Conveying system and diffusion furnace

Abstract

The invention discloses a conveying system and a diffusion furnace, and belongs to the technical field of semiconductor processing. In the conveying system, an air inlet assembly extends in the axial direction of a process chamber of the diffusion furnace and communicates with the process chamber. In the air inlet assembly, the first air inlet pipe is sleeved with the second air inlet pipe, and a conveying gap is formed between the second air inlet pipe and the first air inlet pipe. The gas outlet end of the first gas inlet pipe and the gas outlet end of the second gas inlet pipe are close to a furnace door of the diffusion furnace; one end of the first input pipeline is communicated with a process gas source, and the other end is communicated with the gas inlet end of the first gas inlet pipe; one end of the second input pipeline is communicated with the water source, and the other end of the second input pipeline is connected to the air inlet end of the second air inlet pipe. According to the conveying system, the problems that in the working process of an existing diffusion furnace, the air inlet pipeline is extremely prone to being blocked by boric acid, so that the air inlet pipeline needs to be frequently cleaned, the process efficiency is seriously affected, and the manpower and spare part cost is increased can be solved.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor processing technology, and specifically relates to a conveying system and a diffusion furnace. Background Art

[0002] In the manufacturing process of semiconductor products, the low-pressure boron diffusion furnace is an important equipment in the tunneling oxide layer passivation contact process production line. The materials used in the process include boron element, and the process includes alternating water-passing steps and source-passing steps. In the source-passing step, the diffusion source introduced is boron trichloride. Since boron trichloride reacts with water to generate boric acid, which is a powdery substance, it is easy to clog the air intake pipe. Therefore, during the process, pump pressure alarms will frequently occur due to blockage, so the process has to be stopped and the air intake pipe must be cleaned, which seriously affects the process efficiency and increases manpower and spare parts costs. Summary of the invention

[0003] The purpose of the embodiments of the present application is to provide a conveying system and a diffusion furnace to solve the problem that during the operation of the current diffusion furnace, the air intake pipeline is easily blocked by boric acid, thereby requiring frequent cleaning of the air intake pipeline, seriously affecting the process efficiency and increasing manpower and spare parts costs.

[0004] In a first aspect, an embodiment of the present application discloses a conveying system, which is applied to a diffusion furnace. The conveying system includes an air intake assembly, a first input pipeline, and a second input pipeline. The air intake assembly extends along the axial direction of the process chamber of the diffusion furnace and is in communication with the process chamber; the air intake assembly comprises a first air intake pipe and a second air intake pipe, the second air intake pipe is sleeved outside the first air intake pipe, and a conveying gap is formed between the second air intake pipe and the first air intake pipe; The outlet ends of the first air inlet pipe and the second air inlet pipe are both close to the furnace door of the diffusion furnace; one end of the first input pipeline is connected to the process gas source, and the other end is connected to the air inlet end of the first air inlet pipe; The air inlet end of the second air inlet pipe is located on the side wall of the second air inlet pipe and away from the furnace door. One end of the second input pipeline is connected to the water source, and the other end is connected to the air inlet end of the second air inlet pipe.

[0005] In a second aspect, an embodiment of the present application discloses a diffusion furnace, which includes a process chamber and the above-mentioned conveying system.

[0006] The embodiment of the present application discloses a conveying system, which can be applied to a diffusion furnace and convey process gas and water to the diffusion furnace. The conveying system includes an air intake assembly, which extends along the axial direction of the process chamber of the diffusion furnace and is connected to the process chamber, so that the conveying efficiency of the process gas and water is relatively high, and by making the outlet end of the first air intake pipe and the outlet end of the second air intake pipe close to the furnace door position of the diffusion furnace, the process uniformity in the process chamber is relatively higher. At the same time, the second air inlet pipe in the air inlet assembly is sleeved outside the first air inlet pipe, and a conveying gap is formed between the second air inlet pipe and the first air inlet pipe, by making the respective air outlet ends of the first air inlet pipe and the second air inlet pipe connected to the process chamber of the diffusion furnace, and the conveying system also includes a first input pipeline and a second input pipeline, wherein one end of the first input pipeline is connected to the process gas source, and the other end of the first input pipeline is connected to the air inlet end of the first air inlet pipe, so that the first input pipeline can be used to transport the process gas to the process chamber through the first air inlet pipe; accordingly, one end of the second input pipeline is connected to the water source, and the other end of the second input pipeline is connected to a position in the side wall of the second air inlet pipe away from the furnace door of the diffusion furnace, so that water can enter the gap between the first air inlet pipe and the second air inlet pipe from the second input pipeline through the air inlet end of the second air inlet pipe, and be transported to the process chamber.

[0007] As described above, since in the delivery system disclosed in the embodiment of the present application, the delivery processes of water and process gas are independent of each other, it is possible to prevent the process gas (including boron trichloride) from reacting with water to generate boric acid and block the air intake component, thereby greatly reducing the number of cleaning times of the delivery system and the number of spare parts, thereby improving production efficiency and reducing process costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings: Figure 1 It is a schematic diagram of the assembly of the conveying system disclosed in the embodiment of the present application; Figure 2 It is a schematic structural diagram of a first cooling element in a conveying system disclosed in an embodiment of the present application; Figure 3 It is a cross-sectional schematic diagram of the air intake assembly in the delivery system disclosed in the embodiment of the present application.

[0009] Reference numerals: 110-exhaust pipe, 121-first output pipeline, 122-second output pipeline, 131-first purge pipeline, 132-second purge pipeline, 133-third purge pipeline, 134-fourth purge pipeline, 135-fifth purge pipeline, 140-discharge pipe, 150-carrier gas pipeline, 161-first input pipeline, 162-second input pipeline, 170-backfill pipeline, 180-pressure relief pipeline, 190-pressure detection pipeline, 201-first valve, 202-second valve, 203-third valve, 204-fourth valve, 205-fifth valve, 206-sixth valve, 207-seventh valve, 208-eighth valve, 209-ninth valve, 210-tenth valve, 211-eleventh valve, 212-twelfth valve, 310-filter mechanism, 321-first cooling element, 322-second cooling element, 322a-bottle body, 322b-intake branch pipe, 322c-exhaust branch pipe, 411-first one-way valve, 412-second one-way valve, 413-third one-way valve, 421-first normally open valve, 422-second normally open valve, 500-Suction pump, 600-intake assembly, 610-first intake pipe, 620-second intake pipe, 630-support ring, 701-first flow meter, 702-second flow meter, 703-third flow meter, 800-pressure detection parts, 910-process chamber, 920-factory exhaust, 930-waste liquid barrel. DETAILED DESCRIPTION

[0010] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0011] The terms "first", "second", etc. in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0012] like Figure 1-Figure 3 As shown, the embodiment of the present application discloses a conveying system, which can be applied to a diffusion furnace. More specifically, the conveying system disclosed in the embodiment of the present application can be applied to a low-pressure boron diffusion furnace, that is, a diffusion furnace is used to process materials containing boron elements to produce PN junctions and other devices that can be applied to photovoltaic products. In this case, the boron-containing material (i.e., process gas) delivered to the diffusion furnace by the conveying system can be specifically boron trichloride. In detail, the process includes a source passing step and a water passing step: in the source passing step, the process gas introduced into the process chamber 910 is boron trichloride, and the generated product is boron oxide. In the water passing step, as the name implies, the medium introduced into the diffusion furnace by the conveying system is water, usually water vapor. Since both boron trichloride and boron oxide are easy to react with water to generate boric acid, and boric acid is a powdery structure, in the current conveying system, even if the air intake pipeline is controlled to separately transport the diffusion source and water, it is easy for the diffusion source to react with water, generate boric acid and block the air intake pipeline.

[0013] For this reason, Figure 1 As shown, in the conveying system disclosed in the embodiment of the present application, it includes an air intake assembly, and the air intake assembly extends along the axial direction of the process chamber of the diffusion furnace, and the air intake assembly is connected to the process chamber. Among them, the process chamber of the diffusion furnace is generally a columnar structure, and the axial direction of the process chamber is the extension direction of the columnar process chamber. More intuitively speaking, in Figure 1 In the figure, the axial direction of the process chamber is the left-right direction shown in the figure. When the above technical solution is adopted, the flow direction of the medium in the air intake assembly can be parallel or substantially parallel to the extension direction of the process chamber, thereby ensuring that the medium transported by the air intake assembly can be transported as deep as possible into the process chamber.

[0014] In more detail, Figure 3As shown, the air inlet assembly 600 includes a first air inlet pipe 610 and a second air inlet pipe 620, and the second air inlet pipe 620 is arranged outside the first air inlet pipe 610, and a conveying gap is formed between the second air inlet pipe 620 and the first air inlet pipe 610, so that water and boron trichloride can be independently conveyed to the process chamber 910 through the conveying gap between the second air inlet pipe 620 and the first air inlet pipe 610, and the internal space of the first air inlet pipe 610, respectively, which can prevent water and boron trichloride from reacting.

[0015] Considering that the boiling point of the product boron oxide in the low-pressure boron process is relatively high, it is basically in a liquid state during the diffusion process. In order to make the distribution uniformity of boron oxide in the process chamber 910 relatively high, reduce the dead layer, and improve the uniformity of the formed PN junction, further, in the delivery system disclosed in the embodiment of the present application, a carrier gas pipeline 150 may also be included to deliver carrier gas to the process chamber 910. Of course, the carrier gas does not react with the process gas and the silicon wafer, and the type of carrier gas can be flexibly selected according to actual conditions. For example, the carrier gas may include an inert gas. In order to reduce costs and reduce the difficulty of assembling the entire delivery system, in a specific embodiment of the present application, the carrier gas and the purge gas are the same gas, and both can be nitrogen. In addition, when the delivery system includes a carrier gas pipeline 150, the carrier gas pipeline 150 can also be controlled to work before the process to deliver carrier gas to the process chamber 910, which helps to keep the surface of the silicon wafer clean and ensure that the boron atoms can be evenly diffused on the surface of the silicon wafer.

[0016] In more detail, the outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620 are both connected to the process chamber 910 of the diffusion furnace, and in the process of laying out the air inlet assembly 600, the air inlet assembly 600 can be installed from the exhaust end of the process chamber 910. At the same time, by extending the first air inlet pipe 610 and the second air inlet pipe 620 from the exhaust end of the process chamber 910 toward the direction close to the furnace door of the diffusion furnace, the outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620 can be close to the furnace door of the process chamber 910, so that the medium transported by the first air inlet pipe 610 and the second air inlet pipe 620 can be transported to an area as close as possible to the furnace door of the process chamber 910, so as to improve the process uniformity at different positions in the process chamber.

[0017] During the assembly of the delivery system, one end of the carrier gas pipeline 150 can be connected to the carrier gas source, and one end of the first input pipeline 161 can be connected to the process gas source (i.e., the boron source). At the same time, the other ends of the carrier gas pipeline 150 and the first input pipeline 161 are connected to the inlet end of the first inlet pipe 610, so that the process gas can be carried by the carrier gas and transported to the process chamber 910 through the first inlet pipe 610. In addition, one end of the second input pipeline 162 is connected to the water source, and the other end of the second input pipeline 162 is connected to the inlet end of the second inlet pipe 620, so that water can be transported to the process chamber 910 through the second inlet pipe 620. As described above, the boron source can be boron trichloride, and accordingly, the state of the water introduced into the process chamber 910 through the inlet assembly 600 can be vapor.

[0018] More specifically, in order to reduce the difficulty of connecting the second input pipeline 162 and the second air inlet pipe 620, in a specific embodiment of the present application, the air inlet end of the second air inlet pipe 620 can be located on the side wall of the second air inlet pipe 620, that is, the second input pipeline 162 is connected to the side of the second air inlet pipe 620. Of course, the air inlet end of the second air inlet pipe 620 needs to be located outside the process chamber 910. To this end, the air inlet end of the second air inlet pipe 620 can be set away from the furnace door of the process chamber, or in other words, the air inlet end of the second air inlet pipe 620 is located outside the exhaust end of the process chamber 910.

[0019] As described above, by independently delivering the process gas and water to the process chamber 910 through the first air inlet pipe 610 and the second air inlet pipe 620, respectively, the first air inlet pipe 610 and the second air inlet pipe 620 can be basically prevented from being blocked. More specifically, in order to improve the delivery efficiency and delivery effect of the fluid, the first air inlet pipe 610 and the second air inlet pipe 620 are both straight tube structures as a whole, and both are extended along the axial direction of the process chamber 910, and in the process of installing the air inlet assembly 600, the extension direction of the first air inlet pipe 610 and the second air inlet pipe 620 are basically parallel or substantially parallel to the axial direction of the process chamber 910, so as to prevent the fluid from being blocked during the delivery process.

[0020] Of course, since the second input pipeline 162 is connected to the side wall of the second air inlet pipe 620, the water vapor transported in the second input pipeline 162 needs to change its flow direction when entering the second air inlet pipe 620 through the second output pipeline 122. However, since the specific gravity of water vapor is small, the diffusion is relatively fast, so even if the second input pipeline 162 is connected to the side wall of the second air inlet pipe 620, the transport efficiency and transport effect of water vapor will not be affected by the bending of the pipeline. In addition, when both the first air inlet pipe 610 and the second air inlet pipe 620 adopt a straight tube structure, the process gas and water vapor can basically enter the process chamber 910 from the same height, which makes the airflow consistency in the process chamber 910 relatively higher, thereby improving the uniformity within and between slices.

[0021] As described above, the second input pipe 162 is connected to the side wall of the second air inlet pipe 620. For this purpose, the end face of the second air inlet pipe 620 away from its air outlet end can be sealed. Specifically, the aforementioned end face of the second air inlet pipe 620 can extend inward from the side wall of the second air inlet pipe 620 to a position connected to the outer wall of the first air inlet pipe 610, so that the end face of the second air inlet pipe 620 away from its air outlet end can be in a sealed state.

[0022] Optionally, in order to ensure that the structural stability between the first air inlet pipe 610 and the second air inlet pipe 620 is relatively higher, in the conveying system disclosed in the embodiment of the present application, the air inlet assembly 600 may also include a plurality of support rings 630, and the plurality of support rings 630 are arranged at intervals along the extension direction of the first air inlet pipe 610, and each support ring 630 is clamped between the first air inlet pipe 610 and the second air inlet pipe 620, thereby utilizing the plurality of support rings 630 to provide stable support for the first air inlet pipe 610 and the second air inlet pipe 620.

[0023] Accordingly, in order to achieve the purpose of on-off control of the carrier gas pipeline 150, the first input pipeline 161 and the second input pipeline 162, in the embodiment of the present application, the carrier gas pipeline 150, the first input pipeline 161 and the second input pipeline 162 may be provided with an eighth valve 208, a ninth valve 209 and a tenth valve 210 in sequence. In addition, in order to prevent the water vapor in the process chamber 910 from entering the first input pipeline 161 through the first air inlet pipe 610 and reacting with the boron trichloride therein, in the embodiment of the present application, a third one-way valve 413 is further included, and the third one-way valve 413 is disposed upstream of the air inlet end of the first air inlet pipe 610. When the air inlet end of the first air inlet pipe 610 is connected to the first input pipeline 161, the third one-way valve 413 can be set between the first air inlet pipe 610 and the first input pipeline 161, and in order to prevent process gas, water vapor, etc. from entering the carrier gas pipeline 150, the first input pipeline 161 and the carrier gas pipeline 150 can be connected to each other first, and then the third one-way valve 413 can be connected. In other words, when the transportation system includes the carrier gas pipeline 150, the third one-way valve 413 can be set at the position where both the carrier gas pipeline 150 and the first input pipeline 161 are connected to the air inlet end of the first air inlet pipe 610.

[0024] The embodiment of the present application discloses a conveying system, which can be applied to a diffusion furnace and convey process gas and water to the diffusion furnace. The conveying system includes an air intake assembly 600, which extends along the axial direction of a process chamber 910 of the diffusion furnace and is connected to the process chamber 910, so that the conveying efficiency of the process gas and water is relatively high, and by making the outlet ends of the first air intake pipe 610 and the outlet ends of the second air intake pipe 620 close to the furnace door position of the diffusion furnace, the process uniformity in the process chamber 910 is relatively higher. At the same time, the second air inlet pipe 620 in the air inlet assembly 600 is sleeved outside the first air inlet pipe 610, and a conveying gap is formed between the second air inlet pipe 620 and the first air inlet pipe 610, by making the respective air outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620 communicate with the process chamber 910 of the diffusion furnace, and the conveying system also includes a first input pipeline 161 and a second input pipeline 162, wherein one end of the first input pipeline 161 is communicated with the process gas source, and the other end of the first input pipeline 161 is communicated with the first air inlet pipe 610. The air inlet ends are connected, so that the first input pipeline 161 can be used to transport the process gas to the process chamber through the first air inlet pipe 610; accordingly, one end of the second input pipeline 162 is connected to the water source, and the other end of the second input pipeline 162 is connected to a position in the side wall of the second air inlet pipe 620 away from the furnace door of the diffusion furnace, so that water can enter the gap between the first air inlet pipe 610 and the second air inlet pipe 620 from the second input pipeline 162 through the air inlet end of the second air inlet pipe 620, and be transported to the process chamber 910.

[0025] As described above, since in the delivery system disclosed in the embodiment of the present application, the delivery processes of water and process gas are independent of each other, it is possible to prevent the process gas (including boron trichloride) from reacting with water to generate boric acid and block the air intake component, thereby greatly reducing the number of cleaning times of the delivery system and the number of spare parts, thereby improving production efficiency and reducing process costs.

[0026] As described above, in the embodiment of the present application, the first air inlet pipe 610 and the second air inlet pipe 620 extend from the exhaust end of the process chamber 910 into the process chamber 910, and in order to ensure that the process gas and water can more evenly and thoroughly fill the process chamber 910, the outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620 can be extended to a position close to the furnace door of the process chamber 910. The aforementioned close means that, in the axial direction of the process chamber 910, relative to the exhaust end of the process chamber 910, the outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620 are closer to the furnace door of the process chamber 910, that is, the aforementioned close is a relative concept, and the specific value of the spacing size between the first ends of the first air inlet pipe 610 and the second air inlet pipe 620 and the furnace door of the process chamber 910 (that is, the degree of closeness) can be flexibly selected according to actual needs, and this document does not limit this.

[0027] Furthermore, the outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620 can be arranged flush with each other in the axial direction of the air inlet assembly 600. In order to prevent the process gas and water from reacting at the outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620 to generate powder and block the outlet ends of the first air inlet pipe 610 and the second air inlet pipe 620, in another embodiment of the present application, the outlet end of the first air inlet pipe 610 can be extended beyond the outlet end of the second air inlet pipe 620 in the axial direction of the air inlet assembly 600, so that the process gas can be transported to a relatively farther position in the process chamber 910 through the first air inlet pipe 610, and for the second air inlet pipe 620, since it is relatively short, after the water vapor flows to the outlet end of the second air inlet pipe 620, it can directly enter the process chamber 910, which can greatly reduce the probability of blockage of the first ends of the first air inlet pipe 610 and the second air inlet pipe 620.

[0028] That is, in the embodiment of the present application, in the extension direction of the air intake assembly 600, the distance between the air outlet end of the first air intake pipe 610 and the furnace door is smaller than the distance between the air outlet end of the second air intake pipe and the furnace door. In a specific embodiment of the present application, the length d of the portion extending from the first end of the first air intake pipe 610 to the outside of the first end of the second air intake pipe 620 can be between 100 and 150 mm.

[0029] In the process of the diffusion furnace used by the conveying system disclosed in the embodiment of the present application, the process gas including boron trichloride can react with water to generate boron oxide, but since the process product cannot be completely attached to the silicon wafer, the tail gas generated in the process can be transported to the plant exhaust 920 system through the conveying system. Of course, the tail gas output in the process of the diffusion furnace may also include water vapor, etc. For this reason, the tail gas can also be transported to the waste liquid barrel 930 through the conveying system. Of course, in the process of the conveying system transporting the tail gas, impurities such as particles or dust in the tail gas will also be removed to prevent the gas transported to the plant exhaust 920 system from polluting the atmospheric environment.

[0030] As mentioned above, the tail gas includes boric oxide and water. Since the boric acid generated by the reaction of boric oxide and water is in powder form, as the process continues, the pipeline used to discharge the tail gas in the conveying system will be blocked, requiring frequent cleaning or even replacement of the corresponding pipeline, which will have a significant adverse effect on the process efficiency.

[0031] To this end, in the delivery system disclosed in the embodiment of the present application, it also includes an exhaust pipe 110, a first valve 201, a first output pipeline 121 and a second output pipeline 122, wherein one end of the exhaust pipe 110 is used to communicate with the exhaust end of the process chamber 910 of the diffusion furnace, so that the tail gas generated in the process can be transported to the exhaust pipe 110 through the process chamber 910, so as to be finally processed and discharged. At the same time, the first valve 201 has an inlet, a first outlet and a second outlet. Correspondingly, by designing the internal structure of the first valve 201, the first outlet and the second outlet of the first valve 201 can be controlled to be connected to the inlet separately, so that the fluid entering the first valve 201 through the inlet can be controlled to flow out of the first valve 201 through the first outlet or the second outlet.

[0032] Furthermore, the other end of the exhaust pipe 110 can be connected to the inlet of the first valve 201, so that the exhaust gas in the process chamber 910 can be transported to the first valve 201 through the exhaust pipe 110, the first output pipeline 121 is connected to the first outlet, and the second output pipeline 122 is connected to the second outlet, so that the fluid in the exhaust pipe 110 can be transported to the first output pipeline 121 or the second output pipeline 122 in a controlled manner through the first valve 201.

[0033] As described above, before the tail gas is introduced into the factory exhaust 920 or the waste liquid barrel 930, it is necessary to filter the particles or dust in the tail gas. For this reason, in the case where the conveying system used in the embodiment of the present application is applied to a low-pressure boron diffusion furnace, a filtering mechanism 310 can be set on the first output pipeline 121 to filter the boron oxide in the tail gas. Specifically, the filtering mechanism 310 can include a filter container and a filter element installed in the filter container. The filter element can be used to filter the boron oxide in the tail gas to ensure that the gas discharged into the factory exhaust 920 will not pollute the environment. As for the second output pipeline 122, since the fluid it conveys is basically water vapor, a processing mechanism or the like may not be set on the second output pipeline 122.

[0034] Based on the delivery system of the above structure, the first valve 201 is used to connect the inlet with the first outlet and disconnect the inlet with the second outlet in response to the introduction of process gas into the process chamber 910; it is also used to connect the inlet with the second outlet and disconnect the inlet with the first outlet in response to the introduction of water into the process chamber.

[0035] That is, when the process gas is introduced into the process chamber 910, the inlet of the first valve 201 is controlled to be connected to the first outlet, and the inlet is controlled to be disconnected from the second outlet. Correspondingly, when water is introduced into the process chamber 910, the inlet of the first valve 201 is controlled to be connected to the second outlet, and the inlet is controlled to be disconnected from the first outlet. When the above technical solution is adopted, the tail gas of the process chamber 910 can basically achieve dry-wet separation, thereby preventing the boron oxide in the tail gas from reacting with water to generate boric acid, and thus basically preventing the boric acid from clogging the pipeline and having a significant adverse effect on the process efficiency.

[0036] In the above-mentioned conveying system disclosed in the embodiment of the present application, one end of the exhaust pipe 110 is connected to the exhaust end of the process chamber 910 of the diffusion furnace, and the other end of the exhaust pipe 110 is connected to the inlet of the first valve 201. The first valve 201 is provided with a first outlet and a second outlet. The first output pipeline 121 is connected to the first outlet, and the second output pipeline 122 is connected to the second outlet. In the process of introducing the process gas into the process chamber 910, the inlet of the first valve 201 is controlled to be connected to the first outlet, and the inlet is controlled to be disconnected from the second outlet, so that the process gas and the generated boron oxide in the process can be discharged from the process chamber 910. 10, enters the first output pipeline 121 through the exhaust pipe 110 and the first outlet. Since the first output pipeline 121 is provided with a filtering mechanism 310, it can be ensured that the boron oxide can be retained by the filtering mechanism 310; at the same time, in the process of water entering the process chamber 910, the inlet of the first valve 201 is controlled to be connected with the second outlet, and the inlet is controlled to be disconnected from the first outlet to ensure that water vapor and boron oxide are separated from each other during the discharge process, thereby preventing boron oxide from reacting with water to generate boric acid and clogging the pipeline. In this case, the cleaning and replacement cycle of the pipeline can be greatly extended, thereby greatly improving the process efficiency.

[0037] As described above, the exhaust pipe 110, the first output pipeline 121 and the second output pipeline 122 in the conveying system are all connected to the process chamber 910, and are all used to convey the exhaust gas in the process. In order to ensure that the exhaust gas in the process chamber 910 can be discharged normally from the process chamber 910, the conveying system can usually also include a suction pump 500, and the first output pipeline 121 and the second output pipeline 122 are each connected to the suction pump 500 at one end away from the first valve 201. Of course, the suction pump 500 is also connected to equipment such as the factory exhaust 920 and the waste liquid barrel 930.

[0038] As described above, the exhaust gas is output from the process chamber 910, which makes the temperature of the exhaust gas usually relatively high. Based on this, in order to prevent the relatively high temperature exhaust gas from damaging the filter mechanism 310 and other devices located downstream of the exhaust pipe 110, in the embodiment of the present application, the delivery system also includes a first cooling member 321 or a second cooling member 322. Furthermore, the delivery system can include a first cooling member 321 and a second cooling member 322 together, so as to utilize the first cooling member 321 and the second cooling member 322 to cool the fluid discharged through the first output pipeline 121 and the second output pipeline 122 respectively, so as to prevent the higher temperature fluid from damaging the suction pump 500 and other devices located downstream of the exhaust pipe 110.

[0039] Specifically, the first cooling member 321 is disposed on the first output pipeline 121, and correspondingly, the second cooling member 322 is disposed on the second output pipeline 122, so that the two can cool the fluid in the first output pipeline 121 and the second output pipeline 122 respectively. As described above, the first output pipeline 121 is provided with a filter mechanism 310, and further, in order to prevent the high-temperature fluid from damaging the filter mechanism 310, in the embodiment of the present application, the first cooling member 321 is located upstream of the filter mechanism 310, so that the fluid in the first output pipeline 121 is first cooled by the first cooling member 321, and then filtered by the filter mechanism 310, so that the temperature of the fluid flowing through the filter mechanism 310 is relatively low.

[0040] More specifically, the first cooling member 321 and the second cooling member 322 can be different types of cooling devices respectively. In a specific embodiment of the present application, the first cooling member 321 and the second cooling member 322 are the same type of cooling devices, and their specific structures and sizes can be made to correspond to each other, thereby reducing the difficulty of assembling the entire conveying system.

[0041] In a specific embodiment of the present application, taking the first cooling member 321 as an example, it can be a cooling coil, that is, the cross-sectional area at any position of the first cooling member 321 is substantially the same, so that the flow rate of the fluid remains substantially unchanged during the flow of the fluid in the cooling coil. For this reason, in the process of the fluid being cooled by the cooling coil, there is basically no situation where the powdered boron oxide is easily accumulated at the end of the cooling coil, i.e., at the outlet of the cooling coil, due to a decrease in flow rate. Of course, in the case where the first cooling member 321 adopts a cooling coil, the cooling efficiency and cooling effect of the cooling coil can be improved by appropriately increasing the number of turns of the cooling coil.

[0042] In order to make the cooling effect and cooling efficiency of the first cooling member 321 and the second cooling member 322 relatively good, in another embodiment of the present application, the first cooling member 321 and the second cooling member 322 both include a cooling bottle, the cooling bottle includes a bottle body 322a, an intake branch pipe 322b and an exhaust branch pipe 322c, the intake branch pipe 322b and the exhaust branch pipe 322c are both connected to the bottle body 322a, and the flow rates of the intake branch pipe 322b and the exhaust branch pipe 322c are both smaller than the flow rate of the bottle body 322a.

[0043] In this case, since the volume of the fluid increases after it flows from the air inlet branch 322b into the bottle body 322a, the temperature of the fluid can be effectively reduced, and the flow rate of the fluid in the bottle body 322a is smaller than the flow rate of the fluid in the air inlet branch 322b. Of course, in the case where the first cooling member 321 includes the above-mentioned cooling bottle, the first output pipeline 121 can be a segmented structure, wherein the cooling bottle is connected between two pipe sections of the first output pipeline 121 to ensure that the exhaust gas is discharged from the process chamber 910, and the exhaust gas output from one pipe section of the first output pipeline 121 flows into the bottle body 322a through the air inlet branch 322b, and then is discharged to the factory exhaust 920 through the exhaust branch 322c and another pipe section of the first output pipeline 121. Accordingly, the filtering mechanism 310 is installed on the part of the first output pipeline 121 located downstream of the cooling bottle and the factory exhaust 920.

[0044] Since the exhaust gas transported through the second output pipeline 122 mainly includes water vapor and basically does not include solids such as boric oxide, the second cooling member 322 can use a cooling coil or a cooling bottle. In order to reduce the difficulty of assembling the conveying system, when the first cooling member 321 uses a cooling bottle, the second cooling member 322 can also use a cooling bottle.

[0045] As described above, since the flow rates of the intake branch pipe 322b and the exhaust branch pipe 322c of the cooling bottle are both greater than the flow rate of the bottle body 322a, the flow rate of the fluid will decrease after the fluid enters the bottle body 322a through the intake branch pipe 322b. In the case where the first cooling member 321 includes a cooling bottle, boron oxide in the exhaust gas is easily deposited at the connecting position between the exhaust branch pipe 322c and the bottle body 322a, that is, at the air outlet of the bottle body 322a, which can easily cause the exhaust branch pipe 322c of the cooling bottle to be blocked.

[0046] To this end, further, the conveying system disclosed in the embodiment of the present application also includes a first purge pipeline 131, the first end of the first purge pipeline 131 is used to connect with the purge gas source, and the second end of the first purge pipeline 131 is connected with the exhaust branch pipe 322c of the cooling bottle. At the same time, in order to ensure that the purge gas avoids boron oxide deposition on the exhaust branch pipe 322c as much as possible, in the process of laying out the first purge pipeline 131 and the cooling bottle, it is necessary to make the axial direction of at least part of the pipeline including the second end in the first purge pipeline 131 parallel to the axial direction of the exhaust branch pipe 322c. For example, in an embodiment of the present application, the exhaust branch pipe 322c is a linear structure as a whole, and the exhaust branch pipe 322c can be extended in the height direction. In this case, by extending the second end of the first purge pipe 131 into the exhaust branch pipe 322c, and making the axial direction of the portion of the first purge pipe 131 extending into the exhaust branch pipe 322c parallel to the exhaust branch pipe 322c, that is, the aforementioned portion of the pipe can also be extended in the height direction.

[0047] At the same time, by making the second end of the first purge pipe 131 lower than the height of the connection end between the exhaust branch pipe 322c and the bottle body 322a, that is, in the height direction, the second end of the first purge pipe 131 extending into the exhaust branch pipe 322c extends downward to the bottom of the exhaust branch pipe 322c, so that the second end of the first purge pipe 131 is located in the bottle body 322a. In this case, the first purge pipe 131 can directly transport the purge gas to the bottle body 322a to form a purge atmosphere around the area connected to the exhaust branch pipe 322c in the bottle body 322a below the exhaust branch pipe 322c, thereby preventing boron oxide from being deposited in the exhaust branch pipe 322c and the connection end between the exhaust branch pipe 322c and the bottle body 322a during the output through the exhaust branch pipe 322c.

[0048] Of course, in order to ensure that the exhaust gas delivered to the bottle body 322a can still be normally delivered to the factory exhaust 920 and other equipment through the exhaust branch pipe 322c, in an embodiment of the present application, the diameter of the first purge pipe 131 can be made smaller than the diameter of the exhaust branch pipe 322c, and by providing perforations and other structures on the side wall of the exhaust branch pipe 322c, so that the second end of the first purge pipe 131 can extend into the bottle body 322a through the exhaust branch pipe 322c, while ensuring that the cross-section of the exhaust branch pipe 322c will not be completely blocked by the first purge pipe 131, thereby ensuring that the exhaust branch pipe 322c still has normal exhaust capacity.

[0049] More specifically, the purge gas source may be a nitrogen source, that is, the purge gas may be nitrogen. Of course, the purge gas may also be other gases that do not react with the wafer and the process gas used in the process, such as the purge gas may also include an inert gas, which is not limited herein. Of course, in order to ensure that the purge process of the first purge line 131 is controllable, in the embodiment of the present application, a second valve 202 is provided on the first purge line 131 to control the on and off of the first purge line 131 using the second valve 202.

[0050] As described above, the first output pipeline 121 and the second output pipeline 122 can be connected to the suction pump 500 so that the tail gas can be normally extracted from the process chamber 910, and the first output pipeline 121 and the second output pipeline 122 are respectively connected to the suction pump 500 at one end away from the first valve 201. To this end, in another embodiment of the present application, the suction pump 500 can be included in the conveying system, and the first output pipeline 121 and the second output pipeline 122 can be connected to the same suction pump 500 at one end away from the first valve 201. Accordingly, the suction pump 500 can be connected to the factory exhaust 920, so that the tail gas can be taken away by the factory exhaust 920. Of course, the suction pump 500 can also be connected to the waste liquid barrel 930, so that the liquid water formed by the condensation of water vapor contained in the tail gas sucked by the suction pump 500 can be collected by the waste liquid barrel 930.

[0051] In addition, as described above, the first valve 201 can be used to enable the first output pipeline 121 and the second output pipeline 122 to be controlled to be connected to the process chamber 910 separately. Based on this, in order to prevent the boron oxide in the first output pipeline 121 from entering the second output pipeline 122 through the connection between the second output pipeline 122 and the suction pump 500 when the first valve 201 is connected to the first output pipeline 121, and to prevent the water vapor in the second output pipeline 122 from entering the second output pipeline 122 through the first output pipeline 121 when the first valve 201 is connected to the second output pipeline 122. 1 and the suction pump 500 enter the first output pipeline 121. In the embodiment of the present application, a third valve 203 is provided between the end of the first output pipeline 121 away from the first valve 201 and the suction pump 500, and a fourth valve 204 is provided between the end of the second output pipeline 122 away from the first valve 201 and the suction pump 500. Of course, in the embodiment in which the filtering mechanism 310 is provided on the first output pipeline 121, it is necessary to set the third valve 203 on the portion of the first output pipeline 121 between the filtering mechanism 310 and the suction pump 500.

[0052] In the case where the delivery system includes the suction pump 500, the third valve 203 and the fourth valve 204, the on / off states of the third valve 203 and the fourth valve 204 need to be associated with the steps performed in the process chamber 910. In response to the process gas being introduced into the process chamber 910, the third valve 203 is opened and the fourth valve 204 is closed; in response to the water being introduced into the process chamber 910, the third valve 203 is closed and the fourth valve 204 is opened. In detail, during the process of introducing the process gas into the process chamber 910, that is, during the source passing step, the third valve 203 is opened and the fourth valve 204 is closed, so that the suction pump 500 is connected to the process chamber 910 through the first output pipeline 121, and the tail gas containing the boron element in the process chamber 910 is extracted to the outside of the process chamber 910 through the first output pipeline 121. Correspondingly, during the process of introducing water into the process chamber 910, that is, during the water passing step, the fourth valve 204 is opened and the third valve 203 is closed, so that the suction pump 500 is connected to the process chamber 910 through the second output pipeline 122, and the tail gas containing water in the process chamber 910 is extracted to the outside of the process chamber 910 through the second output pipeline 122.

[0053] As described above, the suction pump 500 is connected to the factory exhaust 920. Since the tail gas generated by the process chamber 910 during the water passing step contains water vapor, the factory exhaust 920 is connected to other process equipment on the one hand, and is also connected to the atmospheric environment on the other hand. Therefore, the factory exhaust 920 inevitably contains water vapor, and considering that the tail gas in the first output pipeline 121 may still contain a small amount of boron oxide after passing through the filtering mechanism 310, in order to prevent the water vapor in the factory exhaust 920 from reacting with the boron oxide in the tail gas at the outlet of the suction pump 500 to generate boric acid and block the outlet of the pump, in a further embodiment of the present application The delivery system also includes a second purge pipeline 132, a first end of the second purge pipeline 132 is connected to a purge gas source, and a second end of the second purge pipeline 132 is connected to the downstream of the suction pump 500. In order to ensure that the purge gas can form a purge atmosphere at the tail end of the suction pump 500 to prevent water vapor in the plant exhaust gas 920 from flowing back to the tail end of the suction pump 500 with the gas, in an embodiment of the present application, the gas flow direction of the second end of the second purge pipeline 132 can be made parallel or approximately parallel to the exhaust direction of the plant exhaust gas 920. In this case, the plant exhaust gas 920 can be prevented from flowing back to the tail end of the suction pump 500.

[0054] It should be noted that in the embodiment of the present application, the purpose of adopting the above-mentioned technical means is to make the gas flow direction of the second end of the second purge pipe 132 as parallel as possible to the exhaust direction of the factory exhaust 920. However, since the control of the flow field is relatively difficult and it is difficult to absolutely determine which straight line or curve the flow direction of a gas beam is, in the embodiment of the present application, the above-mentioned "approximately" is not unclear in meaning, but a good-faith explanation from a technical perspective because the above-mentioned technical purpose may not be achieved absolutely.

[0055] More specifically, the suction pump 500 can be connected to the plant exhaust 920 through the discharge pipe 140. To this end, the second end of the second purge pipeline 132 can be connected to the discharge pipe 140. In order to facilitate the installation of the conveying system, in the embodiment of the present application, one end of the discharge pipe 140 can be connected to the plant exhaust 920, and the axes of the two can be perpendicular to each other. In this case, the suction pump 500 can be connected to the other end of the discharge pipe 140, and the second end of the second purge pipeline 132 can be connected to a position in the discharge pipe 140 close to the suction pump 500, and the axis of the second end of the second purge pipeline 132 can be connected to the discharge pipe 140. The direction can also be set perpendicular to the axial direction of the discharge pipe 140. At the same time, by designing the layout position of the second purge pipe 132, it can be ensured that the flow direction of the purge gas in the second purge pipe 132 when entering the discharge pipe 140 is roughly the same as the flow direction of the fluid in the discharge pipe 140 when merging into the plant exhaust 920, thereby ensuring that the gas in the plant exhaust 920 will not flow back to the tail of the suction pump 500, and will not even flow back into the discharge pipe 140, thereby preventing the water vapor in the plant exhaust 920 from reacting with a small amount of boron oxide at the tail of the suction pump 500 to generate boric acid and block the exhaust port of the suction pump 500.

[0056] Similarly, the purge gas introduced into the second purge pipeline 132 may also be nitrogen, and the same purge gas source may be used to supply purge gas to both the first purge pipeline 131 and the second purge pipeline 132. Accordingly, in order to ensure that the purge process of the second purge pipeline 132 is also controllable, in the embodiment of the present application, a fifth valve 205 is provided on the second purge pipeline 132 to control the on-off of the second purge pipeline 132 by using the fifth valve 205.

[0057] As described above, the process chamber 910 is connected to the first valve 201 through the exhaust pipe 110, so that the exhaust gas containing boron oxide and water vapor in the process chamber 910 flows through the first valve 201. In this case, the water vapor in the exhaust gas generated in the water passing step will adhere to the first valve 201. If the source passing step is performed when the first valve 201 is not completely dry, the boron oxide in the exhaust gas generated in the source passing step will also react with the water adhered to the first valve 201 to generate boric acid and then block the first valve 201.

[0058] To this end, in a specific embodiment of the present application, the delivery system may further include a third purge pipeline 133, the first end of the third purge pipeline 133 is used to communicate with the purge gas source, and the second end of the third purge pipeline 133 is connected to the exhaust pipe 110, so that the purge gas in the third purge pipeline 133 can flow to the first valve 201 through the exhaust pipe 110 to dry the first valve 201, so that the water vapor adhered to the inner wall of the first valve 201 is separated from the first valve 201, and the first valve 201 is ensured to be in a dry state before the process chamber 910 performs the next source passing step, so as to prevent boron oxide from reacting with water on the inner wall of the first valve 201 and blocking the first valve 201. In the case where the delivery system includes the third purge pipeline 133, the drying time of the first valve 201 can be greatly shortened, so that the time interval between the water passing step and the source passing step in the process chamber 910 can be greatly shortened, thereby greatly improving the process efficiency.

[0059] Similarly, the purge gas introduced into the third purge pipeline 133 may also be nitrogen. In order to ensure that the purge process of the third purge pipeline 133 is also controllable, in the embodiment of the present application, a sixth valve 206 is provided on the third purge pipeline 133 to control the on and off of the third purge pipeline 133 using the sixth valve 206.

[0060] As described above, the third purge pipeline 133 is connected to the exhaust pipe 110, and the exhaust pipe 110 is connected to the process chamber 910. In this case, when the process chamber 910 performs the source passing step and the water passing step successively, the tail gas in the process chamber 910 can be prevented from entering the third purge pipeline 133 through the exhaust pipe 110 as much as possible by controlling the sixth valve 206 to be closed. In order to further prevent the tail gas in the exhaust pipe 110 from entering the third purge pipeline 133, in the embodiment of the present application, the delivery system can also include a first one-way valve 411, which is arranged on the third purge pipeline 133, and the first one-way valve 411 is located downstream of the sixth valve 206, and in the process of installing the first one-way valve 411, the position of the first one-way valve 411 on the third purge pipeline 133 can be made as close to the exhaust pipe 110 as possible, so as to minimize the amount of tail gas entering the third purge pipeline 133 through the exhaust pipe 110.

[0061] In addition, since the exhaust pipe 110 is connected to the process chamber 910, in order to prevent the purge gas from entering the process chamber 910 through the exhaust pipe 110 during the process of purging and drying the first valve 201 through the third purge pipe 133, thereby preventing the process environment in the process chamber 910 from being damaged, in an embodiment of the present application, the delivery system also includes a second one-way valve, and the second one-way valve 412 is installed on the exhaust pipe 110, and the second one-way valve 412 is located between the third purge pipe 133 and the process chamber 910, so as to utilize the second one-way valve 412 to block the purge gas input from the third purge pipe 133 into the exhaust pipe 110 from entering the process chamber 910.

[0062] In the above embodiment, in the interval between the source passing step and the water passing step, the purge gas inputted from the third purge line 133 can be used to purge and dry the inner wall of the first valve 201, so as to prevent water from adhering to the inner wall of the first valve 201 and reacting with boron oxide in the tail gas of the subsequent process, and to prevent boron oxide from adhering to the inner wall of the first valve 201 and reacting with water vapor in the tail gas of the subsequent process. Of course, the purge gas inputted from the third purge line 133 can also provide drying effect for the exhaust pipe 110 to a certain extent, and in the case where the second one-way valve 412 is provided on the exhaust pipe 110, the portion of the exhaust pipe 110 between the second one-way valve 412 and the process chamber 910 cannot be purged and dried by the purge gas in the third purge line 133.

[0063] To this end, in another embodiment of the present application, the delivery system may further include a fourth purge pipeline 134, and one end of the fourth purge pipeline 134 is connected to a purge gas source, and the other end of the fourth purge pipeline 134 is connected to the furnace door of the process chamber 910 of the diffusion furnace, so that the purge gas delivered through the fourth purge pipeline 134 can be delivered to the process chamber 910, and by allowing the purge gas in the fourth purge pipeline 134 to be input from the furnace door of the process chamber 910, the purge gas can not only purge and dry the portion of the exhaust pipe 110 located between the process chamber 910 and the third one-way valve 413, but also enable the purge gas to purge the exhaust gas in the process chamber 910, so as to reduce the residual amount of exhaust gas in the process chamber 910, thereby improving the process effect.

[0064] In addition, in the process of using the diffusion furnace to process low-pressure boron, since the temperature in the process chamber 910 is relatively high, and the air inlet end of the process chamber 910, that is, the furnace door of the process chamber 910, is in direct contact with the outside world, the temperature of the furnace door of the process chamber 910 is slightly lower than the process temperature in the process chamber 910, which causes the boron oxide generated in the process to easily adhere to the furnace door when it contacts the furnace door and corrode the furnace door. For this reason, when the conveying system disclosed in the embodiment of the present application includes the fourth purge pipeline 134, a slight positive pressure can also be formed at the air inlet end of the process chamber 910, that is, the furnace door of the process chamber 910, to prevent the boron oxide from adhering to the furnace door of the process chamber 910.

[0065] Similarly, the purge gas introduced into the fourth purge pipeline 134 may also be nitrogen, and in order to ensure that the purge process of the fourth purge pipeline 134 is also controllable, in the embodiment of the present application, a seventh valve 207 is provided on the fourth purge pipeline 134, so as to use the seventh valve 207 to control the on-off of the fourth purge pipeline 134. In addition, in order to detect and control the amount and flow rate of the purge gas delivered in the fourth purge pipeline 134, in the embodiment of the present application, a first flow meter 701 is further provided on the fourth purge pipeline 134, and the first flow meter 701 is arranged upstream of the seventh valve 207, and the first flow meter 701 may be a mass flow meter.

[0066] As described above, the carrier gas pipeline 150 and the first input pipeline 161 can be provided with the eighth valve 208 and the ninth valve 209 respectively to control the on-off state between the carrier gas pipeline 150 and the first input pipeline 161 and the process chamber 910. At the same time, in order to control the specific amount of the process gas delivered to the process chamber 910 for the process reaction, in the present application, the carrier gas pipeline 150 and the first input pipeline 161 can also be provided with a second flow meter 702 and a third flow meter 703 to detect and control the amount of the carrier gas and the process gas delivered to the process chamber 910. More specifically, the second flow meter 702 can be provided upstream of the eighth valve 208, and correspondingly, the third flow meter 703 can be provided upstream of the ninth valve 209, and both the second flow meter 702 and the third flow meter 703 can be mass flow meters.

[0067] As described above, the delivery system disclosed in the embodiment of the present application can be applied to the process of low-pressure boron. Low-pressure boron refers to boron trichloride gas with low saturated vapor pressure, which is extremely easy to liquefy and corrosive. Furthermore, in order to prevent boron trichloride from corroding the third flowmeter 703, thereby having a significant adverse effect on the accuracy of the third flowmeter 703, in a further embodiment of the present application, the delivery system may also include a fifth purge line 135, so as to use the fifth purge line 135 to purge the third flowmeter 703 to prevent boron trichloride from adhering to and corroding the third flowmeter 703.

[0068] Of course, in order to prevent the purge gas in the fifth purge line 135 from flowing back into the process gas source, in the embodiment of the present application, an eleventh valve 211 is further provided on the first input line 161, and the eleventh valve 211 is located upstream of the third flowmeter 703. Correspondingly, in order to prevent the process gas from flowing back into the purge gas source through the fifth purge line 135 during the process of introducing the process gas, a twelfth valve 212 is provided on the fifth purge line 135, one end of the fifth purge line 135 is connected to the purge gas source, and the other end of the fifth purge line 135 is connected between the third flowmeter 703 and the eleventh valve 211. At the same time, in response to the introduction of process gas into the process chamber, the eleventh valve is closed and the twelfth valve is opened, that is, when the process gas is introduced into the process chamber 910, the eleventh valve 211 is closed and the twelfth valve 212 is opened, so that the third flowmeter 703 is purged and cleaned by the fifth purge line 135.

[0069] Similarly, the purge gas introduced into the fifth purge pipeline 135 may also be nitrogen. In addition, considering that the pressure of the purge gas source is usually relatively high, in order to prevent the high-pressure gas from damaging the third flowmeter 703, in the embodiment of the present application, a pressure reducing valve may be provided upstream of the twelfth valve 212 in the fifth purge pipeline 135. Furthermore, pressure reducing valves may be provided between the first input pipeline 161 and the process gas source, and between the first purge pipeline 131, the second purge pipeline 132, the third purge pipeline 133, and the fourth purge pipeline 134 and the purge gas source.

[0070] As described above, the conveying system of the embodiment of the present application can be applied to the low-pressure boron process, and since the process chamber 910 is in a negative pressure state during the low-pressure boron process, after the process is completed, it is necessary to backfill nitrogen and other gases that do not react with process gases and silicon wafers into the process chamber 910 to restore the process chamber 910 to atmospheric pressure and ensure that the furnace door can be opened normally. Considering that the second flow meter 702 is provided on the carrier gas pipeline 150, the upper limit of the flow rate on the carrier gas pipeline 150 is relatively small. Furthermore, in order to reduce the backfill time of the process chamber 910 and improve the process efficiency, in a specific embodiment of the present application, the delivery system further includes a backfill pipeline 170, one end of which is connected to the carrier gas source, and the other end of the backfill pipeline 170 is connected to the inlet end of the first inlet pipe 610 and is located downstream of the second flow meter 702. Therefore, when a large amount of backfill gas needs to be input into the process chamber 910, the backfill pipeline 170 can be used to relatively quickly deliver the carrier gas to the process chamber 910. In addition, by providing the first normally open valve 421 on the backfill pipeline 170, in the case of abnormal power failure, the first normally open valve 421 will not hinder the normal operation of the backfill pipeline 170. It should be noted that the first normally open valve 421 does not only have an open state, but is usually in an open state. When powered, it can also remain in a closed state, thereby ensuring that the backfill pipeline 170 does not hinder the normal operation of the carrier gas pipeline 150.

[0071] In addition, in order to obtain the amount of carrier gas delivered to the process chamber 910 through the backfill pipeline 170, a flow meter can also be set on the backfill pipeline 170. In order to prevent abnormal power failure from hindering the normal operation of the backfill pipeline 170, in the embodiment of the present application, a float flow meter can be set on the backfill pipeline 170. It is a mechanical metering device and will not be affected by power failure. Based on this, float flow meters can also be set on the first purge pipeline 131, the second purge pipeline 132 and the third purge pipeline 133 accordingly.

[0072] As described above, the backfill line 170 is provided with a first normally open valve 421, which is in an open state when the power is off. In order to prevent the backfill line 170 from excessively delivering carrier gas to the process chamber 910, in the embodiment of the present application, the delivery system may also include a pressure relief line 180, and as described above, the first output line 121 is provided with a third valve 203, and the third valve 203 is located downstream of the filter mechanism 310. Furthermore, in order to prevent the gas output from the process chamber 910 from containing impurities such as boron oxide, in the embodiment of the present application, one end of the pressure relief line 180 can be connected to the portion of the first output line 121 between the filter mechanism 310 and the third valve 203, and the other end of the pressure relief line 180 can be connected to the plant exhaust 920, so as to ensure that the gas in the process chamber 910 can be filtered by the filter mechanism 310 and then discharged into the plant exhaust 920 through the pressure relief line 180.

[0073] Accordingly, in order to prevent the gas in the factory exhaust 920 from flowing back into the filter mechanism 310 through the pressure relief pipe 180, causing the water vapor to react with the boron oxide in the filter mechanism 310, in the embodiment of the present application, a valve may also be provided on the pressure relief pipe 180, and in order to prevent the aforementioned valve from interfering with the normal operation of the pressure relief pipe 180 in the event of an abnormal power outage, in the embodiment of the present application, the aforementioned valve may also be a normally open valve, that is, a second normally open valve 422 is provided on the pressure relief pipe 180.

[0074] As described above, the delivery system disclosed in the embodiment of the present application has the function of delivering gas to the process chamber 910, and also has the function of delivering gas output from the process chamber 910. Furthermore, the delivery system disclosed in the embodiment of the present application may also include a pressure detection component 800 and a pressure detection pipeline 190, so that the delivery system also has the ability to detect the pressure in the process chamber 910. In more detail, the pressure detection component 800 is connected to one end of the pressure detection pipeline 190, and by connecting the other end of the pressure detection pipeline 190 with the process chamber 910, it can be ensured that the pressure detection component 800 has the ability to detect the pressure in the process chamber 910.

[0075] In order to improve the detection accuracy of the pressure detection member 800, in the embodiment of the present application, one end of the pressure detection line 190 away from the pressure detection member 800 can be extended into the process chamber 910. In more detail, the pressure detection line 190 can be extended into the process chamber from the exhaust end of the process chamber 910, and the pressure detection line 190 can be extended in the direction close to the furnace door of the process chamber 910. In this case, since the distance between the pressure detection line 190 and the exhaust pipe 110 provided at the exhaust end of the process chamber 910 in the conveying system is relatively far, the airflow generated in the process of the gas in the process chamber 910 being output to the outside of the process chamber 910 through the exhaust pipe 110 can be prevented from interfering with the pressure detection process, thereby achieving the purpose of improving the pressure detection accuracy.

[0076] Furthermore, in the embodiment of the present application, the air intake assembly 600 can be located at a relatively upper position in the process chamber, and the pressure detection line 190 can be located at a relatively lower position in the process chamber 910, so as to prevent the pressure detection line 190 from blocking the diffusion process of boron atoms on the silicon wafer and affecting the normal progress of the process. In other words, in the conveying system disclosed in the embodiment of the present application, the air intake assembly 600 is located above the pressure detection line 190, and the air intake assembly 600 can be as close to the top of the process chamber 910 as possible, and the pressure detection line 190 can be as close to the bottom of the process chamber 910 as possible without affecting the normal operation of the air intake assembly 600 and the pressure detection line 190.

[0077] Based on the conveying system disclosed in any of the above-mentioned embodiments, an embodiment of the present application also discloses a diffusion furnace, which includes a process chamber 910 and any of the above-mentioned conveying systems, wherein the air intake component in the conveying system is connected to the process chamber, and the exhaust pipe 110 in the conveying system is connected to the exhaust end of the process chamber 910, so that the exhaust gas generated during the process can be discharged through the exhaust pipe 110.

[0078] It should be noted that, in this article, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise one..." do not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0079] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A conveying system, applied to a diffusion furnace, characterized in that: The delivery system includes an air intake assembly, a first input pipeline and a second input pipeline. The air intake assembly extends along the axial direction of the process chamber of the diffusion furnace and is in communication with the process chamber; the air intake assembly comprises a first air intake pipe and a second air intake pipe, the second air intake pipe is sleeved outside the first air intake pipe, and a conveying gap is formed between the second air intake pipe and the first air intake pipe; The outlet ends of the first air inlet pipe and the second air inlet pipe are both close to the furnace door of the diffusion furnace; one end of the first input pipeline is connected to the process gas source, and the other end is connected to the air inlet end of the first air inlet pipe; The air inlet end of the second air inlet pipe is located on the side wall of the second air inlet pipe and away from the furnace door. One end of the second input pipeline is connected to the water source, and the other end is connected to the air inlet end of the second air inlet pipe.

2. The conveying system according to claim 1, characterized in that In the extension direction of the air inlet assembly, the distance between the air outlet end of the first air inlet pipe and the furnace door is smaller than the distance between the air outlet end of the second air inlet pipe and the furnace door.

3. The conveying system according to claim 1, characterized in that The air intake assembly further includes a plurality of support rings, and the plurality of support rings are arranged at intervals along an extension direction of the first air intake pipe.

4. The conveying system according to claim 1, characterized in that The delivery system further comprises a carrier gas pipeline, one end of which is connected to a carrier gas source, and the other end of which is connected to an inlet end of the first inlet pipe.

5. The conveying system according to claim 1, characterized in that It also includes a third one-way valve, which is arranged upstream of the intake end of the first intake pipe.

6. The conveying system according to claim 1, characterized in that Also includes: An exhaust pipe, a first output pipeline, a second output pipeline and a first valve, wherein: The first valve has an inlet, a first outlet, and a second outlet; One end of the exhaust pipe is connected to the exhaust end of the process chamber, the other end of the exhaust pipe is connected to the inlet, the first output pipeline is connected to the first outlet, the second output pipeline is connected to the second outlet, and a filtering mechanism is provided on the first output pipeline; The first valve is used to connect the inlet with the first outlet and disconnect the inlet with the second outlet in response to the introduction of process gas into the process chamber; and is also used to connect the inlet with the second outlet and disconnect the inlet with the first outlet in response to the introduction of water into the process chamber.

7. The conveying system according to claim 6, characterized in that It also includes a first cooling member and / or a second cooling member. The first cooling member is arranged in the first output pipeline and is located upstream of the filtering mechanism. The second cooling member is arranged in the second output pipeline.

8. The conveying system according to claim 7, characterized in that The first cooling member includes a cooling bottle, which includes a bottle body, an intake branch pipe and an exhaust branch pipe. The intake branch pipe and the exhaust branch pipe are both connected to the bottle body, and the flow rates of the intake branch pipe and the exhaust branch pipe are both smaller than the flow rate of the bottle body.

9. The conveying system according to claim 8, characterized in that It also includes a first purge pipeline, a first end of the first purge pipeline is used to communicate with a purge gas source, a second end of the first purge pipeline is connected to the bottle body and extends into the bottle body, a height of the second end of the first purge pipeline is lower than a height of a connecting end between the exhaust branch pipe and the bottle body, and an axial direction of at least a portion of the first purge pipeline including the second end is parallel to an axial direction of the exhaust branch pipe.

10. The conveying system according to claim 6, characterized in that It also includes a suction pump, a third valve and a fourth valve, wherein the first output pipeline and the second output pipeline are each connected to the suction pump at one end away from the first valve, and the suction pump is used to communicate with the factory exhaust, the third valve is arranged at a portion of the first output pipeline between the filter mechanism and the suction pump, and the fourth valve is arranged at the second output pipeline; In response to the process gas being introduced into the process chamber, the third valve is opened and the fourth valve is closed; in response to water being introduced into the process chamber, the third valve is closed and the fourth valve is opened.

11. The conveying system according to claim 10, characterized in that It also includes a second purge pipeline, a first end of which is connected to a purge gas source, a second end of which is connected to the downstream of the suction pump, and a gas flow direction of the second end is substantially parallel to an exhaust direction of the factory exhaust.

12. The conveying system according to claim 6, characterized in that It also includes a third purge pipeline, a first end of the third purge pipeline is used to communicate with a purge gas source, and a second end of the third purge pipeline is connected to the exhaust pipe.

13. The conveying system according to claim 12, characterized in that It also includes a second one-way valve and a fourth purge pipeline, wherein the second one-way valve is installed on the exhaust pipe, and the second one-way valve is located between the third purge pipeline and the process chamber, one end of the fourth purge pipeline is connected to the purge gas source, and the other end of the fourth purge pipeline is connected to the furnace door of the process chamber.

14. The conveying system according to claim 4, characterized in that The carrier gas pipeline is provided with a second flow meter, and the delivery system also includes a backfill pipeline, one end of which is connected to the carrier gas source, and the other end of the backfill pipeline is connected to the inlet end of the first inlet pipe and is located downstream of the second flow meter. A first normally open valve is provided on the backfill pipeline.

15. The conveying system according to claim 10, characterized in that The conveying system also includes a pressure relief pipeline, one end of which is connected between the filtering mechanism and the third valve, and the other end of which is connected to the factory exhaust. A second normally open valve is provided on the pressure relief pipeline.

16. The conveying system according to claim 1, characterized in that The first input pipeline is provided with a third flowmeter and an eleventh valve, and the eleventh valve is located upstream of the third flowmeter; the delivery system also includes a fifth purge pipeline, and the fifth purge pipeline is provided with a twelfth valve, one end of the fifth purge pipeline is used to communicate with a purge gas source, and the other end of the fifth purge pipeline is connected between the third flowmeter and the eleventh valve. In response to the process gas entering the process chamber, the eleventh valve is closed and the twelfth valve is opened.

17. The conveying system according to claim 1, characterized in that It also includes a pressure detection component and a pressure detection pipeline. The pressure detection component is connected to one end of the pressure detection pipeline, and the other end of the pressure detection pipeline extends into the process chamber and extends toward a direction close to a furnace door of the process chamber.

18. The conveying system according to claim 17, characterized in that The air inlet assembly is located at a relatively upper position of the process chamber, and the pressure detection pipeline is located at a relatively lower position of the process chamber.

19. A diffusion furnace, characterized in that: It comprises a process chamber and the conveying system according to any one of claims 1-18.

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