Ion beam deposition completion probe test transport device

Abstract

The invention discloses an ion beam deposition completion probe test transport device. The device comprises a mounting table on which a sample is mounted and a probe table on which a probe is arranged, the mounting table comprises a sample seat, a supporting rod and a supporting base, a mounting groove for mounting a sample is formed in the upper end of the outer side of the sample seat, the supporting rod is mounted at the lower end of the sample seat, and the lower end of the supporting rod is connected with the supporting base; the probe station comprises a probe body, a mounting plate and a mounting seat, the mounting plate is arranged on one side of the mounting seat, and the probe body is mounted on the mounting plate; four samples can be placed on the mounting table at the same time, the sample table can be heated through the heating rod, the heating temperature can be controlled, nine different parts of the samples can be detected through the nine probe bodies assembled on the probe table, corresponding numerical values are obtained, different experiment conditions are met, and more experiment results are created.

Description

Technical Field

[0001] The invention belongs to the technical field of testing equipment, and in particular relates to an ion beam deposition completion probe testing and transporting device. Background Art

[0002] In recent years, with the rapid development of atomic manufacturing, the demand for new materials and new devices such as clusters, single-atom and single-molecule devices has been increasing. The preparation of clusters through beam sources has become the main means to meet the demand for atomic manufacturing materials. For example, we can sputter out cluster atomic gas through magnetron sputtering, condense the atomic gas into clusters through gas phase condensation, and then focus the clusters into a beam through ultrasonic expansion and ion optical systems. Clusters suitable for processing are deposited during flight. Traditional probe testing devices are not convenient for testing multiple groups of samples, and are not convenient for detecting multiple positions of samples at the same time, so their use is limited. Summary of the invention

[0003] The object of the present invention is to provide an ion beam deposition completion probe test transport device to solve the problems raised in the above background technology.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] An ion beam deposition completion probe test transport device, comprising:

[0006] A mounting table on which a sample is mounted and a probe table on which a probe is provided;

[0007] The mounting platform includes a sample holder, a support rod and a support base. The upper end of the outer side of the sample holder is provided with a mounting groove for mounting the sample. The lower end of the sample holder is provided with the support rod. The lower end of the support rod is connected to the support base, which can play a role in stably supporting and mounting the sample holder.

[0008] The probe station comprises a probe body, a mounting plate and a mounting seat. The mounting plate is arranged on one side of the mounting seat, and the probe body is mounted on the mounting plate.

[0009] Preferably, a threaded hole 1 is further provided at the upper end of the outer side of the sample holder for installing a bolt, and the threaded hole 1 is located on both sides of the mounting groove, and sample clamps are installed on the outer side of the sample holder located on both sides of the mounting groove through bolts for fixing the sample located inside the mounting groove, and the mounting grooves are arranged in four groups, so that four groups of samples can be installed, and thus four groups of samples can be tested;

[0010] A rod hole matching with the support rod is opened in the middle of the bottom end of the sample holder, and the upper end of the support rod is installed inside the rod hole;

[0011] The bottom end of the sample holder is also provided with a mounting hole 1 for mounting a heating rod. The mounting holes 1 are arranged in four groups and are symmetrically arranged with the rod hole as the center. The dispersed positions of the mounting holes 1 can make the sample holder heated more evenly. A heating rod is installed inside the mounting hole 1 to heat the sample holder.

[0012] Preferably, the mounting platform further comprises a connecting piece and a lamp holder, and the lamp holder is mounted on one side of the upper end of the supporting base via the connecting piece;

[0013] Two groups of cable through holes are provided inside the lamp holder, through which power lines can pass to energize the heating rod. Both sides of the lamp holder are provided with mounting grooves for bolts to pass through, and the lamp holder is connected to the connecting piece by bolts.

[0014] Preferably, the lamp holder is made of ceramic material.

[0015] Preferably, the sample holder is made of copper material. The sample holder can hold four samples at the same time. The copper sample placement table is heated by a heating rod, thereby achieving experimental conditions for heating the samples.

[0016] Preferably, nine groups of mounting through holes are provided in the middle of the mounting plate, which can be used to fix the position of the probe body and allow the detection line to pass through. The mounting through holes are arranged in nine groups, so that nine groups of probe bodies can be installed, nine different parts of the sample can be detected, corresponding values ​​can be obtained, different experimental conditions can be met, and more experimental results can be created.

[0017] Preferably, threaded holes 2 are provided at the corners of the mounting plate for installing bolts and corresponding to threaded holes 3 of the mounting seat, so that the mounting plate can be installed on one side of the mounting seat by bolts.

[0018] Preferably, a probe line hole is provided in the middle of the mounting seat, through which the probe line can pass;

[0019] The mounting seat is also provided with a threaded hole three, which is the same as the threaded hole two and can be used to install bolts;

[0020] The corners of the mounting seat are each provided with mounting holes 2 for assembly and installation of other parts and for determining the position of the probe.

[0021] Preferably, the probe bodies are arranged into nine groups, which can detect nine different parts of the sample, and the probe bodies are arranged into a hollow structure, which can be connected to a circuit.

[0022] Preferably, the probe station further comprises a power supply group, and the power supply group is arranged on a side of the mounting base away from the mounting plate, and can supply power to the probe.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The mounting table provided by the present invention can place four samples at the same time. The sample table can be heated by a heating rod, and the heating temperature can also be controlled. The probe table is equipped with nine probe bodies to detect nine different parts of the sample, obtain corresponding values, meet different experimental conditions, and create more experimental results. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 A test diagram of the mounting platform of the present invention;

[0027] Figure 3 is an enlarged schematic diagram of a sample holder of the present invention;

[0028] Figure 4 is an enlarged schematic diagram of the lamp holder of the present invention;

[0029] Figure 5 is an enlarged schematic diagram of the mounting plate of the present invention;

[0030] Figure 6 is an enlarged schematic diagram of the mounting base of the present invention;

[0031] Figure 7 It is a partial enlarged schematic diagram of the present invention;

[0032] In the figure: 10, mounting table; 11, sample holder; 111, mounting groove; 112, threaded hole 1; 113, rod hole; 114, mounting hole 1; 115, sample clamp; 12, heating rod; 13, support rod; 14, support base; 15, connecting piece; 16, lamp holder; 161, cable through hole; 162, mounting groove;

[0033] 20. Probe station; 21. Mounting plate; 211. Mounting through hole; 212. Threaded hole 2; 22. Mounting seat; 221. Probe line hole; 222. Threaded hole 3; 23. Power supply unit; 24. Probe body. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] Example:

[0036] See also Figure 1-Figure 7 As shown, an ion beam deposition completion probe test transport device comprises:

[0037] A mounting table 10 on which a sample is mounted and a probe table 20 on which a probe is provided;

[0038] The mounting table 10 includes a sample holder 11, a support rod 13 and a support base 14. The upper end of the outer side of the sample holder 11 is provided with a mounting groove 111 for mounting a sample. The lower end of the sample holder 11 is provided with a support rod 13. The lower end of the support rod 13 is connected to the support base 14, which can play a role in stably supporting and mounting the sample holder 11.

[0039] The probe station 20 includes a probe body 24 , a mounting plate 21 and a mounting seat 22 . The mounting plate 21 is disposed on one side of the mounting seat 22 , and the probe body 24 is mounted on the mounting plate 21 .

[0040] refer to Figure 1-Figure 7 As shown, a threaded hole 112 is further provided at the upper end of the outer side of the sample holder 11 for installing bolts. The threaded hole 112 is located on both sides of the installation slot 111. Sample clamps 115 are installed on the outer side of the sample holder 11 on both sides of the installation slot 111 through bolts for fixing the sample located inside the installation slot 111. The installation slot 111 is arranged in four groups, so that four groups of samples can be installed, and thus the four groups of samples can be tested.

[0041] A rod hole 113 matching with the support rod 13 is provided in the middle of the bottom end of the sample holder 11, and the upper end of the support rod 13 is installed inside the rod hole 113;

[0042] The bottom end of the sample holder 11 is also provided with a mounting hole 114 for mounting the heating rod 12. The mounting holes 114 are arranged in four groups and are symmetrically arranged with the rod hole 113 as the center. The dispersed positions of the mounting holes 114 can make the sample holder 11 heated more evenly. The heating rod 12 is installed inside the mounting hole 114 to heat the sample holder 11.

[0043] refer to Figure 1-Figure 7 As shown, the mounting platform 10 further includes a connecting piece 15 and a lamp holder 16, and the lamp holder 16 is mounted on one side of the upper end of the supporting base 14 through the connecting piece 15;

[0044] Two groups of cable through holes 161 are provided inside the lamp holder 16, through which the power transmission line can pass and energize the heating rod 12. Both sides of the lamp holder 16 are provided with mounting grooves 162 for bolts to pass through. The lamp holder 16 is connected to the connecting piece 15 by bolts.

[0045] refer to Figure 1-Figure 7 As shown, the lamp holder 16 is provided as a ceramic material.

[0046] refer to Figure 1-Figure 7As shown, the sample holder 11 is made of copper material. The sample holder 11 can hold four samples at the same time. The copper sample holder is heated by the heating rod 12 to complete the experimental conditions for heating the samples.

[0047] refer to Figure 1-Figure 7 As shown, nine groups of mounting through holes 211 are provided in the middle of the mounting plate 21, which can be used to fix the position of the probe body 24 and allow the detection line to pass through. The mounting through holes 211 are arranged in nine groups, so that nine groups of probe bodies 24 can be installed, and nine different parts of the sample can be detected to obtain corresponding values, meet different experimental conditions, and create more experimental results.

[0048] refer to Figure 1-Figure 7 As shown, threaded holes 212 are provided at the corners of the mounting plate 21 for installing bolts and corresponding to threaded holes 222 of the mounting seat 22, so that the mounting plate 21 can be installed on one side of the mounting seat 22 by bolts.

[0049] refer to Figure 1-Figure 7 As shown, a probe line hole 221 is provided in the middle of the mounting seat 22, through which the probe line can pass;

[0050] The mounting seat 22 is also provided with a threaded hole 3 222, which is the same as the threaded hole 212 and can be used to install bolts;

[0051] The corners of the mounting seat 22 are provided with mounting holes 2 for mounting other parts and determining the position of the probe.

[0052] refer to Figure 1-Figure 7 As shown, the probe body 24 is arranged into nine groups, which can detect nine different parts of the sample. The probe body 24 is arranged into a hollow structure, which can be connected to the circuit.

[0053] refer to Figure 1-Figure 7 As shown, the probe station 20 further includes a power supply group 23 . The power supply group 23 is disposed on a side of the mounting seat 22 away from the mounting plate 21 , and can supply power to the probes.

[0054] The mounting table 10 provided in the present invention can place four samples at the same time. The sample table 10 can be heated by the heating rod 12, and the heating temperature can also be controlled. The probe table 20 is equipped with nine probe bodies 24, which can detect nine different parts of the sample and obtain corresponding values, meet different experimental conditions, and create more experimental results.

[0055] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An ion beam deposition completion probe test transport device, characterized in that: include: A mounting platform (10) on which a sample is mounted and a probe platform (20) on which a probe is provided; The mounting platform (10) comprises a sample holder (11), a support rod (13) and a support base (14); a mounting groove (111) for mounting a sample is provided at the upper outer end of the sample holder (11); the support rod (13) is mounted at the lower end of the sample holder (11); and the support base (14) is connected to the lower end of the support rod (13); The probe station (20) comprises a probe body (24), a mounting plate (21) and a mounting seat (22); the mounting plate (21) is arranged on one side of the mounting seat (22), and the probe body (24) is mounted on the mounting plate (21).

2. The ion beam deposition completion probe test transport device according to claim 1, characterized in that: The upper end of the outer side of the sample holder (11) is also provided with a threaded hole (112) for installing a bolt. The threaded hole (112) is located on both sides of the installation groove (111). The outer side of the sample holder (11) located on both sides of the installation groove (111) is installed with a sample clamp (115) by means of bolts. The installation groove (111) is arranged in four groups. A rod hole (113) matching with the support rod (13) is provided in the middle of the bottom end of the sample holder (11), and the upper end of the support rod (13) is installed inside the rod hole (113); The bottom end of the sample holder (11) is also provided with a mounting hole (114) for mounting a heating rod (12). The mounting holes (114) are arranged in four groups and are all symmetrically arranged with the rod hole (113) as the center. The heating rod (12) is installed inside the mounting holes (114).

3. The ion beam deposition completion probe test transport device according to claim 2, characterized in that: The mounting platform (10) further comprises a connecting piece (15) and a lamp holder (16), and the lamp holder (16) is mounted on one side of the upper end of the supporting base (14) via the connecting piece (15); Two groups of cable through holes (161) are provided inside the lamp holder (16), mounting grooves (162) are provided on both sides of the lamp holder (16), and the lamp holder (16) is connected to the connecting piece (15) by bolts.

4. The ion beam deposition completion probe test transport device according to claim 3, characterized in that: The lamp holder (16) is made of ceramic material.

5. The ion beam deposition completion probe test transport device according to claim 2, characterized in that: The sample holder (11) is made of copper material.

6. The ion beam deposition completion probe test transport device according to claim 1, characterized in that: Nine groups of mounting through holes (211) are provided in the middle of the mounting plate (21), and the mounting through holes (211) are arranged in nine groups.

7. The ion beam deposition completion probe test transport device according to claim 6, characterized in that: The corners of the mounting plate (21) are each provided with threaded holes (212).

8. The ion beam deposition completion probe test transport device according to claim 1, characterized in that: A probe line hole (221) is provided in the middle of the mounting seat (22); The mounting seat (22) is also provided with a threaded hole three (222), and the threaded hole three (222) is the same as the threaded hole two (212); The corners of the mounting seat (22) are each provided with mounting holes 2.

9. The ion beam deposition completion probe test transport device according to claim 1, characterized in that: The probe bodies (24) are arranged in nine groups, and the probe bodies (24) are arranged in a hollow structure.

10. The ion beam deposition completion probe test transport device according to claim 1, characterized in that: The probe station (20) further comprises a power supply group (23), and the power supply group (23) is arranged on a side of the mounting seat (22) away from the mounting plate (21).

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