Stacking device on a silicon wafer cassette conveyor line

Abstract

The embodiment of the present application discloses a stacking device on a silicon wafer box conveying line, and particularly relates to the technical field of stacking devices, which comprises a base, a plurality of spaced-apart support columns are installed on the top of the base, and a functional assembly for stacking silicon wafer boxes is installed on the top of the plurality of support columns; the functional assembly comprises a support table installed on the top of the plurality of support columns. Two worms on a fixed shaft drive corresponding worm gears to rotate, the two worm screws are opposite in screw direction, so that the two worm gears can drive two movable shafts to rotate outward synchronously through corresponding linkage shafts, and two material pushing plates at the material table can lift the silicon wafer boxes to the support table through the rotation of the movable shafts, and the material pushing plates on the support table can be lifted and slowly separated from the stacked silicon wafer boxes, and through the repeated operation of the four material pushing plates, the silicon wafer boxes can be stacked more effectively and quickly, and the steps are simple.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of stacking devices, and particularly relates to a stacking device on a silicon wafer box conveying line. BACKGROUND

[0002] The silicon wafer box is a container for packaging and protecting semiconductor wafers (such as silicon wafers, sapphire, etc.), providing a safe packaging environment for semiconductor wafers to prevent physical damage during transportation and storage.

[0003] The silicon wafer box is needed during silicon wafer processing, and the silicon wafer box needs to be stacked on the conveying line. As shown in the prior art with publication number CN111908144B, although the prior art drives the empty silicon wafer box to rise and abut against the support plate by starting the lifting cylinder, then starts the driving cylinder, the driving cylinder drives the support to move forward, the inclined surface structure is used to move the support plate relative to the two sides of the fixed seat, so that the empty silicon wafer box on the upper side of the support plate is separated from the support plate and stacked on the empty silicon wafer box on the stacking plate, and the lifting cylinder continuously drives all the empty silicon wafer boxes to move upward. When the lifting cylinder stroke ends, the empty silicon wafer boxes are located on the upper side of the support plate, the driving cylinder is reset to drive the support plate to reset, and then the lifting cylinder is reset to lower the stacking plate through the support plates to the starting position, and the empty silicon wafer boxes on the stacking plate are supported by the support plate. At the same time, the empty silicon wafer boxes are stacked from bottom to top. However, when the silicon wafer box is stacked, the lifting cylinder needs to be started first, then the driving cylinder is driven, the silicon wafer box is clamped and fixed, and then the lifting cylinder is started. Therefore, the technical scheme has many steps, which affects the stacking efficiency of the technical scheme. SUMMARY

[0004] The present application aims to solve at least one of the technical problems in the prior art, and discloses a stacking device on a silicon wafer box conveying line.

[0005] The present application provides a stacking device on a silicon wafer box conveying line, which comprises:

[0006] a base;

[0007] a plurality of supports installed on the top of the base in intervals;

[0008] a functional assembly for stacking silicon wafer boxes, which is installed on the top of the plurality of supports; wherein the functional assembly comprises:

[0009] a support table installed on the top of the plurality of supports, and a material hole and two through holes are formed in the support table in communication, and the two through holes are respectively arranged on both sides of the material hole;

[0010] A movable shaft is movably installed inside the two through holes, and four pushing plates are arranged in an annular array on the outside of the movable shaft;

[0011] Two fixed plates are installed on the rear side of the support table, a fixed shaft is movably connected between the two fixed plates through a bearing, a worm is sleeved on the outside of each end of the fixed shaft, the screw directions of the two worms are opposite, a linkage shaft is arranged on the top of each worm, a worm wheel is sleeved on the outside of the rear end of the linkage shaft and engaged with the worm, and the front end of the linkage shaft penetrates through the support table and is fixed with the movable shaft.

[0012] A material table is arranged at the bottom of the support table, a connecting plate for connecting the support table is installed on the top of the rear end of the material table, and a pushing hole is formed in each side of the material table, and one of the pushing plates is arranged inside the pushing hole.

[0013] In some possible embodiments, two side plates are arranged at intervals on the top of the support table, a side hole is formed in the inside of the bottom end of each side plate and communicates with the through hole, and the pushing plate arranged on the top of the movable shaft is arranged inside the side hole.

[0014] In some possible embodiments, air supply pipes are arranged on the front and rear sides of the pushing plate arranged on the top of the movable shaft, one end of each air supply pipe close to the support table extends to the inside of the side plate, and the other end of each air supply pipe close to the side plate is arranged in an inclined manner.

[0015] In some possible embodiments, an air bellow is installed on the top of the base;

[0016] A fan is installed in the inside of the rear end of the air bellow, and a conveying pipe is fixedly and communicatively connected to each side of the front end of the air bellow;

[0017] One end of the conveying pipe away from the air bellow extends to the top of the support table and is fixedly and communicatively connected to a communication pipe, and the other ends of the communication pipe are fixedly and communicatively connected to the sides of the air supply pipes away from the side plates.

[0018] In some possible embodiments, the same mounting plate is arranged on the top of the two side plates, a pressing plate is arranged at the bottom of each end of the mounting plate, and the pressing plate is arranged between the two side plates;

[0019] An installation support is arranged on the side of each pressing plate away from the other pressing plate, the top end of the installation support is fixedly connected to the bottom of the mounting plate, two electric push rods are arranged on the side of the installation support close to the pressing plate at intervals, and the other end of each electric push rod away from the installation support is fixedly connected to the pressing plate.

[0020] In some possible embodiments, two mounting seats are mounted on the top of the rear end of the support table, and a mounting shaft is movably connected between the two mounting seats through bearings, and a support plate is sleeved on the outer part of both ends of the mounting shaft, and one end of the support plate away from the mounting shaft is fixed to one side of the mounting plate.

[0021] In some possible embodiments, the first servo motor is mounted on the side of one of the fixing plates away from the fixing shaft, and the output shaft of the first servo motor penetrates the fixing plate and is fixed to the fixing shaft.

[0022] In some possible embodiments, the second servo motor is mounted on the side of one of the mounting seats away from the mounting shaft, and the output shaft of the second servo motor penetrates the mounting seat and is fixed to the mounting shaft.

[0023] In some possible embodiments, two guide plates are mounted on the top of the front end of the material table, and the two guide plates are symmetrically distributed about the center axis of the material table.

[0024] In some possible embodiments, a dustproof net is arranged on the rear side of the fan, and the dustproof net is mounted on the inside of the rear end of the wind box.

[0025] Advantages:

[0026] The stacking device on the silicon wafer box conveying line in the embodiment of the application can drive the corresponding worm gears to rotate through the two worm gears on the fixing shaft, and the two worm gears can be driven to rotate outward synchronously through the corresponding linkage shafts due to the opposite screw directions of the two worm gears, the two material pushing plates at the material table can be lifted to the support table through the rotation of the movable shafts, the material pushing plates on the support table can be lifted and slowly separated from the stacked silicon wafer boxes, the silicon wafer boxes not supported can fall on the silicon wafer boxes that are subsequently lifted, and the silicon wafer boxes can be stacked more effectively and quickly through the repeated rotation of the four material pushing plates, and the steps are simple.

[0027] Further, the stacking device on the silicon wafer box conveying line in the embodiment of the application can suck external air into the wind box through the fan, and then the air is conveyed into the air supply pipe through the conveying pipe and the communication pipe, and then the air is conveyed between the two side plates through the air supply pipe, so that an upward force is generated at the bottom of the silicon wafer box, so that the falling speed of the silicon wafer box can be slowed down, the damage caused by the excessive falling impact can be avoided, and the integrity of the silicon wafer box can be ensured.

[0028] Further, the stacking device on the silicon wafer box conveying line of the embodiment of the present application can realize the effect that the workman can conveniently collect the silicon wafer box by the extension of the electric push rod to drive the pressing plate to extrude and fix the silicon wafer box, then drive the mounting shaft and the support plates thereon to rotate by the second servo motor, and then drive the mounting plate to rotate outwardly with the mounting shaft as the center by the two support plates, so as to turn and displace the silicon wafer box fixed by the pressing plate to the ground. BRIEF DESCRIPTION OF DRAWINGS

[0029] The above and other features, advantages and aspects of embodiments of the present application will become more apparent by describing in detail preferred embodiments thereof with reference to the attached drawings in which:

[0030] Figure 1 It is a whole structure schematic view of the stacking device on the silicon wafer box conveying line of the embodiment of the present application;

[0031] Figure 2 It is a back view of the support table of the embodiment of the present application;

[0032] Figure 3 It is a whole structure schematic view of the stacking device on the silicon wafer box conveying line of the embodiment of the present application; Figure 2 It is an enlarged view of part A in the figure;

[0033] Figure 4 It is a schematic view of the mounting plate of the embodiment of the present application after adjustment;

[0034] Figure 5 It is a sectional view of the support table of the embodiment of the present application;

[0035] Figure 6 It is a top view of the support table of the embodiment of the present application;

[0036] Figure 7 It is a side sectional view of the bellows of the embodiment of the present application.

[0037] The reference signs are as follows: 1, base; 2, support column; 3, support table; 4, material hole; 5, through hole; 6, movable shaft; 7, material pushing plate; 8, fixed plate; 9, fixed shaft; 10, worm; 11, linkage shaft; 12, worm wheel; 13, material table; 14, connecting plate; 15, side plate; 16, side hole; 17, air supply pipe; 18, bellows; 19, air blower; 20, conveying pipe; 21, communication pipe; 22, mounting plate; 23, pressing plate; 24, mounting bracket; 25, electric push rod; 26, mounting seat; 27, mounting shaft; 28, support plate; 29, first servo motor; 30, second servo motor; 31, guide plate; 32, dustproof net; 33, material pushing hole. DETAILED DESCRIPTION

[0038] In order to better understand the technical solutions of the present application, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0039] Unless otherwise specifically indicated, the technical and scientific terms used in the embodiments of the present application should be understood as having the commonly accepted meaning in the field to which the present application pertains. The terms "comprise" or "comprising" and the like used in the embodiments of the present application do not exclude the presence or addition of one or more other features, numbers, steps, actions, operations, components, elements, and / or groups thereof, or the addition of these. In addition, the terms "first", "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number and order of the indicated technical features. Therefore, the features with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0040] Unless otherwise specifically indicated, the relative arrangement of the components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn in accordance with the actual proportional relationship, and the technology, methods and devices known to those of ordinary skill in the relevant art can not be discussed in detail, but in appropriate cases, the shown technology, methods and devices should be considered as part of the authorized description. In all the examples shown and discussed here, any specific other example can have different values. It should be noted that similar symbols and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0041] In the description of the embodiments of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the embodiments of the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the embodiments of the present application and the features of the different embodiments or examples without contradiction.

[0042] With reference to the drawings accompanying the specification Figures 1-7 , the embodiments of the present application provide a stacking device on a silicon wafer box conveying line, which comprises a base 1, a plurality of spaced-apart support columns 2 are mounted on the top of the base 1, and a functional assembly for stacking silicon wafer boxes is mounted on the top of the plurality of support columns 2.

[0043] As shown in Figure 1 , 2 , 3, 5 and 6, the functional assembly comprises a support table 3 mounted on the top of the plurality of support columns 2, and a material hole 4 and two through holes 5 are formed in the inside of the support table 3, the two through holes 5 are respectively arranged on both sides of the material hole 4, and an active shaft 6 is mounted in the inside of each through hole 5 through a rotating shaft. Four push material plates 7 are arranged in an annular array on the outside of the active shaft 6, and the cross section of the push material plate 7 is L-shaped; two fixed plates 8 are mounted on the rear side of the support table 3, a fixed shaft 9 is mounted between the two fixed plates 8 through a bearing, a worm 10 is sleeved on the outside of both ends of the fixed shaft 9, the screw directions of the two worms 10 are opposite, a linkage shaft 11 is arranged on the top of each worm 10, a worm wheel 12 is sleeved on the outside of the rear end of the linkage shaft 11 and engaged with the worm 10, and the front end of the linkage shaft 11 penetrates through the support table 3 and is fixed with the active shaft 6; a material table 13 is arranged on the bottom of the support table 3, a connecting plate 14 for connecting the support table 3 is mounted on the top of the rear end of the material table 13, and a push material hole 33 is formed on both sides of the material table 13, one of the push material plates 7 is arranged in the inside of the push material hole 33, and two guide plates 31 are mounted on the top of the front end of the material table 13, the two guide plates 31 are symmetrically distributed about the center axis of the material table 13, the movement of the silicon wafer box is limited by the guide plates 31, so as to ensure the stability of the movement of the silicon wafer box.

[0044] The silicon wafer box is conveyed to the material table 13 through the conveying line, and then the staff drives the two worms 10 on the fixed shaft 9 to rotate by the first servo motor 29, and the two worms 10 drive the corresponding worm gears 12 to rotate, and because the two worms 10 are opposite in screw direction, the two worm gears 12 can drive the two movable shafts 6 to rotate outward synchronously through the corresponding linkage shafts 11, and when the two movable shafts 6 rotate outward synchronously, the two pusher plates 7 located at the material table 13 can lift the silicon wafer box to the support table 3 with the operation of the movable shaft 6, and the pusher plate 7 itself on the support table 3 is lifted and slowly separated from the already stacked silicon wafer box, and the silicon wafer box not supported falls onto the silicon wafer box behind it, so that the stacking of the silicon wafer box can be completed, and with the repeated use of the four pusher plates 7, the silicon wafer box can be stacked more efficiently and quickly.

[0045] To avoid damage caused by excessive impact of the silicon wafer box falling, it is necessary to slow down the impact of the silicon wafer box falling, such as Figure 1 、 2 , 4, 5 and 7, two spaced apart side plates 15 are installed on the top of the support table 3, and a side hole 16 is formed in the bottom end of the side plate 15, the side hole 16 is in communication with the through hole 5, and the pusher plate 7 located at the top of the movable shaft 6 is arranged in the side hole 16; the pusher plate 7 located at the top of the movable shaft 6 is provided with air supply pipes 17 on the front and rear sides, one end of the air supply pipe 17 close to the support table 3 extends into the side plate 15, and the end of the air supply pipe 17 close to the side plate 15 is inclined, a wind box 18 is installed on the top of the base 1, a fan 19 is installed in the rear end of the wind box 18, a dust screen 32 is arranged on the rear side of the fan 19, the dust screen 32 is installed in the rear end of the wind box 18, and the dust screen 32 blocks dust and other impurities to prevent them from entering the wind box 18 and causing pollution, two conveying pipes 20 are fixedly connected to the front end of the wind box 18, one end of the conveying pipe 20 away from the wind box 18 extends to the top of the support table 3 and is fixedly connected with a communication pipe 21, and the communication pipe 21 is fixedly connected with the two air supply pipes 17 away from the side plate 15 at the front and rear ends, respectively. The fan 19 sucks external air into the wind box 18, and then the air is conveyed into the air supply pipes 17 through the conveying pipe 20 and the communication pipe 21, and then the air is conveyed between the two side plates 15 through the air supply pipes 17, thereby generating an upward force at the bottom of the silicon wafer box, which can slow down the falling speed of the silicon wafer box and avoid damage caused by excessive impact, thereby ensuring the integrity of the silicon wafer box.

[0046] To improve the convenience of the staff to collect the silicon wafer box, such as Figure 1 、 2As shown in FIGS. 4, the top of the two side plates 15 is provided with the same mounting plate 22, and the bottom of the front and rear ends of the mounting plate 22 is provided with the pressing plate 23, which is arranged between the two side plates 15; the side away from the two pressing plates 23 is provided with the mounting bracket 24, the top end of which is fixed with the bottom of the mounting plate 22, and the side close to the pressing plate 23 is provided with the two electric push rods 25 arranged at intervals, and the end away from the mounting bracket 24 is fixed with the pressing plate 23, the top of the rear end of the support table 3 is provided with the two mounting seats 26 arranged at intervals, and the mounting shaft 27 movably connected through the bearing is arranged between the two mounting seats 26, the outer part of the two ends of the mounting shaft 27 is sleeved with the support plate 28, and the end away from the mounting shaft 27 is fixed with one side of the mounting plate 22, the stretching of the electric push rod 25 drives the pressing plate 23 to extrude and fix the wafer box, then the second servo motor 30 drives the mounting shaft 27 and the support plate 28 thereon to rotate, and the two support plates 28 drive the mounting plate 22 to rotate outwardly with the mounting shaft 27 as the center, so that the wafer box fixed by the pressing plate 23 can be turned and displaced to the ground, and the effect that the staff can conveniently collect the wafer box is realized.

[0047] In order to drive the rotation efficiency of the worm 10 and the worm gear 12, as shown in Figure 2 、 3 and 5, one of the fixing plates 8 is provided with the first servo motor 29 away from the fixing shaft 9, the output shaft of the first servo motor 29 penetrates the fixing plate 8 and is fixed with the fixing shaft 9, the connection of the output shaft of the first servo motor 29 and the fixing shaft 9 can drive the two worms 10 on the fixing shaft 9 to rotate, and the worm 10 drives the worm gear 12 to rotate.

[0048] In order to facilitate the rotation of the mounting shaft 27, as shown in Figure 2 and 3 , one of the mounting seats 26 is provided with the second servo motor 30 away from the mounting shaft 27, and the output shaft of the second servo motor 30 penetrates the mounting seat 26 and is fixed with the mounting shaft 27, the connection of the output shaft of the second servo motor 30 and the mounting shaft 27 can drive the mounting shaft 27 and the support plate 28 thereon to rotate, so that the effect of turning and adjusting the mounting plate 22 can be realized.

[0049] It can be understood that the above embodiments are only exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Various modifications and improvements can be made by those skilled in the art without departing from the spirit and essence of the present application, and these modifications and improvements are also regarded as the protection scope of the present application.

Claims

1. A stacking device on a silicon wafer cassette transport line, characterized by, The utility model provides a silicon wafer box stacking device, which comprises a base, a plurality of support columns, a functional assembly for stacking silicon wafer boxes, a support table, a movable shaft, four pusher plates, two fixed plates, a fixed shaft, two worm gears, a linkage shaft, a material table, two side plates, two pressing plates, two mounting brackets, two electric push rods, two mounting seats, a first servo motor, a second servo motor and two guide plates. The utility model discloses a silicon wafer box stacking device, which comprises a base, a plurality of support columns, a functional assembly for stacking silicon wafer boxes, a support table, a movable shaft, four pusher plates, two fixed plates, a fixed shaft, two worm gears, a linkage shaft, a material table, two side plates, two pressing plates, two mounting brackets, two electric push rods, two mounting seats, a first servo motor, a second servo motor and two guide plates. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 2. The stacking device on a silicon wafer cassette transport line according to claim 1, wherein, ​ 3. A stacking device on a silicon wafer cassette transport line as set forth in claim 2, wherein, ​ ​ ​ 4. A stacking device on a silicon wafer cassette transport line according to any one of claims 1 to 3, characterized in that ​ 5. A stacking device on a silicon wafer cassette transport line according to any one of claims 1 to 3, characterized in that ​ 6. A stacking device on a silicon wafer cassette transport line as claimed in any one of claims 1 to 3, characterized in that ​ 7. The stacking device of claim 3, wherein the stacking device is characterized by: The fan rear side is provided with a dust screen, and the dust screen is installed inside the fan rear end.

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