Temperature adjusting device

Abstract

The invention relates to a temperature control device (6), comprising a first temperature control element (7), which has a helical profile at least in sections, and comprising at least one second temperature control element (8), which also has a helical profile at least in sections, the first and the second temperature control element (7, 8) are arranged at least partially nesting one another.

Description

Technical Field

[0001] The invention relates to a temperature control device comprising a first temperature control element which has a spiral course at least in sections.

[0002] The invention further relates to a temperature control device having a receiving portion for a material to be heated and a temperature control device for heating the material. Background Art

[0003] For heating materials, in particular also for melting materials, for example for producing single crystals, it is known to use electrical heating devices. DE 101 03 691 A1 is one of many examples.

[0004] Precisely the growth of large crystals requires very constant conditions in order to avoid as much as possible lattice defects or imperfections in the crystal lattice. Summary of the invention

[0005] The object of the present invention is to achieve a temperature control, in particular a heating, of a surface that is as uniform as possible.

[0006] The object of the invention is achieved in the temperature control device mentioned at the outset in that the temperature control device has at least one second temperature control element which also has a spiral course at least in sections, wherein the first and second temperature control elements are arranged at least partially nested in one another.

[0007] The object of the invention is also achieved by means of the temperature control device mentioned at the outset, wherein the temperature control device is designed according to the invention.

[0008] It is advantageous here that the differences caused by the temperature control elements themselves in the temperature control using the temperature control elements can be better compensated by the nested arrangement of multiple temperature control elements. Temperature control here refers to heating on the one hand, but also cooling on the other hand. The temperature control device can therefore be a heating device or a cooling device. Therefore, the term "temperature control" can be understood as "heating", "warming" or "cooling". The temperature control device can therefore input energy more evenly into the material to be heated or output energy more evenly from the material to be cooled. In addition, compared to a temperature control device with only one spirally constructed temperature control element, the length of each temperature control element can be shortened when the heating or cooling area is the same, thereby also being able to homogenize the energy input into the material to be heated or heated (the two terms are used synonymously in this description) or cooled.

[0009] According to an embodiment variant of the invention, it can be provided that the spiral course of the first and second temperature control elements is designed as a Fibonacci spiral. With this design, the nesting technology of the temperature control elements can be realized more easily. In addition, the temperature of the surface can be controlled more evenly compared to spirals of other shapes.

[0010] In order to further improve the above-mentioned effect, according to another embodiment of the present invention, it can be provided that the temperature control device has at least one third temperature control element and, if necessary, at least one further temperature control element, which are arranged at least partially nested with the first and second temperature control elements, wherein the spiral course of the third temperature control element and, if necessary, the at least one further temperature control element is preferably constructed as a Fibonacci spiral.

[0011] According to one embodiment variant of the present invention, if the first, second and third temperature control elements respectively have a first and a second connection area for electrical contact and the first connection areas are arranged offset by 120° from each other, the surface temperature control or the uniformity of energy input to the material to be heated or energy output from the material to be cooled can be further improved.

[0012] According to another embodiment variant of the invention, it can be provided that all temperature control elements have a common second connecting region, whereby the structural design of the temperature control device can be simplified.

[0013] According to another embodiment of the invention, it can be provided that the first and second connection areas form three-phase alternating current terminals. Thus, not only a higher power of the temperature control device can be achieved, but also the power flow can be improved, thereby also achieving more uniform heating of the material to be heated.

[0014] Preferably, according to another embodiment of the invention, the three-phase AC terminal is configured as a star connection, wherein the second connection areas of the first, second and third temperature control elements form the star point of the star connection. In particular, in combination with the configuration of the temperature control element as a Fibonacci spiral, the surface of the material to be heated can be better covered with the temperature control element. In addition, since fewer fixing points are required, the arrangement of the temperature control element in the temperature control device can also be realized more simply. This also applies if the temperature control elements are, for example, electrically operated cooling elements based on the thermoelectric effect. The star point can be used as a ground connection, so it can also be used as a fixing point to the housing.

[0015] If, according to an embodiment variant of the invention, the first and second temperature control elements are designed at least in sections as flat conductors, the energy input into the material to be heated can be further improved.

[0016] A corresponding improvement can be achieved if the third temperature control element and the optionally present further temperature control element or the optionally present further temperature control elements are designed at least in sections in the form of flat conductors.

[0017] In order to achieve further homogenization of the energy input into the material to be heated, according to another embodiment of the invention, the distance between the first and second temperature control elements is a maximum of 50 mm, and if necessary the distance between the first and third temperature control elements and / or the distance between the second and third temperature control elements is a maximum of 50 mm.

[0018] In order to further improve the homogenization of the energy input into the material to be heated, according to an embodiment variant of the temperature control device, it can be provided that, in particular in the embodiment as a heating device, the temperature control device is arranged between at least one reflector element and a receptacle for the material to be heated. By means of the reflector element, the intermediate regions between the temperature control elements can be better loaded with thermal energy. In addition, this can also achieve an improvement in the energy efficiency of the temperature control device.

[0019] In a preferred embodiment variant of the invention, the receptacle for the material to be heated is designed as a crucible for warming or heating the material, in particular for warming or heating the material for single crystal growth, since uniform heating of the material is advantageous in particular for these technical fields.

[0020] In order to further improve the energy input into the material to be heated or cooled, according to another embodiment variant of the temperature control device, provision can be made for the first, second and third temperature control elements or generally the temperature control elements of the temperature control device to be connected to a load distribution control device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] For a better understanding of the present invention, the present invention is explained in more detail with the aid of the following drawings. They are shown in a highly simplified schematic diagram:

[0022] Figure 1 A temperature control device having at least one temperature control device is shown;

[0023] Figure 2 A variant embodiment of the temperature control device is shown;

[0024] Figure 3 Another embodiment variant of the temperature control device is shown in a top view;

[0025] Figure 4 An embodiment variant of the temperature control device is shown;

[0026] Figure 5 An embodiment variant of the temperature control device is shown;

[0027] Figure 6 An embodiment variant of the temperature control device is shown;

[0028] Figure 7 An embodiment variant of the temperature control device is shown. DETAILED DESCRIPTION

[0029] First of all, it should be pointed out that in different embodiments, the same parts are provided with the same reference numerals or the same component names, wherein the disclosure contained in the entire description can be transferred to the parts with the same reference numerals or the same component names in a meaningful manner. Likewise, the positional descriptions selected in the description, such as top, bottom, side, etc., refer to the directly described and shown figures and are transferred to the new positions in a meaningful manner in the event of a change in position.

[0030] exist Figure 1 , a simplified side view of the temperature control device 1 is shown. The temperature control device 1 can be an oven or a heating device and / or a cooling device. Thus, the temperature control device 1 can be used to warm or heat a material or to cool a material or to keep a material at a defined temperature level. Preferably, the temperature control device 1 is used to heat or melt a solid material (solid), in particular for growing or manufacturing a single crystal, for example, from aluminum oxide (sapphire), Si, SiC, etc. Although the use of the temperature control device 1 for single crystal production is one of the preferred applications, it should be pointed out that the present invention is not limited to this field of application.

[0031] In the following, in order to explain the present invention more clearly, the temperature control device 1 is described as a heating device. However, this embodiment can also be transferred to the "cooling device" embodiment accordingly, unless otherwise explicitly stated, such as "when implemented as a heating device". Therefore, expressions such as "material to be heated" or "oven" should also be understood as "material to be cooled" or "material to be kept at a certain temperature", "cooler", etc.

[0032] according to Figure 1 The temperature control device 1 comprises a receptacle for the material to be heated, for example a shelf, on which the material to be heated is placed. According to an embodiment variant of the temperature control device 1, the receptacle can be in particular a crucible 2 or a holding container, into which the material is filled for temperature control and in which the material is melted if necessary.

[0033] The crucible 2 is preferably designed as a cylinder with a circular bottom 3. However, the crucible 2 can also have other cross-sectional shapes, such as rectangular, square or generally polygonal. Furthermore, the crucible 2 can also have a shape other than a cylinder, such as a truncated cone or generally have a cross section that expands in the direction of the opening 4 for filling the material.

[0034] If the temperature control device 1 is used to produce a single crystal, the single crystal is preferably not pulled out of the crucible 2. The finished single crystal can have, for example, a diameter between 5 cm and 50 cm and a height between 5 cm and 80 cm. However, it should be noted that these values ​​are only for illustration and should not be understood as limiting the scope of protection.

[0035] For the sake of completeness, it should be pointed out here that the temperature control device 1 also includes or may include other elements than those mentioned in this description, such as a control and / or regulating unit, etc. However, since these elements may correspond to the prior art, they are not discussed further in this description, but reference is made to the related prior art.

[0036] The temperature control device 1 preferably has a housing 5 for forming a receiving space (also referred to as an oven chamber) in which the receiving part and the material to be heated can be arranged at least during the heating.

[0037] The temperature control device 1 further comprises at least one temperature control device 6 which is arranged, in particular, in a receiving space of the temperature control device 1 .

[0038] The temperature control device 6 is arranged in particular below the receiving portion for the material, that is, for example, below the bottom surface 3 of the crucible 2. Alternatively, the temperature control device 6 can also be arranged in other areas of the temperature control device 1, for example, on the side or above the receiving portion for the material to be heated. In addition, there is the possibility of arranging a plurality of temperature control devices 6 in the temperature control device 1, for example, below and on the side and / or above the receiving portion for the material to be heated, which is for example Figure 1 The middle part is shown with dotted lines.

[0039] As from Figure 2 It can be seen more clearly in FIG. 1 , which shows an embodiment variant of the temperature control device 6 which is a detail of the present invention, that the temperature control device 6 has a first temperature control element 7 and a second temperature control element 8 . Figure 2 The (preferred) embodiment variant of the temperature control device 6 shown in FIG. 1 also has a third temperature control element 9. However, it should be noted that the temperature control device 6 can also have only a first temperature control element 7 and a second temperature control element 8, such as Figure 3 As can be seen from the figure, more than three temperature control elements 7, 8, 9 may be provided. Figure 6 and 7 Visible in.

[0040] The first and second temperature control elements 7, 8 and in particular the third temperature control element 9 if present or any further temperature control element if present are designed to be at least partially spiral. In particular, each temperature control element 7, 8, 9 of the temperature control device 6 is designed to be spiral. For the sake of clarity, it should be pointed out that the spiral structure is in one plane and is not to be confused with a coil, such as a heating coil. The temperature control elements 7, 8, 9 are not designed to be three-dimensional spirals, that is, they do not follow the course of a three-dimensional spiral.

[0041] “At least in sections, helical” means that the temperature control elements 7 , 8 , 9 have a starting section and an end section which can have a course that deviates from the helical shape. However, between the starting section and the end section, the temperature control elements 7 , 8 , 9 follow a helical course.

[0042] The temperature control elements 7, 8, 9 are arranged at least partially or at least partially nested in one another. Figure 3 In the embodiment variant of the temperature control device 6 shown in FIG, the first temperature control element 7 is arranged directly in sections between the second and third temperature control elements 8, 9, the second temperature control element 8 is arranged directly in sections between the first and third temperature control elements 7, 9, and the third temperature control element 9 is arranged directly in sections between the first and second temperature control elements 7. In general, due to the nesting, the temperature control elements of the temperature control device 6 are arranged at least in sections between other temperature control elements of the temperature control device 6 or at least one further temperature control element of the temperature control device 6.

[0043] exist Figure 2 Only the temperature control elements 7, 8, 9 of the temperature control device 6 are shown. However, the temperature control device 6 can also have other components or components, such as a regulating and / or control device, a housing, etc. In this regard, reference is made to the known prior art of heating devices.

[0044] The temperature control device 6 is preferably assigned to the bottom 3 or the opening 4 of the crucible 2. Figure 2 The embodiment of the temperature control device 6 shown in FIG. 8 is assigned to a crucible 2 having a circular bottom surface 3 or a circular opening 4 or is arranged at a distance therefrom.

[0045] exist Figure 1 In the embodiment variant of the temperature control device 1 shown in FIG. 1 , the temperature control device has a plurality of temperature control devices 6. Here, one or more or all of these temperature control devices 6 can be designed according to the invention. However, the temperature control device 6 according to the invention can also be combined with temperature control devices known from the prior art or can also be used alone as the only temperature control device 6 of the temperature control device 1.

[0046] A plurality of temperature control devices 6 can also be combined with one another in the temperature control device 1. In this case, the combined temperature control device 6 has a plurality of groups (at least two groups) of temperature control elements 7, 8 and optionally a temperature control element 9, which are nested in one another and arranged in a spiral shape. These temperature control elements can be arranged below (bottom surface 3) and / or above (opening 4) and / or on the side of the receiving portion for the material to be heated, in particular the melting crucible 2.

[0047] Furthermore, there is the possibility that the temperature control device 6 arranged below (bottom surface 3) and / or above (opening 4) and / or on the side of the receptacle for the material to be heated, in particular the crucible 2, also has at least two or more groups of mutually nested, spirally arranged temperature control elements 7, 8 and, if necessary, a temperature control element 9.

[0048] In the embodiment as a heating device, the temperature control elements 7 , 8 , 9 can be designed as resistance heating elements. Since resistance heating elements are known per se, reference is made to the relevant prior art in this regard.

[0049] However, the temperature control elements 7 , 8 , 9 can also be designed as tubes and have a heating or cooling fluid, for example water, flow through them.

[0050] The distance between the temperature control elements 7, 8, 9 and the material to be heated can be, for example, between 3 cm and 150 cm, in particular between 10 cm and 50 cm. However, according to an embodiment variant of the temperature control device 1, it is also possible that at least the temperature control elements 7, 8, 9 also lie, in particular directly, on the surface of the receptacle, in particular the crucible 2.

[0051] As described above, the first temperature control element 7, the second temperature control element 8 and the third temperature control element 9 have a spiral direction at least in sections. The spiral section can be configured in the form of an Archimedean spiral, a hyperbolic spiral or a logarithmic spiral. Other spiral directions or combinations of different spiral directions are also possible.

[0052] According to a preferred embodiment variant of the temperature control device 6, the spiral shape of the first and second temperature control elements 7, 8 is designed as a Fibonacci spiral and / or the spiral shape of the third temperature control element 9 is designed as a Fibonacci spiral. Figure 2 . This is based on the so-called Fibonacci numbers, i.e. a sequence in which each element consists of the sum of the first two numbers (0, 1, 1, 2, 3, 5, 8, 13, 21, ...). The Fibonacci spiral is formed in such a way that the radius of the directly consecutive sectors in the Fibonacci sequence is selected. The Fibonacci spiral can be approximately represented as interconnected quarter arcs, wherein the quarter arc with a radius of 1 or the smallest number in the Fibonacci sequence is arranged at the inner end of the Fibonacci spiral. Based on the starting point of the Fibonacci sequence, a semicircle with a radius of 1 can be constructed at the inner end. The temperature control element of the temperature control device 6 can be scaled according to the Fibonacci sequence. The advantage of constructing the temperature control element as a Fibonacci spiral is that the individual temperature control elements can be better nested with each other.

[0053] Figure 3It is intended to explain that within the scope of the present invention, the temperature control elements 7, 8 can also adopt other spiral shapes, for example, the temperature control elements 7, 8 have a rectangular, especially square spiral shape in sections. In general, the temperature control elements 7, 8 can have a polygonal spiral shape. This at least quadrilateral spiral shape is especially used for a receptacle for the material to be heated, especially a crucible 2, which has a corresponding polygonal base surface, especially a bottom surface 3. For example, a rectangular spiral shape is used for a crucible 2 with a rectangular bottom surface 3 or a square spiral shape is used for a crucible 2 with a square bottom surface 3. The shape of the temperature control device 6, that is, the temperature control elements 7, 8, 9 (seen in a top view) preferably depends on the shape of the receptacle for the material to be heated, especially on the shape of the bottom surface 3 of the crucible 2. In particular, the temperature control device 6, that is, the temperature control elements 7, 8, 9 (seen in a top view) preferably has the same shape as the shape of the receptacle for the material to be heated, especially the bottom surface 3 of the crucible 2, wherein, however, there may be differences in size.

[0054] Preferably, the temperature control device 6 has a surface extension which corresponds to at least 70%, in particular between 80% and 100%, of the surface extension of the receptacle for the material to be heated, in particular the bottom 3 of the crucible 2 .

[0055] The surface extension corresponds to the surface extension of the temperature control element 7, 8, 9 in the case of a first connecting element 10 which is present, if not necessary, for connecting the temperature control element 7, 8, 9 to a flow-conducting system or for electrically contacting the temperature control element 7, 8, 9. Each temperature control element 7, 8, 9, in particular in the embodiment variant with a resistance heating element, has a first connecting region 10 and a second connecting region 11 for electrical contacting. The first connecting region 10 is at the outer beginning of the temperature control element 7, 8, 9 and the second connecting region 11 is at the inner end of the temperature control element 7, 8, 9. The first connecting region is a region which is different from the spiral shape, i.e., for example, at the inner end of the temperature control element 7, 8, 9. Figure 2 A section on the outer circumference of temperature control device 6 or temperature control elements 7 , 8 , 9 that runs at an angle to the further extent of temperature control elements 7 , 8 , 9 .

[0056] The first and second connection regions 10 , 11 can also be designed for connecting a fluid, for example water.

[0057] If Figure 3 As can be seen in FIG. 1 , the first and / or second connection regions 10, 11 can be arranged side by side. However, according to a preferred embodiment of the temperature control device 6, the first connection regions 10 are arranged offset by 120° from each other, such as Figure 2Other arrangements of the first connecting regions 10 offset relative to one another in the circumferential direction of the temperature control device 6 or the temperature control elements 7 , 8 , 9 are also possible, for example in the range between 30° and 110°, although the embodiment variant with 120° is preferred.

[0058] In particular, in the embodiment variant with a resistance heating element, the first, second and third temperature control elements 7, 8, 9 preferably form first and second connection areas 10, 11 for electrical contact in the form of a three-phase AC terminal. The three-phase AC terminal can be configured in the form of a delta connection. However, in the preferred embodiment variant of the temperature control device 6, the three-phase AC terminal is configured as a star connection, wherein the second connection area 11 of the first, second and third temperature control elements 7, 8, 9 forms a star point 12 of the star connection, such as Figure 2 shown.

[0059] In the embodiment in which the temperature control elements 7, 8, 9 are fluid lines, the temperature control elements 7, 8, 9 can also have a common interface in the center of the temperature control device 6, into which the temperature control elements 7, 8, 9 or all temperature control elements of the temperature control device 6 are connected. Therefore, in a broad sense, this embodiment variant of the temperature control device 6 also has a "star point".

[0060] The first and / or second connecting region 10 , 11 can be provided with perforations, for example drilled holes, whereby the first and / or second connecting region 10 , 11 can also simultaneously serve as fastening points for the temperature control elements 7 , 8 , 9 , in particular for accommodating screws or other fastening means.

[0061] Temperature control element 7,8,9 can be implemented as round wire or flat wire or implemented as electric conductor with polygonal, such as rectangular or square cross section, or implemented as tube with round or polygonal, such as rectangular or square cross section. For example, temperature control element 7,8,9 can have width 13 between 0.1mm and 50mm and height 14 between 0.1mm and 50mm. In addition, temperature control element can have length between 10cm and 200cm between described two connection areas 10,11. Round wire can have diameter between 5mm and 1000mm, for example. Other shapes of temperature control element 7,8,9 can have cross-sectional area between 0.01mm2 and 2500mm2 or between 0.01mm2 and 0.1mm2. But these explanations should not be understood as limiting the scope of protection. Temperature control element 7,8,9 can also be larger or smaller. Temperature control element 7,8,9 can also have multiple sections with different cross-sectional shapes in its direction.

[0062] The temperature control elements 7, 8, 9 comprise or consist of a metallic material, preferably a metal alloy. For example, the temperature control elements 7, 8, 9 comprise or consist of manganese, constantan, platinum or the like. In particular for higher temperatures, semiconductors such as silicon carbide, molybdenum silicide or the like can also be used. The temperature control elements 7, 8, 9 can also consist of or have other materials, for example, graphite is used in the embodiment as a heating device.

[0063] According to further embodiments, it can be provided that the distance 15 between the first and second temperature control elements 7, 8 is a maximum of 50 mm, for example between 1 mm and 10 mm, and / or the distance 15 between the first and third temperature control elements 7, 9 and / or between the second and third temperature control elements 8, 9 is a maximum of 50 mm, for example between 1 mm and 10 mm. The distance 15 is measured between the sections of the temperature control elements 7, 8, 9 that extend directly next to each other.

[0064] exist Figure 4 1 shows a detail of an embodiment variant of a temperature control device 1. A receptacle for a material to be heated, in particular a crucible 2, and a temperature control device 6 are shown. The temperature control device 1 also has at least one reflector element 16. In this embodiment variant, the temperature control device 6 is arranged between the reflector element 16 and the receptacle for the material to be heated, in particular the crucible 2. The reflector element 16 can be made of a ceramic material or of graphite, for example.

[0065] According to another embodiment variant, it can be provided that the first, second and third temperature control elements 7, 8, 9 of the temperature control device 6 are connected to the load distribution control device 17. Thus, at least differences in the heating power of the temperature control elements 7, 8, 9 can be reduced or the heating power of the temperature control elements 7, 8, 9 can be equalized to each other.

[0066] For completeness, Figure 5 An embodiment variant of a temperature control device 6 is shown, which has only a first and a second temperature control element 7, 8, which are connected to the first and the second temperature control element 8. Figure 3 The difference shown here is in the form of a Fibonacci spiral. Preferably, the first connecting regions 10 are arranged rotated 180° relative to one another.

[0067] Furthermore, the temperature control elements 7, 8, 9 can be configured to be nested multiple times, in particular in an embodiment as a Fibonacci spiral. Figure 6 and 7 Six or sixteen nestings are shown, wherein temperature control elements 7 , 8 , 9 are arranged in a nested manner with six or thirteen further temperature control elements 18 corresponding to the above-described embodiments, and in particular may also have a common star point 12 .

[0068] In general, different temperature control levels or switching levels can also be achieved by means of multiple nested temperature control elements 7, 8, 9, 18, so that the temperature control elements 7, 8, 9, 18 can be temperature controlled to different degrees or the surface can be adapted to different sizes of receptacles for materials, i.e., for example, only the inner ring of the temperature control device 6 can be used for temperature control when necessary.

[0069] The exemplary embodiments show or describe possible embodiment variants of a temperature control device 1 or a temperature control apparatus 6 , wherein it should be noted that combinations of the various embodiment variants with one another are also possible.

[0070] Finally, it should be pointed out that, in order to provide a better understanding of the structure of the temperature control device 1 or the temperature control apparatus 6 , these are not necessarily shown to scale. Reference numerals list

[0071] 1 Temperature control equipment

[0072] 2 Crucible

[0073] 3 bottom

[0074] 4 Opening

[0075] 5 Shell

[0076] 6 Temperature control device

[0077] 7. Thermostatic element

[0078] 8. Thermostatic element

[0079] 9. Thermostatic element

[0080] 10Connection Area

[0081] 11Connection Area

[0082] 12 star contacts

[0083] 13Width

[0084] 14Height

[0085] 15Distance

[0086] 16 reflector elements

[0087] 17 Load distribution adjustment device

[0088] 18 Thermostatic element

Claims

1. A temperature control device (6), comprising a first temperature control element (7), the first temperature control element having a spiral shape at least in sections, characterized in that: The temperature control device (6) has at least one second temperature control element (8), which also has a spiral course at least in sections, wherein the first and second temperature control elements (7, 8) are arranged at least partially nested in one another.

2. The temperature control device (6) according to claim 1, characterized in that: The spiral course of the first and second temperature control elements (7, 8) is designed as a Fibonacci spiral.

3. The temperature control device (6) according to claim 1 or 2, characterized in that: The temperature control device comprises at least one third temperature control element (9) and, if necessary, at least one further temperature control element (18), which are arranged at least partially nested with the first and second temperature control elements (7, 8).

4. The temperature control device (6) according to claim 3, characterized in that: The spiral course of the third temperature control element (9) and, if appropriate, the further temperature control element (18) or the plurality of further temperature control elements (18) is designed as a Fibonacci spiral—if appropriate, nested multiple times.

5. The temperature control device (6) according to claim 3 or 4, characterized in that: The first, second and third temperature control elements (7, 8, 9) each have a first and a second connection region (10, 11) for electrical contact-making, wherein the first connection regions are arranged offset by 120° with respect to one another.

6. The temperature control device (6) according to any one of claims 3 to 5, characterized in that All temperature control elements (7, 8, 9, 18) have a common second connecting region (11).

7. The temperature control device (6) according to claim 5, characterized in that: The first and second connection regions (10, 11) form a three-phase alternating current terminal.

8. The temperature control device (6) according to claim 7, characterized in that: The three-phase alternating current connection is designed as a star connection, wherein the second connection regions (11) of the first, second and third temperature control elements (7, 8, 9) form a star point (12) of the star connection.

9. The temperature control device (6) according to any one of claims 1 to 8, characterized in that The first and second temperature control elements (7, 8) are designed at least in sections in the form of flat conductors.

10. The temperature control device (6) according to any one of claims 3 to 9, characterized in that: The third temperature control element (9) and the optionally present further temperature control element (18) or the optionally present further temperature control elements (18) are designed at least in sections in the form of flat conductors.

11. The temperature control device (6) according to any one of claims 1 to 10, characterized in that The distance (15) between the first and second temperature control elements (7, 8) is at most 50 mm.

12. The temperature control device (6) according to any one of claims 3 to 11, characterized in that The distance (15) between the first and third temperature control elements (7, 9) and / or between the second and third temperature control elements (8, 9) is at most 50 mm.

13. A temperature control device (1) comprising a receiving portion for a material to be heated and a temperature control device (6) for heating the material, characterized in that: The temperature control device (6) is designed according to any one of claims 1 to 12.

14. The temperature control device (1) according to claim 13, characterized in that The temperature control device (6) is arranged between at least one reflector element (16) and the receptacle for the material to be heated.

15. The temperature control device (1) according to claim 13 or 14, characterized in that The receiving portion for the material to be heated is configured as a crucible (2).

16. The temperature control device (1) according to claim 13 or 14, characterized in that The first, second and third temperature control elements (7, 8, 9) of the temperature control device (6) are connected to a load distribution control device (17).

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