Deformation detection method, deformation detection assembly and deformation detection system of tubular furnace

Abstract

The embodiment of the invention discloses a deformation detection method, a deformation detection assembly and a deformation detection system of a tubular furnace. According to the method, a light emitting device in a deformation detection assembly is adjusted, so that irradiation light emitted by the light emitting device enters an inner cavity of a tubular furnace from a first end of the tubular furnace and is reflected to a preset position of a second end of the tubular furnace at the wall of the inner cavity of the tubular furnace; meanwhile, the light emitting device is controlled to move at least once in the circumferential direction of the tube furnace so as to obtain the first stop position of the irradiation light at the second end each time, finally, whether the tube furnace deforms or not can be accurately known according to the preset position and the first stop position, and then the situation that the wafer cannot be smoothly taken out of the tube can be avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a deformation detection method, a deformation detection component and a deformation detection system for a tube furnace. Background Art

[0002] Quartz tube is a special industrial technical glass made of silicon dioxide. It has a series of excellent physical and chemical properties. The high temperature resistance of quartz tube is very good. The softening point temperature is 1730℃. It can be used for a long time below 1100℃, and the maximum short-term use temperature can reach 1450℃.

[0003] In the related technology, the wafer needs to be placed in a quartz tube for heat treatment to perform alloying, diffusion or annealing processes. In actual semiconductor product production, the quartz tube needs to operate 24 hours a day and usually needs to be heated continuously for several hours, and the temperature often reaches above 1100°C. Long-term high-temperature operation will cause the tube body of the quartz tube to deform, and the wafer may not be taken out of the tube smoothly; at the same time, the wafer may mechanically collide with the inner wall of the furnace tube during the removal process, increasing the risk of furnace tube breakage. In addition, the deformation of the tube body will cause the placement position of the wafer in the tube to change, which will affect the process consistency of the wafer.

[0004] However, after the quartz tube is placed in the heating chamber, only the two ends thereof are visible and the wall of the heating chamber is relatively thick. If the inside of the quartz tube is deformed due to high temperature, it is difficult to determine whether the quartz tube is deformed without taking it out. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present application provides a deformation detection method, a deformation detection component and a deformation detection system for a tube furnace, which can accurately determine whether the tube furnace is deformed, thereby avoiding the situation where the wafer cannot be smoothly removed from the tube.

[0006] In a first aspect, the present application provides a deformation detection method for a tube furnace, which comprises:

[0007] The light emitting device in the deformation detection assembly is adjusted so that the illumination light emitted by the light emitting device is emitted from the first end of the tube furnace into the inner cavity of the tube furnace, and is reflected at the inner cavity wall of the tube furnace to a preset position at the second end of the tube furnace;

[0008] Controlling the light emitting device to move at least once along the circumferential direction of the tube furnace to obtain a first stop position of the irradiated light at the second end each time;

[0009] Whether the tube furnace is deformed is determined according to the preset position and the first stop position.

[0010] Furthermore, in the deformation detection method of the tube furnace provided in the present application, determining whether the tube furnace is deformed according to the preset position and the first stop position includes:

[0011] Obtaining a first offset between a first stop position of the irradiated light and a preset position each time the light emitting device moves along the circumferential direction of the tube furnace;

[0012] If the first offset after each movement is less than a preset first threshold, the light emitting device is controlled to move along the radial direction of the tube furnace, and the light emitting device is pitch-adjusted so that the irradiated light is reflected by the inner cavity wall to a preset position;

[0013] Controlling the light emitting device to move at least once in the circumferential direction to obtain a second stop position of the irradiated light at the second end each time;

[0014] According to the preset position and the second stop position, it is determined whether the tube furnace is deformed.

[0015] Furthermore, in the deformation detection method of the tube furnace provided in the present application, the method further includes:

[0016] At a first moment, obtaining a first distance between a third stop position of the irradiation light at the second end of the tube furnace and the inner cavity wall of the tube furnace;

[0017] At a second moment, obtaining a second distance between a fourth stop position of the irradiation light at the second end of the tube furnace and the inner cavity wall of the tube furnace;

[0018] Whether the tube furnace is deformed is determined according to the first distance and the second distance.

[0019] Furthermore, in the deformation detection method of the tube furnace provided in the present application, determining whether the tube furnace is deformed according to the first spacing and the second spacing includes:

[0020] Determine a second offset between the third stop position and the fourth stop position according to the first spacing and the second spacing;

[0021] If the second offset is less than a preset second threshold, controlling the light emitting device to move at least once in the circumferential direction to obtain a fifth stop position of the irradiation light at the second end of the tube furnace;

[0022] According to the preset position and the fifth stop position, it is determined whether the tube furnace is deformed.

[0023] Furthermore, in the deformation detection method of the tube furnace provided in the present application, the method further includes:

[0024] At the third moment, the light emitting device is pitch-adjusted to obtain the irradiated light reflected from a plurality of reflection points on the inner cavity wall to a sixth stop position at the second end; wherein the plurality of reflection points are arranged along the axial direction of the tube furnace;

[0025] Determine first position information of light emitting devices corresponding to a plurality of reflection points;

[0026] At a fourth moment, based on the first position information, a seventh stop position of the irradiation light at the second end is acquired;

[0027] According to the sixth stop position and the seventh stop position, it is determined whether the tube furnace is deformed.

[0028] Furthermore, in the deformation detection method of the tube furnace provided in the present application, determining whether the tube furnace is deformed according to the sixth stop position and the seventh stop position includes:

[0029] Obtaining a third offset between a sixth stop position and a seventh stop position corresponding to each reflection point at the third moment and the fourth moment respectively;

[0030] If the third offset is greater than or equal to a preset third threshold, it is determined that the tube furnace is deformed;

[0031] If the offset is less than the third threshold, it is determined that the tube furnace is not deformed.

[0032] Furthermore, in the deformation detection method of the tube furnace provided in the present application, the method further includes:

[0033] If both the first end and the second end of the tube furnace are open, the moving track of the irradiation light at the second end is determined according to the photoelectric sensor placed at the second end;

[0034] Determine whether the tube furnace is deformed based on the movement trajectory.

[0035] Furthermore, in the deformation detection method of the tube furnace provided in the present application, the method further includes:

[0036] If the first end of the tube furnace is open, after the irradiated light is reflected from the inner cavity wall to the center position of the second end of the tube furnace, a third distance between the light outlet of the light emitting device and the axis of the tube furnace is obtained;

[0037] Determining second position information of a reflection point of the irradiation light on the inner cavity wall according to the third spacing, the inner diameter and the length of the tube furnace;

[0038] Determine, according to the second position information, the inner diameter and the length of the tube furnace, a fourth offset of the irradiation light at the center position after the light emitting device moves along the circumferential direction based on the reflection point;

[0039] It is determined whether the tube furnace is deformed according to the fourth offset.

[0040] In a second aspect, the present application further provides a deformation detection assembly for a tube furnace, which is applied to the deformation detection method for the tube furnace provided in the first aspect, and the deformation detection assembly includes:

[0041] The light emitting device is configured to be adjusted in elevation and rotated along the circumference of the tube furnace;

[0042] The illumination light emitted by the light emitting device is configured to be emitted from the first end of the tube furnace into the inner cavity of the tube furnace, and reflected at the inner cavity wall of the tube furnace to the second end of the tube furnace, and the first end and the second end are the corresponding two ends of the tube furnace.

[0043] In a third aspect, the present application further provides a deformation detection system, which includes the deformation detection method for a tube furnace provided in the first aspect, or the deformation detection component for a tube furnace provided in the second aspect.

[0044] The deformation detection method of a tube furnace provided in the present application adjusts the light-emitting device in the deformation detection component so that the irradiation light emitted by the light-emitting device is emitted from the first end of the tube furnace into the inner cavity of the tube furnace, and is reflected at the inner cavity wall of the tube furnace to a preset position at the second end of the tube furnace. At the same time, the light-emitting device is controlled to move at least once along the circumferential direction of the tube furnace to obtain the first stop position of the irradiation light at the second end each time. Finally, according to the preset position and the first stop position, it is possible to accurately know whether the tube furnace is deformed, thereby avoiding the situation where the wafer cannot be smoothly taken out of the tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0046] Figure 1 A first schematic block diagram of a deformation detection assembly of a tube furnace provided in an embodiment of the present application;

[0047] Figure 2 A second schematic block diagram of a deformation detection assembly of a tube furnace provided in an embodiment of the present application;

[0048] Figure 3 A first flow chart of a deformation detection method for a tube furnace provided in an embodiment of the present application;

[0049] Figure 4 A second flow chart of the deformation detection method of a tube furnace provided in an embodiment of the present application;

[0050] Figure 5 A third flow chart of the deformation detection method for a tube furnace provided in an embodiment of the present application;

[0051] Figure 6 A fourth flow chart of the deformation detection method for a tube furnace provided in an embodiment of the present application;

[0052] Figure 7 A fifth flow chart of the deformation detection method for a tube furnace provided in an embodiment of the present application;

[0053] Figure 8 A sixth flow chart of the deformation detection method for a tube furnace provided in an embodiment of the present application;

[0054] Fig. 9 A seventh flow chart of the deformation detection method of a tube furnace provided in an embodiment of the present application;

[0055] Fig.10 This is a schematic diagram of the eighth process flow of the deformation detection method for a tube furnace provided in an embodiment of the present application.

[0056] Reference numerals:

[0057] 10. Tube furnace; 11. First end; 12. Second end; 100. Light emitting device; 201. Rotating arm; 300. Fixing member. DETAILED DESCRIPTION

[0058] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0059] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0060] It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the application. As used in this application specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0061] It should be further understood that the term “and / or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0062] In addition, in this application, unless otherwise clearly specified or limited in the embodiments, the terms "installed", "connected", "connected" and "fixed" etc. appearing in the embodiments should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integrated connection. It can be understood that it can also be a mechanical connection, an electrical connection, etc.; of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements, or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific implementation situation.

[0063] Embodiments of the present application provide a deformation detection method, a deformation detection component, and a deformation detection system for a tube furnace.

[0064] For ease of understanding, the deformation detection component is first introduced, and then the deformation detection method and system of the tube furnace are introduced in detail based on the deformation detection component.

[0065] See also Figure 1 , Figure 1 Schematic diagram of a deformation detection assembly of a tube furnace 10 provided in an embodiment of the present application. Figure 1 As shown, the present application provides a deformation detection assembly for a tube furnace 10, which includes:

[0066] The light emitting device 100 is configured to be adjusted in pitch and rotate along the circumferential direction of the tube furnace 10;

[0067] Among them, the illumination light emitted by the light emitting device 100 is configured to be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. The first end 11 and the second end 12 are the corresponding two ends of the tube furnace 10 respectively.

[0068] In this embodiment, the inner cavity wall of the tube furnace 10 has a reflective function, which can reflect the incident irradiation light from the first end 11 of the tube furnace 10 to the second end 12 of the tube furnace 10, and then determine whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0069] The tube furnace 10 may be a high-temperature horizontal furnace, and the light emitting device 100 may be a laser pen, which may emit laser light and reflect it on the inner cavity wall of the tube furnace 10 .

[0070] Specifically, when it is necessary to perform deformation detection on the tube furnace 10, it is only necessary to adjust the light emitting device 100 at the first end 11 of the tube furnace 10, that is, adjust the pitch angle of the light emitting device 100, so that the irradiated light can be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. At the same time, the light emitting device 100 is controlled to rotate along the circumferential direction of the tube furnace 10 to determine whether the light spot at the second end 12 of the tube furnace 10 is offset, and then it can be determined whether the tube furnace 10 is deformed.

[0071] At the same time, in order to improve the accuracy of detection, such as Figure 2 As shown, the present application can also pre-determine two reflection points on the inner cavity wall of the tube furnace 10, namely, reflection point a and reflection point b.

[0072] Exemplarily, the light emitting device 100 may be subjected to a first pitch adjustment so that the irradiated light can be reflected at the reflection point a to a preset position of the second end 12 (e.g., the center point of the second end 12), and then the light emitting device 100 may be controlled to rotate along the circumferential direction of the tube furnace 10 to determine whether the light spot at the second end 12 is offset; if no offset occurs, the light emitting device 100 may be subjected to a second pitch adjustment so that the irradiated light can be reflected at the reflection point b to a preset position of the second end 12 (e.g., the center point of the second end 12), and then the light emitting device 100 may be controlled to rotate along the circumferential direction of the tube furnace 10 to determine whether the light spot at the second end 12 is offset, and whether the offset is large, thereby determining whether the tube furnace 10 is deformed.

[0073] It should be noted that when determining the number of reflection points, the present application is not limited to one reflection point or two reflection points. The present application can also predetermine more than three reflection points, thereby more accurately determining whether the tube furnace 10 is deformed.

[0074] Furthermore, after determining that the tube furnace 10 is deformed, the present application can calculate the deformation of the tube furnace 10 by determining the position of the reflection point, the distance between the light emitting device 100 and the inner cavity wall of the tube furnace 10, the radius of the inner cavity of the tube furnace 10, the length of the tube furnace 10 before deformation (the dimension along the axial direction), and the offset between the light spot at the second end 12 and the center position of the second end 12. The deformation of the tube furnace 10 can be characterized by the bending amount of the inner cavity wall.

[0075] Specifically, Figure 1As shown, according to the reflection principle, the irradiation light is incident from the first end 11 of the tube furnace 10, and after being reflected on the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, it satisfies the following formula: h1 / h2=x1 / x2, h1 is the vertical distance between the light emitting point of the light emitting device 100 and the inner cavity wall of the tube furnace 10, h2 is the inner cavity radius of the tube furnace 10, x1 is the distance from the reflection point to the first end 11 of the tube furnace 10, and x2 is the distance from the reflection point to the second end 12 of the tube furnace 10.

[0076] Among them, h1 can be calculated by the inner cavity radius of the tube furnace 10 and the position of the rotating arm 201, h2 is known, and x1+x2 is the length of the tube furnace 10. After the above formula is transformed, x1=x*h1 / (h1+h2) can be obtained, and x is the length of the tube furnace 10. Then, the distance between the reflection point and the first end of the tube furnace 10 can be calculated, so that the position of the reflection point can be determined.

[0077] After determining the position of the reflection point, the light emitting device 100 can be controlled to rotate along the circumferential direction of the tube furnace 10. During the rotation, if the light spot is not at the center position of the second end 12, the distance between the light spot and the center position can be calculated by the above calculation formula because h1, x1, and x2 are known. Based on the distance, it can be determined whether the tube furnace 10 is deformed.

[0078] The deformation detection component of the tube furnace 10 provided in the present application includes a light emitting device 100, which is configured to rotate along the circumferential direction of the tube furnace 10. At the same time, the irradiation light emitted by the light device is configured to be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. Then, whether the tube furnace 10 is deformed can be determined by whether the light spot reflected to the second end 12 of the tube furnace 10 is offset, thereby improving the accuracy of detecting whether the tube furnace 10 is deformed, thereby avoiding the situation where the wafer cannot be smoothly taken out of the tube.

[0079] In some embodiments, the deformation detection assembly further includes a rotating assembly, wherein the rotating assembly is connected to the light emitting device 100 , and the rotating assembly is configured to rotate along the circumferential direction of the tube furnace 10 to drive the light emitting device 100 to rotate along the circumferential direction of the tube furnace 10 .

[0080] In this embodiment, the light emitting device 100 can be arranged on a rotating component, that is, the rotating component is connected to the light emitting device 100. After the rotating component is configured to rotate along the circumferential direction of the tube furnace 10, the light emitting device 100 can rotate along the circumferential direction of the tube furnace 10 with the rotating component.

[0081] In some embodiments, Figure 1As shown, the rotating assembly includes a slide rail, wherein the light extraction device 100 is configured to slide on the slide rail to move along the radial direction of the tube furnace 10 .

[0082] In this embodiment, a slide rail is provided on the rotating component, and the light emitting device 100 can be arranged on the slide rail and can move on the slide rail along the radial direction of the tube furnace 10. At the same time, the light emitting device 100 can be adjusted in pitch, so that the irradiation light can be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, so that whether the tube furnace 10 is deformed can be determined by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0083] In some embodiments, Figure 1 As shown, the deformation detection assembly further includes a fixing member 300 ; wherein the rotating assembly is configured to rotate on the fixing member 300 along the circumferential direction of the tube furnace 10 .

[0084] In this embodiment, the fixing member 300 can carry the rotating assembly and the light emitting device 100, so that the irradiation light can be emitted into the inner cavity of the tube furnace 10 from the first end 11 of the tube furnace 10 at different positions, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, so that whether the tube furnace 10 is deformed can be determined by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0085] In some embodiments, Figure 1 As shown, the rotating assembly includes a rotating arm 201 ; wherein the rotating arm 201 is configured to rotate on the fixing member 300 along the circumferential direction of the tube furnace 10 .

[0086] In this embodiment, the rotating arm 201 can be arranged on the fixing member 300 and can rotate on the fixing member 300 along the circumferential direction of the tube furnace 10. At the same time, a slide rail can be arranged on the rotating arm 201, and the light emitting device 100 can move along the radial direction of the tube furnace 10 on the slide rail, and the light emitting device 100 can be adjusted in pitch, so that the irradiation light can be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, and then it can be determined whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0087] In some embodiments, the fixing member 300 is fixedly connected to the tube furnace 10 .

[0088] Specifically, the fixing member 300 is disposed at the first end 11 of the tube furnace 10 and can be fixedly connected to the tube furnace 10. The rotating assembly is configured to rotate on the fixing member 300 in a circumferential direction, so that the optical device 100 can rotate in the circumferential direction of the tube furnace 10, and the tube furnace 10 moves in a radial direction and can be adjusted in pitch, so that the irradiation light can be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, so as to determine whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0089] In addition, the fixing member 300 may also be separately provided from the tube furnace 10 , that is, the fixing member 300 may be a floor bracket, and the rotating arm 201 may be directly provided on the floor bracket.

[0090] In some embodiments, Figure 1 As shown, the tubular furnace 10 includes a furnace body and a furnace tube; wherein the furnace tube is placed in the cavity of the furnace body from the first end 11 of the furnace body, and the irradiation light is configured to be emitted from the first end 11 of the furnace tube into the inner cavity of the furnace tube, and reflected at the inner cavity wall of the furnace tube to the second end 12 of the furnace tube.

[0091] In this embodiment, the tubular furnace 10 can be a high-temperature horizontal furnace, which is provided with a furnace body and a furnace tube. The furnace body is provided with a first cavity, and the furnace tube is provided with a second cavity. The furnace tube can be arranged in the first cavity along a preset axial direction, and the second cavity can be understood as the inner cavity of the tubular furnace 10 mentioned in this application.

[0092] Specifically, the furnace tubes are placed horizontally on the furnace body to form a high-temperature horizontal furnace. The high-temperature horizontal furnace is used for heat treatment, sintering and annealing, which is essential for the development and testing of new materials. The electronics manufacturing industry can use tubular furnaces to perform processes such as carburizing, carbonitriding and cleaning to ensure precise heat treatment.

[0093] The deformation detection component of the tube furnace 10 provided in the present application includes a light emitting device 100, which is configured to rotate along the circumferential direction of the tube furnace 10. At the same time, the irradiation light emitted by the light device is configured to be emitted from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. Then, whether the tube furnace 10 is deformed can be determined by whether the light spot reflected to the second end 12 of the tube furnace 10 is offset, thereby improving the accuracy of detecting whether the tube furnace 10 is deformed, thereby avoiding the situation where the wafer cannot be smoothly taken out of the tube.

[0094] It can be understood that the deformation detection component of the tube furnace 10 provided in the above embodiment is only an example. The deformation detection component of the tube furnace 10 described in the embodiment of the present application is to more clearly illustrate the technical solution of the deformation detection method of the tube furnace provided in the embodiment of the present application, and does not constitute a limitation on the technical solution provided in the embodiment of the present application. It is known to ordinary technicians in this field that with the evolution of the system and the emergence of new business scenarios, the technical solution provided in the embodiment of the present application is also applicable to similar technical problems. The deformation detection method of the tube furnace is described in detail below.

[0095] It should be noted that the description order of the following embodiments is not intended to limit the preferred order of the embodiments. The following is a detailed description of the deformation detection method of a tube furnace.

[0096] In some embodiments, Figure 3 As shown, the present application provides a deformation detection method for a tube furnace, which includes: steps S110, S120 and S130.

[0097] S110, adjusting the light emitting device in the deformation detection assembly so that the irradiation light emitted by the light emitting device is emitted from the first end of the tube furnace into the inner cavity of the tube furnace, and is reflected at the inner cavity wall of the tube furnace to a preset position at the second end of the tube furnace;

[0098] S120, controlling the light emitting device to move at least once along the circumferential direction of the tube furnace to obtain a first stop position of the irradiation light at the second end each time;

[0099] S130, determining whether the tube furnace is deformed according to the preset position and the first stop position.

[0100] In this embodiment, the preset position may be the center point of the second end, and the light emitting device may be a laser pen, which may emit laser light at the first end of the tube furnace and reflect the laser light from the inner cavity wall of the tube furnace to the second end of the tube furnace.

[0101] Specifically, when the present application performs deformation detection on a tube furnace, the position where the tube furnace needs to be detected for deformation can be determined in advance, that is, a reflection point on the inner cavity wall of the tube furnace, and then the light-emitting device is pitch-adjusted so that the irradiated light of the light-emitting device can be reflected at the reflection point to the center point of the second end of the tube furnace, and then based on the position of the light-emitting device at this time, the light-emitting device is controlled to move along the circumferential direction of the tube furnace. At this time, the reflection point also moves in the circumferential direction, and then it can be determined whether the light spot reflected at the second end of the tube furnace deviates from the center point of the second end during the movement of the reflection point in the circumferential direction, that is, whether there is a large deviation between the multiple first stop positions and the preset positions, so that it can be determined whether the tube furnace is deformed.

[0102] It should be noted that the preset position may not be the center position of the second end. Before the tubular furnace is deformed, if the light emitting device moves in a circular direction, the preset position may be understood as any point on a circle surrounding the center point of the second end.

[0103] The deformation detection method of a tube furnace provided in the present application adjusts the light-emitting device in the deformation detection component so that the irradiation light emitted by the light-emitting device is emitted from the first end of the tube furnace into the inner cavity of the tube furnace, and is reflected at the inner cavity wall of the tube furnace to a preset position at the second end of the tube furnace. At the same time, the light-emitting device is rotated at least once along the circumferential direction of the tube furnace to obtain the first stop position of the irradiation light at the second end each time. Finally, according to the preset position and the first stop position, it is determined whether the tube furnace is deformed, so that it can be accurately known whether the quartz tube is deformed, thereby avoiding the situation that the wafer cannot be smoothly taken out of the tube.

[0104] In some embodiments, Figure 4 As shown, step S130 includes steps S131, S132, S133 and S134.

[0105] S131, obtaining a first offset between a first stop position of the irradiated light and a preset position after the light emitting device moves along the circumferential direction of the tube furnace each time;

[0106] S132, if the first offset after each movement is less than a preset first threshold, control the light emitting device to move along the radial direction of the tube furnace, and perform pitch adjustment on the light emitting device so that the irradiated light is reflected by the inner cavity wall to a preset position;

[0107] S133, controlling the light emitting device to move at least once in the circumferential direction to obtain a second stop position of the irradiated light at the second end each time;

[0108] S134. Determine whether the tube furnace is deformed according to the preset position and the second stop position.

[0109] In this embodiment, the light emitting device is pitch-adjusted at a certain position of the first end to move in a circular direction, so that the first stop position of the irradiated light at the second end each time can be obtained, and then based on the first offset between each first stop position and the preset position, that is, multiple first offsets, it can be determined whether each first offset is greater than a preset first threshold value, and then it can be determined whether the tube furnace has been deformed.

[0110] Specifically, the first stop position can be understood as a point on the second end, the preset position can be understood as the center point of the second end, and the first offset can be understood as the distance between the two points. By judging whether the distance exceeds the preset first threshold, it can be determined whether the tube furnace has been deformed.

[0111] Furthermore, when the first offset after each movement is less than the preset first threshold, it is not necessarily possible to determine that the tube furnace has not been deformed, so it is necessary to further confirm whether the tube furnace is deformed. Therefore, it is necessary to control the light emitting device to move along the radial direction of the tube furnace, and to adjust the light emitting device in pitch, so that the irradiated light is reflected by the inner cavity wall to the preset position, and then control the light emitting device to adjust the pitch at this position to move at least once in the circumferential direction, and then obtain the second stop position of the irradiated light at the second end each time, and then obtain multiple offsets between the preset position and the second stop position, and determine whether there is a situation greater than the preset first threshold in the multiple offsets. If so, it can be determined that the tube furnace is deformed; if not, steps S131-S134 can be repeated multiple times to accurately determine whether the tube furnace is deformed.

[0112] It should be noted that the reference standard for the deformation of the tube furnace mentioned in this application is whether the wafer can be taken out from the inner cavity of the tube furnace. Therefore, when the deformation detection of the tube furnace is performed in this application, the deformation detection can be performed before the wafer is placed in the tube furnace. When it is determined that the tube furnace is about to be deformed, timely processing is performed, thereby avoiding the problem that the wafer cannot be taken out of the tube furnace.

[0113] In some embodiments, Figure 5 As shown, the deformation detection method of the tube furnace further includes: steps S210, S220 and S230.

[0114] S210, at a first moment, obtaining a first distance between a third stop position of the irradiation light at the second end of the tube furnace and an inner cavity wall of the tube furnace;

[0115] S220, at a second moment, obtaining a second distance between a fourth stop position of the irradiation light at the second end of the tube furnace and the inner cavity wall of the tube furnace;

[0116] S230: Determine whether the tube furnace is deformed according to the first spacing and the second spacing.

[0117] Specifically, when the present application performs deformation detection on a tube furnace, it is also possible to detect whether the tube furnace is deformed according to the state of the tube furnace at different times. The first moment can be understood as the moment when the tube furnace is not deformed, the second moment can be understood as the moment when the tube furnace is about to be deformed or has been deformed, the reflection point corresponding to the third stop position is the same as the reflection point corresponding to the fourth stop position, and the position of the light emitting device is controlled not to change at the first moment and the second moment, and then the difference between the first spacing and the second spacing can be used to determine whether the tube furnace is deformed between the first moment and the second moment.

[0118] In this embodiment, the third stop position and the fourth stop position can be understood as the stop points of the irradiated light at the second end at the first moment and the second moment, respectively; the first spacing can be calculated based on the distance between the third stop position and the center point at the second end and the inner diameter of the tube furnace, and the second spacing can be calculated based on the distance between the fourth stop position and the center point at the second end and the inner diameter and length of the tube furnace. Then, by calculating the spacing difference between the first spacing and the second spacing, and judging whether the spacing difference exceeds the preset second threshold, it is determined whether the tube furnace is deformed.

[0119] In some embodiments, Figure 6 As shown, step S230 includes steps S231, S232 and S233.

[0120] S231, determining a second offset between the third stop position and the fourth stop position according to the first spacing and the second spacing;

[0121] S232: if the second offset is less than a preset second threshold, control the light emitting device to move at least once in the circumferential direction to obtain a fifth stop position of the irradiation light at the second end of the tube furnace;

[0122] S233. Determine whether the tubular furnace is deformed according to the third stop position and the fifth stop position.

[0123] In this embodiment, at the first moment and the second moment, if the second distance after reflection from the same reflection point to the second end does not exceed the preset second threshold, it cannot be determined that the tube furnace has not been deformed at this time, so it is necessary to further confirm whether the tube furnace is deformed.

[0124] Specifically, the light emitting device can be controlled to move at least once in a circular direction to obtain a fifth stop position of the irradiated light at the second end of the tube furnace, and then a plurality of second offsets between the fifth stop position and a preset position (the center point of the second end) are obtained. By judging whether the plurality of second offsets exceed a preset second threshold, it can be determined whether the tube furnace is deformed.

[0125] In some embodiments, Figure 7 As shown, the deformation detection method of the tube furnace also includes: steps S310, S320, S330 and S340.

[0126] S310, at a third moment, performing pitch adjustment on the light emitting device to obtain a sixth stop position at the second end where the irradiated light is reflected from a plurality of reflection points on the inner cavity wall; wherein the plurality of reflection points are arranged along the axial direction of the tube furnace;

[0127] S320, determining first position information of light emitting devices corresponding to a plurality of reflection points;

[0128] S330, at a fourth moment, based on the first position information, obtaining a seventh stop position of the irradiation light at the second end;

[0129] S340: Determine whether the tube furnace is deformed according to the sixth stop position and the seventh stop position.

[0130] Specifically, when the present application performs deformation detection on the tube furnace, it can also determine whether the tube furnace is deformed according to the state of the tube furnace at different times and the stop position at the second end based on multiple reflection points along the axial direction on the inner cavity wall of the tube furnace. Among them, the third moment can be understood as the moment when the tube furnace is not deformed, and the fourth moment can be understood as the moment when the tube furnace is about to be deformed or has been deformed.

[0131] In this embodiment, the present application can predetermine multiple reflection points at the third moment, and the irradiation light can be reflected at the multiple reflection points to the sixth stop position of the second end (such as the center point of the second end), and then determine the position of the irradiation light corresponding to each reflection point, that is, the position of the light emitting device. Then, at the fourth moment, based on the position of the light emitting device corresponding to each reflection point, that is, the first position information, the light emitting device is started at the first end to emit light, and the light is emitted into the inner cavity of the tube furnace, and at the same time, it is reflected through the inner cavity wall of the tube furnace to the second end, that is, the seventh stop position. Then, based on the offset between the sixth stop position and the seventh stop position, it can be determined whether the tube furnace is deformed.

[0132] In some embodiments, Figure 8 As shown, step S340 includes steps S341, S342 and S343.

[0133] S341, obtaining a third offset between a sixth stop position and a seventh stop position corresponding to each reflection point at the third moment and the fourth moment respectively;

[0134] S342: If each third offset is greater than or equal to a preset third threshold, determine that the tube furnace is deformed;

[0135] S343: If each third offset is smaller than a preset third threshold, it is determined that the tube furnace is not deformed.

[0136] Specifically, each reflection point has a third offset between the sixth stop position and the seventh stop position corresponding to the third moment and the fourth moment, that is, there are multiple third offsets. After obtaining the multiple third offsets, the relationship between each third offset and the preset third threshold can be judged, and then it can be determined whether the tubular furnace is deformed.

[0137] It should be noted that the first threshold, the second threshold and the third threshold mentioned in the present application can be understood as the deformation of the tube furnace when the wafer cannot be taken out from the inner cavity of the tube furnace.

[0138] In some embodiments, Fig. 9 As shown, the deformation detection method of the tube furnace further includes: steps S410 and S420.

[0139] S410, if the first end and the second end of the tube furnace are both open, determine the moving track of the irradiation light at the second end according to the photoelectric sensor placed at the second end;

[0140] S420, determining whether the tube furnace is deformed according to the moving trajectory.

[0141] In this embodiment, both ends of the tube furnace are open, that is, the first end and the second end of the tube furnace are open, and both ends of the tube furnace are visible. In order to accurately detect whether the tube furnace is deformed, the present application can place a light-emitting device at the first end and a photoelectric sensor at the second end. When the tube furnace needs to be deformed, it is only necessary to adjust the pitch of the light-emitting device at the first end and move it in a circular direction. At this time, the photoelectric sensor can detect the moving trajectory of the irradiated light at the second end. By comparing the moving trajectory with the moving trajectory before deformation, it can be determined whether the tube furnace is deformed.

[0142] It should be noted that the present application can also place a photoelectric sensor at the first end of the tube furnace and a light-emitting device at the second end of the tube furnace. The placement method can be selected according to the actual application and is not specifically limited in the present application.

[0143] In some embodiments, Fig.10 As shown, the deformation detection method of the tube furnace further includes: steps S430, S440, S450 and S460.

[0144] S430, if the first end of the tube furnace is open, after the irradiated light is reflected from the inner cavity wall to the center position of the second end of the tube furnace, obtaining a third distance between the light outlet of the light emitting device and the axis of the tube furnace;

[0145] S440, determining second position information of a reflection point of the irradiation light on the inner cavity wall according to the third spacing, the inner diameter and the length of the tube furnace;

[0146] S450, determining, according to the second position information, the inner diameter and the length of the tube furnace, a fourth offset of the irradiation light at the center position after the light emitting device moves along the circumferential direction based on the reflection point;

[0147] S460: Determine whether the tube furnace is deformed according to the fourth offset.

[0148] In this embodiment, the tube furnace may have only one end open, that is, the first end open. At this time, only one end of the tube furnace is visible, and thus the photoelectric sensor cannot detect the moving trajectory of the irradiation light at the second end at the second end. At this time, it is necessary to obtain the third distance between the light outlet of the light emitting device and the axis of the tube furnace after the irradiation light is reflected from the inner cavity wall to the center position of the second end of the tube furnace. The distance h1 between the light outlet and the inner cavity wall can be calculated through the radius of the inner cavity of the tube furnace and the third distance. At the same time, since the length of the tube furnace and the radius of the inner cavity are known, the public method provided in this application can be used to calculate the distance h1 between the light outlet and the inner cavity wall. The formula h1 / h2=x1 / x2 calculates the distances between the reflection point and the first end and the second end, namely x1 and x2, respectively, which can also be understood as the second position information mentioned in the present application. Then, the light emitting device can be controlled to move in the circumferential direction to obtain multiple stay points at the second end. The multiple stay points can be calculated according to x1, x2 and h1, that is, they can be characterized by the distances between the stay points and the inner cavity wall. Then, based on the fourth offset between the multiple stay points and the center position of the second end, it can be determined whether each fourth offset exceeds the preset offset to determine whether the tube furnace is deformed.

[0149] In some embodiments, the present application further provides a deformation detection system, which includes the deformation detection method or deformation detection component of the tube furnace provided by the present application.

[0150] It should be noted that the pitch adjustment of the light-emitting device and the radial movement along the tube furnace can be performed by a controller or manually; the circumferential movement of the rotating arm along the tube furnace can also be performed by a controller or manually. The specific implementation method can be selected according to the actual application, and this application does not make any specific limitation.

[0151] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A method for detecting deformation of a tube furnace, characterized in that: include: The light emitting device in the deformation detection assembly is adjusted so that the illumination light emitted by the light emitting device is emitted from the first end of the tube furnace into the inner cavity of the tube furnace, and is reflected at the inner cavity wall of the tube furnace to a preset position at the second end of the tube furnace; Controlling the light emitting device to move at least once along the circumferential direction of the tube furnace to obtain a first stop position of the irradiation light at the second end each time; Whether the tube furnace is deformed is determined according to the preset position and the first stop position.

2. The deformation detection method of a tube furnace according to claim 1, characterized in that: The step of determining whether the tube furnace is deformed according to the preset position and the first stop position includes: Acquire a first offset between a first stop position of the irradiation light and the preset position after the light emitting device moves along the circumferential direction of the tube furnace each time; If the first offset after each movement is less than a preset first threshold, control the light emitting device to move along the radial direction of the tube furnace, and perform pitch adjustment on the light emitting device so that the irradiation light is reflected by the inner cavity wall to the preset position; Controlling the light emitting device to move at least once along the circumferential direction to obtain a second stop position of the illumination light at the second end each time; Whether the tube furnace is deformed is determined according to the preset position and the second stop position.

3. The deformation detection method of a tube furnace according to claim 1, characterized in that: The method further comprises: At a first moment, obtaining a first distance between a third stop position of the irradiation light at the second end of the tube furnace and an inner cavity wall of the tube furnace; At a second moment, obtaining a second distance between a fourth stop position of the irradiation light at the second end of the tube furnace and an inner cavity wall of the tube furnace; Whether the tube furnace is deformed is determined according to the first distance and the second distance.

4. The deformation detection method of a tube furnace according to claim 3, characterized in that: The step of determining whether the tube furnace is deformed according to the first spacing and the second spacing includes: Determining a second offset between the third stop position and the fourth stop position according to the first distance and the second distance; If the second offset is less than a preset second threshold, controlling the light emitting device to move at least once along the circumferential direction to obtain a fifth stop position of the irradiation light at the second end of the tube furnace; Whether the tube furnace is deformed is determined according to the preset position and the fifth stop position.

5. The deformation detection method of a tube furnace according to claim 1, characterized in that: The method further comprises: At a third moment, the light emitting device is pitch-adjusted to obtain the illumination light reflected from a plurality of reflection points on the inner cavity wall to a sixth stop position at the second end; wherein the plurality of reflection points are arranged along the axial direction of the tube furnace; Determine first position information of light emitting devices corresponding to the plurality of reflection points; At a fourth moment, based on the first position information, acquiring a seventh stop position of the illumination light at the second end; Whether the tube furnace is deformed is determined according to the sixth stop position and the seventh stop position.

6. The deformation detection method of a tube furnace according to claim 5, characterized in that: The step of determining whether the tube furnace is deformed according to the sixth stop position and the seventh stop position includes: Obtaining a third offset between a sixth stop position and a seventh stop position corresponding to each of the reflection points at the third moment and the fourth moment respectively; If each of the third offsets is greater than or equal to a preset third threshold, determining that the tube furnace is deformed; If each of the third offsets is smaller than the third threshold, it is determined that the tube furnace is not deformed.

7. The method for detecting deformation of a tube furnace according to any one of claims 1 to 6, characterized in that: The method further comprises: If both the first end and the second end of the tube furnace are open, determining a moving track of the irradiation light at the second end according to a photoelectric sensor placed at the second end; Whether the tube furnace is deformed is determined according to the movement trajectory.

8. The method for detecting deformation of a tube furnace according to any one of claims 1 to 6, characterized in that: The method further comprises: If the first end of the tube furnace is open, after the irradiation light is reflected from the inner cavity wall to the center position of the second end of the tube furnace, a third distance between the light outlet of the light emitting device and the axis of the tube furnace is obtained; Determining second position information of a reflection point of the irradiation light on the inner cavity wall according to the third spacing, the inner diameter and the length of the tube furnace; Determine, according to the second position information, the inner diameter and the length of the tube furnace, a fourth offset of the irradiation light at the center position after the light emitting device moves along the circumferential direction based on the reflection point; It is determined whether the tube furnace is deformed according to the fourth offset.

9. A deformation detection assembly for a tube furnace, characterized in that: In the deformation detection method for a tube furnace according to any one of claims 1 to 8, the deformation detection component comprises: A light emitting device, configured to be adjusted in elevation and rotate along the circumference of the tube furnace; The illumination light emitted by the light emitting device is configured to be emitted from the first end of the tube furnace into the inner cavity of the tube furnace, and reflected at the inner cavity wall of the tube furnace to the second end of the tube furnace, wherein the first end and the second end are the corresponding two ends of the tube furnace respectively.

10. A deformation detection system, characterized in that: The invention comprises the deformation detection method of a tube furnace according to any one of claims 1 to 8, or the deformation detection assembly of a tube furnace according to claim 9.

Images