Chuck replacement device and method

Abstract

The present invention relates to an apparatus and a method for replacing a chuck capable of replacing a pick-up head capable of transferring a material such as a semiconductor device, a chip or a die, the apparatus comprising: a stacking rack main body; at least one chuck accommodating part which is formed at a part of the stacking rack main body and accommodates a plurality of chucks to be mounted on a pick-up head; and at least one chuck recovery part which is formed on the other part of the stacking rack main body and is used for recovering aged chucks from the pick-up heads, the stacking frame body and at least one part of the chuck containing part can be formed into a whole, so that the multiple chucks contained in the chuck containing part are prevented from deviating.

Description

Technical Field

[0001] The present invention relates to a collet replacement device and method, and more particularly to a collet replacement device and method capable of replacing a collet of a pickup head, wherein the pickup head can transfer materials such as semiconductor devices, chips or grains. Background Art

[0002] The processing steps of semiconductor devices may include: a picking process, in which a semiconductor device is separated and picked up from a thin sheet while a wafer divided into multiple semiconductor devices, chips, or dies is pasted on the thin sheet; an inspection process, in which the picked-up semiconductor device is inspected; and a packaging process, in which the semiconductor device is packaged using a carrier tape and a cover tape.

[0003] In such a process, the semiconductor device can be transferred by a pickup unit, which may include: a chuck that absorbs the semiconductor device using vacuum pressure; a pickup head that is detachably combined with the chuck to replace an aged chuck; and a driving unit that moves the pickup head.

[0004] Due to wear caused by long-term use or in order to adsorb semiconductor devices of different sizes, the chuck needs to be replaced, and the replacement of the chuck is achieved by a chuck replacement device.

[0005] The existing chuck replacement device can be configured to have a chuck bin containing multiple chucks, which can be detachably coupled to a stacking rack structure fixed on the device. An operator or a robot can detachably place the chuck bin containing multiple chucks on the stacking rack, and the operator or the robot can throw out an empty chuck bin in which all the chucks have been consumed. Summary of the invention

[0006] Problem to be solved

[0007] However, in such existing chuck replacement devices, the chuck bin detachably placed on the stacking rack has the following problem: during the repeated process of combining and separating with the stacking rack, the position of the chuck bin gradually deviates slightly or changes due to clearance or allowable errors, so that the positions of all the chucks accommodated therein deviate. If the positions of multiple chucks deviate, there is a problem that the reliability of the device is greatly reduced, such as the chucks colliding excessively with the picking head and being damaged, or the chucks detaching from the picking head.

[0008] The present invention is to solve multiple problems including the above problems, and its purpose is to provide a chuck replacement device and method that integrates a stacking frame body with at least a portion of a chuck accommodating portion and correctly fixes the positions of multiple chucks, prevents the alignment positions of the chucks from changing during the chuck replacement process, and thus greatly improves the combination precision and accuracy when the chucks are combined with a pickup head. However, such problems are merely illustrative, and the scope of the present invention is not limited by these problems.

[0009] Means of solving the problem

[0010] The chuck replacing device conceived based on the present invention and solving the above-mentioned problem comprises: a stacking rack main body; at least one chuck accommodating portion formed in a part of the stacking rack main body, for accommodating a plurality of chucks to be mounted on a picking head; and at least one chuck recovery portion formed in another part of the stacking rack main body, for recovering aged chucks from the picking head; the stacking rack main body is formed as one piece with at least a part of the chuck accommodating portion to prevent the plurality of chucks accommodated in the chuck accommodating portion from deviating.

[0011] In addition, according to the present invention, the chuck accommodating portion includes: a accommodating body, a chuck outlet is formed at the upper part of the accommodating body to discharge the chuck upward, and a accommodating space is formed inside the accommodating body to accommodate multiple chucks stacked in the up and down directions and capable of being raised and lowered, and the whole is formed into a box shape with an inner side wall guiding the lifting and lowering path of the chuck; a pressing plate is formed in the accommodating space to support the chuck; and a spring is formed in the accommodating space to generate a restoring force to apply an elastic force to the chuck toward the chuck outlet; the accommodating body of the chuck accommodating portion is formed as a whole with the stacking rack body and is formed of the same material.

[0012] Furthermore, according to the present invention, at least one transverse scale line and at least one longitudinal scale line are formed near the chuck outlet of the chuck accommodating portion so that a camera can confirm an alignment state of the chuck.

[0013] Furthermore, according to the present invention, a magnetic body for temporarily fixing the chuck by magnetic force is formed near the chuck outlet of the chuck accommodation portion.

[0014] Furthermore, according to the present invention, a barcode or a two-dimensional code is formed on the upper surface of the chuck or the pressing plate so that information on the chuck can be recognized by a barcode or two-dimensional code reader.

[0015] In addition, according to the present invention, the stacking rack body is formed with fixing holes at both ends so as to be fixed to the first fixing rack and the second fixing rack of the device through fixing parts respectively, and the chuck recovery portion is formed in the central part, and the left chuck accommodating portion and the right chuck accommodating portion are respectively formed on the left and right sides of the chuck recovery portion.

[0016] Furthermore, according to the present invention, the stacking rack body is formed into a left-right symmetrical structure with the chuck recovery portion as the center, so as to improve the camera recognition capability and the chuck alignment.

[0017] In addition, according to the present invention, the stacking rack body is formed as a whole in a square rod shape to clarify the front, back, left and right directions of the chuck, and the chuck accommodating portion and the chuck recovery portion are also formed as a whole in a square box shape and the front, back, left and right directions are the same as those of the stacking rack body.

[0018] Furthermore, according to the present invention, a pressure measuring device for measuring the pressing force of the pickup head is formed on one side of the upper surface of the stacker main body.

[0019] Furthermore, according to the present invention, when the pickup head pressurizes the pressure measuring device, a pressurizing jig formed in the shape of the collet is installed in the pickup head instead of the collet.

[0020] Furthermore, according to the present invention, the pressurizing jig includes an upper plate for contacting the pickup head, and a lower plate formed on a lower surface of the upper plate for pressurizing the pressure measuring device.

[0021] Furthermore, according to the present invention, the upper plate is formed of an insulating resin material to prevent the propagation of static electricity or electric waves; the lower plate is formed of a metal magnetic material to facilitate the transfer of pressure and to be attached to the pickup head by magnetic force.

[0022] Furthermore, according to the present invention, a directional protrusion is formed on the other side of the upper surface of the stacking frame body to confirm the horizontal state by measuring multiple points of the pickup head or the chuck or press jig mounted on the pickup head.

[0023] In addition, according to the present invention, the chuck recovery portion includes: a latch portion, which is formed with a plurality of latches to separate the aged chuck from the pickup head; and a recovery bucket, a chuck entrance is formed at the upper portion of the recovery bucket to recover the chuck separated from the pickup head by the latch portion, and the recovery bucket is formed with a recovery space so that the plurality of chucks recovered inside can be stacked in the upper and lower directions after naturally falling.

[0024] In addition, according to the present invention, the recovery bucket is configured as a structure that utilizes magnetic force to achieve the installation or removal of the recovery bucket on the stacking rack body by forming a magnetic fixing plate on the stacking rack body or a magnet formed on the stacking rack body, so that the operator can discharge the chuck recovered from the recovery bucket to the outside.

[0025] Furthermore, according to the present invention, a confirmation window is formed on the recovery barrel so that the chucks recovered into the inside can be visually confirmed.

[0026] Furthermore, according to the present invention, the pickup head is a pickup head for a die bonding device; the stacking frame body is fixed to a first fixing frame and a second fixing frame formed near an expansion ring of the die bonding device through a fixing member.

[0027] Furthermore, according to the present invention, the camera is a wafer vision camera of a die bonding device.

[0028] In addition, in the chuck replacement method based on the present invention and solving the above-mentioned problems, the chuck replacement device includes: a stacking rack main body; at least one chuck accommodating portion formed in a part of the stacking rack main body, for accommodating a plurality of chucks to be mounted on a pickup head; and at least one chuck recovery portion formed in another part of the stacking rack main body, for recovering aged chucks from the pickup head; the stacking rack main body is formed as a whole with at least a part of the chuck accommodating portion to prevent the plurality of chucks accommodated in the chuck accommodating portion from deviating; the chuck replacement method includes: step (a), using a fixing member to fix the stacking rack main body After adjusting the level of the body, it is set on the device provided with the picking head; step (b), after installing the chuck accommodated in the chuck accommodating part on the picking head, implement the process steps; step (c), using the chuck recovery part to recover the aged chuck on the picking head; step (d), when the chuck accommodated in the chuck accommodating part is consumed in whole or in part, replenishing a new chuck through the chuck outlet of the chuck accommodating part; and step (e), when the chuck recovered to the chuck recovery part has been filled in whole or in part, separating the recovery bucket of the chuck recovery part and discharging the filled chuck to the outside.

[0029] In addition, the chuck replacement device based on the present invention and solving the above-mentioned problems includes: a stacking rack body; at least one chuck accommodating portion formed in a part of the stacking rack body for accommodating a plurality of chucks to be mounted on a pick-up head; and at least one chuck recovery portion formed in another part of the stacking rack body for recovering aged chucks from the pick-up head; the stacking rack body is integrated with at least a part of the chuck accommodating portion to prevent the plurality of chucks accommodated in the chuck accommodating portion from deviating; the chuck accommodating portion includes: a accommodating body, The chuck outlet is formed in the chuck receiving portion to discharge the chuck upward, and a receiving space is formed inside the receiving body to receive a plurality of the chucks stacked in the up-down direction and liftable, and the overall shape is a box having an inner side wall guiding the lifting path of the chuck; a pressing plate is formed in the receiving space to support the chuck; and a spring is formed in the receiving space to generate a restoring force to apply an elastic force to the chuck toward the chuck outlet; the receiving body of the chuck receiving portion is formed as a whole with the stacking rack body and is formed of the same material; in the At least one horizontal scale line and at least one vertical scale line are formed near the chuck outlet of the chuck accommodating portion so that a camera can confirm the alignment state of the chuck; a pressure measuring device for measuring the pressure of the pick-up head is formed on one side of the upper surface of the stacking frame body; a directional protrusion is formed on the other side of the upper surface of the stacking frame body to confirm the horizontal state by measuring multiple points of the pick-up head or the chuck or the pressure fixture installed on the pick-up head; the chuck recovery portion includes: a latch portion, which is formed with multiple latches to separate the pick-up head from the pick-up head The chuck that is separated from the picking head due to aging; and a recovery bucket, a chuck entrance is formed at the upper part of the recovery bucket for recovering the chuck separated from the picking head by the latch part, and the recovery bucket is formed with a recovery space so that the multiple chucks recovered inside can be stacked in the up and down directions after naturally falling; the recovery bucket is configured as a structure that utilizes magnetic force to realize the installation or removal of the recovery bucket on the stacking rack body by forming a magnetic fixing plate on the stacking rack body or a magnet formed on the stacking rack body, so that the operator can discharge the chuck recovered from the recovery bucket to the outside.

[0030] Effects of the Invention

[0031] The embodiments of the present invention constructed as described above have the following effects:

[0032] By forming the stacking frame body and at least a part of the chuck accommodating portion into one piece, the positions of the plurality of chucks can be correctly fixed, and the alignment position of the chucks can be prevented from changing during the chuck replacement process, thereby greatly improving the combination precision and accuracy of the chucks when they are combined with the pickup head, and forming a chuck recovery portion in the middle and symmetrically forming a chuck accommodating portion on the left and right sides, thereby improving the mobility of the pickup head, and the recovery bucket of the chuck recovery portion that does not require high accuracy is set to a structure that can be detached by magnetic force, so that the chucks are easy to recover, and in addition, a pressure measuring device and a directional protrusion are provided, so that in addition to the chuck replacement operation, a pressure measuring operation of measuring and adjusting the pressure of the pickup head using a pressurizing fixture and a horizontal measuring operation of measuring the horizontal state of the pickup head can also be performed simultaneously. Of course, the scope of the present invention is not limited by these effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a perspective view illustrating a chuck replacement device according to some embodiments of the present invention;

[0034] Figure 2 It is depicted Figure 1 A cross-sectional view of a chuck receiving portion of a chuck replacement device;

[0035] Figure 3 It is depicted Figure 1 A cross-sectional view of a chuck recovery portion of a chuck replacement device;

[0036] Figure 4 is to depict the Figure 1 A cross-sectional view of a chuck and a pick-up head in a chuck receiving portion of a chuck changing device;

[0037] Figure 5 It is depicted Figure 4 A bottom view of the bottom surface of the pickup head;

[0038] Figure 6 is to depict the Figure 1 A stereoscopic view of a chuck removal process in which a new chuck in a chuck receiving portion of a chuck replacement device is combined with a pick-up head and is taken out from a chuck outlet of the chuck receiving portion;

[0039] Figure 7 The figure shows the process of recovering the aged chuck separated from the pick-up head to Figure 1 A three-dimensional diagram of the use state of a chuck recovery process in a recovery bucket of a chuck recovery part of a chuck replacement device;

[0040] Figure 8 It is a diagram showing the recovered Figure 1 A three-dimensional diagram of the use state of a recovery barrel separation process in which a plurality of chucks in a chuck recovery part of a chuck replacement device are separated from the recovery barrel;

[0041] Fig. 9 is a cross-sectional view showing a pressure measurement process of measuring the pressure of a pickup head using a pressure measurement device of a chuck replacement device;

[0042] Fig.10 It is to illustrate the use of Figure 1 A cross-sectional view of a horizontal measurement process in which a directional protrusion of a chuck replacement device measures the horizontal state of a pickup head;

[0043] Fig.11 is to depict the Figure 1 A top view of a bar code formed on a chuck in a chuck receiving portion of a chuck changing device;

[0044] Fig.12 It is shown that there is Figure 1 A perspective view of a die bonding device with a center chuck changing device;

[0045] Fig.13 is a sequence diagram illustrating a chuck replacement method according to some embodiments of the present invention;

[0046] Description of reference numerals:

[0047] 1 chuck; 1a adsorption hole;

[0048] 1-1 upper pad; 1-2 lower pad;

[0049] 2 Pick-up head; 2a Air pressure pipe;

[0050] M permanent magnet for the pickup head; 2b guiding member;

[0051] 3 Camera; D1 First fixing bracket;

[0052] D2 second fixing bracket; F fixing piece;

[0053] 10 Stacking rack body; H Fixing hole;

[0054] 11 Magnetic fixing plate; M2 Magnet;

[0055] 20: chuck receiving portion; 21: receiving body;

[0056] 21a chuck outlet; 21b inner wall;

[0057] 22 pressing plate; 23 spring;

[0058] L1 horizontal scale line; L2 vertical scale line;

[0059] M1 magnetic body; BC barcode;

[0060] 20-1 left chuck accommodating portion; 20-2 right chuck accommodating portion;

[0061] 30 chuck recovery portion; 31 latch portion;

[0062] L latch; 32 recovery bucket;

[0063] 32a chuck inlet; 32b confirmation window;

[0064] 40 pressure measuring device; 50 directional protrusion;

[0065] 60 pressurizing fixture; 61 upper plate;

[0066] 62 lower plate; 70 control unit;

[0067] 80 pickup head driving unit; 90 displacement measuring unit;

[0068] 100 Chuck Changing Device; 1000 Die Bonding Device;

[0069] 1100 expansion ring; 1101 base plate. DETAILED DESCRIPTION

[0070] Hereinafter, some preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0071] The embodiments of the present invention are intended to more completely describe the present invention to those skilled in the art. The following embodiments may be changed into several different forms, and the scope of the present invention is not limited to the following embodiments. On the contrary, these embodiments are intended to make the present disclosure more thorough and complete, and fully convey the spirit of the present invention to those skilled in the art. In addition, for the convenience and clarity of explanation, the thickness or size of each layer in the drawings is exaggerated.

[0072] The terms used in this specification are used to describe specific embodiments and are not intended to limit the present invention. As used in this specification, singular forms may include plural forms unless otherwise clearly indicated in the context. In addition, "comprising" used in this specification specifically specifies the existence of the shapes, numbers, steps, operations, components, elements and / or combinations thereof involved, and does not exclude the existence or addition of more than one other shapes, numbers, operations, components, elements and / or combinations.

[0073] Embodiments of the present invention are described below with reference to the accompanying drawings that schematically illustrate preferred embodiments of the present invention. In the accompanying drawings, variations of the shapes depicted may be expected, for example, based on manufacturing techniques and / or tolerances. Therefore, embodiments of the present invention should not be construed as being limited to the specific shapes depicted in this specification, but should include, for example, shape variations resulting from manufacturing.

[0074] Figure 1 is a perspective view showing a chuck replacement device 100 according to some embodiments of the present invention; Figure 2 It is depicted Figure 1 A cross-sectional view of a chuck receiving portion 20 of a chuck replacement device 100; Figure 3 It is depicted Figure 1 A cross-sectional view of the chuck recovery portion 30 of the chuck replacement device 100.

[0075] First, if Figures 1 to 3 As shown, the chuck replacement device 100 according to some embodiments of the present invention may generally include: a stacking rack body 10 , a chuck accommodating portion 20 and a chuck recovery portion 30 .

[0076] The stacking rack body 10 is formed of a material such as metal or engineering plastic having sufficient strength and durability to support the chuck accommodating portion 20 and the chuck recovering portion 30 .

[0077] The stacking rack body 10 is formed in a square rod shape as a whole to clarify the front, back, left, and right directions of the chuck 1 . The chuck accommodating portion 20 and the chuck collecting portion 30 are also formed in a square box shape as a whole and have the same front, back, left, and right directions as the stacking rack body 10 .

[0078] However, the square rod shape of the stacking rack body 10 or the square box shape of the chuck accommodating portion 20 and the chuck recovery portion 30 is not limited to the shape shown in the accompanying drawings, and can be formed into various shapes such as cylindrical or polygonal shapes according to the shape, type or number of the chucks 1.

[0079] It is very important for the stacking frame body 10 to maintain a horizontal state to become a reference for the pressure or horizontal state of the pickup head 2, and fixing holes H can be formed at both ends to maintain the horizontal state through fixing members F (refer to Fig. 9 ) is fixed to the first fixing bracket D1 of the device (refer to Figure 6 ) and the second fixing frame D2 (refer to Figure 6 )superior.

[0080] The stacking rack body 10 is formed with a chuck recovery portion 30 at the center, and a left chuck accommodating portion 20 - 1 and a right chuck accommodating portion 20 - 2 are formed on the left and right sides of the chuck recovery portion 30 respectively to improve the left and right mobility of the pickup head 2 around the chuck recovery portion 30 .

[0081] Therefore, the stacking rack body 10 can be bilaterally symmetrical with the chuck recovery portion 30 as the center to improve the recognition ability of the camera and the chuck alignment.

[0082] However, the bilaterally symmetrical structure of the stacking rack body 10 is not limited to the structure shown in the drawings, and an asymmetrical structure or an eccentric structure may also be applied.

[0083] The chuck accommodation portion 20 may be a generally box-shaped structure formed at a portion of the stacker main body 10 and accommodating a plurality of chucks 1 to be mounted in the pickup head 2 .

[0084] At least a portion of the chuck receiving portion 20 may be formed integrally with the stacking rack body 10 to prevent the plurality of chucks 1 received in the chuck receiving portion 20 from deviating.

[0085] For example, Figure 2 As shown, the chuck accommodating portion 20 may include: a accommodating body 21, a chuck outlet 21a is formed at the upper portion of the chuck 1 to discharge upward, and an accommodating space is formed inside the chuck 1 to accommodate a plurality of chucks 1 stacked in the up and down directions and capable of being raised and lowered, and the chuck 1 is formed as a whole in the shape of a box having an inner side wall 21b for guiding the lifting and lowering path of the chuck 1; a pressing plate 22 is formed in the accommodating space to support the chuck 1; and a spring 23 is formed in the accommodating space to generate a restoring force to apply an elastic force to the chuck 1 toward the chuck outlet 21a.

[0086] Here, a magnetic body M1 for temporarily fixing the chuck 1 by magnetic force is formed near the chuck outlet 21 a of the chuck accommodation portion 20 .

[0087] Therefore, the multiple chucks 1 accommodated in the chuck accommodating portion 20 can be stacked in the up and down directions, and can be elastically pressurized in the direction of the chuck outlet 21a due to the elastic pressure of the pressing plate 22 generated by the restoring force of the spring 23. The uppermost chuck 1 can be temporarily fixed on the chuck outlet 21a by the magnetic body M1 and wait, and when the picking head 2 picks up this uppermost chuck 1 and forcibly takes it out from the chuck outlet 21a, the chuck 1 just below can be lifted upward and temporarily fixed at the chuck outlet 21a, so that it can wait for the next pick-up.

[0088] Such a chuck accommodating portion 20, wherein the accommodating body 21 formed with the chuck outlet 21a is formed integrally with the stacking rack body 10, and can be made of the same material, such as metal or engineering plastic.

[0089] Therefore, the accommodating body 21 of the chuck accommodating portion 20 and the stacking rack body 10 can be formed of the same material by extrusion molding, molding, compression molding, die casting, or a cutting process of cutting a block of material.

[0090] Therefore, the stacking rack body 10 and the chuck accommodating body 21 of the chuck accommodating portion 20 having the chuck outlet 21a formed therein can be made integral with each other, thereby correctly fixing the position of the chuck 1, preventing the alignment position of the chuck 1 from changing during the chuck replacement process, greatly improving the precision and accuracy of the combination of the chuck 1 and the picking head 2, and by forming the chuck recovery portion 30 in the middle and symmetrically forming the chuck accommodating portions 20-1 and 20-2 on the left and right sides, the mobility of the picking head can be improved.

[0091] In addition, if Figure 1 As shown, in order to make the camera 3 (refer to Fig.12 ) can confirm the alignment state of the chuck 1, and at least one horizontal scale line L1 and at least one vertical scale line L2 are formed near the chuck outlet 21a of the chuck accommodating portion 20, so that the chuck 1 can be aligned more accurately.

[0092] Such horizontal scale lines L1 and vertical scale lines L2 are not limited to the scale lines shown in the drawings, and various forms of scale lines can be applied.

[0093] like Figure 3 As shown, the chuck recovery portion 30 may be, for example, a structure disposed at another portion of the stacking rack body 10 and used to recover the aged chuck 1 from the pickup head 2 .

[0094] The chuck recovery portion 30 may include: a latch portion 31, formed with a plurality of latches L (Latch) to separate the aged chuck 1 from the pickup head 2; and a recovery barrel 32, formed with a chuck inlet 32a at the upper portion to recover the chuck 1 separated from the pickup head 2 by the latch portion 31, and formed with a recovery space so that the plurality of chucks 1 recovered inside can be stacked in the upper and lower directions after naturally falling.

[0095] Such a latch L can be configured as a whole to be elastically supported at an angle, thereby allowing the chuck 1 and the pickup head 2 to descend, but allowing the pickup head 2 to pass directly when the pickup head 2 rises, while the edge or corner of the chuck 1 is stuck, so that the chuck 1 can be separated from the pickup head 2 and fall.

[0096] Here, the latch portion 31, in which the position alignment is important, can be fixed to the stacking frame body 10, but the importance of the alignment position is relatively reduced for the recovery bucket for recovering the naturally fallen chuck 1. For example, the recovery bucket 32 ​​can be configured to be formed on the stacking frame body 10 through the magnetic fixing plate 11 (refer to Figure 8 ) or the magnet M2 formed on the stacking rack body 10 (refer to Figure 8 ) is a structure that utilizes magnetic force to achieve installation or removal on the stacking rack body 10, so that the operator can discharge the chuck 1 recovered by the recovery bucket 32 ​​to the outside.

[0097] A confirmation window 32b is formed on the recovery barrel 32 for visually confirming the chucks 1 recovered therein. Therefore, the operator can judge whether the chucks 1 recovered in the recovery barrel 32 are completely filled or filled through the confirmation window 32b, and can easily discharge the chucks 1 inside the recovery barrel 32 to the outside after separating the recovery barrel 32.

[0098] In addition, if Figure 1 As shown, the stacking rack body 10 may be formed with a pressure measuring device 40 such as a load sensor for measuring the pressure of the pick-up head 2 on one side of the upper surface, and may be formed with a directional protrusion 50 having a pointed or rounded tip and a cylindrical shape as a whole on the other side of the upper surface, so that the pick-up head 2 or the chuck 1 or the pressure fixture 60 (see FIG. 1 ) installed on the pick-up head 2 can be measured. Fig.10 ) to confirm the horizontal state.

[0099] Therefore, according to the chuck replacement device 100 of some embodiments of the present invention, the recovery bucket 32 ​​of the chuck recovery part 30 that does not require high accuracy is formed into a structure that can be installed or removed by magnetic force, so the chuck is easy to recover. In addition, a pressure measuring device 40 and a directional protrusion 50 are provided, so not only can the chuck 1 be replaced, but also a pressure measuring operation of measuring and adjusting the pressing force of the pickup head 2 using the pressurizing fixture 60 and a horizontal measuring operation of measuring the horizontal state of the pickup head 2 can be performed simultaneously.

[0100] Figure 4 is to depict the Figure 1 A cross-sectional view of the chuck 1 and the pick-up head 2 in the chuck receiving portion 20 of the chuck changing device 100; Figure 5 It is depicted Figure 4 A bottom view of the bottom surface of the pickup head 2.

[0101] like Figure 4 and Figure 5 As shown, the chuck can be mounted on the pickup head 2 using magnetic force. The pickup head 2 can be a pickup head for a die bonding device. However, the pickup head 2 is not limited thereto, and pickup heads of various devices can be applicable.

[0102] The chuck 1 may be provided with an adsorption hole 1 a for adsorbing materials such as semiconductor devices, chips or grains, and the pickup head 2 may be provided with an air pressure pipe 2 a for providing a vacuum to the adsorption hole 1 a.

[0103] The chuck 1 may have a substantially rectangular plate shape and may include a hard upper pad 1-1 and a soft lower pad 1-2. Adsorption holes 1a for adsorbing materials may be provided through the upper pad 1-1 and the lower pad 1-2 and may be connected to the air pressure pipe 2a of the pickup head 2.

[0104] In order to install the chuck 1, the pickup head 2 may have a substantially cubic shape and may include a drive shaft connected to a transfer portion for transferring the pickup head 2. As the drive shaft, a hollow tube or the like may be used in order to make it function as the air pressure pipe 2a. However, the shapes of the pickup head 2 and the chuck 1 are not limited to square plates or cubes, and various shapes such as circular plates or cylinders may be used depending on the situation. They are not limited to the shapes shown in the drawings, and pickup heads or chucks of very diverse shapes or types may be used.

[0105] In addition, the pickup head 2 and the chuck 1 can be combined by magnetic force. For example, a permanent magnet M for the pickup head can be formed on the pickup head 2 to provide magnetic force, and the upper pad 1-1 of the chuck 1 can be composed of a magnetic body. In addition, for example, a guide member 2b for guiding the installation position of the chuck 1 can be arranged on the bottom edge of the pickup head 2.

[0106] A plurality of such pick-up heads 2 may be provided. Therefore, the pick-up head 2 may transfer a plurality of materials.

[0107] Figure 6 is to depict the Figure 1 A perspective view of the chuck removal process in which a new chuck 1 in the chuck receiving portion 20 of the chuck replacement device 100 is combined with the pickup head 2 and is taken out from the chuck outlet 21a of the chuck receiving portion 20; Figure 7 The figure shows the process of recovering the aged chuck 1 separated from the pickup head 2 to Figure 1 A three-dimensional diagram of the chuck recovery process in the recovery bucket 32 ​​of the chuck recovery part 30 of the chuck replacement device 100; Figure 8 It is a diagram showing the recovered Figure 1 A perspective view of the use state of the recovery bucket separation process in which the recovery bucket 32 ​​is separated from the plurality of chucks 1 in the chuck recovery part 30 of the chuck replacement device 100.

[0108] like Figures 6 to 8 As shown, the working process of the chuck replacement device 100 of some embodiments of the present invention is described. First, as Figure 6 As shown, the two ends of the stacking rack body 10 are adjusted to be level by using a fixing member F and are respectively set on the first fixing frame D1 and the second fixing frame D2 of the device provided with a picking head 2, and the chuck 1 accommodated in the chuck accommodating portion 20 is installed on the picking head 2 to implement subsequent processes such as grain bonding.

[0109] At this time, once the stacking rack body 10 is set and fixed on the first fixed frame D1 and the second fixed frame D2 in a horizontal state, the chuck accommodating portion 20 formed as an integral part with the stacking rack body 10 can also be firmly aligned in a horizontal state, so that even if the chuck 1 of the picking head 2 is repeatedly replaced, its position deviation, shaking or gap generation can be prevented from the root.

[0110] At the same time, camera 3 (refer to Fig.12 ) By using the horizontal scale line L1 and the vertical scale line L2 near the chuck outlet 21a of the chuck accommodating portion 20 as a reference, the alignment state of the chuck 1 can be confirmed more accurately, so that the chuck 1 can be aligned more accurately.

[0111] Then, if Figure 7 As shown, the pickup head 2 can use the chuck recovery unit 30 to recover the aged chuck 1, and then the pickup head 2 can be repeatedly Figure 6 The chuck replacement process.

[0112] Through this process, when contained in Figure 6 When all or part of the chuck 1 in the chuck accommodating portion 20 is consumed, an operator or a robot can replenish a new chuck 1 through the chuck outlet 21 a of the chuck accommodating portion 20 .

[0113] At this time, the operator or the robot does not need to separate the stacking rack body 10. The robot can keep the stacking rack body 10 fixed in a horizontal state in this state and replenish the new chuck 1 through the chuck outlet 21a of the chuck accommodating portion 20, thereby eliminating the need for the existing chuck bin, greatly reducing the number of components, and greatly improving the accuracy of the chuck replacement operation.

[0114] Then, if Figure 8 As shown, when the chucks 1 recovered to the chuck recovery part 30 are fully or partially loaded, the operator or the robot can separate the recovery bucket 32 ​​of the chuck recovery part 30 and discharge the loaded chucks 1 to the outside.

[0115] Fig. 9 It is to illustrate the use of Figure 1 A cross-sectional view of a pressure measuring process in which the pressure measuring device 40 of the chuck replacement device 100 measures the pressure applied by the pickup head 2; Fig.10 It is to illustrate the use of Figure 1 A cross-sectional view showing a level measurement process in which the directional protrusion 50 of the chuck changing device 100 measures the level of the pickup head 2.

[0116] like Fig. 9 and Fig.10As shown, the chuck replacing device 100 according to some embodiments of the present invention can perform not only the chuck replacing operation but also the pressure measuring operation and the level measuring operation of the pickup head 2 .

[0117] Here, if Fig. 9 and Fig.10 As shown, when performing the pressure measuring operation or the level measuring operation, a pressurizing jig 60 formed in a chuck shape may be mounted on the pickup head 2 instead of the chuck 1.

[0118] The pressurizing jig 60 may include an upper plate 61 that contacts the pickup head 2 , and a lower plate 62 that is formed on the lower surface of the upper plate 61 and pressurizes the pressure measuring device 40 .

[0119] Here, the upper plate 61 can be formed of insulating resin materials such as polyetheretherketone (PEEK) to prevent the propagation of static electricity or radio waves; the lower plate 62 can be formed of metal magnetic materials such as steel or stainless steel to facilitate the transfer of pressure and adhere to the pickup head 2 through magnetic force.

[0120] By using the upper plate 61 made of such an insulating material, it is possible to prevent erroneous operation caused by static electricity or radio waves being transmitted to the pressure measuring device 40 from the root.

[0121] Therefore, if Fig. 9 As shown, when the pickup head driving unit 80 drives the pickup head 2 and makes the pressurizing fixture 60 mounted on the pickup head 2 contact and pressurize the pressure measuring device 40, the pressure measuring device 40 converts the pressure applied by the pressurizing fixture 60 into a pressurizing signal and applies it to the control unit 70. The control unit 70 can automatically and correctly measure the pressure of the pickup head 2 based on such a pressurizing signal. Such a pressurizing force can be used as a reference for judging the normal or abnormal pressure of the chuck 1 in the subsequent die bonding operation and the like.

[0122] In addition, if Fig.10 As shown, when the pickup head driving unit 80 drives the pickup head 2 and makes the pressurizing fixture 60 installed on the pickup head 2 contact and pressurize the directional protrusion 50, the displacement measuring unit 90 arranged between the pickup head 2 and the pickup head driving unit 80 can convert the resistance force pressed by the pressurizing fixture 60 into a displacement signal and apply it to the control unit 70. The control unit 70 can automatically and correctly measure the horizontal state of the pickup head 2 based on the pressurizing signals of 5 points as shown on the lower surface of the pressurizing fixture 60 in the A area of ​​the figure. Such a horizontal state can be a reference for judging the normal or abnormal horizontal state of the chuck 1 in the subsequent die bonding operation and the like.

[0123] Therefore, by providing the pressure measuring device 40 and the directional protrusion 50, not only the replacement operation of the chuck 1 can be performed, but also the pressure measuring operation of measuring and adjusting the pressing force of the pickup head 2 using the pressing fixture 60 and the horizontal measuring operation of measuring the horizontal state of the pickup head 2 can be performed simultaneously.

[0124] Fig.11 is to depict the Figure 1 A plan view of the barcode BC formed on the cartridge 1 in the cartridge accommodating portion 20 of the cartridge changing device 100.

[0125] like Fig.11 As shown, a barcode BC or a two-dimensional code is formed on the upper surface of the chuck 1 or the pressing plate 22 so that information about the chuck 1 can be recognized by a barcode reader or a two-dimensional code reader or a camera.

[0126] Such a barcode BC or a two-dimensional code may contain a unique number of the chuck 1 or information related to the chuck or other process information.

[0127] Therefore, various information included in the barcode BC formed on the chuck 1 or the pressing plate 22 can be acquired by a barcode reader, a two-dimensional code reader, a camera, or the like and used as a reference in the operation of the device.

[0128] Fig.12 It is shown that there is Figure 1 A perspective view of a die bonding apparatus 1000 in a chuck changing apparatus 100 .

[0129] like Fig.12 As shown, the chuck replacement device 100 according to some embodiments of the present invention may be disposed in a die bonding device 1000 .

[0130] like Fig.12 As shown, the stacking frame body 10 can be fixed to the first fixing frame D1 and the second fixing frame D2 of the substrate 1101 formed near the expansion ring 1100 of the die bonding device 1000 through the fixing member F.

[0131] Furthermore, the camera 3 may be a wafer vision camera of the die bonding apparatus 1000 .

[0132] Therefore, according to some embodiments of the present invention, the chuck replacement device 100 can be fixed in a horizontal state to the first fixing frame D1 and the second fixing frame D2 formed on the substrate 1101 of the die bonding device 1000 by using the fixing part F, and after the camera 3 of the die bonding device 1000 uses the horizontal scale line L1 and the vertical scale line L2 formed on the chuck accommodating portion 20 of the chuck replacement device 100 of the present invention to accurately and correctly align the position of the pickup head 2 to the top of the chuck accommodating portion 20, the chuck and the pickup head 2 are used to vacuum adsorb the grain on the cutting tape that has been expanded by the expansion ring 1100, and then, the grain bonding process of bonding on the substrate or packaging to the tray can be performed, and the chuck recovery portion 30 of the chuck replacement device 100 of the present invention can be used to separate and drop the aged or contaminated chuck 1 from the pickup head 2.

[0133] Therefore, when the new chuck 1 is completely or partially consumed, the operator can replenish the chuck 1 into the chuck accommodation portion 20, and when the aged chuck 1 has been completely or partially loaded into the chuck recovery portion 32, the recovery barrel 32 can be separated and the aged chuck 1 can be discharged to the outside. According to the present invention, in addition to the chuck replacement operation, multiple operations such as the pressure measurement operation or the level measurement operation of the pickup head 2 can be performed simultaneously.

[0134] Therefore, according to the present invention, by forming the stacking rack body 10 and at least a part of the chuck accommodating portion 20 into one piece, the positions of multiple chucks 1 can be correctly fixed, and the alignment position of the chuck 1 can be prevented from changing during the chuck replacement process, thereby greatly improving the combination precision and accuracy of the chuck 1 and the picking head 2 when combined, and a chuck recovery portion 30 is formed in the middle and the chuck accommodating portions 20-1 and 20-2 are symmetrically formed on the left and right sides, so that the mobility of the picking head 2 can be improved, and the recovery bucket 32 ​​of the chuck recovery portion 30 without the need for higher accuracy is set to a structure that can be detached by magnetic force, so it is easy to recover the chuck, and in addition, a pressure measuring device 40 and a directional protrusion 50 are also provided, so in addition to the chuck replacement operation, a pressure measuring operation using a pressurizing fixture to measure and adjust the pressure of the picking head 2 and a horizontal measuring operation that can measure the horizontal state of the picking head 2 can also be performed simultaneously.

[0135] Fig.13 FIG. 4 is a sequence diagram illustrating a chuck replacement method according to some embodiments of the present invention.

[0136] like Figures 1 to 13As shown, the chuck replacement device in the chuck replacement method according to some embodiments of the present invention may include: a stacking rack body 10; at least one chuck accommodating portion 20, formed in a portion of the stacking rack body 10, accommodating a plurality of chucks 1 to be mounted on the pick-up head 2; and at least one chuck recovery portion 30, formed in another portion of the stacking rack body 10, recovering aged chucks 1 from the pick-up head 2; the stacking rack body 10 is formed integrally with at least a portion of the chuck accommodating portion 20 to prevent the plurality of chucks 1 accommodated in the chuck accommodating portion 20 from deviating; the chuck replacement method may include: step (a), using a fixing member F to fix the stacking rack body 10; The body 10 is adjusted to be horizontal and then arranged on a device provided with a pickup head 2; step (b), after installing the chuck 1 originally accommodated in the chuck accommodating portion 20 on the pickup head 2, a process step is implemented; step (c), using the chuck recovery portion 30 to recover the aged chuck 1 on the pickup head 2; step (d), when the chuck 1 accommodated in the chuck accommodating portion 20 is consumed in whole or in part, a new chuck 1 is replenished through the chuck outlet 21a of the chuck accommodating portion 20; and step (e), when the chuck 1 recovered to the chuck recovery portion 30 has been filled in whole or in part, the recovery barrel 32 of the chuck recovery portion 30 is separated and the filled chuck 1 is discharged to the outside.

[0137] The present invention describes the embodiment shown in the figure as a reference, but this is only an example. It is understood that those skilled in the art can make various changes and obtain other equivalent embodiments. Therefore, the true technical protection scope of the present invention should be determined according to the technical ideas of the attached claims.

Claims

1. A chuck replacement device, characterized in that: include: Stacking rack body; at least one chuck receiving portion formed in a portion of the stacking frame body for receiving a plurality of chucks to be mounted to the pick-up head; as well as at least one chuck recovery portion formed in another portion of the stacking frame body for recovering aged chucks from the pick-up head; The stacking frame body is formed integrally with at least a portion of the chuck accommodating portion to prevent the plurality of chucks accommodated in the chuck accommodating portion from deviating.

2. The chuck replacement device according to claim 1, characterized in that: The chuck receiving portion comprises: A receiving body, wherein a chuck outlet is formed at the upper portion of the receiving body to discharge the chuck upward, and a receiving space is formed inside the receiving body to receive a plurality of chucks stacked in the vertical direction and liftable, and the receiving body is generally formed in a box shape having an inner side wall for guiding a lifting path of the chuck; A pressing plate formed in the accommodation space and used to support the clamp; and a spring, formed in the accommodating space, for generating a restoring force to apply an elastic force to the chuck toward the chuck outlet; The accommodating body of the chuck accommodating portion is formed integrally with the stacking frame body and is formed of the same material.

3. The chuck replacement device according to claim 2, characterized in that: At least one transverse scale line and at least one longitudinal scale line are formed near the chuck outlet of the chuck accommodating portion so that a camera can confirm an alignment state of the chuck.

4. The chuck replacement device according to claim 2, characterized in that: A magnetic body for temporarily fixing the chuck by magnetic force is formed near the chuck outlet of the chuck accommodation portion.

5. The chuck replacement device according to claim 2, characterized in that: A barcode or a two-dimensional code is formed on the upper surface of the clamp or the pressing plate so that information about the clamp can be identified by a barcode or two-dimensional code reader.

6. The chuck replacement device according to claim 1, characterized in that: The stacking rack body is formed with fixing holes at both ends so as to be fixed to the first fixing rack and the second fixing rack of the device through fixing parts respectively. The chuck recovery part is formed in the central part, and the left chuck accommodating part and the right chuck accommodating part are respectively formed on the left and right sides of the chuck recovery part.

7. The chuck replacement device according to claim 6, characterized in that: The stacking rack body is formed into a left-right symmetrical structure with the chuck recovery portion as the center to improve the camera recognition capability and the chuck alignment.

8. The chuck replacement device according to claim 7, characterized in that: The stacking frame body is formed as a square rod shape as a whole to clarify the front, back, left, and right directions of the chuck. The chuck accommodating portion and the chuck recovery portion are also formed as a square box shape as a whole and have the same front, back, left, and right directions as the stacking frame body.

9. The chuck replacement device according to claim 1, characterized in that: A pressure measuring device for measuring the pressure applied by the pickup head is formed on one side of the upper surface of the stacker main body.

10. The chuck replacement device according to claim 9, characterized in that: When the pickup head pressurizes the pressure measuring device, a pressurizing jig formed in the shape of the collet is installed in the pickup head instead of the collet.

11. The chuck replacement device according to claim 10, characterized in that: The pressurizing fixture comprises: an upper plate for contacting the pickup head; and The lower plate is formed on the lower surface of the upper plate and is used to pressurize the pressure measuring device.

12. The chuck replacement device according to claim 11, characterized in that: The upper plate is formed of an insulating resin material to prevent the propagation of static electricity or electric waves; the lower plate is formed of a metal magnetic material to facilitate the transmission of pressure and to be attached to the pickup head by magnetic force.

13. The chuck replacement device according to claim 1, characterized in that: A directional protrusion is formed on the other side of the upper surface of the stacking frame body to confirm the horizontal state by measuring multiple points of the pickup head or the chuck or pressurizing fixture installed on the pickup head.

14. The chuck replacement device according to claim 1, characterized in that: The chuck recovery unit comprises: a latch portion formed with a plurality of latches to separate the aged chuck from the pickup head; and A recovery bucket is formed with a chuck entrance at the upper portion of the recovery bucket to recover the chuck separated from the pickup head by the latch portion, and the recovery bucket is formed with a recovery space so that the multiple chucks recovered inside can fall naturally and then be stacked in the upper and lower directions.

15. The chuck replacement device according to claim 14, characterized in that: The recovery bucket is configured as a structure that utilizes magnetic force to achieve installation or removal of the recovery bucket on the stacking rack body by forming a magnetic fixing plate on the stacking rack body or a magnet formed on the stacking rack body, so that the operator can discharge the chuck recovered from the recovery bucket to the outside.

16. The chuck replacement device according to claim 14, characterized in that: A confirmation window is formed on the recovery barrel so that the chuck recovered into the inside can be visually confirmed.

17. The chuck replacement device according to claim 1, characterized in that: The pickup head is a pickup head for a die bonding device; The stacking frame body is fixed to a first fixing frame and a second fixing frame formed near an expansion ring of the die bonding device through a fixing member.

18. The chuck replacement device according to claim 2, characterized in that: The camera is a wafer vision camera of a die bonding device.

19. A chuck replacement method for a chuck replacement device, characterized in that: The chuck replacement device comprises: a stacking frame body; at least one chuck accommodating portion formed in a part of the stacking frame body for accommodating a plurality of chucks to be mounted on a pick-up head; and at least one chuck recovery portion formed in another part of the stacking frame body for recovering aged chucks from the pick-up head; the stacking frame body is formed integrally with at least a part of the chuck accommodating portion to prevent the plurality of chucks accommodated in the chuck accommodating portion from deviating; The chuck replacement method comprises: Step (a), adjusting the stacking frame body to a horizontal level by using a fixing member and then placing it on a device provided with the picking head; Step (b), performing a process step after installing the chuck originally accommodated in the chuck accommodation portion on the pickup head; Step (c), using the chuck recovery unit to recover the aged chuck on the pickup head; Step (d), when the chuck accommodated in the chuck accommodating portion is consumed in whole or in part, replenishing a new chuck through the chuck outlet of the chuck accommodating portion; and Step (e), when the chucks recovered to the chuck recovery part have been fully or partially filled, separating the recovery bucket of the chuck recovery part and discharging the filled chucks to the outside.

20. A chuck replacement device, characterized in that: The chuck replacement device comprises: Stacking rack body; at least one chuck receiving portion formed in a portion of the stacker frame body for receiving a plurality of chucks to be mounted to a pick-up head; and at least one chuck recovery portion formed in another portion of the stacking frame body for recovering aged chucks from the pick-up head; The stacking frame body is formed integrally with at least a portion of the chuck receiving portion to prevent the plurality of chucks received in the chuck receiving portion from deviating; The chuck receiving portion comprises: A receiving body, wherein a chuck outlet is formed at the upper portion of the receiving body to discharge the chuck upward, and a receiving space is formed inside the receiving body to receive a plurality of chucks stacked in the vertical direction and liftable, and the receiving body is generally formed in a box shape having an inner side wall for guiding a lifting path of the chuck; A pressing plate formed in the accommodation space and used to support the clamp; and a spring, formed in the accommodating space, for generating a restoring force to apply an elastic force to the chuck toward the chuck outlet; The receiving body of the chuck receiving portion is formed integrally with the stacking frame body and is formed of the same material; At least one transverse scale line and at least one longitudinal scale line are formed near the chuck outlet of the chuck receiving portion so that a camera can confirm the alignment state of the chuck; A pressure measuring device for measuring the pressure applied by the pickup head is formed on one side of the upper surface of the stacking rack body; A directional protrusion is formed on the other side of the upper surface of the stacking frame body to confirm the horizontal state by measuring multiple points of the pick-up head or the chuck or pressure fixture installed on the pick-up head; The chuck recovery unit comprises: a latch portion formed with a plurality of latches to separate the aged chuck from the pickup head; and A recovery bucket, wherein a chuck inlet is formed at the upper portion of the recovery bucket to recover the chuck separated from the pickup head by the latch portion, and the recovery bucket is formed with a recovery space so that a plurality of chucks recovered into the interior fall naturally and are stacked in an up-and-down direction; The recovery bucket is configured as a structure that utilizes magnetic force to achieve installation or removal of the recovery bucket on the stacking rack body by forming a magnetic fixing plate on the stacking rack body or a magnet formed on the stacking rack body, so that the operator can discharge the chuck recovered from the recovery bucket to the outside.

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