Particle tester based on industrial semiconductor ultrapure water detection

Abstract

The invention discloses a particle tester based on industrial semiconductor ultrapure water detection, and relates to the technical field of particle detection. The device body comprises a conveying assembly for conveying, a lifting assembly connected with the device body, an upper clamping assembly connected with the lifting assembly, a heating assembly connected with the upper clamping assembly and a temperature sensor assembly connected with the upper clamping assembly. The upper clamping assembly is connected with the conveying assembly, the lower clamping assembly is connected with the conveying assembly, and the collecting assembly is connected with the device body. The upper monitoring assembly can regulate and control the corresponding collection assemblies to work according to address codes, synchronous work of different collection assemblies is achieved, work data are transmitted to the upper monitoring assembly in real time, and the liquid particulate matter data sampling efficiency and accuracy are improved.

Description

Technical Field

[0001] The invention relates to the technical field of particle detection, in particular to a particle tester based on industrial semiconductor ultrapure water detection. Background Art

[0002] In the semiconductor manufacturing process, ultrapure water plays a vital role in four aspects, including wafer cleaning, photoresist preparation, chemical reagent dilution, and equipment cooling and flushing. In summary, the semiconductor industry has extremely stringent requirements on the quality of ultrapure water, which needs to meet specific standards for conductivity, particle content, microbial level, and total organic carbon. It can be seen that ultrapure water in semiconductors plays a vital role in the semiconductor manufacturing process, ensuring the high quality and excellent performance of chips. Detection equipment is mainly used in the monitoring and detection of ultrapure water to ensure that the number and size of particles in ultrapure water meet production requirements. By regularly detecting particle contamination in ultrapure water, potential problems can be discovered in time and necessary measures can be taken, such as replacing filters, adjusting production parameters, etc., to ensure the quality of ultrapure water. The particle testing device is mainly used to count particles in liquids or bodies, and usually uses the light obscuration method to infer the area occupied by particles, and then calculate the particle content per unit volume. However, the light obscuration method is not convenient for multi-point collection at the same time, and when the particulate matter in the water changes significantly, the turbidity of the liquid reacts slowly, resulting in the light obscuration method cannot sensitively respond to the size of particles in the measured liquid and the number of corresponding sizes, which in turn leads to inaccurate test data. For this reason, we propose a particle tester based on industrial semiconductor ultrapure water detection. Summary of the invention

[0003] The object of the present invention is to provide a particle tester based on industrial semiconductor ultrapure water detection.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a particle tester based on industrial semiconductor ultrapure water detection, comprising a device body, wherein the device body comprises a conveying assembly for transmitting and transporting, a lifting assembly connected to the device body, an upper clamping assembly connected to the lifting assembly, a heating assembly connected to the upper clamping assembly, a temperature sensor assembly connected to the upper clamping assembly, a collection assembly connected to the device body, a limiting frame connected to the collection assembly, an extension structure connected to the limiting frame, a power assembly connected to the extension structure, and a transmission assembly connected to the power assembly; The heating assembly includes a reserved groove and a ceramic heating plate, the ceramic heating plate is arranged inside the reserved groove, the temperature sensor assembly includes a first temperature sensor and a second temperature sensor, an elastic thermal pad is arranged between the first temperature sensor and the second temperature sensor, the first temperature sensor is arranged on the right side of the second temperature sensor, an upper monitoring assembly is arranged inside the device body, and the acquisition assembly includes a control device, a connecting line and a sampling probe, and the connecting line and the sampling probe are fixed to the lower end of the control device; The stretching structure includes a fixed rod, a stretching column, a limiting plate, an arc groove, a vertical groove and a rear plate body, the left and right ends of the two fixed rods are fixed inside the limiting frame, the two vertical grooves are opened on both sides of the limiting frame, the two sides of the limiting plate slide inside the two vertical grooves, the rear plate body is arranged inside the limiting frame and fixed, the arc groove is opened inside the limiting plate, the stretching column is slidably connected inside the arc groove, and the plurality of control devices are fixed in front of the stretching column; The power assembly includes a lifting screw rod 2, a power block and a motor 2, wherein the motor 2 is fixed to the top surface of the limiting frame, the upper end of the lifting screw rod 2 is fixed to the lower end of the motor 2, the power block is threadedly connected to the lifting screw rod 2, and a limiting plate is fixed in front of the power block; The transmission assembly includes a driving wheel, a driven wheel, a screw rod three, a transmission rod, a dovetail block and a transmission plate, wherein belts are installed on the driving wheel and the driven wheel, the upper end of the screw rod three is fixed to the output end of the driven wheel, the bottom of the driven wheel is transmitted with a transmission wheel, the transmission rod is connected to the transmission wheel through a belt, the upper end of the dovetail block is fixed to the lower end of the transmission rod, a dovetail groove is opened on the transmission plate, the dovetail block is slidably connected to the dovetail groove, the screw rod three is threadedly connected to the transmission plate, and a plurality of the control devices are fixed to the transmission plate.

[0005] As a further solution of the present invention: the conveying assembly includes a water inlet pipe and a water outlet pipe, the water inlet pipe is arranged on the right side of the device body, the water outlet pipe is arranged on the left side of the device body, and a water pump is arranged on the water inlet pipe.

[0006] As a further solution of the present invention: the lifting assembly includes a clamping frame, a receiving block, a supporting slide bar, a connecting arm and a clamping arm one, a fixing groove is opened inside the clamping frame, side grooves are opened on both sides of the fixing groove, a lifting rod is fixed inside the side groove, the lower ends of the two lifting rods are fixedly connected to the lifting blocks, the receiving block is fixed between the two lifting blocks, the supporting slide bar is fixed inside the clamping frame, a telescopic rod is fixed to the left ends of the two lifting blocks, the left end of the telescopic rod is fixed to the right end of the connecting arm, a clamping plate is fixed between the two connecting arms, and the lower end of the clamping plate is fixed to the upper end of the clamping arm one.

[0007] As a further solution of the present invention: the upper clamping assembly includes a clamping arm 2 and a motor 1, the inner side of the clamping arm 2 is threadedly connected to the clamping arm 3, the top of the clamping arm 3 is fixed with a telescopic frame, the motor 1 is fixed inside the telescopic frame, the right end of the motor 1 is fixed with a fine-tuning screw 1, the fine-tuning screw 1 is threadedly connected to a fine-tuning block, and the upper end of the fine-tuning block is fixed to the lower end of the clamping arm 2.

[0008] As a further solution of the present invention: the upper monitoring component includes a hardware platform and a software system, and infrared sensors are fixed on the upper clamping component and the lower clamping component.

[0009] As a further solution of the present invention: two lower clamping assemblies are arranged on the conveying assembly, and the heating assembly is respectively arranged on the top surface and the bottom surface of the upper clamping assembly, and the lower clamping assembly includes an adjusting rod, and the lower clamping assembly is fixedly connected to the bottom surface of the upper clamping assembly through the adjusting rod, and the top surface of the upper clamping assembly is fixedly connected to a clamping arm.

[0010] As a further solution of the present invention: the acquisition component also includes a signal conditioning circuit, a microcontroller and a communication module, an area to be detected is set inside the device body, and multiple acquisition components are placed in the area to be detected inside the device body.

[0011] By adopting the above technical solution, compared with the prior art, the beneficial effects of the present invention are: 1. The present invention heats the side wall of the pipeline inside the detection area by adopting the corresponding clamping and heating method of the upper clamping component and the lower clamping component. The upper monitoring component can control the corresponding collection component to work according to the address code, realize the synchronous work of different collection components, and transmit the working data to the upper monitoring component in real time, thereby improving the sampling efficiency and accuracy of liquid particle data; 2. The present invention uses a collection component to correspond the standard particle size of various particles to the standard voltage signal of the voltage pulse signal, and timely feeds back the standard voltage signal data to the upper monitoring component. The upper monitoring component corresponds to the particle size interval of a certain particle according to the standard voltage signal, and then determines the number of particles in each particle size interval, thereby realizing real-time and specific detection of the measured liquid particles; 3. The present invention senses the temperature through the first temperature sensor and the second temperature sensor. When heating, the ceramic heating sheet in the heating assembly heats the elastic thermal pad, which can increase the temperature inside the pipeline, making the particles inside the liquid flowing through the pipeline active, thereby preventing the accumulation of particles. At the same time, the particles in the water are collected at multiple points, and when the particles in the water change significantly, the size of the particles in the measured liquid and the number of corresponding sizes can be sensitively reflected; 4. The present invention uses two motors to act on the power blocks, thereby driving the limiting plate to slide inside the vertical slot, thereby driving multiple control devices fixed in front of the extension column to extend, and multiple extension columns slide obliquely inside the arc slot, thereby regularly extending, and cooperating with the upper monitoring component, and then intuitively displaying the temperature distribution inside the pipeline on the display terminal, thereby realizing uniform detection of the temperature inside the pipeline; 5. The present invention drives the driving wheel and the driven wheel to rotate under the action of the belt through the second motor, and drives the transmission wheel at the bottom to rotate, so that the third screw and the transmission rod can simultaneously transmit multiple vertical control devices, and the dovetail block slides inside the dovetail groove, thereby realizing simultaneous sensing of the horizontal and vertical control devices, thereby uniformly sensing the temperature of the inner wall of the pipeline, and cooperating with the heating component, the detection effect is accurate.

[0012] Other advantages, objectives and features of the present invention will be set forth in part in the following description and, in part, will be apparent to those skilled in the art based on an examination of the following or may be taught from the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a first stereoscopic schematic diagram in an embodiment of the present invention; Figure 2 It is a schematic diagram of the connection structure of the lifting assembly, the upper clamping assembly and the heating assembly in an embodiment of the present invention; Figure 3 for Figure 2 Schematic diagram at A in the middle; Figure 4 It is a schematic diagram of the connection structure of the lifting assembly, the temperature sensor assembly and the elastic thermal pad in an embodiment of the present invention; Figure 5 for Figure 4 Schematic diagram at B in the middle; Figure 6 This is a schematic diagram of the connection structure of the lower clamping assembly, the upper clamping assembly and the heating assembly in an embodiment of the present invention; Figure 7 It is a first stereoscopic schematic diagram of a collection component in an embodiment of the present invention; Figure 8 is a second stereoscopic schematic diagram of a collection component in an embodiment of the present invention; Fig. 9 Schematic diagram of the connection structure between the limiting frame and the stretching structure in an embodiment of the present invention; Fig.10 It is a schematic diagram of the connection structure of the limiting frame, the extension structure and the transmission assembly in an embodiment of the present invention; Fig.11 is a three-dimensional schematic diagram of a power assembly in an embodiment of the present invention; Fig.12 Schematic diagram of the connection structure between the limiting plate and the arc groove in an embodiment of the present invention; Fig.13 This is a schematic diagram of the connection structure between the transmission component and the collection component in an embodiment of the present invention; Fig.14 Schematic diagram of the connection structure of the dovetail block and the dovetail groove in an embodiment of the present invention.

[0014] In the figure: 1, device body; 2, conveying assembly; 21, water inlet pipe; 22, water outlet pipe; 3. Lifting assembly; 31. Clamping frame; 32. Lifting rod; 33. Lifting block; 34. Undertaking block; 35. Support slide bar; 36. Telescopic rod; 37. Connecting arm; 38. Clamping plate; 39. Clamping arm one; 4. Upper clamping assembly; 41. Clamping arm two; 42. Clamping arm three; 43. Telescopic frame; 44. Motor one; 45. Fine-tuning screw one; 46. Fine-tuning block; 5. Heating assembly; 51. Reserved slot; 52. Ceramic heating plate; 6. Temperature sensor assembly; 61. First temperature sensor; 62. Second temperature sensor; 7. Lower clamping assembly; 8. Collection assembly; 81. Control device; 82. Connecting line; 83. Sampling probe; 9. Elastic thermal pad; 10. Upper monitoring assembly; 11. Limiting frame; 12. Extension structure; 121. Fixed rod; 122. Extension column; 123. Limiting plate; 1231. Arc groove; 124. Vertical groove; 125. Rear plate; 13. Power assembly; 131. Lifting screw rod 2; 132. Power block; 133. Motor 2; 14. Transmission assembly; 141. Driving wheel; 142. Driven wheel; 143. Screw rod 3; 144. Transmission wheel; 145. Transmission rod; 146. Dovetail block; 147. Dovetail groove. DETAILED DESCRIPTION

[0015] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention.

[0016] In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0017] Please see attached Figure 1 -Attached Fig.14The present invention discloses a particle tester based on industrial semiconductor ultrapure water detection, comprising a device body 1, wherein the device body 1 comprises a conveying assembly 2 for conveying, a lifting assembly 3 connected to the device body 1, an upper clamping assembly 4 connected to the lifting assembly 3, a heating assembly 5 connected to the upper clamping assembly 4, a temperature sensor assembly 6 connected to the upper clamping assembly 4, a collection assembly 8 connected to the device body 1, a limiting frame 11 connected to the collection assembly 8, a stretching structure 12 connected to the limiting frame 11, a power assembly 13 connected to the stretching structure 12, and a transmission assembly 14 connected to the power assembly 13; The heating assembly 5 includes a reserved groove 51 and a ceramic heating plate 52, and the ceramic heating plate 52 is arranged inside the reserved groove 51. The temperature sensor assembly 6 includes a first temperature sensor 61 and a second temperature sensor 62. An elastic thermal pad 9 is arranged between the first temperature sensor 61 and the second temperature sensor 62. The first temperature sensor 61 is arranged on the right side of the elastic thermal pad 9. An upper monitoring assembly 10 is arranged inside the device body 1. The collection assembly 8 includes a control device 81, a connecting line 82 and a sampling probe 83. The connecting line 82 and the sampling probe 83 are fixed to the lower end of the control device 81; The extension structure 12 includes a fixed rod 121, an extension column 122, a limiting plate 123, an arc groove 1231, a vertical groove 124 and a rear plate 125. The left and right ends of the two fixed rods 121 are fixed inside the limiting frame 11. The two vertical grooves 124 are opened on both sides of the limiting frame 11. Both sides of the limiting plate 123 slide inside the two vertical grooves 124. The rear plate 125 is arranged inside the limiting frame 11 and fixed. The arc groove 1231 is opened inside the limiting plate 123. The extension column 122 is slidably connected to the inside of the arc groove 1231. A plurality of control devices 81 are fixed in front of the extension column 122. The power assembly 13 includes a second lifting screw 131, a power block 132 and a second motor 133. The second motor 133 is fixed to the top surface of the limiting frame 11. The upper end of the second lifting screw 131 is fixed to the lower end of the second motor 133. The power block 132 is threadedly connected to the second lifting screw 131. The limiting plate 123 is fixed in front of the power block 132. The transmission assembly 14 includes a driving wheel 141, a driven wheel 142, a screw rod 143, a transmission rod 145, a dovetail block 146 and a transmission plate. Belts are installed on the driving wheel 141 and the driven wheel 142. The upper end of the screw rod 143 is fixed to the output end of the driven wheel 142. The bottom of the driven wheel 142 is driven by a transmission wheel 144. The transmission rod 145 is connected to the transmission wheel 144 through a belt. The upper end of the dovetail block 146 is fixed to the lower end of the transmission rod 145. A dovetail groove 147 is opened on the transmission plate. The dovetail block 146 is slidably connected to the dovetail groove 147. The screw rod 143 is threadedly connected to the transmission plate. A plurality of control devices 81 are fixed to the transmission plate. In the first embodiment, the delivery assembly 2 includes a water inlet pipe 21 and a water outlet pipe 22. The water inlet pipe 21 is arranged on the right side of the device body 1, and the water outlet pipe 22 is arranged on the left side of the device body 1. A water pump is arranged on the water inlet pipe 21. Specifically, through the water inlet pipe 21 and the water outlet pipe 22 in the conveying component 2, when it is necessary to detect the particle content in the sewage, water enters the interior of the device body 1 through the water pump inlet pipe 21, and finally flows out through the water outlet pipe 22, thereby realizing the transfer and transportation of water, which is convenient for entering the next process.

[0018] In the second embodiment, the lifting assembly 3 includes a clamping frame 31, a receiving block 34, a supporting slide bar 35, a connecting arm 37 and a clamping arm 39. A fixing groove is provided inside the clamping frame 31, and side grooves are provided on both sides of the fixing groove. Lifting rods 32 are fixed inside the side grooves. The lower ends of the two lifting rods 32 are fixedly connected to the lifting blocks 33. The receiving block 34 is fixed between the two lifting blocks 33. The supporting slide bar 35 is fixed inside the clamping frame 31. The left ends of the two lifting blocks 33 are fixed with telescopic rods 36. The left end of the telescopic rod 36 is fixed to the right end of the connecting arm 37. A clamping plate 38 is fixed between the two connecting arms 37. The lower end of the clamping plate 38 is fixed to the upper end of the clamping arm 39. Specifically, the lifting rod 32 in the lifting assembly 3 drives the lifting blocks 33 and the receiving blocks 34 on both sides to rise and fall, and the receiving blocks 34 are slidably supported on the supporting slide rod 35 to achieve up and down lifting, and the telescopic rod 36 drives the connecting arm 37 and the clamping plate 38 to move left and right, thereby realizing the left and right extension of the clamping arm 39.

[0019] Embodiment 3, the upper clamping assembly 4 includes a clamping arm 2 41 and a motor 1 44, the inner side of the clamping arm 2 41 is threadedly connected to the clamping arm 3 42, the top of the clamping arm 3 42 is fixed with a telescopic frame 43, the motor 1 44 is fixed inside the telescopic frame 43, the right end of the motor 1 44 is fixed with a fine-tuning screw 1 45, the fine-tuning screw 1 45 is threadedly connected to a fine-tuning block 46, and the upper end of the fine-tuning block 46 is fixed to the lower end of the clamping arm 2 41; Specifically, the motor 1 44 drives the fine-tuning block 46 on the fine-tuning screw 1 45 to slide. Since the clamping arm 2 41 is fixed to the upper end of the fine-tuning block 46, the fine-tuning block 46 moves while driving the clamping arm 2 41 to move left and right, so as to be suitable for pipes of different lengths.

[0020] In the fourth embodiment, the upper monitoring component 10 includes a hardware platform and a software system, and infrared sensors are fixed on the upper clamping component 4 and the lower clamping component 7 to sense the corresponding clamping of the clamped pipe; Specifically, by setting up the upper monitoring component 10, the needs of large-scale data processing and storage can be met, the effective control and data collection of the collection component 8 can meet the requirements for particle detection in the liquid, and it has high accuracy, stability and reliability.

[0021] In the fifth embodiment, two lower clamping assemblies 7 are arranged on the conveying assembly 2, and the heating assembly 5 is respectively arranged on the top surface and the bottom surface of the upper clamping assembly 4, and the lower clamping assembly 7 includes an adjusting rod, and the lower clamping assembly 7 is fixedly connected to the bottom surface of the upper clamping assembly 4 through the adjusting rod, and the top surface of the upper clamping assembly 4 is fixedly connected to the clamping arm 1 39; Specifically, by setting the lower clamping component 7 and the upper clamping component 4 to correspond to each other, when clamping is needed, the infrared sensor senses, the adjustment rod in the lower clamping component 7 is extended to the required height, and cooperates with the upper clamping component 4 to clamp pipes of different diameters and lengths, and the clamping effect is relatively good.

[0022] Embodiment 6, the acquisition component 8 also includes a signal conditioning circuit, a microcontroller and a communication module. The sampling probe 83 is made of stainless steel and is internally installed with a high-precision photoelectric sensor. The signal conditioning circuit amplifies, filters and shapes the weak electrical signal output by the photoelectric sensor and converts it into a standard digital signal suitable for processing by the microcontroller. The microcontroller uses a low-power, high-performance single-chip microcomputer to control the operation of the sampling probe 83, collect and process signal data. The communication module uses an industrial-grade RS485 communication chip and supports multi-node communication. The device body 1 is provided with an area to be detected, and multiple acquisition components 8 are placed in the area to be detected inside the device body 1; Specifically, each acquisition component 8 has a unique address code, which is set on the communication module through a dial switch. The upper monitoring component 10 can identify different acquisition components 8 according to the address code and perform individual control and data acquisition on them.

[0023] Specifically, by adopting the corresponding clamping heating method of the upper clamping component 4 and the lower clamping component 7, the side wall of the pipeline inside the detection area is heated, and the upper monitoring component 10 can be used to control the corresponding collection component 8 to work according to the address code, thereby realizing the synchronous operation of different collection components 8, and transmitting the working data to the upper monitoring component 10 in real time, thereby improving the liquid particle data sampling efficiency.

[0024] Specifically, the standard particle sizes of various particles are matched with the standard voltage signals of the voltage pulse signals through the acquisition component 8, and the standard voltage signal data is promptly fed back to the upper monitoring component 10. The upper monitoring component 10 corresponds to a particle size range of certain particles according to the standard voltage signal, and then determines the number of particles in each particle size range, thereby realizing real-time and specific detection of the liquid particles being measured.

[0025] Specifically, the temperature is sensed by the first temperature sensor 61 and the second temperature sensor 62, and the ceramic heating sheet 52 in the heating assembly 5 heats the elastic thermal pad 9 during heating, so that the temperature inside the pipe can be increased, so that the particles inside the liquid flowing through the pipe are active, thereby preventing the accumulation of particles, and at the same time, the particles in the water are collected at multiple points, and when the particles in the water change significantly, the size of the particles in the measured liquid and the number of corresponding sizes can be sensitively reflected; The core working principle of the liquid particle detector is based on light scattering, which includes the following steps: Laser beam emission: The particle tester has a built-in high-precision laser that emits a stable, monochromatic laser beam with a defined wavelength and intensity, which is the basis for subsequent scattered light measurement.

[0026] Laser beam passes through the liquid to be tested: The laser beam is guided through the liquid sample to be tested. As the laser beam passes through the liquid, the particles in the liquid interact with the laser beam, causing light scattering.

[0027] Measurement of scattered light intensity and wavelength: The particle tester is equipped with multiple scattered light receivers located at different angles. These receivers are used to capture and measure the intensity and wavelength of light scattered by particles.

[0028] The intensity of scattered light is closely related to the size of the particles. Generally speaking, the larger the particles, the higher the intensity of scattered light, and the wavelength of the scattered light will also change accordingly.

[0029] By measuring the scattered light intensity at different angles, a curve showing the relationship between scattered light intensity and angle can be constructed, and the particle size distribution of the particles can be inferred.

[0030] Measurement of particle absorption of light: In addition to scattering, particles also absorb the laser beam, which causes the intensity of the laser beam to weaken after passing through the liquid.

[0031] The particle tester has a built-in light intensity detector that measures the intensity change of the laser beam before and after it passes through the liquid to be tested.

[0032] By comparing the initial intensity of the laser beam with its intensity after passing through the liquid, the degree of light absorption by the particles can be calculated, and the concentration of the particles can be inferred.

[0033] Data processing and analysis: The particle tester has a built-in data processing system to process and analyze the collected scattered light intensity, wavelength and light intensity change data.

[0034] Through specific algorithms and models, the data processing system can accurately calculate the particle size distribution and concentration of particulate matter and display the results in an intuitive form.

[0035] Working principle: First, the upper clamping component 4 and the lower clamping component 7 are used to clamp the two side walls of the water inlet pipe 21 in the conveying component 2 through which the liquid flows, and then the heating component 5 is turned on so that the heating component 5 can be heated by the upper clamping component 4 and the lower clamping component 7. Then, the heat is transferred to the pipeline through the elastic thermal pad 9, so that the temperature inside the pipeline will not be too low, so that the particles inside the liquid can be active, thereby preventing the particles from agglomerating and accumulating in one place, resulting in errors in the detection data. At the same time, multiple collection components 8 are placed in the area to be detected inside the device body 1, and each collection component 8 establishes data transmission with the upper monitoring component 10 respectively. Then, the area where the particle information needs to be collected is monitored by the upper monitoring component 10, and the collection component 8 arranged in the area is called to collect information. Before the collection work starts, the working state of the collection component 8 is pre-configured and then the collection work is done until the collection work is completed. During this period, the collection component 8 transmits data to the upper monitoring component 10 in real time, and the hardware platform and software system in the upper monitoring component 10 display the collected data in real time and store the collected data; When it is necessary to evenly stretch the control device 81 fixed in front of the stretching column 122, start the second motor 133 to act on the power block 132, thereby driving the limiting plate 123 to slide inside the vertical groove 124, and then driving multiple control devices 81 fixed in front of the stretching column 122 to stretch. Multiple stretching columns 122 slide obliquely inside the arc groove 1231, thereby regularly stretching to achieve uniform temperature detection. At the same time, when the control device 81 fixed on the transmission plate is vertically and evenly stretched, the second motor 133 drives the active wheel 141 and the driven wheel 142 to rotate under the action of the belt, driving the bottom transmission wheel 144 to rotate, the screw three 143 and the transmission rod 145 can simultaneously transmit multiple vertical control devices 81, and the dovetail block 146 slides inside the dovetail groove 147, thereby achieving simultaneous sensing of the horizontal and vertical control devices 81. At this point, the entire workflow ends.

[0036] The above front, back, left, right, top and bottom are all in the instruction manual. Figure 1 The perspective of the device itself is used as the reference.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the scope of protection of the present invention.

[0038] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0039] It is apparent to those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the invention, and the changes still fall within the protection scope of the invention.

Claims

1. A particle tester based on industrial semiconductor ultrapure water detection, comprising a device body (1), characterized in that: The device body (1) comprises a conveying assembly (2) for transferring and transporting, a lifting assembly (3) connected to the device body (1), an upper clamping assembly (4) connected to the lifting assembly (3), a heating assembly (5) connected to the upper clamping assembly (4), a temperature sensor assembly (6) connected to the upper clamping assembly (4), a collection assembly (8) connected to the device body (1), a limiting frame (11) connected to the collection assembly (8), an extension structure (12) connected to the limiting frame (11), a power assembly (13) connected to the extension structure (12), and a transmission assembly (14) connected to the power assembly (13); The heating component (5) comprises a reserved groove (51) and a ceramic heating plate (52), wherein the ceramic heating plate (52) is arranged inside the reserved groove (51); the temperature sensor component (6) comprises a first temperature sensor (61) and a second temperature sensor (62), wherein an elastic thermal pad (9) is arranged between the first temperature sensor (61) and the second temperature sensor (62), and the first temperature sensor (61) is arranged on the right side of the second temperature sensor (62); an upper monitoring component (10) is arranged inside the device body (1); and the collection component (8) comprises a control device (81), a connecting line (82) and a sampling probe (83), wherein the connecting line (82) and the sampling probe (83) are fixed to the lower end of the control device (81); The stretching structure (12) comprises a fixing rod (121), a stretching column (122), a limiting plate (123), an arc-shaped groove (1231), a vertical groove (124) and a rear plate (125); the left and right ends of the two fixing rods (121) are fixed inside the limiting frame (11); the two vertical grooves (124) are opened on both sides of the limiting frame (11); the two sides of the limiting plate (123) slide inside the two vertical grooves (124); the rear plate (125) is arranged and fixed inside the limiting frame (11); the arc-shaped groove (1231) is opened inside the limiting plate (123); the stretching column (122) is slidably connected to the inside of the arc-shaped groove (1231); and the plurality of control devices (81) are fixed in front of the stretching column (122); The power assembly (13) comprises a second lifting screw (131), a power block (132) and a second motor (133); the second motor (133) is fixed to the top surface of the limiting frame (11); the upper end of the second lifting screw (131) is fixed to the lower end of the second motor (133); the power block (132) is threadedly connected to the second lifting screw (131); and a limiting plate (123) is fixed in front of the power block (132); The transmission assembly (14) comprises a driving wheel (141), a driven wheel (142), a screw rod (143), a transmission rod (145), a dovetail block (146) and a transmission plate. Belts are installed on the driving wheel (141) and the driven wheel (142). The upper end of the screw rod (143) is fixed to the output end of the driven wheel (142). The bottom of the driven wheel (142) is driven by a transmission wheel (144). The transmission rod (145) is connected to the transmission wheel (144) through a belt. The upper end of the dovetail block (146) is fixed to the lower end of the transmission rod (145). A dovetail groove (147) is provided on the transmission plate. The dovetail block (146) is slidably connected to the dovetail groove (147). The screw rod (143) is threadedly connected to the transmission plate. A plurality of control devices (81) are fixed to the transmission plate.

2. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The conveying assembly (2) comprises a water inlet pipe (21) and a water outlet pipe (22); the water inlet pipe (21) is arranged on the right side of the device body (1); the water outlet pipe (22) is arranged on the left side of the device body (1); and a water pump is arranged on the water inlet pipe (21).

3. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The lifting assembly (3) comprises a clamping frame (31), a receiving block (34), a supporting slide bar (35), a connecting arm (37) and a clamping arm (39). A fixing groove is provided inside the clamping frame (31), and side grooves are provided inside the fixing groove on both sides. A lifting rod (32) is fixed inside the side groove. The lower ends of the two lifting rods (32) are fixedly connected to the lifting blocks (33). The receiving block (34) is fixed between the two lifting blocks (33). The supporting slide bar (35) is fixed inside the clamping frame (31). A telescopic rod (36) is fixed to the left ends of the two lifting blocks (33). The left end of the telescopic rod (36) is fixed to the right end of the connecting arm (37). A clamping plate (38) is fixed between the two connecting arms (37), and the lower end of the clamping plate (38) is fixed to the upper end of the clamping arm (39).

4. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The upper clamping assembly (4) comprises a clamping arm 2 (41) and a motor 1 (44); the inner side of the clamping arm 2 (41) is threadedly connected to the clamping arm 3 (42); a telescopic frame (43) is fixed to the top of the clamping arm 3 (42); the motor 1 (44) is fixed inside the telescopic frame (43); a fine-tuning screw rod 1 (45) is fixed to the right end of the motor 1 (44); a fine-tuning block (46) is threadedly connected to the fine-tuning screw rod 1 (45); the upper end of the fine-tuning block (46) is fixed to the lower end of the clamping arm 2 (41).

5. The particle tester based on industrial semiconductor ultrapure water detection according to claim 1 is characterized in that: The upper monitoring component (10) comprises a hardware platform and a software system, and infrared sensors are fixed on both the upper clamping component (4) and the lower clamping component (7).

6. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The conveying component (2) is provided with two lower clamping components (7), and the heating component (5) is respectively provided on the top surface and the bottom surface of the upper clamping component (4), and the lower clamping component (7) includes an adjusting rod, and the lower clamping component (7) is fixedly connected to the bottom surface of the upper clamping component (4) via the adjusting rod, and the top surface of the upper clamping component (4) is fixedly connected to a clamping arm (39).

7. The particle tester based on industrial semiconductor ultrapure water detection according to claim 1 is characterized in that: The acquisition component (8) further comprises a signal conditioning circuit, a microcontroller and a communication module. An area to be detected is provided inside the device body (1), and a plurality of the acquisition components (8) are placed in the area to be detected inside the device body (1).

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