A molecular pump

Abstract

This application discloses a molecular pump, comprising: a housing assembly, a base having an outlet, and a housing fastened to the base and having an inlet; a turbine assembly rotatably disposed between the base and the housing, including a blade portion, an extension coaxially connected to the blade portion, a bent portion connected to the intersection of the blade portion and the extension portion, and an annular space formed between the bent portion and the extension portion; a traction cylinder assembly, including a first traction cylinder coaxially disposed on the base and partially inserted into the annular space of the turbine assembly; and a meandering channel, which sequentially includes a pumping section communicating with the inlet, a first compression section, a second compression section, a third compression section, and a fourth compression section communicating with the outlet. This molecular pump can improve its compression ratio and pumping performance with almost no increase in volume, thereby meeting the requirements of molecular pumps in high-end application scenarios.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of vacuum equipment. More specifically, the present invention relates to a molecular pump. Background Technology

[0002] Molecular pumps, as a core component of modern vacuum technology, are widely used in the creation and maintenance of high vacuum environments, playing an indispensable role in scientific research and industrial production. Their superior performance, particularly their high compression ratio and low backflow characteristics, is crucial for maintaining and creating extreme vacuum environments.

[0003] Existing molecular pumps mainly consist of a casing assembly, a motor, and a turbine assembly. The casing assembly includes a base with an outlet and a housing attached to the base with an inlet. The turbine assembly is rotatably disposed between the base and the housing and has blades fixed to the motor shaft. During operation, the motor drives the turbine blades to rotate at high speed within the housing, effectively cutting and compressing the gas molecules flowing into the pump from the inlet. These compressed gas molecules are guided in an orderly manner to the outlet within the pump. In this process, the driving force of the turbine assembly and the guiding effect of the housing wall together ensure that the gas molecules are efficiently and orderly discharged from the pump.

[0004] However, in scientific research and industrial production, the requirements for vacuum environments are becoming increasingly stringent, and existing molecular pumps are struggling to fully meet the demands for extremely high vacuum levels in these fields. Furthermore, particularly in applications such as semiconductor manufacturing and laboratories, there are strict limitations on the size of molecular pumps. Therefore, there is an urgent need to improve existing molecular pumps to meet the requirements of high-end applications. Summary of the Invention

[0005] In order to solve one or more of the technical problems mentioned above, the present invention provides a molecular pump, the purpose of which is to solve how to improve its compression ratio and pumping performance with almost no increase in volume, so as to meet the requirements of molecular pumps in high-end application scenarios.

[0006] According to the present invention, a molecular pump is provided, comprising: a housing assembly, a base having an outlet, and a housing fastened to the base and having an inlet; a turbine component rotatably disposed between the base and the housing, and including a blade portion, an extension coaxially connected to the blade portion, a bent portion connected to the intersection of the blade portion and the extension portion, and an annulus formed between the bent portion and the extension portion; a traction cylinder assembly, including a first traction cylinder coaxially disposed on the base and partially inserted into the annulus of the turbine component; and a meandering channel, which sequentially includes an air extraction section communicating with the inlet and formed between the housing and the blade portion of the turbine component, an air extraction section connected to the air extraction section and formed between the housing and the bent portion of the turbine component. The system comprises a first compression section, a second compression section connected to the first compression section and formed between the bend of the first traction cylinder and the turbine component, a third compression section connected to the second compression section and formed between the extension of the first traction cylinder and the turbine component, and a fourth compression section including a first portion. The first portion of the fourth compression section is formed between the extension of the turbine component and the first traction cylinder, and connects to the third compression section while communicating with the air outlet. The first portions of the first, second, third, and fourth compression sections each accommodate a first helical groove, a second helical groove, a third helical groove, and a fourth helical groove provided on the turbine component or the first traction cylinder.

[0007] Furthermore, the traction cylinder assembly also includes a second traction cylinder coaxially disposed on the base and located inside the extension of the turbine component. The fourth compression section also includes a second portion formed between the extension of the turbine component and the second traction cylinder. The second portion of the fourth compression section is connected to the third compression section and communicates with the air outlet. The second portion of the fourth compression section also accommodates a fifth helical groove provided on the second traction cylinder. A connecting hole is provided on the extension of the turbine component to communicate between the third compression section and the second portion of the fourth compression section.

[0008] Furthermore, the first and second spiral grooves are in the same direction, and opposite to the directions of the third, fourth, and fifth spiral grooves.

[0009] Furthermore, the exhaust section is larger than the flow area of ​​any one of the first compression section, the second compression section, the third compression section, and the fourth compression section.

[0010] Furthermore, the flow areas of the first compression section, the second compression section, and the third compression section decrease sequentially, and the flow area of ​​the fourth compression section is greater than that of the third compression section, but smaller than that of the first compression section.

[0011] Furthermore, an annular groove is provided on the inner bottom of the second traction cylinder.

[0012] Further, the number of the first spiral grooves is 17, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:4.7; the number of the second spiral grooves is 19, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:5.5; the number of the third spiral grooves is 12, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:6.4; the number of the fourth spiral grooves is 12, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:6.4; the number of the fifth spiral grooves is 8, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:7.9.

[0013] Furthermore, the molecular pump also includes a motor, which is fixed on the base of the housing assembly and located inside the housing. The turbine component is integrally sleeved outside the motor and fixed to the motor shaft by its blade portion.

[0014] Furthermore, the blade section includes multiple moving blade groups spaced along the axial direction, and also includes multiple fixed blade groups arranged at intervals along the axial direction on the inner wall of the housing of the housing assembly, wherein the multiple moving blade groups are alternately arranged in the multiple fixed blade groups along the axial direction.

[0015] Furthermore, the molecular pump is a magnetically levitated molecular pump.

[0016] This invention discloses a molecular pump that achieves its initial pumping function through the rotation of a rotating turbine component, particularly its blades, within a housing. The pumped-in gas is then compressed through a first, second, third, and fourth compression section before being discharged through an outlet located on a base. A meandering channel, primarily composed of the pumping section, the first compression section, the second compression section, the third compression section, and the fourth compression section, connects the inlet and outlet and is formed between the housing, the turbine component, and the traction cylinder assembly. This meandering channel repeatedly among these three components maximizes the utilization of the space within the molecular pump. This not only improves the flow path of gas molecules within the pump but also increases the compression ratio by adding at least one compression section, thereby enhancing the pumping performance. Furthermore, constructing a more tortuous meandering channel within the pump effectively reduces backflow of gas molecules during transport, further improving the pump's compression ratio and pumping performance. In other words, the improvement of this molecular pump is mainly achieved by increasing its compression ratio and pumping performance with almost no increase in volume, simply by increasing its compactness, which can effectively meet the requirements of molecular pumps in high-end application scenarios. Attached Figure Description

[0017] The above and other objects, features, and advantages of exemplary embodiments of the present invention will become readily apparent upon reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of the invention are illustrated by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0018] Figure 1 A perspective view of a molecular pump according to an embodiment of the present invention is shown;

[0019] Figure 2 A cross-sectional view of a molecular pump according to an embodiment of the present invention is shown;

[0020] Figure 3 It shows Figure 1 A magnified view of a portion of region A in the middle;

[0021] Figure 4 It shows Figure 2 A perspective view of the assembled state of the turbine component's bent portion and the first traction cylinder;

[0022] Figure 5 It shows Figure 2 A perspective view of the first traction cylinder shown;

[0023] Figure 6 It shows Figure 2 A perspective view of the assembly state of the turbine component extension and the second traction cylinder.

[0024] Explanation of reference numerals in the attached drawings: 100, molecular pump; 1001, assembly area; 1002, rotating shaft; 1, shell assembly; 11, base; 111, outlet; 12, shell; 121, inlet; 2, turbine component; 21, blade section; 211, moving blade assembly; 212, fixed blade assembly; 22, extension; 221, connecting hole; 23, bending section; 24, annulus; 3, traction cylinder assembly; 31, first traction cylinder; 32, second traction cylinder; 4, meandering channel; 41, extraction section; 42, first compression section; 421, first spiral groove; 43, second compression section; 431, second spiral groove; 44, third compression section; 441, third spiral groove; 45, fourth compression section; 451, first part; 452, fourth spiral groove; 453, second part; 454, fifth spiral groove. Detailed Implementation

[0025] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0026] This invention provides a molecular pump 100, see [link to relevant documentation]. Figure 1 and Figure 2 The molecular pump 100, as a core component of modern vacuum technology, is widely used in the creation and maintenance of high vacuum environments, playing an indispensable role in scientific research and industrial production. Turbomolecular pumps 100 are widely used due to their high pumping speed, oil-free operation, and simple maintenance. The molecular pump 100 in this application is preferably a magnetically levitated molecular pump 100, which has a longer bearing life and allows the rotor to reach higher speeds more easily, thus improving the compression ratio of gas molecules. The compression ratio, as an important indicator of the performance of the molecular pump 100, represents its ability to transport gas from a low-pressure region to a high-pressure region. A high compression ratio means that the molecular pump 100 can more effectively handle large gas loads and has better performance in maintaining high vacuum levels.

[0027] In this embodiment, the molecular pump 100 includes a housing assembly 1 and a motor disposed within the housing assembly 1. For example, the housing assembly 1 has an assembly area 1001 for mounting the motor. Specifically, the housing assembly 1 includes a base 11 with an outlet 111 and a housing 12 fastened to the base 11 and having an inlet 121. The motor is fixedly mounted on the base 11 of the housing assembly 1 and located within the housing 12. The molecular pump 100 also includes a turbine component 2 disposed within the housing assembly 1. The turbine component 2 is fixedly sleeved outside the motor so that the motor can drive the turbine component 2 to rotate within the housing assembly 1 and generate pumping force.

[0028] The turbine component 2 includes a blade portion 21, which can be fixed to the motor shaft 1002. The blade portion 21 includes multiple moving blade groups 211 spaced along the axial direction, which are alternately arranged in multiple stationary blade groups 212 along the axial direction. Compared with existing turbine components, this turbine component 2, in addition to having the blade portion 21, also includes an extension portion 22 coaxially connected to the blade portion 21, a bent portion 23 provided at the intersection of the extension portion 22 and the blade portion 21, and an annular space 24 formed between the bent portion 23 and the extension portion 22.

[0029] To increase the compression ratio of the molecular pump 100, the molecular pump 100 also includes a traction cylinder assembly 3 and a meandering channel 4 for connecting the inlet 121 and the outlet 111. As an example, see... Figure 2 and Figure 3 The traction cylinder assembly 3 includes at least a first traction cylinder 31 coaxially mounted on the base 11 and partially entering the annulus 24 of the turbine component 2. The meandering channel 4 sequentially includes an air extraction section 41 communicating with the air inlet 121 and formed between the housing 12 and the blade portion 21 of the turbine component 2; a first compression section 42 connected to the air extraction section 41 and formed between the housing 12 and the bend portion 23 of the turbine component 2; a second compression section 43 connected to the first compression section 42 and formed between the first traction cylinder 31 and the bend portion 23 of the turbine component 2; a third compression section 44 connected to the second compression section 43 and formed between the first traction cylinder 31 and the extension portion 22 of the turbine component 2; and includes a first portion 451 (see reference). Figure 5 The fourth compression section 45. It should be noted that the first part 451 of the fourth compression section 45 is formed between the extension 22 of the turbine component 2 and the first traction cylinder 31, and connects to the outlet 111 while connecting with the third compression section 44. The first compression section 42 accommodates a first helical groove 421 provided on the turbine component 2, the second compression section 43 accommodates a second helical groove 431 provided on the first traction cylinder 31, the third compression section 44 accommodates a third helical groove 441 provided on the first traction cylinder 31, and the first part 451 of the fourth compression section 45 accommodates a fourth helical groove 452 provided on the first traction cylinder 31.

[0030] Based on the above description, the initial pumping function of the molecular pump 100 is achieved by the rotation of the rotating turbine component 2, especially its blade portion 21, within the housing 12. The pumped gas is then compressed through the first compression section 42, the second compression section 43, the third compression section 44, and the fourth compression section 45 before being discharged through the outlet 111 located on the base 11. A meandering channel 4, mainly composed of the pumping section 41, the first compression section 42, the second compression section 43, the third compression section 44, and the fourth compression section 45, and connecting the inlet 121 and the outlet 111, is formed between the housing 12, the turbine component 2, and the traction cylinder assembly 3. This meandering channel repeatedly between the three components makes fuller use of the space within the molecular pump 100. This not only improves the flow path of gas molecules within the molecular pump 100 but also increases the compression ratio of the molecular pump 100 by adding at least one compression section, thereby improving the pumping performance of the molecular pump 100. Meanwhile, by constructing a more tortuous, meandering channel 4 inside the molecular pump 100, the backflow phenomenon of gas molecules during the transmission process can be effectively reduced, further improving the compression ratio and pumping performance of the molecular pump 100. In other words, the improvement of the molecular pump 100 mainly improves its compression ratio and pumping performance by increasing its compactness without increasing its volume, which can effectively meet the usage requirements of the molecular pump 100 in high-end application scenarios.

[0031] In this embodiment, as Figure 2 , Figure 5 and Figure 6 As shown, the traction cylinder assembly 3 further includes at least a second traction cylinder 32 coaxially mounted on the base 11 and located inside the extension 22 of the turbine component 2, and the fourth compression section 45 further includes at least a second portion 453 formed between the extension 22 of the turbine component 2 and the second traction cylinder 32 (see reference). Figure 6 The second part 453 of the fourth compression section 45 is connected to the outlet 111 while being connected to the third compression section 44. The second part 453 of the fourth compression section 45 also accommodates the fifth spiral groove 454 provided on the second traction cylinder 32. A connecting hole 221 is provided on the extension 22 of the turbine component 2 to connect the third compression section 44 and the second part 453 of the fourth compression section 45.

[0032] The second part 453 added to the fourth compression section 45 effectively diverts the gas molecules from the third compression section 44. Through this diversion, gas molecules that originally flowed directly to the first part 451 of the fourth compression section 45 can now be partially received by the second part 453, thus promoting a smooth transition of gas molecules from the third compression section 44 to the fourth compression section 45. This design cleverly reduces backflow during the transfer of gas molecules between the third and fourth compression sections 44 and 45, effectively reducing the possibility of backflow and significantly improving the compression ratio of the molecular pump 100. Simultaneously, both the first part 451 and the second part 453 of the fourth compression section 45 are directly connected to the outlet 111. This arrangement not only optimizes the discharge path of gas molecules in the meandering channel 4 but also further improves the compression efficiency of the molecular pump 100. In summary, the addition of the second part 453 to the fourth compression section 45 comprehensively improves the compression performance of the molecular pump 100 for gas molecules by diverting flow, reducing backflow, and optimizing gas molecule discharge.

[0033] As an example, the first helical groove 421 and the second helical groove 431 are oriented in the same direction, and opposite to the directions of the third helical groove 441, the fourth helical groove 452, and the fifth helical groove 454. To ensure the molecular pump 100 achieves its basic functions, the locations of the helical grooves at different compression sections should vary to achieve the desired direction. Specifically, the first helical groove 421 should be located on the outer wall of the bend 23; the first portion 451 of the second helical groove 431, the third helical groove 441, and the fourth helical groove 452 should be located on the side wall of the first traction cylinder 31; and the second portion 453 of the fourth helical groove 452 should be located on the outer wall of the second traction cylinder 32. By setting the helical groove rotation direction, most of the helical grooves inside the meandering channel 4 are located on the first traction cylinder 31 and the second traction cylinder 32. Compared to creating annular grooves on the side wall of the annular space 24 of the turbine component 2, creating helical grooves on the first traction cylinder 31 and the second traction cylinder 32 is less difficult to manufacture. As one implementation method, the first spiral groove 421 can also be different from the above-mentioned opening direction setting, and the spiral groove can be opened on the inner side wall of the housing 12. In this implementation method, all the spiral grooves are opened on the traction cylinder assembly 3 and the housing assembly 1, which is beneficial to improve the rigidity of the turbine component 2 while maintaining high integration, which is beneficial to improve the stability of the molecular pump 100 during operation, improve the life of the molecular pump 100, and reduce the probability of molecular damage.

[0034] As an example, to ensure sufficient pumping capacity of the molecular pump 100, the flow area of ​​the pumping section 41 should be greater than the flow area of ​​any one of the first compression section 42, the second compression section 43, the third compression section 44, and the fourth compression section 45. Preferably, to further optimize the channel structure, an annular groove is provided on the inner bottom of the second traction cylinder 32, and the flow areas of the first compression section 42, the second compression section 43, and the third compression section 44 decrease sequentially. The flow area of ​​the fourth compression section 45 is greater than that of the third compression section 44, but smaller than that of the first compression section 42. By controlling the flow areas of the first compression section 42, the second compression section 43, and the third compression section 44 to decrease sequentially, the molecular pump 100 can further compress the gas molecules when transporting them. Furthermore, by controlling the flow area of ​​the fourth compression section to be greater than that of the third compression section 44, the gas molecules are more easily discharged from the molecular pump 100 after compression.

[0035] Preferably, in order to ensure the compression capability of the fourth compression section 45 for gas molecules, the flow area of ​​the fourth compression section 45 should also meet the following setting: the flow area of ​​either the first part 451 or the second part 453 of the fourth compression section 45 is not greater than the flow area of ​​the third compression section 44.

[0036] In this embodiment, the number of first spiral grooves 421 is 17, the spiral angle is 32°, and the ratio of their total cross-sectional area (the sum of the flow areas at any position) to the cross-sectional area of ​​the molecular pump 100 at the inlet 121 is 1:4.7. The number of second spiral grooves 431 is 19, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area of ​​the molecular pump 100 at the inlet 121 is 1:5.5. The number of third spiral grooves 431 is 12, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area of ​​the molecular pump 100 at the inlet 121 is 1:6.4. The number of fourth spiral grooves 431 is 12, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area of ​​the molecular pump 100 at the inlet 121 is 1:6.4. The fifth spiral groove 431 has 8 grooves, with a spiral angle of 32°, and its total cross-sectional area is 1:7.9 compared to the cross-sectional area of ​​the molecular pump 100 at the inlet. Extensive experiments have shown that when the first spiral groove 421, second spiral groove 431, third spiral groove 441, fourth spiral groove 452, and fifth spiral groove 454 meet the above conditions, the compression ratio and backflow suppression effect of the molecular pump 100 during operation can be maximized.

[0037] In summary, the molecular pump mentioned above is easier to manufacture and can improve its compression ratio and pumping performance with almost no increase in volume, thus meeting the requirements of molecular pumps in high-end application scenarios.

[0038] In the foregoing description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] Based on the above description of this application, those skilled in the art will also understand that terms used, such as "inner," "outer," "axial," "radial," and "circumferential," which indicate orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms should not be understood or interpreted as a limitation on the present invention.

[0040] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0041] While numerous embodiments of the invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and essence of the invention. It should be understood that various alternatives to the embodiments of the invention described herein may be employed in the practice of the invention. The appended claims are intended to define the scope of protection of the invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A molecular pump, characterized in that, include: A housing assembly, comprising a base having an air outlet and a housing fastened to the base having an air inlet; A turbine component is rotatably disposed between the base and the housing, and includes a blade portion, an extension portion coaxially connected to the blade portion, a bent portion connected to the intersection of the blade portion and the extension portion, and an annular space formed between the bent portion and the extension portion; A traction cylinder assembly, comprising a first traction cylinder coaxially disposed on the base and partially inserted into the annulus of the turbine component; The meandering channel sequentially includes an air extraction section communicating with the air inlet and formed between the housing and the blade portion of the turbine component; a first compression section connected to the air extraction section and formed between the housing and the bend portion of the turbine component; a second compression section connected to the first compression section and formed between the first traction cylinder and the bend portion of the turbine component; a third compression section connected to the second compression section and formed between the first traction cylinder and the extension portion of the turbine component; and a fourth compression section including a first portion, wherein the first portion of the fourth compression section is formed between the extension portion of the turbine component and the first traction cylinder, and communicates with the air outlet while connecting to the third compression section; The first compression section includes a first helical groove on the turbine component, the second compression section includes a second helical groove on the first traction cylinder, the third compression section includes a third helical groove on the first traction cylinder, and the first part of the fourth compression section includes a fourth helical groove on the first traction cylinder. The traction cylinder assembly further includes a second traction cylinder coaxially disposed on the base and located inside the extension of the turbine component. The fourth compression section further includes a second portion formed between the extension of the turbine component and the second traction cylinder. The second portion of the fourth compression section is connected to the outlet while being connected to the third compression section. The second portion of the fourth compression section also accommodates a fifth helical groove provided on the second traction cylinder. A connecting hole is provided on the extension of the turbine component to connect the third compression section and the second portion of the fourth compression section.

2. The molecular pump according to claim 1, characterized in that, The first and second spiral grooves are in the same direction, and are in the opposite direction to the third, fourth and fifth spiral grooves.

3. The molecular pump according to claim 1, characterized in that, The air extraction section is larger than the flow area of ​​any one of the first compression section, the second compression section, the third compression section, and the fourth compression section.

4. The molecular pump according to claim 1, characterized in that, The flow areas of the first compression section, the second compression section, and the third compression section decrease in sequence. The flow area of ​​the fourth compression section is greater than that of the third compression section, but smaller than that of the first compression section.

5. The molecular pump according to claim 1, characterized in that, An annular groove is provided on the inner bottom of the second traction cylinder.

6. The molecular pump according to claim 1, characterized in that, The number of the first spiral grooves is 17, the spiral helix angle is 32°, and the ratio of its total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:4.

7. The second spiral groove has 19 grooves, a spiral angle of 32°, and a total cross-sectional area ratio of 1:5.5 to the cross-sectional area at the inlet of the molecular pump. The number of the third spiral grooves is 12, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:6.

4. The number of the fourth spiral grooves is 12, the spiral angle is 32°, and the ratio of their total cross-sectional area to the cross-sectional area at the inlet of the molecular pump is 1:6.

4. The fifth spiral groove has 8 grooves, a spiral angle of 32°, and a total cross-sectional area ratio of 1:7.9 to the cross-sectional area at the inlet of the molecular pump.

7. The molecular pump according to claim 1, characterized in that, The molecular pump also includes a motor, which is fixed on the base of the housing assembly and located inside the housing. The turbine component is integrally sleeved outside the motor and fixed to the motor shaft by its blade portion.

8. The molecular pump according to claim 1, characterized in that, The blade section includes multiple moving blade groups spaced along the axial direction, and also includes multiple fixed blade groups arranged at intervals along the axial direction on the inner wall of the shell assembly. The multiple moving blade groups are alternately arranged in the multiple fixed blade groups along the axial direction.

9. The molecular pump according to claim 1, characterized in that, The molecular pump is a magnetically levitated molecular pump.

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