Variable diaphragm and photoetching machine

Abstract

The invention provides a variable diaphragm and a photoetching machine. The variable diaphragm comprises a rack, a diaphragm module and a driving module, wherein the diaphragm module and the driving module are arranged on the rack; the diaphragm module comprises two diaphragm assemblies, and each diaphragm assembly comprises a light shielding plate which is internally provided with a first light transmitting window; the two shading blades are fixedly arranged on the shading plate in a right-angle mode and located on the side edge of the first light-transmitting window; the two diaphragm assemblies are arranged in an overlapping manner, so that a slit window can be formed in the first light-transmitting window area through the total four shading blades on the two diaphragm assemblies; the driving module can drive the shading plates in the two diaphragm assemblies to independently move in the X direction and the Y direction so as to control the size and the position of the slit window. According to the variable diaphragm provided by the invention, the problem that a traditional cantilever type shading blade vibrates in a rapid adjustment process can be effectively avoided; and by arranging the shading plate, the moving stability and the adjusting precision of the shading blade are greatly improved, and the shading effect is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment manufacturing, and in particular to a variable aperture and a photolithography machine. Background Art

[0002] Photolithography is a key technology in integrated circuit chip manufacturing. It restricts the production of high-end chips and has a significant impact on the realization of smart devices and artificial intelligence. Photolithography equipment has gone through several development stages, including contact, proximity, and scanning projection. Among them, step-scan projection has become the mainstream technology. The most important part of a photolithography machine is the exposure system. During the photolithography process, the laser beam of the exposure system projects the mask pattern through the slit window onto the silicon wafer on the workpiece table. The exposure system adjusts the size of the slit window through a movable blade device.

[0003] For example, Chinese patent document CN114488700A discloses a variable aperture and a photolithography machine, wherein the variable aperture (i.e., slit) is provided with an X-direction component and a Y-direction component, wherein the X-direction component includes an X-direction slide rail and two X-direction sliders arranged on the slide rail, each slider is respectively provided with an X-direction blade, and the X-direction driving device is used to drive the X-direction slider to move; the Y-direction component includes a Y-direction slide rail and two Y-direction sliders arranged on the Y-direction guide rail, each Y-direction slider is respectively provided with a Y-direction blade, and the blade is driven to move by the Y-direction driving, and the two X-direction blades and the two Y-direction blades enclose a slit window; the X-direction guide rail and the Y-direction guide rail are connected at one end to form a right angle structure. The blades of this patent document adopt a cantilever structure design and are driven by a driving mechanism respectively. When the blades are running at high speed, since the driving point of the cantilever structure blades is at the slider, the root of the blades is easily damaged and the free end of the blades is prone to vibrate. In addition, the two guide rails of the variable aperture are arranged in an angular shape. The mass of the entire device is concentrated on the left and upper sides, and its mass distribution is uneven. The center of gravity is offset relative to the position of the blades, which further aggravates the vibration and instability of the equipment, thereby having a greater impact on the exposure accuracy. Summary of the invention

[0004] In order to solve the problems in the prior art, the present application provides a variable aperture, and a photolithography machine including the variable aperture. The technical solution of the present application is as follows:

[0005] 1. A variable aperture, comprising a frame, an aperture module and a driving module arranged on the frame; wherein:

[0006] The aperture module includes two aperture components, each of which includes:

[0007] a shading plate, wherein a first light-transmitting window is provided in the shading plate; and,

[0008] Light-shielding blades, two of which are fixedly arranged on the light-shielding plate at right angles and located on the sides of the first light-transmitting window;

[0009] The two aperture assemblies are arranged overlappingly so as to form a slit window in the first light-transmitting window region through a total of four light-shielding blades on the two aperture assemblies;

[0010] The driving module can drive the shading plates in the two aperture assemblies to move independently along the X direction and the Y direction to control the size and position of the slit window.

[0011] 2. The variable aperture as described in item 1, wherein:

[0012] In the aperture assembly, the two light shielding blades are arranged in an L shape, and the ends thereof close to each other have a bevel angle, so that the two light shielding blades are located in the same plane and can be spliced ​​into a right angle;

[0013] The aperture assembly further comprises a pressing plate, which is connected to the shading plate to clamp and fix the adjacent ends of the two shading blades on the shading plate.

[0014] 3. The variable aperture as described in item 2, wherein:

[0015] The pressing plate is connected to the shading plate by two or more screws;

[0016] The light-shielding blade is provided with screw holes corresponding to the screws, and at least one of the screw holes is larger than the outer contour of the corresponding screw, so that the angle of the light-shielding blade can be adjusted before the screw is tightened.

[0017] 4. The variable aperture as described in item 2, wherein:

[0018] A chamfer facing away from the light-shielding blade is provided on a side of the pressure plate of at least one of the aperture assemblies that faces the first light-transmitting window.

[0019] 5. The variable aperture as described in item 2, wherein:

[0020] The two aperture assemblies are arranged opposite to each other on one side of the pressure plate.

[0021] 6. The variable aperture as described in item 5, wherein:

[0022] In the aperture assembly, the reverse extension lines of the inner sides of the two shading blades define a first area, the projection of the pressure plate on the plane where the shading blades are located is located in the first area, and there is a spacing area between the pressure plate and at least one of the two reverse extension lines.

[0023] 7. The variable aperture as described in item 1, wherein:

[0024] The driving module includes two driving assemblies, which are used to drive the shading plates in the two aperture assemblies to move along the X direction and the Y direction respectively;

[0025] The drive assembly comprises:

[0026] An X-direction driving unit, whose power output end can move along the X-direction;

[0027] A Y-direction driving unit, whose power output end can move along the Y direction; and,

[0028] A mounting plate, the mounting plate is arranged parallel to the shading plate, and a second light-transmitting window is arranged on the mounting plate, so that the projection of the slit window on the mounting plate can be located in the second light-transmitting window;

[0029] Among them, one of the X-direction drive unit and the Y-direction drive unit is arranged on the frame, and the power output end of the drive unit is connected to the mounting plate; the other of the X-direction drive unit and the Y-direction drive unit is arranged on the mounting plate, and the power output end of the drive unit is arranged on the shading plate of the aperture assembly.

[0030] 8. The variable aperture as described in item 7, wherein:

[0031] The drive assembly also includes:

[0032] a first dovetail guide rail and a first slider matched with the first dovetail guide rail, the first dovetail guide rail and the first slider are respectively arranged on the frame and the mounting plate, and the arrangement direction of the first dovetail guide rail is the same as the movement direction of the power output end of the driving unit arranged on the frame; and / or,

[0033] The second dovetail guide rail and the second slider cooperate with the second dovetail guide rail, the second dovetail guide rail and the second slider are respectively arranged on the mounting plate and the shading plate, and the setting direction of the second dovetail guide rail is the same as the movement direction of the power output end of the driving unit arranged on the mounting plate.

[0034] 9. The variable aperture as described in item 7, wherein:

[0035] The X-direction driving unit and / or the Y-direction driving unit further comprises a limiting component, and the limiting component limits the movement stroke of the shading plate.

[0036] 10. The variable aperture as described in item 7, wherein:

[0037] The frame comprises:

[0038] a first substrate;

[0039] a crossbeam, wherein the crossbeam is parallel to the first substrate;

[0040] a first side plate, the first side plate being disposed between the first base plate and the crossbeam to connect the first base plate and the crossbeam;

[0041] Wherein, a fixed end of one of the X-direction driving unit and the Y-direction driving unit is arranged on the crossbeam of the frame, and a power output end thereof is arranged on the mounting plate.

[0042] 11. The variable aperture as described in item 10, wherein:

[0043] The crossbeam has a first symmetry plane along its length;

[0044] The two mounting plates are parallel to the first symmetry plane, located on both sides of the first symmetry plane, and are equidistant from the first symmetry plane;

[0045] The shading plates of the two aperture assemblies are parallel to the first symmetry plane, located on both sides of the first symmetry plane, and are equidistant from the first symmetry plane.

[0046] 12. The variable aperture as described in item 7, wherein:

[0047] The frame comprises:

[0048] a second substrate;

[0049] A fixing plate, wherein the two fixing plates are arranged in parallel, the two fixing plates are arranged vertically on the second substrate, and the fixing plates are each provided with a third light-transmitting window, so that the projection of the slit window on the fixing plate can be located within the third light-transmitting window;

[0050] Wherein, a fixed end of one of the X-direction driving unit and the Y-direction driving unit is arranged on the fixed plate of the frame, and a power output end thereof is arranged on the mounting plate.

[0051] 13. The variable aperture as described in item 12, wherein:

[0052] The second substrate has a second symmetry plane along its length direction;

[0053] The two fixing plates are parallel to the second symmetry plane, located on both sides of the second symmetry plane, and are equidistant from the second symmetry plane;

[0054] The two mounting plates are parallel to the second symmetry plane, located on both sides of the second symmetry plane, and are equidistant from the second symmetry plane;

[0055] The shading plates of the two aperture assemblies are parallel to the second symmetry plane, located on both sides of the second symmetry plane, and are equidistant from the first symmetry plane.

[0056] 14. The variable aperture as described in item 1, wherein:

[0057] The frame is provided with a through threaded hole;

[0058] The frame also includes:

[0059] The wire sleeve is cylindrical and provided with an external thread matching the threaded hole. The wire sleeve is provided with a through hole along the axial direction. At least one end surface of the wire sleeve is provided with a connecting portion for rotating the wire sleeve.

[0060] 15. A photolithography machine, wherein:

[0061] Includes the variable aperture described in any one of items 1 to 14.

[0062] The present application provides a variable aperture, wherein a shading blade is arranged on a rigid shading plate, thereby effectively avoiding the problem of vibration of a traditional cantilever shading blade during rapid adjustment; by fixing the shading blade to the shading plate, the two groups of shading blades are moved and adjusted along the X direction or the Y direction by driving the shading plate. Although the shading plate has a certain mass and consumes more energy than just driving the blade, the setting of the shading plate greatly improves the movement stability and adjustment accuracy of the shading blade and ensures the shading effect, that is, in addition to the shading blade itself being able to effectively block light, the shading plate also completely blocks light, thereby effectively avoiding the influence of light emitted from the outside of the shading blade on other components in the lithography equipment.

[0063] The above description is only an overview of the technical solution of the present application. In order to make the technical means of the present application clearer and to enable those skilled in the art to implement it according to the contents of the specification, and to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are exemplified below. BRIEF DESCRIPTION OF THE DRAWINGS

[0064] Figure 1 : A schematic diagram of the side view structure of a variable aperture in one embodiment of the present application;

[0065] Figure 2 : A schematic diagram of the front view structure of a variable aperture in one embodiment of the present application;

[0066] Figure 3 : A schematic diagram of the side view structure of an aperture module in one embodiment of the present application;

[0067] Figure 4 : Figure 3 A schematic diagram of the front view of the aperture assembly at the middle rear side;

[0068] Figure 5 : Figure 3 A schematic diagram of the rear view structure of the aperture assembly at the front center;

[0069] Figure 6 : Figure 5 Schematic diagram of the structure of the medium pressure plate;

[0070] Figure 7 : Figure 4 A schematic diagram of the front view structure of the middle shading blade and the pressing plate;

[0071] Figure 8 : Figure 7 Rear view of

[0072] Fig. 9 : A schematic diagram of the structure of a pressing plate in one embodiment of the present application;

[0073] Fig.10 : A schematic diagram of the front view of the mounting plate in one embodiment of the present application;

[0074] Fig.11 : A schematic diagram of the rear view structure of a mounting plate equipped with a second dovetail guide rail and a second slider in one embodiment of the present application;

[0075] Fig.12 : A top view of the assembly structure of the mounting plate and the sunshade plate in one embodiment of the present application;

[0076] Fig.13 : A schematic diagram of a side view structure of a variable aperture in another embodiment of the present application;

[0077] Fig.14 : A schematic structural diagram of a fixing plate equipped with a first dovetail guide rail and a first slider in another embodiment of the present application;

[0078] Fig.15 : A schematic structural diagram of a silk sleeve in one embodiment of the present application.

[0079] Description of reference numerals:

[0080] 1000, aperture module; 1100, aperture assembly; 1110, light shielding plate; 1111, first light transmission window; 1120, light shielding blade; 1130, pressing plate; 1131, chamfer;

[0081] 2100, driving assembly; 2110, X-direction driving unit; 2120, Y-direction driving unit; 2130, mounting plate; 2131, second light-transmitting window; 2140, first dovetail guide rail; 2150, first slider; 2160, second dovetail guide rail; 2170, second slider;

[0082] 3110, first substrate; 3120, crossbeam; 3130, first side plate; 3210, second substrate; 3220, fixing plate; 3221, third light-transmitting window; 3230, second side plate; 3300, wire sleeve; 3310, through hole; 3320, connecting portion. DETAILED DESCRIPTION

[0083] The following embodiments of the present application are only used to illustrate the specific embodiments of the present application, and these embodiments cannot be understood as limiting the present application. Any other changes, modifications, substitutions, combinations, and simplifications made without departing from the spirit and principle of the present application are deemed to be equivalent replacement methods and fall within the scope of protection of the present application.

[0084] Those skilled in the art should understand that, in the disclosure of the present application, the terms "first", "second", "third", "fourth", "fifth", etc. are only used to distinguish different structures, but do not limit the number, connection relationship, etc. of specific structures; in addition, the directions or positional relationships indicated by "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms cannot be understood as limitations on the present application.

[0085] This embodiment provides a variable aperture, such as Figure 1 to Figure 15 As shown, it includes a frame and an aperture module 1000 and a driving module arranged on the frame; wherein,

[0086] The aperture module 1000 includes two aperture components 1100, each of which includes:

[0087] a light shielding plate 1110, wherein a first light-transmitting window 1111 is provided in the light shielding plate 1110; and,

[0088] Light-shielding blades 1120, two of the light-shielding blades 1120 are fixedly disposed on the light-shielding plate 1110 at right angles and are located on the sides of the first light-transmitting window 1111;

[0089] The two aperture assemblies 1100 are arranged in an overlapping manner so as to form a (rectangular) slit window A in the area of ​​the first light-transmitting window 1111 through a total of four light-shielding blades 1120 on the two aperture assemblies 1100 (i.e., two groups of right angles on the two groups of light-shielding blades are arranged diagonally);

[0090] The driving module can drive the two shading plates 1110 in the aperture assemblies 1100 to move independently along the X direction and the Y direction, so as to control the size and position of the slit window A.

[0091] Those skilled in the art know that a plane can be defined by the X direction and the Y direction, and the X direction and the Y direction can be perpendicular to each other or have a certain angle. In this embodiment, the X direction and the Y direction are perpendicular to each other to reduce the complexity of the device movement.

[0092] The present embodiment provides a new variable aperture, whose shading blade 1120 is arranged on a rigid shading plate 1110, thereby effectively avoiding the problem of vibration of the traditional cantilever shading blade during rapid adjustment; by fixing the shading blade 1120 to the shading plate 1110, when the two groups of shading blades 1120 are moved and adjusted along the X direction or the Y direction, it is achieved by driving the shading plate 1110. Although the shading plate 1110 has a certain mass and consumes more energy than only driving the blades, the setting of the shading plate 1110 greatly improves the movement stability and adjustment accuracy of the shading blade 1120, and ensures the shading effect, that is, in addition to the shading blade 1120 itself being able to effectively block light, the shading plate 1110 also completely blocks light, thereby effectively avoiding the influence of light emitted from the outside of the shading blade 1120 on other components in the lithography equipment. The shading plate of the present application is preferably made of a lightweight alloy material or ceramic material that has good rigidity and is less affected by temperature changes. During the driving process, its own weight can absorb the instantaneous impulse of the driving part to a certain extent, thereby effectively solving the influence of vibration on the accuracy of the shading blade.

[0093] In one embodiment, if Figure 3 to Figure 9 As shown, in the aperture assembly 1100, the two light shielding blades 1120 are arranged in an L shape, and the ends thereof close to each other have a bevel angle (such as Figure 8 Angle a and angle b) in the figure, so that the two shading blades 1120 are located in the same plane and can be spliced ​​into a right angle; the aperture assembly 1100 also includes a pressing plate 1130, which is connected to the shading plate 1110 to clamp and fix the adjacent ends of the two shading blades 1120 on the shading plate 1110.

[0094] This embodiment provides a setting and fixing method of the light shielding blade 1120, which can ensure that the two light shielding blades 1120 are in the same plane, thereby ensuring that the slit windows A formed by the two aperture assemblies 1100 are closer to a rectangle in the same plane, thereby ensuring the exposure effect.

[0095] Specifically, the pressing plate 1130 is connected to the shading plate 1110 by two or more screws (two in this embodiment); the shading blade 1120 is provided with screw holes corresponding to the screws, and at least one of the screw holes is larger than the outer contour of the corresponding screw, so that the angle of the shading blade can be adjusted before the screw is tightened. Therefore, when the two L-shaped shading blades 1120 are not perpendicular (the angle is not 90°), the position of the shading blade 1120 can be adjusted to make the two perpendicular, so as to ensure the quality of the slit window A formed and improve the exposure effect.

[0096] Preferably, the sum of angle a and angle b is greater than 90°, and more preferably, angle a and angle b are both greater than 45°. At this time, it can be ensured that even if the position of the light shielding blade 1120 is adjusted, the inner corner vertices of the two L-shaped light shielding blades 1120 are always in a closed state, so as to ensure the quality of the slit window A formed by the two aperture assemblies 1100, and prevent light leakage at the top corner of the slit window A from affecting the exposure effect.

[0097] Of course, as shown in the figure, at the ends of the two shading blades 1120 that are away from each other, the shading blades 1120 can also be directly fixed to the shading plate 1110 by screws or the like, so as to improve the stability and adjustment accuracy of the shading blades 1120 when moving and adjusting along the X direction or the Y direction.

[0098] In one embodiment, if Figure 3 , Figure 5-6 As shown, the side of the pressing plate 1130 of at least one of the aperture assemblies 1100 facing the first light-transmitting window 1111 is provided with a chamfer 1131 away from the light-shielding blade 1120. In a specific lithography device, the pressing plate 1130 provided with the chamfer 1131 is located on the light-emitting side, so as to prevent the light emitted from the slit window A from being blocked.

[0099] In one embodiment, if Figure 3As shown, the two aperture assemblies are arranged on one side of the pressure plate. At this time, the light shielding blades 1120 in the two aperture assemblies can be ensured to be as close as possible, thereby ensuring the quality of the formed slit window A to improve the exposure effect, and helping to reduce the overall width of the aperture module. Of course, those skilled in the art know that an appropriate gap should be maintained between the two sets of light shielding blades 1120 to prevent interference between the two sets of blades during the adjustment of the slit window A.

[0100] Preferably, the thickness of the pressing plate is the same as that of the shading blade 1120, so that the two shading plates can be as close as possible during assembly, that is, the two sets of blades can be as close to each other as possible, thereby improving the high quality of light transmittance of the assembled light-transmitting slit window.

[0101] In order to prevent light leakage at the angle between the two L-shaped light shielding blades 1120 of the aperture assembly, the pressure plate 1130 needs to be designed to be closer to the inner angle vertex of the L-shape. However, in this case, when the two sets of light shielding blades 1120 are about to touch or touch (that is, when the slit window A is about to close or close), there will be contact and friction between the two sets of light shielding blades 1120. In order to prevent this problem from occurring, refer to Figure 3 to Figure 5 , Fig. 9 In this embodiment, in the aperture assembly 1100, the reverse extension lines of the inner sides of the two light shielding blades 1120 (such as Fig. 9 The projection of the pressing plate 1130 on the plane where the light shielding blade 1120 is located is located in the first area, and there is a spacing area γ between the pressing plate 1130 and at least one of the two reverse extension lines. When the two sets of light shielding blades 1120 are about to contact or are in contact, the contact area between the pressing plate 1130 and the light shielding blades 1120 can be reduced, friction can be reduced, and collision can be effectively avoided.

[0102] Specifically, in this embodiment, the pressing plate 1130 is a quadrilateral that is close to a rectangle. Fig. 9 , and its two sides respectively have angles α and β with the two reverse extension lines to form a spacing area γ.

[0103] In one embodiment, if Figure 1-2 , Figure 10 to Figure 14 As shown,

[0104] The driving module includes two driving assemblies, which are used to drive the shading plates in the two aperture assemblies to move along the X direction and the Y direction respectively;

[0105] The drive assembly comprises:

[0106] An X-direction driving unit 2110, whose power output end can move along the X-direction;

[0107] A Y-direction driving unit 2120, whose power output end can move along the Y direction; and

[0108] A mounting plate 2130, wherein the mounting plate 2130 is arranged in parallel with the light shielding plate 1110, and a second light-transmitting window 2131 is arranged on the mounting plate 2130, so that the projection of the slit window A on the mounting plate can be located in the second light-transmitting window 2131;

[0109] Among them, one of the X-direction drive unit 2110 and the Y-direction drive unit 2120 (the X-direction drive unit in this embodiment) is arranged on the frame, and the power output end of the drive unit (X-direction drive unit) is connected to the mounting plate 2130; the other of the X-direction drive unit and the Y-direction drive unit (the Y-direction drive unit in this embodiment) is arranged on the mounting plate 2130, and the power output end of the drive unit (Y-direction drive unit) is arranged on the shading plate 1110 of the aperture assembly.

[0110] This embodiment provides a specific implementation scheme of a driving module. In this embodiment, since the shading plate is arranged on the mounting plate 2130 through the Y-direction driving unit 2120, the X-direction driving unit can drive the shading plate 1110 to move in the X direction by driving the mounting plate 2130 to move in the X direction; in addition, the Y-direction driving unit 2120 can drive the shading plate 1110 to move in the Y direction relative to the mounting plate 2130, thereby achieving the shading plate 1110 to move in the X direction and the Y direction through the X-direction driving unit 2110 and the Y-direction driving unit 2120. Thus, the two driving components can respectively drive the two shading plates 1110 to move in the X direction and the Y direction, so as to drive the shading blade 1120 to move to adjust the size and position of the slit window A.

[0111] Existing linear motion modules can be selected for the X-direction drive unit 2110 and the Y-direction drive unit 2120. In this embodiment, the X-direction drive unit 2110 and the Y-direction drive unit 2120 are both screw modules. Those skilled in the art know that the main structure of the screw module includes a screw, a nut disposed on the screw, and a motor that drives the screw to rotate. In this case, the power output end is the nut disposed on the screw.

[0112] In one embodiment, if Figure 1-2 , Figure 10 to Figure 14 As shown,

[0113] The drive assembly also includes:

[0114] A first dovetail guide rail 2140 and a first slider 2150 cooperate with the first dovetail guide rail 2140, the first dovetail guide rail 2140 and the first slider 2150 are respectively arranged on the frame and the mounting plate 2130, and the arrangement direction of the first dovetail guide rail 2140 is the same as the movement direction of the power output end of the drive unit arranged on the frame (in this embodiment, the drive unit is an X-direction drive unit 2110, therefore, it can be known that in this embodiment, the first dovetail guide rail 2140 is arranged along the X-direction); and / or,

[0115] The second dovetail guide rail 2160 and the second slider 2170 cooperate with the second dovetail guide rail 2160, the second dovetail guide rail 2160 and the second slider 2170 are respectively arranged on the mounting plate 2130 and the shading plate 1110, and the setting direction of the second dovetail guide rail 2160 is the same as the movement direction of the power output end of the driving unit arranged on the mounting plate 2130 (in the present embodiment, the driving unit is the Y-direction driving unit 2120, therefore, it can be known that in the present embodiment, the second dovetail guide rail 2160 is arranged along the Y-direction).

[0116] The number of the first dovetail guide rail 2140 and the second dovetail guide rail 2160 may be more than one, such as one or two parallel rails. When two parallel rails are provided, the movement accuracy of the sunshade 1110 can be improved.

[0117] The number of first sliders 2150 or second sliders 2170 on each guide rail can be determined according to the length of the structure connected to the slider (such as a mounting plate or a shading plate), and more than one slider can be provided. Specifically, one slider can be provided; when the structure connected to the slider is long, two first sliders 2150 or second sliders 2170 can be provided to ensure the movement accuracy of the shading plate 1110.

[0118] Based on the previous embodiment, the present embodiment further introduces dovetail guides (first dovetail guide 2140, second dovetail guide 2160) and sliders (first slider 2150, second slider 2170) to further limit the movement of the mounting plate 2130 and the light shielding plate 1110. Since the movement limitation accuracy of the dovetail guides and sliders is much greater than that of general linear motion modules (such as lead screw modules), the movement accuracy of the light shielding plate 1110 can be improved, thereby improving the movement stability and adjustment accuracy of the light shielding blade 1120, ensuring the light shielding effect, and improving the exposure quality.

[0119] In addition, the X-direction driving unit and / or the Y-direction driving unit further include a limiting component, which limits the movement stroke of the shading plate. The limiting component can be a mechanical limiter, such as setting a limiting block directly or indirectly fixed to the frame to limit the movement stroke of the mounting plate 2130, thereby limiting the movement stroke of the shading plate 1110 in the X direction, and / or setting a limiting block directly or indirectly fixed to the mounting plate 2130 to limit the movement stroke of the shading plate 1110 in the Y direction; of course, a limit sensor can also be used for limiting.

[0120] In one embodiment, if Figure 1-2 As shown, the frame includes: a first substrate 3110; a beam 3120, the beam 3120 is parallel to the first substrate 3110; a first side plate 3130, the first side plate 3130 is arranged between the first substrate 3110 and the beam 3120 for connecting the first substrate 3110 and the beam 3120; wherein, one of the X-direction drive unit and the Y-direction drive unit (the X-direction drive unit 2110 in this embodiment) is arranged on the beam of the frame, and the power output end of the drive unit (X-direction drive unit 2110) is arranged on the mounting plate.

[0121] This embodiment provides a setting scheme for the frame in the variable aperture, such as Figure 1-2 As shown, in this solution, the X-direction driving unit 2110 can be arranged on the beam 3120, and the power output end of the X-direction driving unit 2110 can drive the mounting plate 2130 to move along the X-direction. At the same time, in order to ensure the movement accuracy of the mounting plate 2130, the first dovetail guide rail can be arranged on the first substrate 3110 along the X-direction. This solution can reduce the width of the variable aperture as much as possible. At the same time, the mounting plate, the shading plate, the shading blade, the driving module, etc. can all be placed in the horizontal projection of the beam to maintain the stability of the blade during the adjustment process, so as to ensure the quality of the formed slit window A and improve the exposure effect.

[0122] Preferably, the crossbeam has a first symmetry plane along its length direction; the two mounting plates are parallel to the first symmetry plane, located on both sides of the first symmetry plane, and are equidistant from the first symmetry plane; the shading plates of the two aperture assemblies are parallel to the first symmetry plane, located on both sides of the first symmetry plane, and are equidistant from the first symmetry plane.

[0123] In this application, a "symmetry plane" refers to a plane that can divide an object into two parts that are completely symmetrical in shape, size and distribution. For example, when the "crossbeam" in this application is U-shaped, the "symmetry plane" refers to a plane that is perpendicular to the three plates of the "crossbeam" at the same time.

[0124] Through this preferred solution, it is possible to further ensure that the mass distribution of the entire variable iris is balanced, thereby improving the stability of the shading blade during the adjustment process.

[0125] In another embodiment, Figures 13-14 As shown, another scheme of a rack is provided, the rack comprising: a second substrate 3210; a fixing plate 3220, two fixing plates 3220 are arranged in parallel, both of the fixing plates are arranged vertically on the second substrate 3210, and both of the fixing plates are provided with a third light-transmitting window 3221, so that the projection of the slit window A on the fixing plate 3220 can be located in the third light-transmitting window 3221; wherein, one of the X-direction driving unit 2110 and the Y-direction driving unit 2120 (the X-direction driving unit 2110 in this embodiment) is arranged on the fixing plate 3220 of the rack, and the power output end of the driving unit (X-direction driving unit 2110) is arranged (directly / indirectly fixed) on the mounting plate 2130 (the two are connected by a connecting piece).

[0126] This embodiment provides another arrangement scheme of the frame in the variable aperture, such as Figure 13-14 As shown, in this solution, the X-direction driving unit 2110 can be arranged on the fixing plate 3220, and the power output end of the X-direction driving unit 2110 can drive the mounting plate 2130 to move along the X-direction. At the same time, in order to ensure the movement accuracy of the mounting plate 2130, the first dovetail guide rail 2140 can be arranged on the fixing plate 3220 along the X-direction. Compared with the above-mentioned solution, this solution omits the crossbeam structure, and a fixing plate 3220 is respectively arranged on the outer sides of the two mounting plates, and the two fixing plates 3220 are both fixed on the second substrate 3210. Therefore, the width of the two fixing plates is increased and the height is reduced compared with the previous embodiment in terms of the overall width, which is suitable for the installation of the photolithography machine structure with ample space in the internal width direction. At the same time, since the fixing plates are arranged on both sides of the second substrate 3210, and the two fixing plates are also symmetrically arranged, the overall operation stability thereof is improved to a certain extent compared with the previous embodiment.

[0127] Preferably, the second substrate 3210 has a second symmetry plane along its length direction; the two fixing plates 3220 are parallel to the second symmetry plane, and are located on both sides of the second symmetry plane, and are equidistant from the second symmetry plane; the two mounting plates 2130 are parallel to the second symmetry plane, and are located on both sides of the second symmetry plane, and are equidistant from the second symmetry plane; the two shading plates 1110 of the aperture assembly are parallel to the second symmetry plane, and are located on both sides of the second symmetry plane, and are equidistant from the first symmetry plane. This can further ensure that the mass distribution of the entire variable aperture is balanced, and improve the stability of the shading blade during the adjustment process.

[0128] In one embodiment, if Figure 1-2 , Fig.13 , Fig.15 As shown, the frame (such as the first substrate 3110 / second substrate 3210) is provided with a through threaded hole; the frame also includes: a wire sleeve 3300, the wire sleeve 3300 is cylindrical and provided with an external thread matching the threaded hole, the wire sleeve 3300 is axially provided with a through hole 3310, and at least one end face of the wire sleeve 3300 is provided with a connecting portion 3320 for rotating the wire sleeve.

[0129] Thus, a plurality of (e.g., arranged at four corners) thread sleeves 3300 can be arranged on the frame (e.g., on the first substrate 3110 / the second substrate 3210 mentioned above), and the external thread of the thread sleeve 3300 can cooperate with the internal thread of the threaded hole on the frame. By adjusting the height of the thread sleeve 3300 being screwed downward, the horizontality of the base can be adjusted. After the horizontality is adjusted, fasteners such as bolts are passed through the through hole 3310 of the thread sleeve to fix the frame inside the lithography machine.

[0130] Regarding the specific implementation form of the connecting portion 3320, the present application has no specific restrictions, as long as the wire sleeve 3300 can be rotated through it, such as a protrusion or groove set on the wire sleeve 3300. In this embodiment, it is a flat groove suitable for rotation by a flat screwdriver.

[0131] Based on the variable aperture provided in the above embodiment, those skilled in the art know that it can be applied to a lithography machine to obtain a new lithography machine.

[0132] Although the embodiments of the present application are described above, the present application is not limited to the above specific embodiments and application fields, and the above specific embodiments are merely illustrative and instructive, rather than restrictive. A person of ordinary skill in the art can make many forms under the guidance of this specification and without departing from the scope of protection of the claims of the present application, all of which belong to the scope of protection claimed in the present application.

Claims

1. A variable aperture, comprising a frame, an aperture module and a driving module arranged on the frame; wherein: The aperture module includes two aperture components, each of which includes: a shading plate, wherein a first light-transmitting window is provided in the shading plate; and, Light-shielding blades, two of which are fixedly arranged on the light-shielding plate at right angles and located on the sides of the first light-transmitting window; The two aperture assemblies are arranged overlappingly so as to form a slit window in the first light-transmitting window region through a total of four light-shielding blades on the two aperture assemblies; The driving module can drive the shading plates in the two aperture assemblies to move independently along the X direction and the Y direction to control the size and position of the slit window.

2. The variable aperture according to claim 1, wherein: In the aperture assembly, the two light shielding blades are arranged in an L shape, and the ends thereof close to each other have a bevel angle, so that the two light shielding blades are located in the same plane and can be spliced ​​into a right angle; The aperture assembly further comprises a pressing plate, which is connected to the shading plate to clamp and fix the adjacent ends of the two shading blades on the shading plate.

3. The variable aperture according to claim 2, wherein: The pressing plate is connected to the shading plate by two or more screws; The light-shielding blade is provided with screw holes corresponding to the screws, and at least one of the screw holes is larger than the outer contour of the corresponding screw, so that the angle of the light-shielding blade can be adjusted before the screw is tightened.

4. The variable aperture according to claim 2, wherein: A chamfer facing away from the light-shielding blade is provided on a side of the pressure plate of at least one of the aperture assemblies that faces the first light-transmitting window.

5. The variable aperture according to claim 2, wherein: The two aperture assemblies are arranged opposite to each other on one side of the pressure plate.

6. The variable aperture according to claim 5, wherein: In the aperture assembly, the reverse extension lines of the inner sides of the two shading blades define a first area, the projection of the pressure plate on the plane where the shading blades are located is located in the first area, and there is a spacing area between the pressure plate and at least one of the two reverse extension lines.

7. The variable aperture according to claim 1, wherein: The driving module includes two driving assemblies, which are used to drive the shading plates in the two aperture assemblies to move along the X direction and the Y direction respectively; The drive assembly comprises: An X-direction driving unit, whose power output end can move along the X-direction; A Y-direction driving unit, whose power output end can move along the Y direction; and, A mounting plate, the mounting plate is arranged parallel to the shading plate, and a second light-transmitting window is arranged on the mounting plate, so that the projection of the slit window on the mounting plate can be located in the second light-transmitting window; Among them, one of the X-direction drive unit and the Y-direction drive unit is arranged on the frame, and the power output end of the drive unit is connected to the mounting plate; the other of the X-direction drive unit and the Y-direction drive unit is arranged on the mounting plate, and the power output end of the drive unit is arranged on the shading plate of the aperture assembly.

8. The variable aperture according to claim 7, wherein: The drive assembly also includes: a first dovetail guide rail and a first slider matched with the first dovetail guide rail, the first dovetail guide rail and the first slider are respectively arranged on the frame and the mounting plate, and the arrangement direction of the first dovetail guide rail is the same as the movement direction of the power output end of the driving unit arranged on the frame; and / or, The second dovetail guide rail and the second slider cooperate with the second dovetail guide rail, the second dovetail guide rail and the second slider are respectively arranged on the mounting plate and the shading plate, and the setting direction of the second dovetail guide rail is the same as the movement direction of the power output end of the driving unit arranged on the mounting plate.

9. The variable aperture according to claim 7, wherein: The X-direction driving unit and / or the Y-direction driving unit further comprises a limiting component, and the limiting component limits the movement stroke of the shading plate.

10. The variable aperture according to claim 7, wherein: The frame comprises: a first substrate; a crossbeam, wherein the crossbeam is parallel to the first substrate; a first side plate, the first side plate being disposed between the first base plate and the crossbeam to connect the first base plate and the crossbeam; Wherein, a fixed end of one of the X-direction driving unit and the Y-direction driving unit is arranged on the crossbeam of the frame, and a power output end thereof is arranged on the mounting plate.

11. The variable aperture according to claim 10, wherein: The crossbeam has a first symmetry plane along its length; The two mounting plates are parallel to the first symmetry plane, located on both sides of the first symmetry plane, and are equidistant from the first symmetry plane; The shading plates of the two aperture assemblies are parallel to the first symmetry plane, located on both sides of the first symmetry plane, and are equidistant from the first symmetry plane.

12. The variable aperture according to claim 7, wherein: The frame comprises: a second substrate; A fixing plate, wherein the two fixing plates are arranged in parallel, the two fixing plates are arranged vertically on the second substrate, and the fixing plates are each provided with a third light-transmitting window, so that the projection of the slit window on the fixing plate can be located within the third light-transmitting window; Wherein, a fixed end of one of the X-direction driving unit and the Y-direction driving unit is arranged on the fixed plate of the frame, and a power output end thereof is arranged on the mounting plate.

13. The variable aperture according to claim 12, wherein: The second substrate has a second symmetry plane along its length direction; The two fixing plates are parallel to the second symmetry plane, located on both sides of the second symmetry plane, and are equidistant from the second symmetry plane; The two mounting plates are parallel to the second symmetry plane, located on both sides of the second symmetry plane, and are equidistant from the second symmetry plane; The shading plates of the two aperture assemblies are parallel to the second symmetry plane, located on both sides of the second symmetry plane, and are equidistant from the first symmetry plane.

14. The variable aperture according to claim 1, wherein: The frame is provided with a through threaded hole; The frame also includes: The wire sleeve is cylindrical and provided with an external thread matching the threaded hole. The wire sleeve is provided with a through hole along the axial direction. At least one end surface of the wire sleeve is provided with a connecting portion for rotating the wire sleeve.

15. A photolithography machine, wherein: The variable aperture according to any one of claims 1 to 14 is included.

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