Window high-speed scanning type exposure device

Abstract

The invention provides a window high-speed scanning type exposure device, and relates to the technical field of precise instruments. The window high-speed scanning type exposure device comprises a basic frame, a shading plate, two transverse diaphragm pieces and two longitudinal diaphragm pieces, the basic frame comprises a hollow area, the shading plate is connected with the basic frame and covers the hollow area, one end, deviating from the hollow area, of the shading plate is a laser irradiation end, and the shading plate comprises a rectangular window. The two transverse diaphragm sheets are located between the light shielding plate and the hollow area, the two longitudinal diaphragm sheets are located at the end, away from the two transverse diaphragm sheets, of the light shielding plate, and a water cooling structure and a nitrogen cooling structure are arranged on the light shielding plate. The influence of heat radiation in a laser environment on the two transverse diaphragm pieces and the two longitudinal diaphragm pieces can be eliminated, so that the two transverse diaphragm pieces and the two longitudinal diaphragm pieces are prevented from deforming under the action of the heat radiation, and the shape precision of a light-transmitting rectangular window formed by the two diaphragm pieces is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of precision instruments, and in particular to a window high-speed scanning exposure device. Background Art

[0002] As the core equipment supporting chip manufacturing, chip exposure equipment is known for its technology-intensiveness and ultra-precision. As the core motion device in the exposure system, the shape accuracy of the rectangular window of the scanning exposure device directly determines the exposure accuracy. In order to ensure the shape accuracy of the rectangular window, in addition to requiring the high-speed and high-acceleration motion of the scanning exposure device to have sufficient motion accuracy and positioning accuracy, it is also necessary to strictly control the deformation and edge accuracy of the aperture.

[0003] However, since the aperture piece is continuously irradiated by the laser during the movement, the aperture piece in the laser environment will be subjected to the thermal radiation brought by the laser. The aperture piece will be deformed under the action of the thermal radiation, affecting the shape accuracy of the rectangular window. Summary of the invention

[0004] The problem solved by the present invention is how to prevent the aperture pieces from being deformed under the action of thermal radiation, so as to ensure the shape accuracy of the rectangular window formed by the two groups of aperture pieces.

[0005] In order to solve the above problems, the present invention provides a window high-speed scanning exposure device, including a basic frame, a light shielding plate, two transverse aperture plates and two longitudinal aperture plates, the basic frame includes a hollow area, the light shielding plate is connected to the basic frame and covers the hollow area, the end of the light shielding plate away from the hollow area is a laser irradiation end, the light shielding plate includes a rectangular window, the two transverse aperture plates are located between the light shielding plate and the hollow area, the two longitudinal aperture plates are located at the end of the light shielding plate away from the two transverse aperture plates, the light shielding plate is provided with a water cooling structure and a nitrogen cooling structure, the two transverse aperture plates are used to move toward or away from each other along the length of the rectangular window, and the two longitudinal aperture plates are used to move toward or away from each other along the width of the rectangular window.

[0006] Optionally, a groove is provided on the shading plate, the rectangular window is provided at the bottom of the groove, the cooling water channel of the water cooling structure is provided inside the shading plate, and the two longitudinal aperture pieces move toward or away from each other in the groove; the nitrogen cooling structure includes an arc-shaped guide plate, which is installed at the edge of the notch of the groove to guide the cooling nitrogen blown out by the nitrogen cooling structure into the groove.

[0007] Optionally, the two lateral aperture pieces each include an aperture piece body and a cutting head, the two cutting heads are respectively located at one end of the two aperture piece bodies close to each other, and both extend obliquely in a direction away from the aperture piece body and close to the shading plate to the rectangular window, and a cutting tip is formed at the end, and the two cutting tips are arranged as a planar structure extending along the width direction of the rectangular window.

[0008] Optionally, the tool head is provided with two slide grooves at both ends along the width direction of the rectangular window, the tool head passes through the rectangular window and forms the tool tip at the end, and the two slide grooves are respectively slidably connected to the two long sides of the rectangular window.

[0009] Optionally, a nitrogen guide slope is provided on the cutter head, and the nitrogen guide slope is located at one end of the cutter head facing the corresponding aperture piece body, and the nitrogen guide slope is gradually inclined from the cutter tip toward the aperture piece body.

[0010] Optionally, the cooling water channel is distributed in an S-shaped curve.

[0011] Optionally, the window high-speed scanning exposure device also includes two lateral stepping drive mechanisms, the fixed ends of the two lateral stepping drive mechanisms are respectively installed on one end of the basic frame parallel to the length direction of the rectangular window, and the two movable ends of the two lateral stepping drive mechanisms are respectively connected to the two lateral aperture pieces by bolts to drive the two lateral aperture pieces to move toward or away from each other along the length of the rectangular window, and the light shielding plate is provided with bolt avoidance holes.

[0012] Optionally, the shortest distance between the bolt avoidance hole and the rectangular window is greater than the maximum distance between the longitudinal aperture piece and the rectangular window.

[0013] Optionally, the window high-speed scanning exposure device also includes two longitudinal stepping drive mechanisms, the fixed ends of the two longitudinal stepping drive mechanisms are respectively installed on one end of the base frame parallel to the width direction of the rectangular window, and the two movable ends of the two longitudinal stepping drive mechanisms are respectively connected to the two longitudinal aperture pieces by bolts, so as to drive the two longitudinal aperture pieces to move toward or away from each other along the width of the rectangular window.

[0014] Optionally, the cutter head is made of a high temperature resistant and corrosion resistant material.

[0015] Compared with the related art, the window high-speed scanning exposure device of the present invention is connected to the basic frame through a shading plate and covers the hollow area. The end of the shading plate away from the hollow area is the laser irradiation end, and the two transverse aperture plates are located between the shading plate and the hollow area. The shading plate will block the heat radiation of the laser from propagating to the two transverse aperture plates, so that the laser plate can prevent the two transverse aperture plates from being subjected to the heat radiation in the laser environment by blocking the propagation path of the heat radiation, thereby ensuring the shape accuracy of the two transverse aperture plates, and the two longitudinal aperture plates are located at the end of the shading plate away from the two transverse aperture plates, and the end of the shading plate away from the hollow area is the laser irradiation end, and the shading plate is provided with a water cooling structure and a nitrogen cooling structure. The water cooling structure can realize the cooling of the shading plate, and the cooling nitrogen blown out by the nitrogen cooling structure can exchange heat with the two longitudinal aperture plates, and the heat exchange method can be used to prevent the two longitudinal aperture plates from being affected by the laser environment. The influence of thermal radiation in the laser environment on the two transverse aperture pieces and the two longitudinal aperture pieces can be eliminated, so as to ensure the shape accuracy of the two longitudinal aperture pieces, and the cooling nitrogen can flow to the two transverse aperture pieces through the rectangular window, and after heat exchange with the two transverse aperture pieces, it can also flow out from the hollow area, so as to ensure the shape accuracy of the two transverse aperture pieces, and at the same time, it can also avoid the cooling nitrogen after heat exchange to remain in the basic frame, so as to ensure the heat exchange efficiency of the cooling nitrogen. In this way, when the two transverse aperture pieces are used to move toward or away along the length of the rectangular window, and the two longitudinal aperture pieces are used to move toward or away along the width of the rectangular window, the influence of thermal radiation in the laser environment on the two transverse aperture pieces and the two longitudinal aperture pieces can be eliminated, so as to ensure the shape accuracy of the two transverse aperture pieces and the two longitudinal aperture pieces, thereby avoiding the deformation of the two transverse aperture pieces and the two longitudinal aperture pieces under the action of thermal radiation, and ensuring the shape accuracy of the light-transmitting rectangular window formed by the two groups of aperture pieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 An exploded view of a window high-speed scanning exposure device in an embodiment of the present invention;

[0017] Figure 2 A schematic diagram of the structure of the basic framework in an embodiment of the present invention;

[0018] Figure 3 is a top view of a window high-speed scanning exposure device in an embodiment of the present invention;

[0019] Figure 4 A bottom view of a window high-speed scanning exposure device in an embodiment of the present invention;

[0020] Figure 5 is a schematic diagram of the distribution of cooling water channels inside the sunshade in an embodiment of the present invention;

[0021] Figure 6 Schematic diagram of the structure of the cutter head in an embodiment of the present invention.

[0022] Description of reference numerals:

[0023] 1-basic frame; 11-hollow area; 2-shading plate; 21-rectangular window; 22-groove; 23-bolt avoidance hole; 3-horizontal aperture piece; 31-aperture piece body; 32-knife head; 321-knife tip; 322-nitrogen guide slope; 323-slide; 4-longitudinal aperture piece; 5-cooling water channel; 6-arc guide plate; 7-horizontal stepping drive mechanism; 8-longitudinal stepping drive mechanism. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0025] In the accompanying drawings, the X-axis represents the horizontal position, and the positive direction of the X-axis (that is, the direction of the arrow of the X-axis) represents the right side, and the negative direction of the X-axis (that is, the direction opposite to the positive direction of the X-axis) represents the left side; the Y-axis in the accompanying drawings represents the front-back position, and the positive direction of the Y-axis (that is, the direction of the arrow of the X-axis) represents the front side, and the negative direction of the Y-axis (that is, the direction opposite to the positive direction of the Y-axis) represents the rear side; the Z-axis in the accompanying drawings represents the vertical position, and the positive direction of the Z-axis (that is, the direction of the arrow of the Z-axis) represents the upper side, and the negative direction of the Z-axis (that is, the direction opposite to the positive direction of the Z-axis) represents the lower side. It should also be noted that the aforementioned Z-axis, Y-axis and X-axis are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0026] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein.

[0027] Combination Figures 1 to 5As shown, the present invention provides a window high-speed scanning exposure device, comprising a basic frame 1, a shading plate 2, two transverse aperture pieces 3 and two longitudinal aperture pieces 4, the basic frame 1 comprising a hollow area 11, the shading plate 2 is connected to the basic frame 1 and covers the hollow area 11, the end of the shading plate 2 away from the hollow area 11 is a laser irradiation end, the shading plate 2 comprises a rectangular window 21, the two transverse aperture pieces 3 are located between the shading plate 2 and the hollow area 11, the two longitudinal aperture pieces 4 are located at the end of the shading plate 2 away from the two transverse aperture pieces 3, a water cooling structure and a nitrogen cooling structure are provided on the shading plate 2, the two transverse aperture pieces 3 are used to move toward or away from each other along the length of the rectangular window 21, and the two longitudinal aperture pieces 4 are used to move toward or away from each other along the width of the rectangular window 21.

[0028] Specifically, the horizontal direction in this specification refers to the X-axis direction, and the vertical direction refers to the Y-axis direction. The basic frame 1 is in the shape of a quadrilateral frame and includes two parallel horizontal frames and two parallel vertical frames. The area enclosed by the two horizontal frames and the two vertical frames is a hollow area 11, and the hollow area 11 is located at the center of the basic frame 1. The shading plate 2 is parallel to the basic frame 1 and covers the hollow area 11. The shading plate 2 is connected to the basic frame 1 by bolts so that there is a height difference between the shading plate 2 and the hollow area 11. The end of the shading plate 2 that is away from the basic frame 1, that is, the end of the shading plate 2 located in the positive direction of the Z axis is the laser irradiation surface. A rectangular window 21 is provided in the middle of the shading plate 2. The length direction of the rectangular window 21 is consistent with the horizontal direction of the basic frame 1, and the width direction of the rectangular window 21 is consistent with the longitudinal direction of the basic frame 1. The two transverse aperture pieces 3 are located between the shading plate 2 and the base frame 1, that is, located below the shading plate 2, and make a straight line movement towards or away from each other in the hollow area 11. The two longitudinal aperture pieces 4 are located above the shading plate 2, and make a straight line movement towards or away from each other in the shading plate 2. The light transmission area of ​​the rectangular window 21 can be adjusted by the linear movement displacement of the two transverse aperture pieces 3 and the two longitudinal aperture pieces 4. At the same time, a water cooling structure and a nitrogen cooling structure are provided on the shading plate 2. During the movement of the two longitudinal aperture pieces 4, the water cooling structure can reduce the temperature of the shading plate 2. At the same time, the cooling nitrogen blown out by the nitrogen cooling structure can form a low-temperature environment to exchange heat with the two longitudinal aperture pieces 4, thereby eliminating the two longitudinal aperture pieces 4 from being borne by the thermal radiation from the laser. Moreover, since the two transverse aperture pieces 3 are located between the shading plate 2 and the basic frame, the shading plate 2 will block the thermal radiation of the laser from propagating to the two transverse aperture pieces 3. At the same time, the cooling nitrogen can also diffuse through the rectangular window 21 to the position where the two transverse aperture pieces 3 are irradiated by the laser, and exchange heat with the two transverse aperture pieces 3 to reduce the temperature of the two transverse aperture pieces 3. The cooling nitrogen after the heat exchange with the two transverse aperture pieces 3 can flow out from the hollow area 11 to avoid the cooling nitrogen after the heat exchange remaining in the basic frame 1, thereby not only eliminating the influence of the thermal radiation of the laser on the two longitudinal aperture pieces 4, but also eliminating the influence of the thermal radiation of the laser on the two transverse aperture pieces 3.

[0029] Therefore, in this embodiment, the shading plate 2 is connected to the basic frame 1 and covers the hollow area 11. The end of the shading plate 2 away from the hollow area 11 is the laser irradiation end, and the two transverse aperture pieces 3 are located between the shading plate 2 and the hollow area 11. The shading plate 2 will block the heat radiation of the laser and propagate to the two transverse aperture pieces 3, so that the laser plate 2 can prevent the two transverse aperture pieces 3 from being subjected to the heat radiation in the laser environment by blocking the propagation path of the heat radiation, thereby ensuring the shape accuracy of the two transverse aperture pieces 3, and the two longitudinal aperture pieces 4 are located at the end of the shading plate 2 away from the two transverse aperture pieces 3, and the end of the shading plate 2 away from the hollow area 11 is the laser irradiation end, and the shading plate 2 is provided with a water cooling structure and a nitrogen cooling structure. The water cooling structure can realize the cooling of the shading plate 2, and the cooling nitrogen blown out by the nitrogen cooling structure can exchange heat with the two longitudinal aperture pieces 4, and the heat exchange method can be used to prevent the two longitudinal aperture pieces 4 from being subjected to the heat radiation in the laser environment. to ensure the shape accuracy of the two longitudinal aperture pieces 4, and the cooling nitrogen can flow to the two transverse aperture pieces 3 through the rectangular window 21, and after heat exchange with the two transverse aperture pieces 3, it can also flow out from the hollow area 11, to ensure the shape accuracy of the two transverse aperture pieces 3, while also avoiding the cooling nitrogen after heat exchange to remain in the basic frame 1, to ensure the heat exchange efficiency of the cooling nitrogen. In this way, in the process where the two transverse aperture pieces 3 are used to move toward or away from each other along the length of the rectangular window 21, and the two longitudinal aperture pieces 4 are used to move toward or away from each other along the width of the rectangular window 21, the influence of thermal radiation in the laser environment on the two transverse aperture pieces 3 and the two longitudinal aperture pieces 4 can be eliminated, to ensure the shape accuracy of the two transverse aperture pieces 3 and the two longitudinal aperture pieces 4, thereby avoiding the deformation of the two transverse aperture pieces 3 and the two longitudinal aperture pieces 4 under the action of thermal radiation, and ensuring the shape accuracy of the light-transmitting rectangular window formed by the two groups of aperture pieces.

[0030] Optionally, combined Figure 5 As shown, a groove 22 is provided on the shading plate 2, a rectangular window 21 is provided at the bottom of the groove 22, a cooling water channel 5 of the water cooling structure is provided inside the shading plate 2, and two longitudinal aperture pieces 4 move toward or away from each other in the groove 22; the nitrogen cooling structure includes an arc-shaped guide plate 6, which is installed at the edge of the notch of the groove 22 to guide the cooling nitrogen blown out of the nitrogen cooling structure into the groove 22.

[0031] Specifically, the two longitudinal aperture pieces 4 are located at one end of the base frame 1 facing the positive direction of the X-axis, and move along the frame straight line of the base frame 1 facing the positive direction of the X-axis. The shading plate 2 is also provided with a groove 22, which is located at one end of the shading plate 2 facing the positive direction of the X-axis, that is, the end of the shading plate 2 facing the two longitudinal aperture pieces 4. The cooling water channel 5 of the water cooling structure is arranged inside the shading plate 2, and the rectangular window 21 is located at the bottom of the groove 22. The two longitudinal aperture pieces 4 move toward or away from each other in the groove 22; the nitrogen cooling structure includes an arc-shaped guide plate 6, such as Figure 2 As shown, the arc guide plate 6 is installed at the notch of the groove 22 at the edge of the negative direction of the X-axis to avoid interference with the two longitudinal aperture plates 4, and the arc guide plate 6 is perpendicular to the shading plate 2. The cooling nitrogen gas blown to the arc guide plate 6 can flow toward the notch of the groove 22 along the bending direction of the arc guide plate 6. The cooling water channel 5 of the water-cooling structure forms a low-temperature environment on the shading plate 2, and the circumferential side walls of the groove 22 can surround the cooling nitrogen, so that the cooling nitrogen is located in the area surrounded by the groove 22 and will not overflow from the shading plate 2. At the same time, the nitrogen cooling structure blows cooling nitrogen toward the inner arc surface of the arc guide plate 6 (the inner arc surface is the surface of the arc guide plate 6 facing the groove 22). The cooling nitrogen blown out by the nitrogen cooling structure can move toward the notch of the groove 22 under the guidance of the arc guide plate 6, and utilize the relatively large mass of low-temperature air to make the cooling nitrogen accurately flow into the groove 22, thereby ensuring the cooling effect of the two longitudinal aperture pieces 4 when moving in the groove 22. At the same time, the cooling nitrogen can be concentrated from the rectangular window 21 to the two horizontal aperture pieces 3, thereby ensuring the cooling effect of the two horizontal aperture pieces 3.

[0032] In this way, by setting the cooling water channel 5 inside the shading plate 2, the shading plate 2 can be cooled from the inside of the shading plate 2, and the cooled shading plate 2 can also assist in cooling the two horizontal aperture pieces 3. At the same time, by using the rectangular window 21 set on the bottom of the groove 22, during the nitrogen cooling process, the circumferential side walls of the groove 22 can achieve the surrounding effect of the cooling nitrogen, avoiding the cooling nitrogen from overflowing from the circumference of the groove 22, and the two longitudinal aperture pieces 4 can be moved toward or away from each other in the groove 22 to ensure the cooling effect of the two longitudinal aperture pieces 4, and then the arc guide plate 6 is installed at the edge of the notch of the groove 22 to guide the cooling nitrogen blown out by the nitrogen cooling structure into the groove 22. The arc guide plate 6 can achieve the cooling nitrogen flow guiding effect, so that the cooling effect of the two longitudinal aperture pieces 4 and the two horizontal aperture pieces 3 can be guaranteed.

[0033] Optionally, combined Figure 5 and Figure 6As shown, the two lateral aperture plates 3 each include an aperture plate body 31 and a blade head 32. The two blade heads 32 are respectively located at one end of the two aperture plate bodies 31 that are close to each other, and both extend obliquely in a direction away from the aperture plate body 31 and close to the shading plate 2 to the rectangular window 21, and form a blade tip 321 at the end. The two blade tips 321 are both arranged as a planar structure extending in the width direction of the rectangular window 21.

[0034] Specifically, the two blade heads 32 are opposite to each other and are respectively located at one end of the two aperture plate bodies 31 that are close to each other. In the vertical direction, the lower ends of the two blade heads 32 are installed on the aperture plate body 31 by bolts, and the upper ends of the two blade heads 32 are the blade tips 321. The blade heads 32 extend obliquely from bottom to top in a direction away from the aperture plate body 31 and close to the shading plate 2, and extend from the rectangular window 21, that is, the blade tip 321 can extend from the rectangular window 21, and the blade tip 321 is configured as a planar structure extending in the width direction of the rectangular window 21, which can be understood as the blade tip 321 being parallel to the longitudinal aperture plate 4. When the two longitudinal aperture pieces 4 and the two knife tips 321 cooperate with each other to form a light-transmitting rectangular window, the two knife tips 321 can serve as the two wide sides of the light-transmitting rectangular window, and because the knife tip 321 is closer to the shading plate 2 in the vertical direction, that is, the vertical distance between the knife tip 321 and the longitudinal aperture piece 4 is smaller than the vertical distance between the aperture piece body 31 and the longitudinal aperture piece 4, so that the knife tip 321 is closer to the longitudinal aperture piece 4, it can prevent the laser from leaking from between the aperture piece body 31 and the longitudinal aperture piece 4, so as to ensure the forming accuracy of the light-transmitting rectangular window.

[0035] In this way, by having two cutter heads 32 respectively located at one end close to the two aperture piece bodies 31 and both extending obliquely in a direction away from the aperture piece body 31 and close to the shading plate 2 to the rectangular window 21, the two cutter heads 32 can be freely disassembled, and a cutter tip 321 is formed by the ends of the two cutter heads 32, so that the two cutter heads 32 can be respectively extended toward the two longitudinal aperture pieces 4 under the support of the two aperture piece bodies 31, so that the vertical distance between the cutter tip 321 and the longitudinal aperture piece 4 is smaller than the vertical distance between the aperture piece body 31 and the longitudinal aperture piece 4, the distance between the cutter tip 321 and the longitudinal aperture piece 4 can be reduced, and by having the two cutter tips 321 both being arranged as a planar structure extending in the width direction of the rectangular window 21, the two cutter tips 321 can serve as the two wide sides of the light-transmitting rectangular window, so that when the light-transmitting rectangular window is formed, the two cutter tips 321 can prevent light from leaking from the two aperture pieces 31, thereby ensuring the forming accuracy of the light-transmitting rectangular window.

[0036] Optionally, combined Figure 5 and Figure 6As shown, two slide grooves 323 are respectively provided at both ends of the cutter head 32 along the width direction of the rectangular window 21 , the cutter head 32 passes through the rectangular window 21 and forms a cutter tip 321 at the end, and the two slide grooves 323 are respectively slidably connected to the two long sides of the rectangular window 21 .

[0037] Specifically, the width direction of the rectangular window 21 refers to the Y-axis direction, and two slide grooves 323 are respectively provided at the two ends of the blade tip 321 along the width direction of the rectangular window 21. After the blade head 32 passes through the rectangular window 21, the blade tip 321 is formed at the upper end of the blade head 32, and the blade tip 321 leaks out of the rectangular window 21. The notches of the two slide grooves 323 are respectively facing the two long sides of the rectangular window 21, and the two ends of the blade tip 321 along the width direction of the rectangular window 21 are respectively slidably connected with the two long sides of the rectangular window 21 through the two slide grooves 323, so that the length of the blade tip 321 is increased without increasing the width of the rectangular window 21. In the process of forming the light-transmitting rectangular window, the knife tip 321 can slide along the long side of the rectangular window 21, and the side walls of the two grooves 323 can cover part of the long side of the rectangular window 21, ensuring that the two knife tips 321 can overlap with the two longitudinal aperture pieces 4 respectively, avoiding light leakage from affecting the light transmission accuracy of the window. For example, when the side walls of the two grooves 323 can cover part of the long side of the rectangular window 21, it can avoid light shielding from leaking out from between the knife tip 321 and the long side of the rectangular window 21, resulting in poor forming effect of the light-transmitting rectangular window, thereby ensuring the forming effect of the light-transmitting rectangular window.

[0038] In this way, two slide grooves 323 are respectively provided at both ends of the cutting head 32 along the width direction of the rectangular window 21. The cutting head 32 passes through the rectangular window 21 and forms a cutting tip 321 at the end. The two sliding grooves 323 are respectively slidably connected to the two long sides of the rectangular window 21. The two sliding grooves 323 ensure that the cutting tip 321 and the two longitudinal aperture pieces 4 always overlap in space, thereby ensuring the shape accuracy of the light-transmitting rectangular window formed by the cooperation of the two cutting tips 321 and the two longitudinal aperture pieces 4.

[0039] Optionally, combined Figure 6 As shown, a nitrogen guiding slope 322 is provided on the cutter head 32 . The nitrogen guiding slope 322 is located at one end of the cutter head 32 facing the corresponding aperture plate body 31 . The nitrogen guiding slope 322 gradually inclines from the cutter tip 321 toward the aperture plate body 31 .

[0040] Specifically, the lower end of the blade head 32 is connected to the aperture plate body 31 by bolts, the aperture plate body 31 and the blade head 32 are connected one by one, the nitrogen guide slope 322 is located at one end of the blade head 32 facing the corresponding aperture plate body 31, and the nitrogen guide slope 322 is gradually inclined from the blade tip 321 toward the aperture plate body 31. Combined with the foregoing, after the cooling nitrogen flows to the blade tip 321, the cooling nitrogen can flow from the nitrogen backflow slope 322 to the aperture plate body 31 to ensure the flow efficiency of the cooling nitrogen. For example, when the blade tip 321 is at the wide side position of the rectangular window 21, the inclined setting of the nitrogen guide slope 322 can ensure that there is a certain gap between the blade tip 321 and the wide side of the rectangular window 21, so that the cooling nitrogen can flow from the gap to the aperture body 31 to cool the aperture body 31.

[0041] In this way, a nitrogen guide slope 322 is provided on the cutting head 32, and the nitrogen guide slope 322 is located at one end of the cutting head 32 facing the corresponding aperture plate body 31. The nitrogen guide slope 322 is gradually inclined from the cutting tip 321 toward the aperture plate body 31, so that the cooling nitrogen flowing to the cutting tip 321 can flow quickly from the nitrogen guide slope 322 to the aperture body 31, thereby ensuring the cooling efficiency of the aperture body 31 and further ensuring the cooling effect of the aperture body 31.

[0042] Optionally, combined Figure 5 As shown, the cooling water channel 5 is distributed in an S-shaped curve.

[0043] Specifically, the cooling water channel 5 is bent in an S-shaped curve and distributed inside the shading plate 2 .

[0044] In this way, by distributing the cooling water channel 5 in an S-shaped curve, the length of the cooling water channel 5 inside the sunshade 2 can be increased, thereby improving the cooling effect.

[0045] Optionally, combined Figure 1 and Figure 3 As shown, the window high-speed scanning exposure device also includes two lateral stepping drive mechanisms 7, the fixed ends of the two lateral stepping drive mechanisms 7 are respectively installed on one end of the basic frame 1 parallel to the length direction of the rectangular window 21, and the two movable ends of the two lateral stepping drive mechanisms 7 are respectively connected to the two lateral aperture pieces 3 by bolts, so as to drive the two lateral aperture pieces 3 to move toward or away from each other along the length of the rectangular window 21, and a bolt avoidance hole 23 is provided on the shading plate 2.

[0046] Specifically, the transverse stepping driving mechanism 7 may include a stepping motor, a transmission structure, a slide rail and a slider. The stepping motor is installed on the frame of the basic frame 1 located in the positive direction of the Y axis. The driving end of the stepping motor is connected to the power input end of the transmission structure, and the power output end of the transmission structure is connected to the slider. The slider is slidably connected to the slide rail. The slide rail is installed on the frame of the basic frame 1 located in the positive direction of the Y axis. The slider is connected to a light aperture piece body 31 of a transverse aperture piece 3 through a bolt to achieve the transverse movement of the transverse aperture piece 3. And corresponding to the bolts connecting the light aperture piece body 31 and the slider, a bolt avoidance hole 23 is provided on the shading plate 2. When disassembling the light aperture piece body 31, the bolts connecting the light aperture piece body 31 and the slider can be removed from the lower end of the basic frame 1, and the bolts connecting the light aperture piece body 31 and the slider can also be removed from the bolt avoidance hole 23.

[0047] In this way, the fixed ends of the two transverse stepping driving mechanisms 7 are respectively installed on one end of the basic frame 1 parallel to the length direction of the rectangular window 21, and the two movable ends of the two transverse stepping driving mechanisms 7 are respectively connected to the two transverse aperture pieces 3 by bolts, so as to drive the two transverse aperture pieces 3 to move toward or away from each other along the length of the rectangular window 21. The movement accuracy of the two transverse aperture pieces 3 in the length direction of the rectangular window 21 can be ensured, and the bolt avoidance holes 23 are provided on the shading plate 2. The bolt avoidance holes 23 form avoidance spaces on the shading plate 2 to prevent the shading plate 2 from covering the bolts connecting the transverse aperture pieces 3 and the movable ends of the transverse stepping driving mechanisms 7, thereby improving the disassembly and assembly efficiency of the transverse aperture pieces 3.

[0048] Optionally, combined Figure 1 , Figure 3 and Figure 5 As shown, the shortest distance between the bolt avoidance hole 23 and the rectangular window 21 is greater than the maximum distance between the longitudinal aperture piece 4 and the rectangular window 21 .

[0049] Specifically, the bolt avoidance hole 23 is arranged on the bottom of the groove 22 and is located at the end of the bottom of the groove facing the positive direction of the Y-axis. The shortest distance between the bolt avoidance hole 23 and the rectangular window 21 is greater than the maximum distance between the longitudinal aperture piece 4 and the rectangular window 21, which means that the maximum distance that the longitudinal aperture piece 4 located in the positive direction of the Y-axis moves away from the rectangular window 21 is smaller than the maximum distance between the bolt avoidance hole 23 and the rectangular window 21. It also means that when the longitudinal aperture piece 4 located in the positive direction of the Y-axis is at the position of the maximum distance moved away from the rectangular window 21, there is a certain distance between the side of the longitudinal aperture piece 4 facing the positive direction of the Y-axis and the side of the bolt avoidance hole 23 facing the negative direction of the Y-axis. In some embodiments, the side of the longitudinal aperture piece 4 facing the positive direction of the Y-axis may also be just above the side of the bolt avoidance hole 23 facing the negative direction of the Y-axis.

[0050] In this way, by making the shortest distance between the bolt avoidance hole 23 and the rectangular window 21 greater than the maximum distance between the longitudinal aperture piece 4 and the rectangular window 21, the longitudinal aperture piece 4 can avoid the bolt avoidance hole 23 to prevent the longitudinal aperture piece 4 from covering the bolt avoidance hole 23, thereby further facilitating the disassembly and assembly of the transverse aperture piece 3.

[0051] Optionally, combined Figure 1 and Figure 3 As shown, the window high-speed scanning exposure device also includes two longitudinal stepping drive mechanisms 8, the fixed ends of the two longitudinal stepping drive mechanisms 8 are respectively installed on one end of the basic frame 1 parallel to the width direction of the rectangular window 21, and the two movable ends of the two longitudinal stepping drive mechanisms 8 are respectively connected to the two longitudinal aperture pieces 4 by bolts, so as to drive the two longitudinal aperture pieces 4 to move toward or away from each other along the width of the rectangular window 21.

[0052] Specifically, the structural composition of the longitudinal stepping drive mechanism 8 can be similar to that of the transverse stepping drive mechanism 7. The longitudinal stepping drive mechanism 8 may include a stepping motor, a transmission structure, a slide rail and a slider, the stepping motor is installed on the frame of the basic frame 1 located in the positive direction of the X-axis, the driving end of the stepping motor is connected to the power input end of the transmission structure, the power output end of the transmission structure is connected to the slider, the slider is slidably connected to the slide rail, the slide rail is installed on the frame of the basic frame 1 located in the positive direction of the X-axis, and the slider is connected to a longitudinal aperture piece 4 through a bolt to achieve the longitudinal movement of the longitudinal aperture piece 4.

[0053] In this way, the fixed ends of the two longitudinal stepping drive mechanisms 8 are respectively installed on one end of the base frame 1 parallel to the width direction of the rectangular window 21, and the two movable ends of the two longitudinal stepping drive mechanisms 8 are respectively connected to the two longitudinal aperture pieces 4 by bolts, so as to drive the two longitudinal aperture pieces 4 to move toward or away from each other along the width of the rectangular window 21, thereby ensuring the movement accuracy of the two longitudinal aperture pieces 4 in the width direction of the rectangular window 21.

[0054] Optionally, the cutter head 32 is made of a material that is resistant to high temperatures and corrosion.

[0055] In this way, the high temperature resistance and corrosion resistance of the cutter head 32 can be improved, thereby extending the service life of the cutter head 32.

[0056] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A window high-speed scanning exposure device, characterized in that: The invention comprises a basic frame (1), a shading plate (2), two transverse aperture plates (3) and two longitudinal aperture plates (4), wherein the basic frame (1) comprises a hollow area (11), the shading plate (2) is connected to the basic frame (1) and covers the hollow area (11), the end of the shading plate (2) away from the hollow area (11) is a laser irradiation end, the shading plate (2) comprises a rectangular window (21), the two transverse aperture plates (3) are located between the shading plate (2) and the hollow area (11), the two longitudinal aperture plates (4) are located at the end of the shading plate (2) away from the two transverse aperture plates (3), the shading plate (2) is provided with a water cooling structure and a nitrogen cooling structure, the two transverse aperture plates (3) are used to move toward or away from each other along the length of the rectangular window (21), and the two longitudinal aperture plates (4) are used to move toward or away from each other along the width of the rectangular window (21).

2. The window high-speed scanning exposure device according to claim 1, characterized in that: The shading plate (2) is provided with a groove (22), the rectangular window (21) is provided at the bottom of the groove (22), the cooling water channel (5) of the water cooling structure is provided inside the shading plate (2), and the two longitudinal aperture plates (4) move towards or away from each other in the groove (22); the nitrogen cooling structure comprises an arc-shaped guide plate (6), and the arc-shaped guide plate (6) is installed at the edge of the notch of the groove (22) to guide the cooling nitrogen blown out by the nitrogen cooling structure into the groove (22).

3. The window high-speed scanning exposure device according to claim 1, characterized in that: The two transverse aperture plates (3) each include an aperture plate body (31) and a blade head (32); the two blade heads (32) are respectively located at one end of the two aperture plate bodies (31) close to each other, and both extend obliquely in a direction away from the aperture plate body (31) and close to the shading plate (2) to the rectangular window (21), and form a blade tip (321) at the end; the two blade tips (321) are both arranged as a planar structure extending in the width direction of the rectangular window (21).

4. The window high-speed scanning exposure device according to claim 3, characterized in that: The cutter head (32) is provided with two slide grooves (323) at both ends along the width direction of the rectangular window (21), the cutter head (32) passes through the rectangular window (21) and forms the cutter tip (321) at the end, and the two slide grooves (323) are respectively slidably connected to the two long sides of the rectangular window (21).

5. The window high-speed scanning exposure device according to claim 3, characterized in that: The blade head (32) is provided with a nitrogen guide slope (322), the nitrogen guide slope (322) is located at one end of the blade head (32) facing the corresponding aperture plate body (31), and the nitrogen guide slope (322) gradually inclines from the blade tip (321) toward the aperture plate body (31).

6. The window high-speed scanning exposure device according to claim 2, characterized in that: The cooling pipe (5) is distributed in an S-shaped curve.

7. The window high-speed scanning exposure device according to claim 1, characterized in that: It also includes two transverse stepping drive mechanisms (7), the fixed ends of the two transverse stepping drive mechanisms (7) are respectively installed on one end of the base frame (1) parallel to the length direction of the rectangular window (21), and the two movable ends of the two transverse stepping drive mechanisms (7) are respectively connected to the two transverse aperture pieces (3) by bolts, so as to drive the two transverse aperture pieces (3) to move toward or away from each other along the length of the rectangular window (21), and the shading plate (2) is provided with a bolt avoidance hole (23).

8. The window high-speed scanning exposure device according to claim 7, characterized in that: The shortest distance between the bolt avoidance hole (23) and the rectangular window (21) is greater than the maximum distance between the longitudinal aperture piece (4) and the rectangular window (21).

9. The window high-speed scanning exposure device according to claim 7, characterized in that: It also comprises two longitudinal stepping drive mechanisms (8), wherein the fixed ends of the two longitudinal stepping drive mechanisms (8) are respectively mounted on one end of the base frame (1) parallel to the width direction of the rectangular window (21), and the two movable ends of the two longitudinal stepping drive mechanisms (8) are respectively connected to the two longitudinal aperture pieces (4) by bolts, so as to drive the two longitudinal aperture pieces (4) to move towards or away from each other along the width of the rectangular window (21).

10. The window high-speed scanning exposure device according to claim 3, characterized in that: The cutter head (32) is made of a high temperature resistant and corrosion resistant material.

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