Zirconium-yttrium alloy target material and preparation method thereof

Abstract

The invention belongs to the technical field of target material production, and discloses a preparation method of a zirconium-yttrium alloy target material, which comprises the following steps: performing primary smelting and cooling on zirconium to obtain a zirconium ingot, overturning the zirconium ingot up and down, performing secondary smelting, adding metal yttrium into the zirconium ingot in a molten state, melting to obtain a primary eutectic solution, and cooling the primary eutectic solution to room temperature within 85 minutes to obtain the zirconium-yttrium alloy target material. The preparation method comprises the following steps: carrying out primary co-melting on the zirconium-yttrium alloy target material to obtain a primary co-melt, then turning the primary co-melt up and down, carrying out tertiary melting to obtain a secondary co-melt, then cooling the primary co-melt to room temperature within 70min to obtain a secondary co-melt, and finally carrying out machining, hot rolling and hot isostatic pressing treatment on the secondary co-melt to obtain the zirconium-yttrium alloy target material. According to the zirconium-yttrium alloy target material, the distribution uniformity degree of zirconium and yttrium is improved through the operation of overturning the zirconium ingot or the co-melt for multiple times and remelting, and in addition, the invention further discloses the zirconium-yttrium alloy target material.

Description

Technical Field

[0001] The present application relates to the technical field of target material production, and in particular to a zirconium-yttrium alloy target material and a preparation method thereof. Background Art

[0002] The turbine blades of the engine work at high temperatures. In addition to bearing huge mechanical loads, they also have to withstand the corrosion of sulfides and oxides. The performance of ordinary blades can no longer meet the needs. People are eager to find a new material that meets special requirements to prepare blades with strong corrosion resistance, high adhesion and low manufacturing cost. Yttria-stabilized zirconia thermal insulation coating (YSZ) has the advantages of good high-temperature stability, low thermal conductivity and wear resistance. It can increase the temperature before the engine turbine, thereby improving the engine performance. And it can be used to repair worn turbine blades. Therefore, it is widely used in engine manufacturing and repair (remanufacturing) in the aerospace industry.

[0003] In addition, YSZ coating is recommended as a solid oxide fuel cell (SOFC) electrolyte material due to its high stability and chemical inertness, and is also widely used in the field of solid oxide fuel cells. As for the method of forming the coating, the traditional process is to directly thermally spray zirconium yttrium oxide onto the workpiece. This method is easier to control the composition of the zirconium yttrium coating, but the spraying efficiency is low, the resulting coating has poor density, and it is easy to fall off: the improved method is to use arc ion plating, magnetron sputtering and other methods, in an oxygen-argon mixed atmosphere, the metal particles sputtered from the target are oxidized to form a coating on the workpiece. The coating generally has good density, uniformity, and bonding strength, but a zirconium yttrium target with uniform composition is required.

[0004] As for the manufacturing method of zirconium-yttrium target, the common method is to evenly splice multiple strips of metal yttrium on the metal zirconium plate. However, due to the enrichment of a single metal in a local area of ​​the target, the oxide coating is also locally enriched accordingly. The optimization method is to use alloy targets. At present, the main methods for producing zirconium-yttrium alloys are: using a process of sintering after powder pressing. The material density of this target after sintering is not good, and the density cannot meet the requirements, resulting in the splashing of particles during the sputtering process, thereby affecting the quality of the sputtered film. Another method is to melt zirconium-yttrium into an alloy and then process it into a target. The advantages of this type of target are: low porosity and uniform distribution of yttrium added on the target surface. Therefore, the melt casting method is one of the basic methods for making sputtering targets.

[0005] Chinese patent application 200910060257.5 discloses a method for preparing a zirconium-yttrium alloy target. The preparation method comprises vacuum induction melting, argon filling during the melting process to suppress volatilization, heat preservation and casting in a heating furnace to form a zirconium-yttrium alloy ingot, and then coating hot rolling, quenching heat treatment, and stress relief annealing heat treatment to obtain a zirconium-yttrium alloy target.

[0006] The zirconium-yttrium alloy target prepared by the preparation method of the scheme has a metal yttrium mass content of 5% to 20%, a yttrium uniformity deviation within ±1%, a density greater than 98% TD (theoretical density), and a grain size of more than level 5. It can be used for arc ion plating and reactive magnetron sputtering to prepare yttria-stabilized zirconia (YSZ) coatings, and meets the technical requirements for targets for arc ion plating and reactive magnetron sputtering to prepare excellent yttria-stabilized zirconia (YSZ) coatings.

[0007] Further observation of the scheme shows that the specific preparation steps are as follows:

[0008] Step 1: preparing yttrium oxide slurry: adding 3-40 wt % chemically pure yttrium oxide to 1-10 wt % sodium carboxymethyl cellulose aqueous solution;

[0009] Step 2: Prepare yttrium oxide crucible coating: coat the crucible with the yttrium oxide slurry, with a coating thickness of 0.2 μm-2 μm;

[0010] Step 3: Crucible coating sintering: sintering temperature 1200℃~1800℃, sintering time 30min~60min;

[0011] Step 4: Loading: Place metal yttrium at the bottom of the crucible, place the metal zirconium block on top of the yttrium, and evacuate to 10 -3 Pa, then power is supplied for heating, increasing the power by 5kw every 5min;

[0012] Step 5: Heating furnace insulation: heat up the heating furnace and then keep it at 500℃~880℃;

[0013] Step 6: Filling with argon: When a molten pool is formed on the upper part of the crucible, fill the furnace with argon gas at 0.001-1MPa;

[0014] Step 7: Melting: melting temperature 1600℃~1850℃, melting time 3~5min;

[0015] Step 8: Pouring: After the molten pool is formed, it is fully stirred, heated to 1700℃~1950℃ and cast to form zirconium-yttrium alloy ingot;

[0016] Step 9: Take out of the furnace: Take out of the furnace after the ingot cools down;

[0017] Step 10: Coated hot rolling and quenching: Coat the ingot with a sheath, keep it at 500℃~880℃ before hot rolling, keep it at 2h~10h, then hot roll it, the hot rolling temperature is 500℃~800℃, and the hot rolling deformation is 20%~80%; after hot rolling, quench and cool the ingot with the sheath;

[0018] Step 11: Stress relief annealing: annealing temperature 200℃~500℃, annealing time 2~10h;

[0019] Step 12: Separate the sheath from the zirconium-yttrium alloy core by mechanical means, remove the sheath, and form a zirconium-yttrium alloy target;

[0020] It can be seen from the scheme that the scheme does not pre-treat the zirconium, but directly chooses to melt zirconium and yttrium together. However, according to the chemical properties of zirconium, it can be seen that it easily absorbs hydrogen, oxygen, nitrogen, etc. Therefore, it is inevitable that there will be a large amount of gas in the zirconium raw material, resulting in a decrease in its internal density.

[0021] The problem that this scheme needs to solve is: how to provide a method for preparing a zirconium-yttrium alloy target with high density and high component uniformity. Summary of the invention

[0022] The purpose of the present application is to provide a method for a zirconium-yttrium alloy target material, which discharges the gas inside the zirconium by a single smelting treatment of the zirconium raw material, and then turns the zirconium ingot or eutectic over multiple times to make the zirconium and yttrium in the solution obtained by smelting the zirconium ingot and eutectic more evenly distributed.

[0023] To achieve the above object, the present application discloses a method for preparing a zirconium-yttrium alloy target, comprising the following steps:

[0024] Step 1: melting and cooling zirconium once to obtain a zirconium ingot;

[0025] Step 2: Turn the zirconium ingot obtained in step 1 upside down and perform secondary smelting, and at the same time, add metal yttrium into the molten zirconium ingot to melt to obtain a primary eutectic solution, and then cool the primary eutectic solution to room temperature within 85 minutes to obtain a primary eutectic body;

[0026] Step 3: Turn the primary eutectic obtained in step 2 upside down, melt it three times to obtain a secondary eutectic solution, and then cool the primary eutectic solution to room temperature within 70 minutes to obtain a secondary eutectic solution;

[0027] Step 4: machining, hot rolling, and hot isostatic pressing the secondary eutectic to obtain a zirconium-yttrium alloy target.

[0028] Preferably, step 2 is specifically as follows: turning the zirconium ingot obtained in step 1 upside down, re-smelting, and adding metallic yttrium to the molten zirconium ingot to melt to obtain a primary eutectic liquid, and then cooling the primary eutectic liquid to room temperature at 25-35°C / min to obtain a primary eutectic.

[0029] Preferably, step 3 is specifically as follows: turning the primary eutectic obtained in step 2 upside down, smelting it three times to obtain a secondary eutectic liquid, and then cooling the secondary eutectic liquid to room temperature at 30-45°C / min to obtain a secondary eutectic.

[0030] Preferably, the mass ratio of metal yttrium to zirconium ingot is 5-15:85-95.

[0031] Preferably, the machining operation in step 4 is specifically: cutting off both ends and the outer surface of the secondary eutectic to obtain a target blank;

[0032] The length of the cut end portion is 5-10% of the total length of the secondary eutectic, and the cutting depth of the outer surface is not less than 5 mm.

[0033] Preferably, the hot rolling operation is specifically as follows: heating the target blank to 820-850° C., and then rolling the target blank so that the total deformation amount of the target blank exceeds 70%, thereby obtaining a hot-rolled target blank.

[0034] Preferably, the specific operation of hot isostatic pressing is: heating the hot-rolled target blank to 780-820°C, then pressurizing it to 140-150MPa, keeping it warm and pressurizing for 230-240 minutes after the pressurization, and lowering the temperature and pressure to room temperature and standard atmospheric pressure after the heat preservation and pressure maintenance to obtain a zirconium-yttrium alloy target.

[0035] In addition, the present application also discloses a zirconium-yttrium alloy target material, which is prepared by the above-mentioned zirconium-yttrium alloy target material preparation method.

[0036] Preferably, the composition deviation of the zirconium-yttrium alloy target is no more than ±1%, and the relative density is no less than 99%.

[0037] The beneficial effects of this application are:

[0038] The present application performs a single smelting treatment on the zirconium raw material so that the gas inside the zirconium is discharged, and then the zirconium ingot or eutectic is flipped multiple times to make the distribution of zirconium and yttrium in the solution obtained by smelting the zirconium ingot and eutectic more uniform. The reason is that zirconium and yttrium themselves have a density difference, and this density difference will cause the zirconium-yttrium solution to be unevenly distributed or even stratified. Therefore, the uniformity of the distribution of zirconium and yttrium can be improved by flipping the zirconium ingot or eutectic multiple times. DETAILED DESCRIPTION

[0039] The present invention will be described clearly and completely below in conjunction with the embodiments of the present invention. In the description of the present invention, it should be noted that, if no specific conditions are specified in the embodiments, the conditions are carried out according to conventional conditions or conditions recommended by the manufacturer. If the manufacturer of the reagents or instruments used is not specified, they are all conventional products that can be purchased commercially.

[0040] Example 1

[0041] Step 1: smelting zirconium at a temperature of 2000° C. for 18 minutes and cooling to obtain a zirconium ingot;

[0042] Step 2: Turn the zirconium ingot obtained in step 1 upside down and perform secondary smelting, and at the same time, add metal yttrium to the molten zirconium ingot at a mass ratio of 10:90 to obtain a primary eutectic solution, and then cool the primary eutectic solution (about 2000° C.) to room temperature within 70 minutes to obtain a primary eutectic;

[0043] Step 3: The primary eutectic obtained in step 2 is turned upside down, smelted three times to obtain a secondary eutectic solution (about 2000° C.), and then the secondary eutectic solution is cooled to room temperature within 55 minutes to obtain a secondary eutectic solution;

[0044] Step 4: Cut off the two ends and the outer surface of the secondary eutectic to obtain a target blank;

[0045] The length of the cut end is 8±0.5% of the total length of the secondary eutectic, and the cutting depth of the outer surface is 6±0.5 mm;

[0046] The target blank is heated to 830° C., and then rolled so that the total deformation of the target blank exceeds 70% (specifically about 73%) to obtain a hot-rolled target blank;

[0047] The target blank after hot rolling is heated to 800°C and then pressurized to 145MPa. After the pressurization, the target blank is kept at this temperature for 235 minutes. After the heat preservation and pressure maintenance, the temperature and pressure are lowered to room temperature and standard atmospheric pressure to obtain a zirconium-yttrium alloy target.

[0048] Example 2

[0049] Step 1: smelting zirconium at 2050° C. for 17 minutes and cooling to obtain a zirconium ingot;

[0050] Step 2: turning the zirconium ingot obtained in step 1 upside down and performing secondary smelting, and at the same time, adding metal yttrium to the molten zirconium ingot at a mass ratio of 5:95 to obtain a primary eutectic solution, and then cooling the primary eutectic solution (about 2000° C.) to room temperature within 75 minutes to obtain a primary eutectic;

[0051] Step 3: The primary eutectic obtained in step 2 is turned upside down, smelted three times to obtain a secondary eutectic solution (about 2000° C.), and then the secondary eutectic solution is cooled to room temperature within 60 minutes to obtain a secondary eutectic solution;

[0052] Step 4: Cut off the two ends and the outer surface of the secondary eutectic to obtain a target blank;

[0053] The length of the cut end is 9±0.5% of the total length of the secondary eutectic, and the cut depth of the outer surface is 9±0.5 mm;

[0054] The target blank is heated to 850° C., and then rolled so that the total deformation of the target blank exceeds 70% (specifically about 73%) to obtain a hot-rolled target blank;

[0055] The target blank after hot rolling is heated to 820°C and then pressurized to 140MPa. After the pressurization, the target blank is kept warm for 230 minutes. After the heat preservation and pressure maintenance, the temperature and pressure are lowered to room temperature and standard atmospheric pressure to obtain a zirconium-yttrium alloy target.

[0056] Example 3

[0057] Step 1: smelting zirconium at 1880° C. for 25 min and cooling to obtain a zirconium ingot;

[0058] Step 2: Turn the zirconium ingot obtained in step 1 upside down and perform secondary smelting, and at the same time, add metal yttrium to the molten zirconium ingot at a mass ratio of 15:85 to obtain a primary eutectic solution, and then cool the primary eutectic solution (about 2000° C.) to room temperature within 62 minutes to obtain a primary eutectic;

[0059] Step 3: The primary eutectic obtained in step 2 is turned upside down, smelted three times to obtain a secondary eutectic solution (about 2000° C.), and then the secondary eutectic solution is cooled to room temperature within 45 minutes to obtain a secondary eutectic solution;

[0060] Step 4: Cut off the two ends and the outer surface of the secondary eutectic to obtain a target blank;

[0061] The length of the cut end is 6±0.5% of the total length of the secondary eutectic, and the cut depth of the outer surface is not less than 5.5±0.5 mm;

[0062] The target blank is heated to 820° C., and then rolled so that the total deformation of the target blank exceeds 70% (specifically about 75%) to obtain a hot-rolled target blank;

[0063] The target blank after hot rolling is heated to 780°C and then pressurized to 150MPa. After the pressurization, the target blank is kept warm for 240 minutes. After the heat preservation and pressure maintenance, the temperature and pressure are lowered to room temperature and standard atmospheric pressure to obtain a zirconium-yttrium alloy target.

[0064] Example 4

[0065] The method is basically the same as Example 1, except that step 2 is specifically as follows: turning the zirconium ingot obtained in step 1 upside down, re-smelting it, and adding metallic yttrium to the molten zirconium ingot to melt it to obtain a primary eutectic liquid, and then cooling the primary eutectic liquid (about 2000°C) to room temperature at a cooling rate of 28±0.2°C / min to obtain a primary eutectic.

[0066] Example 5

[0067] It is basically the same as Example 1, except that step 2 is specifically as follows: turning the zirconium ingot obtained in step 1 upside down, re-smelting, and adding metallic yttrium to the molten zirconium ingot to melt to obtain a primary eutectic liquid, then cooling the primary eutectic liquid (about 2000°C) to 1350°C at a cooling rate of 30±0.2°C / min, then heating the primary eutectic liquid to 850°C at a heating rate of 25±0.2°C / min, and finally cooling the primary eutectic liquid to room temperature at a cooling rate of 27±0.2°C / min to obtain a primary eutectic.

[0068] Example 6

[0069] It is basically the same as Example 1, except that step 2 is specifically as follows: turning the zirconium ingot obtained in step 1 upside down, re-smelting, and adding metallic yttrium to the molten zirconium ingot to melt to obtain a primary eutectic liquid, then cooling the primary eutectic liquid (about 2000°C) to 1450°C at a cooling rate of 25±0.2°C / min, then heating the primary eutectic liquid to 850°C at a heating rate of 30±0.2°C / min, and finally cooling the primary eutectic liquid to room temperature at a cooling rate of 27±0.2°C / min to obtain a primary eutectic.

[0070] Example 7

[0071] It is basically the same as Example 1, except that step 3 is specifically as follows: turning the primary eutectic obtained in step 2 upside down, smelting it three times to obtain a secondary eutectic liquid (about 2000°C), and then cooling the primary eutectic liquid to room temperature at a cooling rate of 36±0.2°C / min to obtain a secondary eutectic.

[0072] Example 8

[0073] It is basically the same as Example 4, except that step 3 is specifically as follows: turning the primary eutectic obtained in step 2 upside down, smelting it three times to obtain a secondary eutectic liquid (about 2000°C), then cooling the primary eutectic liquid to 1400°C at a cooling rate of 36±0.2°C / min, then cooling the primary eutectic liquid to 800°C at a cooling rate of 40±0.2°C / min, and finally cooling the primary eutectic liquid to room temperature at a cooling rate of 33°C / min to obtain a primary eutectic.

[0074] Comparative Example 1

[0075] Step 1: Zirconium is melted at a temperature of 2000° C. for 18 minutes, and then metal yttrium is added to the molten zirconium ingot at a mass ratio of 10:90 to obtain a primary eutectic liquid, and then the primary eutectic liquid (about 2000° C.) is cooled to room temperature within 70 minutes to obtain a primary eutectic;

[0076] Step 2: turning the primary eutectic obtained in step 2 upside down, remelting and obtaining a secondary eutectic liquid (about 2000° C.), and then cooling the secondary eutectic liquid to room temperature within 55 minutes to obtain a secondary eutectic;

[0077] Step 3: Cut off the two ends and the outer surface of the secondary eutectic to obtain a target blank;

[0078] The length of the cut end is 8±0.5% of the total length of the secondary eutectic, and the cut depth of the outer surface is not less than 6±0.5 mm;

[0079] The target blank is heated to 830° C., and then rolled so that the total deformation of the target blank exceeds 70% (specifically about 73%) to obtain a hot-rolled target blank;

[0080] The target blank after hot rolling is heated to 800°C and then pressurized to 145MPa. After the pressurization, the target blank is kept at this temperature for 235 minutes. After the heat preservation and pressure maintenance, the temperature and pressure are lowered to room temperature and standard atmospheric pressure to obtain a zirconium-yttrium alloy target.

[0081] Comparative Example 2

[0082] The method is basically the same as Example 1, except that step 2 is specifically as follows: turning the zirconium ingot obtained in step 1 upside down, remelting, and adding metal yttrium to the molten zirconium ingot at a mass ratio of 10:90 to obtain a primary eutectic liquid, and then cooling the primary eutectic liquid (about 2000°C) to room temperature within 93 minutes to obtain a primary eutectic.

[0083] Comparative Example 3

[0084] It is basically the same as Example 1, except that step 3 is specifically as follows: turning the primary eutectic obtained in step 2 upside down, smelting it three times to obtain a secondary eutectic liquid (about 2000° C.), and then cooling the primary eutectic liquid to room temperature within 78 minutes to obtain a secondary eutectic.

[0085] Performance Testing:

[0086] The content of zirconium component in the target material is tested by ICP-OES and the component deviation of zirconium is calculated (the specific method is to randomly select 9 points on the target material and measure the mass fraction of zirconium at the 9 points respectively, and the maximum difference of the mass fraction of zirconium in the 9 points is the component deviation);

[0087] The relative density of the target material was tested by the Archimedes drainage method. The specific test results are shown in Table 1:

[0088] Table 1

[0089] Group Composition deviation Relative density Group Composition deviation Relative density Example 1 1.53％ 99.3％ Example 7 1.17％ 99.5％ Example 2 1.48％ 99.4％ Example 8 0.56％ 99.6％ Example 3 1.47％ 99.3％ Comparative Example 1 3.89％ 97.7％ Example 4 1.02％ 99.6％ Comparative Example 2 4.55％ 97.2％ Example 5 0.32％ 99.8％ Comparative Example 3 5.31％ 96.9％ Example 6 1.49％ 99.3％

[0090] Result analysis:

[0091] 1. It can be seen from Examples 1-3 that when some parameters in the preparation process of the zirconium-yttrium alloy target are slightly changed in Examples 1-3, the component deviation and relative density of the target prepared in Examples 1-3 fluctuate, but the fluctuation range is relatively small;

[0092] 2. It can be seen from Examples 1 and 4-5 that when Example 4 uniformizes the cooling rate during the cooling process, the component deviation and relative density of the target material are slightly improved compared with Example 1. Furthermore, when Example 5 adjusts the cooling rate and cools by first rapidly cooling, then slowing down the cooling rate and finally increasing the cooling rate, the component deviation and relative density of the target material have a more obvious improvement trend compared with Example 1. The reason is that the initial rapid cooling can inhibit the phase separation and grain growth of the alloy, which helps to capture the non-equilibrium state of the alloy. This state is conducive to maintaining the uniformity of the alloy, reducing the diffusion distance between different components, and reducing composition fluctuations. After the initial rapid cooling, slowing down the cooling rate can provide a certain amount of time for the nucleation and growth of grains, which is conducive to the interaction and rearrangement between crystals, thereby promoting the formation of a more uniform microstructure. At this stage, the cooling rate of the alloy is reduced so that the components can be better mixed and diffused within a certain temperature range, reducing the phenomenon of phase separation. Finally, speeding up the cooling rate can quickly lock the final microstructure and prevent adverse phase changes or excessive grain growth during the cooling process. Such rapid cooling can further improve the distribution uniformity of the precipitation phase and matrix of the alloy, and also increase the relative density;

[0093] Further observation of Example 6 shows that when the temperature is first slowly cooled, then rapidly cooled, and finally slowed down, the relative density and component deviation of the target material fluctuate slightly relative to Example 1. It can be seen that the cooling method of Example 5 is more suitable for the preparation of zirconium-yttrium alloy target materials. Similarly, in Examples 7-8, Example 8 also has a better relative density and a lower component deviation relative to Examples 1 and 7.

[0094] 3. It can be seen from Example 1 and Comparative Example 1 that when the primary smelting of zirconium is omitted, the relative density of the target material decreases significantly and the component deviation increases significantly. The reason is that zirconium, as a metal that easily absorbs gas, needs to be pretreated by primary smelting to discharge the internal gas. After the pretreatment step is omitted, the internal gas is difficult to discharge, which leads to a decrease in the relative density of the alloy target material and an increase in the component deviation.

[0095] 4. It can be seen from Example 1 and Comparative Examples 2-3 that when the cooling time of either the primary eutectic solution or the secondary eutectic solution is extended, the relative density and component deviation of the target material are significantly reduced. The reason is that long-term cooling causes zirconium and yttrium to be unevenly distributed in the target material due to differences in their own density and freezing point temperatures, which in turn causes a significant decline in the relative density and component distribution uniformity.

[0096] The above embodiments are preferred implementation modes of the present invention, but the implementation modes of the present invention are not limited to the above embodiments. Any other changes, modifications, substitutions, combinations, and simplifications made without departing from the spirit and principles of the present invention shall be equivalent replacement methods and shall be included in the protection scope of the present invention.

Claims

1. A method for preparing a zirconium-yttrium alloy target, characterized in that: The following steps are involved: Step 1: melting and cooling zirconium once to obtain a zirconium ingot; Step 2: Turn the zirconium ingot obtained in step 1 upside down and perform secondary smelting, and at the same time, add metal yttrium into the molten zirconium ingot to melt to obtain a primary eutectic solution, and then cool the primary eutectic solution to room temperature within 85 minutes to obtain a primary eutectic body; Step 3: Turn the primary eutectic obtained in step 2 upside down, melt it three times to obtain a secondary eutectic solution, and then cool the primary eutectic solution to room temperature within 70 minutes to obtain a secondary eutectic solution; Step 4: machining, hot rolling, and hot isostatic pressing the secondary eutectic to obtain a zirconium-yttrium alloy target.

2. The method for preparing a zirconium-yttrium alloy target according to claim 1, characterized in that: The step 2 specifically comprises: turning the zirconium ingot obtained in step 1 upside down, performing secondary smelting, and simultaneously adding metal yttrium into the molten zirconium ingot to melt to obtain a primary eutectic liquid, and then cooling the primary eutectic liquid to room temperature at 25-35°C / min to obtain a primary eutectic body.

3. The method for preparing a zirconium-yttrium alloy target according to claim 1, characterized in that: The step 3 is specifically as follows: turning the primary eutectic obtained in step 2 upside down, melting it three times to obtain a secondary eutectic liquid, and then cooling the secondary eutectic liquid to room temperature at 30-45° C. / min to obtain a secondary eutectic.

4. The method for preparing a zirconium-yttrium alloy target according to claim 1, characterized in that: The mass ratio of the metal yttrium to the zirconium ingot is 5-15:85-95.

5. The method for preparing a zirconium-yttrium alloy target according to claim 1, characterized in that: The machining operation in step 4 is specifically as follows: cutting off the two ends and the outer surface of the secondary eutectic to obtain a target blank; The length of the cut end portion is 5-10% of the total length of the secondary eutectic, and the cutting depth of the outer surface is not less than 5 mm.

6. The method for preparing a zirconium-yttrium alloy target according to claim 5, characterized in that: The hot rolling operation is specifically as follows: heating the target blank to 820-850° C., and then rolling the target blank so that the total deformation amount of the target blank exceeds 70%, thereby obtaining a hot-rolled target blank.

7. The method for preparing a zirconium-yttrium alloy target according to claim 6, characterized in that: The specific operation of the hot isostatic pressing is: heating the hot-rolled target blank to 780-820° C., then pressurizing it to 140-150 MPa, and maintaining the temperature and pressure for 230-240 minutes after the pressurization. After the heat preservation and pressure maintenance, the temperature and pressure are reduced to room temperature and standard atmospheric pressure to obtain a zirconium-yttrium alloy target.

8. A zirconium-yttrium alloy target, characterized in that: The target is prepared by the method for preparing the zirconium-yttrium alloy target described in any one of claims 1 to 7.

9. The zirconium-yttrium alloy target according to claim 8, characterized in that: The relative density of the zirconium-yttrium alloy target is not less than 99%.