetrates along one side of the second direction to form an avoidance opening 212b. In this way, the slider 12 can slide into the slide 212a through the avoidance opening 212b to complete the installation between the cover body 21 and the box body 1, and at this time, the space between the installation groove 1a and the sink 211a along the first direction defines an ionization chamber.

[0053] Here, when installing the cover 21 and the box body 1, the avoidance opening 212b can be aligned with one end of the slider 12 along the second direction, and then the cover 21 can be slowly pushed until the groove wall of the slide groove 212a along the second direction abuts against one side of the slide groove 212a along the second direction; after the buckle 22 unlocks the cover 21 and the box body 1, the cover 21 can be pushed along the second direction until the slider 12 slides out of the avoidance opening 212b, which is convenient for subsequent operators to clean and install and repair parts. In this way, through the slide groove 212a and the slider 12, on the one hand, the slide groove 212a can provide a smooth and accurate moving path, and the slider 12 can slide easily in the slide groove 212a, making the entire moving process more accurate and controllable; on the other hand, the slide groove 212a can provide additional support and stability to prevent the slider 12 from shaking or sliding unsteadily during the movement, and the movement is stable.

[0054] In one embodiment, please refer to Figure 2 , Figure 3 and Figure 4 The sink groove 211a penetrates the second plate 211 on one side along the second direction to form a first communication port 211c, and the second groove 12a penetrates the slider 12 on one side along the second direction to form a second communication port 12b. When the cover body 21 closes the installation port 1c, the first communication port 211c and the second communication port 12b jointly define an operation port, and the fastener 22 is configured to be able to close the operation port when the cover body 21 and the box body 1 are locked or to open the operation port when the cover body 21 and the box body 1 are unlocked.

[0055] That is to say, when the cover body 21 closes the installation port 1c, the combined part of the two has an operating port connected to the ionization chamber on one side along the second direction, and the buckle 22 can close the operating port when the cover body 21 and the box body 1 are locked, and the buckle 22 can open the operating port when the cover body 21 and the box body 1 are unlocked. In this way, it is convenient to install the buckle 22 or to perform simple observation or maintenance on the ionization chamber.

[0056] In one embodiment, please refer to Figure 2 and Figure 5 The buckle 22 is formed with a through hole 22a penetrating along the second direction. When the buckle 22 locks the cover body 21 and the box body 1, the through hole 22a is aligned and communicated with the operation port.

[0057] Here, after the fastener 22 locks the cover body 21 and the box body 1, the through-port 22a can be aligned and connected with the operating port, so that ionization equipment such as an electron gun or a heater can be inserted into the through-port 22a and the operating port to act on the working fluid gas in the ionization chamber to form plasma. In this way, by setting the through-port 22a and the operating port, installation positions can be provided for some components that realize functions such as ionization and heating of the working fluid gas in the ionization chamber, which has good flexibility.

[0058] In one embodiment, please refer to Figure 3 and Figure 4 The box body 1 is formed with an ionization hole 12c communicating with the mounting groove 1a, and the box cover 2 is formed with a through hole 212c. When the box cover 2 closes the mounting opening 1c, the through hole 212c is aligned and communicated with the ionization hole 12c.

[0059] Exemplarily, the second slot 12a has an ionization hole 12c connected to the inside thereof on one side along the second direction, and the slide slot 212a has a through hole 212c connected to the inside thereof on one side along the second direction, and when the cover 21 closes the mounting port 1c, the through hole 212c is aligned and connected to the ionization hole 12c. In this way, an ionization device such as an electron gun or a heater can be inserted into the through port 22a and the operation port to act on the working fluid gas in the ionization chamber to form plasma, and thus, by providing the through hole 212c and the ionization hole 12c, installation positions can be provided for some components that realize functions such as ionization and heating of the working fluid gas in the ionization chamber, and the flexibility is good.

[0060] For example, in one embodiment, the through hole 22a, the operation hole, the through hole 212c and the ionization hole 12c are respectively located on both sides of the ionization chamber 100 along the second direction, and the working gas inlet 1b and the ion outlet slit 2a are respectively located on both sides of the ionization chamber 100 along the first direction. In this way, structural interference can be reduced.

[0061] In one embodiment, the opening size of the ion outlet slit 2a is between 2 mm and 20 mm. That is, the size of the ion outlet slit 2a along the third direction is between 2 mm and 20 mm. Exemplarily, the opening size of the ion outlet slit 2a can be 2 mm, 4 mm, 6 mm, 8 mm, 10 mm, 12 mm, 14 mm, 16 mm, 18 mm to 20 mm, etc. Here, by setting the ion outlet slit 2a with a suitable opening size, the stability and beam intensity of the ion beam can be improved, thereby improving the received abundance and received amount of the isotope.

[0062] Illustratively, in one embodiment, the ion outlet slit 2a can be modified according to different requirements, for example, it can be modified according to the type of plasma ions to be generated.

[0063] In one embodiment, the box body 1 and the box cover 2 are made of graphite. Thus, when the ionization chamber 100 is connected to high voltage, the box body 1 and the box cover 2 made of graphite can withstand and effectively conduct the charge and energy generated by the ionization process, so as to ensure the stability and reliability of the ionization chamber 100 under long-term and high-load operation.

[0064] The above is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. All modifications, equivalent substitutions, improvements, etc. within the spirit and principles of the present application are included in the protection scope of the present application.

Claims

1. An ionization chamber, used for an ion source, characterized in that: The ionization chamber comprises: A box body is formed with a mounting groove and a working gas inlet, a surface of the box body with the largest area is penetrated to form a mounting port, and the mounting port and the working gas inlet are both connected to the mounting groove; A box cover is detachably connected to the box body and is used to open or close the installation opening. The box cover forms an ion outlet slit. When the box cover closes the installation opening, the box body and the box cover jointly define an ionization chamber, and the ion outlet slit is connected to the ionization chamber.

2. The ionization chamber according to claim 1, characterized in that The box cover is connected to the box body by snap-fit ​​connection.

3. The ionization chamber according to claim 2, characterized in that The box cover includes a cover body and a buckle, the cover body is formed with the ion outlet slit, the cover body is used to close or open the installation port, and when the cover body closes the installation port, the buckle is used to lock or unlock the cover body and the box body.

4. The ionization chamber according to claim 3, characterized in that A first slot and a socket connected to the first slot are formed on one side of the cover body, and a second slot is formed on one side of the box body. When the box cover closes the installation opening, the first slot is aligned and connected to the second slot, and the fastener is configured to be able to selectively insert into the slot through the socket or disengage from the socket to lock or unlock the cover body and the box body.

5. The ionization chamber according to claim 3, characterized in that The mounting port and the working gas inlet are arranged in a first direction, the box body includes a first plate and a slider, a portion of the first plate is recessed along the first direction to form a first groove, a groove bottom wall of the first groove is formed with the working gas inlet, the slider is arranged around the groove opening of the first groove to enclose a second groove, the second groove is penetrated along the first direction away from the side of the first groove to form the mounting port, and the first groove and the first groove together define the mounting groove; The cover body includes a second plate and a surrounding plate, a portion of the second plate is recessed along the first direction to form a sink, a step portion is formed around the groove opening of the sink, the bottom wall of the sink is formed with the ion outlet slot, the surrounding plate is arranged around the step portion to define a slide, the slide penetrates through one side along the second direction to form an escape opening, the slider is slidably matched with the slide through the escape opening, so that the mounting groove and the sink jointly define the ionization chamber, wherein the first direction, the second direction and the third direction are perpendicular to each other.

6. The ionization chamber according to claim 5, characterized in that The sink groove penetrates the second plate along one side of the second direction to form a first communication port, and the second groove penetrates the slider along one side of the second direction to form a second communication port. When the cover body closes the installation port, the first communication port and the second communication port jointly define an operation port, and the fastener is configured to close the operation port when the cover body and the box body are locked or to open the operation port when the cover body and the box body are unlocked.

7. The ionization chamber according to claim 6, characterized in that The buckle member is formed with a through opening penetrating along the second direction, and when the buckle member locks the cover body and the box body, the through opening is aligned and communicated with the operation opening.

8. The ionization chamber according to claim 1, characterized in that The opening size of the ion outlet slit is between 2 mm and 20 mm.

9. An ion source, characterized in that An ionization chamber comprising any one of claims 1 to 8.

10. An isotope electromagnetic separator, characterized in that: Comprising the ion source as claimed in claim 9.

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