Opening / closing mechanism, exhaust switching mechanism, and substrate processing apparatus

Abstract

The invention relates to an opening and closing mechanism, an exhaust switching mechanism, and a substrate processing apparatus. The opening and closing mechanism of the present invention is provided with: a base member which can be attached to each of the attachment openings of the switching box; the upper supporting part is arranged on the upper surface of the base part; an actuator; a rod extending downward from the actuator while penetrating the base member and moving in the vertical direction by the actuator; the lower supporting part is arranged on the lower surface of the base part; a cover member provided below the base member and capable of blocking the communication port; and a first link and a second link provided below the base member and connecting the rod, the lower support member, and the cover member. The cover member is switched between an open state and a closed state by transmitting movement of the rod to the cover member via the first link and the second link.

Description

Technical Field

[0001] The present invention relates to an opening and closing mechanism of an exhaust switching mechanism for switching an exhaust path from a processing chamber for processing a substrate to any one of a plurality of exhaust pipes, an exhaust switching mechanism, and a substrate processing device. Examples of substrates include semiconductor substrates, FPD (Flat Panel Display) substrates, photomask glass substrates, optical disk substrates, magnetic disk substrates, ceramic substrates, and solar cell substrates. Examples of FPDs include liquid crystal display devices, organic EL (electroluminescence) display devices, and the like. Background Art

[0002] The substrate processing device has a transport space for setting up a transport robot and four towers arranged along the transport space (for example, refer to Japan: Patent Gazette No. 2021-136435). The four towers are respectively equipped with six processing chambers arranged in the up and down directions (vertical direction). In addition, three exhaust pipes extending in the up and down directions are respectively arranged in the four towers. For example, the six processing chambers of the first tower are respectively connected to the three exhaust pipes via the exhaust switching mechanism. As a result, the exhaust path from the processing chamber is selectively connected to any one of the three exhaust pipes. Summary of the invention

[0003] [Problems to be solved by the invention]

[0004] However, the conventional example may have the following problems. When the substrate processing apparatus has, for example, 24 processing chambers, 24 exhaust switching mechanisms are provided. In addition, when a designated processing chamber is selectively connected to, for example, any one of three exhaust pipes, three opening and closing mechanisms are provided for one exhaust switching mechanism. Therefore, for example, 72 opening and closing mechanisms are provided. For example, if the opening and closing mechanism is difficult to load and unload in the exhaust switching mechanism, the assembly or maintenance time of the exhaust switching mechanism and the substrate processing apparatus may become longer.

[0005] The present invention has been made in view of such circumstances, and an object of the present invention is to provide an opening and closing mechanism and an exhaust switching mechanism that are easy to install, and a substrate processing apparatus.

[0006] [Technical means to solve the problem]

[0007] The present invention adopts the following configuration to achieve the above object. That is to say, the opening and closing mechanism of the present invention is characterized in that it is an exhaust switching mechanism for connecting a processing chamber to any one of a plurality of exhaust pipes via a switching box, and an opening and closing mechanism for opening and closing any one of a plurality of connecting ports connecting the switching box with the plurality of exhaust pipes, and comprises: a base member capable of being respectively mounted on a plurality of mounting openings arranged on the top wall of the switching box corresponding to the plurality of connecting ports; an upper support member arranged on the upper surface of the base member; an actuator mounted on the upper support member; a rod extending downward from the actuator while passing through the base member, and moving in the up and down directions by the actuator; a lower support member arranged on the lower surface of the base member; a cover member arranged below the base member and capable of blocking the one connecting port; and a connecting rod member arranged below the base member and connecting the rod, the lower support member and the cover member; and the cover member is switched between an open state and a closed state by transmitting the up and down movement of the rod to the cover member via the connecting rod member.

[0008] According to the opening and closing mechanism of the present invention, there is a base member, and the base member can be respectively installed in a plurality of installation openings provided on the top wall of the switching box corresponding to the plurality of connecting ports. The upper support member, the actuator, the rod, the cover member, the lower support member and the connecting rod member are integrally provided on the base member. Therefore, the opening and closing mechanism can be installed on the switching box as an integrated member. Therefore, the opening and closing mechanism can be easily installed.

[0009] In addition, according to the opening and closing mechanism, the connecting rod component is preferably equipped with: a first connecting rod, whose upper end portion is connected to the lower end portion of the lower support component and can rotate around a first horizontal axis passing through the connecting portion with the lower support component, and whose lower end portion is connected to the back side of the cover component; and a second connecting rod, whose upper end portion is rotatably connected to the rod around a second horizontal axis passing through the lower end portion of the rod, and whose lower end portion is rotatably connected to the first connecting rod around a third horizontal axis passing through the first connecting rod; and the second horizontal axis and the third horizontal axis are respectively parallel to the first horizontal axis.

[0010] The lower support member, the first link, and the second link are integrally provided on the base member together with the cover member, etc. Therefore, the opening and closing mechanism can be mounted on the switch box as an integral member.

[0011] In addition, the opening and closing mechanism preferably also includes: a bellows extending in the up and down directions; a lower component arranged at the lower end of the bellows and installed on the base component; and an upper component arranged at the upper end of the bellows in a manner to block the upper end of the hole of the bellows; and the rod includes a first rod and a second rod; the first rod extends downward from the actuator, and the lower end of the first rod is connected to the upper component; the upper end of the second rod is connected to the upper component, and the second rod passes through the hole of the bellows while penetrating the lower component and the base component.

[0012] The lower member provided at the lower end of the bellows is mounted on the base member. In addition, the upper member provided at the upper end of the bellows blocks the upper end of the hollow of the bellows. In addition, the first rod is connected to the second rod via the upper member. The second rod passes through the hollow of the bellows while penetrating the lower member and the base member. By means of such a structure of the bellows and its surroundings, even if there is a sliding portion of the rod with respect to the base member, it is possible to prevent gas leakage in the switch box.

[0013] Furthermore, according to the opening and closing mechanism, it is preferable that the lower end of the first rod is connected to the upper member via a joint that absorbs eccentricity and deflection between the first rod and the second rod.

[0014] The joint interposed between the lower end of the first rod and the upper member can absorb the eccentricity and deflection angle between the first rod and the second rod.

[0015] Furthermore, according to the opening and closing mechanism, it is preferable that a seal is disposed on a peripheral edge portion of the front surface of the cover member.

[0016] When the cover is in the closed state, the airtightness is improved. For example, it is possible to prevent the gas containing the chemical solution (chemical solution atmosphere) from mixing into other exhaust lines. Thus, for example, when a part of the organic exhaust line is made of metal such as stainless steel, the acid exhaust gas is mixed in to prevent the corrosion of the metal part.

[0017] In addition, the exhaust switching mechanism of the present invention is characterized in that it is an exhaust switching mechanism that switches the exhaust path from the processing chamber to any one of a plurality of exhaust pipes, and comprises: a switching box that connects the processing chamber to the plurality of exhaust pipes; and a plurality of opening and closing mechanisms, which are for independently opening and closing a plurality of connecting ports connecting the switching box and the plurality of exhaust pipes, and are installed in a plurality of mounting openings provided on the top wall of the switching box corresponding to the plurality of connecting ports; and the plurality of opening and closing mechanisms respectively comprise: a base component that can be respectively installed in the plurality of mounting openings; an upper support component that is provided on the upper surface of the base component ; an actuator mounted on the upper support member; a rod extending downward from the actuator while passing through the base member, and moving in the up-down direction by the actuator; a lower support member arranged on the lower surface of the base member; a cover member arranged below the base member and capable of blocking the corresponding communication ports among the plurality of communication ports; and a connecting rod member arranged below the base member and connecting the rod, the lower support member and the cover member; the cover member is switched between an open state and a closed state by transmitting the up-down movement of the rod to the cover member via the connecting rod member.

[0018] In addition, the substrate processing device for processing a substrate of the present invention is characterized in comprising: the exhaust switching mechanism; the processing chamber; a holding portion, which is arranged in the processing chamber and holds the substrate in a horizontal posture; a nozzle, which is arranged in the processing chamber and sprays a chemical solution toward the substrate held by the holding portion; and the plurality of exhaust pipes, which are arranged on the side of the processing chamber and extend in the up and down directions.

[0019] [Effects of the Invention]

[0020] According to the opening and closing mechanism, the exhaust switching mechanism, and the substrate processing apparatus of the present invention, the opening and closing mechanism can be easily mounted. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Although several aspects currently considered to be preferred are shown in the drawings for the purpose of illustrating the invention, it should be understood that the invention is not limited to the arrangements and aspects shown in the drawings.

[0022] Figure 1 It is a plan view showing a schematic structure of a substrate processing apparatus according to an embodiment.

[0023] Figure 2 Yes Figure 1 A longitudinal sectional view of the substrate processing apparatus as viewed along arrow AA.

[0024] Figure 3 It is a cross-sectional view showing a processing chamber and an exhaust switching mechanism.

[0025] Figure 4 It is a longitudinal sectional view showing a processing chamber and an exhaust switching mechanism.

[0026] Figure 5 It is a top view showing three mounting openings formed on the top wall of the switch box.

[0027] Figure 6 This is a side view showing a state where three opening and closing mechanisms are installed in a switch box.

[0028] Fig. 7A 1 is a side view showing an opening and closing mechanism integrally constructed based on a base member. Figure 7B It is a front view showing the cover member of the opening and closing mechanism.

[0029] Fig. 8A is a longitudinal sectional view showing the opening and closing mechanism when the cover member is in a closed state, Figure 8B It is a longitudinal sectional view showing the opening and closing mechanism when the cover member is in the open state.

[0030] Fig. 9A is a longitudinal sectional view showing the structure of the bellows and its surroundings when the opening and closing mechanism is in a closed state. Fig. 9B This is a longitudinal sectional view showing the structure of the bellows and its surroundings when the opening and closing mechanism is in the open state.

[0031] Fig.10 It is a cross-sectional view showing a processing chamber and an exhaust switching mechanism according to a modified example. DETAILED DESCRIPTION

[0032] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 It is a plan view (or a cross-sectional view) showing a schematic structure of a substrate processing apparatus 1 according to the embodiment. Figure 2 Yes Figure 1 A longitudinal sectional view of the substrate processing apparatus as viewed along the arrow AA shown.

[0033] <1. Substrate processing device>

[0034] refer to Figure 1 The substrate processing apparatus 1 is a single-wafer type apparatus that processes substrates W one by one. The substrate processing apparatus 1 includes a carrier block 2 and a processing block 3 .

[0035] In this specification, for convenience, the direction in which the carrier block 2 and the processing block 3 are arranged is referred to as the "front-to-back direction X". The front-to-back direction X is horizontal. In the front-to-back direction X, for example, the direction from the processing block 3 toward the carrier block 2 is referred to as the "front". The direction opposite to the front is referred to as the "rear". The horizontal direction perpendicular to the front-to-back direction X is referred to as the "width direction Y". One direction of the "width direction Y" is appropriately referred to as the "right". The direction opposite to the right is referred to as the "left". The direction perpendicular to the horizontal direction X is referred to as the "up-down direction Z". In each figure, for reference, front, back, right, left, top, and bottom are appropriately indicated.

[0036] <2.Transfer Block>

[0037] The carrier block 2 includes a plurality of (eg, four) load ports LP and a carrier robot IR. The load port LP is used to carry in and out a carrier C. The carrier C is placed on the load port LP. The load port LP is disposed outside the carrier block 2 .

[0038] The carrier C accommodates a plurality of (for example, 25) substrates W. For example, a FOUP (Front Opening Unify Pod) is used as the carrier C, but the present invention is not limited thereto. The substrate W is formed in a disk shape, for example.

[0039] The carrier robot IR is arranged inside the carrier block 2. The carrier robot IR transfers substrates W between, for example, four carriers C placed on four load ports LP and a substrate placement unit (shelf) PS described later. The carrier robot IR includes a hand 5. The hand 5 is movable and holds one substrate W. The carrier robot IR moves the hand 5 holding one substrate W in the horizontal direction (front-back direction X and width direction Y) and in the up-down direction Z. In addition, the carrier robot IR rotates the hand 5 around the vertical axis.

[0040] <3. Processing Block>

[0041] The processing block 3 includes a transport robot TR, a substrate mounting part PS, and four towers TW1 to TW4. The transport robot TR and the substrate mounting part PS are provided in a transport space 11 extending in the front-rear direction X. The transport space 11 extends linearly backward from the carrier block 2. The transport robot TR transports the substrate W between the substrate mounting part PS and each processing unit 21 (described later) of the four towers TW1 to TW4. The transport robot TR includes a hand 13. The hand 13 can move to hold one substrate W in a horizontal position. The transport robot TR moves the hand 13 holding one substrate W in the horizontal direction (front-rear direction X and width direction Y) and in the up-down direction Z. In addition, the transport robot TR rotates the hand 13 around the vertical axis. The substrate mounting part PS is arranged between the carrier robot IR and the transport robot TR.

[0042] The first tower TW1 and the second tower TW2 are arranged in the front-rear direction X along the transfer space 11 . Similarly, the third tower TW3 and the fourth tower TW4 are arranged in the front-rear direction X along the transfer space 11 .

[0043] In the width direction Y, the two towers TW1 and TW2 are arranged to face the two towers TW3 and TW4 with the transfer space 11 interposed therebetween. That is, the two towers TW1 and TW2 are arranged on the right side of the transfer space 11. In addition, the two towers TW3 and TW4 are arranged on the left side of the transfer space 11.

[0044] Each of the four towers TW1 to TW4 includes six processing units 21 arranged in the vertical direction Z. That is, the processing block 3 includes 24 processing units 21. Figure 2 For example, two towers TW2 and TW4 are shown to each include six processing units 21 arranged in the up-down direction Z.

[0045] In addition, the processing block 3 includes four towers TW1 to TW4. In this regard, the processing block 3 may include one or two or more towers. In addition, each tower TW1 to TW4 includes six processing units 21. In this regard, each tower TW1 to TW4 may include one processing unit 21 or two or more processing units 21 arranged in the up-down direction Z.

[0046] <3-1. Processing Chamber>

[0047] like Figure 1 As shown, each processing unit 21 includes a processing chamber 23 and an exhaust switching mechanism 25 . Figure 3 It is a cross-sectional view showing the processing chamber 23 and the exhaust switching mechanism 25 . Figure 4 It is a longitudinal sectional view showing the processing chamber 23 and the exhaust switching mechanism 25 .

[0048] The processing chamber 23 processes the substrates W one by one. The processing chamber 23 includes a holding and rotating unit 27, three nozzles 29A, 29B, and 29C, a substrate transfer port 30, and a fan filter unit 31 (see Figure 4 The rotating part 27 and the three nozzles 29A, 29B, and 29C are respectively disposed in the processing chamber 23. Figure 4 As shown, the fan filter unit 31 is disposed on the ceiling of the processing chamber 23. The fan filter unit 31 supplies clean air (gas) into the processing chamber 23.

[0049] The substrate transfer port 30 is arranged toward the transfer space 11. The substrate W is transferred to the holding and rotating part 27 through the substrate transfer port 30. The holding and rotating part 27 rotates the substrate W around the vertical axis AX1 while holding the substrate W in a horizontal posture. Specifically, the holding and rotating part 27 includes a spin chuck 27A that holds the substrate W in a horizontal posture, and an electric motor 27B that rotates the spin chuck 27A around the vertical axis AX1. The spin chuck 27A may be a chuck that holds the substrate W by clamping the side surface of the substrate W with three or more holding pins. In addition, the spin chuck 27A may also be a chuck that holds the lower surface of the substrate W by vacuum adsorption.

[0050] The three nozzles 29A, 29B, and 29C respectively eject chemical liquids toward the substrate W held by the holding rotating unit 27. The three nozzles 29A, 29B, and 29C eject the first chemical liquid, the second chemical liquid, and the third chemical liquid. For example, the first nozzle 29A ejects the first chemical liquid, and the second nozzle 29B ejects the second chemical liquid. In addition, the third nozzle 29C ejects the third chemical liquid. The first chemical liquid, the second chemical liquid, and the third chemical liquid are of different types. In addition, when the first chemical liquid, the second chemical liquid, and the third chemical liquid are not particularly distinguished, they are referred to as "chemical liquids".

[0051] The first chemical solution is classified as an acidic solution (acidic chemical solution), for example, and includes at least one of fluoric acid (hydrofluoric acid), hydrochloric acid hydrogen peroxide solution, sulfuric acid, sulfuric acid hydrogen peroxide solution, fluorine nitric acid (a mixture of fluoric acid and nitric acid), and hydrochloric acid.

[0052] The second chemical solution is classified into, for example, an alkaline solution (alkaline chemical solution). The second chemical solution includes, for example, at least one of ammonia hydrogen peroxide solution (SC1), ammonia water, ammonium fluoride solution, and tetramethylammonium hydroxide (TMAH: Tetra Methyl Ammonium Hydroxide).

[0053] The third chemical liquid is classified into, for example, an organic liquid (organic chemical liquid). The organic liquid includes at least one of isopropyl alcohol (IPA), methanol, ethanol, hydrofluoroether (HFE), and acetone.

[0054] Each nozzle 29A, 29B, 29C has a tube shape extending linearly. The nozzles 29A, 29B, 29C include front end portions 33A, 33B, 33C, respectively. The front end portions 33A, 33B, 33C each have a discharge port (not shown) for discharging a chemical solution.

[0055] The processing chamber 23 also includes three rotation drive units 35A, 35B, and 35C. The three rotation drive units 35A, 35B, and 35C are respectively connected to the three base ends of the three nozzles 29A, 29B, and 29C. Each rotation drive unit 35A, 35B, and 35C includes, for example, an electric motor. The first rotation drive unit 35A rotates the first nozzle 29A around the vertical axis AX2. The second rotation drive unit 35B rotates the second nozzle 29B around the vertical axis AX3. The third rotation drive unit 35C rotates the third nozzle 29C around the vertical axis AX4.

[0056] like Figure 4 As shown, the processing chamber 23 is further provided with three pipes 37, 39, and 41. One end of the first pipe 37 is connected to the first nozzle 29A. The other end of the first pipe 37 is connected to the first chemical liquid supply source 43. In addition, an on-off valve V1 is provided in the first pipe 37. When the on-off valve V1 is opened, the first chemical liquid is transported from the first chemical liquid supply source 43 to the first pipe 37, and the first chemical liquid is ejected from the first nozzle 29A.

[0057] Similarly, one end of the second pipe 39 is connected to the second nozzle 29B. The other end of the second pipe 39 is connected to the second liquid medicine supply source 45. In addition, an on-off valve V2 is provided in the second pipe 39. When the on-off valve V2 is opened, the second liquid medicine is ejected from the second nozzle 29B. Similarly, one end of the third pipe 41 is connected to the third nozzle 29C. The other end of the third pipe 41 is connected to the third liquid medicine supply source 47. In addition, an on-off valve V3 is provided in the third pipe 41. When the on-off valve V3 is opened, the third liquid medicine is ejected from the third nozzle 29C.

[0058] The processing chamber 23 further includes an upper cup 49 and a lower cup 51. The upper cup 49 and the lower cup 51 are each formed into a hollow cylindrical shape. Figure 3 , Figure 4 As shown, the upper cup 49 and the lower cup 51 are arranged to surround the substrate W and the side surface of the spin chuck 27A. The upper cup 49 is arranged above the lower cup 51. The upper cup 49 is raised and lowered relative to the lower cup 51, the substrate W and the spin chuck 27A by a driving unit (not shown).

[0059] In addition, the upper cup 49 receives the chemical liquid scattered from the substrate W by the rotation of the substrate W, etc., and guides the chemical liquid to the lower cup 51. The lower cup 51 is provided with a liquid discharge pipe 53 at the bottom. The lower cup 51 receives the chemical liquid transported from the upper cup 49, etc., and discharges the chemical liquid through the liquid discharge pipe 53. In addition, the liquid discharge pipe 53 is also connected to the bottom of the processing chamber 23.

[0060] The processing chamber 23 includes a partition plate 55 for partitioning the upper space SP1 and the lower space SP2 therein. The air supplied from the fan filter unit 31 is Figure 4As shown by the dotted lines FL1, FL2, FL3, FL4, FL5, and FL6, the air is transported from the upper space SP1 to the lower space SP2 while flowing inside and outside the upper cup 49. Then, the air is transported from the lower space SP2 of the processing chamber 23 to any one of the three exhaust pipes 61, 62, and 63 (described later) via the exhaust switching mechanism 25 described later. Figure 3 In the figure, the partition plate 55 is omitted.

[0061] <3-2.3 exhaust pipes>

[0062] Three exhaust pipes 61, 62, and 63 extending in the vertical direction Z are provided on the side of each processing chamber 23. Specifically, the three exhaust pipes 61, 62, and 63 are provided in each of the four towers TW1 to TW4. Figure 2 As shown, three exhaust pipes 61, 62, and 63 are provided on the sides of the six processing chambers 23 of the second tower TW2. The three exhaust pipes 61, 62, and 63 extend in the vertical direction Z. In each of the four towers TW1 to TW4, the three exhaust pipes 61, 62, and 63 are arranged in the width direction Y.

[0063] like Figure 2 As shown, six horizontal exhaust pipes 65A, 66A, 67A, 65B, 66B, and 67B are provided on the top of the substrate processing device 1. The six exhaust pipes 61, 62, and 63 of the two towers TW1 and TW2 are connected to the three horizontal exhaust pipes 65A, 66A, and 67A. In addition, the six exhaust pipes 61, 62, and 63 of the two towers TW3 and TW4 are connected to the three horizontal exhaust pipes 65B, 66B, and 67B. For example, the upper end of the first exhaust pipe 61 of the first tower TW1 and the upper end of the first exhaust pipe 61 of the second tower TW2 are connected to the horizontal exhaust pipe 65A. Similarly, the second exhaust pipe 62 of the first tower TW1 and the second exhaust pipe 62 of the second tower TW2 are connected to the horizontal exhaust pipe 66A. In addition, the third exhaust pipe 63 of the first tower TW1 and the third exhaust pipe 63 of the second tower TW2 are connected to the horizontal exhaust pipe 67A.

[0064] <3-3. Exhaust Switching Mechanism>

[0065] As described above, each of the 24 processing units 21 includes an exhaust switching mechanism 25. The exhaust switching mechanism 25 connects the processing chamber 23 to any one of the three exhaust pipes 61, 62, and 63 via the switching box 71. In other words, the exhaust switching mechanism 25 switches the exhaust path from the processing chamber 23 to any one of the three exhaust pipes 61, 62, and 63.

[0066] like Figure 1 , Figure 3 , Figure 4As shown, the exhaust switching mechanism 25 is disposed between the processing chamber 23 and the three exhaust pipes 61, 62, and 63. The exhaust switching mechanism 25 includes a switching box 71 and three opening and closing mechanisms 73, 74, and 75. The opening and closing mechanisms 73, 74, and 75 are used for the exhaust switching mechanism 25.

[0067] The switch box 71 connects the processing chamber 23 to the three exhaust pipes 61, 62, and 63. The switch box 71 is connected to the processing chamber 23 via the exhaust inlet 78 of the connecting pipe 76. The connecting pipe 76 connects the processing chamber 23 and the switch box 71. The connecting pipe 76 is provided with an exhaust control regulator (not shown). The exhaust control regulator adjusts the flow rate (= volume / time) of the gas passing through the connecting pipe 76. An exhaust inlet 78 is formed at one end of the connecting pipe 76. The gas in the processing chamber 23 is transported to the switch box 71 from the exhaust inlet 78.

[0068] Three communication ports 81, 82, 83 are provided in the three exhaust pipes 61, 62, 63 corresponding to the regions of the switch box 71. The first communication port 81 is provided in the first exhaust pipe 61. Similarly, the second communication port 82 is provided in the second exhaust pipe 62. The third communication port 83 is provided in the third exhaust pipe 63. The three communication ports 81, 82, 83 are arranged in parallel in the width direction Y. The three communication ports 81, 82, 83 are each formed in a circular shape.

[0069] The three communication ports 81, 82, and 83 connect the switch box 71 with the three exhaust pipes 61, 62, and 63. That is, the switch box 71 is connected to the first exhaust pipe 61 via the first communication port 81. Similarly, the switch box 71 is connected to the second exhaust pipe 62 via the second communication port 82. The switch box 71 is connected to the third exhaust pipe 63 via the third communication port 83.

[0070] The three opening and closing mechanisms 73, 74, and 75 independently open and close the three communication ports 81, 82, and 83. Each opening and closing mechanism 73, 74, and 75 opens and closes any one of the three communication ports 81, 82, and 83. Specifically, Figure 3 As shown, the first opening and closing mechanism 73 opens and closes the first communication port 81 (corresponding communication port). Similarly, the second opening and closing mechanism 74 opens and closes the second communication port 82. The third opening and closing mechanism 75 opens and closes the third communication port 83.

[0071] Next, the characteristic parts of this embodiment are described. Figure 3 , Figure 4As shown in FIG. 1 , three opening and closing mechanisms 73, 74, and 75 are installed in the switching box 71. If the three opening and closing mechanisms 73, 74, and 75 are difficult to install and remove, for example, the assembly time of the substrate processing apparatus 1 becomes longer. Therefore, the exhaust switching mechanism 25 of this embodiment is configured such that each of the three opening and closing mechanisms 73, 74, and 75 is an integrally assembled part based on a base member 87 (described later). Thus, the three opening and closing mechanisms 73, 74, and 75 can be easily installed and removed.

[0072] refer to Figure 5 The top wall 71A of the switch box 71 has three mounting openings 85A, 85B, and 85C for mounting the three opening and closing mechanisms 73, 74, and 75 on the top wall 71A. The three mounting openings 85A, 85B, and 85C are provided on the top wall 71A of the switch box 71 in correspondence with the three communication ports 81, 82, and 83. The three mounting openings 85A, 85B, and 85C are arranged in the width direction Y. Each mounting opening 85A, 85B, and 85C is formed to a size through which a cover member 95 and a link mechanism 97 provided on a base member 87 described later can pass.

[0073] refer to Figure 5 , Figure 6 , Fig. 7A . Fig. 7A It is a side view showing the first opening and closing mechanism 73 (the second opening and closing mechanism 74 or the third opening and closing mechanism 75) which is integrally formed based on the base member 87. The three opening and closing mechanisms 73, 74, and 75 are attached to the three attachment openings 85A, 85B, and 85C.

[0074] The first opening and closing mechanism 73 is mounted in the mounting opening 85A. The second opening and closing mechanism 74 is mounted in the mounting opening 85B. The third opening and closing mechanism 75 is mounted in the mounting opening 85C. The three opening and closing mechanisms 73, 74, and 75 have substantially the same configuration.

[0075] The three opening and closing mechanisms 73, 74, and 75 respectively include a base member 87, an upper support member 89, an actuator 91, a rod 93, a cover member 95, and a link mechanism 97. In addition, the rod 93 includes an upper rod 93U and a lower rod 93L. When the upper rod 93U and the lower rod 93L are not distinguished, they are referred to as "rod 93".

[0076] The base member 87 is installed (assembled) on the top wall 71A while blocking one of the three mounting openings 85A, 85B, and 85C. For example, the base member 87 of the first opening and closing mechanism 73 is installed on the top wall 71A while blocking the mounting opening 85A. In addition, the base member 87 of the second opening and closing mechanism 74 is installed on the top wall 71A while blocking the mounting opening 85B. Figure 5In FIG. 1 , the outer shapes of three base members 87 of the three opening and closing mechanisms 73, 74, and 75 are shown by two-dot chain lines. The three base members 87 are respectively mounted to the three mounting openings 85A, 85B, and 85C by a plurality of screws.

[0077] The upper support member 89 is provided on the upper surface of the base member 87. The upper support member 89 is formed into a door shape (gate shape), but it may not be formed into a door shape. The actuator 91 is mounted on the upper support member 89. That is, the upper support member 89 is a member for fixing the actuator 91 to the base member 87. The actuator 91 includes, for example, an air cylinder, but may also include an electric motor.

[0078] The rod 93 extends downward from the actuator 91 while penetrating the base member 87 . The rod 93 (upper rod 93U) is moved in the up-down direction Z by the actuator 91 . The cover member 95 is disposed below the base member 87 .

[0079] The cover member 95 is a member that allows the gas from the processing chamber 23 to flow between the inside of the switching box 71 and, for example, the first exhaust pipe 61, or cuts off the gas from the processing chamber 23. In addition, the state in which the gas from the processing chamber 23 flows is referred to as an open state. In addition, the state in which the gas from the processing chamber 23 is cut off is referred to as a closed state. The cover member 95 is formed in a disk shape. Figure 7B As shown, an annular seal (sealing member) 95A is arranged on the peripheral edge of the front surface (front face) of the circular cover member 95 .

[0080] refer to Fig. 7A , Fig. 8A , Figure 8B The link mechanism 97 is disposed on the lower surface of the base member 87. The link mechanism 97 converts the movement of the rod 93 in the up-down direction Z into the swing of the cover member 95 around the horizontal axis AX5. The link mechanism 97 includes a lower support member 101, a first link 103, and a second link 105. The lower support member 101 is disposed on the lower surface of the base member 87. That is, the lower support member 101 is fixed to the lower surface of the base member 87. In addition, the first link 103 and the second link 105 are equivalent to the link members of the present invention.

[0081] The horizontal axis AX5 is located at a height between the base member 87 and the cover member 95. The horizontal axis AX5 passes through the lower end portion of the lower support member 101. The horizontal axis AX6 passes through the lower end portion of the rod 93 (93L). The horizontal axis AX7 passes through the lower end side of the first connecting rod 103. The horizontal axis AX6 and the horizontal axis AX7 are parallel to the horizontal axis AX5. In other words, the three horizontal axes AX5, AX6, and AX7 extend in the width direction Y. In addition, Fig. 8AIn the closed state shown, the horizontal axis AX6 is located at a height between the two horizontal axes AX5 and AX7. In addition, in the closed state, the horizontal axis AX5 is located between the two horizontal axes AX6 and AX7 when viewed from above.

[0082] The upper end portion of the first connecting rod 103 is connected to the lower end portion of the lower support member 101. The first connecting rod 103 can rotate around the horizontal axis AX5 passing through the connecting portion with the lower support member 101. In other words, the first connecting rod 103 can rotate around the horizontal axis AX5. The lower end portion of the first connecting rod 103 is connected to the back of the disc-shaped cover member 95. The upper end portion of the second connecting rod 105 is connected to the rod 93 (lower rod 93L) rotatably around the horizontal axis AX6. The lower end portion of the second connecting rod 105 is connected to the first connecting rod 103 rotatably around the horizontal axis AX7.

[0083] Next, the bellows structure of another characteristic part of this embodiment is described. It is difficult to ensure airtightness at the portion where the lower rod 93L slides relative to the base member 87. Therefore, if, for example, acidic gas in the switch box 71 leaks at the sliding portion, it may corrode, for example, electronic equipment disposed around it. Therefore, in this embodiment, a bellows structure is adopted for the sliding portion. Thus, leakage of gas at the sliding portion is prevented.

[0084] refer to Fig. 9A , Fig. 9B The three opening and closing mechanisms 73, 74, and 75 respectively include a bellows 107, a lower flange member 109L, an upper flange member 109U, a lower rod holding member 111, and a connecting screw 113. The lower flange member 109L corresponds to the lower member of the present invention. The upper flange member 109U, the lower rod holding member 111, and the connecting screw 113 correspond to the upper member of the present invention.

[0085] The bellows 107 extends in the vertical direction Z. The hollow TN of the bellows 107 can accommodate a part or all of the lower rod 93L. A lower flange member 109L is provided at the lower end of the bellows 107. The lower flange member 109L is formed in a plate shape. An opening OP1 of a size (diameter) through which the lower rod 93L can pass is formed in the center of the lower flange member 109L.

[0086] In addition, an opening OP2 of a size (diameter) through which the lower rod 93L can pass is also formed in the base member 87. The two openings OP1 and OP2 are each formed in a circular shape. The lower flange member 109L is mounted on the upper surface of the base member 87 by, for example, a plurality of screws. The lower rod 93L passes through the hole TN of the bellows 107 while penetrating the lower flange member 109L and the base member 87.

[0087] An upper flange member 109U is provided at the upper end of the bellows 107. The upper flange member 109U forms an opening OP3 of a size (diameter) through which the lower rod 93L can pass. That is, the cavity TN inside the bellows 107 can be accessed only from the two openings OP1 and OP3.

[0088] The lower rod holding member 111 is mounted on the upper surface of the upper flange member 109U, for example, by a plurality of screws. A hole portion OP4 slightly larger than the diameter of the lower rod 93L is formed in the central portion of the lower rod holding member 111 and on the lower surface of the lower rod holding member 111. In addition, an opening OP5 of a size that the lower rod 93L cannot pass through is formed on the upper surface of the lower rod holding member 111. In addition, the opening OP5 is formed in a size that the threaded portion (external threaded portion) 113A of the connecting screw 113 can pass through and a size that the head portion 113B of the connecting screw 113 cannot pass through. When viewed from above, the center of the opening OP5 is preferably consistent with the center of the opening OP3 and the hole portion OP4.

[0089] The lower rod holding component 111 limits the movement of the lower rod 93L in the horizontal direction (front-back direction X and width direction Y) by accommodating the upper end of the lower rod 93L in the hole portion OP4. In addition, while the head 113B and the lower rod 93L are clamped in the lower rod holding component 111, the connecting screw 113 is fastened to the threaded hole (internal thread) provided on the upper end surface of the lower rod 93L.

[0090] Thus, the upper end of the lower rod 93L is connected to the upper member (upper flange member 109U, lower rod holding member 111 and connecting screw 113). In addition, the upper member (upper flange member 109U, lower rod holding member 111 and connecting screw 113) is provided at the upper end of the bellows 107 in a manner to block the upper end of the cavity TN. In addition, the lower rod 93L, the upper flange member 109U, the lower rod holding member 111 and the connecting screw 113 move as a whole.

[0091] like Fig. 9A , Fig. 9B As shown, the lower rod 93L is raised and lowered relative to the base member 87. At this time, the gas can move between the inside of the switch box 71 and the inside of the cavity TN of the bellows 107. However, since the upper end of the bellows 107 is blocked, the space inside the cavity TN is separated from the space SP3 outside the bellows 107. That is, the gas inside the cavity TN is prevented from leaking into the space SP3.

[0092] The upper rod 93U extends downward from the actuator 91. The upper rod 93U is moved in the vertical direction Z by the actuator 91. The lower end of the upper rod 93U is connected to the upper member (upper flange member 109U, lower rod holding member 111 and connecting screw 113) via a floating joint 115. The floating joint 115 is a joint that absorbs eccentricity and deflection between the upper rod 93U and the lower rod 93L.

[0093] Specifically, the lower end of the upper rod 93U is connected to the upper part of the floating coupling (joint) 115. In addition, the threaded portion 115A of the floating coupling 115 is fastened to the threaded hole 113C formed on the upper surface of the connecting screw 113. Thus, the floating coupling 115 is connected to the connecting screw 113 and connected to the upper rod 93U.

[0094] Here, the operation of the three opening and closing mechanisms 73, 74, and 75 will be briefly described. Figure 8B As shown in FIG. 1 , the actuator 91 moves the rod 93 (upper rod 93U and lower rod 93L) upward. As a result, the cover member 95 is set to an open state to allow the gas from the processing chamber 23 to flow. When the cover member 95 of the first opening and closing mechanism 73 is in an open state, the first communication port 81 is opened. Similarly, when the cover member 95 of the second opening and closing mechanism 74 is in an open state, the second communication port 82 is opened. In addition, when the cover member 95 of the third opening and closing mechanism 75 is in an open state, the third communication port 83 is opened.

[0095] In addition, if Fig. 8A As shown, the actuator 91 moves the rod 93 downward. As a result, the cover member 95 is set to a closed state to cut off the gas from the processing chamber 23. When the cover member 95 of the first opening and closing mechanism 73 is in a closed state, the first communication port 81 is closed. Similarly, when the cover member 95 of the second opening and closing mechanism 74 is in a closed state, the second communication port 82 is closed. In addition, when the cover member 95 of the third opening and closing mechanism 75 is in a closed state, the third communication port 83 is closed. In addition, Figure 6 , Fig. 7A The opening and closing mechanisms 73, 74, and 75 are shown in a closed state.

[0096] The horizontal axis AX5 corresponds to the first horizontal axis of the present invention. The horizontal axis AX6 corresponds to the second horizontal axis of the present invention. The horizontal axis AX7 corresponds to the third horizontal axis of the present invention. The upper rod 93U corresponds to the first rod of the present invention. The lower rod 93L corresponds to the second rod of the present invention.

[0097] <4. Control Unit>

[0098] The substrate processing apparatus 1 includes a control unit 120 (see Figure 1) and a storage unit (not shown). The control unit 120 controls each component of the substrate processing apparatus 1. The control unit 120 includes one or more processors such as a central processing unit (CPU). The storage unit includes at least one of a ROM (Read-Only Memory) and a RAM (Random-Access Memory). The storage unit stores a computer program required for controlling each component of the substrate processing apparatus 1.

[0099] <5. Operation of substrate processing apparatus>

[0100] Next, the operation of the substrate processing apparatus 1 will be described. Figure 1 The carrier C is transferred to the load port LP. The transfer robot IR takes out the substrate W from the carrier C transferred to the load port LP, and transfers the substrate W to the substrate placement part PS.

[0101] The transport robot TR of the processing block 3 takes out the substrate W from the substrate loading part PS and transports the substrate W to any one of the 24 processing chambers 23 (24 processing units 21). For example, the substrate W is transported to a designated processing chamber 23 of the second tower TW2. At this time, the substrate W is transported to the holding and rotating part 27 of the designated processing chamber 23 through the substrate transport port 30. The holding and rotating part 27 holds the transported substrate W. In addition, after the substrate W is transported to the holding and rotating part 27, the substrate transport port 30 is closed by a shutter not shown.

[0102] Figure 4 The fan filter unit 31 shown supplies clean air to the processing chamber 23. In addition, the factory exhaust equipment draws air from one end of each of the six horizontal exhaust pipes 65A, 66A, 67A, 65B, 66B, and 67B. Figure 3 , Figure 6 In the exhaust switching mechanism 25 shown, the two opening and closing mechanisms 73 and 74 close the two communication ports 81 and 82, and the third opening and closing mechanism 75 opens the third communication port 83. Therefore, the gas in the designated processing chamber 23 is transported to the exhaust equipment of the factory via the third communication port 83, the third exhaust pipe 63 and the horizontal exhaust pipe 67A.

[0103] In addition, for example, the first exhaust pipe 61 is used to exhaust acidic gases. The second exhaust pipe 62 is used to exhaust alkaline gases. The third exhaust pipe 63 is used to exhaust organic gases. In addition, for example, the second exhaust pipe 62 can also be used to exhaust organic gases, and the third exhaust pipe 63 can also be used to exhaust alkaline gases. The functions of the three exhaust pipes 61, 62, and 63 are not limited.

[0104] <5-1. Exhaust operation of designated processing unit>

[0105] First, a case where an acid-based chemical solution (first chemical solution) is supplied to a substrate W to perform chemical solution treatment will be described. Figure 3 , Figure 6 In the exhaust switching mechanism 25 shown, the first opening and closing mechanism 73 opens the first communication port 81, and the two opening and closing mechanisms 74 and 75 close the two communication ports 82 and 83. Thus, the gas in the designated processing chamber 23 is transported in the order of the connecting pipe 76 (exhaust inlet 78), the switching box 71, and the first exhaust pipe 61. For example, the upper end of the first exhaust pipe 61 is connected to the horizontal exhaust pipe 65A. Therefore, the gas transported to the first exhaust pipe 61 is transported to the exhaust equipment of the factory via the horizontal exhaust pipe 65A.

[0106] Subsequently, the first rotation drive unit 35A rotates the first nozzle 29A around the vertical axis AX2. Thus, the front end portion 33A of the first nozzle 29A moves from the standby position outside the substrate W to the top of the substrate W held by the holding rotation unit 27. Subsequently, by opening the on-off valve V1, an acidic liquid is ejected from the first nozzle 29A. In addition, the holding rotation unit 27 rotates the held substrate W around the vertical axis AX1. By ejecting the acidic liquid, a mist (or vapor) of the acidic liquid is generated in the processing chamber 23. The gas containing the mist of the acidic liquid is transported to the first exhaust pipe 61 through the switching box 71.

[0107] In addition, a case where an alkaline chemical solution (second chemical solution) is supplied to the substrate W to perform chemical solution treatment will be described. Figure 3 , Figure 6 In the exhaust switching mechanism 25 shown, the second opening and closing mechanism 74 opens the second communication port 82, and the two opening and closing mechanisms 73 and 75 close the two communication ports 81 and 83. Thus, the gas in the designated processing chamber 23 is transported in the order of the connecting pipe 76 (exhaust inlet 78), the switching box 71, and the second exhaust pipe 62. For example, the upper end of the second exhaust pipe 62 is connected to the horizontal exhaust pipe 66A. Therefore, the gas transported to the second exhaust pipe 62 is transported to the exhaust equipment of the factory via the horizontal exhaust pipe 66A.

[0108] Then, the second rotation driving unit 35B rotates the second nozzle 29B around the vertical axis AX3. Thus, the front end portion 33B of the second nozzle 29B moves above the substrate W held by the holding rotation unit 27. Then, by opening the on-off valve V2, the alkaline chemical solution is ejected from the second nozzle 29B. In addition, the holding rotation unit 27 rotates the held substrate W around the vertical axis AX1. By ejecting the alkaline chemical solution, a mist (or vapor) of the alkaline chemical solution is generated in the processing chamber 23. The gas containing the mist of the alkaline chemical solution is transported to the second exhaust pipe 62 through the switching box 71.

[0109] In addition, a case where an organic chemical solution (third chemical solution) is supplied to the substrate W to perform chemical solution treatment will be described. Figure 3 , Figure 6 In the exhaust switching mechanism 25 shown, the third opening and closing mechanism 75 opens the third communication port 83, and the two opening and closing mechanisms 73 and 74 close the two communication ports 81 and 82. Thus, the gas in the designated processing chamber 23 is transported in the order of the connecting pipe 76 (exhaust inlet 78), the switching box 71, and the third exhaust pipe 63. For example, the upper end of the third exhaust pipe 63 is connected to the horizontal exhaust pipe 67A. Therefore, the gas transported to the third exhaust pipe 63 is transported to the exhaust equipment of the factory via the horizontal exhaust pipe 67A.

[0110] Then, the third rotation driving unit 35C rotates the third nozzle 29C around the vertical axis AX4. As a result, the front end portion 33C of the third nozzle 29C moves above the substrate W held by the holding rotation unit 27. Then, by opening the on-off valve V3, the organic chemical liquid is ejected from the third nozzle 29C. In addition, the holding rotation unit 27 rotates the held substrate W around the vertical axis AX1. By ejecting the organic chemical liquid, a mist (or vapor) of the organic chemical liquid is generated in the processing chamber 23. The gas containing the mist of the organic chemical liquid is transported to the third exhaust pipe 63 through the switching box 71.

[0111] After the substrate W is treated with chemical liquid in the designated processing chamber 23, the shutter (not shown) is moved to open the substrate transfer port 30 of the processing chamber 23. The transfer robot TR passes through the substrate transfer port 30 and transfers the substrate W from the processing chamber 23 to the substrate mounting portion PS. The transfer robot IR transfers the substrate W treated with chemical liquid from the substrate mounting portion PS to the carrier C of the load port LP.

[0112] According to the present embodiment, a base member 87 is provided, and the base member 87 is respectively detachable (installable (assembled) and detachable) to the three mounting openings 85A, 85B, and 85C provided on the top wall 71A of the switching box 71 corresponding to the three connecting ports 81, 82, and 83. The upper support member 89, the actuator 91, the rod 93 (93U, 93L), the cover member 95, and the link mechanism 97 (the lower support member 101, the first link 103, and the second link 105) are integrally provided on the base member 87. Therefore, each opening and closing mechanism 73, 74, and 75 can make the integrated member detachable relative to the switching box 71. Therefore, each opening and closing mechanism 73, 74, and 75 can be easily detached.

[0113] In addition, the lower flange member 109L provided at the lower end of the bellows 107 is mounted on the base member 87. In addition, the upper member (upper flange member 109U, lower rod holding member 111 and connecting screw 113) provided at the upper end of the bellows 107 blocks the upper end of the hole TN of the bellows 107. In addition, the upper rod 93U is connected to the lower rod 93L via the upper member. The lower rod 93L passes through the hole TN of the bellows 107 while penetrating the lower flange member 109L and the base member 87. By such a structure of the bellows 107 and its surroundings, even if there is a sliding portion of the rod 93 (93L) with respect to the base member 87, it is possible to prevent gas leakage in the switch box 71.

[0114] The floating coupling 115 interposed between the lower end of the upper rod 93U and the upper member (the upper flange member 109U, the lower rod holding member 111 and the connecting screw 113) can absorb the eccentricity and deflection angle between the upper rod 93U and the lower rod 93L.

[0115] When the cover member 95 is in the closed state, the seal 95A improves airtightness. For example, it is possible to prevent the gas containing the chemical solution (chemical solution atmosphere) from mixing into other exhaust lines. Thus, for example, when a part of the organic exhaust line is made of metal such as stainless steel, the acid exhaust gas is mixed in, which can prevent the metal part from corroding.

[0116] The present invention is not limited to the above-described embodiment, and can be implemented with modifications as follows.

[0117] (1) In the embodiment described above, Figure 4 As shown, the exhaust switching mechanism 25 (particularly the three opening and closing mechanisms 73, 74, 75) is arranged between the processing chamber 23 and the three exhaust pipes 61, 62, 63. Fig.10 As shown, three exhaust pipes 61 , 62 , and 63 may also be disposed between the processing chamber 23 and the three opening and closing mechanisms 73 , 74 , and 75 .

[0118] (2) In the above-described embodiment and modification (1), the floating coupling 115 is provided between the upper rod 93U and the connecting screw 113. For example, when it is not necessary to absorb the eccentricity and deflection between the upper rod 93U and the lower rod 93L, the floating coupling 115 may not be provided. In this case, the lower end of the upper rod 93U is connected to the connecting screw 113 without the floating coupling 115 interposed therebetween.

[0119] (3) In the above-described embodiment and each modified example, each opening and closing mechanism 73, 74, 75 includes the floating joint 115. In this regard, the floating joint 115 may be replaced with another joint that absorbs at least one of the eccentricity and the deflection angle between the upper rod 93U and the lower rod 93L.

[0120] (4) In the above-described embodiment and each variation, each processing chamber 23 includes three nozzles 29A, 29B, and 29C. In this regard, for example, each processing chamber 23 may not include the nozzle 29C but may include two nozzles 29A and 29B. In other words, each processing chamber 23 may include a plurality of nozzles.

[0121] (5) In the above-described embodiment and each modified example, each opening and closing mechanism 73, 74, 75 includes the bellows 107, the lower member (lower flange member 109L), and the upper member (upper flange member 109U, lower rod holding member 111, and connecting screw 113). In this regard, for example, when airtightness can be sufficiently ensured in the sliding portion of the rod 93 with respect to the base member 87, each opening and closing mechanism 73, 74, 75 may not include the bellows 107, the lower member, and the upper member. In this case, for example, the upper rod 93U is connected to the lower rod 93L via the floating coupling 115.

[0122] (6) In the above-described embodiment and various variations, three exhaust pipes 61, 62, and 63 are provided on the side of the processing chamber 23, but the number of exhaust pipes is not limited to three. In other words, it is sufficient to provide multiple exhaust pipes on the side of the processing chamber 23. In addition, multiple (for example, two) opening and closing mechanisms that independently open and close multiple (for example, two) communication ports may be installed in the switch box 71 in response to multiple (for example, two) exhaust pipes.

[0123] (7) In the above-described embodiments and various variations, for example, Figure 4 As shown, the cover member 95 directly contacts the third exhaust pipe 63 in order to close the third communication port 83. For example, a side wall having an opening communicating with the third communication port 83 may be provided between the cover member 95 and the third exhaust pipe 63. In this case, the cover member 95 can also close the third communication port 83 by closing the opening.

[0124] (8) In the above-described embodiment and various variations, the lower end of the lower rod 93L is connected to the upper end of the second connecting rod 105. At this time, the lower rod holding member 111 is clamped between the head 113B of the connecting screw 113 and the lower rod 93L, and the connecting screw 113 is fastened to the threaded hole provided on the upper end surface of the lower rod 93L. Subsequently, the lower rod holding member 111 may be mounted on the upper surface of the upper flange member 109U by, for example, a plurality of screws. Thus, the lower rod 93L can be easily connected to the connecting screw 113.

[0125] The present invention can be implemented in other specific forms without departing from the concept or essence thereof. Therefore, reference should be made to the attached technical solutions rather than the above description as the contents indicating the scope of the invention.

[0126] [Explanation of Symbols]

[0127] 1 Substrate processing device

[0128] 23 Processing Chamber

[0129] 25 Exhaust switching mechanism

[0130] 27. Keep rotating part

[0131] 29A, 29B, 29C Nozzles

[0132] 61, 62, 63 Exhaust pipe

[0133] 71 Switch Box

[0134] 71A Top wall

[0135] 73, 74, 75 Opening and closing mechanism

[0136] 81, 82, 83 connecting ports

[0137] 85A, 85B, 85C Mounting Opening

[0138] 87 Base parts

[0139] 89 Upper support member

[0140] 91 Actuator

[0141] 93 strokes

[0142] 95 Cover parts

[0143] 97 connecting rod mechanism

[0144] 101 Lower support component

[0145] 103 1st connecting rod

[0146] 105 2nd connecting rod

[0147] 107 Bellows

[0148] TN Void

[0149] 109L Lower flange assembly

[0150] 109U upper flange assembly

[0151] 111 Lower rod retaining part

[0152] 113 Connecting screw

[0153] 115 Floating joint

[0154] 120 Control Department

[0155] W substrate.

Claims

1. An opening and closing mechanism, characterized in that: An exhaust switching mechanism for connecting a processing chamber to any one of a plurality of exhaust pipes via a switching box, and a mechanism for opening and closing any one of a plurality of communication ports connecting the switching box with the plurality of exhaust pipes, comprising: A base component capable of being respectively mounted on a plurality of mounting openings provided on the top wall of the switch box corresponding to the plurality of communication ports; An upper support component, arranged on the upper surface of the base component; an actuator mounted on the upper support member; a rod extending downward from the actuator while penetrating the base member and being moved in the vertical direction by the actuator; A lower support component, disposed on the lower surface of the base component; a cover member, disposed below the base member and capable of blocking the one communication port; and a connecting rod component, disposed below the base component, connecting the rod, the lower support component and the cover component; and The cover member is switched between an open state and a closed state by transmitting the vertical movement of the rod to the cover member via the link member.

2. The opening and closing mechanism according to claim 1, characterized in that The connecting rod component comprises: a first link, the upper end of which is connected to the lower end of the lower support member, and is rotatable about a first horizontal axis passing through the connection portion with the lower support member, and the lower end of which is connected to the back surface of the cover member; and a second link having an upper end portion rotatably connected to the rod around a second horizontal axis passing through a lower end portion of the rod, and a lower end portion rotatably connected to the first link around a third horizontal axis passing through the first link; and The second horizontal axis and the third horizontal axis are respectively parallel to the first horizontal axis.

3. The opening and closing mechanism according to claim 1 or 2, characterized in that Also available: a bellows extending in an up-and-down direction; a lower member disposed at the lower end of the bellows and further mounted on the base member; and an upper member disposed at the upper end of the bellows in a manner to block the upper end of the hollow of the bellows; and The rod comprises a first rod and a second rod; The first rod extends downward from the actuator, and the lower end of the first rod is connected to the upper member; the upper end of the second rod is connected to the upper member, and The second rod passes through the lower member and the base member while passing through the hole of the bellows.

4. The opening and closing mechanism according to claim 3, characterized in that The lower end of the first rod is connected to the upper member via a joint that absorbs eccentricity and deflection between the first rod and the second rod.

5. The opening and closing mechanism according to claim 1, characterized in that A seal is disposed on a peripheral edge portion of the front surface of the cover member.

6. An exhaust switching mechanism, characterized in that: A mechanism for switching the exhaust path from a processing chamber to any one of a plurality of exhaust pipes, comprising: a switching box, connecting the processing chamber to the plurality of exhaust pipes; and A plurality of opening and closing mechanisms, which are the plurality of opening and closing mechanisms for independently opening and closing the plurality of communication ports connecting the switch box and the plurality of exhaust pipes, and are installed in a plurality of installation openings provided on the top wall of the switch box corresponding to the plurality of communication ports; and The plurality of opening and closing mechanisms respectively include: A base component capable of being installed in the plurality of installation openings respectively; An upper support component, arranged on the upper surface of the base component; an actuator mounted on the upper support member; a rod extending downward from the actuator while penetrating the base member and being moved in the vertical direction by the actuator; A lower support component, disposed on the lower surface of the base component; a cover member, disposed below the base member, capable of blocking a corresponding communication port among the plurality of communication ports; and A connecting rod component, disposed below the base component, connecting the rod, the lower support component and the cover component; The cover member is switched between an open state and a closed state by transmitting the vertical movement of the rod to the cover member via the link member.

7. A substrate processing device, The invention is characterized in that it is a device for processing a substrate and has: The exhaust switching mechanism according to claim 6; the processing chamber; A holding portion, disposed in the processing chamber, and holding the substrate in a horizontal position; a nozzle disposed in the processing chamber and spraying a chemical solution toward the substrate held by the holding portion; and The plurality of exhaust pipes are disposed on the side of the processing chamber and extend in a vertical direction.

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