Roll diameter detection assembly and substrate polishing apparatus

Abstract

The present application relates to the technical field of semiconductor substrate grinding. One embodiment of the present application provides a tape winding diameter detection assembly for detecting the winding diameter of a tape in real time. The assembly comprises a swing member swingably arranged on one side of the tape, a pressing part arranged on the swing member and adapted to press on the peripheral surface of the tape, and an angle measurement sensor for measuring the swing angle of the swing member. Another embodiment of the present application provides a substrate grinding device for measuring the winding diameter of the tape in real time during the grinding of the substrate and adjusting the releasing and / or winding torque according to the winding diameter. The present application solves the technical problem that the fluctuation of the control precision of wafer grinding leads to the deterioration of product precision.

Description

Roll diameter detection assembly and substrate grinding device Technical Field

[0001] This invention relates to the field of semiconductor substrate polishing technology, and more specifically, to a substrate diameter detection component and a substrate polishing apparatus. Background Technology

[0002] In the manufacturing process of substrates, especially wafers, edge polishing is required. When manufacturing semiconductor devices using silicon (Si) wafers, the process becomes increasingly complex due to the need to protect the lower surface and periphery of the wafer during the Cu wiring step. Because of this complexity, it is difficult to control particles on the wafer periphery that exist between the upper and lower surfaces. Therefore, in recent years, the wafer periphery has also been polished during semiconductor device formation to suppress the possibility of foreign matter formation at the wafer periphery (see, for example, Japanese Patent Publication No. 2001-345294).

[0003] Therefore, during the semiconductor device manufacturing process, various films are formed at the periphery of the wafer. These films can be a source of particle buildup, so they need to be removed from the periphery. Therefore, a polishing apparatus equipped with polishing elements such as polishing belts is used to polish the periphery of the wafer to remove the films. This polishing apparatus is configured to polish the periphery by rotating the wafer around its axis while pressing the polishing elements against the periphery of the wafer.

[0004] In the prior art, a grinding apparatus for grinding the periphery of a substrate can grind the periphery of a wafer, specifically by releasing and rewinding a tape to grind the edge of the substrate.

[0005] In existing tape conveyor systems, the tension of the tape is controlled by the output torque of the take-up and unwinding motors. During operation, the tape diameter changes dynamically, and the output torque of the take-up and unwinding motors adjusts accordingly. In current technology, given the diameter and thickness of the new tape, the tape consumption is calculated using the stroke of the tape feed motor. A formula can then be used to deduce the real-time tape diameter, which serves as the fundamental parameter for adjusting the output torque of the take-up and unwinding motors. Ideally, when the tape is compact and the initial diameter and thickness are negligible, the real-time tape diameter can be obtained relatively quickly. However, significant errors exist in practical applications.

[0006] Existing tape transport devices cannot detect the tape diameter in real time. Currently, the theoretical tape diameter can only be calculated using formulas. However, there are slight differences in the initial tape diameter of each tape. During transport and operation, the compactness and thickness of the tape fluctuate, resulting in a large error in the real-time tape diameter calculated by the formula. This causes the tape tension to be inconsistent with expectations, which in turn affects the accuracy and working quality of the tape transport device and ultimately leads to a decrease in the accuracy of wafer grinding control. Summary of the Invention

[0007] To overcome the above-mentioned defects, embodiments of the present invention provide a roll diameter detection component and a substrate grinding device, which solves the technical problem in the prior art where fluctuations in wafer grinding control accuracy lead to deterioration in product accuracy.

[0008] According to one aspect, the present invention provides a roll diameter detection assembly for real-time detection of the roll diameter of a tape, comprising:

[0009] A swinging component, which is swingably disposed on one side of the tape;

[0010] A pressing section, which is provided on the oscillating member, is used to adaptively press the circumferential surface of the tape.

[0011] An angle sensor is used to measure the swing angle of the swinging component.

[0012] As a further technical solution, an elastic element is also included, which acts on the swinging element so that the pressing part elastically presses against the circumferential surface of the tape.

[0013] As a further technical solution, the pressing part is a roller, and it is rotatably mounted on the swing member.

[0014] As a further technical solution, the angle sensor is a tilt sensor, which is installed on the swing member and used to detect the tilt angle of the swing member relative to the horizontal plane;

[0015] Alternatively, the angle sensor is a rotary encoder, and the swing shaft of the swinging component is connected to the rotary encoder to detect the swing angle of the swinging component;

[0016] Alternatively, the angle sensor may be a potentiometer-type angle sensor, a Hall effect sensor, a fiber optic sensor, a laser rangefinder, or an ultrasonic sensor.

[0017] According to another aspect, the present invention provides a substrate polishing apparatus, comprising:

[0018] The first roller is wound with a grinding belt.

[0019] The first swinging member is oscillatingly disposed on one side of the first roller;

[0020] A first pressing section is disposed on the first oscillating member and is used to adaptively press against the circumferential surface of the tape on the first roller;

[0021] The first angle sensor is used to measure the swing angle of the first swing member.

[0022] As a further technical solution, it also includes:

[0023] The second roller is used to wind up the tape.

[0024] The second swinging member is swingably disposed on one side of the second roller;

[0025] The second pressing part is disposed on the second oscillating member and is used to adaptively press the circumferential surface of the tape on the second roller;

[0026] The second angle sensor is used to measure the swing angle of the second swing member.

[0027] As a further technical solution, it also includes:

[0028] A base plate is disposed between the first roller and the second roller, and both the first swing member and the second swing member are swingably disposed on the base plate;

[0029] A driven roller, which is disposed on the base plate, is used to guide the tape.

[0030] A guide roller, disposed on the base plate, is used to guide the tape.

[0031] A tape breakage sensor is disposed between the driven roller and the guide roller to detect the tape winding between the driven roller and the guide roller.

[0032] As a further technical solution, it also includes a first elastic member and a second elastic member, which act on the first oscillating member and the second oscillating member respectively, so that the first pressing part and the second pressing part elastically press against the circumferential surface of the tape; the oscillation axes of the first oscillating member and the second oscillating member are coaxial.

[0033] As a further technical solution, it also includes:

[0034] The third swinging component is swingably disposed on one side of the first roller;

[0035] The third pressing part is disposed on the third oscillating member and is used to adaptively press the circumferential surface of the tape on the first roller. The third pressing part and the first pressing part are respectively located upstream and downstream of the lead wire of the tape, such that the first pressing part presses the tape in one more layer than the third pressing part presses the tape in one more layer.

[0036] The third elastic element acts on the third oscillating element, causing the third pressing part to elastically press against the circumferential surface of the first roller's winding belt;

[0037] The third angle sensor is used to measure the swing angle of the third swinging component.

[0038] As a further technical solution, it also includes a fourth swing member and a fourth angle sensor. The first swing member and the second swing member are both drivenly connected to the fourth swing member. The fourth swing member is provided with the fourth angle sensor. The transmission ratio of the first swing member to the fourth swing member to which it is driven is 1:4-1:10, and the transmission ratio of the second swing member to the fourth swing member to which it is driven is 1:4-1:10.

[0039] Based on the above technical solution, the beneficial effects of the present invention are as follows:

[0040] The improved accuracy and sensitivity of the roll diameter detection allows for more precise adjustment of the tension in the roll, ensuring a constant tension and resulting in consistent substrate grinding. When a change in roll diameter causes the oscillating component to swing, an angle sensor mounted on the oscillating component detects the change in its angle relative to the horizontal plane in real time. This change is converted into an electrical signal and transmitted to the control system, enabling real-time monitoring and control of the roll diameter. By employing an angle sensor as the angle measuring sensor, the performance of the roll diameter detection component is significantly improved, enhancing the reliability and stability of the roll transport device in high-precision processing such as wafer grinding.

[0041] This system employs a combination of a swing arm and an angle sensor to detect the swing arm's angle, thereby accurately calculating the real-time roll diameter of the conveyor belt. Within a limited space, this solution utilizes the swing arm to obtain its angle, and through geometric relationships, it can accurately calculate the real-time roll diameter, effectively improving the stability of the roll tension. The device has a simple structure and high space utilization rate. The rational layout of the driven rollers and guide rollers, along with the addition of a belt breakage sensor, provides real-time feedback on the roll's working status and real-time roll diameter, ensuring the safe and stable operation of the machine. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are merely some exemplary embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the exemplary embodiments of the present invention and these drawings without any creative effort.

[0043] Figure 1 is a schematic diagram of a roller in one embodiment of the present invention, wherein a portion of the tape extends outward from the roller;

[0044] Figure 2 is a schematic diagram of the roll diameter detection component in one embodiment of the present invention;

[0045] Figure 3 is a schematic diagram of the roll diameter detection component in another embodiment of the present invention, showing the roller structure;

[0046] Figure 4 is a schematic diagram of the substrate polishing apparatus in another embodiment of the present invention;

[0047] Figure 5 is a schematic diagram of the structure of the base plate in the embodiment of Figure 4;

[0048] Figure 6 is a structural schematic diagram of the third swing member in another embodiment of the present invention;

[0049] Figure 7 is a schematic diagram of the structure of the third oscillating component in Figure 6 in the substrate polishing device;

[0050] Figure 8 is a schematic diagram of the fourth swinging component structure in another embodiment of the present invention;

[0051] Figure 9 is a schematic diagram of the structure of the first swinging component in another embodiment of the present invention;

[0052] Figure 10 is a schematic diagram of the roll diameter and calculation principle in another embodiment of the present invention;

[0053] Figure 11 is a schematic diagram of the principle of calculating the roll diameter when the swing axis of the swinging member and the rotation axis of the roller are coplanar in the vertical plane in another embodiment of the present invention;

[0054] Figure 12 is a schematic diagram of the principle of calculating the roll diameter when the swing axis of the swinging member and the rotation axis of the roller are not coplanar in the vertical plane in another embodiment of the present invention;

[0055] In the diagram: Roller-100, First Roller-110, Second Roller-120, Reel-130, Reel-140, Belt-200, Oscillating Component-300, First Oscillating Component-310, Second Oscillating Component-320, Third Oscillating Component-330, Fourth Oscillating Component-340, Pressing Section-400, Roller-401, First Pressing Section-410, Second Pressing Section-420, Third Pressing Section-430, Elastic Component-500, First Elastic Component-510, Second Elastic Component-520, Third Elastic Component-530, Angle Sensor-600, First Angle Sensor-610, Second Angle Sensor-620, Third Angle Sensor-630, Fourth Angle Sensor-640, Base Plate-7, Driven Roller-8, Guide Roller-9, Belt Break Sensor-10, Belt Fixing Disc-11, Base Plate-12, Suction Cup-13, Rotating Shaft-14. Detailed Implementation

[0056] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it.

[0057] To keep the drawings concise, each drawing only schematically shows the parts relevant to the invention; these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some drawings, only one of components with the same structure or function is schematically shown, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one," and "several" includes "two" and "more than two."

[0058] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0059] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0060] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of description and simplification of operation, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0061] Furthermore, in the description of this application, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0062] Example 1

[0063] Referring to Figures 1 and 2, which respectively illustrate a roller and roll diameter detection assembly in one embodiment of the present invention. First, referring to Figure 1, two symmetrically arranged rollers 100 are shown: a first roller 110 (e.g., an unwinding drum) and a second roller 120 (e.g., a take-up drum). The unwinding drum and take-up drum may have the same or different structures. The unwinding drum and / or take-up drum includes a spool 130, a reel 140, and a tape retainer 11. The tape retainer 11 is used to secure the starting end of the tape 200, preventing the tape 200 from loosening or falling off during transport, and may include weight-reducing holes. The reel 140 is concentric with and axially adjacent to the tape retainer 11. Optionally, the reel 140 is an axially extending flange of the tape retainer 11. The reel 140 is fixed to the spool 130, or the tape 200 is wound around the flange to form the unwinding drum. Optionally, unwinding drums with the tape 200 wound on them can be purchased commercially.

[0064] The belt 200 is drawn from the unwinding drum and finally introduced into the take-up drum. Driven by a drive device (not shown), the take-up drum pulls the belt 200, thereby causing the unwinding drum to rotate and release the belt 200. The belt 200 is released from the unwinding drum in sequence and wound up on the take-up drum.

[0065] The tension in the tape 200 is controlled by the output torque of the take-up drive (e.g., a motor). When the unwinding drum is also driven, the tension in the tape 200 is controlled by the output torque of both the take-up drum drive and the unwinding drive.

[0066] To ensure constant tension in the tape 200, the drive unit typically includes a tension detection device. When an increase in tension is detected in the tape 200, decreasing the torque of the winding drive and / or increasing the torque of the unwinding drive reduces the tension in the tape 200. Conversely, when a decrease in tension is detected in the tape 200, increasing the torque of the winding drive and / or decreasing the torque of the unwinding drive increases the tension in the tape 200. This repeated dynamic adjustment helps to maintain a constant tension in the tape 200 as much as possible.

[0067] As an alternative to tension detection devices, it can also measure the tape diameter in real time, and calculate the torque required for the take-up and unwinding drive to maintain constant tension based on the tape diameter. Unfortunately, the tape diameter is dynamically changing during the operation of the tape transport device, and the tape thickness is not always uniform, so the current tape diameter cannot be directly deduced from the tape travel length.

[0068] Referring to Figure 2, a roll diameter detection assembly is shown for detecting the roll diameter of the tape 200 on a roller 100. This roll diameter detection assembly includes a base plate 7, a swing member 300 hinged to the base plate 7, and a pressing portion 400 at the free end of the swing member 300. The pressing portion 400 can be designed as an integral part of the swing member 300 or as a separate structure. The swing member 300 is oscillatingly positioned on one side of the roller 100, with its oscillation plane being the same as the rotation plane of the roller 100, such that the pressing portion 400 presses against the circumferential surface of the tape 200 on the roller 100.

[0069] The roll diameter detection assembly also includes an elastic element 500, which acts on the oscillating element 300, causing the pressing part 400 to elastically press against the circumferential surface of the belt 200 on the roller 100. This arrangement ensures that the pressing part 400 remains in elastic contact with the circumferential surface of the belt 200 whenever the roll diameter changes due to winding or unwinding. The elastic element 500 can be a coil spring or a tension spring. Alternatively, the elastic element 500 can be replaced with a magnetic element.

[0070] The roll diameter detection assembly also includes an angle sensor 600 for measuring the swing angle of the swing member 300. Specifically, the angle sensor 600 can be fixedly mounted on the swing member 300 or can be non-contact with the swing member 300, with the purpose of measuring the angle and / or angle change of the swing member 300.

[0071] According to the above technical solution, when the diameter of the winding belt 200 on the roller 100 changes due to winding and unwinding, the pressure section 400 is subjected to the reaction force of the winding belt 200, causing the oscillating member 300 to oscillate. The angle measuring sensor 600 reflects the change in winding diameter by measuring the angle or angle change of the oscillating member 300. Specifically, the winding diameter described in this embodiment refers to the outer diameter of the winding belt 200 on the roller 100, which is either a radius or a diameter.

[0072] In practical applications, for example, the oscillating element 300 is first installed at a suitable position on one side of the roller 100, ensuring it can oscillate freely. Then, the pressure part 400 is installed on the oscillating element 300, and the elastic element 500 acts on the oscillating element 300 to provide appropriate deflection preload. Finally, the angle sensor 600 is associated with and calibrated with the oscillating element 300. The pressure part 400 can be made of any suitable material and shape, such as a material with low friction with the tape 200 and a smooth structure, to avoid damaging the tape 200.

[0073] The advantages of this design are: firstly, it can detect changes in the roll diameter of the 200mm tape in real time, avoiding errors caused by estimating the roll diameter based on the tape thickness and the stroke of the tape feed motor (as the tape consumption); secondly, it has a relatively simple structure, low cost, and is easy to install and maintain. Compared to directly using distance sensors and tension sensors, it offers better real-time detection and improved measurement reliability.

[0074] For example, during the grinding of the periphery of a wafer, real-time and accurate roll diameter detection ensures the precision and stability of the tape transport, thereby improving the quality and consistency of wafer grinding. This significantly improves the accuracy and real-time performance of roll diameter detection, providing a reliable basis for the precise control of the tape transport device.

[0075] As the belt 200 is wound or released on the roller 100, the belt diameter increases or decreases, and the reaction force on the pressure section 400 changes, causing the oscillating member 300 to oscillate. The angle sensor 600 measures the angle change of the oscillating member 300, thereby obtaining real-time data on the belt diameter.

[0076] The design of this roll diameter detection component effectively solves the problem of inaccurate roll diameter detection in the prior art, and improves the performance and reliability of the roll transport device in the substrate, especially wafer manufacturing process.

[0077] Optionally, in this roll diameter detection assembly, the angle sensor 600 can be designed as a displacement sensor, azimuth sensor, light sensor, or grating sensor.

[0078] Optionally, the angle sensor 600 can also be a tilt sensor or a level sensor, used to indirectly reflect the change in the diameter of the tape 200 by detecting the change in the tilt angle of the swing member 300 relative to the horizontal plane.

[0079] In actual installation, for example, the tilt sensor is securely installed at a specific position on the swing member 300 to ensure that it can accurately detect the tilt angle of the swing member 300.

[0080] The advantages of this design are: firstly, the tilt sensor can provide high-precision tilt measurement, thereby improving the accuracy of roll diameter detection; secondly, it is installed on the swing component 300 and is directly related to the movement of the swing component 300, reducing the transmission of measurement errors.

[0081] For example, when the diameter of the tape 200 changes rapidly, the tilt sensor can quickly respond and accurately detect the tilt angle change of the oscillating component 300, reflecting the dynamic changes in the tape diameter in a timely manner. Therefore, the accuracy and sensitivity of tape diameter detection are further enhanced, allowing for more precise control of tape transmission.

[0082] When the diameter of the tape 200 changes, causing the oscillating component 300 to oscillate, the tilt sensor installed on the oscillating component 300 detects the change in its tilt angle relative to the horizontal plane in real time, converts this change into an electrical signal and transmits it to the control system, thereby realizing real-time monitoring and control of the tape diameter.

[0083] By using an inclination sensor as the angle sensor 600, the performance of the roll diameter detection component is significantly improved, enhancing the reliability and stability of the roll conveyor in high-precision processing such as wafer grinding.

[0084] Optionally, the angle sensor 600 can also be a rotary encoder, with the swing shaft of the swing member 300 connected to the rotary encoder to detect the rotation angle of the swing member 300. By directly measuring the rotation angle of the swing shaft of the swing member 300 through the rotary encoder, the change in the diameter of the tape 200 can be reflected.

[0085] In practical applications, for example, the rotary encoder is precisely installed at the position where it is connected to the swing shaft of the swing component 300 to ensure the accuracy of the measurement.

[0086] The advantage of this design is that the rotary encoder can provide high-precision angle measurement and is sensitive and accurate in detecting the 300° rotation angle of the oscillating component.

[0087] Alternatively, the angle sensor 600 can also be a potentiometer-type angle sensor, a Hall effect sensor, a fiber optic sensor, a laser rangefinder sensor, or an ultrasonic sensor.

[0088] Taking a potentiometer-type angle sensor as an example, its design principle is to use the characteristic of the potentiometer's resistance value changing with the angle to measure the angle of the oscillating component 300°.

[0089] In actual installation, for example, a potentiometer-type angle sensor is installed at a position that can effectively detect 300° angle changes of the swinging component, and then calibrated and adjusted.

[0090] The advantages of this design are: the potentiometer-type angle sensor has a simple structure, low cost, and can meet the angle measurement requirements of a certain accuracy.

[0091] Hall effect sensors, fiber optic sensors, laser rangefinders, and ultrasonic sensors each use different physical principles to detect changes in the angle or position of the oscillating element 300.

[0092] Hall effect sensors use the Hall effect to detect changes in magnetic fields to reflect angles; fiber optic sensors measure angles through the transmission and reflection characteristics of light; laser rangefinders determine distance and angle by measuring the flight time of a laser; and ultrasonic sensors rely on the reflection time of ultrasonic waves to determine angles.

[0093] In practical applications, the appropriate sensor type should be selected based on the specific working environment and accuracy requirements.

[0094] The advantages of these different types of sensors are that they each have the characteristics to adapt to different working conditions and accuracy requirements, and can provide diverse solutions for roll diameter detection.

[0095] Depending on the specific application scenario and requirements, using different types of angle measuring sensors 600, or a combination of different types of sensors, can achieve the best roll diameter detection effect and improve the control accuracy and stability of the roll conveyor.

[0096] When the diameter of the tape 200 changes, the oscillating component 300 oscillates or rotates accordingly. Different types of angle sensors 600 convert the angle or position change of the oscillating component 300 into an electrical signal or other measurable physical quantity through their respective detection principles and methods, thereby realizing real-time monitoring of the tape diameter.

[0097] By offering a variety of angle sensors 600 options, the roll diameter detection component can better adapt to different working conditions and accuracy requirements, improving the versatility and reliability of the roll transport device in various application scenarios.

[0098] Example 2

[0099] Referring to Figure 3, this embodiment provides another roll diameter detection component, which is largely the same as the technical solution of embodiment 1, so only the differences are described.

[0100] As shown in Figure 3, in the roll diameter detection assembly of this embodiment, the pressure part 400 can be designed as a roller 401, and is rotatably mounted on the free end of the swing member 300, which is a swing arm.

[0101] When the belt 200 is wound or released on the roller 100, the belt diameter changes. The rolling roller 401 can reduce the friction between itself and the belt 200, making the pressure section 400 more sensitive and accurate in responding to changes in the belt diameter.

[0102] In the actual assembly process, for example, the roller 401 is mounted on the swing arm 300 via rotating components such as bearings to ensure that the roller 401 can rotate smoothly.

[0103] This solution can obtain the real-time roll diameter of the belt using a swing arm within a limited space. The roller 401 is tangent to the belt 200, providing real-time feedback on the working status and real-time roll diameter of the belt, ensuring the safe and stable operation of the machine.

[0104] The advantage of this design is that the rotation of roller 401 can reduce frictional wear with the surface of tape 200, thus extending the service life of the components.

[0105] For example, during high-speed tape transport, roller 401 can quickly respond to changes in tape diameter while reducing errors and heat caused by friction.

[0106] As the diameter of the tape 200 changes, the roller 401 rolls on the surface of the tape 200, causing the swing arm-shaped oscillating component 300 to swing, thereby the angle sensor 600 detects the angle change and achieves accurate detection of the tape diameter.

[0107] By designing the pressure section 400 as a roller 401 and adopting the swing arm form of the swing member 300, the performance of the roll diameter detection component is optimized, wear is reduced, and its stability and reliability in practical applications are improved.

[0108] Example 3

[0109] Referring to Figures 4 and 5, a substrate polishing apparatus according to another embodiment of the present invention is shown. Referring to Figure 4, the tape 200 is used to polish the periphery of a substrate 12, which can be a wafer. The substrate 12 is held in place by a chuck 13 and rotates under the drive of a rotating shaft 14. The continuously moving tape 200 polishes the periphery of the continuously rotating wafer.

[0110] Referring again to Figure 4, in the substrate polishing apparatus of this embodiment, the first roller 110 serves as the unwinding drum for releasing the tape 200. A first oscillating member 310 is oscillatingly disposed on one side of the first roller 110, and a first pressing part 410 is disposed on the first oscillating member 310 and presses against the tape 200 on the first roller 110. A first elastic member 510 acts on the first oscillating member 310, causing the first pressing part 410 to elastically press against the circumferential surface of the tape 200 on the first roller 110. A first angle sensor 610 is associated with the first oscillating member 310 to measure its angle.

[0111] Through the coordinated action of the first swing member 310, the first pressing part 410, the first elastic member 510 and the first angle measuring sensor 610, the change in the roll diameter of the winding belt 200 on the first roller 110 is detected in real time, thereby providing precise control parameters for the winding belt transfer in the substrate grinding process.

[0112] In actual manufacturing and assembly, for example, the first oscillating member 310 is first precisely installed in a fixed position on one side of the first roller 110 to ensure it can oscillate flexibly. Then, the first pressing part 410 is securely installed on the first oscillating member 310 and its position is adjusted so that it can effectively press against the belt 200. Next, the first elastic member 510 is installed, and its deflection preload is adjusted as needed. Finally, the first angle measuring sensor 610 is accurately connected and configured to the first oscillating member 310 for calibration and adjustment.

[0113] The advantages of this design are: firstly, it can monitor the diameter of the winding belt 200 on the first roller 110 in real time and accurately, and adjust the speed and tension of the winding belt in a timely manner to ensure the stability and accuracy of the substrate grinding process; secondly, the structure of each component is relatively simple, easy to maintain and replace, and reduces the operating cost and maintenance difficulty of the device.

[0114] For example, in the continuous process of substrate grinding, even if the diameter of the tape 200 changes, the device can respond quickly and accurately, allowing the drive to make timely and accurate adjustments. This ensures that the output torque maintains the optimal and constant tension of the tape 200, guaranteeing smooth tape transport and consistent substrate grinding quality. This significantly improves the accuracy and reliability of tape transport during substrate grinding, effectively reducing grinding errors and defect rates caused by diameter variations.

[0115] When the substrate grinding apparatus is running, as the tape 200 is wound or released on the first roller 110, the tape diameter changes. The reaction force on the first pressing part 410 causes the first oscillating member 310 to oscillate. The first angle sensor 610 measures the angle change of the first oscillating member 310 in real time and transmits the data to the control system. The control system adjusts the tape transmission parameters (such as speed and tension) accordingly to achieve precise control of tape transmission during substrate grinding.

[0116] Through the above design, the substrate grinding device can better obtain the roll diameter value in real time, respond and control quickly, improve grinding accuracy and consistency, and enhance the competitiveness and practicality of the device in the field of substrate grinding and polishing.

[0117] Optionally, in the substrate polishing apparatus of this embodiment, a first roller 110 for releasing the tape 200 and a second roller 120 for winding the tape 200 are provided. The first roller 110 serves as the release roller, the second roller 120 serves as the winding roller, and the middle portion of the tape 200 serves as a polishing section for polishing the wafer. The tape 200 has tension between the first roller 110 and the second roller 120, so that it elastically abuts against the periphery of the wafer, increasing friction and performing effective polishing. A second oscillating member 320 is oscillatingly disposed on one side of the second roller 120, and a second pressing part 420 is mounted on the second oscillating member 320 and used to press the tape 200 on the second roller 120. A second elastic member 520 acts on the second oscillating member 320, so that the second pressing part 420 elastically presses against the periphery of the tape 200 on the second roller 120, and a second angle sensor 620 is associated with the second oscillating member 320 for measuring its angle.

[0118] The release and rewind of the belt 200 are achieved through the coordinated operation of the first roller 110 and the second roller 120. Simultaneously, the second oscillating element 320, the second pressure element 420, the second elastic element 520, and the second angle sensor 620 are used to monitor the change in the diameter of the belt 200 on the second roller 120 in real time. This, in conjunction with the relevant monitoring and control of the first roller 110, ensures stable and precise tension throughout the entire belt 200 transmission process.

[0119] In the actual assembly process, firstly, the first roller 110 and the second roller 120 are installed in appropriate positions, ensuring they can rotate normally. Then, the second oscillating member 320 is accurately installed on one side of the second roller 120, allowing it to oscillate freely and flexibly. Next, the second pressing part 420 is installed on the second oscillating member 320, and its position is adjusted to ensure it effectively presses against the winding tape 200 on the second roller 120. Afterward, the second elastic member 520 is installed, and its elastic force is adjusted according to actual needs to provide appropriate deflection pressure. Finally, the second angle sensor 620 is connected to and calibrated with the second oscillating member 320 to ensure accurate measurement of the angle change of the second oscillating member 320.

[0120] The advantages of this design are: firstly, it enables synchronous monitoring and control of the release and rewind of the belt 200, improving the overall accuracy and stability of the belt transmission; secondly, it can adjust the release and rewind speed and torque in a timely manner according to the real-time changes in the winding diameter on the first roller 110 and the second roller 120, ensuring that the tension of the belt 200 is constant, avoiding problems such as belt slack, accumulation or excessive stretching, and ensuring grinding consistency.

[0121] For example, in the continuous process of substrate grinding, when the release speed on the first roller 110 increases or decreases, the second roller 120 can quickly adjust the winding speed by monitoring the change in roll diameter, thereby maintaining the smooth transmission of the roll 200 and the stable quality of substrate grinding.

[0122] During the operation of the substrate polishing apparatus, the first roller 110 releases the tape, and the second roller 120 rewinds it. As the tape 200 winds onto the second roller 120, the tape diameter changes. The reaction force on the second pressure section 420 causes the second oscillating member 320 to oscillate. The second angle sensor 620 measures the angle change of the second oscillating member 320 in real time and transmits the data to the control system. Based on the tape diameter change data of the first roller 110 and the second roller 120, the control system adjusts their rotation speed and output torque respectively, achieving precise control of the tension throughout the tape transmission process, thereby ensuring the smooth progress of substrate polishing.

[0123] By adding a second roller 120 and its related monitoring and control components, the monitoring of the belt tension of the substrate grinding device is improved, making the monitoring more timely and accurate, and improving the consistency of belt grinding of the substrate.

[0124] Optionally, as shown in Figure 5, the substrate polishing apparatus of this embodiment is provided with a base plate 7, and the first swing member 310 and the second swing member 320 can both be swingably mounted on the base plate 7. The base plate 7 provides a stable mounting base and calibration base for the entire apparatus.

[0125] The base plate 7 is also equipped with a driven roller 8 and a guide roller 9, which are used to guide the belt 200 so that the belt 200 can be transmitted along a predetermined path to avoid confusion or deviation.

[0126] A belt breakage sensor 10 is installed between the driven roller 8 and the guide roller 9 to detect whether the belt 200 is broken. When the belt 200 is being transported normally, the belt breakage sensor 10 will not send a signal; once the belt 200 breaks, the belt breakage sensor 10 will immediately send a signal to the control system so that timely measures such as stopping the machine can be taken to avoid greater losses.

[0127] The tape breakage sensor 10 can be designed as a photoelectric sensor. It mainly consists of a transmitter and a receiver. The transmitter emits light of a specific wavelength, which travels through the tape transport path between the driven roller 8 and the guide roller 9. The receiver receives the light emitted by the transmitter.

[0128] When the tape 200 is transmitting normally, it blocks the light, and the receiver receives no light signal or the received light signal is weak. However, when the tape 200 breaks, the light is no longer blocked, and the intensity of the light signal received by the receiver suddenly increases, thereby triggering an alarm signal.

[0129] To improve the accuracy and reliability of the detection, multiple detection points can be set in the detection area of ​​the sensor to form a light curtain, ensuring that the tape 200 can be fully detected to see if it is broken.

[0130] To achieve real-time detection of the roll diameter of the tape 200 and maintain constant tension, this solution employs a combination of a swing arm and an angle sensor to detect the swing arm's angle and accurately calculate the real-time roll diameter. This solution integrates two sets of swing arms and a tape breakage sensor 10 onto the mounting base plate 7. Springs are used to elastically press the rollers on the swing arms against the tape. The angle sensor measures the current angle of the swing arm, and the real-time roll diameter can be accurately calculated using geometric relationships. This provides a data basis for controlling the torque and speed of the drive device, effectively improving the stability of the tape tension. The driven roller 8 and guide roller 9 are rationally arranged, working together to keep the tape 200 horizontal, thus enabling stable detection of its working status. The tape breakage sensor detects the working status of the tape 200, ensuring safe operation of the machine.

[0131] In the actual assembly process, the base plate 7 is first fixed in a suitable position between the first roller 110 and the second roller 120, ensuring its levelness and stability. Both the first roller 110 and the second roller 120 are mounted on the same base plate 7, allowing for real-time measurement of the roll diameter using two swing arms within a limited space. Then, the first swing arm 310 and the second swing arm 320 are installed in designated positions on the base plate 7, ensuring they can swing flexibly. Next, the driven roller 8, guide roller 9, and strip breakage sensor 10 are installed on the base plate 7 according to design requirements, and the corresponding wiring connections and adjustments are made. Finally, the roll fixing disc 11 is installed on the first roller 110 and the second roller 120.

[0132] The base plate 7 improves the overall integrity and stability of the device, and can fix the initial angle of the swing arm, facilitating subsequent angle changes. The cooperation of the driven roller 8, guide roller 9, and belt break sensor 10 ensures smooth and safe transmission of the belt 200. The belt fixing disc 11 increases the reliability of the belt 200's fixation on the roller.

[0133] For example, during long-term continuous operation of substrate grinding, even if the tape 200 is subjected to large tension and friction, it can maintain stable horizontal transmission due to the action of various guiding and fixing components, which facilitates tape diameter measurement and tension adjustment and reduces the probability of failure.

[0134] During operation, the tape 200 is released from the first roller 110, guided by the driven roller 8 and the guide roller 9, and grinds the substrate 12 before reaching the second roller 120 for winding. During this process, the first swinging component 310 and the second swinging component 320 monitor the tape diameter changes in real time. The driven roller 8 and the guide roller 9 guide the tape 200 and keep it horizontal. The tape breakage sensor 10 continuously detects whether the tape 200 is broken. If everything is normal, the device operates stably. If an abnormal tape diameter or tape breakage occurs, the corresponding sensor will send a signal, and the control system will make corresponding adjustments or stop the machine. The real-time tape diameter detection device, through the swinging arm and the tape breakage sensor, can provide real-time feedback on the working status and real-time tape diameter of the tape, ensuring the safe and stable operation of the machine.

[0135] Optionally, as shown in Figure 5, in the substrate grinding apparatus of this embodiment, the first roller 110 and the second roller 120 are respectively disposed on both sides of the base plate 7, and the substrate is placed between the first roller 110 and the second roller 120 as shown in Figure 4. This layout makes the device structure more compact, makes reasonable use of space, and also facilitates the transmission of the tape 200 between the two rollers and the control of tension. The first swing member 310 and the second swing member 320 are coaxially swinging. The coaxial swinging design can reduce the complexity of components and improve the stability and consistency of the system.

[0136] In the actual installation process, the base plate 7 is first placed horizontally and fixed in place. Then, the first roller 110 and the second roller 120 are installed at the designated positions on both sides of the base plate 7, ensuring that they are firmly installed and rotate smoothly. Next, the first swing member 310 and the second swing member 320 are installed, making them coaxial and ensuring that they can swing freely on the axis.

[0137] The advantages of this design are: firstly, it makes the overall layout of the device more reasonable, saves space, and reduces resistance and interference during the transmission of the tape 200; secondly, the coaxial oscillating first oscillating member 310 and the second oscillating member 320 can synchronously respond to changes in the tape 200 diameter, improving the accuracy of detection.

[0138] For example, during the high-speed operation of substrate grinding, this layout and design can ensure that the tape 200 always maintains appropriate tension, thereby improving the quality and efficiency of substrate grinding.

[0139] When the belt 200 is transmitted between the first roller 110 and the second roller 120, the change in the belt diameter causes the first oscillating member 310 and the second oscillating member 320 to oscillate coaxially. The oscillation angle is measured in real time by an angle measuring sensor associated with the oscillating member, thereby precisely controlling the transmission tension of the belt 200.

[0140] Through a reasonable layout and coaxial swing design, the performance and stability of the substrate grinding device are further improved, providing a stronger guarantee for high-quality substrate grinding.

[0141] Example 4

[0142] As shown in Figures 6 and 7, a substrate polishing apparatus in another embodiment of the present invention is illustrated. The technical solution is largely the same as that in Embodiment 3, so only the differences are described.

[0143] Referring to Figure 6, the substrate polishing apparatus of this embodiment can also be further designed with a third oscillating member 330, a third pressing part 430, a third elastic member 530, and a third angle sensor 630. Referring to Figure 7, the third oscillating member 330 is optionally oscillatingly disposed on one side of the first roller 110, and the third pressing part 430 is mounted on the third oscillating member 330 and used to press the tape 200 on the first roller 110. The third pressing part 430 and the first pressing part 410 are respectively located on both sides of the same tape 200, and the first pressing part 410 presses upstream of the tape lead, while the third pressing part 430 presses downstream of the tape lead, such that the first pressing part 410 presses one more layer of the tape 200 than the third pressing part 430 presses one more layer of the tape 200.

[0144] By setting two pressing sections on both sides of the first roller 110 to press different layers, the diameter variation of the tape 200 on the first roller 110 can be detected and controlled more comprehensively and accurately. Furthermore, the difference between the tape diameter measured by the third angle sensor 630 and the tape diameter measured by the first angle sensor 610 should be approximately the thickness of one layer of tape 200. When the difference exceeds a certain range, there is a possibility that the tape 200 thickness is substandard, or that the tape release is abnormal. In this case, the wafer grinding must be stopped. Then, the tape 200 is continuously fed for a certain distance until the difference between the tape diameter measured by the third angle sensor 630 and the tape diameter measured by the first angle sensor 610 is within a reasonable range. Only then can the wafer grinding be resumed to avoid damage caused by mismatched grinding forces.

[0145] In actual installation and debugging, the third swing member 330 is first accurately installed at a suitable position on one side of the first roller 110 to ensure it can swing flexibly. Then, the third pressure member 430 is securely installed on the third swing member 330 and its position is adjusted so that it can effectively press against the belt 200. Next, the third elastic member 530 is installed to provide the third pressure member 430 with a predetermined deflection force that elastically presses against the first roller 110. Finally, the third angle sensor 630 is connected to and calibrated with the third swing member 330.

[0146] The advantage of this design is that it can more accurately detect changes in the diameter and tension of the belt 200 on the first roller 110, especially when the thickness distribution of the belt 200 is uneven; on the other hand, it can also reliably monitor abnormalities in belt release.

[0147] For example, during substrate grinding, if the tape 200 accumulates or the tension is too high on one side of the first roller 110, the synergistic effect of the third pressing part 430 and the first pressing part 410 can detect it in time and make corresponding adjustments.

[0148] When the belt 200 is wound or unwound on the first roller 110, the belt diameter and tension change. The reaction force on the third pressure section 430 causes the third oscillating member 330 to oscillate, and the third angle sensor 630 measures the angle change of the third oscillating member 330. By combining the measurement data from the first pressure section 410 and the first angle sensor 610, the state of the belt 200 on the first roller 110 can be more comprehensively understood, thereby achieving more precise control.

[0149] By adding a third oscillating component 330 and other related components, the monitoring and control of the substrate grinding device for the transmission of the tape 200 is further improved, thereby enhancing the adaptability and reliability of the device under complex working conditions.

[0150] Example 5

[0151] Figure 8 is a schematic diagram of the fourth oscillating element structure in another embodiment of the present invention. As shown in Figure 8, in the substrate grinding apparatus of this embodiment, a fourth oscillating element 340 and a fourth angle sensor 640 can be added based on embodiment 4. The first oscillating element 310 and the second oscillating element 320 are both drivenly connected to the fourth oscillating element 340, for example, through gear transmission, and the gear is preferably a helical gear, which can better avoid measurement errors caused by gear backlash. The fourth angle sensor 640 is disposed on the fourth oscillating element 340 which is drivenly connected to the first oscillating element 310. Furthermore, the transmission ratio of the first oscillating element 310 to the fourth oscillating element 340 to which it is driven is 1:4-1:10, and the transmission ratio of the second oscillating element 320 to the fourth oscillating element 340 to which it is driven is 1:4-1:10.

[0152] By setting the transmission ratio, the small swing angles of the first swing member 310 and the second swing member 320 are amplified, thereby improving the accuracy and resolution of the angle sensor measurement and more accurately reflecting the changes in roll diameter.

[0153] During actual assembly and debugging, the fourth swing component 340 is first accurately connected to the first swing component 310 and the second swing component 320. Then, according to design requirements, the transmission ratio is adjusted to a range of 1:4 to 1:10. For example, if a transmission ratio of 1:5 is selected, when the first swing component 310 or the second swing component 320 swings by 1 degree, the corresponding fourth swing component 340 will swing by 5 degrees.

[0154] The advantage of this design is that it can significantly improve the accuracy of roll diameter detection. Even if the swing angles of the first swing member 310 and the second swing member 320 are small, they can still be accurately measured through transmission amplification. It can adjust the roll transmission parameters in a timely manner, ensuring the quality and stability of substrate grinding.

[0155] For example, during substrate grinding, minute changes in roll diameter can be quickly detected and adjusted accordingly through this transmission amplification mechanism, preventing the grinding effect from being affected by undetected roll diameter changes. This greatly enhances the detection sensitivity and control accuracy of the substrate grinding equipment for roll diameter changes, effectively improving product processing quality and production efficiency.

[0156] When the tape winding or unwinding on the first roller 110 or the second roller 120 causes a change in the tape diameter, the first oscillating member 310 or the second oscillating member 320 oscillates accordingly. Due to the transmission connection, the oscillation angle is transmitted to the fourth oscillating member 340 and amplified. The first angle measuring sensor 610 measures the amplified angle of the fourth oscillating member 340 and transmits the data to the control system to achieve precise control of the tape transmission.

[0157] By introducing a fourth swing element 340 and rationally setting the transmission ratio, the roll diameter detection and control performance of the substrate grinding device was further optimized, thereby improving the overall working efficiency and product quality of the device.

[0158] Example 6

[0159] Referring to Figure 9, this substrate polishing apparatus includes a first roller 110 for releasing the tape 200 and a second roller 120 for winding the tape 200. Both the first pressing part 410 and the second pressing part 420 are rollers 401, rotatably mounted on the first oscillating member 310. The first pressing part 410 is also slidably mounted relative to the first oscillating member 310, with the sliding direction parallel to the length direction of the first oscillating member 310. The first pressing part 410 and the second pressing part 420 are also slidably mounted on the base plate 7 along a horizontal plane. The axle of the first pressing part 410 and the rotation axis of the first roller 110 are located in the same horizontal plane, as are the axles of the second pressing part 420 and the rotation axes of the second roller 120. The rotating shafts of the first roller 110, the second roller 120, and the swing shaft of the first swing member 310 are coplanar in the vertical plane. The rotating shafts of the first roller 110 and the second roller 120 are fixed, while the swing shaft of the first swing member 310 is slidable in the vertical direction. This structure is simpler and makes the calculation of the roll diameter more concise.

[0160] The elastic element 500 acts on the first oscillating element 310, causing the first pressing part 410 to elastically press against the circumferential surface of the winding 200 on the first roller 110, and the second pressing part 420 to elastically press against the circumferential surface of the winding 200 on the second roller 120. The oscillation angle of the first oscillating element 310 is measured by the first angle sensor 610, thereby calculating the winding diameter of the winding 200 on the first roller 110 and the second roller 120. The elastic element 500 can be a spring, selected and installed according to the required pressure and elastic coefficient.

[0161] During operation, the roll diameter continuously changes as the roll 200 is released from the first roller 110 and wound up on the second roller 120. When the roll diameter increases, the first oscillating member 310 swings outward under the action of the elastic member 500, and the first angle measuring sensor 610 measures the increase in the swing angle; when the roll diameter decreases, the first oscillating member 310 swings inward, and the first angle measuring sensor 610 measures the decrease in the swing angle.

[0162] By calculation, based solely on the swing angle of the first swing member 310 measured by the first angle sensor 610, the sum of the diameters of the winding belt 200 on the first roller 110 and the second roller 120 can be obtained. This sum of diameters provides data support for the release of the winding belt, satisfying the specific control of the release speed of the winding belt 200. Specifically, if the sum of diameters gradually increases, it indicates that the sum of diameters remains constant or changes very little at the beginning of the release phase; otherwise, it indicates the intermediate phase. The formula for calculating the sum of diameters is also very simple, and the measurement of the sum of the diameters of the winding belt 200 on the first roller 110 and the second roller 120 can be achieved using only the first angle sensor 610.

[0163] Referring to Figure 10, which illustrates the calculation principle for the sum of the winding diameters of the tape 200 on the first roller 110 and the second roller 120 in this embodiment, r is the radius of the first pressing part 410 and the second pressing part 420, R1 is the radius of the tape 200 on the first roller 110, R2 is the radius of the tape 200 on the second roller 120, α is the tilt angle of the first oscillating member 310 measured by the first angle measuring sensor 610, and d is the distance between the rotation axis of the first roller 110 and the rotation axis of the second roller 120. Therefore, the sum of the winding diameters of the tape 200 on the first roller 110 and the second roller 120 can be calculated as R1 + R2 = d·cotα - 2r.

[0164] Example 7

[0165] Referring to Figure 11, it illustrates the principle of calculating the roll diameter when the swing axis of the swinging member and the rotation axis of the roller are coplanar in a vertical plane in another embodiment of the present invention. According to this embodiment, the roll diameter of the tape 200 is measured during the grinding of the substrate 12, and the release and / or winding torque is adjusted according to the roll diameter. Specifically, taking the roller 401 as an example, the following steps are used to measure the roll diameter of the tape 200 and adjust the release and / or winding torque according to the roll diameter during the grinding of the substrate 12.

[0166] Measurement procedure: Press the roller 401 at the end of the swing member 300 onto the winding belt 200 of the roller 100. Ensure that the rotation axes of the roller 100 and the roller 401 are both, for example, set in the horizontal direction; measure and record the radius r of the roller 401 (e.g., 5 cm), the distance l between the swing axis of the swing member 300 and the rotation axis of the roller 401 (e.g., 30 cm), and the distance d between the swing axis of the swing member 300 and the rotation axis of the roller 100 in the vertical plane (e.g., 20 cm), as shown in Figure 9.

[0167] Steps for measuring the included angle: Measure the included angle α between the oscillating component 300 and the horizontal plane (for example, 30 degrees).

[0168] Steps for calculating roll diameter: Substitute the measured data into the formula (R+r)2=l2+d2-2·l·d·s inα for calculation.

[0169] That is: (R+5)² = 30² + 20² - 2 × 30 × 20 × s in30°

[0170] (R+5)² = 900 + 400 - 600

[0171] (R+5)² = 700

[0172] R+5=√700

[0173] R = √700 - 5 ≈ 22.6 cm.

[0174] The above calculations show that the diameter R of the tape 200 at the point of contact with the roller 401 is approximately 22.6 cm.

[0175] In the actual substrate polishing process, the above measurement steps are repeated in real time to continuously acquire data on the change in roll diameter. Based on the change in roll diameter, the release and rewind torques are adjusted in a timely manner to ensure the stability of the roll transport and the consistency of substrate polishing.

[0176] The advantages of this grinding method are: it can measure the roll diameter of the tape in real time and accurately, providing reliable data support for precise control of the tape transport during substrate grinding. By adjusting the torque in a timely manner, it effectively avoids problems such as unstable tape tension and uneven substrate grinding caused by changes in roll diameter.

[0177] During substrate grinding, roller 401 contacts the tape 200, and the angle of the oscillating component 300 changes with the tape diameter. The real-time tape diameter is obtained by measuring the angle and calculating using a fixed-length parameter. The release and rewind torques are adjusted based on the tape diameter to achieve precise control of tape transport, thereby ensuring the effectiveness of substrate grinding.

[0178] Example 8

[0179] Referring to Figure 12, it shows the principle diagram for calculating the roll diameter when the swing axis of the swing member and the rotation axis of the roller are not coplanar in the vertical plane in another embodiment of the present invention. The difference between this embodiment and embodiment 6 is that the swing axis of the swing member 300 and the rotation axis of the roller 100 are not coplanar in the vertical plane, and the distance between them is d in the vertical plane and e in the horizontal plane.

[0180] When grinding the substrate 12, the following steps are performed to measure the roll diameter of the tape 200 and adjust the release and / or winding torque according to the roll diameter.

[0181] Measurement procedure: Press the roller 401 at the end of the swing member 300 onto the winding belt 200 of the roller 100. Ensure that the rotation axes of the roller 100 and the roller 401 are both, for example, horizontally; measure and record the radius r of the roller 401 (e.g., 5 cm), and the distance l (e.g., 30 cm) between the swing axis of the swing member 300 and the rotation axis of the roller 401. The swing axis of the swing member 300 and the rotation axis of the roller 100 are not coplanar in the vertical plane, and the distance between them is a vertical distance d (e.g., 20 cm) in the vertical plane and a horizontal distance e (e.g., 10 cm) in the horizontal plane, as shown in Figure 10.

[0182] Steps for measuring the included angle: Measure the included angle α between the oscillating component 300 and the horizontal plane (for example, 60 degrees).

[0183] Steps for calculating roll diameter:

[0184] Scenario 1:

[0185] When the entire oscillating component is on one side of the vertical symmetry plane of the roller, the measured data is substituted into the formula (R+r)2=(l+e·secα)2+(d+e·cotα)2-2(l+e·secα)(d+e·cotα)s inα for calculation.

[0186] That is: (R+5)2=(30+10×sec60°)2+(20+10×cot60°)2-2×(30+10×sec60°)×(20+10×cot60°)×s in60°.

[0187] Scenario 2:

[0188] When the two ends of the swinging component, namely the roller end and the hinge end, are on both sides of the vertical symmetry plane of the roller, the measured data are substituted into the formula (R+r)2=(le·secα)2+(de·cotα)2-2(le·secα)(de·cotα)s inα for calculation.

[0189] That is: (R+5)2=(30-10×sec60°)2+(20-10×cot60°)2-2×(30-10×sec60°)×(20-10×cot60°)×s in60°.

[0190] The above calculations yield the value of the roll diameter R at the point where the roll 200 contacts the roller 401.

[0191] In the actual substrate polishing process, the above measurement steps are repeated in real time to continuously acquire data on the change in roll diameter. Based on the change in roll diameter, the release and rewind torques are adjusted in a timely manner to ensure the stability of the roll transport and the consistency of substrate polishing.

[0192] The advantage of this grinding method is that it can adapt to situations where the rotating shafts of the oscillating component 300 and the roller 100 are not coplanar in the vertical plane, and the roll diameter can still be accurately measured, providing a precise control basis for more complex roll transport situations during substrate grinding.

[0193] During substrate grinding, roller 401 contacts the tape 200, and the angle of the oscillating member 300 changes with the tape diameter. The real-time tape diameter is calculated by measuring the angle and combining it with the projected distance of a fixed-length parameter under non-coplanar conditions. The release and rewind torques are adjusted based on the tape diameter to achieve precise control of tape transport, thereby ensuring the effectiveness of substrate grinding.

[0194] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A substrate polishing apparatus, characterized in that, include: A first roller (110) is wound with a grinding belt (200); a second roller (120) is used to wind up the belt (200); a first oscillating member (310) is oscillatingly disposed on one side of the first roller (110); a first pressing part (410) is disposed on the first oscillating member (310) and is used to adaptively press on the circumferential surface of the belt (200) on the first roller (110); a first angle sensor (610) is used to measure the oscillation angle of the first oscillating member (310); and a second pressing part (420) is also included. The first pressing part (410) and the second pressing part (420) are both rollers (401) and are rotatably disposed on the first oscillating member (310). The first pressing part (410) is also slidably disposed relative to the first oscillating member (310) with the sliding direction parallel to the length direction of the first oscillating member (310). The oscillation axis of the first oscillating member (310) is slidably disposed in the vertical direction.

2. The substrate polishing apparatus according to claim 1, characterized in that, Also includes: A base plate (7) is disposed between the first roller (110) and the second roller (120), and the first swing member (310) is swingably disposed on the base plate (7); a driven roller (8) is disposed on the base plate (7) for guiding the tape (200); a guide roller (9) is disposed on the base plate (7) for guiding the tape (200); and a tape breakage sensor (10) is disposed between the driven roller (8) and the guide roller (9) for detecting the tape (200) between the driven roller (8) and the guide roller (9).

3. The substrate polishing apparatus according to claim 2, characterized in that, It also includes a first elastic element (510) that acts on the first swinging element (310) so that the first pressing part (410) elastically presses against the circumferential surface of the tape (200).

4. The substrate polishing apparatus according to claim 3, characterized in that, A third oscillating member (330) is oscillatingly disposed on one side of the first roller (110); a third pressing part (430) is disposed on the third oscillating member (330) for adaptively pressing on the circumferential surface of the winding tape (200) on the first roller (110), the third pressing part (430) and the first pressing part (410) are respectively located upstream and downstream of the lead wire of the winding tape (200), such that the first pressing part (410) presses on the winding tape (200) by one more layer than the third pressing part (430) presses on the winding tape (200); a third elastic member (530) acts on the third oscillating member (330), such that the third pressing part (430) elastically presses against the circumferential surface of the winding tape (200) of the first roller (110); a third angle sensor (630) is used to measure the oscillation angle of the third oscillating member (330).

5. The substrate polishing apparatus according to claim 4, characterized in that, It also includes a fourth swing member (340) and a fourth angle sensor (640). The first swing member (310) is drivenly connected to the fourth swing member (340). The fourth swing member (340) is provided with the fourth angle sensor (640). The transmission ratio of the first swing member (310) to the fourth swing member (340) which is drivenly connected to it is 1:4 to 1:10.

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