Graphic plate of mask plate, mask plate, manufacturing method and array substrate

Abstract

The invention discloses a pattern plate of a mask plate, the mask plate, a manufacturing method and an array substrate. The pattern plate of the mask plate in one embodiment comprises a central part with a mask pattern hole, the central part comprises a first edge part and a second edge part which are oppositely arranged and extend along a first direction, and a third edge part and a fourth edge part which are oppositely arranged and extend along a second direction, and the first direction is perpendicular to the second direction; the sacrifice parts are located on the sides, away from the mask pattern holes, of the third edge part and the fourth edge part respectively; the clamping parts are located on the sides, away from the mask pattern holes, of the first edge part and the second edge part respectively. According to the embodiment of the invention, the structure of the pattern plate of the mask plate is designed, so that poor edge wrinkles of the mask plate can be improved.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and more specifically, to a pattern plate of a mask plate, a mask plate, a manufacturing method and an array substrate. Background Art

[0002] In the related technology, in order to achieve a smaller evaporation shadow, higher requirements are placed on the manufacturing capability of the high-precision metal mask used in the evaporation of the luminescent material of the display product. The thickness of the high-precision metal mask needs to be further reduced from the traditional 30um to less than 5um. In this case, the traditional double-sided etching technology is limited by the influence of the etching slope angle of the liquid and cannot be effectively manufactured. The electroformed high-precision metal mask (EFM) has been successfully used as a common manufacturing process due to its advantages such as high manufacturing precision. However, due to the influence of the electroforming process required for molding, the material of the electroformed high-precision metal mask itself is prone to uneven internal stress. The mask made by the electroforming method is prone to edge wrinkles, resulting in edge shadows and poor color mixing in the final display product. Summary of the invention

[0003] An object of the present invention is to provide a pattern plate of a mask plate, a mask plate, a manufacturing method and an array substrate to solve at least one of the problems existing in the prior art.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A first aspect of the present invention provides a graphic plate of a mask plate, the graphic plate comprising:

[0006] A central portion having a mask pattern hole, the central portion comprising a first side portion and a second side portion extending in a first direction opposite to each other, and a third side portion and a fourth side portion extending in a second direction opposite to each other, the first direction being perpendicular to the second direction;

[0007] a sacrificial portion, respectively located at a side of the third side and the fourth side away from the mask pattern hole; and

[0008] The clamping parts are respectively located on the first side and the second side away from the mask pattern hole.

[0009] In an optional embodiment, the central portion further includes a fixing portion located on one side of the first side portion and the second side portion respectively.

[0010] The fixing portion extends along the first direction to an end of the central portion,

[0011] The boundary of the fixing portion located on the side of the fixing portion away from the central portion serves as a first graphic board boundary of the graphic board,

[0012] The boundary of the fixing portion located on a side of the fixing portion away from the central portion serves as a second graphic board boundary of the graphic board.

[0013] In an optional embodiment, the clamping portion includes a plurality of clamping blocks.

[0014] The clamping blocks are distributed at the first graphic board boundary at the position corresponding to the sacrificial part and the central part, and are distributed at the second graphic board boundary at the position corresponding to the sacrificial part and the central part.

[0015] In an optional embodiment, the boundary of the sacrificial portion away from the third side portion serves as a third graphic board boundary of the graphic board.

[0016] The boundary of the sacrificial portion away from the fourth side portion serves as a fourth graphic board boundary of the graphic board,

[0017] The boundary line between the sacrificial portion and the central portion is a cutting line, and the clamping block arranged at the position of the sacrificial portion is located on the side of the cutting line close to the sacrificial portion.

[0018] A second aspect of the present invention provides a mask plate, comprising:

[0019] A carrier plate having an opening; and the central portion of the graphic plate according to the first aspect of the present invention, wherein the graphic plate is arranged on the top surface of the carrier plate, the opening corresponds to the central portion, the opening is larger than the central portion and leaks out the mask pattern hole.

[0020] In an optional embodiment, the carrier board includes a first carrier board boundary corresponding to the first graphic board boundary and a second carrier board boundary corresponding to the second graphic board boundary.

[0021] The boundary of the fixing portion close to the central portion is located between the second side portion and the boundary of the second supporting plate, and is located between the first side portion and the boundary of the first supporting plate.

[0022] In an optional embodiment, the bearing plate further comprises a third bearing plate boundary corresponding to the third side portion and a fourth bearing plate boundary corresponding to the fourth side portion.

[0023] The graphic board further includes a fifth graphic board boundary, wherein the fifth graphic board boundary is a third side of the central portion after the sacrificial portion is cut along the cutting line.

[0024] The graphic board further includes a sixth graphic board boundary, and the fifth graphic board boundary is a fourth side of the central portion after the sacrificial portion is cut along the cutting line.

[0025] In an optional embodiment, the width of the first supporting plate boundary and the opening boundary at the corresponding position in the second direction is a first width, the width of the fixing portion in the second direction is a second width, and the ratio of the first width to the second width is 10:1 to 1:1.

[0026] In an optional embodiment, the width of the third carrying plate boundary and the opening boundary at the corresponding position in the first direction is a third width;

[0027] The width of the fifth graphic board boundary and the opening boundary at the corresponding position in the first direction is a fourth width,

[0028] The ratio of the third width to the fourth width is 1000:1 to 1:1.

[0029] In an optional embodiment, the mask plate includes one or more of an electroformed high-precision metal mask plate, a laser-formed metal mask plate, and a fine metal mask plate.

[0030] A third aspect of the present invention provides a method for manufacturing the mask plate according to the second aspect of the present invention, the method comprising:

[0031] Aligning the mask pattern holes of the graphic plate and the openings of the carrier, and fixing the graphic plate on the carrier;

[0032] Cutting the sacrificial portion using the boundary between the sacrificial portion and the central portion of the graphic plate as a cutting line;

[0033] The clamping block at the position corresponding to the central portion of the graphic board is cut.

[0034] A fourth aspect of the present invention provides an array substrate, which includes a patterned film layer formed by a mask plate manufactured by the method of the third aspect of the present invention.

[0035] The beneficial effects of the present invention are as follows:

[0036] The embodiment of the present invention designs the structure of the graphic plate of the mask plate, arranges a sacrificial portion outside the central portion corresponding to the mask pattern hole, uses the sacrificial portion to widen the width of the central portion, and cuts the widened sacrificial portion during the subsequent mask plate manufacturing process, thereby improving the edge wrinkles of the mask plate and further improving the product yield of the array substrate process using the mask plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0038] Figure 1 A schematic diagram showing the structure of a graphics board according to an embodiment of the present invention;

[0039] Figure 2 A schematic structural diagram showing a load-bearing plate according to an embodiment of the present invention;

[0040] Figure 3 A schematic structural diagram of a mask plate according to an embodiment of the present invention is shown;

[0041] Figure 4 A schematic cross-sectional view of a mask plate before cutting of a graphic plate according to an embodiment of the present invention is shown;

[0042] Figure 5 A schematic diagram showing a process flow of a method for manufacturing a mask plate according to an embodiment of the present invention;

[0043] Figure 6 to Figure 10 A schematic diagram of the process flow of manufacturing a mask plate according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0044] In order to explain the present invention more clearly, the present invention is further described below in conjunction with embodiments and drawings. Similar components in the drawings are represented by the same reference numerals. It should be understood by those skilled in the art that the content specifically described below is illustrative rather than restrictive, and the protection scope of the present invention should not be limited thereto.

[0045] The electroformed high-precision metal mask (EFM) material itself is very prone to uneven internal stress. During the stretching process of the mask made by the electroforming method, edge wrinkles perpendicular to the stretching direction are prone to occur, and the width of the edge wrinkles affects the edge shadow size and product edge color mixing of the final display product. In view of this, the embodiments of the present invention propose a graphic plate of a mask plate, a mask plate, a manufacturing method and an array substrate.

[0046] The first embodiment of the present invention provides a pattern plate 10 of a mask plate 1, such as Figure 1 to Figure 4 As shown, the graphic board 10 includes:

[0047] A central portion 100 having a mask pattern hole 10H, wherein the central portion 100 includes a first side portion 101 and a second side portion 102 that are oppositely disposed and extend along a first direction, and a third side portion 103 and a fourth side portion 104 that are oppositely disposed and extend along a second direction, wherein the first direction is perpendicular to the second direction;

[0048] The sacrificial portion 200 is respectively located at a side of the third side 103 and the fourth side 104 away from the mask pattern hole 10H; and

[0049] The clamping portion 300 is respectively located at a side of the first side portion 101 and a side of the second side portion 102 away from the mask pattern hole 10H.

[0050] The embodiment of the present invention designs the structure of the graphic plate 10 of the mask plate 1, and sets a sacrificial portion 200 outside the central portion 100 corresponding to the mask pattern hole 10H. The sacrificial portion 200 is used to widen the width of the central portion 100. In the subsequent manufacturing process of the mask plate 1, the widened sacrificial portion 200 is cut, thereby improving the edge wrinkles of the mask plate 1 and further improving the product yield of the array substrate process using the mask plate 1.

[0051] In the embodiment of the present invention, the first direction is the lateral extension direction, and the second direction is the longitudinal extension direction. Figure 1 The graphics tablet 10 shown is illustrative of an embodiment.

[0052] In an optional embodiment, if Figure 1 As shown, the clamping portion 300 includes a plurality of clamping blocks 301, and the clamping blocks 301 are used to provide a clamping area for the processing equipment in the web stretching process to transfer the graphic board 10 to the top of the carrier plate so as to perform a fixing process of the graphic board 10 and the carrier plate.

[0053] In this embodiment, the clamping block 301 is distributed at the first graphic board boundary 10BJ01 at the corresponding position of the sacrificial part 200 and the corresponding position of the central part 100, and the second graphic board boundary 10BJ02 is distributed at the corresponding position of the sacrificial part 200 and the corresponding position of the central part 100. Figure 1 As shown, the clamping blocks 301 are distributed on the upper and lower sides of the graphic board 10. In other words, the clamping blocks 301 and the fixing portion are located on the same side of the graphic board 10, ensuring that the graphic board 10 is fixed in a fully opened state in the clamping state, thereby ensuring the accuracy of the mask pattern.

[0054] In an optional embodiment, the multiple clamping blocks 301 located at the first graphic board boundary 10BJ01 are evenly distributed on the first graphic board boundary 10BJ01, and the multiple clamping blocks 301 located at the second side 102 are evenly distributed on the second graphic board boundary 10BJ02. The multiple clamping blocks 301 located at the second graphic board boundary 10BJ02 and the multiple clamping blocks 301 located at the second side 102 are symmetrically arranged one by one to ensure uniform distribution of clamping force and avoid deformation of the mask pattern hole 10H.

[0055] In an optional embodiment, if Figure 1 As shown, the central portion 100 further includes a fixing portion 400 located at one side of the first side portion 101 and the second side portion 102 , respectively, and the fixing portion 400 extends along the first direction to the end of the central portion 100 .

[0056] like Figure 1 As shown, the fixing part 400 of the embodiment of the present invention is located at the upper and lower sides of the central part 100.

[0057] The boundary of the fixing portion 400 located at the first side portion 101 (located at the lower position) away from the central portion 100 is used as the first graphic board boundary 10BJ01 of the graphic board 10.

[0058] The boundary of the fixing portion 400 located at the second side portion 101 (located at the upper position) away from the central portion 100 serves as the second graphic board boundary 10BJ02 of the graphic board 10 .

[0059] In an embodiment of the present invention, the fixing portion 400 is a process fixing area of ​​the carrier plate of the graphic plate 10 and another part of the mask plate 1, so that the graphic plate 10 and the carrier plate are fixed to form an integral component of the mask plate 1. Exemplarily, the area where the fixing portion 400 of the graphic plate 10 is located and the carrier plate are fixed by a welding process.

[0060] In an optional embodiment, if Figure 1 As shown, before the sacrificial portion 200 is cut, the boundary of the sacrificial portion 200 away from the third side 103 serves as the third graphic board boundary 10BJ03 of the graphic board 10, and the boundary of the sacrificial portion 200 away from the fourth side 104 serves as the fourth graphic board boundary 10BJ04 of the graphic board 10. Figure 1 As shown, before the sacrificial portion 200 is cut, the boundary of the sacrificial portion 200 is the boundary of the graphic board 10 .

[0061] In the embodiment of the present invention, the boundary line between the sacrificial part 200 and the central part 100 is the cutting line. After the graphic board 10 and the carrier board are fixed, the cutting device cuts the sacrificial part 200 along the cutting line. After cutting, the third side 103 of the central part 100 cut along the cutting line is the fifth graphic board boundary 10BJ05, and the fourth side 104 of the central part 100 cut along the cutting line is the sixth graphic board boundary 10BJ06. That is, the size of the graphic board 10 changes after cutting.

[0062] In this embodiment, the boundary of the clamping block 301 located at the sacrificial portion 200 is located on the side of the cutting line close to the sacrificial portion 200. Figure 1 As shown, three clamping blocks 301 are arranged on one side of the first side portion 101 of the central portion 100, the first clamping block 301 and the third clamping block 301 are located on the side of the sacrificial portion 200, the second clamping block 301 is located on the first side portion 101 of the central portion 100, and a complete clamping block 301 is arranged on the left side of the cutting line, so that the sacrificial portion 200 and the clamping block 301 at the position of the sacrificial portion 200 can be quickly cut during the cutting process.

[0063] A second embodiment of the present invention provides a mask plate 1, wherein the mask plate 1 comprises:

[0064] like Figure 2 The carrier plate 20 shown has an opening 20H;

[0065] like Figure 1 The central part 100 of the graphic board 10 of the above embodiment is shown, and the graphic board 10 is set on the top surface of the carrier board 20, the opening corresponds to the central part 100, and the opening area of ​​the opening 20H is larger than the positive projection of the central part 100 on the carrier board 20 to leak the mask pattern hole 10H.

[0066] The mask plate 1 of the embodiment of the present invention performs structural design on the graphic plate 10, and a sacrificial portion 200 is arranged outside the central portion 100 corresponding to the mask pattern hole 10H. After the width of the central portion 100 is widened by the sacrificial portion 200, the widened sacrificial portion 200 is cut during the manufacturing process of the mask plate 1, so that the edge wrinkle area of ​​the formed mask plate 1 is cut, thereby improving the edge wrinkle of the mask plate 1.

[0067] In an optional embodiment, if Figure 2 and Figure 3 As shown, the carrier board 20 includes a first carrier board boundary 20BJ01 corresponding to the first graphic board boundary 10BJ01 and a second carrier board boundary 20BJ02 corresponding to the second graphic board boundary 10BJ02.

[0068] After the graphic board 10 and the carrier board 20 are fixed, Figure 3 As shown in Figures 3a and 3b, the fixing portion 400 near the second side portion 102 is located between the second side portion 102 of the central portion 100 and the second supporting board boundary 20BJ02, and the fixing portion 400 near the first side portion 101 is located between the first side portion 101 of the central portion 100 and the first supporting board boundary 20BJ01, that is, the fixing portion 400 and the supporting board 20 have an overlapping portion to fix the two.

[0069] In an optional embodiment, if Figure 2 and Figure 3 As shown, the carrier plate 20 further includes a third carrier plate boundary 20BJ03 corresponding to the third side portion 103 and a fourth carrier plate boundary 20BJ04 corresponding to the fourth side portion 104 .

[0070] like Figure 1As shown, before cutting, the boundary of the sacrificial portion 200 near the third side 103 is located between the third carrier board boundary 20BJ03 and the third side 103, and the boundary of the sacrificial portion 200 near the fourth side 104 is located between the fourth carrier board boundary 20BJ04 and the fourth side 104. That is, the sacrificial portion 200 and the carrier board 20 of this embodiment have an overlapping portion.

[0071] like Figure 3 3a and 3b, after the sacrificial part 200 is cut, the graphic board 10 further includes a fifth graphic board boundary 10BJ05, which is the third side 103 of the central part 100 after the sacrificial part 200 is cut along the cutting line, and the graphic board 10 further includes a sixth graphic board boundary 10BJ06, which is the fourth side 104 of the central part 100 after the sacrificial part 200 is cut along the cutting line. That is, after cutting, a new graphic board boundary is formed, and the sacrificial part 200 that may have edge wrinkles is cut, thereby improving the edge wrinkle defect of the graphic board 10.

[0072] In an optional embodiment, the width of the opening 20H of the supporting plate 20 in the first direction is smaller than the width of the two relative cutting lines in the first direction, and the length of the opening 20H of the supporting plate 20 in the second direction is smaller than the distance between the boundaries of the two side fixing parts 400 close to the central part 100.

[0073] The relative cutting boundaries and the boundaries of the relative fixing portion 400 close to the central portion 100 form an annular area that is larger than the opening 20H of the carrier plate 20. The overall area of ​​the mask pattern hole 10H is smaller than the opening 20H of the carrier plate 20, thereby ensuring stable assembly without blocking the mask pattern hole 10H.

[0074] In an optional embodiment, if Figure 3 As shown in FIG3a , the width of the first supporting plate boundary 20BJ01 and the opening 20H boundary at the corresponding position in the second direction is a first width d1, the width of the fixing portion 400 in the second direction is a second width d2, and the ratio of the first width d1 to the second width d2 is 10:1 to 1:1.

[0075] In an optional embodiment, if Figure 3 As shown,

[0076] The width of the third carrying plate boundary 20BJ03 and the opening 20H boundary at the corresponding position in the first direction is a third width d3;

[0077] The width of the fifth graphic plate boundary 10BJ05 and the opening 20H boundary at the corresponding position in the first direction is a fourth width d4.

[0078] The ratio of the third width d3 to the fourth width d4 is 1000:1 to 1:1.

[0079] Based on the above-mentioned proportional design of the graphic plate 10 and the carrier plate 20 , both the processing accuracy of the mask pattern holes 10H and the assembly stability of the graphic plate 10 and the carrier plate 20 can be ensured.

[0080] In an optional embodiment, the graphic material of the carrier plate 20 is a low expansion alloy (Invar material) or a stainless steel material, and the material of the graphic plate 10 is a stainless steel material.

[0081] The mask plate 1 of the embodiment of the present invention is suitable for one or more of an electroformed high-precision metal mask plate (EFM), a laser-formed metal mask plate (LPM), and a fine metal mask plate (FMM).

[0082] Based on the structural embodiment of the mask plate 1 of the above embodiment, Figure 4 As shown, before the sacrificial portion 200 is cut, the overlapping width between the edge of the sacrificial portion 200 and the carrier plate 20 is relatively wide. Therefore, in the process of clamping the graphic board 10 for stretching using processing equipment, the edge wrinkles generated perpendicular to the stretching direction are distributed on the sacrificial portion 200. After the sacrificial layer is cut, the edge wrinkles are also cut, and the cutting boundary of the central portion 100 close to the cutting line serves as the new edge of the graphic board 10. Therefore, the edge wrinkle defects of the graphic board 10 will be improved.

[0083] Another embodiment of the present invention provides a method for manufacturing the mask plate 1 of the above embodiment, such as Figure 5 As shown, the method includes:

[0084] S10 , aligning the mask pattern holes 10H of the graphic plate 10 and the openings 20H of the carrier, and fixing the graphic plate 10 on the carrier 20 .

[0085] In the process of stretching the net, Figure 6 , Figure 7 and Figure 8 As shown, the processing equipment clamps the graphic board 10, clamps multiple clamping blocks 301, and moves the graphic board 10 to above the opening 20H of the carrier plate 20 for alignment. After the position accuracy debugging is completed, the carrier plate 20 and the graphic board 10 are welded and fixed in the area corresponding to the fixing part 400.

[0086] S20 , cutting the sacrificial portion 200 using the boundary between the sacrificial portion 200 and the central portion 100 of the graphic board 10 as a cutting line.

[0087] In this step, if Fig. 9 As shown, after the graphic board 10 is stretched, the sacrificial portion 200 is cut and separated along the cutting line using laser cutting equipment, and the length of the graphic board 10 in the first direction is shortened. While the sacrificial portion 200 is being cut, the edge wrinkles that may be generated by the stretching of the graphic board 10 during the stretching process are also cut. Therefore, the poor edge wrinkles of the mask plate can be improved.

[0088] S30, cutting the clamping block 301 at the position corresponding to the central portion 100 of the graphic plate 10, thereby forming the mask plate 1 of the embodiment of the present invention, as shown in FIG. Fig.10 middle Fig.10 A top view and Fig.10 As shown in the cross-sectional view in b, the wrinkle area at the edge of the graphic plate 10 of the finally formed mask plate 1 is cut, and the graphic plate 10 and the carrier plate 20 are firmly fixed.

[0089] After cutting, the third side 103 of the central part 100 of the sacrificial part 200 after being cut along the cutting line serves as the new boundary of the graphic board 10, i.e., the fifth graphic board boundary 10BJ05, and the fourth side 104 of the central part 100 of the sacrificial part 200 after being cut along the cutting line serves as the new boundary of the graphic board 10, i.e., the sixth graphic board boundary 10BJ06.

[0090] Based on the above-mentioned mask plate manufacturing process, the additional widened sacrificial portion 200 provides space for wrinkles that may occur during the net stretching process, preventing edge wrinkles from extending to the central portion 100. The widened sacrificial portion 200 is cut during the laser cutting process, thereby improving the poor edge wrinkles of the mask plate 1 and further improving the product yield of the array substrate process using the mask plate 1.

[0091] It is worth noting that the specific embodiment of the method for manufacturing the mask plate 1 of the embodiment of the present invention can refer to the mask plate 1 and the pattern plate 10 of the mask plate 1 of the aforementioned embodiment, which will not be described in detail here.

[0092] Another embodiment of the present invention provides an array substrate, wherein the array substrate includes a patterned film layer formed by a mask plate made by the manufacturing method of the above embodiment of the present invention. Exemplarily, the array substrate can be applied to a display device, and the display device can be any product or component with a display function, such as an electronic paper, a mobile phone, a tablet computer, a television, a monitor, a notebook computer, a digital photo frame, a navigator, etc., which is not limited in this embodiment.

[0093] In the description of the present invention, relational terms such as first and second, etc. are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0094] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the embodiments here. All obvious changes or modifications derived from the technical solution of the present invention are still within the protection scope of the present invention.

Claims

1. A pattern plate of a mask plate, characterized in that: The graphic board comprises: A central portion having a mask pattern hole, the central portion comprising a first side portion and a second side portion extending in a first direction opposite to each other, and a third side portion and a fourth side portion extending in a second direction opposite to each other, the first direction being perpendicular to the second direction; a sacrificial portion, respectively located at a side of the third side and the fourth side away from the mask pattern hole; and The clamping parts are respectively located on the first side and the second side away from the mask pattern hole.

2. The graphic board according to claim 1, characterized in that The central portion further includes a fixing portion located at one side of the first side portion and the second side portion respectively. The fixing portion extends along the first direction to an end of the central portion, The boundary of the fixing portion at the first side away from the central portion serves as a first graphic board boundary of the graphic board. The boundary of the fixing portion located at the second side away from the central portion serves as a second graphic board boundary of the graphic board.

3. The graphic board according to claim 1, characterized in that The clamping portion includes a plurality of clamping blocks, The clamping blocks are distributed at the first graphic board boundary at the position corresponding to the sacrificial part and the central part, and are distributed at the second graphic board boundary at the position corresponding to the sacrificial part and the central part.

4. The graphic board according to claim 3, characterized in that The boundary of the sacrificial portion located at the third side away from the third side serves as the third graphic board boundary of the graphic board. The boundary of the sacrificial portion located at the fourth side away from the fourth side serves as the fourth graphic board boundary of the graphic board, The boundary line between the sacrificial portion and the central portion is a cutting line, and the clamping block arranged at the position of the sacrificial portion is located on the side of the cutting line close to the sacrificial portion.

5. A mask plate, characterized in that: The mask plate comprises: a carrier plate having an opening; The central part of the graphic plate as claimed in any one of claims 1 to 4, wherein the graphic plate is arranged on the top surface of the carrier plate, the opening corresponds to the central part, the opening area of ​​the opening is larger than the positive projection area of ​​the central part on the carrier plate, and the mask pattern hole is leaked.

6. The mask plate according to claim 5, characterized in that: The carrier board includes a first carrier board boundary corresponding to the first graphic board boundary and a second carrier board boundary corresponding to the second graphic board boundary, The boundary of the fixing portion near the second side close to the central portion is located between the second side and the boundary of the second supporting plate, and the boundary of the fixing portion near the first side close to the central portion is located between the first side and the boundary of the first supporting plate.

7. The mask plate according to claim 6, characterized in that: The carrier plate further comprises a third carrier plate boundary corresponding to the third side portion and a fourth carrier plate boundary corresponding to the fourth side portion, The graphic board further includes a fifth graphic board boundary, wherein the fifth graphic board boundary is a third side of the central portion after the sacrificial portion is cut along the cutting line. The graphic board further includes a sixth graphic board boundary, and the fifth graphic board boundary is a fourth side of the central portion after the sacrificial portion is cut along the cutting line.

8. The mask plate according to claim 6, characterized in that: The width of the first bearing plate boundary and the opening boundary at the corresponding position in the second direction is a first width, The width of the fixing portion in the second direction is a second width, The ratio of the first width to the second width is 10:1 to 1:

1.

9. The mask plate according to claim 6, characterized in that: The width of the third carrying plate boundary and the opening boundary at the corresponding position in the first direction is a third width; The width of the fifth graphic board boundary and the opening boundary at the corresponding position in the first direction is a fourth width, The ratio of the third width to the fourth width is 1000:1 to 1:

1.

10. The mask plate according to claim 6, characterized in that: The mask plate includes one or more of an electroformed high-precision metal mask plate, a laser-formed metal mask plate, and a fine metal mask plate.

11. A method for manufacturing the mask plate according to any one of claims 5 to 10, characterized in that: The method comprises: Aligning the mask pattern holes of the graphic plate and the openings of the carrier, and fixing the graphic plate on the carrier; Cutting the sacrificial portion using the boundary between the sacrificial portion and the central portion of the graphic plate as a cutting line; The clamping block at the position corresponding to the central portion of the graphic board is cut.

12. An array substrate, characterized in that: The array substrate includes a patterned film layer formed by a mask plate manufactured by the method according to claim 11.

Images