Vacuum system of winding type coating machine and vacuumizing method of vacuum system

Abstract

The invention belongs to the technical field of film plating machines, and particularly relates to a vacuum system of a winding type film plating machine and a vacuumizing method thereof.The vacuum system of the winding type film plating machine comprises a winding chamber used for film winding, an evaporation chamber used for film plating, a first pump set connected with the evaporation chamber and a second pump set connected with the winding chamber; the first pump set comprises a diffusion pump connected with the evaporation chamber and a plurality of first mechanical pumps connected in series, the second pump set comprises a plurality of second mechanical pumps and is provided with a connecting pipeline, and the two ends of the connecting pipeline are connected between the second pump set and the winding chamber and between the diffusion pump and the first mechanical pumps respectively. Wherein after the winding type coating machine is closed, the connecting pipeline is opened, and the plurality of first mechanical pumps are closed; by arranging the connecting pipeline between the first pump set and the second pump set, after the cabin is closed, the connecting pipeline can be opened, the diffusion pump of the first pump set is connected with the second mechanical pumps in series, then the first mechanical pumps are closed, energy consumption is effectively reduced, and the energy-saving and environment-friendly requirements are met.

Description

Technical Field

[0001] The present invention belongs to the technical field of coating machines, and in particular relates to a vacuum system of a roll-to-roll coating machine and a vacuum pumping method thereof. Background Art

[0002] The roll-to-roll coating machine is an important equipment in the thin film preparation process, which mainly includes a winding chamber and an evaporation chamber (also called a coating chamber). In the process of thin film preparation, it is usually necessary to evacuate the winding chamber and the evaporation chamber, and the vacuum requirements in the winding chamber and the evaporation chamber are different. The evaporation chamber usually requires a higher vacuum degree. Therefore, a diffusion pump is usually required as a pre-stage pump for vacuuming the evaporation chamber.

[0003] The vacuum system of a traditional roll-to-roll coating machine usually uses two sets of vacuum pumps to evacuate the winding chamber and the evaporation chamber respectively, which consumes a lot of energy. In addition, as the equipment ages, the vacuum system becomes polluted, and the working efficiency of the pump group decreases, the pumping speed often slows down. In order to ensure the pumping speed, the capacity of the pump group is usually set larger. Although the pumping speed problem is solved, it brings about greater energy waste, which does not meet the needs of energy conservation and environmental protection. Therefore, the original vacuum system needs to be improved. Summary of the invention

[0004] The purpose of the present invention is to provide a vacuum system and a vacuum pumping method for a roll-to-roll coating machine in order to solve the above-mentioned technical problems, so as to achieve the effect of saving energy and meet the requirements of energy saving and environmental protection.

[0005] In view of this, the present invention provides a vacuum system of a roll-to-roll coating machine, comprising:

[0006] A winding chamber for winding the film;

[0007] The evaporation chamber is installed on the side of the winding chamber and is used for coating the film;

[0008] A first pump group includes a diffusion pump connected to the evaporation chamber and a plurality of first mechanical pumps connected in series with the diffusion pump;

[0009] A second pump group includes a plurality of second mechanical pumps connected to the winding chamber;

[0010] A connecting pipeline, the two ends of which are respectively connected between the second pump group and the winding chamber and between the diffusion pump and the first mechanical pump;

[0011] Among them, when the winding type coating machine is closed, the connecting pipeline is opened and the multiple first mechanical pumps are closed.

[0012] In the above technical solution, further, it also includes:

[0013] Two filtering mechanisms are provided and are respectively installed between the first pump group and the evaporation chamber and between the second pump group and the winding chamber;

[0014] Wherein, the filtering mechanism includes a plurality of filtering units arranged in parallel.

[0015] In the above technical solution, further, the filtering unit includes:

[0016] A connecting cylinder, both ends of which are provided with flange connection ends, and a main flow channel and a cleaning channel are formed inside, and an air inlet side and an air outlet side are formed at both ends;

[0017] The filter screen is installed obliquely on the main flow channel in the connecting cylinder;

[0018] The dust collecting box is installed on the side of the connecting tube and is connected with the cleaning channel.

[0019] In the above technical solution, further, the ash collecting box includes:

[0020] The box body is detachably mounted on the side of the connecting tube, and the inner wall of the connecting tube is provided with a through hole communicating with the interior of the box body;

[0021] A special-shaped frame is installed on the inner wall of the through hole;

[0022] The filter cartridge is installed in the box body and cooperates with the special-shaped frame to divide the inside of the box body into an ash collecting chamber and a return chamber, and the ash collecting chamber and the return chamber are connected through the filter cartridge;

[0023] The ash collecting chamber is communicated with the cleaning channel, and the reflux chamber is communicated with the mainstream channel on the gas outlet side.

[0024] In the above technical solution, further, the special-shaped frame includes:

[0025] The annular portion is mounted on the inner wall of the through hole and has an air port connected to the reflux cavity and a main flow channel located at the rear side of the filter screen along the air flow direction;

[0026] The U-shaped portion is mounted on the annular portion and is used to block the cleaning channel and the main flow channel on the gas outlet side.

[0027] In the above technical solution, further, it also includes:

[0028] A connecting platform, arranged on the inner wall of the connecting cylinder;

[0029] The flange end is connected to the box body and is detachably connected to the connecting platform;

[0030] The sealing gasket is installed between the flange end and the connecting platform and is used for sealing the connection between the two.

[0031] In the above technical solution, further, the filtering unit also includes:

[0032] An installation cylinder is installed on the inner wall of the connecting cylinder and is used for installing the filter screen;

[0033] A plurality of guide plates are arranged at equal intervals, and both ends of the guide plates are respectively connected to the inner wall of the mounting tube;

[0034] A plurality of reinforcing plates are arranged at equal intervals and are vertically arranged to the guide plates, and form a grid structure with the plurality of guide plates.

[0035] In the above technical solution, further:

[0036] The guide plate is arranged at an angle of α to the air flow direction on the air inlet side, and at an angle of β to the inclination direction of the filter screen.

[0037] In the above technical solution, further:

[0038] The angle α is greater than 90°, and the angle β is less than 90°.

[0039] The present invention provides a vacuum pumping method for a vacuum system of a roll-to-roll coating machine, comprising the following steps:

[0040] S1: The equipment is started, the connecting pipe is in a closed state, and the evaporation chamber and the winding chamber are evacuated by the first pump group and the second pump group respectively;

[0041] S2: After the evaporation chamber is closed, the connecting pipeline is opened and the plurality of first mechanical pumps are turned off.

[0042] The beneficial effects of the present invention are:

[0043] 1. By setting a connecting pipe between the first pump group and the second pump group, the connecting pipe can be opened after the winding coating machine is closed, so that the diffusion pump of the first pump group and the multiple second mechanical pumps can be connected in series, so that the multiple first mechanical pumps can be turned off, which effectively saves energy consumption and meets the needs of energy conservation and environmental protection.

[0044] 2. By setting up the filtering mechanism, when the first pump group and the second pump group are vacuuming, it can effectively prevent possible dust from entering the pump group, thereby polluting the pump group, effectively extending the service life and ensuring the use of the vacuum system.

[0045] 3. By setting up the mainstream channel and the cleaning channel in the filter mechanism, it can be cleaned synchronously while filtering, further extending the service life and ensuring production efficiency. In addition, the multiple filter units arranged in parallel can not only avoid excessive increase in airflow resistance, but also can be manually cleaned and dredged in time when a filter unit is blocked to ensure that the vacuum degree is maintained. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1It is a schematic diagram of the structure of the present invention;

[0047] Figure 2 is a schematic diagram of the internal structure of the filter unit of the present invention;

[0048] Figure 3 The present invention Figure 2 The enlarged view of point A in the middle;

[0049] Figure 4 is a cross-sectional view of a filter unit of the present invention;

[0050] Figure 5 The present invention Figure 4 The enlarged view of point B in the middle;

[0051] The markings in the figure are as follows: 1. winding chamber; 2. evaporation chamber; 3. first pump group; 30. diffusion pump; 31. first mechanical pump; 4. second pump group; 40. second mechanical pump; 5. connecting pipe; 6. filter unit; 60. connecting cylinder; 600. through hole; 61. mainstream channel; 62. cleaning channel; 63. filter screen; 64. ash collecting box; 640. box body; 641. special-shaped frame; 6410. annular part; 6411. air outlet; 6412. U-shaped part; 642. filter cylinder; 643. ash collecting chamber; 644. reflux chamber; 645. connecting platform; 646. flange end; 647. sealing gasket; 65. air inlet side; 66. air outlet side; 67. mounting cylinder; 68. guide plate; 69. reinforcing plate; 7. valve. DETAILED DESCRIPTION

[0052] The following will be combined with the drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application belong to the scope of protection of this application.

[0053] Embodiment 1:

[0054] This embodiment provides a vacuum system of a roll-to-roll coating machine, comprising:

[0055] Winding chamber 1, used for winding the film;

[0056] The evaporation chamber 2 is installed on the side of the winding chamber 1 and is used for coating the thin film;

[0057] A first pump group 3, including a diffusion pump 30 connected to the evaporation chamber 2 and a plurality of first mechanical pumps 31 connected in series with the diffusion pump 30;

[0058] A second pump group 4, comprising a plurality of second mechanical pumps 40 connected to the winding chamber 1;

[0059] A connecting pipe 5, the two ends of which are respectively connected between the second pump group 4 and the winding chamber 1 and between the diffusion pump 30 and the first mechanical pump 31;

[0060] When the roll-to-roll coating machine is closed, the connecting pipe 5 is opened and the first mechanical pumps 31 are closed;

[0061] Meanwhile, the winding chamber 1 and the evaporation chamber 2 and other devices of the vacuum system (such as the switch valve 7, the power supply, the control device, etc.) are all conventional devices of the roll-to-roll coating machine, and the specific structures thereof can be obtained by those skilled in the art according to conventional roll-to-roll coating machines, and will not be described in detail herein;

[0062] The first pump group is also connected in parallel with a standby pump, which can be a multi-stage centrifugal pump. The first mechanical pump 31 and the second mechanical pump 40 can be connected in series with one or more combinations of Roots vacuum pumps and sliding valve vacuum pumps. The specific structure is the prior art and will not be described here.

[0063] The connecting pipe 5 is provided with a switch valve 7 for controlling its opening and closing.

[0064] It can be seen from the present embodiment that by providing a connecting pipe 5 between the first pump group 3 and the second pump group 4, the connecting pipe 5 can be opened after the winding coating machine is closed, so that the diffusion pump 30 of the first pump group 3 and the plurality of second mechanical pumps 40 can be connected in series, thereby the plurality of first mechanical pumps 31 can be shut down, effectively saving energy consumption and meeting the requirements of energy conservation and environmental protection.

[0065] Embodiment 2:

[0066] This embodiment provides a vacuum system of a roll-to-roll coating machine, which, in addition to the technical solutions of the above embodiments, also has the following technical features, including:

[0067] Two filtering mechanisms are provided and are installed respectively between the first pump group 3 and the evaporation chamber 2 and between the second pump group 4 and the winding chamber 1;

[0068] The filtering mechanism includes a plurality of filtering units 6 arranged in parallel, and a valve 7 is arranged before and after each filtering unit 6;

[0069] Meanwhile, the valve 7 can be automatic or manual, and its specific structure is prior art and will not be described in detail here.

[0070] It can be seen from this embodiment that, by setting the filtering mechanism, when the first pump group 3 and the second pump group 4 are vacuuming, it is possible to effectively prevent the dust that may exist from entering the pump group, thereby polluting the pump group, effectively extending the service life, and ensuring the use of the vacuum system;

[0071] The filtering mechanism includes a plurality of filtering units 6 arranged in parallel, which can not only avoid excessive increase of airflow resistance, but also enable timely manual cleaning, dredging and repair when a filtering unit 6 is blocked or fails, thereby ensuring maintenance of vacuum degree.

[0072] Embodiment 3:

[0073] This embodiment provides a vacuum system of a roll-to-roll coating machine, which, in addition to the technical solutions of the above embodiments, also has the following technical features: the filter unit 6 includes:

[0074] The connecting tube 60 has flange connection ends at both ends, and a main flow channel 61 and a cleaning channel 62 are formed inside, and an air inlet side 65 and an air outlet side 66 are formed at both ends;

[0075] The filter screen 63 is obliquely mounted on the main flow channel 61 in the connecting tube 60;

[0076] The dust collecting box 64 is installed on the side of the connecting tube 60 and is connected to the cleaning channel 62.

[0077] It can be seen from this embodiment that by setting the main flow channel 61 and the cleaning channel 62 in the filter mechanism, cleaning can be performed simultaneously with filtering, further extending the service life and ensuring production efficiency;

[0078] The inclined filter 63 can ensure a larger air intake area and reduce air intake losses, and the dust box 64 is convenient for collecting dust, thereby improving the convenience of cleaning.

[0079] Embodiment 4:

[0080] This embodiment provides a vacuum system of a roll-to-roll coating machine, which, in addition to the technical solutions of the above embodiments, also has the following technical features. The dust collecting box 64 includes:

[0081] The box body 640 is detachably mounted on the side of the connecting tube 60, and the inner wall of the connecting tube 60 is provided with a through hole 600 communicating with the interior of the box body 640;

[0082] A special-shaped frame 641 is installed on the inner wall of the through hole 600;

[0083] The filter cartridge 642 is installed in the box body 640 and cooperates with the special-shaped frame 641 to divide the interior of the box body 640 into an ash collecting chamber 643 and a reflux chamber 644, and the ash collecting chamber 643 and the reflux chamber 644 are connected through the filter cartridge 642;

[0084] The ash collecting chamber 643 is connected to the cleaning channel 62, and the reflux chamber 644 is connected to the main flow channel 61 of the gas outlet side 66;

[0085] At the same time, the filter cartridge 642 can be made of metal, and a proper amount of water can be placed at the bottom of the box body 640 to facilitate dust falling into the water.

[0086] It can be seen from this embodiment that the special-shaped frame 641 is used to guide the airflow through the main flow channel 61 of the air inlet side 65 into the dust collecting chamber 643 of the filter cartridge 642, and then enter the return chamber 644 through the filter cartridge 642, and then enter the main flow channel 61 of the air outlet side 66, so as to facilitate the control of the airflow flow channel, and the airflow carrying dust can be blocked and then guided back to the main flow channel 61, thereby reducing the airflow loss;

[0087] The use of the filter cartridge 642 can ensure a larger filtering area, and the appropriate amount of water at the bottom of the box body 640 can prevent dust from falling into the water, thereby ensuring air flow.

[0088] Embodiment 5:

[0089] This embodiment provides a vacuum system of a roll-to-roll coating machine, which, in addition to the technical solutions of the above embodiments, also has the following technical features. The special-shaped frame 641 includes:

[0090] The annular portion 6410 is mounted on the inner wall of the through hole 600 and has an air port 6411 connected to the reflux chamber 644 and the main flow channel 61 located at the rear side of the filter screen 63 along the air flow direction;

[0091] The U-shaped portion 6412 is mounted on the annular portion 6410 and is used to block the cleaning channel 62 and the main flow channel 61 on the gas outlet side 66;

[0092] The annular portion 6410 and the inner wall of the through hole 600 and the annular portion 6410 and the U-shaped portion 6412 may be welded.

[0093] It can be seen from this embodiment that by setting the special-shaped frame 641 into the annular portion 6410 and the U-shaped portion 6412, the structure is simple, which makes it easy to block the dust from the airflow in the cleaning channel 62 and guide it back to the mainstream channel 61. At the same time, the connection is welded to effectively ensure the structural strength.

[0094] Embodiment 6:

[0095] This embodiment provides a vacuum system of a roll-to-roll coating machine, which, in addition to the technical solutions of the above embodiments, also has the following technical features, including:

[0096] A connecting platform 645 is provided on the inner wall of the connecting tube 60;

[0097] The flange end 646 is connected to the box body 640 and is detachably connected to the connecting platform 645;

[0098] The sealing gasket 647 is installed between the flange end 646 and the connecting platform 645 and is used for sealing connection between the two.

[0099] It can be seen from the present embodiment that the provision of the connecting platform 645 and the flange end 646 facilitates the convenience of the detachable connection between the box body 640 and the connecting tube 60, and the provision of the sealing gasket 647 can improve the sealing performance between the box body 640 and the connecting tube 60 after installation, thereby avoiding air leakage and affecting the air extraction effect and efficiency.

[0100] Embodiment 7:

[0101] This embodiment provides a vacuum system of a roll-to-roll coating machine, which, in addition to the technical solutions of the above embodiments, also has the following technical features, and the filter unit 6 also includes:

[0102] The installation cylinder 67 is installed on the inner wall of the connecting cylinder 60 and is used for installing the filter screen 63;

[0103] A plurality of guide plates 68 are arranged at equal intervals, and both ends are connected to the inner wall of the mounting tube 67 respectively;

[0104] A plurality of reinforcing plates 69 are arranged at equal intervals and are arranged perpendicular to the guide plates 68 to form a grid structure with the plurality of guide plates 68;

[0105] Among them, welding can be used between the mounting cylinder 67 and the inner wall of the connecting cylinder 60, and plug-in can be used between the guide plate 68 and the reinforcing plate 69, and welding can be used between the guide plate 68 and the inner wall of the mounting cylinder 67, and the filter screen 63 can be bonded and connected to the intersection of the guide plate 68 and the reinforcing plate 69.

[0106] It can be seen from this embodiment that by providing the installation cylinder 67, it is convenient to assemble the guide plate 68, the reinforcement plate 69 and the filter 63, and to install them into the connecting cylinder 60, and the guide plate 68 can make the dust carried in the air flow collide and block, promote the interception of dust, and reduce the impact of dust on the filter 63, thereby reducing the adhesion of dust on the filter 63;

[0107] The reinforcing plate 69 can improve the structural strength, and the intersection with the guide plate 68 can provide more connection points for the filter screen 63, that is, ensure the structural stability of the installation of the filter screen 63.

[0108] Embodiment 8:

[0109] This embodiment provides a vacuum system of a roll-to-roll coating machine, which, in addition to the technical solutions of the above embodiments, also has the following technical features:

[0110] The guide plate 68 is arranged at an angle α to the air flow direction of the air inlet side 65 and at an angle β to the inclination direction of the filter screen 63;

[0111] The angle α is greater than 90°, and the angle β is less than 90°.

[0112] It can be seen from the present embodiment that by setting the guide plate 68 at an angle α with the airflow on the air intake side 65 and at an angle β with the inclination direction of the filter 63, the airflow on the air intake side 65 is prevented from vertically impacting the filter 63, thereby extending the service life of the filter 63. Specifically, the angle α is greater than 90°, and the angle β is less than 90°, so that the flow direction of the airflow on the air intake side 65 through the filter 63 is greatly changed, thereby effectively preventing the loss of intake kinetic energy and ensuring the air extraction efficiency.

[0113] Embodiment 9:

[0114] This embodiment provides a method for evacuating a vacuum system of a roll-to-roll coating machine, comprising the following steps:

[0115] S1: The equipment is started, the connecting pipe 5 is in a closed state, and the evaporation chamber 2 and the winding chamber 1 are evacuated by the first pump group 3 and the second pump group 4 respectively;

[0116] S2: After the roll-to-roll coating machine is closed, the connecting pipe 5 is opened and the plurality of first mechanical pumps 31 are closed.

[0117] It can be seen from the present embodiment that by adopting the above-mentioned vacuuming method, two groups of pump groups are used to vacuum the winding chamber 1 and the evaporation chamber 2 respectively at the beginning, which effectively ensures the vacuuming efficiency and reaches the appropriate vacuum degree more quickly. Then, after the cabins are closed, the connecting pipe 5 is opened to connect the diffusion pump 30 and the second pump group 4 in series, and then the multiple first mechanical pumps 31 in the first pump group 3 are turned off, which can save energy and meet the needs of energy saving and environmental protection.

[0118] The embodiments of the present application are described above in conjunction with the accompanying drawings. In the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A vacuum system for a roll-to-roll coating machine, characterized in that: include: A winding chamber (1) for winding a film; A vapor deposition chamber (2), installed on the side of the winding chamber (1) and used for coating the thin film; A first pump group (3), comprising a diffusion pump (30) connected to the evaporation chamber (2) and a plurality of first mechanical pumps (31) connected in series with the diffusion pump (30); A second pump group (4) comprising a plurality of second mechanical pumps (40) connected to the winding chamber (1); A connecting pipe (5) having two ends respectively connected between the second pump group (4) and the winding chamber (1) and between the diffusion pump (30) and the first mechanical pump (31); When the roll-to-roll coating machine is closed, the connecting pipe (5) is opened and the plurality of first mechanical pumps (31) are closed.

2. The vacuum system of the roll-to-roll coating machine according to claim 1, characterized in that: Also includes: Two filtering mechanisms are provided and are respectively installed between the first pump group (3) and the evaporation chamber (2) and between the second pump group (4) and the winding chamber (1); The filtering mechanism comprises a plurality of filtering units (6) arranged in parallel, and a valve (7) is arranged before and after each filtering unit (6).

3. The vacuum system of the roll-to-roll coating machine according to claim 2, characterized in that: The filtering unit (6) comprises: A connecting cylinder (60) is provided with flange connection ends at both ends, a main flow channel (61) and a cleaning channel (62) are formed inside, and an air inlet side (65) and an air outlet side (66) are formed at both ends; A filter screen (63) is obliquely mounted on the main flow channel (61) in the connecting cylinder (60); The dust collecting box (64) is installed on the side of the connecting tube (60) and is communicated with the cleaning channel (62).

4. The vacuum system of the roll-to-roll coating machine according to claim 3, characterized in that: The ash collecting box (64) comprises: The box body (640) is detachably mounted on the side of the connecting tube (60), and the inner wall of the connecting tube (60) is provided with a through hole (600) communicating with the interior of the box body (640); A special-shaped frame (641) is installed on the inner wall of the through hole (600); The filter cartridge (642) is installed in the box body (640) and cooperates with the special-shaped frame (641) to divide the interior of the box body (640) into an ash collecting chamber (643) and a return chamber (644), and the ash collecting chamber (643) and the return chamber (644) are connected through the filter cartridge (642); The ash collecting chamber (643) is in communication with the cleaning channel (62), and the reflux chamber (644) is in communication with the main flow channel (61) on the gas outlet side (66).

5. The vacuum system of the roll-to-roll coating machine according to claim 4, characterized in that: The special-shaped frame (641) comprises: The annular portion (6410) is mounted on the inner wall of the through hole (600) and is provided with an air outlet (6411) communicating with the reflux chamber (644) and the main flow channel (61) located at the rear side of the filter screen (63) along the air flow direction; The U-shaped portion (6412) is mounted on the annular portion (6410) and is used to block the cleaning channel (62) and the main flow channel (61) on the air outlet side (66).

6. The vacuum system of the roll-to-roll coating machine according to claim 4, characterized in that: Also includes: A connecting platform (645) is arranged on the inner wall of the connecting cylinder (60); The flange end (646) is connected to the box body (640) and is detachably connected to the connecting platform (645); The sealing gasket (647) is installed between the flange end (646) and the connecting platform (645) and is used for sealing connection between the two.

7. The vacuum system of the roll-to-roll coating machine according to claim 3, characterized in that: The filtering unit (6) further comprises: A mounting cylinder (67) mounted on the inner wall of the connecting cylinder (60) and used for mounting the filter screen (63); A plurality of guide plates (68) are arranged at equal intervals, and both ends of the guide plates are respectively connected to the inner wall of the mounting tube (67); A plurality of reinforcing plates (69) are arranged at equal intervals and are arranged perpendicular to the guide plates (68), and form a grid structure with the plurality of guide plates (68).

8. The vacuum system of the roll-to-roll coating machine according to claim 7, characterized in that: The guide plate (68) is arranged at an angle α with the air flow direction of the air inlet side (65), and at an angle β with the inclination direction of the filter screen (63).

9. The vacuum system of the roll-to-roll coating machine according to claim 8, characterized in that: The angle α is greater than 90°, and the angle β is less than 90°.

10. A vacuum pumping method for a vacuum system of a roll-to-roll coating machine as claimed in claim 1, characterized in that: The following steps are involved: S1: the equipment is started, the connecting pipe (5) is in a closed state, and the evaporation chamber (2) and the winding chamber (1) are evacuated respectively by the first pump group (3) and the second pump group (4); S2: After the roll-to-roll coating machine is closed, the connecting pipeline (5) is opened and the plurality of first mechanical pumps (31) are turned off.

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