Atomic layer deposition equipment and precursor source device thereof

Abstract

The invention discloses atomic layer deposition equipment and a precursor source device thereof. The precursor source device comprises a bottle main body, a source outlet pipeline, a carrier gas inlet pipe, a precursor temperature detection assembly, a precursor liquid level detection assembly, a vacuum gauge and a hot bath mechanism. During application, the temperature of the precursor is kept within a reasonable range, and the precursor discharged from the source outlet pipeline of the precursor source device enters the atomic layer deposition chamber to directly react, so that more time is saved, and the deposition speed is increased. Moreover, the discharge speed of the precursor and the carrier gas is controlled according to the data of the mass flow meter on the source outlet pipeline, and the gas inlet speed of the carrier gas is controlled according to the data of the mass flow meter on the carrier gas inlet pipe, so that the gas inlet amount of the precursor is more stable, the deposition quality is better, and the reduction of the atomic layer deposition speed caused by insufficient gas inlet amount is avoided. And the bottom wall of the bottle main body is the inverted conical wall, so that the precursor residue in the bottle main body is less, the waste of precursor raw materials is reduced, and the cost is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of thin film deposition, and in particular to an atomic layer deposition device and a precursor source device thereof. Background Art

[0002] Atomic layer deposition is a method that can deposit materials on the surface of a substrate layer by layer in the form of a single atomic film. However, during the atomic layer deposition process, the chemical reaction of a new layer of atomic film is directly related to the previous layer. This method allows only one layer of atoms to be deposited in each reaction. The film layer made by the atomic layer deposition process has the advantages of high purity and good uniformity. Therefore, the atomic layer deposition process is widely used in various fields; atomic layer deposition is a method of forming a deposited film by alternately passing gaseous precursor pulses into the reactor and chemically adsorbing and reacting on the deposition substrate. When the precursors reach the surface of the deposition substrate, they will chemically adsorb on its surface and undergo surface reactions. The atomic layer deposition reactor needs to be cleaned with an inert gas between the precursor pulses.

[0003] In the prior art, although the application value of atomic layer deposition technology (ALD) in advanced semiconductor nodes continues to increase, the temperature and air intake of the precursor are not stable enough, resulting in a slow atomic layer deposition speed; at the same time, the precursor is expensive, and a large amount of precursor remains in the precursor source bottle at the end of use, resulting in a waste of raw materials. Summary of the invention

[0004] The purpose of the present application is to provide an atomic layer deposition device and a precursor source device thereof, so as to make the temperature and air intake volume of the precursor more stable, increase the atomic layer deposition speed, and reduce the waste of the precursor.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] A precursor source device, comprising:

[0007] A bottle body, wherein the bottom wall of the bottle body is an inverted conical wall, and along a direction from the side wall away from the bottle body to the center line, the bottom wall gradually inclines in a direction away from the top wall of the bottle body;

[0008] an outlet pipeline, wherein the inlet end of the outlet pipeline is connected to the top wall of the bottle body, and a mass flow meter is arranged on the outlet pipeline;

[0009] a carrier gas inlet pipe, one end of which is located outside the bottle body and the other end of which extends to the bottom wall of the bottle body, and a mass flow meter is provided on the carrier gas inlet pipe;

[0010] A precursor temperature detection assembly, comprising a first temperature display located outside the bottle body and a first thermocouple in communication with the first temperature display, wherein the first thermocouple passes through the bottle wall of the bottle body and extends to the bottom wall of the bottle body;

[0011] A precursor liquid level detection assembly, comprising a liquid level display located outside the bottle body and a liquid level sensor in communication with the liquid level display, wherein the liquid level sensor extends through the bottle wall of the bottle body to the bottom wall of the bottle body;

[0012] A vacuum gauge, one end of which extends into the interior of the bottle body, and a vacuum indicator of the vacuum gauge is located outside the bottle body;

[0013] A heat bath mechanism comprises a heat bath container, a heating medium, a heater and a medium temperature detection component.

[0014] In one implementation, the bottle body is a stainless steel bottle; and / or an angle between a bottom wall of the bottle body and a side wall of the bottle body is greater than 90° and less than or equal to 150°.

[0015] In one implementation, the source pipeline is a stainless steel pipe; or, the inlet end of the source pipeline is connected to the top wall of the bottle body via a sealing joint; or, the inlet end of the source pipeline and the top wall of the bottle body are an integral structure.

[0016] In one implementation, the carrier gas inlet pipe passes through the edge of the top wall of the bottle body and the portion of the carrier gas inlet pipe extending into the interior of the bottle body gradually inclines toward the deepest part of the bottom wall of the bottle body; and / or, the carrier gas inlet pipe is a stainless steel pipe; and / or, the ratio of the distance between the bottom end of the carrier gas inlet pipe and the center line of the bottle body and the distance between the bottom end of the carrier gas inlet pipe and the extension surface of the side wall of the bottle body is less than or equal to 50%.

[0017] In one implementation, the first temperature display is located above the top wall of the bottle body; and / or the liquid level display is located above the top wall of the bottle body; and / or the vacuum gauge is located above the top wall of the bottle body.

[0018] In one implementation, the first thermocouple, the liquid level sensor and the vacuum gauge are connected to the top wall of the bottle body via a sealing joint.

[0019] In one implementation, the liquid level sensor extends to the deepest part of the bottom wall of the bottle body.

[0020] In one implementation, the heater includes a resistance heating wire surrounding the outer wall of the bottle body; and / or the medium temperature detection component includes a second temperature display and a second thermocouple communicatively connected to the second temperature display, and the second thermocouple extends into the interior of the hot bath container.

[0021] In one implementation, the outer surface of the bottom wall of the bottle body is in an inverted cone shape, and a base for supporting the bottle body is provided in the hot bath container, and the top wall of the base is in an inverted cone shape.

[0022] When the precursor source device provided in the embodiment of the present application is used, since it is provided with a precursor temperature detection component and a heat bath mechanism, the temperature of the precursor can be kept within a reasonable range, and the precursor discharged from the outlet pipeline of the precursor source device can directly react when entering the atomic layer deposition chamber, avoiding the precursor discharged from the outlet pipeline of the precursor source device to be heated or cooled to a suitable range before reacting, saving more time and improving the atomic layer deposition rate. In addition, a mass flow meter is provided on the outlet pipeline of the precursor source device provided in the embodiment of the present application, and a mass flow meter is also provided on the carrier gas inlet pipe, so that the discharge speed of the precursor and the carrier gas is controlled according to the data of the mass flow meter on the outlet pipeline, and the intake speed of the carrier gas is controlled according to the data of the mass flow meter on the carrier gas inlet pipe, so that the intake amount of the precursor is more stable, the deposition quality of the atomic layer is better, and the reduction of the atomic layer deposition rate caused by insufficient intake is avoided.

[0023] In addition, if Figure 1 As shown, the bottom wall of the bottle body is an inverted conical wall, so when the volume of the liquid precursor in the bottle body is small, the liquid precursor will stay near the bottom of the inverted conical wall, so that the liquid surface of the liquid precursor is still a certain distance from the deepest part of the inverted conical wall, so that there is less precursor residue in the bottle body, the utilization rate is higher, the waste of precursor raw materials is reduced, and the cost is reduced. The precursor source device provided by the present application is simple in structure and easy to operate during installation or disassembly, which reduces the consumables cost and labor cost of enterprises in using ALD equipment.

[0024] An atomic layer deposition device, such as the precursor source device described in any one of the above.

[0025] Compared with the prior art, the beneficial effects of the atomic layer deposition equipment provided in the embodiment of the present application are the same as the beneficial effects of the above-mentioned precursor source device, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0027] Figure 1 A partial cross-sectional view of a precursor source device provided in an embodiment of the present application;

[0028] Figure 2 A top view of a precursor source device provided in an embodiment of the present application.

[0029] Reference numerals:

[0030] 1-bottle body, 2-heating medium, 3-source pipeline, 4-mass flow meter, 5-first temperature display, 6-liquid level display, 7-vacuum gauge, 8-first thermocouple, 9-liquid level sensor, 10-sealed joint, 11-carrier gas inlet pipe, 12-liquid precursor, 13-second temperature display, 14-second thermocouple, 15-resistance heating wire, 16-base, 17-heat bath container. DETAILED DESCRIPTION

[0031] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0032] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0034] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc., indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present application.

[0035] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0036] See also Figure 1-Figure 2 The precursor source device provided in the embodiment of the present application includes a bottle body 1, a source outlet pipeline 3, a carrier gas inlet pipe 11, a precursor temperature detection component, a precursor liquid level detection component, a vacuum gauge 7 and a heat bath mechanism.

[0037] The bottom wall of the bottle body 1 is an inverted cone-shaped wall, and along the direction from the side wall away from the bottle body 1 to the center line, the bottom wall gradually tilts away from the top wall of the bottle body 1. Specifically, the bottle body 1 can be cylindrical or cubic as a whole. The inner surface of the bottom wall of the bottle body 1 is an inverted cone. From the side wall of the bottle body 1 to the direction of the center line of the bottle body 1, the inner surface of the bottom wall gradually tilts downward; that is, from the side wall of the bottle body 1 to the direction of the center line of the bottle body 1, the depth gradually increases. The depth is the largest at the intersection of the center line of the bottle body 1 and the inner surface of the bottom wall.

[0038] The inlet end of the source outlet pipeline 3 is connected to the top wall of the bottle body 1, so that the gas inside the bottle body 1 can be discharged through the source outlet pipeline 3 and enter the atomic layer deposition chamber. In order to obtain the source amount of the precursor and the carrier gas in real time, a mass flowmeter 4 is provided on the source outlet pipeline 3. Specifically, the mass of the precursor and the carrier gas discharged from the bottle body 1 can be obtained by the mass flowmeter 4 on the source outlet pipeline 3, so that the discharge speed of the precursor and the carrier gas can be controlled according to the data of the mass flowmeter 4 on the source outlet pipeline 3. It can be understood that a regulating valve can also be provided on the source outlet pipeline 3, and the discharge speed of the precursor and the carrier gas can be controlled by adjusting the opening of the regulating valve.

[0039] One end of the carrier gas inlet pipe 11 is located outside the bottle body 1 and the other end extends into the bottom wall of the bottle body 1. The carrier gas inlet pipe 11 is used to allow the carrier gas to enter the bottle body 1 and fully contact with the liquid precursor 12. The carrier gas can be specifically nitrogen, argon, helium, etc. The inlet end of the carrier gas inlet pipe 11 is located outside the bottle body 1, which is convenient for connection with the carrier gas supply equipment. The outlet end of the carrier gas inlet pipe 11 extends to the bottom wall of the bottle body 1. Specifically, the outlet end of the carrier gas inlet pipe 11 extends to the vicinity of the bottom wall of the bottle body 1, and there is a certain gap between the outlet end of the carrier gas inlet pipe 11 and the bottom wall of the bottle body 1, so that the carrier gas is discharged from the carrier gas inlet pipe 11. The gap between the outlet end of the carrier gas inlet pipe 11 and the bottom wall of the bottle body 1 can be greater than 0 and less than or equal to 5㎜. The outlet end of the carrier gas inlet pipe 11 extends to the vicinity of the bottom wall of the bottle body 1, which is more conducive to the carrier gas discharged from the carrier gas inlet pipe 11 to fully contact with the liquid precursor 12. In order to monitor the intake amount of the carrier gas in real time, a mass flow meter 4 is provided on the carrier gas inlet pipe 11. Specifically, the mass of the carrier gas entering the bottle body 1 can be obtained by the mass flow meter 4 on the carrier gas inlet pipe 11, so that the intake speed of the carrier gas can be controlled according to the data of the mass flow meter 4 on the carrier gas inlet pipe 11. It can be understood that a regulating valve can also be provided on the carrier gas inlet pipe 11, and the intake speed of the carrier gas can be controlled by adjusting the opening of the regulating valve.

[0040] The precursor temperature detection component includes a first temperature display 5 and a first thermocouple 8. Among them, the first temperature display 5 is located outside the bottle body 1, so that the staff can monitor the temperature of the precursor in the bottle body 1 in real time. One end of the first thermocouple 8 is connected to the first temperature display 5 in communication. The first thermocouple 8 extends through the bottle wall of the bottle body 1 to the bottom wall of the bottle body 1, that is, the other end of the first thermocouple 8 extends to the vicinity of the bottom wall of the bottle body 1. It can be understood that there is a certain gap between the other end of the first thermocouple 8 and the bottom wall of the bottle body 1. For example, the gap between the other end of the first thermocouple 8 and the bottom wall of the bottle body 1 can be greater than 0 and less than or equal to 5 mm. In this way, when there is less liquid precursor 12 in the bottle body 1, the first thermocouple 8 can still detect the temperature of the liquid precursor 12. Specifically, the first thermocouple 8 measures the temperature of the liquid precursor 12 in the bottle body 1, and converts the temperature signal into a thermoelectric potential signal and sends it to the first temperature display 5, and the first temperature display 5 converts the thermoelectric potential signal into temperature for display.

[0041] The precursor liquid level detection component includes a liquid level display 6 and a liquid level sensor 9. Among them, the liquid level display 6 is located outside the bottle body 1, so that the staff can monitor the liquid level information of the precursor in the bottle body 1 in real time. One end of the liquid level sensor 9 is connected to the liquid level display 6 for communication, and the liquid level sensor 9 extends through the bottle wall of the bottle body 1 to the bottom wall of the bottle body 1, that is, the other end of the liquid level sensor 9 extends to the vicinity of the bottom wall of the bottle body 1. It can be understood that there is a certain gap between the other end of the liquid level sensor 9 and the bottom wall of the bottle body 1. For example, the gap between the other end of the liquid level sensor 9 and the bottom wall of the bottle body 1 can be greater than 0 and less than or equal to 5 mm. In this way, when there is less liquid precursor 12 in the bottle body 1, the liquid level sensor 9 can still detect the liquid level of the liquid precursor 12 in the bottle body 1. Specifically, the liquid level sensor 9 can be an ultrasonic liquid level transmitter, a radar liquid level transmitter, etc. For example, the liquid level sensor 9 monitors the liquid level height of the liquid precursor 12 inside the bottle body 1 through different ultrasonic patterns.

[0042] One end of the vacuum gauge 7 extends into the interior of the bottle body 1, and the vacuum display of the vacuum gauge 7 is located outside the bottle body 1. In this way, the air pressure in the bottle body 1 can be monitored in real time through the vacuum gauge 7.

[0043] The hot bath mechanism includes a hot bath container 17, a heating medium 2, a heater and a medium temperature detection component. The hot bath container 17 is used to hold the heating medium 2, and the heating medium 2 can be oil, such as glycerol, vegetable oil (such as rapeseed oil, peanut oil), paraffin oil, silicone oil, etc. Of course, the heating medium 2 can also be sand. The heater is used to heat the heating medium 2, and the specific heater can be an electric heater, an oil heater or other types of heaters. The medium temperature detection component is used to detect the temperature in the heating medium 2 in real time, so as to adjust the working state of the heater according to the temperature information of the medium temperature detection component, so that the heating medium 2 is kept within a suitable temperature range. The bottle body 1 can be placed in the hot bath container 17, and the bottle body 1 is immersed in the heating medium 2 and surrounded by the heating medium 2, so that the heating medium 2 and the bottle body 1 are heat exchanged, so that the bottle body 1 and the precursor inside it are kept within a reasonable temperature range.

[0044] When the precursor source device provided in the embodiment of the present application is used, since it is provided with a precursor temperature detection component and a heat bath mechanism, the temperature of the precursor can be kept within a reasonable range, and the precursor discharged from the source outlet pipe 3 of the precursor source device can directly react when entering the atomic layer deposition chamber, thereby avoiding the precursor discharged from the source outlet pipe 3 of the precursor source device to be heated or cooled to a suitable range before reacting, saving more time and improving the atomic layer deposition rate. In addition, a mass flow meter 4 is provided on the source outlet pipe 3 of the precursor source device provided in the embodiment of the present application, and a mass flow meter 4 is also provided on the carrier gas inlet pipe 11, so that the discharge speed of the precursor and the carrier gas is controlled according to the data of the mass flow meter 4 on the source outlet pipe 3, and the intake speed of the carrier gas is controlled according to the data of the mass flow meter 4 on the carrier gas inlet pipe 11, so that the intake amount of the precursor is more stable, the deposition quality of the atomic layer is better, and the reduction of the atomic layer deposition rate caused by insufficient intake is avoided.

[0045] In addition, if Figure 1 As shown, the bottom wall of the bottle body 1 is an inverted conical wall, so when the volume of the liquid precursor 12 in the bottle body 1 is small, the liquid precursor 12 will stay near the bottom of the inverted conical wall, so that the liquid surface of the liquid precursor 12 is still a certain distance from the deepest part of the inverted conical wall, so that the precursor residue in the bottle body 1 is less, the utilization rate is higher, the waste of precursor raw materials is reduced, and the cost is reduced. The precursor source device provided by the present application is simple in structure and easy to operate during installation or disassembly, reducing the consumables cost and labor cost of enterprises in using ALD equipment.

[0046] In some embodiments, the bottle body 1 can be a stainless steel bottle, which has good corrosion resistance and high hardness. Of course, the bottle body 1 can also be made of aluminum alloy or other materials, which is not limited here.

[0047] like Figure 2 As shown, the angle α between the bottom wall of the bottle body 1 and the side wall of the bottle body 1 is greater than 90° and less than or equal to 150°. Considering that if the angle between the bottom wall of the bottle body 1 and the side wall of the bottle body 1 is too large, it is not conducive to processing; if the angle between the bottom wall of the bottle body 1 and the side wall of the bottle body 1 is too small, there will still be a lot of precursor residue in the bottle body 1. Therefore, in the technical solution, the angle α between the bottom wall of the bottle body 1 and the side wall of the bottle body 1 is set within a range of greater than 90° and less than or equal to 150°, so as to reduce the precursor residue and facilitate processing and manufacturing. Exemplarily, the angle α between the bottom wall of the bottle body 1 and the side wall of the bottle body 1 can be 90°, 100°, 110°, 120°, 130°, 140° or 150°.

[0048] In another embodiment, the source pipeline 3 is a stainless steel pipe, which has good corrosion resistance and high hardness. Of course, the source pipeline 3 can also be made of aluminum alloy or other materials, which is not limited here.

[0049] In order to prevent leakage of the precursor, the inlet end of the source pipeline 3 and the top wall of the bottle body 1 can be connected through a sealing joint 10, specifically, a VCR (Vacuum Coupling Radius) joint. The inlet end of the source pipeline 3 is arranged close to the top wall of the bottle body 1, which is more conducive to the airflow rising into the source pipeline 3, and is convenient for the discharge of the precursor. Alternatively, the inlet end of the source pipeline 3 and the top wall of the bottle body 1 can also be an integrated structure to facilitate processing and manufacturing.

[0050] In some embodiments, the carrier gas inlet pipe 11 is a stainless steel pipe, which has good corrosion resistance and high hardness. Of course, the carrier gas inlet pipe 11 can also be made of aluminum alloy or other materials, which is not limited here.

[0051] like Figure 1 As shown, the carrier gas inlet pipe 11 passes through the edge of the top wall of the bottle body 1 and the portion of the carrier gas inlet pipe 11 extending into the interior of the bottle body 1 gradually tilts toward the deepest part of the bottom wall of the bottle body 1. Specifically, the carrier gas inlet pipe 11 passes through the edge of the top wall of the bottle body 1 close to the side wall of the bottle body 1, and the portion of the carrier gas inlet pipe 11 extending into the interior of the bottle body 1 gradually tilts from the side wall of the bottle body 1 to the center line of the bottle body 1 from top to bottom, and finally the bottom end of the carrier gas inlet pipe 11 is close to the center line of the bottle body 1 and the inner surface of the bottom wall. In this way, after the carrier gas enters the bottle body 1, it can fully contact with the liquid precursor as the gas rises. At the same time, by adopting the above technical solution, the portion of the carrier gas inlet pipe 11 outside the bottle body 1 is close to the edge, and the portion of the carrier gas inlet pipe 11 inside the bottle body 1 is tilted, which is more convenient for setting the position of the carrier gas inlet pipe 11.

[0052] Furthermore, the ratio of the distance between the bottom end of the carrier gas inlet tube 11 and the center line of the bottle body 1 to the distance between the bottom end of the carrier gas inlet tube 11 and the plane where the side wall of the bottle body 1 is located is less than or equal to 50%. Among them, the distance between the bottom end of the carrier gas inlet tube 11 and the center line of the bottle body 1 is the minimum distance from the bottom end of the carrier gas inlet tube 11 to the center line of the bottle body 1. The distance between the bottom end of the carrier gas inlet tube 11 and the extended surface of the side wall of the bottle body 1 refers to the minimum distance from the bottom end of the carrier gas inlet tube 11 to the extended surface of the side wall of the bottle body 1 along its height direction. By adopting this technical solution, the bottom end of the carrier gas inlet tube 11 is closer to the center line of the bottle body 1, further ensuring that the carrier gas can fully contact with the liquid precursor. Exemplarily, the ratio of the distance between the bottom end of the carrier gas inlet pipe 11 and the center line of the bottle body 1 to the distance between the bottom end of the carrier gas inlet pipe 11 and the plane where the side wall of the bottle body 1 is located is 5%, 8%, 10%, 12%, 15%, 18%, 20%, 25%, 28%, 30%, 32%, 35%, 38%, 40%, 42%, 45%, 48% or 50%. Alternatively, the distance between the bottom end of the carrier gas inlet pipe 11 and the center line of the bottle body 1 is less than or equal to 5 cm. Exemplarily, the distance between the bottom end of the carrier gas inlet pipe 11 and the center line of the bottle body 1 is 0.5 cm, 1 cm, 1.5 cm, 2 cm, 2.5 cm, 3 cm, 3.5 cm, 4 cm, 4.5 cm or 5 cm.

[0053] Since the ambient temperature of the heat bath mechanism is relatively high, in order to prevent the temperature of the heat bath mechanism from affecting the performance and life of the precursor temperature detection component, the precursor liquid level detection component and the vacuum gauge 7. Among them, the first temperature display 5 is located above the top wall of the bottle body 1; and / or, the liquid level display 6 is located above the top wall of the bottle body 1; and / or, the vacuum gauge 7 is located above the top wall of the bottle body 1. In this way, it can not only prevent the temperature of the heat bath mechanism from affecting the performance of the above-mentioned components, but also facilitate observation and reading by the staff. Of course, the precursor temperature detection component, the precursor liquid level detection component and the vacuum gauge 7 can also be arranged on one side of the bottle body 1, which is not limited here.

[0054] Further, in order to prevent leakage of the precursor, the first thermocouple 8, the liquid level sensor 9 and the vacuum gauge 7 are connected to the top wall of the bottle body 1 through a sealing joint 10. Specifically, the first thermocouple 8, the liquid level sensor 9 and the vacuum gauge 7 can be connected to the top wall of the bottle body 1 through a VCR joint.

[0055] In addition, the first thermocouple 8, the liquid level sensor 9 and the vacuum gauge 7 can all be made of anti-corrosion materials. Specifically, the outer shells of the first thermocouple 8, the liquid level sensor 9 and the vacuum gauge 7 and the parts extending into the bottle body 1 can be made of stainless steel. Of course, other materials can also be used, which is not limited here.

[0056] like Figure 1As shown, the liquid level sensor 9 can extend to the deepest part of the bottom wall of the bottle body 1, that is, the liquid level sensor 9 can be arranged along the center line of the bottle body 1, so that the bottom end of the liquid level sensor 9 can extend to the deepest part of the inner surface of the bottom wall of the bottle body 1. Of course, there is a gap between the bottom end of the liquid level sensor 9 and the inner surface of the bottom wall of the bottle body 1. Such an arrangement can make the liquid level information of the precursor liquid level detection component more accurate, and even when the liquid precursor 12 in the bottle body 1 is small, the liquid level information of the liquid precursor in the bottle body 1 can be measured. Of course, the liquid level sensor 9 can also extend to the position around the deepest part, which is not limited here.

[0057] In addition, the first thermocouple 8 is arranged along a direction parallel to the center line of the bottle body 1, and the ratio of the minimum distance of the first thermocouple 8 from the center line of the bottle body 1 to the minimum distance of the first thermocouple 8 from the side wall of the bottle body 1 can be less than or equal to 50%. For example, the ratio of the minimum distance of the first thermocouple 8 from the center line of the bottle body 1 to the minimum distance of the first thermocouple 8 from the side wall of the bottle body 1 is 2%, 5%, 8%, 10%, 12%, 15%, 18%, 20%, 25%, 28%, 30%, 32%, 35%, 38%, 40%, 42%, 45%, 48% or 50%. Alternatively, the minimum distance of the first thermocouple 8 from the center line of the bottle body 1 is less than or equal to 5 cm, for example, the minimum distance of the first thermocouple 8 from the center line of the bottle body 1 is 0.5 cm, 1 cm, 1.5 cm, 2 cm, 2.5 cm, 3 cm, 3.5 cm, 4 cm, 4.5 cm or 5 cm.

[0058] In order to improve the efficiency of heating the precursor in the bottle body 1, the heater includes a resistance heating wire 15 surrounding the outer wall of the bottle body 1, and the resistance heating wire 15 can be arranged in a spiral along the outer wall of the bottle body 1. Alternatively, the heater can have a gap with the outer wall of the bottle body 1, so that the heater is surrounded by the heating medium 2 and heat is transferred through the heating medium 2.

[0059] In some embodiments, the medium temperature detection component includes a second temperature display 13 and a second thermocouple 14. The second temperature display 13 is located outside the hot bath container 17, so that the staff can monitor the temperature of the heating medium 2 in the hot bath container 17 in real time. One end of the second thermocouple 14 is connected to the second temperature display 13 in communication. The other end of the second thermocouple 14 extends into the hot bath container 17. Specifically, the second thermocouple 14 measures the temperature of the heating medium 2 in the hot bath container 17, and converts the temperature signal into a thermoelectromotive force signal and sends it to the second temperature display 13. The second temperature display 13 then converts the thermoelectromotive force signal into a temperature for display. With this arrangement, the temperature of the heating medium 2 can be monitored in real time.

[0060] In other embodiments, the outer surface of the bottom wall of the bottle body 1 is inverted cone shape. In addition, a base 16 for supporting the bottle body 1 is provided in the hot bath container 17, and the top wall of the base 16 is inverted cone shape. In this way, the top wall of the base 16 matches the outer surface of the bottom wall of the bottle body 1, so that the placement of the bottle body 1 is more stable. Of course, the outer surface of the bottom wall of the bottle body 1 can also be a plane, or the bottle body 1 is supported by a bracket, which is not limited here.

[0061] In addition, an embodiment of the present application further provides an atomic layer deposition device, which includes the precursor source device provided by any of the above embodiments. Compared with the prior art, the beneficial effects of the atomic layer deposition device provided by the embodiment of the present application are the same as the beneficial effects of the above precursor source device, which will not be repeated here.

[0062] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0063] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A precursor source device, characterized in that: include: A bottle body, wherein the bottom wall of the bottle body is an inverted conical wall, and along a direction from the side wall away from the bottle body to the center line, the bottom wall gradually inclines in a direction away from the top wall of the bottle body; an outlet pipeline, wherein the inlet end of the outlet pipeline is connected to the top wall of the bottle body, and a mass flow meter is arranged on the outlet pipeline; a carrier gas inlet pipe, one end of which is located outside the bottle body and the other end of which extends to the bottom wall of the bottle body, and a mass flow meter is provided on the carrier gas inlet pipe; A precursor temperature detection assembly, comprising a first temperature display located outside the bottle body and a first thermocouple in communication with the first temperature display, wherein the first thermocouple passes through the bottle wall of the bottle body and extends to the bottom wall of the bottle body; A precursor liquid level detection assembly, comprising a liquid level display located outside the bottle body and a liquid level sensor in communication with the liquid level display, wherein the liquid level sensor extends through the bottle wall of the bottle body to the bottom wall of the bottle body; A vacuum gauge, one end of which extends into the interior of the bottle body, and a vacuum indicator of the vacuum gauge is located outside the bottle body; A heat bath mechanism comprises a heat bath container, a heating medium, a heater and a medium temperature detection component.

2. The precursor source device according to claim 1, characterized in that: The bottle body is a stainless steel bottle; and / or the angle between the bottom wall of the bottle body and the side wall of the bottle body is greater than 90° and less than or equal to 150°.

3. The precursor source device according to claim 1, characterized in that: The source pipeline is a stainless steel pipe; or, the inlet end of the source pipeline is connected to the top wall of the bottle body through a sealing joint; or, the inlet end of the source pipeline and the top wall of the bottle body are an integrated structure.

4. The precursor source device according to claim 1, characterized in that: The carrier gas inlet pipe passes through the edge of the top wall of the bottle body and the portion of the carrier gas inlet pipe extending into the interior of the bottle body gradually inclines toward the deepest part of the bottom wall of the bottle body; and / or the carrier gas inlet pipe is a stainless steel pipe; and / or the ratio of the distance between the bottom end of the carrier gas inlet pipe and the center line of the bottle body and the distance between the bottom end of the carrier gas inlet pipe and the extension surface of the side wall of the bottle body is less than or equal to 50%.

5. The precursor source device according to claim 1, characterized in that: The first temperature display is located above the top wall of the bottle body; and / or the liquid level display is located above the top wall of the bottle body; and / or the vacuum gauge is located above the top wall of the bottle body.

6. The precursor source device according to claim 5, characterized in that: The first thermocouple, the liquid level sensor and the vacuum gauge are connected to the top wall of the bottle body through a sealing joint.

7. The precursor source device according to claim 1, characterized in that: The liquid level sensor extends to the deepest part of the bottom wall of the bottle body.

8. The precursor source device according to claim 1, characterized in that: The heater includes a resistance heating wire surrounding the outer wall of the bottle body; and / or the medium temperature detection component includes a second temperature display and a second thermocouple connected to the second temperature display, and the second thermocouple extends into the interior of the hot bath container.

9. The precursor source device according to claim 1, characterized in that: The outer surface of the bottom wall of the bottle body is in an inverted cone shape, and a base for supporting the bottle body is arranged in the hot bath container, and the top wall of the base is in an inverted cone shape.

10. An atomic layer deposition device, characterized in that: A precursor source device as described in any one of claims 1 to 9.

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