Micro-nano robot driving control device and preparation method thereof

Abstract

The invention discloses a micro-nano robot driving control device, and relates to the technical field of micro-nano robot driving control, the micro-nano robot driving control device comprises a plurality of ultrasonic driving units, a driving cavity is enclosed by the plurality of ultrasonic driving units, and the interior of the driving cavity is used for placing a micro-nano robot. And each ultrasonic driving unit can radiate ultrasonic waves into the driving cavity and can act on the micro-nano robot. The micro-nano robot driving and controlling device provided by the invention is convenient for driving and controlling the micro-nano robot. The invention further provides a preparation method of the micro-nano robot driving control device.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-nano robot driving control, and in particular to a micro-nano robot driving control device and a preparation method thereof. Background Art

[0002] With the advancement of micro-nano manufacturing and operating systems, various micro-nano robots have emerged. These robots convert external energy into their own kinetic energy by consuming fuel in the surrounding medium or utilizing external energy such as light, electric fields, magnetic fields, or their combination.

[0003] The commonly used method at present is to modify magnetic materials on the surface of the micro-nano robot and control the direction of the micro-nano robot by the direction of the external magnetic field. However, this method requires the micro-nano robot to have magnetism and to set up a rotating magnetic field, which makes driving and control inconvenient. Summary of the invention

[0004] The purpose of the present invention is to provide a micro-nano robot driving and controlling device and a preparation method thereof, so as to solve the problems existing in the above-mentioned prior art and facilitate the driving and controlling of the micro-nano robot.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a micro-nano robot driving and controlling device, comprising a plurality of ultrasonic driving units, wherein the plurality of ultrasonic driving units surround a driving cavity, wherein the driving cavity is used for placing the micro-nano robot, and each of the ultrasonic driving units can radiate ultrasonic waves into the driving cavity and can act on the micro-nano robot.

[0007] Preferably, the plurality of ultrasonic driving units are arranged in a ring shape.

[0008] Preferably, each of the ultrasonic driving units is configured as a piezoelectric ultrasonic transducer.

[0009] Preferably, each of the ultrasonic driving units includes an inner electrode layer, a piezoelectric layer and an outer electrode layer which are arranged in sequence away from the driving cavity in the thickness direction; the piezoelectric layer is electrically connected to the inner electrode layer and the outer electrode layer, and the inner electrode layer and the outer electrode layer are used to be electrically connected to an external power supply.

[0010] Preferably, the multiple inner electrode layers of the multiple ultrasonic drive units are integrally formed in the circumferential direction; the multiple piezoelectric layers of the multiple ultrasonic drive units are integrally formed in the circumferential direction; and there is a gap between the ends of two circumferentially adjacent outer electrode layers.

[0011] Preferably, the plurality of piezoelectric layers form a piezoelectric ring, each of the piezoelectric rings comprises an annular frame and a plurality of piezoelectric single crystal particles fixedly distributed in the annular frame, and each of the piezoelectric single crystal particles is electrically connected to the corresponding inner electrode layer and the outer electrode layer.

[0012] Preferably, it further comprises a base, and the plurality of ultrasonic driving units are fixedly arranged on the base.

[0013] Preferably, it also includes a sound-transmitting sealing layer, which is wrapped around each of the ultrasonic driving units.

[0014] The present invention also provides a method for preparing a micro-nano robot driving and controlling device, comprising the following steps:

[0015] Preparation: preparing a plurality of ultrasonic driving units and forming a driving cavity;

[0016] Fixing: Fixing the plurality of ultrasonic driving units so that the micro-nano robot can be placed in the plurality of driving cavities.

[0017] Preferably, each of the ultrasonic drive units is configured as a piezoelectric ultrasonic transducer, a plurality of the ultrasonic drive units are fixedly arranged on a substrate, and a plurality of the ultrasonic drive units are wrapped with a sound-transmitting sealing layer; each of the ultrasonic drive units includes an inner electrode layer, a piezoelectric layer and an outer electrode layer arranged in sequence away from the drive cavity in the thickness direction, and the piezoelectric layer is electrically connected to the inner electrode layer and the outer electrode layer; the plurality of the inner electrode layers are integrally formed in the circumferential direction; the plurality of the piezoelectric layers are integrally formed in the circumferential direction; there is a gap between the ends of two circumferentially adjacent outer electrode layers; the plurality of the piezoelectric layers form a piezoelectric ring, and the piezoelectric ring includes an annular frame and a plurality of piezoelectric single crystal particles fixedly distributed in the annular frame, and each of the piezoelectric single crystal particles is electrically connected to the corresponding inner electrode layer and the outer electrode layer;

[0018] In the preparation step: a plurality of piezoelectric single crystal particles are fixed through an annular frame to form the piezoelectric ring, and electrode slurry is fixed on the inner and outer circumferences of the piezoelectric ring, the inner circumference of the piezoelectric ring is formed into the inner electrode layer, and the outer circumference of the piezoelectric ring is divided into a plurality of outer electrode layers; then the sound-transmitting sealing layer is wrapped around the outer circumference of the piezoelectric ring;

[0019] In the fixing step, the ultrasonic driving unit is fixed on the substrate.

[0020] Compared with the prior art, the present invention has achieved the following technical effects:

[0021] The micro-nano robot driving and controlling device provided by the present invention is provided with a plurality of ultrasonic driving units to drive the micro-nano robot in a circumferential direction. The plurality of ultrasonic driving units can radiate ultrasonic waves into a driving cavity in different directions and thus can drive and control the micro-nano robot in different directions. The control of the micro-nano robot can be achieved by controlling the frequency, phase and other information of the ultrasonic waves radiated by the ultrasonic driving units, thereby flexibly driving and controlling the micro-nano robot.

[0022] The preparation method of the micro-nano robot driving and controlling device provided by the present invention sets multiple ultrasonic driving units, and the multiple ultrasonic driving units can radiate ultrasonic waves into the driving cavity in different directions and thus can drive and control the micro-nano robot in different directions, which is convenient for flexible driving and controlling the micro-nano robot. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 A schematic diagram of the structure of the micro-nano robot driving and controlling device provided in Example 1;

[0025] Figure 2 A schematic diagram of the explosion structure of the micro-nano robot driving and controlling device provided in Example 1;

[0026] Figure 3 A schematic diagram of the structure of a piezoelectric ring provided in Example 1;

[0027] Figure 4 This is an overall schematic diagram of multiple ultrasonic units provided in Example 1.

[0028] In the figure: 1-micro-nano robot driving and controlling device; 11-ultrasonic driving unit; 12-driving cavity; 13-inner electrode layer; 14-outer electrode layer; 15-piezoelectric ring; 151-piezoelectric single crystal particle; 152-ring frame; 16-substrate; 17-sound-transparent sealing layer; 18-lead. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] The purpose of the present invention is to provide a micro-nano robot driving and controlling device and a preparation method thereof, so as to solve the problems existing in the above-mentioned prior art and facilitate the driving and controlling of the micro-nano robot.

[0031] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] Embodiment 1

[0033] This embodiment provides a micro-nano robot driving and controlling device 1, see Figure 1 and Figure 2 , including a plurality of ultrasonic driving units 11, the plurality of ultrasonic driving units 11 surround a driving cavity 12, the driving cavity 12 is used to place the micro-nano robot, and each ultrasonic driving unit 11 can radiate ultrasonic waves into the driving cavity 12 and can act on the micro-nano robot.

[0034] A plurality of ultrasonic driving units 11 are arranged to drive the micro-nano robot in a circumferential direction. The plurality of ultrasonic driving units 11 can radiate ultrasonic waves into the driving cavity 12 in different directions and thus can drive and control the micro-nano robot in different directions. The control of the micro-nano robot can be achieved by controlling the frequency, phase and other information of the ultrasonic waves radiated by the ultrasonic driving units 11, thereby flexibly driving and controlling the micro-nano robot.

[0035] In the optional scheme of this embodiment, it is more preferred that multiple ultrasonic driving units 11 are arranged in a circular shape. By setting it in a circular shape, the driving cavity 12 is correspondingly set to a cylindrical shape. There is no gap in the circumferential direction and it is convenient for focusing control. The cylindrical driving cavity 12 makes the micro-nano robot placed in the driving cavity 12 at the same distance from each ultrasonic driving unit 11, which is convenient for precise control. Among them, the ultrasonic driving unit 11 can be set to four.

[0036] In addition, the shape of the driving cavity 12 can also be set to other shapes according to needs, such as a rectangular shape.

[0037] In the optional scheme of this embodiment, it is more preferred that each ultrasonic driving unit 11 is configured as a piezoelectric ultrasonic transducer. By configuring it as a piezoelectric ultrasonic transducer, controlling the voltage information of the external power supply can control the information of the radiated ultrasonic wave, thereby driving and controlling the micro-nano robot.

[0038] In the optional scheme of this embodiment, it is more preferred that each ultrasonic driving unit 11 includes an inner electrode layer 13, a piezoelectric layer and an outer electrode layer 14 arranged in sequence along the driving cavity 12 in the thickness direction; the piezoelectric layer is electrically connected to the inner electrode layer 13 and the outer electrode layer 14, and the inner electrode layer 13 and the outer electrode layer 14 are electrically connected to an external power supply through a lead 18. Each ultrasonic driving unit 11 is equivalent to a small focused transducer, and each transducer is individually controlled by a signal source, and multiple signal sources are regulated to generate alternating current signals of different frequencies, phases and amplitudes, and are individually connected to the positive and negative leads of multiple transducer array elements. Due to the inverse piezoelectric effect of a single ultrasonic driving unit 11, the piezoelectric layer generates an ultrasonic wave with the same frequency as the electrical signal. The sound wave radiates directly centripetally to form an ultrasonic sound field focused on the center of the driving cavity 12, and acts on the micro-nano robot to form the power of the micro-nano robot.

[0039] Among the optional schemes of this embodiment, it is more preferred that the multiple inner electrode layers 13 of the multiple ultrasonic drive units 11 are integrally formed in the circumferential direction to improve the integrity; the multiple piezoelectric layers of the multiple ultrasonic drive units 11 are integrally formed in the circumferential direction to improve the integrity; there is a gap between the ends of two circumferentially adjacent outer electrode layers 14, so that the whole is divided into multiple ultrasonic drive units 11 in the circumferential direction, and each ultrasonic drive unit 11 can be controlled separately; wherein the inner electrode layer 11 can only lead out one lead wire 18, and the multiple outer electrode layers 14 respectively lead out the leads 18.

[0040] Among the optional solutions of this embodiment, it is more preferred to refer to Figure 3 and Figure 4 , multiple piezoelectric layers form a piezoelectric ring 15, and the piezoelectric ring 15 includes an annular frame 152 and multiple piezoelectric single crystal particles 151 fixedly distributed in the annular frame 152, and each piezoelectric single crystal particle 151 is electrically connected to the corresponding inner electrode layer 13 and the outer electrode layer 14 to achieve electrical conduction, wherein the annular frame 152 is set to an epoxy resin material, and each piezoelectric single crystal particle 151 is embedded in the annular frame 152 at intervals for fixation; wherein the piezoelectric single crystal particles 151 are arranged in multiple layers in the axial direction, and each layer is distributed in multiple layers in the circumferential direction.

[0041] In the optional scheme of this embodiment, more preferably, the micro-nano robot driving and controlling device 1 provided in this embodiment also includes a substrate 16, and multiple ultrasonic driving units 11 are fixedly arranged on the substrate 16, wherein the substrate 16 is set as a circular silicon wafer, and the ultrasonic driving units 11 are bonded and fixed to the substrate 16 by epoxy resin; by setting the substrate 16, it is convenient to connect with the whole and other components.

[0042] Among the optional schemes of this embodiment, it is more preferred that the micro-nano robot driving and controlling device 1 provided in this embodiment also includes a sound-transmitting sealing layer 17, and the sound-transmitting sealing layer 17 is wrapped around the outside of each ultrasonic driving unit 11, wherein the sound-transmitting sealing layer 17 is formed by solidifying a polyurethane mixed liquid, and the whole is packaged and protected without affecting the ultrasonic transmission. The sound-transmitting sealing layer 17 can also use other ultrasonic propagation media, and is not limited to the above-mentioned materials.

[0043] Embodiment 2

[0044] This embodiment provides a method for preparing a micro-nano robot driving and controlling device as provided in Embodiment 1, comprising the following steps:

[0045] Preparation: prepare a plurality of ultrasonic drive units 11 and form a drive cavity 12; fix a plurality of piezoelectric single crystal particles 151 through an annular frame 152 to form a piezoelectric ring 15, and fix electrode slurry on the inner and outer surfaces of the piezoelectric ring 15, form an inner electrode layer 13 on the inner surface of the piezoelectric ring 15, and divide the outer surface of the piezoelectric ring 15 into a plurality of outer electrode layers 14; and then wrap a sound-transmitting sealing layer 17 around the piezoelectric ring 15;

[0046] Fixation: The ultrasonic driving unit 11 is fixed on the substrate 16 , and the micro-nano robot can be placed in a plurality of driving cavities 12 .

[0047] More specifically, the preparation method comprises the following steps:

[0048] preparing a piezoelectric single crystal piece, and cutting it into piezoelectric single crystal particles by using a cutting machine;

[0049] The piezoelectric single crystal particles are fixed around a circular mold, the epoxy resin mixture is poured into the circular mold, and the circular mold is placed in a vacuum box for vacuum extraction, so that the epoxy resin mixture penetrates into the pores between the piezoelectric single crystal particles. After the epoxy resin is solidified, the mold is demolded to form a piezoelectric ring 15. Figure 3 As shown; the circular mold can be configured to be a closed circular mold formed by two circular rings that can be detachably buckled together, wherein the inner wall of one side of the circular ring is provided with a plurality of piezoelectric single crystal particle placement grooves, and is buckled and closed by another circular ring, and a potting hole is provided on the circular mold;

[0050] The inner and outer surfaces of the piezoelectric ring 15 are plated with a thin layer of silver paste to form inner and outer electrode surfaces, and the outer electrode surface is divided into four equal parts to form a U-shaped four-element piezoelectric ring, and the electrode leads are welded, an electrode lead is led out of the inner electrode alone, and an electrode lead is led out of each element in the outer electrode alone, such as Figure 4 As shown;

[0051] The piezoelectric ring 15 with the electrode lead welded is fixed to the potting mold, and then the polyurethane mixture is potted. The polyurethane mixture can be acoustically matched with the piezoelectric composite material to allow the sound waves to be better radiated into the medium. After the polyurethane mixture is solidified, a sound-transmitting sealing layer 17 is formed, and a demoulding process is performed; wherein the potting mold can be configured to be a closed circular ring mold formed by two circular rings that can be detachably buckled, and a potting hole is provided on the circular ring mold;

[0052] The substrate 16 is cleaned, and then the ultrasonic drive unit 11 and the substrate 16 are bonded with epoxy resin. A signal generator is used to control each ultrasonic drive unit 11 separately to form a centripetal radiating ultrasonic sound field controlled by four array elements in a coordinated manner. The prepared micro-nano robot is placed in the middle of the sound field, thereby completing the preparation of a micro-nano robot driving and controlling device that centripetally focuses and radiates ultrasonic waves.

[0053] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A micro-nano robot driving and controlling device, characterized in that: The invention comprises a plurality of ultrasonic drive units (11), wherein the plurality of ultrasonic drive units (11) are provided with a drive cavity (12) surrounding each other, wherein the drive cavity (12) is used to place a micro-nano robot, and each of the ultrasonic drive units (11) is capable of radiating ultrasonic waves into the drive cavity (12) and acting on the micro-nano robot.

2. The micro-nano robot driving and controlling device according to claim 1, characterized in that: The plurality of ultrasonic drive units (11) are arranged in a circular ring shape.

3. The micro-nano robot driving and controlling device according to claim 2, characterized in that: Each of the ultrasonic drive units (11) is configured as a piezoelectric ultrasonic transducer.

4. The micro-nano robot driving and controlling device according to claim 3, characterized in that: Each of the ultrasonic drive units (11) comprises, in the thickness direction, an inner electrode layer (13), a piezoelectric layer and an outer electrode layer (14) which are arranged in sequence away from the drive cavity (12); the piezoelectric layer is electrically connected to the inner electrode layer (13) and the outer electrode layer (14), and the inner electrode layer (13) and the outer electrode layer (14) are used to be electrically connected to an external power supply.

5. The micro-nano robot driving and controlling device according to claim 4, characterized in that: The plurality of inner electrode layers (13) of the plurality of ultrasonic drive units (11) are integrally formed in the circumferential direction; the plurality of piezoelectric layers of the plurality of ultrasonic drive units (11) are integrally formed in the circumferential direction; and there is a gap between the ends of two circumferentially adjacent outer electrode layers (14).

6. The micro-nano robot driving and controlling device according to claim 5, characterized in that: The plurality of piezoelectric layers form a piezoelectric ring (15), each of the piezoelectric rings (15) comprising an annular frame (152) and a plurality of piezoelectric single crystal particles (151) fixedly distributed within the annular frame (152), each of the piezoelectric single crystal particles (151) being electrically connected to the corresponding inner electrode layer (13) and the outer electrode layer (14).

7. The micro-nano robot driving and controlling device according to claim 1, characterized in that: It also comprises a base (16), on which the plurality of ultrasonic drive units (11) are fixedly arranged.

8. The micro-nano robot driving and controlling device according to claim 1, characterized in that: It also comprises a sound-transmitting sealing layer (17), wherein the sound-transmitting sealing layer (17) is wrapped around the outside of each of the ultrasonic driving units (11).

9. A method for preparing a micro-nano robot driving and controlling device according to any one of claims 1 to 8, characterized in that: The steps include: Preparation: preparing a plurality of ultrasonic drive units (11) so as to enclose a drive cavity (12); Fixing: fixing the plurality of ultrasonic drive units (11) so that the micro-nano robot can be placed in the plurality of drive cavities (12).

10. The preparation method according to claim 9, characterized in that: Each of the ultrasonic drive units (11) is configured as a piezoelectric ultrasonic transducer, and a plurality of the ultrasonic drive units (11) are fixedly arranged on a substrate (16), and a plurality of the ultrasonic drive units (11) are wrapped with a sound-transmitting sealing layer (17); each of the ultrasonic drive units (11) comprises, in a thickness direction, an inner electrode layer (13), a piezoelectric layer and an outer electrode layer (14) which are sequentially arranged away from the drive cavity (12), and the piezoelectric layer is electrically connected to the inner electrode layer (13) and the outer electrode layer (14); The inner electrode layers (13) are integrally formed in the circumferential direction; the plurality of piezoelectric layers are integrally formed in the circumferential direction; there is a gap between the ends of two circumferentially adjacent outer electrode layers (14); the plurality of piezoelectric layers form a piezoelectric ring (15), each of the piezoelectric rings (15) comprises an annular frame (152) and a plurality of piezoelectric single crystal particles (151) fixedly distributed in the annular frame (152), and each of the piezoelectric single crystal particles (151) is electrically connected to the corresponding inner electrode layer (13) and the outer electrode layer (14); The preparation steps include: fixing a plurality of piezoelectric single crystal particles (151) through an annular frame (152) to form the piezoelectric ring (15), fixing electrode slurry on the inner and outer surfaces of the piezoelectric ring (15), forming the inner electrode layer (13) on the inner surface of the piezoelectric ring (15), and dividing the outer surface of the piezoelectric ring (15) into a plurality of outer electrode layers (14); and then wrapping the sound-transmitting sealing layer (17) around the outer periphery of the piezoelectric ring (15); In the fixing step, the ultrasonic driving unit (11) is fixed on the base (16).

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