Air bag guiding type gravity compensation shock absorber structure applied to motion platform

Abstract

The invention discloses an air bag guiding type gravity compensation shock absorber structure applied to a motion table, and relates to the technical field of shock absorption equipment, the air bag guiding type gravity compensation shock absorber structure comprises a base table, four corners of the top of the base table are respectively and fixedly connected with a shock absorber, and the tops of the shock absorbers are fixedly connected with a load platform; the shock absorber comprises an air cylinder box body, the top of the air cylinder box body is fixedly connected with the load platform, a piston is connected into a flange end cover at the bottom of the air cylinder box body in a sliding mode, and an air pressure valve communicated with the air bag is embedded in the side wall of the air cylinder box body. And transverse torque can be resisted, the situation that transverse positioning is provided by excessively depending on a flange end cover is avoided, and the service life of the piston and the service life of the end cover are prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of vibration reduction equipment, in particular to an airbag-guided gravity-compensated vibration reduction device structure applied to a sports platform. Background Art

[0002] The vibration transmitted from the motion stage to the vertical micro-motion stage directly affects the vertical positioning accuracy and the imaging quality of the projection lens of the lithography machine. In the existing technology, rigid structural parts are mostly used for vertical support, and their ability to resist vibration and rigid impact is relatively weak. Summary of the invention

[0003] Therefore, in order to solve the above-mentioned shortcomings, the present invention provides an airbag-guided gravity-compensated shock absorber structure applied to a sports platform.

[0004] The present invention is implemented in this way: an airbag-guided gravity-compensating shock absorber structure applied to a sports platform is constructed, the device includes a base, and a shock absorber is fixedly connected to the four corners of the top of the base, and a load platform is fixedly connected to the top of the shock absorber; the shock absorber includes a cylinder box, the top of the cylinder box is fixedly connected to the load platform, a piston is slidably connected in the flange end cover at the bottom of the cylinder box, an air pressure valve connected to the airbag is embedded in the side wall of the cylinder box, and an airbag is arranged in the cylinder box; the bottom of the cylinder box is connected to the flange end cover by bolts.

[0005] Preferably, the cylinder outer box and the airbag are rectangular columnar structures.

[0006] Preferably, a cooling groove is provided in the piston, a heat-conducting frame is provided in the cooling groove, the heat-conducting frame is in contact with the coolant in the cooling groove, and a heat-conducting cavity is formed in the bottom of the heat-conducting frame.

[0007] Preferably, the heat conduction cavity is slidably connected to a piston plate, the top of the piston plate is fixedly connected to the sliding rod, the side wall of the sliding rod is slidably connected to the inner wall of the piston, the top of the sliding rod is fixedly connected to the air foot bottom plate, and the top of the air foot bottom plate contacts the side wall of the airbag.

[0008] Preferably, a sliding groove is embedded in the side wall of the piston, a reset spring is fixedly connected to the bottom of the sliding groove, the top of the reset spring is fixedly connected to the reset rod, and the top of the reset rod is fixedly connected to the gas foot bottom plate.

[0009] Preferably, the side wall of the heat conduction cavity is communicated with the first flow-conducting telescopic tube through a one-way valve, and the other end of the first flow-conducting telescopic tube away from the heat conduction cavity passes through the piston and the air foot bottom plate and is communicated with the inside of the airbag.

[0010] Preferably, the side wall of the heat conduction cavity is communicated with the second flow conduction telescopic tube through a one-way valve, and the other end of the second flow conduction telescopic tube away from the heat conduction cavity passes through the piston and the air foot bottom plate and is communicated with the inside of the airbag.

[0011] Preferably, the cooling tank is provided with a replacement pipe for replacing the cooling liquid in the cooling tank.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] (1) The advantage of using a shock absorber combination is that it can evenly distribute the gravity on the load platform, resist the lateral moment, avoid over-reliance on the flange end cover to provide lateral positioning, and increase the service life of the piston and end cover.

[0014] (2) In the horizontal direction, by squeezing the rubber airbag, the degree of contraction of the airbag changes, generating a certain centripetal restoring force; the flange end cover can constrain the freedom of the piston except for the movement and rotation in the vertical direction (Z direction), thus ensuring the stability of the overall structure of the shock absorber.

[0015] (3) When a heavy object compresses the load platform, the gas enters the airbag from the heat conduction cavity through the first flow guide telescopic tube; and when the air foot bottom plate moves upward, the gas in the airbag returns to the heat conduction cavity through the second flow guide telescopic tube. During this cycle, the gas exchanges heat with the heat conduction frame through heat transfer, automatically reducing the temperature of the gas in the airbag, effectively reducing the temperature in the airbag, preventing performance degradation or damage caused by excessive temperature, and also improving the overall working efficiency of the machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the present invention;

[0017] Figure 2 It is another structural schematic diagram of the present invention;

[0018] Figure 3 The present invention Figure 2 BB section diagram in;

[0019] Figure 4 is a bottom view of the shock absorber of the present invention;

[0020] Figure 5 It is a schematic diagram of the structure of the shock absorber of the present invention;

[0021] Figure 6 The present invention Figure 5 A in the figure is an enlarged structural diagram.

[0022] Among them: base-1, shock absorber-2, load platform-3, cylinder box-21, piston-22, air pressure valve-23, air bag-24, flange end cover-25, cooling groove-1a, air foot bottom plate-2a, sliding rod-3a, piston plate-4a, heat conduction cavity-5a, first flow guide telescopic tube-6a, second flow guide telescopic tube-7a, heat conduction frame-8a, sliding groove-9a, reset spring-10a, reset rod-11a, receiving rod-12a. DETAILED DESCRIPTION

[0023] The following will be combined with the attached Figure 1-Figure 6 The present invention is described in detail, and the technical solutions in the embodiments of the present invention are made clear. The complete description is obvious. The described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0026] See also Figures 1 to 6 The present invention provides an airbag guided gravity compensation shock absorber structure applied to a sports platform, comprising a base 1, wherein the four corners of the top of the base 1 are respectively fixedly connected with a shock absorber 2, and the top of the shock absorber 2 is fixedly connected with a load platform 3; the shock absorber 2 comprises a cylinder box 21, the top of the cylinder box 21 is fixedly connected with the load platform 3, a piston 22 is slidably connected in a flange end cover 25 at the bottom of the cylinder box 21, and a pressure valve 23 connected to an airbag 24 is embedded in the side wall of the cylinder box 21, and the cylinder box 21 is provided with a pressure valve 23 connected to the airbag 24. The bottom is connected to the flange end cover 25 by bolts, and an airbag 24 is arranged in the cylinder housing 21; the material of the airbag 24 is rubber, and its shape in the inflated state is a cuboid, which can fit with the cuboid cavity inside the cylinder housing 21, so that the force on each side of the airbag 24 can be more evenly applied, and the airbag 24 is inflated and deflated by the air pressure valve 23 to achieve the purpose of controlling the internal air pressure of the airbag 24; the internal gas of the airbag 24 is nitrogen, which makes the shock absorber 2 equipment safer and more stable during use.

[0027] Specifically, the cylinder outer box 21 and the airbag 24 are rectangular columnar structures, which ensures that the airbag 24 and the cylinder fit tightly and do not twist.

[0028] Specifically, a cooling groove 1a is provided in the piston 22, and a heat-conducting frame 8a is provided in the cooling groove 1a. The heat-conducting frame 8a contacts the coolant in the cooling groove 1a, and a heat-conducting cavity 5a is formed at the bottom of the heat-conducting frame 8a. The heat-conducting cavity 5a is slidably connected to the piston plate 4a. The top of the piston plate 4a is fixedly connected to the sliding rod 3a, and the side wall of the sliding rod 3a is slidably connected to the inner wall of the piston 22. The top of the sliding rod 3a is fixedly connected to the air-foot bottom plate 2a, and the top of the air-foot bottom plate 2a contacts the side wall of the airbag 24; the center of the circle of the air-foot bottom plate 2a is located at the bottom centroid of the airbag 24, so that when the piston 22 squeezes the airbag 24, the concave part of the airbag 24 is located at the centroid of the airbag 24, so that the force on the airbag 24 and the piston 22 is more uniform and stable, and when the gravity on the load platform 3 is removed, the airbag 24 has better resilience, and the gas in the air chamber of the shock absorber 2 is compressible, so that it has a certain rigidity in the vertical direction.

[0029] Specifically, a sliding groove 9a is embedded in the side wall of the piston 22, a return spring 10a is fixedly connected to the bottom of the sliding groove 9a, the top of the return spring 10a is fixedly connected to the return rod 11a, and the top of the return rod 11a is fixedly connected to the gas foot bottom plate 2a.

[0030] Specifically, the change in the vertical relative position of the piston 22 relative to the cylinder squeezes the air chamber to generate an elastic restoring force, and the airbag 24 has a longer service life under relatively uniform force conditions; and the force of the centroid of the airbag 24 reacting to the top of the piston 22 is in the axial direction of the piston 22, reducing the friction between the surface of the piston 22 and the flange end cover at the bottom of the cylinder box 21.

[0031] Specifically, the side wall of the heat conduction cavity 5a is connected to the first flow conduction telescopic tube 6a through a one-way valve, and the other end of the first flow conduction telescopic tube 6a away from the heat conduction cavity 5a passes through the piston 22 and is connected to the air foot bottom plate 2a and the air bag 24;

[0032] Specifically, the side wall of the heat conduction cavity 5a is connected to the second flow conduction telescopic tube 7a through a one-way valve, and the other end of the second flow conduction telescopic tube 7a away from the heat conduction cavity 5a passes through the piston 22 and is connected to the air foot bottom plate 2a and the air bag 24;

[0033] Specifically, the cooling tank 1a is provided with a replacement pipe for replacing the cooling liquid in the cooling tank 1a.

[0034] Specifically, when a heavy object compresses the load platform 3, the load platform 3 applies gravity to drive the air-foot bottom plate 2a to move downward, and the air-foot bottom plate 2a compresses the reset rod 11a and the reset spring 10a, so that the air-foot bottom plate 2a drives the piston plate 4a to move downward, so that the piston plate 4a compresses the gas in the heat conduction cavity 5a to enter the first flow guide telescopic tube 6a through the one-way valve, and then is transported to the airbag 24 through the first flow guide telescopic tube 6a. When the air-foot bottom plate 2a moves upward, the air-foot bottom plate 2a pushes the piston plate 4a to move upward, so that the piston plate 4a drives the gas in the airbag 24 to enter the heat conduction cavity 5a through the second flow guide telescopic tube 7a, and the gas exchanges heat with the heat conduction frame 8a through heat transfer, thereby automatically reducing the temperature of the gas in the airbag 24.

[0035] The above shows and describes the basic principle, main features and advantages of the present invention, and the standard parts used in the present invention can be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here.

[0036] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An airbag-guided gravity-compensated shock absorber structure applied to a sports platform, comprising a base, four corners of the top of the base are respectively fixedly connected with a shock absorber, and the top of the shock absorber is fixedly connected with a load platform; Features: The shock absorber includes a cylinder box body, the top of which is fixedly connected to the load platform, a piston is slidably connected in the flange end cover at the bottom of the cylinder box body, an air pressure valve connected to an airbag is embedded in the side wall of the cylinder box body, and an airbag is arranged in the cylinder box body; the bottom of the cylinder box body is connected to the flange end cover by bolts.

2. The airbag-guided gravity-compensated shock absorber structure for a sports platform according to claim 1, characterized in that: The cylinder outer box and the airbag are rectangular columnar structures.

3. The airbag-guided gravity-compensated shock absorber structure for a sports platform according to claim 2, characterized in that: A cooling groove is arranged in the piston, a heat conduction frame is arranged in the cooling groove, the heat conduction frame contacts the coolant in the cooling groove, and a heat conduction cavity is formed in the bottom of the heat conduction frame.

4. The airbag-guided gravity-compensated shock absorber structure for a sports platform according to claim 3, characterized in that: The heat conduction cavity is slidably connected with a piston plate, the top of the piston plate is fixedly connected to the sliding rod, the side wall of the sliding rod is slidably connected to the inner wall of the piston, the top of the sliding rod is fixedly connected to the air foot bottom plate, and the top of the air foot bottom plate contacts the side wall of the airbag.

5. The airbag-guided gravity-compensated shock absorber structure for a sports platform according to claim 4, characterized in that: A sliding groove is embedded in the side wall of the piston, a reset spring is fixedly connected to the bottom of the sliding groove, the top of the reset spring is fixedly connected to the reset rod, and the top of the reset rod is fixedly connected to the gas foot bottom plate.

6. The airbag-guided gravity-compensated shock absorber structure for a sports platform according to claim 5, characterized in that: The side wall of the heat conduction cavity is communicated with the first flow conduction telescopic tube through a one-way valve, and the other end of the first flow conduction telescopic tube away from the heat conduction cavity passes through the piston and the air foot bottom plate and is communicated with the inside of the airbag.

7. The airbag-guided gravity-compensated shock absorber structure for a sports platform according to claim 6, characterized in that: The side wall of the heat conduction cavity is communicated with the second flow conduction telescopic tube through a one-way valve, and the other end of the second flow conduction telescopic tube away from the heat conduction cavity passes through the piston and the air foot bottom plate and is communicated with the inside of the airbag.

8. The airbag-guided gravity-compensated shock absorber structure for a sports platform according to claim 7, characterized in that: The cooling tank is provided with a replacement pipe for replacing the cooling liquid in the cooling tank.

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