A control system for a vacuum coater

Abstract

The present application relates to the technical field of vacuum coating, and discloses a control system for a vacuum coating machine, which comprises a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module and a coating parameter control analysis module. The pressure value at each monitoring time point in each control period is accurately collected by a capacitive pressure sensor, and the average pressure value is calculated, so that the overall level of the vacuum pressure in the period can be intuitively reflected, and basic data for determining whether the vacuum degree is in a proper range is provided. The active monitoring and prevention mechanism for the vacuum coating machine not only ensures the continuity and stability of the coating production, but also provides a scientific basis for preventive maintenance of the equipment, prolongs the service life of the equipment, reduces the probability of sudden equipment failure, improves the reliability, efficiency and intelligent level of the entire vacuum coating production system, helps enterprises improve competitiveness in the field of coating processing, reduces production cost and improves product quality.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, specifically to a control system for a vacuum coating machine. Background Technology

[0002] Vacuum coating technology, as an advanced process for preparing thin films on material surfaces, plays a crucial role in numerous fields such as optics, electronics, and mechanical protection. In optics, vacuum coating can produce antireflective and reflective films, significantly improving the performance of optical components and finding wide application in camera lenses, telescope lenses, and various optical instruments. In the electronics industry, it can provide conductive, insulating, and protective thin films for electronic devices, aiding in the manufacturing and performance optimization of integrated circuits and displays. In mechanical protection, the resulting wear-resistant and corrosion-resistant films can extend the service life of mechanical parts and reduce equipment maintenance costs. With the rapid development of modern technology, the requirements for the quality and efficiency of vacuum coating are becoming increasingly stringent, prompting continuous evolution and innovation in related technologies.

[0003] Traditional vacuum coating machine control systems can only perform simple pressure monitoring and coarse control in terms of vacuum level control. They are unable to accurately grasp the dynamic changes in vacuum level and cannot effectively deal with problems such as minor air leaks and fluctuations in vacuum pump performance. This leads to an unstable vacuum environment, which in turn makes the coating process prone to quality defects such as impurities in the film layer and uneven film thickness. This seriously affects key indicators such as the optical performance, electrical performance, and adhesion of the product, reducing the yield and reliability of the product. In terms of gas flow control, there is a lack of ability to accurately match and analyze the flow rates of various inlet and outlet gases. In reactive coating processes, the inability to accurately control the gas flow rate based on the stoichiometry of the coating reaction can easily cause the film composition to deviate from the expected value, resulting in the film performance failing to meet the actual application requirements. This limits the application of coating technology in some high-end fields with strict requirements for film composition. Summary of the Invention

[0004] In view of the above situation and to overcome the defects of the prior art, the present invention provides a control system for a vacuum coating machine to solve the aforementioned technical defects.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solution: a control system for a vacuum coating machine, comprising: a vacuum stability analysis module, a gas flow matching analysis module, a coating environment control analysis module, and a coating parameter control analysis module;

[0006] The vacuum stability analysis module performs comprehensive calculations and analyses based on the pressure values ​​and vacuum change rates at each monitoring time point during each control period of the vacuum coating machine during operation, and obtains the vacuum stability index of the vacuum coating machine during each control period during operation.

[0007] The gas flow matching analysis module performs comprehensive calculation and analysis based on the inlet flow and outlet flow of various types of gas at each monitoring time point during each control period of the vacuum coating machine during operation, and obtains the flow matching status index of the vacuum coating machine for each control period.

[0008] The coating environment control and analysis module performs comprehensive calculation and analysis based on the vacuum stability state index and flow matching state index of the vacuum coating machine for each control period, and obtains the coating environment control coefficient of the vacuum coating machine for each control period.

[0009] The coating parameter control and analysis module performs comprehensive calculations and analyses based on the temperature parameters and film thickness parameters at each monitoring time point during the operation of the vacuum coating machine, and obtains the comprehensive coating control coefficient of the vacuum coating machine for each control period.

[0010] Furthermore, it also includes: an early warning and control module and a database;

[0011] The early warning control module performs corresponding early warning operations based on the basic environmental abnormality signals and coating status abnormality signals of the vacuum coating machine for each control period.

[0012] The database is used to store the coating control analysis parameters for each monitoring time point in each control period of the vacuum coating machine.

[0013] Furthermore, the method for comprehensively calculating and analyzing the pressure values ​​and vacuum change rates at each monitoring time point during each control period of the vacuum coating machine's operation is as follows:

[0014] The pressure values ​​of the vacuum coating machine at each monitoring time point in each control period are monitored and collected in real time by a capacitive pressure sensor. The pressure values ​​of the vacuum coating machine at each monitoring time point in each control period are obtained and denoted as YPij. Where i = 1, 2, ..., n, i represents the number of each control period and n represents the total number of control period numbers, j = 1, 2, ..., m, j represents the number of each monitoring time point and m represents the total number of monitoring time point numbers.

[0015] The average pressure of the vacuum coating machine for each control period is obtained by summing the pressure values ​​at each monitoring time point and dividing by m monitoring time points. This average pressure is denoted as:

[0016] The vacuum degree change rate for each monitoring time point in each control period of the vacuum coating machine is calculated by comparing the pressure difference between two adjacent monitoring time points with the time interval between those two points. This ratio is denoted as ZBij. Simultaneously, the vacuum degree change rates for each control period are summed and divided by m-1 times to obtain the average vacuum degree change rate for each control period, denoted as ZBij.

[0017] Based on the above parameters, the stable value of vacuum pressure YWi and the stable value of vacuum change ZWi for each control period of the vacuum coating machine are calculated.

[0018] Furthermore, by comprehensively calculating and analyzing the stable values ​​of vacuum pressure and vacuum change for each control period of the vacuum coating machine, the vacuum stability index for each control period of the vacuum coating machine is obtained. The specific calculation and analysis method is as follows:

[0019] According to the formula The vacuum stability index SWi, YWc, and ZWc of the vacuum coating machine for each control period are calculated. They represent the threshold values ​​set for the vacuum pressure stability value and vacuum change stability value of the vacuum coating machine for each control period, respectively. The specific threshold values ​​are set manually based on historical data.

[0020] If the value of the vacuum stability index of the vacuum coating machine for a certain control period exceeds 0.5, it indicates that the vacuum system stability of the vacuum coating machine for that control period is abnormal, and a vacuum stability abnormality signal is generated. At this time, the control system of the vacuum coating machine issues an abnormal alarm. Conversely, it indicates that the vacuum system of the vacuum coating machine for that control period is stable.

[0021] Furthermore, the following method is used to comprehensively calculate and analyze the inlet and outlet flow rates of various types of inlet gases at each monitoring time point during the operation of the vacuum coating machine:

[0022] Obtain the types of intake gas at each monitoring time point in each control period of the vacuum coating machine, denoted as h, where h = 1, 2, ..., g, and g represents the total number of intake gas types;

[0023] The inlet and outlet flow rates of various types of gas in the vacuum coating machine at each monitoring time point during each control period are monitored and collected in real time using a mass flow sensor. The inlet and outlet flow rates of various types of gas in the vacuum coating machine at each monitoring time point during each control period are recorded as JQijh and CQijh, respectively.

[0024] According to the formula The flow matching state index CGi for each control period of the vacuum coating machine is calculated, and Rh represents the proportion of the h-th type of intake gas consumed in the coating reaction.

[0025] Furthermore, if the flow matching state index of the vacuum coating machine for a certain control period is less than 0.1, it indicates that the gas environment in the coating chamber of the vacuum coating machine is stable during the corresponding control period. Conversely, it indicates that the gas environment in the coating chamber of the vacuum coating machine is unstable during the corresponding control period. In the preparation of oxide thin films by magnetron sputtering, this may lead to defects in the thin film composition and generate abnormal gas environment signals.

[0026] Furthermore, the comprehensive calculation and analysis method based on the vacuum stability index and flow matching index of the vacuum coating machine for each control period is as follows:

[0027] According to the formula The coating environment control coefficient CHi for each control period of the vacuum coating machine is calculated. When the coating process is started, if the coating environment control coefficient for each control period of the vacuum coating machine is less than 0.2, it means that the basic environment of the vacuum coating machine for the corresponding control period meets the coating processing requirements. Otherwise, it means that the basic environment of the vacuum coating machine for the corresponding control period does not meet the coating processing requirements, and an abnormal signal of the basic environment is generated.

[0028] By recording the coating environment control coefficients of the vacuum coating machine for each control period in real time, when the coating environment control coefficients of the vacuum coating machine for each control period show an upward trend, it indicates that the basic environment is deteriorating. Before the coating environment control coefficients of the vacuum coating machine for each control period reach the threshold, the vacuum stability index and flow matching index of the vacuum coating machine for each control period are analyzed.

[0029] Furthermore, the method for comprehensively calculating and analyzing the temperature parameters and film thickness parameters at each monitoring time point during each control period of the vacuum coating machine during operation is as follows:

[0030] The temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are monitored and collected in real time by thermocouple sensors. The temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are obtained and denoted as DTijk and JTijk, respectively, k = 1, 2, ..., f, where k represents the number of each measurement point and f represents the total number of measurement point numbers.

[0031] The film thickness parameters of the vacuum coating machine at each monitoring time point in each control period are monitored and collected in real time by several film thickness sensors. The coating thickness of the vacuum coating machine at each monitoring time point in each control period is obtained and denoted as DHijp, p = 1, 2, ..., d, where p represents the number of each film thickness sensor and d represents the total number of film thickness sensor numbers.

[0032] Furthermore, according to the formula Calculate the temperature uniformity index CTi for each control period of the vacuum coating machine. This represents the average temperature of the coating material during each control period of the vacuum coating machine.

[0033] According to the formula The film thickness uniformity index CDi for each control period of the vacuum coating machine was calculated. This represents the average temperature of the coating material during each control period of the vacuum coating machine.

[0034] According to the formula The film thickness growth rate index CSi for each control period of the vacuum coating machine is calculated, and DHijp0 represents the initial film thickness corresponding to the vacuum coating machine.

[0035] By multiplying the average temperature of the coating material, the average temperature of the coating material, and the film thickness growth rate index of the vacuum coating machine for each control period by the corresponding set weight coefficients, and then summing the weighted results of the three, the comprehensive coating control coefficient CPi of the vacuum coating machine for each control period is obtained.

[0036] Furthermore, if the comprehensive control coefficient of the vacuum coating machine for a certain control period exceeds 0.3, it indicates that the coating thickness of the vacuum coating machine deviates from the control period, generating an abnormal coating status signal. At this time, the average temperature of the coating material, the average temperature of the coating material, and the film thickness growth rate index in the comprehensive control coefficient of the vacuum coating machine for each control period are analyzed. If the average temperature of the coating material exceeds the safety threshold, it indicates poor temperature uniformity, and the temperature control device of the substrate needs to be adjusted. If the average temperature of the coating material exceeds the safety threshold, it indicates that the operation mode of the coating substrate needs to be adjusted. If the film thickness growth rate index deviates from the set value, it indicates that parameters such as evaporation source power and gas flow rate need to be adjusted. Conversely, it indicates that the coating thickness of the vacuum coating machine is stable for the control period.

[0037] The beneficial effects of this invention are:

[0038] 1. By accurately collecting pressure values ​​at each monitoring time point during different control periods using capacitive pressure sensors and calculating the average pressure, the system can intuitively reflect the overall vacuum pressure level within that period, providing fundamental data for determining whether the vacuum level is within a suitable range. The ratio of the pressure difference between adjacent monitoring time points to the time interval is calculated to obtain the vacuum level change rate, and its average value is calculated. This allows for precise monitoring of the dynamic trend of vacuum level changes and timely detection of abnormal fluctuations in the vacuum system. Based on specific formulas, stable vacuum pressure values ​​and stable vacuum change values ​​are calculated separately. The vacuum stability index is then calculated by combining these two values, and the threshold can be manually set based on historical data. This allows the system to flexibly assess vacuum stability according to different coating process requirements. It not only monitors the vacuum state in real time during the coating process, effectively avoiding coating quality problems caused by vacuum instability, such as uneven film layers and impurity contamination, but also helps improve the repeatability and stability of the coating process, providing reliable technical support for large-scale, high-precision coating production. Furthermore, it allows for preventative maintenance of the vacuum system based on the changing trend of the vacuum stability index, extending equipment lifespan and reducing equipment maintenance costs.

[0039] 2. By setting a clear threshold for the vacuum stability index and judging based on its value, an abnormal signal is generated and an alarm is issued in a timely manner when the index exceeds 0.5. This allows operators to quickly know that there is a problem with the stability of the vacuum system, so that they can take immediate measures to troubleshoot the fault, such as checking the operating status of the vacuum pump and the integrity of the sealing components. This avoids serious degradation of coating quality or even coating failure caused by continuous vacuum instability, effectively reducing the defect rate and waste of raw materials. The degree to which the index approaches 0 and 1 directly reflects the stability of the control system. On the one hand, it makes it easy for operators to quickly assess the overall performance of the current vacuum system. On the other hand, it provides a quantitative basis for long-term process optimization. Process parameters or equipment maintenance plans can be adjusted based on index data at different times, which helps to improve the overall operating efficiency of the vacuum coating machine and the consistency of coating quality, ensuring the reliability and controllability of the production process. At the same time, it also lays a good foundation for intelligent management and remote monitoring of equipment, which is conducive to realizing an unattended automated production environment, reducing labor costs and improving the accuracy and flexibility of production.

[0040] 3. By accurately acquiring the types of inlet gas and the corresponding inlet and outlet flow rates at each monitoring time point during each control period, detailed data are provided for a comprehensive assessment of gas flow matching. The flow matching index calculated based on this provides a direct and quantitative reflection of the degree of gas flow matching. In different coating processes, such as preparing titanium nitride thin films or oxide thin films by magnetron sputtering, the index is calculated based on the reaction consumption ratio determined by a specific reaction formula, making the index more closely match actual process requirements. When the flow matching index is less than 0.1, the gas environment is considered stable, helping to ensure that the coating process is carried out in a stable gas environment. This effectively improves the uniformity and accuracy of the film's composition, reduces film defects caused by gas flow mismatch, and increases product yield. When the index exceeds the range, a gas environment anomaly signal is generated in a timely manner, allowing operators to quickly detect problems and adjust the inlet flow rate or check the gas supply system, vacuum pump, and other related equipment. This avoids a large number of defective products caused by unstable gas environments, ensuring the continuity and stability of production. It also provides crucial data support for process optimization and troubleshooting, which is conducive to reducing production costs, improving production efficiency, and promoting the development of vacuum coating technology towards greater precision and efficiency.

[0041] 4. By calculating the coating environment control coefficient through the comprehensive vacuum stability index and flow matching index, the basic environmental conditions of the vacuum coating machine can be comprehensively and accurately measured. At the start of the coating process, a threshold of 0.2 is used to determine whether the basic environment meets the requirements. This effectively avoids starting coating under adverse conditions, reducing coating failures and material waste caused by poor initial conditions, and ensuring that the coating process is reliable from the outset. Real-time recording and trend analysis of the coating environment control coefficient are crucial during the coating process. An upward trend can provide timely warnings of deteriorating basic conditions, allowing operators to intervene in advance based on the specific conditions of the vacuum stability index and flow matching index. For example, checking vacuum pumps or sealing components to address vacuum fluctuations, and adjusting mass flow controllers or gas pipelines to address abnormal gas flow matching, can effectively prevent problems such as decreased coating quality and film defects caused by deterioration of the basic environment. This proactive monitoring and prevention mechanism not only ensures the continuity and stability of coating production but also provides a scientific basis for preventive maintenance of equipment, extends equipment lifespan, reduces the probability of sudden equipment failures, and improves the reliability, efficiency, and intelligence of the entire vacuum coating production system. This helps companies enhance their competitiveness in the coating processing field, reduce production costs, and improve product quality. Attached Figure Description

[0042] The invention will now be further described with reference to the accompanying drawings.

[0043] Figure 1This is a schematic diagram of a control system for a vacuum coating machine according to an embodiment of the present invention. Detailed Implementation

[0044] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are also within the scope of protection of the present invention.

[0045] As indicated in this invention and the claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0046] While this invention makes various references to certain modules in systems according to embodiments of the invention, any number of different modules can be used and run on user terminals and / or servers. The modules are merely illustrative, and different aspects of the systems and methods may use different modules.

[0047] This invention uses flowcharts to illustrate the operations performed by the system according to embodiments of the invention. It should be understood that the preceding or following operations are not necessarily performed precisely in sequence. Instead, various steps can be processed in reverse order or simultaneously, as needed. Furthermore, other operations can be added to these processes, or one or more steps can be removed from them.

[0048] Hereinafter, exemplary embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments of the present invention. It should be understood that the present invention is not limited to the exemplary embodiments described herein.

[0049] Example 1:

[0050] Please see Figure 1 As shown, a control system for a vacuum coating machine includes: a vacuum stability analysis module, a gas flow matching analysis module, a coating environment control analysis module, and a coating parameter control analysis module.

[0051] The vacuum stability analysis module performs comprehensive calculations and analyses based on the pressure values ​​and vacuum change rates at each monitoring time point during the operation of the vacuum coating machine. This yields the vacuum stability index for each control period during the operation of the vacuum coating machine. The specific calculation and analysis method is as follows:

[0052] The pressure values ​​of the vacuum coating machine at each monitoring time point in each control period are monitored and collected in real time by a capacitive pressure sensor. The pressure values ​​of the vacuum coating machine at each monitoring time point in each control period are obtained and denoted as YPij. Where i = 1, 2, ..., n, i represents the number of each control period and n represents the total number of control period numbers, j = 1, 2, ..., m, j represents the number of each monitoring time point and m represents the total number of monitoring time point numbers.

[0053] The average pressure of the vacuum coating machine for each control period is obtained by summing the pressure values ​​at each monitoring time point and dividing by m monitoring time points. This average pressure is denoted as YPi.

[0054] The vacuum degree change rate for each monitoring time point in each control period of the vacuum coating machine is calculated by comparing the pressure difference between two adjacent monitoring time points with the time interval between those two points. This ratio is denoted as ZBij. Simultaneously, the vacuum degree change rates for each control period are summed and divided by m-1 times to obtain the average vacuum degree change rate for each control period, denoted as ZBij.

[0055] According to the formula Calculate the stable vacuum pressure value YWi for each control period of the vacuum coating machine;

[0056] According to the formula Calculate the stable value ZWi of vacuum change for each control period of the vacuum coating machine;

[0057] Based on the above calculations and analyses of the stable vacuum pressure and vacuum change values ​​for each control period of the vacuum coating machine, the vacuum stability index for each control period of the vacuum coating machine is obtained. The specific calculation and analysis method is as follows:

[0058] According to the formula The vacuum stability index SWi, YWc, and ZWc of the vacuum coating machine for each control period are calculated. These represent the threshold values ​​set for the vacuum pressure stability value and vacuum change stability value of the vacuum coating machine for each control period, respectively. The specific threshold values ​​are set manually based on historical data.

[0059] If the vacuum stability index of the vacuum coating machine for a certain control period exceeds 0.5, it indicates that the vacuum system stability of the vacuum coating machine for that control period is abnormal, generating a vacuum stability abnormality signal. At this time, the control system of the vacuum coating machine issues an abnormal alarm. Conversely, it indicates that the vacuum system of the vacuum coating machine for that control period is stable. It should be noted that the closer the vacuum stability index of the vacuum coating machine for each control period is to 0, the more stable the control system of the vacuum coating machine is. Conversely, the closer the vacuum stability index of the vacuum coating machine for each control period is to 1, the more unstable factors exist in the control system of the vacuum coating machine for most of the time.

[0060] In one specific embodiment, this invention uses a capacitive pressure sensor to accurately collect pressure values ​​at each monitoring time point during each control period and calculates the average pressure. This provides a direct reflection of the overall vacuum pressure level within that period, offering fundamental data for determining whether the vacuum level is within a suitable range. The vacuum level change rate is calculated by ratioing the pressure difference between adjacent monitoring time points to the time interval, and the average value is calculated. This allows for precise understanding of the dynamic trend of vacuum level changes and timely detection of abnormal fluctuations in the vacuum system. The stable vacuum pressure value and stable vacuum change value are calculated using specific formulas, and then the vacuum stability index is calculated by combining both. The threshold value can be manually set based on historical data. This allows the system to flexibly assess vacuum stability according to different coating process requirements. It not only monitors the vacuum state in real time during the coating process, effectively avoiding coating quality problems caused by vacuum instability, such as uneven film layers and impurity contamination, but also helps improve the repeatability and stability of the coating process, providing reliable technical support for large-scale, high-precision coating production. Furthermore, it allows for preventative maintenance of the vacuum system based on the changing trend of the vacuum stability index, extending equipment lifespan and reducing maintenance costs.

[0061] Furthermore, by setting a clear threshold for the vacuum stability index and judging based on its value, an abnormal signal is generated and an alarm is issued in a timely manner when the index exceeds 0.5. This allows operators to quickly know that there is a problem with the stability of the vacuum system, and thus take immediate measures to troubleshoot the fault, such as checking the operating status of the vacuum pump and the integrity of the sealing components. This avoids serious degradation of coating quality or even coating failure caused by continuous vacuum instability, effectively reducing the defect rate and waste of raw materials. The degree to which the index approaches 0 and 1 directly reflects the stability of the control system. On the one hand, it makes it easy for operators to quickly assess the overall performance of the current vacuum system. On the other hand, it provides a quantitative basis for long-term process optimization. Process parameters or equipment maintenance plans can be adjusted based on index data at different times, which helps to improve the overall operating efficiency of the vacuum coating machine and the consistency of coating quality, ensuring the reliability and controllability of the production process. At the same time, it also lays a good foundation for intelligent management and remote monitoring of equipment, which is conducive to realizing an unattended automated production environment, reducing labor costs and improving the accuracy and flexibility of production.

[0062] The gas flow matching analysis module performs comprehensive calculations and analyses based on the inlet and outlet flow rates of various types of inlet gases at each monitoring time point during each control period of the vacuum coating machine's operation. This yields the flow matching status index for each control period of the vacuum coating machine. The specific calculation and analysis method is as follows:

[0063] Obtain the types of intake gas at each monitoring time point in each control period of the vacuum coating machine, denoted as h, where h = 1, 2, ..., g, and g represents the total number of intake gas types;

[0064] The inlet and outlet flow rates of various types of gas in the vacuum coating machine at each monitoring time point during each control period are monitored and collected in real time using a mass flow sensor. The inlet and outlet flow rates of various types of gas in the vacuum coating machine at each monitoring time point during each control period are recorded as JQijh and CQijh, respectively.

[0065] According to the formula The flow matching state index CGi for each control period of the vacuum coating machine is calculated, where Rh represents the proportion of the h-th type of inlet gas consumed in the coating reaction. Specifically, when preparing titanium nitride thin films, if the inlet flow rates of nitrogen (N2) and titanium (Ti) source gas are JQ, ... N2 and JQ Ti According to the reaction formula 2Ti + N₂ → 2TiN, the proportion of nitrogen consumed in the reaction is R. N2 =1 / 2, the proportion of titanium source gas consumed in the reaction R Ti =1.

[0066] If the flow matching state index of the vacuum coating machine for a certain control period is less than 0.1, it indicates that the gas environment in the coating chamber of the vacuum coating machine is stable during the corresponding control period. Conversely, it indicates that the gas environment in the coating chamber of the vacuum coating machine is unstable during the corresponding control period. In the preparation of oxide thin films by magnetron sputtering, this may lead to defects in the thin film composition and generate abnormal gas environment signals.

[0067] In one specific embodiment, this invention accurately acquires the types of inlet gas and the corresponding inlet and outlet flow rates at each monitoring time point during each control period, providing detailed data for a comprehensive assessment of gas flow matching. The flow matching index calculated based on this provides a direct and quantitative reflection of the degree of gas flow matching. In different coating processes, such as preparing titanium nitride thin films or preparing oxide thin films by magnetron sputtering, the index is calculated based on the reaction consumption ratio determined by a specific reaction formula, making the index more closely match actual process requirements. When the flow matching index is less than 0.1, the gas environment is considered stable, which helps ensure the coating process. Performing the process in a stable gas environment effectively improves the uniformity and accuracy of the film quality, reduces film defects caused by gas flow mismatch, and increases product yield. When the index exceeds the range, it generates an abnormal gas environment signal in a timely manner, allowing operators to quickly detect problems and adjust the gas inlet flow or check the gas supply system, vacuum pump, and other related equipment. This avoids a large number of defective products caused by unstable gas environment, ensuring the continuity and stability of production. It also provides key data support for process optimization and troubleshooting, which is conducive to reducing production costs, improving production efficiency, and promoting the development of vacuum coating technology towards a more precise and efficient direction.

[0068] The coating environment control and analysis module performs comprehensive calculations and analyses based on the vacuum stability index and flow matching index of the vacuum coating machine for each control period, obtaining the coating environment control coefficients for each control period of the vacuum coating machine. The specific calculation and analysis method is as follows:

[0069] According to the formula The coating environment control coefficient CHi for each control period of the vacuum coating machine is calculated. When the coating process starts, if the coating environment control coefficient for each control period of the vacuum coating machine is less than 0.2, it means that the basic environment of the vacuum coating machine for that control period meets the coating processing requirements. Conversely, if the coefficient is greater than 0.2, it means that the basic environment of the vacuum coating machine for that control period does not meet the coating processing requirements, and an abnormal signal of the basic environment is generated. At this time, the vacuum coating machine issues an abnormal alarm of the basic environment and takes corresponding measures according to the specific situation of the vacuum stability coefficient and gas flow matching coefficient.

[0070] In addition, by recording the coating environment control coefficients of the vacuum coating machine for each control period in real time, when the coating environment control coefficients of the vacuum coating machine for each control period show an upward trend, it indicates that the basic environment is deteriorating. Before the coating environment control coefficients of the vacuum coating machine for each control period reach the threshold, the vacuum stability index and flow matching index of the vacuum coating machine for each control period are analyzed, so as to solve abnormal problems of the basic environment of the vacuum coating machine for each control period in advance.

[0071] In one specific embodiment, this invention calculates the coating environment control coefficient by comprehensively considering the vacuum stability index and the flow matching index. This allows for a comprehensive and accurate measurement of the basic environmental conditions of the vacuum coating machine. At the start of the coating process, a threshold of 0.2 is used to determine whether the basic environment meets the requirements. This effectively avoids starting coating under adverse conditions, reducing coating failures and material waste caused by poor initial conditions, and ensuring that the coating process is reliable from the outset. Real-time recording and trend analysis of the coating environment control coefficient are crucial during the coating process. An upward trend in the coefficient can provide timely warnings of deteriorating basic conditions. Operators can then use the vacuum stability index and the flow matching index to... By intervening in advance regarding specific conditions, such as checking vacuum pumps or sealing components for vacuum fluctuations, and adjusting mass flow controllers or gas pipelines for abnormal gas flow matching, the system effectively prevents problems such as decreased coating quality and film defects caused by deterioration of the basic environment. This proactive monitoring and prevention mechanism not only ensures the continuity and stability of coating production but also provides a scientific basis for preventive maintenance of equipment, extends equipment lifespan, reduces the probability of sudden equipment failures, and improves the reliability, efficiency, and intelligence of the entire vacuum coating production system. This helps companies enhance their competitiveness in the coating processing field, reduce production costs, and improve product quality.

[0072] The coating parameter control and analysis module performs comprehensive calculations and analyses based on the temperature and film thickness parameters at each monitoring time point during the operation of the vacuum coating machine. This yields the comprehensive coating control coefficients for each control period. The specific calculation and analysis method is as follows:

[0073] The temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are monitored and collected in real time by thermocouple sensors. The temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are obtained and denoted as DTijk and JTijk, respectively, k = 1, 2, ..., f, where k represents the number of each measurement point and f represents the total number of measurement point numbers.

[0074] The film thickness parameters of the vacuum coating machine at each monitoring time point in each control period are monitored and collected in real time by several film thickness sensors. The coating thickness of the vacuum coating machine at each monitoring time point in each control period is obtained and denoted as DHijp, p = 1, 2, ..., d, where p represents the number of each film thickness sensor and d represents the total number of film thickness sensor numbers.

[0075] According to the formula Calculate the temperature uniformity index CTi for each control period of the vacuum coating machine. This represents the average temperature of the coating material during each control period of the vacuum coating machine.

[0076] According to the formula The film thickness uniformity index CDi for each control period of the vacuum coating machine was calculated. This represents the average temperature of the coating material during each control period of the vacuum coating machine.

[0077] According to the formula The film thickness growth rate index CSi for each control period of the vacuum coating machine is calculated, and DHijp0 represents the initial film thickness corresponding to the vacuum coating machine.

[0078] By multiplying the average temperature of the coating material, the average temperature of the coating material, and the film thickness growth rate index of the vacuum coating machine for each control period by the corresponding set weight coefficients, and then summing the weighted results of the three, the comprehensive coating control coefficient CPi of the vacuum coating machine for each control period is obtained.

[0079] If the overall control coefficient of the vacuum coating machine for a certain control period exceeds 0.3, it indicates that the coating thickness of the vacuum coating machine deviates from the control period, generating an abnormal coating status signal. At this time, the average temperature of the coating material, the average temperature of the coating material, and the film thickness growth rate index in the overall control coefficient of the vacuum coating machine for each control period are analyzed. If the average temperature of the coating material exceeds the safety threshold, it indicates poor temperature uniformity, and the temperature control device of the substrate needs to be adjusted. If the average temperature of the coating material exceeds the safety threshold, it indicates that the operation mode of the coating substrate needs to be adjusted. If the film thickness growth rate index deviates from the set value, it indicates that parameters such as evaporation source power and gas flow rate need to be adjusted. Conversely, it indicates that the coating thickness of the vacuum coating machine is stable for the control period.

[0080] In a specific embodiment, the present invention uses thermocouple sensors and film thickness sensors to accurately collect data on the temperature of the coating material, the temperature of the substrate, and the film thickness at each monitoring time point during each control period. This provides a rich and accurate source of information for comprehensive control of the coating process. By calculating the temperature uniformity index, film thickness uniformity index, and film thickness growth rate index in detail, it is possible to deeply analyze the uniformity of temperature distribution, the consistency of film thickness, and the change law of film thickness over time during the coating process. Based on this calculated comprehensive control coefficient for coating, a threshold of 0.3 is used to determine whether there is a deviation in coating thickness. This enables quantitative assessment and real-time monitoring of coating quality. When the coefficient exceeds the standard, further analysis of each sub-index is conducted to identify the root cause of the problem. For example, if the problem is due to poor temperature uniformity (average temperature of the coating material exceeds the threshold), the substrate temperature control device can be adjusted accordingly. If the problem is due to film thickness uniformity (abnormal average temperature of the coating material), the operation mode of the coating substrate can be optimized. If the film thickness growth rate deviates, parameters such as the evaporation source power or gas flow rate can be adjusted. Through this refined analysis and control mechanism, film quality defects caused by abnormal temperature and film thickness during the coating process are effectively avoided. This significantly improves the pass rate and stability of coated products, ensures the continuity and efficiency of production, and provides data support and directional guidance for process optimization. This helps enterprises continuously improve their vacuum coating technology, reduce production costs, and enhance market competitiveness.

[0081] The early warning control module performs corresponding early warning operations based on the basic environmental abnormality signals and coating status abnormality signals of the vacuum coating machine for each control period.

[0082] The database is used to store the coating control analysis parameters for each monitoring time point in each control period of the vacuum coating machine.

[0083] The above formulas are all dimensionless calculations. The formulas are derived from software simulations based on a large amount of collected data to obtain the most recent real-world results. The size of the coefficients is to quantify each parameter to obtain a specific value. Regarding the size of the coefficients, it is acceptable as long as it does not affect the proportional relationship between the parameter and the quantized value.

[0084] Furthermore, those skilled in the art will understand that aspects of the present invention can be described and illustrated through several patentable types or situations, including any new and useful combination of processes, machines, products, or substances, or any new and useful improvements thereof. Accordingly, aspects of the present invention can be implemented entirely by hardware, entirely by software (including firmware, resident software, microcode, etc.), or by a combination of hardware and software. All of the above hardware or software may be referred to as a "data block," "module," "engine," "unit," "component," or "system." Furthermore, aspects of the present invention may be embodied as a computer product located on one or more computer-readable media, the product comprising computer-readable program code.

[0085] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in a common dictionary shall be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and not as having an idealized or highly formalized meaning, unless expressly defined herein.

[0086] The foregoing description is illustrative of the invention and should not be construed as limiting it. Although several exemplary embodiments of the invention have been described, those skilled in the art will readily understand that many modifications can be made to the exemplary embodiments without departing from the novel teachings and advantages of the invention. Therefore, all such modifications are intended to be included within the scope of the invention as defined in the claims. It should be understood that the foregoing description is illustrative of the invention and should not be construed as limiting it to the specific embodiments disclosed, and modifications to the disclosed embodiments and other embodiments are intended to be included within the scope of the appended claims. The invention is defined by the claims and their equivalents.

Claims

1. A control system for a vacuum coater, characterized by, The vacuum stability state analysis module, the gas flow matching analysis module, the coating environment control analysis module, and the coating parameter control analysis module are included. The vacuum stability state analysis module is based on the comprehensive calculation and analysis of the pressure values and the vacuum degree change rates of each monitoring time point in each control period during the working process of the vacuum coating machine to obtain the vacuum stability state index of each control period during the working process of the vacuum coating machine. The comprehensive calculation and analysis of the pressure values and the vacuum degree change rates of each monitoring time point in each control period during the working process of the vacuum coating machine is as follows: The pressure values of each monitoring time point in each control period of the vacuum coating machine are monitored and collected in real time by the capacitive pressure sensor to obtain the pressure values of each monitoring time point in each control period of the vacuum coating machine, denoted as YPij; wherein i=1, 2, …, n, i represents the number of each control period, n represents the total number of control period numbers, j=1, 2, …, m, j represents the number of each monitoring time point, and m represents the total number of monitoring time point numbers. The pressure average value of the vacuum coating machine corresponding to each control period is obtained by summing the pressure values of each monitoring time point corresponding to each control period in the vacuum coating machine and dividing by m monitoring time points, denoted as ; The vacuum degree change rate of each monitoring time point in each control period corresponding to the vacuum coating machine is obtained by ratio calculation of the pressure difference value of adjacent two monitoring time points and the time interval of adjacent two monitoring time points in each control period corresponding to the vacuum coating machine, and is recorded as ZBij. Meanwhile, the vacuum degree change rate of each control period corresponding to the vacuum coating machine is summed and divided by m-1 vacuum degree change rate calculation times, to obtain the average value of the vacuum degree change rate of each control period corresponding to the vacuum coating machine, and is recorded as ; The vacuum pressure stability value YWi and the vacuum change stability value ZWi of each control period of the vacuum coating machine are calculated respectively. The specific calculation and analysis method of the vacuum stability state index of each control period of the vacuum coating machine is as follows: According to the formula The vacuum stability index SWi corresponding to each control period of the vacuum coating machine is calculated, YWc and ZWc respectively represent the threshold values of the vacuum pressure stability value and the vacuum change stability value corresponding to each control period of the vacuum coating machine. If the value of the vacuum stability state index of a certain control period of the vacuum coating machine exceeds 0.5, it indicates that the vacuum system stability of the vacuum coating machine for that control period is abnormal, and a vacuum stability abnormality signal is generated. At this time, an abnormal alarm is issued in the vacuum coating machine control system. Otherwise, it indicates that the vacuum system of the vacuum coating machine for that control period is stable. The gas flow matching analysis module is based on the comprehensive calculation and analysis of the inlet flow and outlet flow of each type of inlet gas at each monitoring time point in each control period during the working process of the vacuum coating machine to obtain the flow matching state index of each control period of the vacuum coating machine. The coating environment control analysis module is based on the comprehensive calculation and analysis of the vacuum stability state index and the flow matching state index of each control period of the vacuum coating machine to obtain the coating environment control coefficient of each control period of the vacuum coating machine. The coating parameter control analysis module is based on the comprehensive calculation and analysis of the temperature parameters and film thickness parameters of each monitoring time point in each control period during the working process of the vacuum coating machine to obtain the coating comprehensive control coefficient of each control period of the vacuum coating machine.

2. The control system for a vacuum coating machine according to claim 1, wherein It also includes: The early warning control module and the database; The early warning control module performs corresponding early warning operations based on the basic environment abnormality signal and the coating state abnormality signal of each control period of the vacuum coating machine; The database is used to store the coating control analysis parameters of each monitoring time point in each control period of the vacuum coating machine.

3. The control system for a vacuum coating machine of claim 1, wherein, The comprehensive calculation and analysis of the inlet flow and outlet flow of each type of inlet gas at each monitoring time point in each control period during the working process of the vacuum coating machine is as follows: The types of inlet gas at each monitoring time point in each control period of the vacuum coating machine are obtained, denoted as h, and h=1, 2, …, g, g represents the total number of inlet gas types. The data of the inlet flow and outlet flow of each type of inlet gas at each monitoring time point in each control period of the vacuum coating machine are collected in real time by the mass flow sensor, and the data of the inlet flow and outlet flow of each type of inlet gas at each monitoring time point in each control period of the vacuum coating machine are obtained, which are respectively denoted as JQijh and CQijh; According to the formula The flow matching state index CGi corresponding to each control period of the vacuum coating machine is calculated, and Rh represents the reaction consumption proportion of the hth kind of inlet gas in the coating reaction.

4. The control system for a vacuum coating machine of claim 3, wherein, If the flow matching state index of the vacuum coating machine corresponding to a certain control period is less than 0.1, it indicates that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is stable, otherwise, it indicates that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is unstable, which may cause defects in the film composition when preparing oxide thin film by magnetron sputtering coating, and generate a gas environment abnormal signal.

5. The control system for a vacuum coating machine of claim 4, wherein, The comprehensive calculation and analysis of the vacuum stability state index and the flow matching state index of the vacuum coating machine corresponding to each control period is as follows: According to the formula The film coating environment control coefficient CHi corresponding to each control period of the vacuum coating machine is calculated. When the film coating process is started, if the film coating environment control coefficient CHi corresponding to each control period of the vacuum coating machine is less than 0.2, it indicates that the basic environment of the vacuum coating machine corresponding to the control period meets the film coating processing requirements, otherwise, it indicates that the basic environment of the vacuum coating machine corresponding to the control period does not meet the film coating processing requirements, and a basic environment abnormal signal is generated. The coating environment control coefficient of the vacuum coating machine corresponding to each control period is recorded in real time, and when the coating environment control coefficient of the vacuum coating machine corresponding to each control period shows an upward trend, it indicates that the basic environment is deteriorating. Before the coating environment control coefficient of the vacuum coating machine corresponding to each control period reaches the threshold value, the vacuum stability state index and the flow matching state index of the vacuum coating machine corresponding to each control period are analyzed.

6. The control system for a vacuum coating machine of claim 1, wherein, The comprehensive calculation and analysis of the temperature parameter and the film thickness parameter of the vacuum coating machine corresponding to each monitoring time point in each control period during the working process is as follows: The film material temperature and the substrate temperature of the vacuum coating machine corresponding to each monitoring time point in each control period are monitored and collected in real time by the thermocouple sensor, and the film material temperature and the substrate temperature of the vacuum coating machine corresponding to each monitoring time point in each control period are obtained, which are respectively denoted as DTijk and JTijk, k=1,2, …, f, k represents the number of each measurement point, and f represents the total number of each measurement point number; The film thickness parameter of the vacuum coating machine corresponding to each monitoring time point in each control period is monitored and collected in real time by a plurality of film thickness sensors, and the film thickness of the vacuum coating machine corresponding to each monitoring time point in each control period is obtained, which is denoted as DHijp, p=1,2, …, d, p represents the number of each film thickness sensor, and d represents the total number of each film thickness sensor number.

7. The control system for the vacuum coating machine according to claim 6, characterized in that: According to the formula The temperature uniformity index CTi corresponding to each control period of the vacuum coating machine is calculated, The average temperature of the coating material corresponding to each control period of the vacuum coating machine is represented. According to the formula The film thickness uniformity index CDi corresponding to each control period of the vacuum coating machine is calculated, The average temperature of the coating material corresponding to each control period of the vacuum coating machine is represented; According to the formula The film thickness growth rate index CSi corresponding to each control period of the vacuum coating machine is calculated, denotes the initial film thickness corresponding to the vacuum coating machine; The coating comprehensive control coefficient CPi of the vacuum coating machine corresponding to each control period is obtained by multiplying the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index of the vacuum coating machine corresponding to each control period by the corresponding set weight coefficient, and then summing the weighted results.

8. The control system for a vacuum coating machine of claim 7, wherein: If the coating comprehensive control coefficient of the vacuum coating machine corresponding to a control period exceeds 0.3, it indicates that the coating thickness of the vacuum coating machine corresponding to the control period deviates, and a coating state abnormal signal is generated; at this time, the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index in the coating comprehensive control coefficient of the vacuum coating machine corresponding to each control period are analyzed, if the average temperature of the coating material exceeds the safety threshold, it indicates that the temperature uniformity is poor, the temperature control device of the substrate is adjusted, if the average temperature of the coating material exceeds the safety threshold, it indicates that the running mode of the coating substrate needs to be adjusted, if the film thickness growth rate index deviates from the set value, it indicates that the evaporation source power, gas flow and other parameters need to be adjusted, otherwise, it indicates that the coating thickness of the vacuum coating machine corresponding to the control period is stable.

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