Grinding ultrasonic cleaning device based on grinding sheet
By designing an automated grinding ultrasonic cleaning device, the problems of low grinding and cleaning efficiency, many manual interventions and incomplete cleaning in the prior art are solved, and high-precision and high-efficiency production are achieved, which significantly improves the overall efficiency and product quality of grinding and cleaning.
Patent Information
- Application Number
- CN202411775271.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-05
- Publication Date
- 2025-03-11
AI Technical Summary
The existing grinding and cleaning technologies have problems such as low efficiency, excessive manual intervention, and incomplete cleaning, which is difficult to meet the production needs of modern manufacturing for high precision and high efficiency.
A grinding ultrasonic cleaning device based on grinding sheets is designed, including bearing components, centering components, dropping components, grinding components, cleaning components, transport robots and rotating components. Through automated operation, precise positioning, uniform dripping, rotating grinding and ultrasonic cleaning, automatic integration of grinding and cleaning is achieved.
It improves the efficiency and consistency of grinding and cleaning, reduces manual intervention, ensures the stability of grinding sheets and the thoroughness of cleaning, and significantly improves production efficiency and product quality.
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Figure CN119589554A_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of grinding sheet processing equipment, and in particular relates to a grinding ultrasonic cleaning device based on a grinding sheet. Background Art
[0002] In modern manufacturing, grinding and cleaning processes are key production links and are widely used in the processing of electronic components, optical devices, metal parts, etc. However, traditional grinding and cleaning methods often have problems such as low efficiency, frequent manual intervention, and incomplete cleaning, which makes it difficult to meet the production needs of high precision and high efficiency.
[0003] Traditional grinding methods usually rely on manual operation, which is limited by the skill level of the operator, resulting in inconsistent grinding effects and affecting product quality. In addition, the waste and dust generated during the grinding process pollute the environment and increase the cost of cleaning and maintenance. Moreover, current cleaning technologies mostly use chemical cleaning agents or simple water washing, which cannot effectively remove dirt in complex shapes and tiny gaps. Although ultrasonic cleaning can improve the cleaning effect, in practical applications, the cleaning efficiency and cleaning uniformity still need to be further improved. Many traditional grinding and cleaning equipment still rely on manual operation, resulting in low production efficiency, and human errors are prone to occur during long-term operation, increasing the risk of unqualified products. The current grinding and cleaning processes are often carried out separately, lacking effective process integration, resulting in extended production cycles and serious waste of resources. Therefore, there is an urgent need for an automated equipment that can effectively integrate the grinding and cleaning processes to improve overall production efficiency.
[0004] In summary, the existing grinding and cleaning technologies have many shortcomings in terms of efficiency, precision and degree of automation, and innovative technical solutions are urgently needed to meet the needs of modern manufacturing for efficient and high-quality production. Summary of the invention
[0005] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a grinding ultrasonic cleaning device based on a grinding sheet, which solves the above-mentioned technical problems existing in the prior art.
[0006] The purpose of the present invention can be achieved through the following technical solutions:
[0007] A grinding ultrasonic cleaning device based on a grinding sheet includes a bearing component, a centering component, a dripping component, a grinding component, a cleaning component, a transfer manipulator, and a rotating component.
[0008] The transfer robot takes the grinding sheets from the carrying component piece by piece, and then transfers them to the centering component for centering operation;
[0009] Then, the grinding sheet after centering is transferred to the dripping assembly for dripping operation, and then transferred to the grinding assembly again by the transfer robot.
[0010] The grinding assembly and the cleaning assembly are arranged opposite to each other, and a rotating assembly is arranged between them, the rotating assembly includes a rotating seat and conveying and pressing members located on both sides of the rotating seat, the conveying and pressing members press the grinding sheet carried above the grinding assembly, and grind the upper surface of the grinding sheet by rotating the bottom of the conveying and pressing members;
[0011] After the grinding is completed, the transport and pressing parts are lifted vertically and rotated into the cleaning assembly, and another group of transport and pressing parts that have been cleaned are synchronously rotated to the top of the grinding assembly, and the heads of the transport and pressing parts are cleaned by the cleaning assembly.
[0012] Furthermore, the carrier assembly is stacked with grinding sheets in layers, and a gap is reserved between two adjacent groups of grinding sheets for the transfer robot to pick up the sheets one by one.
[0013] Furthermore, the transfer robot includes a multi-axis robot arm in the middle and a carrier plate and a clamp head at the front end; a carrying surface is formed on the carrier plate, and the grinding sheets stacked on the carrying component are taken through the carrying surface, and then placed at the position of the centering component for centering operation. The clamp head is used to clamp the edge position of the grinding sheet after centering and rotate it out.
[0014] Furthermore, the centering assembly includes an upper positioning support plate and a clamping jaw positioning block, so that multiple groups of clamping jaw positioning blocks form a circular structure, and a positioning support plate is formed in the center surrounded by the circular structure, and a driving member for driving in the up and down directions is extended outward from the bottom where the support plate is located, and the relative height of the support plate is adjusted by the driving member;
[0015] The upper surface of the support plate is connected through a negative pressure pipe, so that the grinding sheet is adsorbed and carried on the support plate, and the outer edge of the grinding sheet is clamped and fixed by a clamping jaw positioning block;
[0016] The bottom of the clamping jaw positioning block and the supporting plate are movably arranged.
[0017] Furthermore, the drip assembly includes multiple groups of drip nozzles, a transfer platform, and an XY-axis moving part. The transfer platform is used to carry the grinding sheet, and a rotating motor is arranged at the bottom of the transfer platform. The carried grinding sheet is transferred to the multiple groups of drip nozzles in turn through the XY-axis moving part at the bottom to perform dripping operations.
[0018] Furthermore, the grinding assembly includes a grinder body and a first motion assembly, wherein the first motion assembly enables the grinder body to reciprocate between the drip assembly and the end of the rotating assembly, and a grinding platform is provided on the upper surface where the grinder body is located, and an annular protrusion is formed on the outer edge where the grinding platform is located, and the middle part is used to accommodate the grinding sheet, and a plurality of groups of grooves are provided at the edge of the annular protrusion where the grinding platform is located, and the grooves are matched with the clamp head on the transfer robot.
[0019] Furthermore, the transport pressing member includes a rotating shaft, a pressing head, and a limiting plate. The rotating shaft drives the pressing head arranged at the bottom to rotate, and the limiting plate forms protection for the periphery of the pressing head.
[0020] A vertical limiting column is arranged in the vertical direction on the outside of the grinding platform where the grinding assembly is located, so that when the limiting plate descends, it is limited in the height direction by the limiting column, and at the same time, the pressure head located in the middle of the limiting plate continues to descend until the grinding sheet on the grinding platform is pressed tightly.
[0021] Furthermore, a visual detection component is arranged on the side where the dripping component is located, and the visual detection component is used to visually locate the grinding sheet clamped by the transfer robot and transported to the station where the grinding platform is located.
[0022] Furthermore, the cleaning component includes an ultrasonic cleaning tank, a rotating water tank, and a second motion component; the ultrasonic cleaning tank and the rotating water tank are sequentially transferred to the bottom of the transport and pressing member of the rotating component by the second motion component, and the ultrasonic cleaning tank ultrasonically cleans the head immersed in the transport and pressing member by an ultrasonic frequency of 40-60w and a time of 20-30s;
[0023] A rotating head is arranged in the rotating water tank, and the rotating head is used to rotate the water flow contained in the rotating water tank.
[0024] Furthermore, the rotating head is located in the middle of the rotating water tank and is arranged vertically, and a rotating part is arranged at the bottom of the rotating head to realize the self-rotation of the rotating head; a plurality of air vents are arranged along the vertical direction and / or the circumferential direction of the top of the side edge where the rotating head is located, so that when the rotating water tank contains water, the air vents are ventilated through the circulating pump to realize the circulation of water in the rotating water tank; after the water is ventilated, the rotating water tank is drained, and the rotating head is ventilated simultaneously to realize the air drying of the transport and pressing parts.
[0025] Beneficial effects of the present invention:
[0026] 1. This device realizes automatic operation from material taking, to liquid dripping, and finally grinding and cleaning, which reduces manual intervention, improves production efficiency and consistency, and improves grinding efficiency.
[0027] 2. The centering assembly used in this device realizes the precise positioning of the grinding sheet through the clamping jaw positioning block and the positioning support plate, ensuring the stability of the grinding sheet in subsequent processes.
[0028] 3. The dripping assembly used in this device realizes uniform dripping on the grinding sheet through multiple sets of drip nozzles and transfer platforms, ensuring the uniformity and coverage of each dripping, and ensuring uniform stability during grinding.
[0029] 4. The grinding component and cleaning component used in this device are arranged opposite to each other, and a handling and pressing member is used to press and grind the grinding sheet. After grinding, it can be quickly transferred to the cleaning component for cleaning, which can be recycled in multiple grinding processes, thereby improving the grinding efficiency.
[0030] 5. The cleaning component used in this device uses an ultrasonic washing tank for cleaning, combined with the rotating water flow of the rotating water tank, and after cleaning, it can also be quickly air-dried, which significantly improves the cleaning efficiency and ensures that the pressure head is thoroughly cleaned. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.
[0032] Figure 1 is a schematic diagram of the overall structure of an embodiment of the present invention;
[0033] Figure 2 is a schematic diagram of a top view of the structure of an embodiment of the present invention;
[0034] Figure 3 It is a schematic structural diagram of the connection state between the carrier plate and the clamp head of the transfer robot according to an embodiment of the present invention;
[0035] Figure 4 is a schematic structural diagram of a centering component according to an embodiment of the present invention;
[0036] Figure 5 is a schematic structural diagram of a liquid dripping assembly according to an embodiment of the present invention;
[0037] Figure 6 is a schematic diagram of the structure of a drip nozzle according to an embodiment of the present invention;
[0038] Figure 7 is a schematic structural diagram of a grinding assembly according to an embodiment of the present invention;
[0039] Figure 8 is a schematic structural diagram of a rotating assembly according to an embodiment of the present invention;
[0040] Fig. 9 2 is a schematic diagram of the structure of a transport and pressing member according to an embodiment of the present invention;
[0041] Fig.10 is a schematic diagram of the overall structure of a cleaning component according to an embodiment of the present invention;
[0042] Fig.11 is a schematic diagram of a top view of the cleaning assembly according to an embodiment of the present invention;
[0043] Fig.12 2 is a schematic diagram of the structure of a rotating head according to an embodiment of the present invention. DETAILED DESCRIPTION
[0044] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0045] like Figure 1 , Figure 2 As shown, an embodiment of the present invention provides a grinding ultrasonic cleaning device based on a grinding sheet, comprising a bearing component 1, a centering component 2, a dripping component 3, a grinding component 4, a cleaning component 5, a transfer robot 6, and a rotating component 7.
[0046] Grinding sheets are stacked layer by layer on the supporting component 1, and a gap is reserved between two adjacent groups of grinding sheets for the transfer robot 6 to pick up each sheet one by one. Therefore, according to actual grinding needs, multiple groups of supporting components 1 can be arranged in a limited position on the side, so that long-term automated operation can be achieved.
[0047] The transfer robot 6 takes the grinding sheets one by one from the supporting component 1 and then transfers them to the centering component 2 for centering operation.
[0048] like Figure 3 As shown, at this time, the transfer robot 6 includes a multi-axis robot arm 61 in the middle, a carrier plate 62 and a clamp head 63 located at the front end; a bearing surface 601 is formed on the carrier plate 62, and the grinding sheets stacked on the bearing component 1 are taken through the bearing surface 601 (that is, when in use, the bearing surface 601 of the carrier plate 62 is extended to the bottom of the grinding sheet where the bearing component 1 is located, and then lifted up, so that the grinding sheet is separated from the contact between the bearing component 1), and then the grinding sheet is placed at the position of the centering component 2 for centering operation, and the clamp head 63 is used to clamp the edge position of the grinding sheet after centering (without touching the upper and lower surfaces of the grinding sheet), and rotate it out.
[0049] like Figure 4As shown, the centering component 2 includes an upper positioning support plate 21 and a clamping jaw positioning block 22, so that multiple groups of clamping jaw positioning blocks 22 form a circular structure, and a positioning support plate 21 is formed at the center position surrounded by the circular structure. At the same time, a driving member 211 driven in the up and down directions is extended outward from the bottom of the support plate 21, and the relative height of the support plate 21 is adjusted by the driving member 211; at the beginning, the positioning support plate 21 is extended to a higher position (the height of its upper surface is higher than the highest point of the clamping jaw positioning block 22) by the driving member 211. When the grinding sheet contacts the positioning support plate 21, the driving member 211 is used to adjust the relative height of the support plate 21. When the grinding sheet is on the upper surface of the support plate 21, the driving member 211 then causes the grinding sheet at that position to fall down until the outer edge of the grinding sheet contacts the clamping jaw positioning block 22, and the bottom of the clamping jaw positioning block 22 is movably arranged (the bottom of the clamping jaw positioning block 22 and the support plate 21 are movably arranged). Therefore, regardless of whether the center position is aligned with the middle of the positioning support plate 21, as the positioning support plate 21 drives the grinding sheet to fall, multiple clamping jaw positioning blocks 2 can be synchronously adjusted in position, and finally multiple clamping jaw positioning blocks 22 can clamp the outer edge of the grinding sheet to play a centering role.
[0050] The upper surface of the support plate 21 is connected via a negative pressure pipe 212 (the negative pressure pipe 212 is connected by being located at the bottom, thereby ensuring the flatness of the upper surface of the support plate 21), so that the grinding sheet is adsorbed and supported firmly on the support plate 21.
[0051] like Figure 5 , Figure 6 As shown, the grinding sheet after the centering is then transferred to the drip assembly 3 through the clamp head 63 on the transfer robot 6 for dripping operation. The drip assembly 3 includes multiple groups of drip nozzles 31, a transfer platform 32, and an XY axis moving part 33. The transfer platform 32 is used to carry the grinding sheet (its upper surface is open), and a rotating motor 321 is set at the bottom of the transfer platform 32. The carried grinding sheet is sequentially transferred to multiple groups of drip nozzles 31 through the XY axis moving part 33 at the bottom for dripping operation. In order to ensure the uniformity of each dripping, when one group of drip nozzles 31 is dripped, the rotating platform 42 is rotated by the rotating motor 321, and the grinding sheet is transferred to another group of drip nozzles 31 again. This method can make the dripping evenly distributed on the surface of the grinding sheet. When the drip assembly 3 finishes dripping the grinding sheet, the grinding sheet is transferred to the grinding assembly 4 again through the clamp head 63 on the transfer robot 6.
[0052] like Figure 7As shown, the grinding assembly 4 includes a grinder body 41 and a first motion assembly 42. The first motion assembly 42 enables the grinder body 41 to reciprocate between the drip assembly 3 and the end of the rotating assembly 7. When the grinder body 41 moves along the bottom first motion assembly 42 to the end of the drip assembly 3, a visual inspection assembly 43 is arranged on the side where the drip assembly 3 is located. The visual inspection assembly 43 visually positions the grinding sheet clamped by the transfer robot 6 and transported to the work station where the grinding platform 411 is located, thereby ensuring that each transferred grinding sheet is accurately placed on the grinding platform 411. After placing the grinding sheet, the grinder body 41 as a whole returns to the end position of the rotating assembly 7 along the direction of the bottom first motion assembly 42.
[0053] A grinding platform 411 is provided on the upper surface of the grinder body 41, and an annular protrusion is formed on the outer edge of the grinding platform 411, the middle part of the annular protrusion is used to accommodate the grinding sheet (the annular size of its outer circumference is equal to the outer diameter of the grinding sheet), and a plurality of groups of notches 412 are provided at the edge of the annular protrusion where the grinding platform 411 is located, and the notches 412 are matched with the clamp head 63 on the transfer robot 6, that is, when the clamp head 63 on the transfer robot 6 clamps the grinding sheet and places it on the grinding platform 411, at this time, since the annular protrusion on the outer circumference of the grinding platform 411 has a certain height (the grinding sheet cannot be placed after it touches the bottom of the grinding platform 411), in order to place the grinding sheet more stably, the clamp head 63 can be embedded in the notch 412 of the grinding platform 411 until the bottom of the grinding sheet touches the bottom of the grinding platform 411 and then the clamp head 63 is released, thereby ensuring the stable placement of the grinding sheet.
[0054] The grinding assembly 4 and the cleaning assembly 5 are arranged opposite to each other (the present application adopts a mutually parallel arrangement, that is, they are respectively located on opposite sides of the rotating assembly 7). Figure 8 As shown, the rotating assembly 7 includes a rotating seat 71 and a transporting and clamping member 72 located on both sides of the rotating seat. The transporting and clamping member 72 forms a pressure on the grinding sheet carried above the grinding assembly 4 (that is, forms a pressure on the grinding sheet located in the grinding platform 411), and the upper surface of the grinding sheet is ground by rotating the bottom of the transporting and clamping member 72.
[0055] At this time, if Fig. 9As shown, the transport pressing member 72 includes a rotating shaft 721, a pressing head 722, and a limiting plate 723. The rotating shaft 721 drives the pressing head 722 set at the bottom to rotate (so that the pressing head 722 actually contacts and rotates with the upper surface of the grinding sheet to produce grinding). At the same time, the limiting plate 723 forms protection for the outer periphery of the pressing head 722. That is, when the pressing head 722 contacts the grinding sheet, a vertical limiting column 413 is arranged in the vertical direction on the outside of the grinding platform 411 where the grinding assembly 4 is located, so that when the limiting plate 723 descends, it is limited by the limiting column 413 in the height direction, and forms a relatively closed space with the annular protrusion on the grinding platform 411, thereby ensuring safety during the grinding process.
[0056] After grinding is completed, the rotating shaft 721 of the transport and clamping member 72 is lifted, so that the pressure head 722 at the bottom of the rotating shaft 721 is separated from the direct contact with the grinding sheet, and is lifted vertically and rotated to the side of the cleaning component 5 through the rotating seat 71. Another group of transport and clamping members 72 that have been cleaned are synchronously rotated to the top of the grinding component 4 (to continue grinding), and the head of the transport and clamping member 72 is cleaned by the cleaning component 5.
[0057] like Fig.10 , Fig.11 As shown, the cleaning component 5 includes an ultrasonic cleaning tank 51, a rotating water tank 52, and a second motion component 53; the ultrasonic cleaning tank 51 and the rotating water tank 52 are sequentially transferred to the bottom of the transport and pressing member 72 of the rotating component 7 by the second motion component 53 to clean the pressure head 722. The bottom of the ultrasonic cleaning tank 51 is provided with an ultrasonic component, and the pressure head 722 immersed in the transport and pressing member 72 is ultrasonically cleaned by ultrasonic waves at a frequency of 40-60w for 20-30s. After the cleaning is completed, the pressure head 722 is lifted, and then the second motion component 53 moves the rotating water tank 52 to the bottom of the pressure head 722 for cleaning again.
[0058] A rotating head 521 is provided in the rotating water tank 52 , and the rotating head 521 is used to rotate the water flow contained in the rotating water tank 52 .
[0059] like Fig.12 As shown, the rotating head 521 is located in the middle of the rotating water tank 52 and is arranged vertically, and a rotating member is provided at the bottom of the rotating head 521 to realize the self-rotation movement of the rotating head 521. A plurality of vents 501 (the vents 501 are connected to an external vent valve) are provided along the vertical direction and / or the circumferential direction of the top of the side edge where the rotating head 521 is located, so that when the rotating water tank 52 contains water, the vents 501 are ventilated through the circulating pump to realize the circulation of the water in the rotating water tank 52, and because the rotating head 521 generates self-rotation at this time, the water in the rotating water tank 52 is realized to rotate by itself, which greatly improves the cleaning efficiency of the pressure head 722.
[0060] After the water is passed through, the rotating water tank 52 is drained, and the rotating head 521 is ventilated simultaneously to achieve air drying of the transport and pressing member 72. This method can quickly achieve air drying of the pressure head 722 after washing. Finally, under the rotation of the rotating seat 71, the cleaned transport and pressing member 72 is rotated to the grinding platform 411 for further grinding, and the ground transport and pressing member 72 is cleaned again in the cleaning component 5. This cyclic cleaning method greatly improves the grinding efficiency.
[0061] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.
Claims
1. A grinding ultrasonic cleaning device based on a grinding sheet, characterized in that: It comprises a bearing component (1), a centering component (2), a dripping component (3), a grinding component (4), a cleaning component (5), a transfer robot (6), and a rotating component (7). The transfer robot (6) takes the grinding sheets from the carrying component (1) piece by piece, and then transfers them to the centering component (2) for centering operation; The grinding sheet after centering is then transferred to the dripping assembly (3) for dripping, and then transferred to the grinding assembly (4) again by the transfer robot (6). The grinding assembly (4) and the cleaning assembly (5) are arranged opposite to each other, and a rotating assembly (7) is arranged between them, wherein the rotating assembly (7) comprises a rotating seat (71) and conveying and pressing members (72) located on both sides of the rotating seat, wherein the conveying and pressing members (72) are used to press the grinding sheet carried above the grinding assembly (4), and the upper surface of the grinding sheet is ground by rotating the bottom of the conveying and pressing members (72); After grinding is completed, the transport and pressing members (72) are lifted vertically and rotated into the cleaning assembly (5), and another group of transport and pressing members (72) that have been cleaned are synchronously rotated to the top of the grinding assembly (4), and the heads of the transport and pressing members (72) are cleaned by the cleaning assembly (5).
2. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 1 is characterized in that: The carrier assembly (1) is stacked with grinding sheets in layers, and a gap is reserved between two adjacent groups of grinding sheets for the transfer robot (6) to pick up the sheets one by one.
3. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 1 is characterized in that: The transfer robot (6) comprises a multi-axis robot arm (61) in the middle, a carrier plate (62) and a clamp head (63) located at the front end; a bearing surface (601) is formed on the carrier plate (62), and the grinding sheets stacked on the bearing component (1) are taken through the bearing surface (601), and then placed in the position of the centering component (2) for centering operation; the clamp head (63) is used to clamp the edge position of the grinding sheet after centering and transfer it out.
4. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 1 is characterized in that: The centering assembly (2) comprises an upper positioning support plate (21) and a clamping jaw positioning block (22), so that multiple groups of clamping jaw positioning blocks (22) form a circular structure, and a positioning support plate (21) is formed in the center surrounded by the circular structure, and a driving member (211) for driving in the up and down directions is extended outward from the bottom of the support plate (21), and the relative height of the support plate (21) is adjusted by the driving member (211); The upper surface of the support plate (21) is connected via a negative pressure pipe (212), so that the grinding sheet is adsorbed and carried on the support plate (21), and the outer edge of the grinding sheet is clamped and fixed via a clamping jaw positioning block (22); The bottom of the clamping jaw positioning block (22) and the support plate (21) are movably arranged.
5. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 1 is characterized in that: The liquid dripping assembly (3) comprises a plurality of groups of drip nozzles (31), a transfer platform (32), and an XY axis moving part (33). The transfer platform (32) is used to carry the grinding sheet, and a rotating motor (321) is arranged at the bottom of the transfer platform (32). The XY axis moving part (33) at the bottom sequentially transfers the carried grinding sheet to the plurality of groups of drip nozzles (31) for liquid dripping operation.
6. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 3 is characterized in that: The grinding assembly (4) comprises a grinding machine body (41) and a first moving assembly (42). The first moving assembly (42) enables the grinding machine body to reciprocate between the drip assembly (3) and the end of the rotating assembly (7). At the same time, a grinding platform (411) is provided on the upper surface of the grinding machine body (41), and an annular protrusion is formed on the outer edge of the grinding platform (411). The middle part is used to accommodate a grinding sheet. A plurality of groups of notches (412) are provided at the edge of the annular protrusion where the grinding platform (411) is located, and the notches (412) are matched with the clamp head (63) on the transfer robot (6).
7. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 6 is characterized in that: The transport pressing member (72) comprises a rotating shaft (721), a pressing head (722), and a limiting plate (723); the rotating shaft (721) drives the pressing head (722) arranged at the bottom to rotate, and the limiting plate (723) forms protection for the periphery of the pressing head (722); A vertical limiting column (413) is arranged on the outside of the grinding platform (411) where the grinding assembly (4) is located, so that when the limiting plate (723) is lowered, it is limited in height by the limiting column (413), and at the same time, the pressure head (722) located in the middle of the limiting plate (723) continues to descend until the grinding sheet on the grinding platform (411) is pressed tightly.
8. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 6, characterized in that: A visual detection component (43) is arranged on the side where the dripping component (3) is located, and the visual detection component (43) is used to visually locate the grinding sheet clamped by the transfer robot (6) and transported to the work station where the grinding platform (411) is located.
9. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 1, characterized in that: The cleaning component (5) comprises an ultrasonic cleaning tank (51), a rotating water tank (52), and a second motion component (53); the ultrasonic cleaning tank (51) and the rotating water tank (52) are sequentially transferred to the bottom of the transport and pressing member (72) of the rotating component (7) by the second motion component (53); the ultrasonic cleaning tank (51) uses an ultrasonic frequency of 40-60w and a time of 20-30s to ultrasonically clean the head immersed in the transport and pressing member (72); A rotating head (521) is arranged in the rotating water tank (52), and the rotating head (521) is used to rotate the water flow contained in the rotating water tank (52).
10. The grinding ultrasonic cleaning device based on the grinding sheet according to claim 9, characterized in that: The rotating head (521) is located in the middle of the rotating water tank (52) and is arranged vertically, and a rotating part is arranged at the bottom of the rotating head (521) to realize the self-rotation of the rotating head (521); a plurality of vents (501) are arranged along the vertical direction and / or the circumferential direction of the top of the side where the rotating head (521) is located, so that when the rotating water tank (52) contains water, the vents (501) are ventilated through the circulating pump to realize the circulation of water in the rotating water tank (52); after the water is ventilated, the rotating water tank (52) is drained, and the rotating head (521) is ventilated simultaneously to realize the air drying of the transporting and pressing member (72).
Citation Information
Patent Citations
Full-automatic grinding cleaning machine
CN108500804A
Wafer fine cleaning tool and use method thereof
CN115863227A
Cleaning device and chemical mechanical planarization equipment
CN118990324A
Two-rotation discharging device with cleaning and drying functions
CN211160809U
Polishing method and its device
JP1999320385A