Special gas leakage rapid detection method

Abstract

The invention discloses a special gas leakage rapid detection method, and belongs to the technical field of special gas leakage detection, and the method comprises the following steps: S1, detection: because the temperature and humidity in a workshop generally do not change in a short time, the moisture content in local microenvironment air can be suddenly reduced when hydrophilic special gas leaks at a certain position in the workshop, and the special gas leakage is detected; the method comprises the following steps: according to a microscopic meteorological principle that a dew point measurement value is changed, and the dew point is recovered to a normal state after 1-2 minutes, capturing a peak process of dew point decline by adopting a temperature and humidity sensor, and generating dew point information; s2, analysis: extracting the dew point information by using an upper computer, and calculating an abnormal mode by using a software algorithm to indicate the possibility of special gas leakage; s3, data analysis processing; and S4, alarming. According to the special gas leakage rapid detection method, the detection time of the hydrophilic special gas leakage condition in the workshop can be remarkably shortened, so that workers are helped to safely evacuate more rapidly, and the health and life safety of the workers are effectively guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of special gas leakage detection, and specifically relates to a special gas leakage rapid detection method. Background Art

[0002] With the acceleration of industrialization, the construction of photovoltaic plants and semiconductor plants has increased. These factories need to strictly control the temperature, humidity and other conditions in the workshop to ensure the quality of the products. In the semiconductor manufacturing process, a variety of special gases are used, including ammonia, carbon dioxide, hydrogen sulfide, nitrogen trifluoride and other gases. Once these special gases leak, they will pose a serious threat to the health and life safety of the workers. Therefore, in order to ensure production safety, the detection of special gas leaks has become crucial.

[0003] The working principle of traditional gas detectors is mainly based on sensor technology. Through the principles of chemical reaction, physical adsorption and optical absorption, the gas to be detected reacts with a certain specific material in the sensor element, which is then converted into an electrical signal for detection and alarm.

[0004] Electrochemical formula: The gas diffuses into the working electrode of the sensor through the back of the porous membrane, where the gas is oxidized or reduced. This electrochemical reaction causes a change in the current flowing through the external circuit. The gas concentration can be measured by measuring the magnitude of the current.

[0005] Catalytic combustion type: Catalytic combustion type sensors are high-temperature sensors. The detection element of the catalytic element is formed by wrapping alumina and adhesive on a platinum wire coil (φ0.025~φ0.05) to form a spherical shape, which is sintered. The outer surface is coated with a catalytic layer of rare metals such as platinum and palladium. When the platinum wire is passed with current, the detection element is kept at a high temperature (300~400℃). At this time, if it comes into contact with combustible gas such as methane gas, methane will burn on the catalyst layer. The essence of combustion is the reaction between methane adsorbed on the surface of the element and adsorbed oxygen ions. After the reaction is completed, CO2 and H2O are generated and analyzed, and the oxygen in the gas phase is adsorbed and dissociated by the element to replenish the oxygen ions on the surface of the element. The methane measurement type using the element is based on the principle of measuring the heat released by the methane combustion reaction on its surface, that is, the combustion increases the temperature of the platinum wire coil, and the resistance value of the coil increases. The concentration of the combustible gas can be known by measuring the change in the resistance value of the platinum wire.

[0006] Infrared type: Molecules composed of different atoms will have different vibration and rotation frequencies. When they are irradiated with infrared rays of the same frequency, infrared absorption will occur, causing changes in the infrared light intensity. The gas concentration can be measured by measuring the changes in infrared intensity.

[0007] These detection methods each have certain limitations, which are mainly reflected in the following aspects:

[0008] High cost: Each special gas requires a dedicated mass spectrometer, resulting in a large number of implementation points and high overall cost.

[0009] Long response delay: The common pump-type special gas sensors on the market use the electrophoresis principle to detect gas, and the response time to special gases is relatively long. For example, the response time of Honeywell MIDAS series sensors commonly used in the semiconductor industry exceeds 1 minute and 22 seconds. For high-concentration and highly toxic special gas leaks, such a delay time cannot meet the needs of rapid response of emergency management, especially when dealing with special gases such as "hydrogen sulfide" that can quickly inhibit the central nervous system and cause people to become comatose or even die within a few minutes. Traditional detection methods cannot respond quickly, which can easily lead to major production safety accidents.

[0010] Short service life: Common special gas sensors generally need to replace consumables every 1-2 years, and require professional inspection or calibration every year to ensure that the special gas sensors are in effective working condition.

[0011] Low cross-alarm sensitivity: Common special gas sensors are generally sensitive to multiple similar gases, such as halogen gases, which brings certain interference to the correct identification of the type of leaking gas.

[0012] Therefore, in view of the above technical problems, it is necessary to provide a method for rapid detection of special gas leakage.

[0013] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0014] The purpose of the present invention is to provide a method for rapid detection of special gas leakage, which can significantly shorten the detection time of hydrophilic special gas leakage in the workshop, thereby helping the staff to evacuate safely faster and effectively protect the health and life safety of the staff; at the same time, it reduces the configuration of various mass spectrometers, reduces the cost of safety protection, and realizes efficient, convenient and economical special gas leakage detection.

[0015] In order to achieve the above object, a technical solution provided by a specific embodiment of the present invention is as follows:

[0016] A method for rapid detection of special gas leakage comprises the following steps:

[0017] S1. Detection: Since the temperature and humidity in the workshop generally do not change in a short period of time, when a hydrophilic special gas leaks somewhere in the workshop, the moisture content in the local micro-environment air will drop sharply, causing the dew point measurement value to change. After 1-2 minutes, it will return to normal. This micro-meteorological principle is used to capture the peak process of the dew point drop using a temperature and humidity sensor and generate dew point information;

[0018] S2. Analysis: extracting the dew point information using a host computer and using a software algorithm to calculate an abnormal pattern to indicate the possibility of a special gas leak;

[0019] S3, data analysis and processing: The host computer background performs data analysis and processing and generates charts and curves, marks the location of abnormal data, and feeds back to the user interface;

[0020] S4, Alarm: Compare the chart curves to determine the special gas leakage, the upper computer controls to start the alarm indicator, and sounds an escape alarm. At the same time, the special gas monitoring system (GMS) is linked to start the automatic emergency intervention action.

[0021] In one or more embodiments of the present invention, the dew point information includes dew point temperature and relative humidity.

[0022] In one or more embodiments of the present invention, the temperature and humidity sensor is any one or more combinations of a dew point sensor, a capacitive temperature and humidity sensor, or a wireless temperature and humidity sensor.

[0023] In one or more embodiments of the present invention, the temperature and humidity sensors are arranged at multiple points according to the geometric shape of the area to be monitored and the airflow dynamics characteristics to construct a sensor array.

[0024] In one or more embodiments of the present invention, the sensor array adopts a redundant design according to the criticality and failure probability of the system.

[0025] In one or more embodiments of the present invention, the development of the software algorithm focuses on extracting useful information from raw temperature and humidity data and promptly identifying abnormal patterns to indicate the possibility of special gas leakage.

[0026] In one or more embodiments of the present invention, the software algorithm includes four main steps: data preprocessing, feature extraction, anomaly detection and decision support.

[0027] In one or more embodiments of the present invention, the data analysis process uses machine learning technology to improve the accuracy and adaptability of detection.

[0028] In one or more embodiments of the present invention, a network communication module is further included, through which remote data collection and analysis of a host computer are realized.

[0029] In one or more embodiments of the present invention, the temperature and humidity sensor establishes a connection with a host computer via wired or wireless communication technology.

[0030] Compared with the prior art, the rapid detection method for special gas leakage of the present invention can significantly shorten the detection time of hydrophilic special gas leakage in the workshop, thereby helping the staff to evacuate safely faster and effectively protecting the health and life safety of the staff;

[0031] At the same time, it reduces the configuration of various mass spectrometers, lowers the cost of safety protection, and realizes efficient, convenient and economical rapid detection of special gas leaks. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 A system diagram of a method for rapid detection of special gas leakage in one embodiment of the present invention;

[0034] Figure 2 This is a working flow chart of a method for rapid detection of special gas leakage in one embodiment of the present invention;

[0035] Figure 3 This is a line graph of a sharply decreasing dew point signal of a method for rapid detection of special gas leakage in one embodiment of the present invention. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0037] like Figure 1 and Figure 2 As shown, a method for rapid detection of special gas leakage in one embodiment of the present invention comprises the following steps:

[0038] S1. Detection: Since the temperature and humidity in the workshop generally do not change in a short period of time, when a hydrophilic special gas leaks somewhere in the workshop, the moisture content in the local micro-environment air will drop sharply, causing the dew point measurement value to change. After 1-2 minutes, it will return to normal. This micro-meteorological principle is used to capture the peak process of the dew point drop using a temperature and humidity sensor and generate dew point information;

[0039] S2. Analysis: extracting the dew point information using a host computer and using a software algorithm to calculate an abnormal pattern to indicate the possibility of a special gas leak;

[0040] S3, data analysis and processing: The host computer background performs data analysis and processing and generates charts and curves, marks the location of abnormal data, and feeds back to the user interface;

[0041] S4, Alarm: Compare the chart curves to determine the special gas leakage, the upper computer controls to start the alarm indicator, and sounds an escape alarm. At the same time, the special gas monitoring system (GMS) is linked to start the automatic emergency intervention action.

[0042] Specifically, Figure 3 As shown in the figure, the rapid detection method for special gas leakage is used to detect hydrophilic special gases in semiconductor production workshops, including ammonia, carbon dioxide, hydrogen sulfide, nitrogen trifluoride and other gases that are easily soluble in water or easily react with water. When leaking, these gases can quickly absorb moisture in the surrounding environment, resulting in significant changes in dew point. At the same time, it also includes argon, hydrogen, oxygen and other gases from semiconductor high vacuum chambers. The latter also show a localized and short-term dew point drop phenomenon caused by accidental leakage.

[0043] Special gases with strong hydrophilicity usually have high polarity and water solubility, which makes them easy to interact with water molecules in the air when leaking. This interaction not only affects the diffusion rate of the gas itself, but may also cause a rapid drop in environmental humidity. In addition, the physical and chemical properties of these special gases, such as boiling point, vapor pressure and chemical reactivity, also determine their behavior in the environment and the choice of detection methods.

[0044] When a highly hydrophilic special gas leaks, its molecules will quickly combine with the surrounding water molecules to form hydrates or dissolve in the water phase. This process leads to a decrease in the number of water molecules in the local environment, which causes a decrease in the dew point. This phenomenon is particularly obvious in clean rooms, because most clean rooms are kept at a constant temperature (temperature 24±2℃) and constant humidity (humidity 55±5%), and sudden changes in humidity are easier to detect. By monitoring changes in ambient humidity, the leakage of special gases can be indirectly inferred.

[0045] When the water vapor content in the air remains unchanged and the air pressure is kept constant, the temperature at which the air is cooled to saturation is called the dew point temperature, or dew point for short. In the case of a special gas leak, the combination of hydrophilic gas molecules and water molecules will lead to a decrease in local water vapor pressure, which in turn causes a decrease in the dew point. For example, the reaction of nitrogen trifluoride absorbing water vapor in the air is:

[0046] 3NF3+5H2O=9HF+2NO↑+HNO3

[0047] Polycrystalline polymers are often formed in common semiconductor processes such as CVD and PVD that require the generation of plasma. Crystallization behavior is one of the key factors that determine the performance of polycrystalline polymers. Studies have shown that humidity in the environment can directly affect the crystallinity and crystallization rate of polycrystalline polymers. Under high relative humidity, water molecules may intervene between polymer chains as plasticizers, reducing the interaction between molecular chains, thereby affecting the formation and growth of crystals. In addition, the presence of water molecules may also cause the crystal size to become smaller and the crystal morphology to change, thereby affecting the final performance of the material. We think in reverse that some polycrystalline polymers will also absorb moisture in the environment during crystallization, thereby reducing the environmental dew point. Therefore, polycrystalline polymers have shown potential in the field of gas detection due to their unique physical and chemical properties.

[0048] Based on the above theory, the micrometeorological principles and modern sensing technology are used to monitor and analyze the changes in environmental temperature and humidity, so as to realize real-time detection of special gas leaks. This method does not require complex instruments and equipment, and only requires the deployment of a low-cost temperature and humidity sensor network to achieve large-area monitoring. At the same time, through continuous monitoring and intelligent analysis of changes in environmental humidity, leaks can be discovered in the early stages, similar to the very early fire alarm system, which can provide valuable 1-3 minutes of warning time, giving on-site personnel the opportunity to evacuate and escape, and improving response speed and prevention capabilities. In addition, this method also has good environmental adaptability and flexibility, and can be effectively deployed in different industrial environments.

[0049] Considering that the relative humidity of the environment is affected by the heating of workshop equipment and machines, the relative humidity of each temperature and humidity sensor in the environment will fluctuate greatly, which is not conducive to data analysis. The temperature and humidity of the environment can be converted into the corresponding dew point temperature through a formula for analysis and monitoring; because the dew point temperature is directly related to the water vapor content in the air, that is, the higher the dew point, the higher the water vapor content in the air. The relative humidity changes with the change of temperature. Even if the absolute content of water vapor remains unchanged, the temperature causes the change of relative humidity. Therefore, the dew point temperature can more accurately reflect the water vapor content in the air because it is not affected by temperature changes. By observing that the rate of dew point temperature drop is proportional to the rate and total release of special gas leakage, it is possible to quantitatively analyze whether the special gas is leaking.

[0050] The accuracy verification data of dew point temperature and relative humidity at different test points in the environment at the same time is shown in Table 1.

[0051] Sensor point 1 2 3 4 Relative humidity (%RH) 35.7 35.3 34.1 38.7 Temperature(℃) 20.8 21.1 21.5 19.6 Dew point temperature(℃) 5.1 5.1 5.0 5.1

[0052] Table 1: Comparison of the effects of temperature on dew point temperature and relative humidity

[0053] The rapid detection method for special gas leaks mainly uses three core parts: hardware equipment, software algorithms and user interfaces. The hardware equipment mainly includes temperature and humidity sensors, which are connected to the host computer through wired or wireless communication technology. It is responsible for collecting environmental data, the software algorithm analyzes and processes the data to identify leakage events, and the user interface provides real-time monitoring and alarm functions for the operator. It aims to ensure efficiency, accuracy and ease of use to meet the needs of various industrial environments.

[0054] Preferably, the temperature and humidity sensor is any one or more combinations of a dew point sensor, a capacitive temperature and humidity sensor, or a wireless temperature and humidity sensor.

[0055] Considering the particularity of special gas leakage detection, high-precision, low-power temperature and humidity sensors are selected as the main hardware equipment. The layout strategy of the sensors is determined according to the geometric shape and airflow dynamics of the area to be monitored to ensure that the humidity changes caused by special gas leakage can be captured. In addition, in order to improve the reliability of the system, multi-point layout and redundant design are adopted, so that even if a single sensor fails, it will not affect the detection capability of the entire system.

[0056] The development of the software algorithm focuses on extracting useful information from the raw temperature and humidity data and promptly identifying abnormal patterns to indicate the possibility of a gas leak. The algorithm includes four main steps: data preprocessing, feature extraction, anomaly detection, and decision support. The data processing process uses machine learning technology to improve the accuracy and adaptability of detection.

[0057] After the hardware equipment and software algorithm are developed, the system is integrated to ensure that the various parts can work together. After the system is integrated, a series of tests and calibrations are carried out, including functional tests in laboratory environments and performance tests in field environments. These tests are designed to evaluate the stability, sensitivity and anti-interference ability of the system, as well as its adaptability under different environmental conditions. Through the feedback of the test results, the design and configuration of the system are further optimized. For example, by observing that the rate of dew point temperature drop is proportional to the rate and total release of special gas leakage, it is possible to quantitatively analyze the leakage.

[0058] The system also integrates a network communication module, which enables remote data collection and analysis by the host computer.

[0059] Compared with the prior art, the rapid detection method for special gas leakage of the present invention can significantly shorten the detection time of hydrophilic special gas leakage in the workshop, thereby helping the staff to evacuate safely faster and effectively protecting the health and life safety of the staff;

[0060] At the same time, using the reduction of dew point to detect the leakage of highly hydrophilic special gases has many advantages. First, this method does not require complex instruments and equipment, which reduces costs and maintenance difficulties, reduces the configuration of various mass spectrometers, reduces the cost of safety protection, and realizes efficient, convenient and economical rapid detection of special gas leaks. Secondly, by deploying multiple sensor nodes, real-time monitoring of a large area can be achieved.

[0061] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0062] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A method for rapid detection of special gas leakage, characterized in that: The following steps are involved: S1. Detection: Since the temperature and humidity in the workshop generally do not change in a short period of time, when a hydrophilic special gas leaks somewhere in the workshop, the moisture content in the local micro-environment air will drop sharply, causing the dew point measurement value to change. After 1-2 minutes, it will return to normal. This micro-meteorological principle is used to capture the peak process of the dew point drop using a temperature and humidity sensor and generate dew point information; S2. Analysis: extracting the dew point information using a host computer and using a software algorithm to calculate an abnormal pattern to indicate the possibility of a special gas leak; S3, data analysis and processing: The host computer background performs data analysis and processing and generates charts and curves, marks the location of abnormal data, and feeds back to the user interface; S4. Alarm: Compare the chart curves to determine the special gas leakage. The upper computer controls to start the alarm indicator and sound an escape alarm. At the same time, the special gas monitoring system is linked to start the automatic emergency intervention action.

2. A method for rapid detection of special gas leakage according to claim 1, characterized in that: The dew point information includes dew point temperature and relative humidity.

3. A method for rapid detection of special gas leakage according to claim 1, characterized in that: The temperature and humidity sensor is any one or more combinations of a dew point sensor, a capacitive temperature and humidity sensor, or a wireless temperature and humidity sensor.

4. A method for rapid detection of special gas leakage according to claim 3, characterized in that: The temperature and humidity sensors are arranged at multiple points according to the geometric shape of the area to be monitored and the airflow dynamics characteristics to construct a sensor array.

5. A method for rapid detection of special gas leakage according to claim 4, characterized in that: The sensor array adopts a redundant design according to the criticality and failure probability of the system.

6. A method for rapid detection of special gas leakage according to claim 1, characterized in that: The development of the software algorithm focuses on extracting useful information from raw temperature and humidity data and promptly identifying abnormal patterns to indicate the possibility of special gas leaks.

7. A method for rapid detection of special gas leakage according to claim 6, characterized in that: The software algorithm includes four main steps: data preprocessing, feature extraction, anomaly detection and decision support.

8. A method for rapid detection of special gas leakage according to claim 1, characterized in that: The data analysis process uses machine learning technology to improve the accuracy and adaptability of detection.

9. A method for rapid detection of special gas leakage according to claim 1, characterized in that: It also includes a network communication module, through which remote data collection and analysis of the host computer are realized.

10. A method for rapid detection of special gas leakage according to claim 1, characterized in that: The temperature and humidity sensor is connected to the host computer through wired or wireless communication technology.

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