Metal target material machining forming equipment and method

Abstract

The invention discloses a metal target machining forming device and method, and relates to the technical field of metal target machining, the forming device comprises a workbench, and the workbench is provided with a positioning table used for bearing a metal target; a plurality of groups of grinding rollers for positioning the metal target material are distributed on the positioning table in a circumferential array manner, each grinding roller is connected with a first rotating module for driving the grinding roller to synchronously rotate along the outer edge surface of the metal target material, and each grinding roller is also connected with a second rotating module for driving the grinding roller to rotate; an adjusting module is further arranged on the positioning table and used for adjusting the grinding rollers to synchronously move in the direction close to or away from the axis end of the metal target; a measuring module is further arranged on each grinding roller and is used for detecting the distance between the two groups of grinding rollers which are oppositely arranged in real time; the metal target does not need to be detached for measurement in the forming machining process, the synchronous detection effect can be achieved in the grinding process, and the machining efficiency is effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of metal target machining, and in particular to a metal target machining forming device and method. Background Art

[0002] Metal targets, as one of the indispensable key materials in the field of modern science and technology, are widely used in many fields such as thin film preparation, semiconductor manufacturing, optical coating, surface modification and scientific research. They are usually made of high-purity metals or alloys, with excellent physical and chemical properties and good processability.

[0003] The application of metal targets in semiconductors is mainly in the preparation process of semiconductor films, where the target material is deposited onto silicon wafers or other substrates through sputtering technology to form the desired thin film structure.

[0004] After the metal target is formed, it needs to be processed into a target with a specific size and shape by a high-precision machining device to ensure its precise connection and stable operation with the coating machine. For example, in sputtering coating equipment, the metal target is usually processed into a cylindrical shape. After the initial forming, it is processed into the required size by a turning processing device to ensure its compatibility with the sputtering coating equipment.

[0005] In actual application, the diameter of the metal target before turning is first measured, and then it is placed on a turning equipment for turning its outer edge surface so that the diameter of the target after turning meets the application requirements. However, the existing machining equipment does not have a precision detection function when machining the target, which results in the need to remove the target for precision detection. When the detection fails, the target needs to be reinstalled in the machining equipment for processing, which not only leads to increased repetitive work but also greatly affects the processing efficiency of the target. For example, the patent document with announcement number CN117655898B discloses an automatic polishing device for the side of a target and a method of using the same, and also discloses a technical solution for circumferential cutting of the outer edge surface of the target. However, it is impossible to accurately detect the diameter of the target during the cutting process, so it is easy to have excessive errors and cannot meet the processing requirements. Summary of the invention

[0006] The purpose of the present invention is to provide a metal target machining forming device and method to solve the following technical problems:

[0007] The existing target material cutting equipment is unable to detect the size of the target material in real time during the target material cutting process, which not only leads to increased duplication of work but also greatly affects the processing efficiency of the target material.

[0008] The purpose of the present invention can be achieved by the following technical solutions:

[0009] A metal target material machining and forming device comprises a workbench, wherein the workbench is provided with a positioning table for carrying the metal target material;

[0010] The positioning table is provided with a plurality of groups of grinding rollers for positioning the metal target in a circumferential array, each grinding roller is connected to a first rotating module driving it to rotate synchronously along the outer edge of the metal target, wherein each grinding roller is also connected to a second rotating module driving it to rotate;

[0011] The positioning platform is also provided with an adjustment module, which is used to adjust the grinding rollers to move synchronously toward or away from the axial end of the metal target;

[0012] Each of the grinding rollers is also provided with a measuring module, and the measuring module is used for real-time detection of the distance between two groups of grinding rollers arranged opposite to each other.

[0013] Preferably, the top end of each grinding roller is rotatably connected to the adjustment seat respectively, and the first rotating module includes a servo motor arranged on the positioning platform, a turntable is fixedly arranged on the output end of the servo motor, and a plurality of positioning plates corresponding to each grinding roller are fixedly arranged in a circumferential array on the turntable, and a positioning rod which is slidably plugged into the adjustment seat is symmetrically fixed on the end of the positioning plate away from the turntable.

[0014] Preferably, the servo motor is fixed on a mounting plate, the mounting plate is fixed to the lifting plate via a connecting rod, and the lifting plate is fixed to the lifting frame;

[0015] Wherein, a lifting mechanism is arranged on the positioning platform, a lifting end of the lifting mechanism is fixed to the connecting plate, and a top end of the connecting plate is fixed to the lifting frame.

[0016] Preferably, the second rotating module comprises a first rotating wheel fixedly arranged on each grinding roller, a positioning ring is coaxially sleeved on the outer side of the rotating disk, the positioning ring is fixed to each positioning plate, a plurality of groups of second rotating wheels are arranged in a circumferential array on the positioning plate, the number of the second rotating wheels is equal to that of the first rotating wheels, the second rotating wheels and the first rotating wheels are in the same plane, and each second rotating wheel is respectively located on a vertical line connecting the axis ends of two adjacent first rotating wheels, the distance between the second rotating wheel and the axis end of the rotating disk is smaller than the distance between the first rotating wheel and the axis end of the rotating disk, and a transmission belt is sleeved on each group of the first rotating wheels and the second rotating wheels;

[0017] A gear ring is fixedly arranged at the bottom of the mounting plate, and a first gear meshing with the gear ring is fixedly arranged on the second rotating wheel.

[0018] Preferably, for each group of the second rotating wheels, any one group of the second rotating wheels is rotatably arranged on a support, and the other groups of the second rotating wheels are rotatably arranged on a positioning ring;

[0019] Wherein, an elastic module connected to the support is arranged on one side of the positioning ring.

[0020] Preferably, the elastic module comprises a support plate fixedly arranged on the positioning ring, a limit seat is fixedly arranged on the support plate, and a guide rod fixed to the support seat is slidably inserted in the limit seat;

[0021] Wherein, a first spring is provided on the guide rod.

[0022] Preferably, the turntable is rotated toward one end of the positioning platform to arrange a pressure plate, and a bottom end of the pressure plate is arranged with a plurality of groups of protrusions in a circumferential array.

[0023] Preferably, the positioning platform is also provided with a plurality of groups of support rods in a circumferential array, a top seat is fixedly provided at the top of the support rod, the support rod is slidably connected to the positioning platform, a cylinder is provided below the positioning platform, a second spring is fixedly provided in the cylinder, the other end of the second spring is fixed to a telescopic rod slidably provided on the cylinder, and one end of the telescopic rod away from the cylinder is fixed to each support rod through a bracket;

[0024] Among them, the bottom of the cylinder is fixed to the U-shaped frame, the first rack is fixedly arranged on the two side plates of the U-shaped frame, the second gear meshing with the first rack is respectively arranged on both sides of the positioning platform, and L-shaped brackets are fixedly arranged on both sides of one end of the lifting frame away from the lifting mechanism, and the second rack for meshing with the other side of the second gear is fixedly arranged at the bottom end of the L-shaped bracket.

[0025] Preferably, the measuring module includes an infrared rangefinder fixedly arranged on each adjustment seat, and the infrared rangefinder is arranged on a side of each adjustment seat close to the axial end of the turntable.

[0026] A forming method of a metal target machining forming device comprises the following steps:

[0027] Before grinding, the diameter of the metal target is tested, and the initial value of the diameter of the metal target is compared with the value required for forming to obtain the difference;

[0028] The adjustment module adjusts the grinding rollers to move away from each other, and the metal target is embedded in the space formed by the grinding rollers. After the placement is completed, the grinding rollers are in contact with the outer edges of the metal targets;

[0029] The measuring module detects the distance between the two sets of grinding rollers arranged opposite to each other, and obtains the feed value of each grinding roller moving toward the axial end of the metal target based on the above difference;

[0030] The first rotating module drives each grinding roller to rotate synchronously along the outer edge of the metal target. During the rotation, the second rotating module drives each grinding roller to rotate on its own to grind the outer edge of the metal target.

[0031] The adjustment module adjusts each grinding roller to synchronously feed toward the axial direction of the metal target and perform grinding;

[0032] During the grinding process, the measuring module stops grinding when it detects that the feed values ​​of the two sets of relatively set grinding rollers meet the requirements.

[0033] Beneficial effects of the present invention:

[0034] (1) A plurality of groups of rubber vibration isolators are arranged on the workbench of the present invention, and the positioning platform is arranged on the rubber vibration isolators. When the metal target vibrates during the cutting and forming process, the rubber vibration isolators can achieve a shock absorption effect, thereby reducing the vibration influence on the metal target during the machining process, thereby effectively improving the machining accuracy of the metal target during machining;

[0035] (2) When grinding the outer edge of the metal target, the present invention first adjusts the grinding rollers to move away from each other through the adjustment module so that the metal target can be embedded in the space enclosed by the grinding rollers. After placement, the grinding rollers fit the outer edge of the metal target. Then, the first rotating module drives the grinding rollers to rotate synchronously along the outer edge of the metal target. During the rotation, the second rotating module drives the grinding rollers to rotate by themselves, thereby grinding the outer edge of the metal target. In the present invention, since the grinding rollers are arranged circumferentially, Therefore, when the metal target is placed in the space formed by the grinding rollers, based on the limiting effect of the grinding rollers, the distances between the grinding rollers and the axial ends of the metal target are equal, so that when the grinding rollers grind the metal target, the grinding degree can always be kept consistent, avoiding the phenomenon of uneven grinding on the outer edge of the metal target. During the grinding process, the adjustment module adjusts the grinding rollers to feed synchronously toward the axial direction of the metal target, and the feed amount is kept consistent, further improving the accuracy of the ground metal target so as to facilitate high-precision matching with the sputtering coating equipment.

[0036] (3) Before grinding the metal target, the present invention first detects the diameter of the metal target, compares the initial diameter value of the metal target with the value required for forming, and obtains a difference. When the metal target is placed in the space formed by the grinding rollers, the distance between the two groups of grinding rollers arranged opposite to each other is detected by the measuring module. Based on the above difference, the feed value of each grinding roller moving toward the axial end of the metal target is obtained. During the grinding process, when the measuring module detects that the feed value of the two groups of grinding rollers arranged opposite to each other meets the requirements, the grinding can be stopped. Therefore, the present invention does not need to disassemble the metal target for measurement during the grinding process, and can achieve the effect of synchronous detection during the grinding process, thereby effectively improving the grinding efficiency;

[0037] (4) The axial height of each grinding roller of the present invention is greater than the thickness of a group of metal targets. Therefore, during grinding, multiple groups of metal targets can be placed in the space enclosed by the grinding rollers at one time for grinding, further improving the grinding efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The present invention will be further described below in conjunction with the accompanying drawings.

[0039] Figure 1 It is a structural schematic diagram of a metal target machining and forming device of the present invention;

[0040] Figure 2 It is a structural schematic diagram of a positioning table in a metal target machining and forming device of the present invention;

[0041] Figure 3 It is a schematic diagram of the cross-section structure of a positioning table in a metal target machining and forming device of the present invention;

[0042] Figure 4 It is a structural schematic diagram of a transmission belt in a metal target machining and forming device of the present invention;

[0043] Figure 5 It is a structural schematic diagram of a top seat in a metal target machining and forming device of the present invention;

[0044] Figure 6 It is a structural schematic diagram of a support rod in a metal target machining forming device of the present invention;

[0045] Figure 7 It is a structural schematic diagram of a first rotating wheel in a metal target machining forming device of the present invention;

[0046] Figure 8 It is a structural schematic diagram of a second rotating wheel in a metal target machining forming device of the present invention.

[0047] In the figure: 1, workbench; 2, lifting mechanism; 3, positioning table; 4, metal target; 5, servo motor; 6, grinding roller; 101, rubber vibration isolator; 102, lateral adjustment mechanism; 201, connecting plate; 202, lifting frame; 203, L-shaped bracket; 204, lifting plate; 205, second rack; 206, mounting plate; 301, second gear; 302, first rack; 303, U-shaped frame; 304, cylinder; 305, second spring; 306, telescopic rod; 307, support rod; 308, top seat; 501, turntable; 502, pressure plate; 503, protrusion; 504, positioning ring; 505, gear ring; 506, first gear; 507, first spring; 508, limit seat; 509, support plate; 510, infrared rangefinder; 601, first rotating wheel; 602, transmission belt; 603, adjustment seat; 604, positioning rod; 605, positioning plate; 606, guide rod; 607, second rotating wheel; 608, support. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] Example 1

[0050] See also Figure 1-Figure 2 As shown, the present invention is a metal target machining and forming equipment, including a workbench 1, on which a positioning table 3 for carrying a metal target 4 is provided; specifically, in order to improve the vibration reduction effect of the metal target 4 during the machining and forming process, a plurality of groups of rubber vibration isolators 101 are arranged on the workbench 1 of this embodiment, and the positioning table 3 is arranged on the rubber vibration isolators 101. When the metal target 4 vibrates during the cutting and forming process, the rubber vibration isolators 101 can achieve a shock reduction effect, thereby reducing the vibration influence on the metal target 4 during the machining process, thereby effectively improving the machining accuracy of the metal target 4 during machining.

[0051] In this embodiment, please refer to Figure 3 , a plurality of groups of grinding rollers 6 for positioning the metal target 4 are arranged in a circumferential array on the positioning platform 3, each grinding roller 6 is connected to a first rotating module driving it to rotate synchronously along the outer edge of the metal target 4, wherein each grinding roller 6 is also connected to a second rotating module driving it to rotate;

[0052] In this embodiment, the grinding rollers 6 are arranged in four groups, and may also be arranged in six groups or eight groups, which is not limited to this.

[0053] Specifically, an adjustment module is also arranged on the positioning platform 3, and the adjustment module is used to adjust each grinding roller 6 to move synchronously toward or away from the axial end of the metal target 4;

[0054] It should be noted that, in this embodiment, when grinding the outer edge of the metal target 4, the grinding rollers 6 are first adjusted to move away from each other by the adjustment module, so that the metal target 4 can be embedded in the space enclosed by the grinding rollers 6. After placement, the grinding rollers 6 are in contact with the outer edge of the metal target 4. Then, the first rotating module drives the grinding rollers 6 to rotate synchronously along the outer edge of the metal target 4. During the rotation, the second rotating module drives the grinding rollers 6 to rotate by themselves, so that the outer edge of the metal target 4 can be ground. In this embodiment, since the grinding rollers 6 are circumferential, The arrangement is such that when the metal target 4 is placed in the space formed by the grinding rollers 6, based on the limiting effect of the grinding rollers 6, the distances between the grinding rollers 6 and the axial ends of the metal target 4 are equal, so that when the grinding rollers 6 grind the metal target 4, the grinding degree can always remain consistent, thereby avoiding uneven grinding on the outer edge surface of the metal target 4. During the grinding process, the adjustment module adjusts the grinding rollers 6 to feed synchronously toward the axial direction of the metal target 4, and the feed amount remains consistent, thereby further improving the accuracy of the ground metal target 4, so as to facilitate high-precision matching with the sputtering coating equipment.

[0055] As a further solution of this embodiment, each grinding roller 6 is also provided with a measuring module, and the measuring module is used to detect the distance between two groups of grinding rollers 6 arranged opposite to each other in real time;

[0056] It can be explained that, in this embodiment, before grinding the metal target 4, the diameter of the metal target 4 is first detected, and the initial value of the diameter of the metal target 4 is compared with the value required for forming to obtain a difference. When the metal target 4 is placed in the space enclosed by the grinding rollers 6, the spacing between the two groups of relatively arranged grinding rollers 6 is detected by the measuring module. Based on the above difference, the feed value of each grinding roller 6 moving toward the axial end of the metal target 4 is obtained. During the grinding process, when the measuring module detects that the feed value of the two groups of relatively arranged grinding rollers 6 meets the demand, the grinding can be stopped. Therefore, in this embodiment, there is no need to disassemble the metal target 4 for measurement during the grinding process, and the effect of synchronous detection can be achieved during the grinding process, thereby effectively improving the grinding efficiency.

[0057] In addition, see Figure 2 In this embodiment, the axial height of each grinding roller 6 is greater than the thickness of a group of metal targets 4. Therefore, during grinding, multiple groups of metal targets 4 can be placed in the space enclosed by the grinding rollers 6 at one time for grinding, thereby further improving the grinding efficiency.

[0058] Example 2

[0059] Based on Example 1, please refer to Figure 4 as well as Figure 7-Figure 8, the top end of each grinding roller 6 is respectively connected to the adjusting seat 603 for rotation, the first rotating module includes a servo motor 5 arranged on the positioning platform 3, the output end of the servo motor 5 is fixedly provided with a turntable 501, and a plurality of groups of positioning plates 605 corresponding to each grinding roller 6 are fixedly arranged in a circumferential array on the turntable 501, and a positioning rod 604 slidably plugged with the adjusting seat 603 is symmetrically fixedly arranged at one end of the positioning plate 605 away from the turntable 501; it can be explained that when driving each grinding roller 6 to move circumferentially along the outer edge surface of the metal target 4, the servo motor 5 is first started to drive the turntable 501 to rotate, and the turntable 501 can drive the grinding roller 6 to rotate synchronously through the positioning plate 605, the positioning rod 604 and the adjusting seat 603;

[0060] Correspondingly, when the adjustment module adjusts each grinding roller 6 to move toward or away from the axial end of the metal target 4, the grinding roller 6 drives the adjustment seat 603 to slide synchronously along the positioning rod 604 to improve the stability of the grinding roller 6 during movement.

[0061] In this embodiment, two groups of positioning rods 604 are provided, and the specific number is not limited.

[0062] In order to facilitate the loading and unloading of the metal target material 4, in this embodiment, please refer to Figure 1-Figure 3 , the servo motor 5 is fixed on the mounting plate 206, the mounting plate 206 is fixed to the lifting plate 204 through a connecting rod, the lifting plate 204 is fixed to the lifting frame 202, wherein a lifting mechanism 2 is arranged on the positioning table 3, the lifting end of the lifting mechanism 2 is fixed to the connecting plate 201, and the top of the connecting plate 201 is fixed to the lifting frame 202; it can be explained that when loading and unloading, the present embodiment can drive the connecting plate 201 and the lifting frame 202 to rise through the lifting mechanism 2, and the lifting frame 202 drives the servo motor 5 to rise through the lifting plate 204 and the mounting plate 206, and then can synchronously drive each grinding roller 6 to rise to a certain height, so that there is enough spacing between it and the positioning table 3, so as to facilitate the placement or removal of the metal target 4.

[0063] In addition, in order to facilitate fine adjustment of the horizontal position of the positioning table 3 on the workbench 1, in this embodiment, a lateral adjustment mechanism 102 is fixedly arranged on the workbench 1, and the driving end of the lateral adjustment mechanism 102 is fixed to the lifting mechanism 2;

[0064] The lifting mechanism 2 and the lateral adjustment mechanism 102 in this embodiment may adopt a screw nut transmission mechanism or a synchronous belt transmission mechanism, which is not limited thereto.

[0065] See also Figure 3-Figure 4 as well as Figure 7-Figure 8The second rotating module includes a first rotating wheel 601 fixedly arranged on each grinding roller 6, a positioning ring 504 is coaxially sleeved on the outer side of the rotating disk 501, and the positioning ring 504 is fixed to each positioning plate 605. A plurality of groups of second rotating wheels 607 are arranged in a circumferential array on the positioning plate 605. The number of the second rotating wheels 607 is equal to that of the first rotating wheels 601. The second rotating wheels 607 and the first rotating wheels 601 are in the same plane, and each second rotating wheel 607 is respectively located on a vertical line connecting the axis ends of two adjacent first rotating wheels 601. The distance between the second rotating wheel 607 and the axis end of the rotating disk 501 is smaller than the distance between the first rotating wheel 601 and the axis end of the rotating disk 501. A transmission belt 6 is sleeved on each group of the first rotating wheels 601 and the second rotating wheels 607. 02, wherein a gear ring 505 is fixedly arranged at the bottom of the mounting plate 206, and a first gear 506 meshing with the gear ring 505 is fixedly arranged on the second rotating wheel 607; it can be explained that when the servo motor 5 of this embodiment drives each grinding roller 6 to move circumferentially around the outer edge of the metal target 4, it can synchronously drive each second rotating wheel 607 to move circumferentially, and the second rotating wheel 607 can drive the second rotating wheel 607 to rotate by meshing with the gear ring 505 through the first gear 506 during the movement, and the second rotating wheel 607 can synchronously drive the grinding roller 6 to rotate by means of the transmission belt 602 and the first rotating wheel 601, so that the grinding roller 6 can synchronously rotate by itself during the circumferential movement to grind the outer edge of the metal target 4.

[0066] As a further solution of this embodiment, for each group of second rotating wheels 607, any one group of second rotating wheels 607 is rotatably arranged on the support 608, and the other groups of second rotating wheels 607 are rotatably arranged on the positioning ring 504, wherein an elastic module connected to the support 608 is arranged on one side of the positioning ring 504; it can be explained that, in the initial state, based on the setting of the elastic module, the distance between the axis of the second rotating wheel 607 installed on the support 608 and the axis of the turntable 501 is smaller than the distance between the axis of the other groups of second rotating wheels 607 and the axis of the turntable 501, and based on the limitation of the transmission belt 602, the distance between the axis of each grinding roller 6 and the axis of the turntable 501 is the minimum value. When it is necessary to grind the metal target 4, The grinding roller 6 is synchronously pulled in a direction away from the axis of the turntable 501. During the movement of the grinding roller 6, the support 608 can be driven by the transmission belt 602 to synchronously move in a direction away from the axis end of the turntable 501. At this time, the elastic module is in a contracted state and generates elastic force. When the metal target material 4 is placed in the space enclosed by each grinding roller 6, the elastic module can be based on an elastic force of each grinding roller 6 moving toward the axis end of the turntable 501. Therefore, when the grinding roller 6 rotates, the outer edge surface of the metal target material 4 can be ground. In this embodiment, the elastic force of the elastic module can drive each grinding roller 6 to feed toward the axis end of the metal target material 4, and there is no need to use other feeding equipment for driving. The automation and stability are higher, and cost can be saved.

[0067] In this embodiment, the elastic module includes a support plate 509 fixedly arranged on the positioning ring 504, a limit seat 508 fixedly arranged on the support plate 509, a guide rod 606 fixed to the support 608 is slidably inserted in the limit seat 508, wherein the guide rod 606 is provided with a first spring 507; specifically, one end of the first spring 507 is fixed to the limit seat 508, and the other end is fixed to the support 608; it can be explained that during the movement of the support 608, the guide rod 606 can be driven to slide in the limit seat 508 to compress the first spring 507 and generate elastic force.

[0068] For further information, see Figure 2-Figure 3 as well as Figure 5-Figure 6 When the grinding roller 6 is grinding the metal target 4, in order to avoid the synchronous movement of the metal target 4, in this embodiment, the turntable 501 is rotated toward one end of the positioning platform 3 to arrange the pressure plate 502, and the bottom end of the pressure plate 502 is arranged in a circumferential array. A plurality of groups of protrusions 503 are arranged; it can be explained that when the lifting mechanism 2 drives the grinding roller 6 to move toward the positioning platform 3, the protrusion 503 can be pressed against the upper surface of the topmost metal target 4, thereby having the effect of pressing the metal target 4 and increasing the friction between the two to avoid the synchronous movement of the metal target 4.

[0069] In addition, a plurality of support rods 307 are arranged in a circumferential array on the positioning platform 3. A top seat 308 is fixedly arranged on the top of the support rod 307. The support rod 307 is slidably connected to the positioning platform 3. A cylinder 304 is arranged below the positioning platform 3. A second spring 305 is fixedly arranged in the cylinder 304. The other end of the second spring 305 is fixed to a telescopic rod 306 slidably arranged on the cylinder 304. The end of the telescopic rod 306 away from the cylinder 304 is fixed to each support rod 307 through a bracket. The bottom of the lifting frame 204 is fixed to the U-shaped frame 303, the first rack 302 is fixedly arranged on the two side plates of the U-shaped frame 303, the second gear 301 meshing with the first rack 302 is respectively arranged on both sides of the positioning platform 3, and the two sides of the lifting frame 202 away from the lifting mechanism 2 are respectively fixed with L-shaped brackets 203, and the bottom end of the L-shaped bracket 203 is fixedly arranged with a second rack 205 for meshing with the other side of the second gear 301; it can be explained that in the initial state, each top seat 308 The lower surface is in contact with the positioning platform 3. When positioning the metal target 4, the metal target 4 is placed on each top seat 308. When the lifting mechanism 2 drives the grinding roller 6 to descend, the L-shaped bracket 203 and the second rack 205 can be synchronously driven to descend. As the second rack 205 engages with the second gear 301, the second gear 301 can synchronously drive the U-shaped bracket 303 to rise, thereby driving the cylinder 304 to rise. The cylinder 304 drives the top seat 308 to rise through the second spring 305 and the telescopic rod 306 until the top seat 308 is separated from the positioning platform 3 and a certain distance is generated. On the one hand, the top seat 308 can cooperate with the pressure plate 502 to achieve the effect of clamping and positioning the metal target 4. On the other hand, the topmost metal target 4 can be separated from the positioning platform 3, so that the grinding roller 6 can descend to the bottom of the metal target, and then the bottommost metal target 4 can be fully ground. At the same time, based on the setting of the second spring 305, the shock absorption effect of the metal target 4 is further improved during the grinding process.

[0070] Also, see Figure 8 The measuring module includes an infrared rangefinder 510 fixedly arranged on each adjustment seat 603, and the infrared rangefinder 510 is arranged on the side of each adjustment seat 603 close to the axial end of the turntable 501; since the number of adjustment seats 603 arranged in this embodiment is an even number, each adjustment seat 603 is relatively arranged along the axis of the turntable 501, and the distance between the two can be detected by the infrared rangefinder 510.

[0071] A metal target machining method comprises the following steps:

[0072] See also Figure 1-Figure 2 , S1, before grinding, the diameter of the metal target 4 is detected, and the initial value of the diameter of the metal target 4 is compared with the value required for forming to obtain the difference;

[0073] S2, the adjustment module adjusts the grinding rollers 6 to move away from each other, and the metal target 4 is embedded in the space enclosed by the grinding rollers 6. After the placement is completed, the grinding rollers 6 are in contact with the outer edge of the metal target 4;

[0074] S3, the measuring module detects the distance between the two groups of grinding rollers 6 arranged opposite to each other, and obtains the feed value of each grinding roller 6 moving toward the axial end of the metal target 4 based on the above difference;

[0075] S4, the first rotating module drives each grinding roller 6 to rotate synchronously along the outer edge of the metal target 4. During the rotation, the second rotating module drives each grinding roller 6 to rotate on its own to grind the outer edge of the metal target 4;

[0076] S5, the adjustment module adjusts each grinding roller 6 to synchronously feed toward the axial direction of the metal target 4 and perform grinding;

[0077] S6. During the grinding process, when the measuring module detects that the feed values ​​of the two sets of grinding rollers 6 arranged opposite to each other meet the requirements, the grinding is stopped.

[0078] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, and a specific direction structure and operation, and therefore, cannot be understood as a limitation on the present invention. In addition, "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0079] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0080] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A metal target material machining and forming device, comprising a workbench (1), wherein the workbench (1) is provided with a positioning table (3) for carrying a metal target material (4); It is characterized in that A plurality of groups of grinding rollers (6) for positioning the metal target (4) are arranged in a circumferential array on the positioning platform (3), each grinding roller (6) being connected to a first rotating module that drives it to rotate synchronously along the outer edge of the metal target (4), wherein each grinding roller (6) is also connected to a second rotating module that drives it to rotate; The positioning platform (3) is also provided with an adjustment module, which is used to adjust the grinding rollers (6) to move synchronously toward or away from the axial end of the metal target (4); Each of the grinding rollers (6) is also provided with a measuring module, and the measuring module is used to detect the distance between two groups of grinding rollers (6) arranged opposite to each other in real time.

2. The metal target machining equipment according to claim 1, characterized in that: The top end of each grinding roller (6) is rotatably connected to the adjustment seat (603), and the first rotation module includes a servo motor (5) arranged on the positioning platform (3). A turntable (501) is fixedly arranged at the output end of the servo motor (5). A plurality of groups of positioning plates (605) corresponding to each grinding roller (6) are fixedly arranged in a circumferential array on the turntable (501). A positioning rod (604) slidably plugged into the adjustment seat (603) is symmetrically fixedly arranged at one end of the positioning plate (605) away from the turntable (501).

3. The metal target machining equipment according to claim 2, characterized in that: The servo motor (5) is fixed on a mounting plate (206), the mounting plate (206) is fixed to a lifting plate (204) via a connecting rod, and the lifting plate (204) is fixed to a lifting frame (202); Wherein, a lifting mechanism (2) is arranged on the positioning platform (3), a lifting end of the lifting mechanism (2) is fixed to a connecting plate (201), and a top end of the connecting plate (201) is fixed to a lifting frame (202).

4. The metal target machining equipment according to claim 3, characterized in that: The second rotating module comprises a first rotating wheel (601) fixedly arranged on each grinding roller (6); a positioning ring (504) is coaxially sleeved on the outer side of the rotating disk (501); the positioning ring (504) is fixed to each positioning plate (605); a plurality of groups of second rotating wheels (607) are arranged in a circumferential array on the positioning plate (605); the number of the second rotating wheels (607) is equal to that of the first rotating wheels (601); the second rotating wheels (607) and the first rotating wheels (601) are located on the same plane; and each second rotating wheel (607) is respectively located on a vertical line connecting the axial ends of two adjacent groups of first rotating wheels (601); the spacing between the second rotating wheel (607) and the axial end of the rotating disk (501) is smaller than the spacing between the first rotating wheel (601) and the axial end of the rotating disk (501); and a transmission belt (602) is sleeved on each group of the first rotating wheels (601) and the second rotating wheels (607); A gear ring (505) is fixedly arranged at the bottom of the mounting plate (206), and a first gear (506) meshing with the gear ring (505) is fixedly arranged on the second rotating wheel (607).

5. The metal target machining equipment according to claim 4, characterized in that: For each group of the second rotating wheels (607), any one group of the second rotating wheels (607) is rotatably arranged on the support (608), and the other groups of the second rotating wheels (607) are rotatably arranged on the positioning ring (504); Wherein, an elastic module connected to a support (608) is arranged on one side of the positioning ring (504).

6. The metal target machining equipment according to claim 5, characterized in that: The elastic module comprises a support plate (509) fixedly arranged on the positioning ring (504), a limit seat (508) fixedly arranged on the support plate (509), and a guide rod (606) fixed to the support seat (608) slidably inserted in the limit seat (508); Wherein, a first spring (507) is provided on the guide rod (606).

7. The metal target machining equipment according to claim 2, characterized in that: The rotating disk (501) is rotated toward one end of the positioning platform (3) to arrange a pressure plate (502), and a plurality of groups of protrusions (503) are arranged in a circumferential array at the bottom end of the pressure plate (502).

8. The metal target machining equipment according to claim 3, characterized in that: The positioning platform (3) is also provided with a plurality of groups of support rods (307) in a circumferential array, a top seat (308) is fixedly provided at the top of the support rod (307), the support rod (307) is slidably connected to the positioning platform (3), a cylinder (304) is provided below the positioning platform (3), a second spring (305) is fixedly provided in the cylinder (304), the other end of the second spring (305) is fixed to a telescopic rod (306) slidably provided on the cylinder (304), and one end of the telescopic rod (306) away from the cylinder (304) is fixed to each support rod (307) through a bracket; The bottom of the cylinder (304) is fixed to the U-shaped frame (303), the first rack (302) is fixedly arranged on the two side plates of the U-shaped frame (303), the second gear (301) meshing with the first rack (302) is respectively arranged on both sides of the positioning platform (3), the L-shaped bracket (203) is respectively fixedly arranged on both sides of the end of the lifting frame (202) away from the lifting mechanism (2), and the second rack (205) for meshing with the other side of the second gear (301) is fixedly arranged at the bottom end of the L-shaped bracket (203).

9. The metal target machining equipment according to claim 2, characterized in that: The measuring module comprises an infrared rangefinder (510) fixedly arranged on each adjustment seat (603), and the infrared rangefinder (510) is arranged on one side of each adjustment seat (603) close to the axial end of the turntable (501).

10. A forming method of a metal target machining forming device according to any one of claims 1 to 9, characterized in that: The steps include: Before grinding, the diameter of the metal target (4) is detected, and the initial value of the diameter of the metal target (4) is compared with the value required for forming to obtain a difference; The adjustment module adjusts the grinding rollers (6) to move away from each other, and the metal target material (4) is embedded in the space enclosed by the grinding rollers (6). After the placement is completed, the grinding rollers (6) are in contact with the outer edge surface of the metal target material (4); The measuring module detects the distance between two groups of grinding rollers (6) arranged opposite to each other, and obtains the feed value of each grinding roller (6) moving toward the axial end of the metal target (4) based on the above difference; The first rotating module drives each grinding roller (6) to rotate synchronously along the outer edge surface of the metal target material (4); during the rotation process, the second rotating module drives each grinding roller (6) to rotate on its own to grind the outer edge surface of the metal target material (4); The regulating module regulates each grinding roller (6) to synchronously feed toward the axial direction of the metal target material (4) and perform grinding; During the grinding process, the measuring module stops grinding when it detects that the feed values ​​of the two sets of grinding rollers (6) arranged opposite to each other meet the requirements.

Images