Micro mechanical antenna forming method and antenna system thereof

Abstract

The invention discloses a micro mechanical antenna forming method and an antenna system thereof, and belongs to the technical field of antennas. An antenna based on a super-lubricity high-speed micromechanical system is adopted, an electromagnetic dielectric layer is located on a sliding block, and the sliding block is in super-lubricity contact with a substrate. The electromagnetic dielectric layer is an electrified electret or ferroelectric or permanent magnet material or a composite structure of the materials. The sliding block is driven by alternating electric field force or magnetic field force or ultrasonic sound pressure to do reciprocating motion on the dielectric layer at a set motion frequency, reciprocating motion of the electromagnetic dielectric layer causes an alternating electromagnetic field so as to radiate electromagnetic waves, or the sliding block reciprocates under the action of an electric field or a magnetic field in electric field waves so as to receive electromagnetic wave signals. The problems of small electromagnetic medium movement stroke, low movement speed, low movement frequency and the like of a traditional micro mechanical antenna are solved. The antenna is widely applied to the technical field of micro-mechanical antennas.

Description

Technical Field

[0001] The present invention belongs to the field of antenna technology, and further relates to the field of micromechanical antenna technology, and specifically, to a method for forming a micromechanical antenna and an antenna system thereof. Background Art

[0002] Antennas are components used in radio equipment to transmit or receive electromagnetic waves. They can convert electromagnetic waves propagating in free space into outputs such as current and voltage, or vice versa. Traditional antennas are mainly composed of conductors. By applying high-frequency alternating current, the oscillating current will generate changing electric and magnetic fields in the antenna, and eventually form electromagnetic waves in space. The length of the antenna is usually an integer multiple or fraction of the propagation wavelength. This design can enhance the resonance efficiency, thereby maximizing the radiation or reception capabilities. However, when the antenna length is much smaller than the wavelength of the electromagnetic wave, its efficiency will drop sharply, making it difficult to further reduce the size of the antenna. In addition, conditions such as impedance matching must also be met in the antenna design.

[0003] With the development of wearable devices, embedded devices, bio-implantable devices, and the Internet of Things, the demand for micro-antennas is becoming increasingly strong. The main type of micro-antenna is the mechanical antenna. However, the traditional mechanical system is large in size, and the micro-mechanical system has the disadvantages of small travel, low movement speed, and low movement frequency of electromagnetic media such as charge or magnetic dipoles, which limits the practical application of mechanical antennas. How to increase the travel of the medium of charge or magnetic dipoles, increase its movement speed, and expand the frequency range of operation is still the focus of promoting the development and actual deployment of micro-mechanical antennas, and is a topic that the industry has been studying.

[0004] In view of this, the present invention is proposed. Summary of the invention

[0005] The technical problem to be solved by the present invention is to solve the problem that the existing micro-mechanical antenna system has a small electromagnetic medium travel, low movement speed and low movement frequency, thereby reducing the performance and application range of the device.

[0006] The inventive concept of the present invention is to generate electromagnetic field radiation through the mechanical movement of a medium with charge or magnetic dipole to form a micromechanical antenna. The radiation principle of the micromechanical antenna enables it to effectively radiate electromagnetic waves when the physical size is much smaller than the electromagnetic wave size, thereby realizing wireless communication with a smaller size. Taking advantage of the characteristics of the ultra-smooth micromechanical system, which has extremely low loss, a large stroke (50% of the length of the movement size), a movement speed of nearly 300 meters per second, and a maximum frequency of several GHz, a micromechanical antenna based on an ultra-smooth high-speed micromechanical system is used to solve the problem to be solved by the present invention.

[0007] The micromechanical system refers to an industrial technology that integrates microelectronics technology and mechanical engineering, and its operating range is usually within the micrometer scale. The present invention uses an electrode-driven micro-slider and an electromagnetic dielectric layer as the micromechanical system, and the micro-slider is in super-slip contact with the substrate.

[0008] Superlubricity, also known as superlubricity or structural superlubricity, refers to the phenomenon that the friction between objects in relative motion is almost zero or even completely disappears. The superlubricity phenomenon mainly occurs at the interface between two non-commensurately matched crystals.

[0009] To this end, the present invention provides a method for generating a micro-mechanical antenna. The method is: (1) A slider is placed in the central area of ​​the front surface of an insulating substrate, and there is super-slip contact between the bottom surface of the slider and the upper surface of the substrate.

[0010] (2) A sliding electromagnetic medium layer is made on the upper surface of the slider.

[0011] (3) A driving source is made at both ends of the substrate to drive the slider to drive the sliding electromagnetic medium layer to move. The electromagnetic medium layer is a composite structure of one or more electret, ferroelectric, and permanent magnetic materials.

[0012] (4) When the electromagnetic dielectric layer is an electret, a stationary electromagnetic dielectric layer is formed in the middle region of the bottom of the substrate, a frequency modulation electrode is formed on the bottom surface of the stationary electromagnetic dielectric layer, and a set alternating frequency modulation voltage signal is applied to the frequency modulation electrode to adjust the natural frequency of the antenna; When the electromagnetic dielectric layer is a ferroelectric or permanent magnetic material, a frequency modulation electrode is made on the bottom surface of the substrate, and a set alternating frequency modulation voltage signal is applied to the frequency modulation electrode to adjust the natural frequency of the antenna. The frequency modulation electrode changes the restoring force of the sliding electromagnetic dielectric layer by changing the interaction force between the electrode and the sliding electromagnetic dielectric layer, thereby changing the natural frequency of the system.

[0013] (5) Detection electrodes are made on the bottom surface of the substrate at both ends of the frequency modulation electrode to detect the electromagnetic wave signal received by the antenna.

[0014] (6) Apply the set driving operating voltage to the driving source.

[0015] (7) The driving source generates driving force.

[0016] (8) The driving force drives the sliding electromagnetic medium layer to reciprocate on the substrate at a set frequency. The reciprocating motion of the electromagnetic medium layer generates an alternating electromagnetic field and radiates electromagnetic waves; or the electromagnetic medium layer moves back and forth under the action of the electric field or magnetic field in the electric field wave to receive electromagnetic wave signals, thereby forming a micromechanical antenna.

[0017] The driving source is a voltage driving source or an ultrasonic driving source.

[0018] The driving force is an alternating electric field force, a magnetic field force or ultrasonic wave.

[0019] The operating mechanism of this method is: the sliding electromagnetic dielectric layer and the stationary electromagnetic dielectric layer form an electric dipole. When the sliding electromagnetic dielectric layer vibrates at high speed under the electromagnetic field force generated by the driving electrode or the ultrasonic wave, a vibrating electric dipole will be formed, thereby radiating electromagnetic waves. Conversely, when the electromagnetic wave is transmitted to the electromagnetic dielectric layer, the action of the electric field will cause the sliding electromagnetic dielectric layer to vibrate, thereby causing the potential space between the positive sliding electromagnetic dielectric layers to change, which is detected by the detection module. The frequency modulation electrode can adjust the natural frequency of the device (antenna) to respond to electromagnetic waves of different frequencies.

[0020] The antenna system of the micro-mechanical antenna generation method is as follows: Figure 1 The invention comprises: a driving electrode 1, a substrate 2, a slider 3, a sliding electromagnetic medium layer 4, a driving module 5, a detection electrode 6, a frequency modulation electrode 8, a detection module 9, and a power driving module 10.

[0021] The slider 3 is located in the central area of ​​the front surface of the substrate 2 , and the bottom surface of the slider 3 and the upper surface of the substrate 2 are in super-slip contact.

[0022] The sliding electromagnetic medium layer 4 is made on the upper surface of the slider 2 .

[0023] The driving electrodes 1 are made at two ends of the front surface of the substrate, and there are two driving electrodes 1 .

[0024] When the driving electrode (1) is a stationary body, a static electromagnetic medium layer (7) is produced in the middle area of ​​the bottom of the substrate, and the static electromagnetic medium layer (7) is embedded in the bottom of the substrate or located on the bottom surface of the substrate.

[0025] When the driving electrode (1) is made of ferroelectric or permanent magnetic material, the frequency modulation electrode (8) is directly manufactured in the middle area of ​​the bottom of the substrate.

[0026] The detection electrodes 6 are made on the bottom surface of the substrate at both ends of the frequency modulation electrode (8), and there are two detection electrodes 6.

[0027] The power driving module 10 is connected to the driving module 5 and the detection module 9 respectively, the driving working voltage signal (alternating driving voltage signal) output end of the driving module 5 is connected to the driving electrode 1, the alternating frequency modulation voltage signal output end of the driving module 5 is connected to the frequency modulation electrode 8, and the signal detection end of the detection module 9 is connected to the detection electrode 6.

[0028] The operating mechanism of this system is: due to the ultra-slippery characteristics between the slider and the substrate, the friction resistance is extremely small. Under the driving force of the alternating electric field force or magnetic field force or ultrasonic wave, the slider drives the electromagnetic medium layer to vibrate at the same frequency as the driving force field frequency. Since the electromagnetic medium layer is charged or has a dipole moment or magnetism, the moving electromagnetic medium layer will modulate the electromagnetic field, and finally form an electromagnetic wave output.

[0029] Alternatively, under the action of the electric field or magnetic field in the electromagnetic wave, the electromagnetic medium layer drives or hinders the movement of the slider, and is detected by the electrode below through voltage or capacitance changes.

[0030] The adjustment voltage on the frequency modulation electrode of the driving module can adjust the size of the slider's restoring force, so that the system's resonant frequency is close to the driving frequency applied by the driving electrode. A smaller driving voltage can avoid interference from the electric field changes generated by the electrode. However, due to the high Q value of the mechanical system, a smaller driving force can also drive the slider to vibrate with a high amplitude. Adjusting the voltage and driving frequency on the frequency modulation electrode of the driving module can also achieve frequency modulation output of electromagnetic waves.

[0031] The beneficial effects of the present invention are: the micro-mechanical antenna has high radiation efficiency in a very small size. The ultra-smooth micro-mechanical system has extremely low loss, and its Q value is as high as 10 7 , while the efficiency of mechanical antennas is proportional to the Q value. At the same time, the ultra-smooth micromechanical system has a large stroke (50% of the length of the moving size) and a moving speed of nearly 300 meters per second, so its equivalent current is much higher than that of traditional mechanical antennas, and the highest frequency can reach several GHz. At the same time, by changing the structural parameters of the ultra-smooth micromechanical system, the frequency of the antenna can also be tuned to below kHz, thus having a large working bandwidth and application range.

[0032] The technical solution of the present invention can be widely applied to the technical field of micro-mechanical antennas. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of the structure of the voltage driven source micro-mechanical antenna system of the present invention.

[0034] Figure 2 Schematic diagram of the angular distribution of electromagnetic waves radiated by the micromechanical antenna system of the present invention.

[0035] Figure 3 It is a schematic diagram of the variation of electromagnetic waves radiated by the micromechanical antenna system of the present invention with distance.

[0036] Figure 4 This is a schematic diagram of the structure of the ultrasonic drive source micro-mechanical antenna system of the present invention.

[0037] In the figure: 1 is a driving electrode, 2 is a substrate, 3 is a slider, 4 is a sliding electromagnetic medium layer, 5 is a driving module, 6 is a detection electrode, 7 is a stationary electromagnetic medium layer, 8 is a frequency modulation electrode, 9 is a detection module, 10 is a power driving module, and 11 is an ultrasonic generator. DETAILED DESCRIPTION

[0038] like Figure 1-3 As shown, the micromechanical antenna forming method and antenna system thereof are specifically implemented as follows: The material of the slider is molybdenum disulfide. The thickness of the molybdenum disulfide slider 3 is (50±20) nanometers, and the length or width is 10 microns to 1000 microns (theoretically, a larger slider is beneficial to increase the power of the electromagnetic wave emission, but the maximum size of the super slider can only be achieved at the millimeter level at present).

[0039] The material of the substrate is hexagonal boron nitride. Molybdenum disulfide and hexagonal boron nitride have excellent super-slip properties.

[0040] The electromagnetic medium layer is a composite structure of one or more electret, ferroelectric, and permanent magnetic materials. The electret needs to be positively or negatively charged, while the ferroelectric and permanent magnetic materials are electromagnetic polarized materials and do not need to be additionally injected with electric charges to be positively or negatively charged.

[0041] The electret is a SiO2 / Si3N4 double-layer film, the ferroelectric is barium titanate, and the permanent magnetic material is Ru-Fe-B.

[0042] The electret, also known as the permanent electret, is a dielectric material that can store space charge and dipole charge permanently and can be charged by corona discharge. The high voltage electric field will cause local breakdown of the gas and generate corona discharge, which ionizes the gas. The space charge or ion beam generated by the gas ionization bombards the surface of the dielectric under the action of the electric field, and the space charge can be directly deposited on the surface or in the body of the dielectric. Different types of space charge or ion beam will make the electret carry different charges. For example, under the action of the electric field, gas molecules in the air (such as oxygen and nitrogen) begin to ionize to form electrons and positive ions. If silicon nitride material (Si3N4) is placed in the negative electrode area of ​​the corona discharge, the positive ions generated in the air during the discharge process will be attracted to the surface of the material, so that the surface is positively charged. If silicon nitride (Si3N4) is placed in an electric field and connected to the positive electrode, negative electrons will be attracted to the surface of silicon nitride, so that the surface is negatively charged.

[0043] like Figure 1 As shown, the hexagonal boron nitride substrate 2 is 200 microns thick and is embedded with a 10-micron positively charged SiO2 / Si3N4 double-layer electret 7. The bottom surface of the electret 7 has a frequency modulation electrode 8 and is connected to the driving module 5.

[0044] The thickness of the MoS2 slider 3 is (50±20) nanometers, and the length and width are 50 microns and 50 microns respectively. The MoS2 slider 3 has a 10 micron thick negatively charged SiO2 / Si3N4 double-layer electret 4 on its upper surface, wherein the thickness of SiO2 is 2.6 microns and the thickness of Si3N4 is 7.4 microns.

[0045] The voltage applied by the driving module 5 to the frequency modulation electrode 8 can adjust the magnitude of the restoring force of the slider, so that the resonant frequency of the system is close to the driving frequency applied by the driving electrode 1 .

[0046] The driving voltage is 0.01 V to 1 V, and the driving frequency is 1 KHz to 300 KHz. A smaller driving voltage can avoid interference from the electric field changes generated by the electrodes. However, due to the high Q value of the mechanical system, a smaller driving force can also drive the slider to vibrate with high amplitude.

[0047] By adjusting the voltage and driving frequency on the frequency modulation electrode 8, the frequency modulation output of the electromagnetic wave can also be achieved.

[0048] How it works: The negatively charged SiO2 / Si3N4 double-layer electret 4 and the positively charged SiO2 / Si3N4 double-layer electret 7 form an electric dipole. When the negatively charged SiO2 / Si3N4 double-layer electret 4 vibrates at high speed under the action of the driving electrode, a vibrating electric dipole will be formed, thereby radiating electromagnetic waves. Conversely, when electromagnetic waves are transmitted to the double-layer electret, the action of the electric field will cause the negatively charged SiO2 / Si3N4 double-layer electret 4 to vibrate, and the potential space change caused by the electret vibration is detected by the detection module 9. The frequency modulation electrode 8 can adjust the natural frequency of the antenna and respond to electromagnetic waves of different frequencies.

[0049] The schematic diagram of the distribution of electromagnetic waves radiated by the micro-mechanical antenna system of this embodiment is as follows: Figure 2 and Figure 3 shown.

[0050] Figure 4 FIG. 1 is another structural diagram of the micromechanical antenna system of the present invention. The difference from the previous embodiment is that the driving electrode 1 is replaced by an ultrasonic transmitter 11, and the ultrasonic transmitter 11 is located at both ends of the substrate 2. The other structures and parameters are the same as Figure 1 The structure shown Figure 1 At this time, the ultrasonic wave drives the substrate to vibrate, so that the slider vibrates relative to the substrate, forming a vibrating dipole moment, thereby radiating electromagnetic waves. At this time, the drive is non-voltage drive, which can avoid interference from the electric field changes generated by the electrode.

[0051] Finally, it should be noted that the above embodiments are merely examples for the purpose of clear explanation. The present invention includes but is not limited to the above embodiments. It is not necessary and impossible to list all implementation methods exhaustively. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made on the basis of the above description, such as adjustment, modification, replacement or modification. All implementation methods that meet the requirements of the present invention belong to the protection scope of the present invention.

Claims

1. A method for forming a micromechanical antenna, characterized in that: The method is: (1) A slider is placed in the central area of ​​the front surface of an insulating substrate, and the bottom surface of the slider and the upper surface of the substrate are in super-slip contact; (2) Making a sliding electromagnetic dielectric layer on the upper surface of the slider; (3) A driving source is made at both ends of the substrate to drive the slider to drive the sliding electromagnetic medium layer to move, wherein the electromagnetic medium layer is a composite structure of one or more of electret, ferroelectric, and permanent magnetic materials; (4) When the electromagnetic dielectric layer is an electret, a stationary electromagnetic dielectric layer is formed in the middle region of the bottom of the substrate, a frequency modulation electrode is formed on the bottom surface of the stationary electromagnetic dielectric layer, and a set alternating frequency modulation voltage signal is applied to the frequency modulation electrode to adjust the natural frequency of the antenna; When the electromagnetic medium layer is a ferroelectric or permanent magnetic material, a frequency modulation electrode is made on the bottom surface of the substrate, and a set alternating frequency modulation voltage signal is applied to the frequency modulation electrode to adjust the natural frequency of the antenna; (5) Making detection electrodes on the bottom surface of the substrate at both ends of the frequency modulation electrode to detect the electromagnetic wave signal received by the antenna; (6) Applying a set driving operating voltage to the driving source; (7) The driving source generates driving force; (8) driving the sliding electromagnetic medium layer to reciprocate on the substrate at a set frequency through a driving force, and the reciprocating motion of the electromagnetic medium layer generates an alternating electromagnetic field and radiates electromagnetic waves; Or it moves back and forth under the action of the electric field or magnetic field in the electric field wave to receive the electromagnetic wave signal, thus forming a micro-mechanical antenna; The driving source is a voltage driving source or an ultrasonic driving source; The driving force is an alternating electric field force, a magnetic field force or ultrasonic wave.

2. The antenna system of the micromechanical antenna forming method according to claim 1, characterized in that: The antenna system comprises a driving electrode (1), a substrate (2), a slider (3), a sliding electromagnetic medium layer (4), a driving module (5), a detection electrode (6), a frequency modulation electrode (8), a detection module (9) and a power driving module (10); The slider (3) is located in the central area of ​​the front surface of the substrate (2), and the bottom surface of the slider (3) and the upper surface of the substrate (2) are in super-slip contact; The sliding electromagnetic medium layer (4) is made on the upper surface of the slider 2; The driving electrodes (1) are manufactured at two ends of the front surface of the substrate, and there are two driving electrodes (1); When the driving electrode (1) is a stationary body, a stationary electromagnetic medium layer (7) is manufactured in the middle area of ​​the bottom of the substrate, and the stationary electromagnetic medium layer (7) is embedded in the bottom of the substrate or located on the bottom surface of the substrate; When the driving electrode (1) is made of ferroelectric or permanent magnetic material, a frequency modulation electrode (8) is directly manufactured in the middle area of ​​the bottom of the substrate; The detection electrodes (6) are made on the bottom surface of the substrate at both ends of the frequency modulation electrode (8), and there are two detection electrodes (6); The power drive module (10) is connected to the drive module (5) and the detection module (9) respectively; the drive working voltage signal output end of the drive module (5) is connected to the drive electrode (1); the alternating frequency modulation voltage signal output end of the drive module (5) is connected to the frequency modulation electrode (8); and the signal detection end of the detection module (9) is connected to the detection electrode (6).

3. The antenna system of the micromechanical antenna forming method according to claim 2, characterized in that: The material of the slider is molybdenum disulfide. The thickness of the molybdenum disulfide slider (3) is (50±20) nanometers, and the length or width is 10 micrometers to 1000 micrometers.

4. The antenna system of the micromechanical antenna forming method according to claim 2, characterized in that: The material of the substrate is hexagonal boron nitride, and the thickness of the hexagonal boron nitride substrate (2) is 200 micrometers.

5. The antenna system of the micromechanical antenna forming method according to claim 2, characterized in that: The electromagnetic medium layer is a composite structure of one or more electret, ferroelectric, and permanent magnetic material. The ferroelectric is barium titanate, and the permanent magnetic material is neodymium iron boron.

6. The antenna system of the method for forming a micromechanical antenna according to claim 5, characterized in that: The electret is a SiO2 / Si3N4 double-layer film.

7. The antenna system of the method for forming a micromechanical antenna according to claim 6, characterized in that: The positively charged SiO2 / Si3N4 double-layer electret 7 has a thickness of 10 micrometers and is embedded at the bottom of the substrate (2).

8. The antenna system of the micromechanical antenna forming method according to claim 7, characterized in that: The thickness of SiO2 is 2.6 microns, and the thickness of Si3N4 is 7.4 microns.

9. The antenna system of the micromechanical antenna forming method according to claim 2, characterized in that: The driving operating voltage is 0.01 V to 1 V, and the frequency is 1 KHz to 300 KHz.

10. The antenna system of the method for forming a micromechanical antenna according to claim 2, characterized in that: The driving electrode (1) is replaced with an ultrasonic transmitter (11), and the ultrasonic transmitter (11) is located at two ends of the substrate (2).

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