Automatic gage file generation method, storage medium and terminal

Abstract

The invention discloses an automatic generation method for a gage file, a storage medium and a terminal, and the method comprises the steps: obtaining a to-be-detected layout which is provided with a plurality of target graphs; performing different types of feature analysis on the target graph to obtain a feature analysis result of each type; and based on the feature analysis result, generating a gage file of at least part of the target graph. Different types of feature analysis are carried out on the target graph, the feature analysis result of each type is obtained, the gage files of at least part of the target graph are automatically generated on the basis of the feature analysis results, the process that the gage files are manually generated one by one is replaced, and the generation efficiency of the gage files of the layout can be effectively improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a gauge file automatic generation method, a storage medium and a terminal. Background Art

[0002] In semiconductor manufacturing, the mask is the key medium for pattern transfer. Before manufacturing the mask, the GDS file must be subjected to optical proximity correction (OPC) to achieve manufacturing conditions. In the process of optical proximity correction, it is often necessary to manually create a gauge file of the feature pattern position to characterize the feature information of the position so that the optical proximity correction software can obtain the correct correction result.

[0003] Currently, tools for optical proximity correction include SIEMENS Mentor and ASM Brion, which require the import of a file called gauge when building a model. The gauge file is a text file that contains information such as the coordinates of the measurement points in the area where the graphics are located on the layout, and has a fixed format.

[0004] However, there are still many problems in the process of generating gauge files in the prior art. Summary of the invention

[0005] The technical problem solved by the present invention is to provide a gauge file automatic generation method, a storage medium and a terminal to improve the generation efficiency of the gauge file.

[0006] To solve the above problems, the present invention provides a method for automatically generating a gauge file, comprising: obtaining a layout to be detected, wherein the layout to be detected has a plurality of target graphics; performing different types of feature analysis on the target graphics to obtain feature analysis results of each type; and generating a gauge file of at least part of the target graphics based on the feature analysis results.

[0007] Optionally, different types of feature analysis are performed on the target graphics, and a method for obtaining each type of feature analysis result includes: obtaining a local analysis area in the layout to be detected; performing different types of feature analysis on a number of the target graphics in the local analysis area, and obtaining each type of feature analysis result.

[0008] Optionally, the method for obtaining a local analysis area in the to-be-detected layout includes: obtaining a positioning point; establishing a capture window based on the positioning point; and using an area captured by the capture window as the local analysis area.

[0009] Optionally, the capture window is a rectangle.

[0010] Optionally, the method for establishing the interception window based on the positioning point includes: obtaining a first interception size along a first direction; obtaining a second interception size along a second direction, the first direction being perpendicular to the second direction; establishing the interception window based on the first interception size, the second interception size and the positioning point; wherein the positioning point is the center point of the interception window, the first interception size is the spacing size between the positioning point and the side length of the interception window along the first direction, and the second interception size is the spacing size between the positioning point and the side length of the interception window along the second direction.

[0011] Optionally, the layout to be detected includes: a single-layer layout obtained by flattening layouts of different levels, or a multi-layer layout obtained by merging layouts of different layers.

[0012] Optionally, different types of feature analysis include: geometric feature analysis and environmental feature analysis.

[0013] Optionally, the geometric features include: the shape of the target graphic, the characteristic size of the target graphic, and the spacing size between adjacent target graphics.

[0014] Optionally, the environmental feature analysis includes: whether the target graphics in the local analysis area are repeated graphics, whether the target graphics are optical proximity correction graphics, and whether auxiliary graphics are inserted into the local analysis area.

[0015] Optionally, the method for analyzing the shape of the target graphic includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphic is 4, judging that the target graphic is a rectangle; when the number of the corner points of the target graphic is greater than 4, performing small line segment removal processing on the target graphic; after performing the small line segment removal processing, judging the shape of the target graphic.

[0016] Optionally, the method for removing small line segments includes: when the difference between adjacent corner points in the target graphic changes from a first coordinate difference less than a first preset value to a second coordinate difference less than a first preset value, or changes from a second coordinate difference less than a first preset value to a first coordinate difference less than a first preset value, then connecting the first and last corner points.

[0017] Optionally, after performing the small line segment removal process, the method for determining the shape of the target graphic includes: after traversing all adjacent corner points in the target graphic, obtaining the number of corner points of the target graphic; the number of polygons of the target graphic is the same as the number of corner points.

[0018] Optionally, the difference between the first coordinates is: the difference between the horizontal coordinates or the difference between the vertical coordinates; the difference between the second coordinates is: the difference between the vertical coordinates or the difference between the horizontal coordinates.

[0019] Optionally, the method for analyzing the characteristic size of the target graphic and the spacing size between adjacent target graphics includes: selecting a measurement point in the local analysis area; forming a ray based on the measurement point; obtaining the number of intersections between the ray and all the edge lines of the target graphics in the local analysis area; when the number of intersections is an odd number, determining that the measurement point is located inside the target graphic; when the number of intersections is an even number, determining that the measurement point is located outside the target graphic; when it is determined that the measurement point is inside the target graphic, forming a first line segment along the first direction or the second direction through the measurement point until An intersection is generated with the sideline relative to the target figure, the first direction is perpendicular to the second direction, and the first line segment is perpendicular to the sideline of the target figure where the intersection is generated; the length dimension of the first line segment is used as the length characteristic dimension or the width characteristic dimension of the target figure; when it is judged that the measurement point is outside the target figure, a second line segment along the first direction or the second direction is formed through the measurement point until an intersection is generated with the sideline of the adjacent target figure, and the second line segment is perpendicular to the sideline of the adjacent target figure where the intersection is generated; the length dimension of the second line segment is used as the spacing dimension between adjacent target figures.

[0020] Optionally, the method for analyzing whether several target graphics in the local analysis area are repeated graphics includes: obtaining the corner points of each target graphic; based on each corner point in the target graphic, obtaining the length dimension of each edge line of the target graphic and the angle between adjacent edge lines, and forming a feature list according to a preset arrangement order; when the feature lists of two target graphics are exactly the same, the two target graphics are judged to be repetitive graphics.

[0021] Optionally, the method for analyzing whether the target graphic is an optical proximity correction graphic includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphic is greater than 4, and the difference in the horizontal coordinates or the difference in the vertical left sides between adjacent corner points is less than a second preset value, then judging that the target graphic is an optical proximity correction graphic.

[0022] Optionally, the method for analyzing whether the auxiliary graphic is inserted in the local analysis area includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphics is equal to 4, and the difference between the horizontal coordinate or the vertical coordinate between adjacent corner points is less than a third preset value, it is determined that the auxiliary graphic is inserted in the local analysis area.

[0023] Optionally, when it is determined that the auxiliary graphic is not inserted into the local analysis area, the target graphic includes: a main graphic; when it is determined that the auxiliary graphic is inserted into the local analysis area, the target graphic includes: the main graphic and the auxiliary graphic.

[0024] Optionally, the method of generating a gauge file of at least a portion of the target graphic includes: generating a gauge file of at least a portion of the main graphic in the local analysis area.

[0025] Optionally, before generating the gauge file of at least part of the main graphic in the local analysis area, the method further includes: acquiring coordinate information of the main graphic for which the gauge file needs to be generated.

[0026] Optionally, when it is determined that the auxiliary graphic is inserted into the local analysis area, before generating the gauge file of at least part of the target graphic, the method further includes: obtaining instruction information on whether to generate the gauge file of the auxiliary graphic.

[0027] Optionally, when instruction information for generating a gauge file of the auxiliary graphic is obtained, the method for generating a gauge file of at least part of the target graphic further includes: generating a gauge file of at least part of the auxiliary graphic in the local analysis area.

[0028] Optionally, before generating the gauge file of at least part of the auxiliary graphics in the local analysis area, the method further includes: acquiring coordinate information of the auxiliary graphics for which the gauge file needs to be generated.

[0029] Optionally, before generating the gauge file of at least part of the target graph, the method further includes: specifying a generation format of the gauge file.

[0030] Correspondingly, the technical solution of the present invention also provides a storage medium on which computer instructions are stored, and when the computer instructions are executed, the steps of the method described in any one of the above technical solutions are executed.

[0031] Correspondingly, the technical solution of the present invention also provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of the method described in any one of the above technical solutions are executed.

[0032] Compared with the prior art, the technical solution of the present invention has the following advantages:

[0033] In the method for automatically generating gauge files of the technical solution of the present invention, different types of feature analysis are performed on the target graphics to obtain each type of feature analysis result, and based on the feature analysis result, gauge files of at least part of the target graphics are automatically generated, replacing the process of manually generating gauge files one by one, which can effectively improve the efficiency of gauge file generation for the layout.

[0034] Furthermore, the method of performing different types of feature analysis on the target graphics and obtaining each type of feature analysis result includes: obtaining a local analysis area in the layout to be detected; performing different types of feature analysis on a number of the target graphics in the local analysis area, and obtaining each type of feature analysis result. By obtaining the local analysis area, it is possible to avoid analyzing the target graphics in the layout to be detected, thereby reducing the analysis of the target graphics in the layout area that does not require the generation of gauge files, thereby effectively reducing the number of target graphics analyses and further improving the efficiency of generating gauge files for the layout.

[0035] Furthermore, when it is determined that the auxiliary graphic is inserted in the local analysis area, before generating the gauge file of at least part of the target graphic, the method further includes: obtaining instruction information on whether to generate the gauge file of the auxiliary graphic. When the instruction information on the need to generate the gauge file of the auxiliary graphic is obtained, the method for generating the gauge file of at least part of the target graphic further includes: generating the gauge file of at least part of the auxiliary graphic in the local analysis area. When the gauge file of the auxiliary graphic is needed to adjust the auxiliary graphic model, the gauge file of the auxiliary graphic can also be automatically generated, replacing the process of manually generating gauge files one by one, thereby further improving the efficiency of generating gauge files for the layout.

[0036] Furthermore, before generating the gauge file of at least part of the target graphics, the method further includes: specifying the format of the gauge file. By specifying the format of the gauge file, gauge files of different formats can be generated at the same time without manual conversion, thereby further improving the efficiency of the gauge file generation for the layout. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 is a flow chart of a method for automatically generating a gauge file according to an embodiment of the present invention;

[0038] Figures 2 to 9 It is a structural schematic diagram of each step of the method for automatically generating a gauge file according to an embodiment of the present invention. DETAILED DESCRIPTION

[0039] As described in the background art, there are still many problems in the process of generating gauge files in the prior art, which will be described in detail below.

[0040] The gauge file usually contains the position information, width information, SEM image position information, feature size information, etc. of the graphics. For test graphics designed by humans without actual functions, gauge files can be generated when the GDS file is generated. However, for the GDS files generated by the design department, after the measurement points are known, gauge files need to be made manually one by one, which is time-consuming and laborious. In addition, the gauge files of different optical proximity correction software often require different information, which further leads to low work efficiency.

[0041] On this basis, the present invention provides a method, storage medium and terminal for automatically generating gauge files. By performing different types of feature analysis on the target graphics, each type of feature analysis result is obtained, and based on the feature analysis result, gauge files of at least part of the target graphics are automatically generated, replacing the process of manually generating gauge files one by one, which can effectively improve the efficiency of gauge file generation for the layout.

[0042] Figure 1 : is a flowchart of a method for automatically generating a gauge file according to an embodiment of the present invention, comprising:

[0043] Step S101, obtaining a layout to be detected, wherein the layout to be detected has a plurality of target graphics;

[0044] Step S102, performing different types of feature analysis on the target graphic to obtain feature analysis results of each type;

[0045] Step S103: generating a gauge file of at least part of the target graph based on the feature analysis result.

[0046] The following will describe in detail the steps of the method for automatically generating a gauge file with reference to the accompanying drawings.

[0047] Figures 2 to 9 It is a structural schematic diagram of each step of the method for automatically generating a gauge file according to an embodiment of the present invention.

[0048] Please refer to Figure 2 In step S101, a layout 100 to be inspected is obtained, and the layout 100 to be inspected has a plurality of target graphics 102.

[0049] It should be noted that, in this embodiment, the method for obtaining the layout to be detected 100 includes: the layout to be detected 100 is stored in the running terminal in the form of GDS text, and based on the GDS text storage path of the layout to be detected 100, the GDS text of the layout to be detected is read.

[0050] In this embodiment, the to-be-detected layout 100 may be a layout after optical proximity correction, or may be an initial layout without any correction.

[0051] In this embodiment, the layout to be detected 100 includes: a single-layer layout formed by flattening layouts of different hierarchies, or a multi-layer layout formed by merging layouts of different layers.

[0052] Please refer to Figure 3 In step S102, different types of feature analysis are performed on the target graphic 102 to obtain each type of feature analysis result.

[0053] In this embodiment, different types of feature analysis are performed on the target graphic 102, and a method for obtaining each type of feature analysis result includes: obtaining a local analysis area 101 in the to-be-detected layout 100; performing different types of feature analysis on a number of the target graphics 102 within the local analysis area 101, and obtaining each type of feature analysis result.

[0054] By obtaining the local analysis area, it is possible to avoid analyzing the target graphic 102 in the layout 100 to be tested, thereby reducing the analysis of the target graphic 102 in the layout area where the gauge file does not need to be generated. This can effectively reduce the number of analyses of the target graphic 102 to improve the efficiency of generating gauge files for the layout.

[0055] In this embodiment, the method for obtaining the local analysis area 101 in the to-be-detected layout 100 includes: obtaining a positioning point O1; establishing a capture window S based on the positioning point O1; and using the area captured by the capture window S as the local analysis area 101.

[0056] In this embodiment, the capture window S is a rectangle.

[0057] In this embodiment, the method for establishing the interception window S based on the positioning point O1 includes: obtaining a first interception size d1 along a first direction X; obtaining a second interception size d2 along a second direction Y, wherein the first direction X is perpendicular to the second direction Y; establishing the interception window S based on the first interception size d1, the second interception size d2 and the positioning point O1; wherein the positioning point O1 is the center point of the interception window S, the first interception size d1 is the spacing size of the positioning point O1 from the side length of the interception window S along the first direction X, and the second interception size d2 is the spacing size of the positioning point O1 from the side length of the interception window S along the second direction Y.

[0058] In this embodiment, different types of feature analysis include: geometric feature analysis and environmental feature analysis.

[0059] In this embodiment, the geometric features include: the shape of the target pattern 102 , the characteristic size of the target pattern 102 , and the spacing size between adjacent target patterns 102 .

[0060] Please refer to Figure 4 It should be noted that, for the gauge file of the target graphic, its visualization is a line segment that intersects with the target graphic 102. The line segment needs to pass through the target graphic 102, but cannot intersect with other target graphics 102. Therefore, the shape, characteristic size, and spacing size between adjacent target graphics 102 of the target graphic 102 are analyzed to limit the position of the corresponding line segment of the gauge file of the target graphic 102.

[0061] In this embodiment, the environmental feature analysis includes: whether the target graphics 102 in the local analysis area 101 are repeated graphics, whether the target graphics 102 are optical proximity correction graphics, and whether auxiliary graphics are inserted in the local analysis area 101.

[0062] Please refer to Figure 5 In this embodiment, the method for analyzing the shape of the target graphic 102 includes: obtaining the corner points P of each of the target graphics 102; when the number of the corner points P of the target graphic 102 is 4, determining that the target graphic 102 is a rectangle.

[0063] It should be noted that, in this embodiment, the corner point P of the target figure 102 is the intersection point between the edge lines in the target figure 102. Moreover, each of the images to be detected in the to-be-detected layout 100 is a Manhattan image, so when the number of the corner points P of the target figure 102 is 4, it can be directly determined that the figure is a rectangle.

[0064] When the number of the corner points P of the target graphic 102 is greater than 4, the target graphic 102 is subjected to a small line segment removal process; after the small line segment removal process is performed, the shape of the target graphic 102 is determined.

[0065] Please refer to Figure 6 In this embodiment, the method for removing small line segments includes: when the difference between adjacent corner points P in the target graphic 102 changes from a first coordinate difference less than a first preset value to a second coordinate difference less than a first preset value PV1, or changes from a second coordinate difference less than a first preset value PV1 to a first coordinate difference less than a first preset value PV1, then connecting the first and last corner points P.

[0066] It should be noted that, if the difference between the first coordinates or the difference between the second coordinates between adjacent corner points P in the target figure 102 is less than the first preset value PV1, the figure can be judged as an optical proximity correction figure. Based on this premise, the small line segment removal process is continued on the target figure 102, and the first preset value PV1 can be set based on experience.

[0067] Please continue to refer to Figure 6 After the small line segment removal process is performed, the method for determining the shape of the target graphic 102 includes: after traversing all adjacent corner points P in the target graphic 102, obtaining the number of corner points P of the target graphic 102; the number of polygons of the target graphic 102 is the same as the number of corner points P.

[0068] The difference between the first coordinates is: the difference between the horizontal coordinates or the difference between the vertical coordinates; the difference between the second coordinates is: the difference between the vertical coordinates or the difference between the horizontal coordinates.

[0069] In this embodiment, the difference between the first coordinates is the difference between the horizontal coordinates, and the difference between the second coordinates is the difference between the vertical coordinates; in other embodiments, the difference between the first coordinates may also be the difference between the vertical coordinates, and the difference between the second coordinates may be the difference between the horizontal coordinates.

[0070] Please refer to Figure 7In this embodiment, the method for analyzing the characteristic size of the target graphic 102 and the spacing size between adjacent target graphics 102 includes: selecting a measurement point O2 in the local analysis area 101; forming a ray L based on the measurement point O2; obtaining the number of intersections between the ray L and all the edges of the target graphics 102 in the local analysis area 101; when the number of intersections is an odd number, it is determined that the measurement point O2 is located inside the target graphic 102; when the number of intersections is an even number, it is determined that the measurement point O2 is located outside the target graphic 102; when it is determined that the measurement point O2 is inside the target graphic 102, a first line segment S along the first direction X or the second direction Y is formed through the measurement point O2 1, until an intersection is generated with the sideline opposite to the target graphic 102, the first direction X is perpendicular to the second direction Y, and the first line segment S1 is perpendicular to the sideline of the target graphic 102 generating the intersection; the length dimension of the first line segment S1 is used as the length characteristic dimension or the width characteristic dimension of the target graphic 102; when it is determined that the measuring point O2 is outside the target graphic 102, a second line segment S2 along the first direction X or the second direction Y is formed through the measuring point O2, until an intersection is generated with the sideline of the adjacent target graphic 102, the second line segment S2 is perpendicular to the sideline of the adjacent target graphic 102 generating the intersection; the length dimension of the second line segment S2 is used as the spacing dimension between adjacent target graphics 102.

[0071] In this embodiment, the method for analyzing whether the target graphics 102 in the local analysis area 101 are repeated graphics includes: obtaining the corner points P of each of the target graphics 102; based on each of the corner points P in the target graphics 102, obtaining the length dimensions of each edge line of the target graphics 102 and the angle between adjacent edge lines, and forming a feature list according to a preset arrangement order; when the feature lists of two target graphics 102 are exactly the same, the two target graphics 102 are judged to be repetitive graphics.

[0072] Please refer to Figure 8 In this embodiment, the method for analyzing whether the target graphic 102 is an optical proximity correction graphic includes: obtaining the corner points P of each of the target graphics 102; when the number of the corner points P of the target graphic 102 is greater than 4, and the difference in the horizontal coordinates or the difference in the vertical left sides between adjacent corner points P is less than a second preset value PV2, then the target graphic 102 is judged to be an optical proximity correction graphic.

[0073] It should be noted that, in the process of optical proximity correction, it is necessary to interrupt the edge lines of the target graphic 102 and then translate the small line segments formed after the interruption. Therefore, the difference in the horizontal coordinates or the difference in the vertical left sides between some adjacent corner points P will be very small. Therefore, the appropriate second preset value PV2 can be set based on experience to determine whether the graphic is an optical proximity correction graphic.

[0074] Please refer to Fig. 9 , the method for analyzing whether the auxiliary graphic 103 is inserted in the local analysis area 101 includes: obtaining the corner points P of each of the target graphics 102; when the number of the corner points P of the target graphics 102 is equal to 4, and the difference between the horizontal coordinates or the vertical coordinates of adjacent corner points P is less than a third preset value PV3, it is determined that the auxiliary graphic 103 is inserted in the local analysis area 101.

[0075] It should be noted that, since the inserted auxiliary graphics 103 are sub-resolution graphics, the auxiliary graphics 103 will not be corrected when the layout is subjected to optical proximity correction, and the inserted auxiliary graphics 103 are all thin strips of rectangles. Therefore, when the number of the corner points P of the target graphics 102 is equal to 4, and the difference between the horizontal coordinates or the vertical coordinates of the adjacent corner points P is less than the third preset value PV3, it can be directly determined that the auxiliary graphics 103 are inserted in the local analysis area 101. The third preset value PV3 can be set based on experience.

[0076] In step S103 , based on the feature analysis result, a gauge file of at least part of the target graphic 102 is generated.

[0077] By performing different types of feature analysis on the target graphic 102, obtaining each type of feature analysis result, and automatically generating at least part of the gauge file of the target graphic 102 based on the feature analysis result, instead of manually generating gauge files one by one, the efficiency of generating gauge files for the layout can be effectively improved.

[0078] It should be noted that, in this embodiment, the purpose of analyzing whether the target graphics 102 are repeated graphics is that when two target graphics 102 are determined to be repeated graphics, the corresponding gauge files only need to be reused by increasing the corresponding position offset, so as to improve the efficiency of generating gauge files for the layout. When analyzing whether the target graphics 102 is an optical proximity correction graphic, it is necessary to perform the small line segment removal process on the optical proximity correction graphic (for the specific process, please refer to Figure 6), restore it to the original polygonal shape, and generate the corresponding gauge file based on the restored polygonal shape (for the specific process, please refer to Figure 4 The purpose of analyzing whether the auxiliary graphic is inserted into the local analysis area 101 is that when a gauge file of the auxiliary graphic is needed to adjust the auxiliary graphic model, a gauge file can be generated for the auxiliary graphic.

[0079] It should be noted that, in this embodiment, when it is determined that the auxiliary graphic 103 is not inserted into the local analysis area 101, the target graphic 102 includes: a main graphic; when it is determined that the auxiliary graphic 103 is inserted into the local analysis area 101, the target graphic 102 includes: the main graphic and the auxiliary graphic 103.

[0080] In this embodiment, the method for generating a gauge file of at least a portion of the target graphic 102 includes: generating a gauge file of at least a portion of the main graphic in the local analysis area 101 .

[0081] In this embodiment, before generating the gauge file of at least a part of the main graph in the local analysis area 101, the process further includes: acquiring coordinate information of the main graph for which the gauge file needs to be generated.

[0082] In this embodiment, when it is determined that the auxiliary graphic 103 is inserted into the local analysis area 101 , before generating the gauge file of at least part of the target graphic 102 , the step further includes: obtaining instruction information on whether to generate the gauge file of the auxiliary graphic 103 .

[0083] In this embodiment, when the instruction information for generating the gauge file of the auxiliary graphic 103 is obtained, the method for generating the gauge file of at least part of the target graphic 102 further includes: generating the gauge file of at least part of the auxiliary graphic 103 in the local analysis area 101. When the gauge file of the auxiliary graphic 103 is needed to adjust the auxiliary graphic 103 model, the gauge file of the auxiliary graphic 103 can also be automatically generated, replacing the process of manually generating gauge files one by one, thereby further improving the efficiency of generating gauge files for the layout.

[0084] It should be noted that, when the instruction information for generating the gauge file of the auxiliary graphic 103 is obtained, the geometric features of the auxiliary graphic, whether it is a repeated graphic, and whether it is an optically adjacent correction graphic have all been obtained in the process of performing different types of feature analysis on the target graphic. Therefore, when generating the gauge file of the auxiliary graphic 103, there is no need to analyze the geometric features of the auxiliary graphic, whether it is a repeated graphic, and whether it is an optically adjacent correction graphic again.

[0085] In this embodiment, before generating the gauge file of at least a part of the auxiliary graphics 103 in the local analysis area 101, the process further includes: acquiring the coordinate information of the auxiliary graphics 103 for which the gauge file needs to be generated.

[0086] In this embodiment, before generating the gauge file of at least part of the target graphic 102, it also includes: specifying the generation format of the gauge file. By specifying the generation format of the gauge file, gauge files of different formats can be generated at the same time without manual conversion one by one, further improving the efficiency of generating the gauge file of the layout.

[0087] Correspondingly, an embodiment of the present invention further provides a storage medium on which computer instructions are stored. When the computer instructions are executed, the steps of any one of the above-mentioned embodiment methods are executed.

[0088] Correspondingly, an embodiment of the present invention further provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of any one of the above-mentioned embodiment methods are executed.

[0089] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A method for automatically generating a gauge file, characterized in that: include: Acquire a layout to be detected, wherein the layout to be detected has a plurality of target graphics; Performing different types of feature analysis on the target graphic to obtain each type of feature analysis result; Based on the feature analysis result, a gauge file of at least part of the target graphic is generated.

2. The method for automatically generating a gauge file according to claim 1, wherein: The method of performing different types of feature analysis on the target graphics and obtaining each type of feature analysis result includes: obtaining a local analysis area in the layout to be detected; performing different types of feature analysis on a number of the target graphics in the local analysis area and obtaining each type of feature analysis result.

3. The method for automatically generating a gauge file according to claim 2, wherein: The method for obtaining a local analysis area in the to-be-detected layout includes: obtaining a positioning point; establishing a capture window based on the positioning point; and using the area captured by the capture window as the local analysis area.

4. The method for automatically generating a gauge file according to claim 3, wherein: The interception window is a rectangle.

5. The method for automatically generating a gauge file according to claim 4, characterized in that: The method for establishing the interception window based on the positioning point includes: obtaining a first interception size along a first direction; obtaining a second interception size along a second direction, the first direction being perpendicular to the second direction; establishing the interception window based on the first interception size, the second interception size and the positioning point; wherein the positioning point is the center point of the interception window, the first interception size is the spacing size of the positioning point from the side length of the interception window along the first direction, and the second interception size is the spacing size of the positioning point from the side length of the interception window along the second direction.

6. The method for automatically generating a gauge file according to claim 2, wherein: The layout to be detected includes: a single-layer layout formed by flattening layouts of different levels, or a multi-layer layout formed by merging layouts of different layers.

7. The method for automatically generating a gauge file according to claim 2, wherein: Different types of feature analysis include: geometric feature analysis and environmental feature analysis.

8. The method for automatically generating a gauge file according to claim 7, wherein: The geometric features include: the shape of the target pattern, the characteristic size of the target pattern, and the spacing size between adjacent target patterns.

9. The method for automatically generating a gauge file according to claim 7, wherein: The environmental feature analysis includes: whether the target graphics in the local analysis area are repeated graphics, whether the target graphics are optical proximity correction graphics, and whether auxiliary graphics are inserted in the local analysis area.

10. The method for automatically generating a gauge file according to claim 8, wherein: The method for analyzing the shape of the target graphic includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphic is 4, judging that the target graphic is a rectangle; when the number of the corner points of the target graphic is greater than 4, performing small line segment removal processing on the target graphic; after performing the small line segment removal processing, judging the shape of the target graphic.

11. The method for automatically generating a gauge file according to claim 10, wherein: The method for removing small line segments includes: when the difference between adjacent corner points in the target figure changes from a first coordinate difference less than a first preset value to a second coordinate difference less than a first preset value, or changes from a second coordinate difference less than a first preset value to a first coordinate difference less than a first preset value, then connecting the first and last corner points.

12. The method for automatically generating a gauge file according to claim 11, wherein: After performing the small line segment removal process, the method for determining the shape of the target figure includes: after traversing all adjacent corner points in the target figure, obtaining the number of corner points of the target figure; The number of polygons of the target figure is the same as the number of corner points.

13. The method for automatically generating a gauge file according to claim 11, wherein: The difference between the first coordinates is: the difference between the horizontal coordinates or the difference between the vertical coordinates; the difference between the second coordinates is: the difference between the vertical coordinates or the difference between the horizontal coordinates.

14. The method for automatically generating a gauge file according to claim 8, wherein: The method for analyzing the characteristic size of the target graphic and the spacing size between adjacent target graphics includes: selecting a measurement point in the local analysis area; forming a ray based on the measurement point; obtaining the number of intersections between the ray and all the edge lines of the target graphics in the local analysis area; when the number of intersections is an odd number, judging that the measurement point is inside the target graphic; when the number of intersections is an even number, judging that the measurement point is outside the target graphic; when judging that the measurement point is inside the target graphic, forming a first line segment along a first direction or a second direction through the measurement point until it intersects with the target graphic. The first direction is perpendicular to the second direction, and the first line segment is perpendicular to the sideline of the target graphic where the intersection is generated; the length of the first line segment is used as the length characteristic size or width characteristic size of the target graphic; when it is determined that the measuring point is outside the target graphic, a second line segment along the first direction or the second direction is formed through the measuring point until an intersection is generated with the sideline of the adjacent target graphic, and the second line segment is perpendicular to the sideline of the adjacent target graphic where the intersection is generated; the length of the second line segment is used as the spacing size between adjacent target graphics.

15. The method for automatically generating a gauge file according to claim 9, wherein: The method for analyzing whether several target graphics in the local analysis area are repeated graphics includes: obtaining the corner points of each target graphic; based on each corner point in the target graphic, obtaining the length of each edge line of the target graphic and the angle between adjacent edge lines, and forming a feature list according to a preset arrangement order; when the feature lists of two target graphics are exactly the same, the two target graphics are judged to be repetitive graphics.

16. The method for automatically generating a gauge file according to claim 9, wherein: The method for analyzing whether the target figure is an optical proximity correction figure includes: obtaining the corner points of each of the target figures; when the number of the corner points of the target figure is greater than 4, and the difference in the horizontal coordinates or the difference in the vertical left sides between adjacent corner points is less than a second preset value, then judging that the target figure is an optical proximity correction figure.

17. The method for automatically generating a gauge file according to claim 9, wherein: The method for analyzing whether the auxiliary graphic is inserted in the local analysis area includes: obtaining the corner points of each of the target graphics; when the number of the corner points of the target graphics is equal to 4, and the difference between the horizontal coordinate or the vertical coordinate between adjacent corner points is less than a third preset value, it is judged that the auxiliary graphic is inserted in the local analysis area.

18. The method for automatically generating a gauge file according to claim 9, wherein: When it is determined that the auxiliary graphic is not inserted into the local analysis area, the target graphic includes: a main graphic; when it is determined that the auxiliary graphic is inserted into the local analysis area, the target graphic includes: the main graphic and the auxiliary graphic.

19. The method for automatically generating a gauge file according to claim 18, wherein: The method for generating a gauge file of at least a portion of the target graph includes: generating a gauge file of at least a portion of the main graph in the local analysis area.

20. The method for automatically generating a gauge file according to claim 19, wherein: Before generating the gauge file of at least part of the main graph in the local analysis area, the method further includes: acquiring coordinate information of the main graph for which the gauge file needs to be generated.

21. The method for automatically generating a gauge file according to claim 18, wherein: When it is determined that the auxiliary graphic is inserted into the local analysis area, before generating the gauge file of at least part of the target graphic, the method further includes: obtaining instruction information on whether to generate the gauge file of the auxiliary graphic.

22. The method for automatically generating a gauge file according to claim 21, wherein: When the instruction information for generating the gauge file of the auxiliary graphic is obtained, the method for generating the gauge file of at least part of the target graphic further includes: generating the gauge file of at least part of the auxiliary graphic in the local analysis area.

23. The method for automatically generating a gauge file according to claim 22, wherein: Before generating the gauge file of at least part of the auxiliary graphics in the local analysis area, the method further includes: acquiring coordinate information of the auxiliary graphics for which the gauge file needs to be generated.

24. The method for automatically generating a gauge file according to claim 1, wherein: Before generating the gauge file of at least part of the target graph, the method further includes: specifying a generation format of the gauge file.

25. A storage medium having computer instructions stored thereon, characterized in that: When the computer instructions are executed, the steps of the method according to any one of claims 1 to 24 are executed.

26. A terminal comprising a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, characterized in that: When the processor runs the computer instructions, the steps of the method according to any one of claims 1 to 24 are performed.

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