Pneumatic ultra-clean diaphragm valve capable of adjusting flow

Abstract

The invention discloses a flow-adjustable pneumatic ultra-clean diaphragm valve in the field of semiconductors. A diaphragm is arranged in a valve cavity of the valve body communicated with the inlet and outlet, the upper end of the diaphragm is fixed to the lower end of the piston rod, the upper cavity and the lower cavity are fixedly connected in a sealed mode, and an air chamber is defined inside the upper cavity and the lower cavity. The lower portion of the piston rod extends out of the air chamber, a lower cavity is fixedly installed on the valve body, and a flow adjusting structure used for controlling the balance position of the diaphragm is arranged on the side wall of the lower cavity and used for communicating the air chamber with the atmosphere. The lower cavities are provided with air holes used for being matched with the flow adjusting structure to adjust the balance position of the diaphragm so as to control the opening degree of the valve body. The flow can be accurately adjusted, the good sealing performance is achieved, and pollutants outside the valve are prevented from entering the valve and fluid conveyed in the valve is prevented from leaking outwards; the whole diaphragm valve is made of PTTE materials, and the requirements for corrosion resistance, heat resistance and high cleanliness can be met.

Description

Technical Field

[0001] The invention relates to the field of semiconductor manufacturing, and in particular to a pneumatic ultra-clean diaphragm valve with adjustable flow rate, which is a main component in the storage and transportation process of ultra-pure media. Background Art

[0002] As a precise fluid control component, ultra-clean diaphragm valve plays a vital role in many high-tech industries and is widely used in semiconductor manufacturing, biomedicine, fine chemicals and other fields. The diaphragm valve separates the fluid from the outside through a flexible diaphragm, and a drive device is installed in the valve cover and connected to the diaphragm. The diaphragm is pulled up and pressed down by driving the transmission element to make a linear motion, thereby completing the opening and closing adjustment of the valve.

[0003] The existing pneumatic ultra-clean diaphragm valve only plays the role of a switch in the storage and transportation of ultra-pure media. The diaphragm valve has two upper and lower chambers. During the opening and closing process, compressed air is passed into the corresponding chamber, and the other chamber is exhausted to realize the movement of the diaphragm. There is no limit device inside the chamber, and compressed air is continuously passed until the piston rod touches the upper and lower inner surfaces of the chamber. At this time, the volume of the chamber no longer changes and the diaphragm stops moving. Therefore, the diaphragm valve has only two states: fully open and fully closed. The opening cannot be adjusted, and the flow of the flow control system needs to be regulated by additional components. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides a pneumatic ultra-clean diaphragm valve with adjustable flow rate, which realizes flow rate regulation and avoids the entry of pollutants outside the valve and the leakage of the transported fluid inside the valve.

[0005] In order to solve the above technical problems, the technical solution of the present invention is as follows: The present invention includes an upper cavity, a lower cavity, a diaphragm, a piston rod and a flow regulating switch; a diaphragm is arranged in the valve cavity connecting the inlet and outlet of the valve body, the upper end of the diaphragm is fixed to the lower end of the piston rod, the upper cavity and the lower cavity are sealed and fixedly connected and form an air chamber inside, the upper part of the piston rod can be sealed and installed in the air chamber so as to be movable toward or away from the valve cavity, the lower part of the piston rod extends out of the air chamber and is fixedly installed on the lower cavity outside the valve body, the side wall of the lower cavity is provided with a flow regulating structure for controlling the equilibrium position of the diaphragm, the flow regulating structure is used to connect the air chamber with the atmosphere, and the lower cavity is provided with air holes for cooperating with the flow regulating structure to adjust the equilibrium position of the diaphragm and thereby control the opening of the valve body.

[0006] The flow regulating structure includes a flow regulating switch and a flow regulating hole arranged on the side wall of the lower cavity. The flow regulating switch is rotatably and adjustable sealedly installed on the outer side wall of the lower cavity by bolts. The surface of the side wall of the lower cavity opposite to the flow regulating switch is provided with a plurality of flow regulating holes which are distributed at intervals and connected to the air chamber in the lower cavity. The plurality of flow regulating holes are distributed at intervals along a circular arc from top to bottom and around the horizontal rotation center axis of the flow regulating switch. The flow regulating switch is provided with a connecting hole which is used to connect with the flow regulating hole after the flow regulating switch rotates, and the connecting hole is connected to the atmosphere. The radial distance of the communicating through hole relative to the rotation center axis of the flow regulating switch is the same as the radial distance of the flow regulating hole relative to the rotation center axis of the flow regulating switch. An air inlet hole is formed at the top of the air chamber in the upper cavity, and an air outlet hole is formed at the bottom of the air chamber in the lower cavity. The air outlet and the flow regulating switch are located on different sides of the lower cavity. A vertical limit baffle is arranged in the middle of the air chamber in the upper cavity, and the top end of the limit baffle is fixed to the top surface of the air chamber. The upper cavity, the lower cavity and the valve body are respectively provided with mounting through holes, and the upper cavity, the lower cavity and the valve body are connected together after bolts are sequentially passed through the mounting through holes respectively provided in the upper cavity, the lower cavity and the valve body. The valve body has a fluid inlet at one end and a fluid outlet at the other end. The fluid inlet and the fluid outlet are connected to two sides of the valve cavity respectively. A weir is arranged in the valve cavity and is used for contacting and sealing with the lower surface of the diaphragm. The lower cavity has a mounting screw hole on the outer wall opposite to the rotation center axis of the flow regulating switch, and the flow regulating switch has a countersunk hole on the rotation center axis. The bolt passes through the countersunk hole of the flow regulating switch and is threadedly connected to the mounting screw hole. The flow regulating switch has a protruding portion on its outer edge, a protrusion on the outer wall of the lower cavity, a mounting hole for mounting the flow regulating switch on the protrusion, a groove on the hole wall of the mounting hole, and a protruding portion on the outer edge of the flow regulating switch for fitting into the groove.

[0007] In the present invention, the diaphragm valve is equipped with a piston rod in the valve cover, and the valve cover and the valve body are separated by a diaphragm. The diaphragm is pulled up and pressed down by the linear motion of the piston rod, thereby completing the opening and closing regulation of the valve; when working, gases with the same pressure are introduced into the upper and lower chambers, and by adjusting the flow regulating switch, different regulating holes are connected to the outside, the pressure in the upper chamber drops, and a pressure difference is formed, thereby promoting the movement of the piston rod and staying at different positions to achieve the function of flow regulation.

[0008] The technical solution provided by the present invention has the following effects:

[0009] The present invention can adjust the flow rate in stages through the flow regulating switch. Before working, the flow regulating switch needs to be adjusted to a suitable position to connect the required flow regulating holes. During working, the air pressure of the upper and lower air chambers is kept constant. Due to the different connected flow regulating holes, the positions where the piston rod stops are different, so that the expansion and contraction degree of the diaphragm is different, and the opening degree of the valve port is changed, thereby realizing the adjustment of the flow rate.

[0010] Compared with the prior art, the present invention can accurately adjust the flow rate and has excellent sealing performance, thereby preventing the entry of pollutants outside the valve and the leakage of the conveyed fluid inside the valve; the diaphragm valve is made of PTTE material as a whole, which can meet the requirements of corrosion resistance, heat resistance and high cleanliness. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to explain the embodiments of the present invention in more detail, the following briefly introduces the drawings required for use in the embodiments or prior art descriptions. Obviously, the drawings described below are only embodiments of the present invention, and a person of ordinary skill in the art can obtain other drawings based on the provided drawings without creative work.

[0012] Figure 1 An overall cross-sectional view provided for an embodiment of the present invention;

[0013] Figure 2 is an overall top view of a diaphragm valve in an embodiment of the present invention;

[0014] Figure 3 It is a structural diagram of the flow regulating switch and the relevant parts of the lower cavity in an embodiment of the present invention.

[0015] In the figure: an upper cavity 110, a lower cavity 120, a diaphragm 130, a piston rod 140, a valve body 150, and a flow regulating switch 160;

[0016] Upper cavity 110: air inlet 111, upper mounting through hole 112, limit baffle 113, sealing groove 114;

[0017] Lower cavity 120: air outlet 121, flow regulating hole 122, mounting screw hole 123, lower mounting through hole 124;

[0018] Piston rod 140: sealing groove 141;

[0019] The valve body 150 includes a fluid inlet 151, a weir portion 152, a fluid outlet 153, and a valve body mounting through hole 154;

[0020] The flow regulating switch 160 includes a connecting through hole 161 , a countersunk hole 162 , and a sealing groove 163 . DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] like Figure 1 As shown, an embodiment of the present invention provides a pneumatic ultra-clean diaphragm valve with adjustable flow.

[0023] The main body of the diaphragm valve 100 includes an upper cavity 110, a lower cavity 120, a diaphragm 130, a piston rod 140, a valve body 150 and a flow regulating switch 160. The upper cavity 110 includes an air inlet 111, a mounting through hole 112, a limit baffle 113 and a sealing groove 114. The lower cavity 120 includes an air outlet 121, a flow regulating hole 122, a mounting screw hole 123 and a mounting through hole 124. The piston rod 140 includes a sealing groove 141. The valve body 150 includes a fluid inlet 151, a weir 152, a fluid outlet 153 and a mounting through hole 154. The flow regulating switch 160 includes a connecting through hole 161, a countersunk hole 162 and a sealing groove 163.

[0024] More specifically, in terms of frameworks, Figure 1 As shown, it includes an upper cavity 110, a lower cavity 120, a diaphragm 130, a piston rod 140 and a flow regulating switch 160; the valve body 150 is provided with an inlet, an outlet and a valve cavity, the two ends of the valve cavity are respectively connected to the inlet and the outlet, the valve cavity is provided with a valve core, and the valve cavity of the valve body 150 that connects the inlet and the outlet is provided with a diaphragm 130, the upper end of the diaphragm 130 is fixed to the lower end of the piston rod 140, the upper cavity 110 and the lower cavity 120 are sealed and fixedly connected and form an air chamber inside, the upper part of the piston rod 140 can be sealed and installed in the air chamber movably toward or away from the valve cavity, and the lower part of the piston rod 140 extends out of the air chamber and is fixedly connected to the upper end of the diaphragm 130. The lower cavity 120 is sealed and fixed on the valve body 150. The side wall of the lower cavity 120 is provided with a flow regulating structure for controlling the equilibrium position of the diaphragm 130. The flow regulating structure is used to connect the air chamber with the atmosphere. The lower cavity 120 is provided with air holes for cooperating with the flow regulating structure to adjust the equilibrium position of the diaphragm 130 and thereby control the flow and opening of the valve body 150.

[0025] The upper cavity 110 and the lower cavity 120 together form two upper and lower air chambers, which are separated by the piston rod 140. The piston rod 140 is installed in the lower cavity 120, and the two need to be matched with each other. The sealing grooves 141 and 114 realize the sealing of the upper and lower air chambers. The limit baffle 113 is used to limit the upward movement range of the piston rod 140. The bottom of the piston rod 140 is connected to the diaphragm 130, and the diaphragm 130 separates the valve body 150 from the lower cavity 120.

[0026] like Figure 3 As shown, the flow regulating structure includes a flow regulating switch 160 and a flow regulating hole 122 arranged on the side wall of the lower cavity 120. The flow regulating switch 160 is rotatably and adjustable sealedly mounted on the outer side wall of the lower cavity 120 by bolts. The side wall surface of the lower cavity 120 directly facing the flow regulating switch 160 is provided with a plurality of flow regulating holes 122 which are spaced and connected to the air chamber in the lower cavity 120. The plurality of flow regulating holes 122 are spaced and distributed on the side wall surface of the lower cavity 120 along a circular arc from top to bottom and around the horizontal rotation center axis of the flow regulating switch 160.

[0027] The flow regulating switch 160 is provided with a connecting hole 161 for connecting with the flow regulating hole 122 after the flow regulating switch 160 rotates, and the connecting hole 161 is connected with the atmosphere.

[0028] The radial distance of the connecting hole 161 relative to the rotation center axis of the flow regulating switch 160 is the same as the radial distance of the flow regulating hole 122 relative to the rotation center axis of the flow regulating switch 160, so that after the flow regulating switch 160 itself rotates to a certain extent, the connecting hole 161 and the flow regulating hole 122 are opposite and connected.

[0029] An air inlet 111 is formed at the top of the air chamber in the upper cavity 110 , and an air outlet 121 is formed at the bottom of the air chamber in the lower cavity 120 .

[0030] The air outlet 121 and the flow regulating switch 160 are located on different sides of the lower cavity 120 , specifically, on both sides of the lower cavity 120 .

[0031] A vertical limit baffle 113 is disposed in the middle of the air chamber in the upper cavity 110 , and the top end of the limit baffle 113 is fixed to the top surface of the air chamber.

[0032] The upper cavity 110, the lower cavity 120 and the valve body 150 are each provided with a mounting through hole, and the upper cavity 110, the lower cavity 120 and the valve body 150 are connected together by bolts passing through the mounting through holes of the upper cavity 110, the lower cavity 120 and the valve body 150 in turn.

[0033] like Figure 2As shown, the upper cavity 110, the lower cavity 120, and the valve body 150 are provided with mounting holes, and the four mounting holes are symmetrically arranged at the four corners, and the three are connected and fixed by their own long bolts. In a specific implementation, the upper cavity 110 is provided with upper mounting holes 112 at the four corners, the lower cavity 120 is provided with lower mounting holes 124 at the four corners, and the valve body 150 is provided with valve body mounting holes 154 at the four corners. The mounting holes at the four corners of the upper cavity 110, the lower cavity 120, and the valve body 150 are aligned, and bolts are sequentially passed through the upper mounting holes 112 of the upper cavity 110 and the lower mounting holes 124 of the lower cavity 120 from top to bottom, and screwed into the valve body mounting holes 154 of the valve body 150 through threads, thereby connecting the upper cavity 110, the lower cavity 120, and the valve body 150 together.

[0034] A sealing groove 114 is formed on the mating surface between the upper cavity 110 and the lower cavity 120 , and a sealing ring is installed in the sealing groove 114 .

[0035] The piston rod 140 is provided with at least one sealing groove 141 on the outer peripheral surface matching with the lower cavity 120, and a sealing ring is installed in the sealing groove 141. In a specific implementation, one sealing groove 141 can be provided at the top and the bottom respectively to strengthen the sealing.

[0036] The flow regulating switch 160 is provided with at least one sealing groove 163 on the surface matching with the outer wall of the lower cavity 120 , and a sealing ring is installed in the sealing groove 163 .

[0037] A fluid inlet 151 is provided at one end of the valve body 150, and a fluid outlet 153 is provided at the other end. The fluid inlet 151 and the fluid outlet 153 are respectively connected to the two sides of the valve cavity. A weir portion 152 is provided in the valve cavity. The weir portion 152 is used to contact and seal with the lower surface of the diaphragm 130. When the lower surface of the diaphragm 130 is in contact and sealing connection with the weir portion, the valve body 150 is closed.

[0038] The fluid inlet 151 and the fluid outlet 153 are connected to the weir portion 152 , and the diaphragm 130 is installed directly above the weir portion 152 . In a specific implementation, the groove on the outer ring of the diaphragm 130 cooperates with the protrusion of the valve body 150 to achieve sealing.

[0039] A mounting screw hole 123 is formed on the outer wall of the lower cavity 120 opposite to the rotation center axis of the flow regulating switch 160. A countersunk hole 162 is formed on the rotation center axis of the flow regulating switch 160. The mounting screw hole 123 and the countersunk hole 162 are coaxially arranged. The bolt passes through the countersunk hole 162 of the flow regulating switch 160 and is threadedly connected to the mounting screw hole 123.

[0040] A groove is provided on the lower cavity along the radial direction of the flow regulating hole, and the flow regulating switch has a corresponding protrusion along the radial direction of the through hole, which is used to achieve accurate correspondence between the through hole and the flow regulating hole when installing the flow regulating switch.

[0041] More specifically, if Figure 3 As shown, the flow regulating switch 160 is provided with a protruding portion on the outer edge, and a protrusion is provided on the outer wall of the lower cavity 120. The protrusion is provided with an installation hole for installing the flow regulating switch 160. The hole wall of the installation hole is provided with a groove. The flow regulating switch 160 is provided with a protruding portion on the outer edge for fitting into the groove.

[0042] In a specific implementation, the air inlet 111 and the air outlet 121 are respectively connected to an external air pressure source, and the air pressure of the external air pressure source is usually stable.

[0043] When flow regulation is not considered, by adjusting the gas pressure entering the air inlet 111 and the air outlet 121, the upper and lower pressure difference of the piston rod 140 is changed, the piston rod 140 is pushed to move up and down, and the expansion and contraction degree of the diaphragm 130 is changed, thereby affecting the contact degree and distance between the diaphragm 130 and the weir 152, thereby realizing the full opening and closing of the diaphragm valve.

[0044] When the diaphragm valve is fully closed, the bottom end of the diaphragm 130 presses against the weir 152 to form a seal, thereby closing the diaphragm valve, and the fluid flowing in from the fluid inlet 151 is blocked by the weir 152 and cannot flow out from the fluid outlet 153. When the diaphragm valve is opened, the bottom end of the diaphragm 130 leaves the weir 152 to form a gap, which is not sealed, so that the diaphragm valve is opened, and the fluid flows in from the fluid inlet 151, and flows into the fluid outlet 153 after passing through the gap between the weir 152 and the diaphragm 130.

[0045] When the flow rate and opening need to be adjusted and controlled, the connecting hole 161 needs to be connected to the appropriate flow regulating hole 122 so that the flow regulating hole 122 is connected to the atmosphere through the connecting hole 161, because there is a pressure difference between the air chambers on the upper and lower sides of the piston rod 140.

[0046] like Figure 1 As shown, for the pressure difference, the air holes opened by the flow regulating structure and the lower cavity 120 are controlled in the following manner:

[0047] In an initial state, the air pressure in the air chamber on the upper side of the piston rod 140 is greater than the air pressure in the air chamber on the lower side of the piston rod 140 , and the top of the piston rod 140 is located below the flow regulating hole 122 .

[0048] Next, after the flow regulating hole 122 is connected to the atmosphere, the flow regulating hole 122 is connected to the upper air chamber, which drives the air pressure of the upper air chamber connected to the flow regulating hole 122 to decrease, while the air pressure of the lower air chamber remains unchanged, and then the air pressure of the lower air chamber pushes the piston rod 140 to move toward the upper air chamber until the air pressure of the upper air chamber and the lower air chamber is balanced or the piston rod 140 moves to above the flow regulating hole 122;

[0049] Then, after the piston rod 140 moves to above the flow regulating hole 122, the flow regulating hole 122 and the lower air chamber are connected, which drives the air pressure of the lower air chamber connected to the flow regulating hole 122 to decrease, which will make the air pressure in the upper air chamber of the piston rod 140 greater than the air pressure in the lower air chamber of the piston rod 140, and then the air pressure in the upper air chamber pushes the piston rod 140 to move toward the lower air chamber until the air pressure in the upper air chamber and the lower air chamber is balanced or the piston rod 140 moves below the flow regulating hole 122.

[0050] Therefore, after the flow regulating hole 122 is connected to the atmosphere, the piston rod 140 will move back and forth up and down, and finally stop at the flow regulating hole 122 connected to the atmosphere, thereby adjusting the balance position of the piston rod 140, and then adjusting the expansion and contraction degree of the diaphragm 130 at the lower end of the piston rod 140, thereby controlling the valve opening and flow of the diaphragm valve.

[0051] like Figure 3 As shown, when the connecting through hole 161 is connected to the corresponding flow regulating hole 122, the protruding part on the flow regulating switch 160 and the groove of the lower cavity 120 are mutually locked and positioned to achieve accurate switching. Then, bolts are passed through the countersunk hole 162 and the mounting screw hole 123 to tightly assemble the flow regulating switch and the lower cavity 120, and a sealing ring is installed in the sealing groove 163 to achieve the fixing of the valve opening and flow and gas sealing.

[0052] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A pneumatic ultra-clean diaphragm valve with adjustable flow, comprising a valve body (150), characterized in that: The valve body (150) comprises an upper cavity (110), a lower cavity (120), a diaphragm (130), a piston rod (140) and a flow regulating switch (160); a diaphragm (130) is arranged in a valve cavity communicating with an inlet and an outlet of the valve body (150); the upper end of the diaphragm (130) is fixed to the lower end of the piston rod (140); the upper cavity (110) and the lower cavity (120) are sealed and fixedly connected and enclose an air chamber inside; the upper part of the piston rod (140) can move in a direction toward or away from the valve cavity. A dynamic seal is installed in the air chamber, the lower part of the piston rod (140) extends out of the air chamber, and the lower cavity (120) is fixedly mounted on the valve body (150). The side wall of the lower cavity (120) is provided with a flow regulating structure for controlling the equilibrium position of the diaphragm (130). The flow regulating structure is used to connect the air chamber with the atmosphere. The lower cavity (120) is provided with air holes for cooperating with the flow regulating structure to adjust the equilibrium position of the diaphragm (130) and thereby control the opening of the valve body (150).

2. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 1, characterized in that: The flow regulating structure comprises a flow regulating switch (160) and a flow regulating hole (122) arranged on the side wall of the lower cavity (120); the flow regulating switch (160) is rotatably and adjustable sealedly mounted on the outer wall of the lower cavity (120) by means of bolts; a plurality of flow regulating holes (122) which are distributed at intervals and connected to the air chamber in the lower cavity (120) are arranged on the surface of the side wall of the lower cavity (120) directly facing the flow regulating switch (160); the plurality of flow regulating holes (122) are distributed at intervals along a circular arc from top to bottom and around the horizontal rotation center axis of the flow regulating switch (160); The flow regulating switch (160) is provided with a connecting hole (161) for directly connecting with the flow regulating hole (122) after the flow regulating switch (160) rotates, and the connecting hole (161) is connected with the atmosphere.

3. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 2, characterized in that: The radial distance of the connecting through hole (161) relative to the rotation center axis of the flow regulating switch (160) is the same as the radial distance of the flow regulating hole (122) relative to the rotation center axis of the flow regulating switch (160).

4. A pneumatic ultra-clean diaphragm valve with adjustable flow rate according to claim 1 or 2, characterized in that: An air inlet (111) is provided at the top of the air chamber in the upper cavity (110), and an air outlet (121) is provided at the bottom of the air chamber in the lower cavity (120).

5. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 4, characterized in that: The air outlet (121) and the flow regulating switch (160) are located on different sides of the lower cavity (120).

6. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 1, characterized in that: A vertical limit baffle (113) is arranged in the middle of the air chamber in the upper cavity (110), and the top end of the limit baffle (113) is fixed to the top surface of the air chamber.

7. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 1, characterized in that: The upper cavity (110), the lower cavity (120) and the valve body (150) are each provided with a mounting through hole, and the upper cavity (110), the lower cavity (120) and the valve body (150) are connected together by bolts passing through the mounting through holes of the upper cavity (110), the lower cavity (120) and the valve body (150) in sequence.

8. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 1, characterized in that: The valve body (150) is provided with a fluid inlet (151) at one end and a fluid outlet (153) at the other end. The fluid inlet (151) and the fluid outlet (153) are respectively connected to two sides of the valve cavity. A weir (152) is provided in the valve cavity. The weir (152) is used to contact and seal with the lower surface of the diaphragm (130).

9. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 1, characterized in that: The lower cavity (120) is provided with a mounting screw hole (123) on the outer wall directly opposite to the rotation center axis of the flow regulating switch (160); the flow regulating switch (160) is provided with a countersunk hole (162) on the rotation center axis; a bolt passes through the countersunk hole (162) of the flow regulating switch (160) and is threadedly connected to the mounting screw hole (123).

10. The flow-adjustable pneumatic ultra-clean diaphragm valve according to claim 1, characterized in that: The flow regulating switch (160) is provided with a protruding portion on its outer edge, the outer wall of the lower cavity (120) is provided with a protrusion, the protrusion is provided with a mounting hole for mounting the flow regulating switch (160), the hole wall of the mounting hole is provided with a groove, and the flow regulating switch (160) is provided with a protruding portion on its outer edge for fitting and embedding into the groove.

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