Coating and cleaning module for laser processing equipment

Abstract

The invention relates to a laser processing equipment coating cleaning module which sequentially comprises a bottom plate, a chassis and a stainless steel shell from bottom to top, the chassis is installed on the bottom plate through a plurality of supporting columns, and an adsorption rotating carrying table is installed in the middle of the interior of the stainless steel shell; a hollow motor is installed at the bottom of the base plate below the adsorption rotating platform deck, a high-speed sliding ring is installed on the inner side of the hollow motor, and the driving end of the top of the hollow motor is connected with the adsorption rotating platform deck above the hollow motor through the high-speed sliding ring. Through the structural arrangement of the hollow motor and the high-speed slip ring, the overall integration degree is better, the device is smaller and lighter, the device can be just hidden in the middle shaft when matched with the hollow motor, and compared with an original rotating part, the height of the rotating part in the existing scheme is remarkably reduced, and stability is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field related to chip processing, and in particular to a coating and cleaning module of laser processing equipment. Background Art

[0002] With the development of the semiconductor industry, the integration of chips continues to increase, and the wafer manufacturing process is becoming more and more stringent. In the semiconductor cutting process, in order to ensure the cutting quality and subsequent product performance. The role of the coating and cleaning platform is becoming more and more important. Usually before cutting, the product will be sprayed with deionized water or other solutions to clean the surface of the product to remove dust particles, metal impurities and other pollution. Then a layer of protective liquid will be evenly coated on the surface of the wafer to prevent the debris generated during the cutting process from scratching the surface. At the same time, it also increases the strength of the wafer, reduces the risk of cracking, and further improves the quality and yield of the chip. The spin coating method is usually used to control the speed and time of rotation to achieve the required coating thickness.

[0003] After massive searches, it was found that the existing Chinese patent announcement number is CN217432156U, which discloses a coating and cleaning all-in-one machine, which includes a stainless steel shell, a chassis and a bottom plate from top to bottom. A spindle rotation mechanism is arranged in the middle position of the chassis along the Z-axis direction. The spindle rotation mechanism includes a spindle rotation motor, a stage transfer substrate and a high-speed adsorption rotating stage from bottom to top. The spindle rotation mechanism is respectively provided with a first swing arm and a second swing arm in the stainless steel shell on both sides of the Y-axis direction. Integrating coating and cleaning into one device reduces handling, and the speed of coating and cleaning can be adjusted to meet uniformity; the present invention can send the processed products to the outside of the device to wait for handling through the stage lifting cylinder, so that one device can take into account different functions and different products.

[0004] In summary, the problems existing in the prior art are:

[0005] 1. Since the entire rotating stage needs to be vacuum-adsorbed, a self-made hollow rotating air shaft is also used between the rotating stage and the motor. Although the hollow air shaft seals the rotating shaft with an oil seal to prevent vacuum leakage, the oil seal life is still not long enough in long-term high-speed rotation, and the stability is average. As a consumable, the oil seal is more troublesome to replace, and many parts need to be removed. Subsequent attempts to use standard magnetic fluid to replace the central axis have improved stability, but the magnetic fluid has requirements for the gas pressure passing through, and needs to be used with a pressure reducing valve, and the overall volume is large and the weight is heavy.

[0006] 2. In the existing coating cleaning process, two cylinders are used to drive the spring curtain to seal the cavity. Since the humidity in the cavity is very high, the life of the cylinder is short in a humid environment.

[0007] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a coating and cleaning module for laser processing equipment to make it more valuable for industrial use. Summary of the invention

[0008] In order to solve any of the above-mentioned technical problems, the purpose of the present invention is to provide a coating and cleaning module for laser processing equipment.

[0009] To achieve the above object, the present invention adopts the following technical solution:

[0010] The coating and cleaning module of the laser processing equipment includes a bottom plate, a chassis and a stainless steel shell from bottom to top, the chassis is installed on the bottom plate through a plurality of support columns, and an adsorption rotating stage is installed in the middle of the stainless steel shell;

[0011] A hollow motor is installed at the bottom of the chassis below the adsorption rotating platform, a high-speed slip ring is installed on the inner side of the hollow motor, and the driving end at the top of the hollow motor is connected to the adsorption rotating platform above through the high-speed slip ring;

[0012] A lifting cylinder is installed on one side of the bottom of the chassis, and the lifting cylinder drives the adsorption rotating platform above to move in the vertical direction after passing through the chassis;

[0013] A cleaning swing arm and a gluing swing arm are respectively arranged on the chassis on both sides of the adsorption rotating platform, and a swing arm motor drive module is installed on the chassis below the cleaning swing arm and the gluing swing arm;

[0014] An acrylic telescopic door is installed on the outer side of the top of the stainless steel shell, and telescopic cylinders are installed outside the stainless steel shell on the front and rear sides below the acrylic telescopic door. The telescopic cylinders drive the upper acrylic telescopic door to move in the left and right directions.

[0015] As a further improvement of the present invention, a plurality of sliding guide rods distributed along the vertical direction are installed at the bottom of the chassis through a sliding guide rod sleeve, the top of the sliding guide rod is installed at the bottom of the adsorption rotating platform, and a limited fixing ring is installed at the bottom of the sliding guide rod.

[0016] As a further improvement of the present invention, the swing arm motor drive module includes a swing arm motor and a swing arm coupling. The swing arm motor is installed at the bottom of the chassis through a swing arm bracket. The driving end at the top of the swing arm motor is connected to the cleaning swing arm or the gluing swing arm above through the swing arm coupling.

[0017] As a further improvement of the present invention, a ventilation and drainage pipe is installed on one side of the stainless steel shell.

[0018] As a further improvement of the present invention, linear bearing guide rods distributed along the left and right directions are installed on the stainless steel shells on the front and rear sides of the acrylic telescopic door, and the acrylic telescopic door moves in the left and right directions under the action of the linear bearing guide rods.

[0019] As a further improvement of the present invention, a bottom cover shell on one side of the bottom of the hollow motor is connected to the chassis through a drag chain, and an origin sensor is installed on the bottom cover shell.

[0020] As a further improvement of the present invention, a plurality of claws are evenly distributed along the circumferential direction on the top of the adsorption rotating platform.

[0021] As a further improvement of the present invention, a waterproof shield is installed on the chassis outside the adsorption rotating platform.

[0022] As a further improvement of the present invention, a vent pipe is installed at the bottom of the high-speed slip ring.

[0023] By means of the above scheme, the present invention has at least the following advantages:

[0024] The present invention has better overall integration, is more compact and lighter, and can be hidden in the central axis in combination with the hollow motor through the structural setting of the hollow motor and the high-speed slip ring. Compared with the original rotating part, the height of the rotating part of the existing solution is significantly reduced, thereby greatly improving stability.

[0025] The present invention optimizes the coated acrylic telescopic door and places the telescopic cylinder outside the outer cover, thereby greatly reducing the possibility of the cylinder being damp and reducing the cost.

[0026] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 is a top view of the present invention;

[0029] Figure 2 is a front view of the present invention;

[0030] Figure 3 It is a schematic diagram of a part of the hollow motor and the adsorption rotating platform of the present invention;

[0031] Figure 4 yes Figure 3 Schematic diagram after removing the hollow motor.

[0032] The meanings of the various reference numerals in the figures are as follows.

[0033] 1. Cleaning swing arm, 2. Adsorption rotating stage, 3. Glue-coated swing arm, 4. Acrylic telescopic door, 5. Stainless steel shell, 6. Support column, 7. Sliding guide rod, 8. Limit fixing ring, 9. Swing arm motor, 10. Lifting cylinder, 11. Swing arm coupling, 12. Chassis, 13. Ventilation and drainage pipe, 14. Telescopic cylinder, 15. Drag chain, 16. Claw, 17. Waterproof shield, 18. Hollow motor, 19. Ventilation pipe, 20. High-speed slip ring, 21. Origin sensor, 22. Bottom cover. DETAILED DESCRIPTION

[0034] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0035] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. The components of the embodiment of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiment of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0036] like Figure 1 to Figure 4As shown, a coating and cleaning module of laser processing equipment includes a bottom plate, a chassis 12 and a stainless steel shell 5 from bottom to top. The chassis 12 is installed on the bottom plate through a plurality of support columns 6. An adsorption rotating platform 2 is installed in the middle of the stainless steel shell 5, and a plurality of claws 16 are evenly distributed along the circumferential direction on the top of the adsorption rotating platform 2. A ventilation and drainage pipe 13 is installed on one side of the stainless steel shell 5. A waterproof shield 17 is installed on the chassis 12 outside the adsorption rotating platform 2. A hollow motor 18 is installed at the bottom of the chassis 12 below the adsorption rotating platform 2, and a high-speed slip ring 20 is installed on the inner side of the hollow motor 18. The driving end at the top of the hollow motor 18 is connected to the adsorption rotating platform 2 above through the high-speed slip ring 20. A vent pipe 19 is installed at the bottom of the high-speed slip ring 20. The high-speed slip ring 20 supports a maximum rotation speed of 10,000 rpm and can achieve a stable high-speed rotation of 3,000 rpm, greatly improving the coating effect and stability. In certain occasions, it can meet the high-speed rotation of 5,000 rpm, improving the ability to develop new processes.

[0037] A lifting cylinder 10 is installed on one side of the bottom of the chassis 12. The lifting cylinder 10 drives the adsorption rotating platform 2 above to move in the vertical direction after passing through the chassis 12. A plurality of sliding guide rods 8 distributed along the vertical direction are installed at the bottom of the chassis 12 through a sliding guide rod sleeve. The top of the sliding guide rod 8 is installed at the bottom of the adsorption rotating platform 2, and a limited position fixing ring 8 is installed at the bottom of the sliding guide rod 8.

[0038] A bottom cover 22 on one side of the bottom of the hollow motor 18 is connected to the chassis 12 via a drag chain 15 , and an origin sensor 21 is installed on the bottom cover 22 .

[0039] A cleaning swing arm 1 and a gluing swing arm 3 are respectively arranged on the chassis 12 on both sides of the adsorption rotating platform 2, and a swing arm motor drive module is installed on the chassis 12 below the cleaning swing arm 1 and the gluing swing arm 3. The swing arm motor drive module includes a swing arm motor 9 and a swing arm coupling 11. The swing arm motor 9 is installed at the bottom of the chassis 12 through a swing arm bracket, and the driving end at the top of the swing arm motor 9 is connected to the cleaning swing arm 1 or the gluing swing arm 3 above through the swing arm coupling 11.

[0040] An acrylic telescopic door 4 is installed on the outer side of the top of the stainless steel shell 5, and a telescopic cylinder 14 is installed outside the stainless steel shell 5 on the front and rear sides below the acrylic telescopic door 4. The telescopic cylinder 14 drives the upper acrylic telescopic door 4 to move in the left and right directions.

[0041] Linear bearing guide rods distributed along the left and right directions are installed on the stainless steel shells 5 on the front and rear sides of the acrylic telescopic door 4. The acrylic telescopic door 4 moves in the left and right directions under the action of the linear bearing guide rods.

[0042] The positional relationship and connection relationship between the components of the present invention are as follows:

[0043] The cleaning swing arm 1, the gluing swing arm 3 and the lifting cylinder 10 are installed on the chassis 12, the chassis 12 is fixed on three support columns 6, the high-speed adsorption rotating platform 2 is connected to the lifting cylinder 10 and three sliding guide rods 7, and the sliding guide rods are installed with a limited fixed ring 8, and the stainless steel shell 5 is fixed to the chassis 13, and then the acrylic telescopic door 4 and the ventilation and drainage pipe 13 are connected to the stainless steel shell 5. The top of the hollow motor 18 is connected to the adsorption rotating platform 2 and the rotating part of the high-speed slip ring 20 through a flange. The bottom of the high-speed slip ring 20 is connected to the ventilation pipe 19.

[0044] Working principle and working process of the present invention:

[0045] First, under the action of the lifting cylinder 10 and the sliding guide rod 7, the adsorption rotating platform 2 is lifted to receive the product. At this time, the vacuum negative pressure is transmitted to the high-speed slip ring 20 through the ventilation pipe 19 and finally transmitted to the adsorption rotating platform 2. When there is a product, the adsorption rotating platform 2 forms a sealed cavity. After reaching the specified negative pressure value, the lifting cylinder 10 controls the entire adsorption rotating platform 2 to descend. After it descends to the right position, the acrylic telescopic door 4 is closed by the cylinder control. During the coating process, the hollow motor 18 rotates at a high speed, thereby driving the adsorption rotating platform 2 to rotate together, and the top of the high-speed slip ring 20 also rotates together. Then the coating swing arm motor 9 rotates to drive the glue coating swing arm 3, and the spraying of the protective liquid is completed under the corresponding process parameters. After the coating is completed, the next step of processing can be entered. After the processing is completed, the equipment is entered for cleaning under the corresponding parameters. During the cleaning process, the external exhaust air discharges the water mist through the ventilation and drainage pipe 13 to avoid water mist splashing and causing damage to other equipment.

[0046] The present invention has better overall integration, is more compact and lightweight, and can be hidden in the central axis in combination with the hollow motor and the high-speed slip ring. Compared with the original rotating part, the height of the rotating part of the existing solution is significantly reduced, greatly improving stability. By optimizing the coated acrylic telescopic door and placing the telescopic cylinder outside the outer cover, the possibility of the cylinder being damp is greatly reduced while reducing costs.

[0047] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0048] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A coating and cleaning module for laser processing equipment, comprising, from bottom to top, a bottom plate, a chassis (12) and a stainless steel housing (5), wherein the chassis (12) is mounted on the bottom plate via a plurality of support columns (6), and an adsorption rotating platform (2) is mounted in the middle of the stainless steel housing (5); characterized in that: A hollow motor (18) is installed at the bottom of the chassis (12) below the adsorption rotating platform (2), a high-speed slip ring (20) is installed on the inner side of the hollow motor (18), and the driving end at the top of the hollow motor (18) is connected to the adsorption rotating platform (2) above via the high-speed slip ring (20); A lifting cylinder (10) is installed on one side of the bottom of the chassis (12), and the lifting cylinder (10) passes through the chassis (12) and drives the adsorption rotating platform (2) above to move in the vertical direction; A cleaning swing arm (1) and a gluing swing arm (3) are respectively arranged on the chassis (12) on both sides of the adsorption rotating platform (2), and a swing arm motor drive module is installed on the chassis (12) below the cleaning swing arm (1) and the gluing swing arm (3); An acrylic telescopic door (4) is installed on the outer side of the top of the stainless steel shell (5), and a telescopic cylinder (14) is installed outside the stainless steel shell (5) on the front and rear sides below the acrylic telescopic door (4). The telescopic cylinder (14) drives the acrylic telescopic door (4) above to move in the left and right directions.

2. The coating and cleaning module of the laser processing equipment according to claim 1, characterized in that: A plurality of sliding guide rods (8) distributed along the vertical direction are installed at the bottom of the chassis (12) through sliding guide rod sleeves, the top of the sliding guide rod (8) is installed at the bottom of the adsorption rotating platform (2), and a limited position fixing ring (8) is installed at the bottom of the sliding guide rod (8).

3. The coating and cleaning module of the laser processing equipment according to claim 1, characterized in that: The swing arm motor driving module comprises a swing arm motor (9) and a swing arm coupling (11); the swing arm motor (9) is mounted on the bottom of a chassis (12) via a swing arm bracket; the driving end at the top of the swing arm motor (9) is connected to the cleaning swing arm (1) or the gluing swing arm (3) above via the swing arm coupling (11).

4. The coating and cleaning module of the laser processing equipment according to claim 1, characterized in that: A ventilation and drainage pipe (13) is installed on one side of the stainless steel housing (5).

5. The coating and cleaning module of laser processing equipment according to claim 1, characterized in that: Linear bearing guide rods distributed along the left and right directions are installed on the stainless steel shells (5) at the front and rear sides of the acrylic telescopic door (4), and the acrylic telescopic door (4) moves in the left and right directions under the action of the linear bearing guide rods.

6. The coating and cleaning module of laser processing equipment according to claim 1, characterized in that: A bottom cover (22) on one side of the bottom of the hollow motor (18) is connected to the chassis (12) via a drag chain (15), and an origin sensor (21) is installed on the bottom cover (22).

7. The coating and cleaning module of laser processing equipment according to claim 1, characterized in that: A plurality of claws (16) are evenly distributed along the circumferential direction on the top of the adsorption rotating platform (2).

8. The coating and cleaning module of laser processing equipment according to claim 1, characterized in that: A waterproof protective cover (17) is installed on the chassis (12) outside the adsorption rotating platform (2).

9. The coating and cleaning module of laser processing equipment according to claim 1, characterized in that: A vent pipe (19) is installed at the bottom of the high-speed slip ring (20).

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