Composite coating glass as well as preparation method and equipment of composite coating for glass

Abstract

The invention relates to the technical field of vacuum coating, and provides composite coating glass, and a preparation method and equipment of a composite coating for the glass, and the method comprises the following steps: conveying the glass to a first coating chamber; coating a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness on the surface of the to-be-coated glass in sequence; after coating of the glass in the first coating chamber is completed, the glass is conveyed to a transition chamber so that the first molybdenum film layer and the first aluminum film on the surface of the glass can be stabilized; after the first molybdenum film layer and the aluminum film on the surface of the glass are stable, the glass is conveyed to a second film coating chamber; and successively coating a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass. According to the invention, a plurality of film layers made of different materials can be prepared on the surface of the glass at one time, so that the production efficiency is improved, the influence on the substrate quality due to excessive operation times is reduced, and unnecessary quality loss is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a composite coated glass, a method for preparing a composite coating for glass, and equipment. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the plated object (metal, semiconductor or insulator) to form a thin film, such as vacuum aluminum plating, vacuum chromium plating, etc.

[0003] Current coating equipment is often only capable of coating a single layer of film. When multiple layers of film made of different materials need to be coated, the equipment must be shut down, the required target material must be replaced, and then the film must be coated again on the basis of the first layer of film. The preparation of multi-layer films can only be completed by coating the films separately for multiple times. For example, the Chinese invention patent with application number CN202211366630.1 discloses a curved glass coating process, the components of which are the coating machine assembly, which is composed of an upper film rack, a front rough pumping chamber, a front fine pumping chamber, a front buffer fine pumping chamber, a coating chamber, a rear buffer fine pumping chamber, a rear fine pumping chamber, a rear rough pumping chamber, a deviation correction rack, and a lower film rack, wherein a vacuum pump is arranged at the bottom of the front rough pumping chamber, the front fine pumping chamber, the front buffer fine pumping chamber, the rear buffer fine pumping chamber, the rear fine pumping chamber, and the rear rough pumping chamber, and two vacuum pumps are arranged at the bottom of the coating chamber; the specific steps are as follows: S1: curved glass scanning; S2: background system calculation; S3: curved glass coating; S4: curved glass unloading. Since the substrate needs to be cleaned before coating, two separate cleanings are required for coating twice, resulting in multiple operations on the substrate, resulting in a loss of substrate quality yield, and each time a layer of film is coated and cleaned once, it will increase the factors affecting the stability of the film layer. That is to say, when coating multiple layers of different materials, the above-mentioned curved glass coating process not only requires stopping the equipment to replace the required target materials, but also requires cleaning the substrate multiple times. Its production efficiency is low and needs to be improved. Summary of the invention

[0004] In order to solve the problems existing in the existing glass vacuum coating, the present application provides a composite coated glass, a composite coating preparation method and equipment for glass, and the specific technical scheme is as follows:

[0005] A composite coated glass, wherein the composite coating comprises a first molybdenum film layer, an aluminum film layer and a second molybdenum film layer arranged in sequence, and the composite coating is condensed and deposited on the surface of the glass by a vacuum sputtering coating process, specifically comprising the following steps:

[0006] The pre-treated glass to be coated is transported to the first coating chamber;

[0007] Based on the vacuum sputtering coating process, a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness are successively coated on the surface of the glass to be coated;

[0008] After the glass is coated in the first coating chamber, the glass is transported to a transition chamber to wait for the first molybdenum film layer and the first aluminum film on the surface of the glass to be stable;

[0009] When the first molybdenum film layer and the aluminum film on the glass surface are stable, transporting the glass to a second coating chamber;

[0010] Based on the vacuum sputtering coating process, a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness are successively coated on the surface of the glass;

[0011] Wherein, the aluminum film layer is composed of the first aluminum film and the second aluminum film.

[0012] Preferably, the pretreatment method of the glass to be plated comprises the following steps:

[0013] Put the glass to be coated on the loading table, and remove the moisture and impurity gas on the surface of the glass to be coated through the front fine pumping chamber;

[0014] The glass to be coated, from which surface moisture and impurity gases have been removed, is transported to a front buffer chamber, where it is evacuated for gas isolation to meet the vacuum pressure requirement during coating of the glass to be coated.

[0015] Preferably, a specific method of sequentially coating a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the to-be-coated glass comprises the following steps:

[0016] Acquire a first basic parameter of the first coating chamber;

[0017] Constructing a first target optimization function according to the first basic parameter, the first preset molybdenum film thickness, and the first preset aluminum film thickness;

[0018] The target sputtering power and the transmission speed of the first coating chamber are controlled according to the first objective optimization function to successively coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the glass to be coated.

[0019] Preferably, the specific method of sequentially coating a second aluminum film having a second preset aluminum film thickness and a second molybdenum film layer having a second preset molybdenum film thickness on the surface of the glass comprises the following steps:

[0020] Acquire second basic parameters of the second coating chamber;

[0021] Constructing a second objective optimization function according to the second basic parameter, the second preset aluminum film thickness, the second preset molybdenum film thickness, and the first objective optimization function;

[0022] The target sputtering power and the transmission speed of the second coating chamber are controlled according to the second objective optimization function to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass.

[0023] A method for preparing a composite coating for glass, used for preparing the composite coating, wherein the composite coating comprises a first molybdenum film layer, an aluminum film layer and a second molybdenum film layer arranged in sequence, and the composite coating is condensed and deposited on the surface of the glass by a vacuum sputtering coating process, and the method for preparing the composite coating for glass comprises the following steps:

[0024] The pre-treated glass to be coated is transported to the first coating chamber;

[0025] Based on the vacuum sputtering coating process, a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness are successively coated on the surface of the glass to be coated;

[0026] After the glass is coated in the first coating chamber, the glass is transported to a transition chamber to wait for the first molybdenum film layer and the first aluminum film on the surface of the glass to be stable;

[0027] When the first molybdenum film layer and the aluminum film on the glass surface are stable, transporting the glass to a second coating chamber;

[0028] Based on the vacuum sputtering coating process, a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness are successively coated on the surface of the glass;

[0029] Wherein, the aluminum film layer is composed of the first aluminum film and the second aluminum film.

[0030] Preferably, the specific method of the pretreatment comprises the following steps:

[0031] Put the glass to be coated on the loading table, and remove the moisture and impurity gas on the surface of the glass to be coated through the front fine pumping chamber;

[0032] The glass to be coated, from which surface moisture and impurity gases have been removed, is transported to a front buffer chamber, where it is evacuated for gas isolation to meet the vacuum pressure requirement during coating of the glass to be coated.

[0033] Preferably, a specific method of sequentially coating a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the to-be-coated glass comprises the following steps:

[0034] Acquire a first basic parameter of the first coating chamber;

[0035] Constructing a first target optimization function according to the first basic parameter, the first preset molybdenum film thickness, and the first preset aluminum film thickness;

[0036] The target sputtering power and the transmission speed of the first coating chamber are controlled according to the first objective optimization function to successively coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the glass to be coated.

[0037] Preferably, the specific method of sequentially coating a second aluminum film having a second preset aluminum film thickness and a second molybdenum film layer having a second preset molybdenum film thickness on the surface of the glass comprises the following steps:

[0038] Acquire second basic parameters of the second coating chamber;

[0039] Constructing a second objective optimization function according to the second basic parameter, the second preset aluminum film thickness, the second preset molybdenum film thickness, and the first objective optimization function;

[0040] The target sputtering power and the transmission speed of the second coating chamber are controlled according to the second objective optimization function to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass.

[0041] A composite coating preparation device for glass, used to implement the composite coating preparation method for glass, the composite coating preparation device for glass comprising:

[0042] The first coating chamber is used to coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness on the surface of the to-be-coated glass;

[0043] A transition chamber, used for performing transition treatment on the glass after being coated in the first coating chamber;

[0044] A second coating chamber is used for coating a second aluminum film with a second preset aluminum film thickness and a second molybdenum film with a second preset molybdenum film thickness on the surface of the glass after the transition treatment;

[0045] The composite coating includes the first molybdenum film layer, the aluminum film layer and the second molybdenum film layer arranged in sequence, and the aluminum film layer is composed of the first aluminum film and the second aluminum film.

[0046] Preferably, the composite coating preparation equipment for glass further comprises:

[0047] A loading platform, used for loading the glass to be plated;

[0048] A front fine pumping chamber, used to remove water vapor and impurity gases on the surface of the glass to be plated;

[0049] A front buffer chamber, used for evacuating the gas for gas isolation, to meet the vacuum pressure requirement when coating the glass to be coated;

[0050] Among them, the front fine pumping chamber, the front buffer chamber, the first coating chamber, the transition chamber and the second coating chamber are connected in sequence, the first coating chamber includes a first molybdenum target, a first aluminum target, a second aluminum target and a third aluminum target arranged in sequence, and the second coating chamber includes a fourth aluminum target, a fifth aluminum target, a sixth aluminum target and a second molybdenum target arranged in sequence.

[0051] Beneficial effects of the present invention: The composite coating preparation method and equipment for glass of the present invention successively coats a first molybdenum film layer of a first preset molybdenum film thickness and a first aluminum film of a first preset aluminum film thickness on the glass to be coated in a first coating chamber, and after the first molybdenum film layer and the first aluminum film on the glass surface are stabilized in a transition chamber, successively coats a second aluminum film of a second preset aluminum film thickness and a second molybdenum film layer of a second preset molybdenum film thickness on the surface of the glass in a second coating chamber. The method and equipment can prepare multiple layers of film layers of different materials on the glass surface at one time, improve production efficiency, reduce the impact of too many operations on substrate quality, and avoid unnecessary quality loss. When coating multiple layers of film layers of different materials, there is no need to stop the equipment to replace the required target material, and there is no need to clean the substrate multiple times. This solves the problem that when coating multiple layers of film layers of different materials in the glass coating process, not only does it need to stop the equipment to replace the required target material, but it also needs to clean the substrate multiple times, resulting in low production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] The present invention can be further understood from the following description in conjunction with the accompanying drawings. The components in the figures are not necessarily drawn to scale, but the emphasis is placed on illustrating the principles of the embodiments. In different views, the same reference numerals designate corresponding parts.

[0053] Figure 1 It is a schematic diagram of the overall process of a method for preparing a composite coating for glass in one embodiment of the present invention;

[0054] Figure 2 is a flow chart of a specific method of preprocessing in one embodiment of the present invention;

[0055] Figure 3 1 is a schematic flow chart of a specific method for coating a first molybdenum film layer and a first aluminum film in one embodiment of the present invention;

[0056] Figure 4 1 is a schematic flow chart of a specific method for coating a second aluminum film and a second molybdenum film layer in one embodiment of the present invention;

[0057] Figure 5 It is a schematic diagram of the overall structure of a composite coating preparation device for glass in one embodiment of the present invention;

[0058] Figure 6 is a partial structural schematic diagram of a first coating chamber in one embodiment of the present invention;

[0059] Figure 7 It is a partial structural schematic diagram of the second coating chamber in one embodiment of the present invention.

[0060] Description of reference numerals:

[0061] 1. Loading stage; 2. Loading stage; 3. Film feeding chamber; 4. Front fine extraction chamber; 5. Front buffer chamber 1; 6. Front buffer chamber 2; 7. Front buffer chamber 3; 8. First coating chamber; 9. Transition chamber; 10. Second coating chamber; 11. Rear buffer chamber; 12. Rear fine extraction chamber; 13. Film discharge chamber; 14. Lowering stage 1; 15. Lowering stage 2; 16. Lowering stage; 80. First molybdenum target; 81. First aluminum target; 82. Second aluminum target; 83. Third aluminum target; 100. Fourth aluminum target; 101. Fifth aluminum target; 102. Sixth aluminum target; 103. Second molybdenum target. DETAILED DESCRIPTION

[0062] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with its embodiments. It should be understood that the specific implementation methods described herein are only used to explain the present invention and do not limit the protection scope of the present invention.

[0063] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0064] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0065] Embodiment 1:

[0066] This embodiment provides a composite coated glass, wherein the composite coating comprises a first molybdenum film layer, an aluminum film layer and a second molybdenum film layer arranged in sequence, and the composite coating is condensed and deposited on the surface of the glass by a vacuum sputtering coating process.

[0067] The specific method of condensing and depositing the composite coating on the surface of the glass by a vacuum sputtering coating process comprises the following steps:

[0068] In the first step, the pre-treated glass to be coated is transported to the first coating chamber.

[0069] Specifically, the pretreatment method of the glass to be coated includes the following steps: placing the glass to be coated on a coating table, and removing moisture and impurity gases on the surface of the glass to be coated through a front fine-evacuation chamber; transporting the glass to be coated with surface moisture and impurity gases removed to a front buffer chamber, and evacuating the chamber for gas isolation to meet the vacuum pressure requirement when coating the glass to be coated.

[0070] The glass to be coated can be loaded from the loading platform manually or by automated equipment such as a robot. According to actual needs, the front buffer chamber is divided into front buffer chamber 1, front buffer chamber 2 and front buffer chamber 3 in sequence. In addition, between the front buffer chamber and the loading platform, there are also a film feed chamber and a front fine extraction chamber. Since the specific structures of the loading platform, the film feed chamber, the front fine extraction chamber and the front buffer chamber are all conventional technical means in the art, they will not be described here.

[0071] The second step is to coat the surface of the glass to be coated with a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness in sequence based on a vacuum sputtering coating process;

[0072] The third step is to transport the glass to a transition chamber after the coating in the first coating chamber is completed, so as to wait for the first molybdenum film layer and the first aluminum film on the surface of the glass to be stabilized. Since stabilizing the coating on the surface of the coated glass by means of a transition chamber is a conventional technique in the art, it will not be described in detail here.

[0073] Step 4: After the first molybdenum film layer and the aluminum film on the glass surface are stabilized, the glass is transported to a second coating chamber;

[0074] Step 5: Based on the vacuum sputtering coating process, a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness are successively coated on the surface of the glass;

[0075] Wherein, the aluminum film layer is composed of the first aluminum film and the second aluminum film.

[0076] The specific sizes of the first preset molybdenum film thickness, the first preset aluminum film thickness, the second preset aluminum film thickness, and the second preset molybdenum film thickness can be adjusted according to actual needs. When the first molybdenum film layer, the aluminum film layer, and the second molybdenum film layer are vacuum sputtered, the glass transmission speed and the target sputtering power can be adjusted accordingly according to the specific thickness sizes of the first preset molybdenum film thickness, the first preset aluminum film thickness, the second preset aluminum film thickness, and the second preset molybdenum film thickness.

[0077] As a preferred technical solution, the specific method of sequentially coating a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the to-be-coated glass comprises the following steps:

[0078] 2.1. Obtain first basic parameters of the first coating chamber; the first basic parameters include but are not limited to target sputtering power, the number of different types of targets and glass transmission speed in the first coating chamber.

[0079] 2.2. Construct a first objective optimization function based on the first basic parameters, the first preset molybdenum film thickness and the first preset aluminum film thickness; the first objective optimization function can be understood as obtaining an objective function for minimizing the coating thickness error in the first coating chamber based on the coating thickness errors of different types of target materials in the first coating chamber at a certain glass transmission speed and sputtering power, that is, minimizing the coating thickness error in the first coating chamber.

[0080] 2.3. Control the target sputtering power and transmission speed of the first coating chamber according to the first objective optimization function, so as to successively coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the glass to be coated.

[0081] The target sputtering power and transmission speed of the first coating chamber are controlled by the first objective optimization function, so as to successively coat the first molybdenum film layer with a first preset molybdenum film thickness and the first aluminum film with a first preset aluminum film thickness on the surface of the glass to be coated, thereby minimizing the overall error of the coating thickness of the glass to be coated in the first coating chamber, thereby improving the overall quality and performance of the composite coating and the composite coated glass, and further avoiding unnecessary quality loss.

[0082] As a preferred technical solution, the specific method of coating a second aluminum film with a second preset aluminum film thickness and a second molybdenum film with a second preset molybdenum film thickness on the surface of the glass comprises the following steps:

[0083] 5.1. Obtain second basic parameters of the second coating chamber; the second basic parameters include but are not limited to target sputtering power, the number of different types of targets and glass transmission speed in the second coating chamber.

[0084] 5.2. Construct a second objective optimization function based on the second basic parameters, the second preset aluminum film thickness, the second preset molybdenum film thickness, and the first objective optimization function; the second objective optimization function can be understood as an objective function for obtaining the minimum coating thickness error in the second coating chamber based on the coating thickness errors of different types of target materials in the second coating chamber at a certain glass transmission speed and sputtering power, that is, minimizing the coating thickness error in the second coating chamber.

[0085] 5.3. Control the target sputtering power and transmission speed of the second coating chamber according to the second objective optimization function, so as to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film with a second preset molybdenum film thickness on the surface of the glass.

[0086] The target sputtering power and transmission speed of the second coating chamber are controlled by the second objective optimization function, so as to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film with a second preset molybdenum film thickness on the surface of the glass to be coated, thereby minimizing the overall error of the coating thickness of the glass to be coated in the second coating chamber, thereby improving the overall quality and performance of the composite coating and the composite-coated glass, and further avoiding unnecessary quality loss.

[0087] This embodiment also provides a method for preparing a composite coating for glass, which is used to prepare the composite coating, wherein the composite coating comprises a first molybdenum film layer, an aluminum film layer and a second molybdenum film layer arranged in sequence, and the composite coating is condensed and deposited on the surface of the glass by a vacuum sputtering coating process, such as Figure 1 As shown, the method for preparing the composite coating for glass comprises the following steps:

[0088] S1, transporting the pre-treated glass to be coated to the first coating chamber.

[0089] Preferably, if Figure 2 As shown, the specific method of the pre-processing comprises the following steps:

[0090] S10, placing the glass to be plated on a plate loading table, and removing moisture and impurity gases on the surface of the glass to be plated through a front fine pumping chamber.

[0091] S11, conveying the glass to be coated from which surface moisture and impurity gases are removed to a front buffer chamber, evacuating the chamber for gas isolation to meet the vacuum pressure requirement for coating the glass to be coated.

[0092] Since removing water vapor and impurity gases from the surface of the glass to be coated by the front fine pumping chamber and evacuating the front buffer chamber for gas isolation to meet the vacuum pressure requirement when coating the glass to be coated are both conventional technical means in the art, they will not be described in detail here.

[0093] S2, based on a vacuum sputtering coating process, coating a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the glass to be coated.

[0094] Preferably, if Figure 3 As shown, step S2 includes the following steps:

[0095] S20, obtaining first basic parameters of the first coating chamber; the first basic parameters include but are not limited to the target sputtering power, the number of different types of targets and the glass transmission speed in the first coating chamber.

[0096] S21, constructing a first objective optimization function according to the first basic parameter, the first preset molybdenum film thickness and the first preset aluminum film thickness.

[0097] S22, controlling the target sputtering power and the transmission speed of the first coating chamber according to the first objective optimization function, so as to successively coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the glass to be coated.

[0098] The target sputtering power and transmission speed of the first coating chamber are controlled by the first objective optimization function, so as to successively coat the first molybdenum film layer with a first preset molybdenum film thickness and the first aluminum film with a first preset aluminum film thickness on the surface of the glass to be coated, thereby minimizing the overall error of the coating thickness of the glass to be coated in the first coating chamber, thereby improving the overall quality and performance of the composite coating and the composite coated glass, and further avoiding unnecessary quality loss.

[0099] S3, when the glass is coated in the first coating chamber, the glass is transported to a transition chamber to wait for the first molybdenum film layer and the first aluminum film on the surface of the glass to be stable.

[0100] S4, when the first molybdenum film layer and the aluminum film on the glass surface are stabilized, transporting the glass to a second coating chamber.

[0101] S5, based on a vacuum sputtering coating process, coating a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass in sequence.

[0102] Preferably, if Figure 4 As shown, step S5 includes the following steps:

[0103] S50, obtaining a second basic parameter of the second coating chamber;

[0104] S51, constructing a second target optimization function according to the second basic parameters, the second preset aluminum film thickness, the second preset molybdenum film thickness, and the first target optimization function; the second target optimization function can be understood as obtaining the target function with the minimum coating thickness error in the second coating chamber according to the coating thickness errors of different types of target materials in the second coating chamber at a certain glass transmission speed and sputtering power and the coating thickness error of the glass after passing through the first target optimization function in the first coating chamber, that is, minimizing the coating thickness error in the second coating chamber.

[0105] S52, controlling the target sputtering power and the transmission speed of the second coating chamber according to the second objective optimization function, so as to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass.

[0106] The aluminum film layer is composed of the first aluminum film and the second aluminum film. The glass transmission speed in the first basic parameter is consistent with the glass transmission speed in the second basic parameter. Preferably, the first preset aluminum film thickness is equal to the second preset aluminum film thickness.

[0107] The method for preparing a composite coating for glass comprises the following steps: sequentially coating a first molybdenum film layer of a first preset molybdenum film thickness and a first aluminum film of a first preset aluminum film thickness on the to-be-coated glass in a first coating chamber, and after the first molybdenum film layer and the first aluminum film on the glass surface are stabilized in a transition chamber, sequentially coating a second aluminum film of a second preset aluminum film thickness and a second molybdenum film layer of a second preset molybdenum film thickness on the surface of the glass in a second coating chamber. The method can prepare multiple layers of film layers of different materials on the glass surface at one time, improve production efficiency, reduce the impact on substrate quality due to excessive number of operations, and avoid unnecessary quality loss. When coating multiple layers of film layers of different materials, there is no need to stop equipment to replace required target materials, and there is no need to clean the substrate multiple times. This solves the problem that when coating multiple layers of film layers of different materials in the glass coating process, not only does it need to stop equipment to replace required target materials, but it also needs to clean the substrate multiple times, resulting in low production efficiency.

[0108] Under certain transmission speed conditions, factors such as target material working temperature, power supply voltage, and target material purity will lead to errors between the preset target material sputtering power and the actual target material sputtering power. This error is reflected in the glass coating as an error in the thickness of the coating layer. Since the first coating chamber and the second coating chamber are equipped with multiple targets of different types, if the thickness error of each target material coating layer is not corrected, the error of the composite coating after multiple target material coatings will accumulate and increase, which may eventually lead to a large error in the preset total thickness of the multi-layer film.

[0109] The method for preparing a composite coating for glass constructs a first objective optimization function to minimize the overall error of the coating thickness of the glass to be coated in the first coating chamber, and takes the coating thickness error in the first coating chamber after the first objective optimization function into consideration to construct a second objective optimization function to minimize the overall error of the coating thickness of the glass to be coated in the second coating chamber. This can reduce the cumulative error of the composite coating after coating with multiple target materials, so that the actual total thickness of multiple film layers of the composite coating is consistent with the preset total thickness, thereby improving the overall quality and performance of the composite coating and the composite-coated glass, and further avoiding unnecessary quality loss.

[0110] This embodiment also provides a composite coating preparation device for glass, which is used to implement the composite coating preparation method for glass, such as Figure 5 As shown, the composite coating preparation equipment for glass includes a first coating chamber 8 , a transition chamber 9 and a second coating chamber 10 .

[0111] The first coating chamber 8 is used to successively coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness on the surface of the glass to be coated; the transition chamber 9 is used to perform transition treatment on the glass after the coating treatment in the first coating chamber 8; the second coating chamber 10 is used to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass after the transition treatment.

[0112] The composite coating includes the first molybdenum film layer, the aluminum film layer and the second molybdenum film layer arranged in sequence, and the aluminum film layer is composed of the first aluminum film and the second aluminum film.

[0113] like Figure 5 As shown, the composite coating preparation equipment for glass further includes a loading platform 2, a front fine drawing chamber 4, and a front buffer chamber.

[0114] The loading platform 2 is used to load the glass to be coated; the front fine pumping chamber 4 is used to remove moisture and impurity gases on the surface of the glass to be coated; the front buffer chamber is used to evacuate the glass for gas isolation to meet the vacuum pressure requirements when coating the glass to be coated.

[0115] Among them, Figure 6 as well as Figure 7 As shown, the front fine pumping chamber 4, the front buffer chamber, the first coating chamber 8, the transition chamber 9 and the second coating chamber 10 are connected in sequence, the first coating chamber 8 includes a first molybdenum target 80, a first aluminum target 81, a second aluminum target 82 and a third aluminum target 83 arranged in sequence, and the second coating chamber 10 includes a fourth aluminum target 100, a fifth aluminum target 101, a sixth aluminum target 102 and a second molybdenum target 103 arranged in sequence.

[0116] The composite coating preparation equipment for glass also includes an upper sheet translation stage 1, a rear buffer chamber 11, a rear fine drawing chamber 12, a sheet discharge chamber 13, a lower sheet stage 14, a lower sheet stage 2 15, and a lower sheet translation stage 16. The front buffer chamber includes a front buffer chamber 1 5, a front buffer chamber 2 6, and a front buffer chamber 3 7.

[0117] Specifically, the upper film translation stage 1, the upper film stage 2, the film feeding chamber 3, the front fine drawing chamber 4, the front buffer chamber 1 5, the front buffer chamber 2 6, the front buffer chamber 3 7, the first coating chamber 8, the transition chamber 9, the second coating chamber 10, the rear buffer chamber 11, the rear fine drawing chamber 12, the film discharge chamber 13, the lower film stage 1 14, the lower film stage 2 15 and the lower film translation stage 16 are connected in sequence.

[0118] After the composite coating for the glass is prepared and the preparation of the multi-layer molybdenum+aluminum+molybdenum composite metal film is completed at one time, the glass with the composite coating can be transferred to the unloading table and unloaded manually or by a controlled robotic arm.

[0119] Embodiment 2:

[0120] It should be understood that this embodiment at least includes all the technical features of the above embodiments, and is further described in detail based on the above embodiments.

[0121] In this embodiment, the first objective optimization function is expressed as f1(X1)=f1(V,MT1,AT1,P 11 ,P 12 …P1n); wherein V represents the glass transmission speed, MT1 represents the first preset molybdenum film thickness, AT1 represents the first preset aluminum film thickness, P 11 represents the sputtering power of the first target in the first coating chamber, P 12 represents the sputtering power of the second target in the first coating chamber, P1n represents the sputtering power of the nth target in the first coating chamber, n represents the total number of targets in the first coating chamber, and f1(X1) represents the error value under the decision variable X1. The first objective optimization function f1(X1)=f1(V,MT1,AT1,P 11 ,P 12 …P1n) can be understood as finding a set of decision variables X1 that makes f1(X1) reach the minimum value.

[0122] Specifically, when the first preset thickness of the molybdenum film and the first preset thickness of the aluminum film are determined, the overall error of the coating thickness of the glass to be coated in the first coating chamber can be minimized by continuously changing the sputtering power of each target material and the glass transmission speed in the first coating chamber based on the optimization iteration method. The overall error can be obtained by calculating the weighted average of the coating errors of different target materials in the first coating chamber. In this way, the first objective optimization function f1(X1)=f1(V,MT1,AT1,P 11 ,P 12 …P1n), can reduce the error of the glass coating prepared in the first coating chamber as much as possible.

[0123] For the first objective optimization function f1(X1)=f1(V,MT1,AT1,P 11 ,P 12 …P1n), the thickness error between the actual thickness of the coating obtained by the preset target sputtering power at a certain glass transmission speed and the preset thickness can be obtained based on the finite element simulation method, or according to the historical operation data of the composite coating preparation equipment, by obtaining the thickness error curve function corresponding to different target sputtering powers at the preset transmission speed, and then obtaining it based on the thickness error curve function. In addition, in order to simplify the calculation, the technicians can also preset several glass transmission speeds in advance, and based on the preset glass transmission speed, the first preset molybdenum film thickness and the second preset aluminum film thickness, obtain the first target optimization function f1(X1)=f1(V,MT1,AT1,Pn) through an iterative optimization method. 11 ,P 12 ,P 13 ,P 14 ) is the minimum value of .

[0124] When the first coating chamber includes a first molybdenum target, a first aluminum target, a second aluminum target and a third aluminum target arranged in sequence, the first objective optimization function is expressed as f1(X1)=f1(V,MT1,AT1,P 11 ,P 12 ,P 13 ,P 14 ), where P 11 represents the first molybdenum target sputtering power, P 12 represents the first aluminum target sputtering power, P 13 represents the second aluminum target sputtering power, P 14 represents the sputtering power of the third aluminum target.

[0125] The second objective optimization function is expressed as f2(X2)=f2(V,MT2,AT2,ΔAT2,P 21 ,P 22...P2m); wherein V represents the glass transmission speed, MT2 represents the second preset molybdenum film thickness, AT2 represents the second preset aluminum film thickness, P 21 represents the sputtering power of the first target in the second coating chamber, P 22 represents the sputtering power of the second target in the second coating chamber, P2m represents the sputtering power of the mth target in the second coating chamber, m represents the total number of targets in the second coating chamber, f2(X2) represents the error value under the decision variable X2, and ΔAT2 represents the preset thickness compensation value of the second aluminum film. The second objective optimization function f2(X2)=f2(V,MT2,AT2,ΔAT2,P 21 ,P 22 …P2m) can be understood as finding a set of decision variables X2 that makes f2(X2) reach the minimum value.

[0126] Preferably, ΔAT2 is the coating thickness error after the first objective optimization function, that is, the preset thickness of the second aluminum film is compensated according to the minimized overall error of the coating thickness of the glass to be coated in the first coating chamber, so that the error between the actual total thickness of the composite coating finally obtained and the preset total thickness is minimized, thereby ensuring the overall quality and performance of the composite coating.

[0127] Specifically, when the second preset thickness of the molybdenum film and the second preset thickness of the aluminum film are determined, the overall error of the coating thickness of the glass to be coated in the second coating chamber can be minimized by continuously changing the sputtering power of each target material and the glass transmission speed in the second coating chamber based on the optimization iteration method. The overall error can be obtained by calculating the weighted average of the coating errors of different target materials in the second coating chamber. In this way, the second objective optimization function f2(X2)=f2(V,MT2,AT2,ΔAT2,P 21 ,P 22 The minimized error value of P2m) can reduce the error of the glass coating prepared in the second coating chamber as much as possible.

[0128] For the second objective optimization function f2(X2)=f2(V,MT2,AT2,ΔAT2,P 21 ,P 22 …P2m), the thickness error between the actual thickness of the coating obtained by the preset target sputtering power at a certain glass transmission speed and the preset thickness can be obtained based on the finite element simulation method, or according to the historical operation data of the composite coating preparation equipment, by obtaining the thickness error curve function corresponding to different target sputtering powers at the preset transmission speed, and then obtaining it based on the thickness error curve function.

[0129] When the second coating chamber includes a fourth aluminum target, a fifth aluminum target, a sixth aluminum target and a second molybdenum target arranged in sequence, the second objective optimization function is expressed as f2(X2)=f2(V,MT2,AT2,ΔAT2,P 21 ,P 22 …P2m); where P 21 represents the sputtering power of the fourth aluminum target, P 22 represents the fifth aluminum target sputtering power, P 23 represents the sixth aluminum target sputtering power, P 24 Represents the sputtering power of the second molybdenum target.

[0130] Through the first objective optimization function and the second objective optimization function, the overall error of the coating thickness of the glass to be coated in the first coating chamber and the second coating chamber is minimized based on the iterative optimization method, and factors such as the target material working temperature and power supply voltage, target material purity, etc. that will cause an error between the overall actual total thickness of the coating layer and the preset total thickness are taken into account. This can not only reduce the cumulative error of the composite coating after coating with multiple targets, so that the actual total thickness of multiple film layers of the composite coating is consistent with the preset total thickness, but also improve the overall quality and performance of the composite coating and composite-coated glass, further avoid unnecessary quality loss, and provide a new idea for the precise preparation of glass composite coatings.

[0131] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0132] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A composite coated glass, characterized in that: The composite coating comprises a first molybdenum film layer, an aluminum film layer and a second molybdenum film layer arranged in sequence, and the composite coating is condensed and deposited on the surface of the glass by a vacuum sputtering coating process, specifically comprising the following steps: The pre-treated glass to be coated is transported to the first coating chamber; Based on the vacuum sputtering coating process, a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness are successively coated on the surface of the glass to be coated; After the glass is coated in the first coating chamber, the glass is transported to a transition chamber to wait for the first molybdenum film layer and the first aluminum film on the surface of the glass to be stable; When the first molybdenum film layer and the aluminum film on the glass surface are stable, transporting the glass to a second coating chamber; Based on the vacuum sputtering coating process, a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness are successively coated on the surface of the glass; Wherein, the aluminum film layer is composed of the first aluminum film and the second aluminum film.

2. The composite coated glass according to claim 1, characterized in that: The pretreatment method of the glass to be plated comprises the following steps: Put the glass to be coated on the loading table, and remove the moisture and impurity gas on the surface of the glass to be coated through the front fine pumping chamber; The glass to be coated, from which surface moisture and impurity gases have been removed, is transported to a front buffer chamber, where it is evacuated for gas isolation to meet the vacuum pressure requirement during coating of the glass to be coated.

3. A composite coated glass as claimed in claim 2, characterized in that: The specific method of coating the surface of the to-be-coated glass with a first molybdenum film layer of a first preset molybdenum film thickness and a first aluminum film of a first preset aluminum film thickness in sequence comprises the following steps: Acquire a first basic parameter of the first coating chamber; Constructing a first target optimization function according to the first basic parameter, the first preset molybdenum film thickness, and the first preset aluminum film thickness; The target sputtering power and the transmission speed of the first coating chamber are controlled according to the first objective optimization function to successively coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the glass to be coated.

4. The composite coated glass according to claim 3, characterized in that: The specific method of coating the surface of the glass with a second aluminum film of a second preset aluminum film thickness and a second molybdenum film layer of a second preset molybdenum film thickness in sequence comprises the following steps: Acquire second basic parameters of the second coating chamber; Constructing a second objective optimization function according to the second basic parameter, the second preset aluminum film thickness, the second preset molybdenum film thickness and the first objective optimization function; The target sputtering power and the transmission speed of the second coating chamber are controlled according to the second objective optimization function to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass.

5. A method for preparing a composite coating for glass, used for preparing the composite coating according to any one of claims 1 to 4, wherein the composite coating comprises a first molybdenum film layer, an aluminum film layer and a second molybdenum film layer arranged in sequence, and the composite coating is condensed and deposited on the surface of the glass by a vacuum sputtering coating process, characterized in that: The method for preparing the composite coating for glass comprises the following steps: The pre-treated glass to be coated is transported to the first coating chamber; Based on the vacuum sputtering coating process, a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness are successively coated on the surface of the glass to be coated; After the glass is coated in the first coating chamber, the glass is transported to a transition chamber to wait for the first molybdenum film layer and the first aluminum film on the surface of the glass to be stable; When the first molybdenum film layer and the aluminum film on the glass surface are stable, transporting the glass to a second coating chamber; Based on the vacuum sputtering coating process, a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness are successively coated on the surface of the glass; Wherein, the aluminum film layer is composed of the first aluminum film and the second aluminum film.

6. The method for preparing a composite coating for glass according to claim 5, characterized in that: The specific method of the pretreatment comprises the following steps: Put the glass to be coated on the loading table, and remove the moisture and impurity gas on the surface of the glass to be coated through the front fine pumping chamber; The glass to be coated, from which surface moisture and impurity gases have been removed, is transported to a front buffer chamber, where it is evacuated for gas isolation to meet the vacuum pressure requirement during coating of the glass to be coated.

7. A method for preparing a composite coating for glass according to claim 6, characterized in that: The specific method of coating the surface of the to-be-coated glass with a first molybdenum film layer of a first preset molybdenum film thickness and a first aluminum film of a first preset aluminum film thickness in sequence comprises the following steps: Acquire a first basic parameter of the first coating chamber; Constructing a first target optimization function according to the first basic parameter, the first preset molybdenum film thickness, and the first preset aluminum film thickness; The target sputtering power and the transmission speed of the first coating chamber are controlled according to the first objective optimization function to successively coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film layer with a first preset aluminum film thickness on the surface of the glass to be coated.

8. The method for preparing a composite coating for glass according to claim 7, characterized in that: The specific method of coating the surface of the glass with a second aluminum film of a second preset aluminum film thickness and a second molybdenum film layer of a second preset molybdenum film thickness in sequence comprises the following steps: Acquire second basic parameters of the second coating chamber; Constructing a second objective optimization function according to the second basic parameter, the second preset aluminum film thickness, the second preset molybdenum film thickness, and the first objective optimization function; The target sputtering power and the transmission speed of the second coating chamber are controlled according to the second objective optimization function to successively coat a second aluminum film with a second preset aluminum film thickness and a second molybdenum film layer with a second preset molybdenum film thickness on the surface of the glass.

9. A composite coating preparation device for glass, used to implement the composite coating preparation method for glass according to any one of claims 5 to 8, characterized in that: The composite coating preparation equipment for glass comprises: The first coating chamber is used to coat a first molybdenum film layer with a first preset molybdenum film thickness and a first aluminum film with a first preset aluminum film thickness on the surface of the to-be-coated glass; A transition chamber, used for performing transition treatment on the glass after being coated in the first coating chamber; A second coating chamber is used for coating a second aluminum film with a second preset aluminum film thickness and a second molybdenum film with a second preset molybdenum film thickness on the surface of the glass after the transition treatment; The composite coating includes the first molybdenum film layer, the aluminum film layer and the second molybdenum film layer arranged in sequence, and the aluminum film layer is composed of the first aluminum film and the second aluminum film.

10. The composite coating preparation equipment for glass according to claim 9, characterized in that: The composite coating preparation equipment for glass also includes: A loading platform, used for loading the glass to be plated; A front fine pumping chamber, used to remove water vapor and impurity gases on the surface of the glass to be plated; A front buffer chamber, used for evacuating the gas for gas isolation, to meet the vacuum pressure requirement when coating the glass to be coated; Among them, the front fine pumping chamber, the front buffer chamber, the first coating chamber, the transition chamber and the second coating chamber are connected in sequence, the first coating chamber includes a first molybdenum target, a first aluminum target, a second aluminum target and a third aluminum target arranged in sequence, and the second coating chamber includes a fourth aluminum target, a fifth aluminum target, a sixth aluminum target and a second molybdenum target arranged in sequence.

Images