Manufacturing method of multi-capillary X-ray lens with large opening area

Abstract

The invention discloses a manufacturing method of a multi-capillary X-ray lens with a large opening area, based on the multi-capillary X-ray lens, the multi-capillary X-ray lens comprises a plurality of multi-capillary units, and the plurality of multi-capillary units are formed by arranging a plurality of glass tubes; a plurality of multi-capillary units are mutually adhered through drawing to form the multi-capillary X-ray lens, the aperture of an inlet of the multi-capillary X-ray lens is increased through dry etching to form the multi-capillary X-ray lens with a large opening area, and compared with a traditional multi-capillary X-ray lens, the multi-capillary X-ray lens can achieve higher incident X-ray collection rate.

Description

Technical Field

[0001] The invention relates to the technical field of X-ray lenses, and in particular to a method for manufacturing a polycapillary X-ray lens with a large opening area. Background Art

[0002] The single capillary X-ray lens is made of a single glass tube through a specific geometric shape, and has the advantages of long working distance, controllable divergence and sub-micron focal spot size. However, due to its small receiving solid angle and relatively low light source utilization, it is mostly used in synchrotron radiation sources, or in combination with other X-ray control devices, used in laboratory light sources.

[0003] The polycapillary X-ray lens is composed of multiple single capillary fibers composited through one or two drawing processes. Thousands of hollow glass capillary fibers are drawn through a drawing tower and then tightly bonded into a whole, which greatly improves the duty cycle of the lens and the receiving solid angle of X-rays. It is suitable for synchrotron radiation light sources and laboratory light sources. However, when X-rays within the receiving solid angle are incident on the entrance of the polycapillary X-ray lens, only the X-rays incident on the inner wall of the capillary can be effectively reflected, while the X-rays falling on the glass wall of the capillary entrance or the capillary gap cannot be used. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a method for manufacturing a polycapillary X-ray lens with a large opening area.

[0005] To achieve the above object, the technical solution adopted by the present invention is as follows:

[0006] A method for manufacturing a polycapillary X-ray lens with a large opening area is provided. The method comprises a parallel lens and a convergent lens. Both the parallel lens and the convergent lens comprise a plurality of polycapillary units, the sections of which are hexagonal and are formed by arranging a plurality of glass tubes. The plurality of polycapillary units are drawn and bonded to each other to form a polycapillary X-ray lens with a large opening area, and the section of the polycapillary X-ray lens with a large opening area is hexagonal.

[0007] Specifically, when the polycapillary X-ray lens with a large opening area is a parallel lens, the distance from the X-ray source to the entrance end of the parallel lens, i.e., the focal length f1, is 1 mm to 500 mm, the overall length L of the parallel lens is 10 mm to 150 mm, and the entrance end diameter D is in 1mm-50mm, outlet diameter D out 2mm-80mm, the aperture d at the entrance in 0.1μm-500μm, opening area 15%-95%, pore size d at the outlet out 0.2μm-800μm.

[0008] When the polycapillary X-ray lens with a large opening area is a converging lens, the distance from the X-ray source to the entrance of the converging lens, i.e., the focal length f1, is 1mm-500mm, the distance from the exit to the focus, i.e., the focal length f2, is 1mm-500mm, the overall length L of the converging lens is 10mm-300mm, and the entrance diameter D in 1mm-50mm, outlet diameter D out 1mm-50mm, the aperture d at the entrance in 0.1μm-500μm, opening area 15%-95%, pore size d at the outlet out 0.1μm-500μm.

[0009] The method for manufacturing the polycapillary X-ray lens with a large opening area comprises the following steps:

[0010] S1. Select high-precision borosilicate glass tubes as glass tubes for manufacturing polycapillary X-ray lenses, clean them with acid and alkali solutions, and blow dry them with high-pressure inert gas after cleaning;

[0011] S2, after the glass tube is heated and softened, it is drawn into a cylindrical hollow glass fiber tube through a wire drawing machine;

[0012] S3, arranging a plurality of hollow glass fiber tubes into a hexagonal prism shape, and drawing them through a wire drawing machine after heating and softening to form a composite body as a multi-capillary unit;

[0013] S4. Arrange multiple polycapillary units into a hexagonal prism to form a composite tube rod. After the composite tube rod is heated and softened, it is drawn through a wire drawing machine to form a polycapillary glass embryo tube with a specific curvature. The polycapillary glass embryo tube with a specific curvature is cut to obtain a polycapillary X-ray lens. When drawing the composite tube rod, the drawing speed of the wire drawing machine is controlled to draw the polycapillary glass embryo tube with a specific curvature. Specifically, the temperature of the heating furnace remains unchanged, the diameter of the composite tube rod is inversely proportional to the drawing speed, and the drawing speed of the wire drawing machine is controlled to draw the polycapillary glass embryo tube with a specific curvature. The composite tube rod is arranged in a hexagonal shape and is evenly stressed during the drawing process.

[0014] S5. The obtained polycapillary X-ray lens is tested by an X-ray optical detection system to see if it meets the design specifications. The entrance of the polycapillary X-ray lens that meets the design specifications is increased in diameter by dry etching to form a polycapillary X-ray lens with a large opening area. The entrance is a cutout of a hollow glass fiber tube. Specifically, when intercepting the polycapillary X-ray lens, a certain margin is reserved for the polycapillary X-ray lens. Δ L, Δ L is 2μm to 2mm.

[0015] Preferably, when the entrance aperture is increased by dry etching, the angle α between the incident ion beam and the polycapillary X-ray lens is -20° to +90°, the rotation speed of the polycapillary X-ray lens during etching is 1-60r / h, and the etching speed is 10-800nm / min.

[0016] Preferably, the height of the ion beam is the radius of the cutout end of the polycapillary X-ray lens.

[0017] Preferably, the width of the ion beam is in the range of 0.5-1000 times the entrance aperture.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] The present invention increases the entrance aperture of the polycapillary X-ray lens by dry etching to form a polycapillary X-ray lens with a large opening area, which can achieve a higher incident X-ray collection rate compared with a traditional polycapillary X-ray lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure when the polycapillary X-ray lens with a large opening area is a parallel lens;

[0021] Figure 2 It is a schematic diagram of the structure when the polycapillary X-ray lens with a large opening area is a converging lens;

[0022] Figure 3 This is a microscopic detail of the entrance of a polycapillary X-ray lens with a large opening area;

[0023] Figure 4 Schematic diagram of dry etching of polycapillary X-ray lens;

[0024] Figure 5 It is a multi-capillary etching morphology with a step-like cross section;

[0025] Figure 6 It is a multi-capillary etching morphology with a sloped cross-section. DETAILED DESCRIPTION

[0026] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The exemplary embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention.

[0027] Example 1

[0028] like Figure 3As shown, a polycapillary X-ray lens with a large opening area includes a plurality of polycapillary units 6, the cross-sections of the plurality of polycapillary units 6 are hexagonal, and are formed by arranging a plurality of glass tubes 61; the plurality of polycapillary units 6 are drawn and bonded to each other to form a polycapillary X-ray lens with a large opening area, and the cross-section of the polycapillary X-ray lens with a large opening area is hexagonal.

[0029] In practical applications, the polycapillary X-ray lens with a large opening area is divided into a parallel lens 2 and a converging lens 4, such as Figure 1 As shown, for a polycapillary X-ray lens with a large opening area, the parallel lens 2, the distance from the X-ray source 1 to the entrance end of the parallel lens 2, i.e., the focal length f1, is 1 mm to 500 mm, the overall length L of the parallel lens 2 is 10 mm to 150 mm, and the entrance end diameter D in 1mm-50mm, outlet diameter D out 2mm-80mm, the aperture d at the entrance in 0.1μm-500μm, opening area 15%-95%, pore size d at the outlet out 0.2μm-800μm.

[0030] like Figure 2 As shown, for a polycapillary X-ray lens with a large opening area, the convergent lens 4, the distance from the X-ray source 1 to the entrance end of the convergent lens 4, i.e., the focal length f1, is 1 mm-500 mm, the distance from the exit end to the focus 5 is the focal length f2, which is 1 mm-500 mm, the overall length L of the convergent lens 4 is 10 mm-300 mm, and the entrance end diameter D in 1mm-50mm, outlet diameter D out 1mm-50mm, the aperture d at the entrance in 0.1μm-500μm, opening area 15%-95%, pore size d at the outlet out 0.1μm-500μm.

[0031] The method for manufacturing the polycapillary X-ray lens with a large opening area comprises the following steps:

[0032] S1, select a high-precision borosilicate glass tube as the glass tube 61 for manufacturing the polycapillary X-ray lens, clean it with an acid-base solution, and blow dry it with a high-pressure inert gas after cleaning;

[0033] S2, the glass tube 61 is heated and softened and then drawn into a cylindrical hollow glass fiber tube by a wire drawing machine;

[0034] S3, arranging a plurality of hollow glass fiber tubes into a hexagonal prism, and drawing them through a wire drawing machine after heating and softening to form a composite body as a multi-capillary unit 6, wherein the plurality of hollow glass fiber tubes are arranged in a hexagonal shape and are evenly stressed during the drawing process;

[0035] S4, arranging a plurality of polycapillary units 6 into a hexagonal prism to form a composite tube rod, and after heating and softening, drawing the composite tube rod through a wire drawing machine to form a polycapillary glass embryo tube with a specific curvature, and obtaining a polycapillary X-ray lens by cutting the polycapillary glass embryo tube with a specific curvature. Specifically, when drawing the composite tube rod, the drawing speed of the wire drawing machine is controlled to draw the polycapillary glass embryo tube with a specific curvature, and the composite tube rod is arranged in a hexagonal shape and is subjected to uniform force during the drawing process;

[0036] S5. The obtained polycapillary X-ray lens is inspected by an X-ray optical detection system to see if it meets the design specifications. The inlet 7 of the polycapillary X-ray lens that meets the design specifications is increased in diameter by dry etching to form a polycapillary X-ray lens with a large opening area. The diameter of the inlet 7 is the diameter of the cutout of the hollow glass fiber tube. Preferably, when drawing the composite tube rod, the drawing speed of the wire drawing machine is controlled to draw a polycapillary glass embryo tube with a specific curvature.

[0037] Considering that the incident X-rays only rely on the upper inner wall of the hollow glass fiber tube for transmission, the angle of the incident ion beam 8 is set to only etch and expand the lower part of the hollow glass fiber tube. Specifically, when the aperture of the inlet 7 is increased by dry etching, the angle α between the incident ion beam 8 and the polycapillary X-ray lens is -20° to +90°. This design effectively improves the collection efficiency of the incident X-rays without affecting the transmission of X-rays. In order to ensure the uniformity of etching, the polycapillary X-ray lens needs to be rotated around the center line of the hollow glass fiber tube at its center during the etching process. Specifically, the rotation speed of the polycapillary X-ray lens is 1-60r / h, and the etching speed is 10-800nm / min.

[0038] When the caliber of the inlet 7 is increased by dry etching, in order to avoid affecting the upper inner wall of the hollow glass fiber tube, the size of the ion beam 8 is limited. Preferably, the height of the ion beam 8 is the radius of the cut end of the polycapillary X-ray lens, and the width of the ion beam 8 ranges from 0.5 to 1000 times the caliber of the inlet 7.

[0039] During the etching process, considering that the length of the polycapillary X-ray lens may be shortened, a certain margin is reserved when cutting the polycapillary X-ray lens. Δ L, preferably, ΔL is 2 μm to 2 mm.

[0040] See also Figure 4The schematic diagram of the dry etching polycapillary X-ray lens shown is that since the incident X-ray 11 only relies on the upper inner wall of the hollow glass fiber tube for transmission, when etching the hollow glass fiber tube, the incident angle of the ion beam 8 is set to ensure that only the lower part of the hollow glass fiber tube is etched and expanded. Specifically, the incident angle α of the ion beam 8 is -20° to +90°. This design effectively improves the collection efficiency of the incident X-rays without affecting the transmission of the X-rays 11. Specifically, when using the ion beam 8 for etching, in order to avoid affecting the upper inner wall of the hollow glass fiber tube, it is necessary to limit the size of the ion beam 8. Usually, the height of the ion beam 8 is set to the radius of the entrance end of the polycapillary X-ray lens; and the width of the ion beam 8 ranges from 0.5 to 1000 times the diameter of the entrance 7 of the polycapillary X-ray lens. In order to ensure the uniformity of etching, the polycapillary X-ray lens needs to be rotated around the center line of the hollow glass fiber tube at its center. During the etching process, the length of the polycapillary X-ray lens may be shortened. Therefore, when intercepting the polycapillary X-ray lens, a certain margin ΔL2μm to 2mm needs to be reserved at the entrance section.

[0041] like Figure 5 and Figure 6 The etching appearance of two capillary X-ray lenses with large opening areas is shown. During the etching process, the incident angle of the ion beam can be fixed to obtain the following Figure 4 The etching morphology shown in the figure can also be formed by changing the incident angle of the ion beam 8. Figure 5 and Figure 6 The step and slope morphology shown in .

[0042] exist Figure 4-6 In the figure, 9 is the etched portion of the hollow glass fiber tube, and 10 is the unetched portion of the hollow glass fiber tube.

[0043] The following is an example of a capillary X-ray lens with a large opening area, made of a borosilicate glass tube, with a fixed ion beam 8 incident angle α of 30° and an opening area of ​​70%. The front focal length f1 of the lens is 30 mm, the length L is 60 mm, and the entrance diameter D in The outlet diameter is 4 mm. out The entrance aperture is 2 mm. in The pore size at the outlet is 5 μm. out is 2.5μm.

[0044] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, technicians familiar with the field may make various corresponding changes and modifications based on the present invention, but these corresponding changes and modifications should all fall within the scope of protection of the claims attached to the present invention.

Claims

1. A method for manufacturing a polycapillary X-ray lens with a large opening area, based on the polycapillary X-ray lens, characterized in that: The invention comprises a plurality of polycapillary units (6), each of which is formed by arranging a plurality of glass tubes (61); the plurality of polycapillary units (6) are drawn and bonded to each other to form a polycapillary X-ray lens, and the inlet (7) of the polycapillary X-ray lens is increased in diameter by dry etching to form a polycapillary X-ray lens with a large opening area.

2. The method for manufacturing a polycapillary X-ray lens with a large opening area according to claim 1, characterized in that: The steps include: S1, selecting a high-precision borosilicate glass tube as the glass tube (61) for manufacturing a polycapillary X-ray lens, cleaning it with an acid-base solution, and drying it with a high-pressure inert gas after cleaning; S2, the glass tube (61) is heated and softened and then drawn into a cylindrical hollow glass fiber tube by a wire drawing machine; S3, arranging a plurality of the hollow glass fiber tubes into a hexagonal prism, and drawing them through a wire drawing machine after heating and softening to form a composite body as the multi-capillary unit (6); S4, arranging a plurality of the polycapillary units (6) into a hexagonal prism to form a composite tube rod, and drawing the composite tube rod through a wire drawing machine after heating and softening to form a polycapillary glass embryo tube with a specific curvature, and the polycapillary glass embryo tube with a specific curvature is obtained by cutting a polycapillary X-ray lens; S5. The obtained polycapillary X-ray lens is inspected by an X-ray optical detection system to see whether it meets the design specifications. The inlet (7) of the polycapillary X-ray lens that meets the design specifications is increased in diameter by dry etching to form a polycapillary X-ray lens with a large opening area, and the inlet (7) is a cutout of a hollow glass fiber tube.

3. The method for manufacturing a polycapillary X-ray lens with a large opening area according to claim 2, characterized in that: In S4, when drawing the composite tube rod, the drawing speed of the wire drawing machine is controlled to draw the composite tube rod into a multi-capillary glass embryo tube with a specific curvature.

4. The method for manufacturing a polycapillary X-ray lens with a large opening area according to claim 3, characterized in that: In S4, when the polycapillary X-ray lens is cut, a certain margin is reserved for the polycapillary X-ray lens. Δ L, Δ L is 2μm to 2mm.

5. The method for manufacturing a polycapillary X-ray lens with a large opening area according to any one of claims 3 to 4, characterized in that: In S5, when the diameter of the inlet (7) is increased by dry etching, the angle α between the incident ion beam (8) and the polycapillary X-ray lens is -20° to +90°, the rotation speed of the polycapillary X-ray lens during the etching process is 1-60r / h, and the etching speed is 10-800nm / min.

6. The method for manufacturing a polycapillary X-ray lens with a large opening area according to claim 5, characterized in that: The height of the ion beam (8) is the radius of the cut end of the polycapillary X-ray lens.

7. The method for manufacturing a polycapillary X-ray lens with a large opening area according to claim 6, characterized in that: The width of the ion beam (8) is in the range of 0.5-1000 times the diameter of the inlet (7).

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