Probe with low needle pressure

Abstract

A probe with low probe pressure comprises an elastic structure and an electric conductor. The elastic structure is provided with a first surface and a second surface which are positioned on two opposite surfaces of the elastic structure; the conductors comprise a first conductor and a second conductor. The first surface of the elastic structure corresponds to the first conductor, the second surface of the elastic structure corresponds to the second conductor, and the first conductor and the second conductor are tightly combined and wrap the elastic structure.

Description

Technical Field

[0001] The present invention relates to a probe structure, and in particular to a probe with low needle pressure. Background Art

[0002] The manufacturing process of integrated circuit chips requires electrical testing. The integrated circuit chip is formed with pads or bumps of the electrode part. The test probe is electrically connected to the electrode part to test the electrical characteristics of the chip. When the probe contacts the electrode part, the end of the probe applies needle pressure / balance contact force (BCF) to the electrode part to achieve electrical connection.

[0003] If the pressure of the probe in contact with the electrode is too great, it will leave too deep or too long scratch marks on the electrode and affect the strength of chip welding in the subsequent process. Therefore, the pressure of the probe in contact with the electrode must be well controlled. The probe body in the prior art can be formed by at least two parallel pillars, with at least one opening between the pillars, and the parallel pillars and the opening form an elastic structure to reduce the pressure of the probe in contact with the electrode.

[0004] The two parallel pillars formed on the probe are prone to breakage. In the prior art, polymeric materials can be filled in the channel as support to increase strength and solve the problem of parallel pillar breakage. However, in this way, the needle pressure of the probe contacting the electrode part also increases, which is not only not conducive to testing, but also cannot solve the problem of increased impedance.

[0005] Furthermore, in addition to controlling the needle pressure during high current testing or high frequency testing, it is also expected to reduce the impedance of the probe itself. For probes with the same cross-sectional area and the same material, the prior art can reduce the needle pressure in the form of a hole, but it also increases the impedance, which is not conducive to high current or high frequency testing requirements, and there is also a risk of the probe breaking. Existing solutions can, for example, increase the cross-sectional area of ​​the probe by increasing the thickness of the probe, but as the cross-sectional area of ​​the probe increases, the needle pressure increases accordingly. Therefore, there is a need for a probe that can reduce the needle pressure, reduce the impedance and is not easy to break, in order to solve the above technical problems and provide more efficient testing requirements for high frequency and micro motors. Summary of the invention

[0006] The object of the present invention is to provide a probe with low needle pressure, comprising an elastic structure and a conductor. The elastic structure comprises a first surface of the elastic structure and a second surface of the elastic structure, and the first surface of the elastic structure and the second surface of the elastic structure are located on two opposite surfaces of the elastic structure. The conductor comprises a first conductor and a second conductor. The first surface of the elastic structure corresponds to the first conductor, and the second surface of the elastic structure corresponds to the second conductor. The first conductor and the second conductor are tightly combined and cover at least a part of the elastic structure. The hardness of the elastic structure is greater than the hardness of the conductor.

[0007] In a feasible embodiment, the plurality of ribs include a first rib and a second rib, and the connecting section has a first area in a cross section perpendicular to the central axis and exposed between the first rib and the second rib. The first rib has a first rib cross section, the second rib has a second rib cross section, and one side of the first rib cross section is adjacent to and faces one side of the second rib cross section. The conductor has a conductor top surface and a conductor bottom surface, the conductor top surface and the conductor bottom surface are two opposite surfaces of the conductor, the conductor top surface has a conductor top surface side and another side of the conductor top surface that are parallel to each other, the conductor top surface side is adjacent to one side of the first rib cross section, and the other side of the conductor top surface is adjacent to one side of the second rib cross section. The distance vertically extending from one side of the first rib cross section to the conductor top surface side and one side of the first rib cross section is defined as a second area; the distance vertically extending from one side of the second rib cross section to the other side of the conductor top surface and one side of the second rib cross section is defined as a third area.

[0008] In a feasible embodiment, the distance from the side edge of the top surface of the conductor to the other side edge of the top surface of the conductor and one side edge of the first rib cross section is defined as a fourth area.

[0009] In a feasible embodiment, the elastic structure further includes an elastic structure top surface and an elastic structure bottom surface, the elastic structure top surface and the elastic structure bottom surface are respectively located at opposite ends of the central axis of the elastic structure, the elastic structure first surface connects the elastic structure top surface and the elastic structure bottom surface, and the elastic structure second surface connects the elastic structure top surface and the elastic structure bottom surface. When the elastic structure top surface is aligned with the top surface of the conductor, and the elastic structure bottom surface is aligned with the bottom surface of the conductor, the elastic structure top surface and the elastic structure bottom surface are not covered by the conductor.

[0010] In a feasible embodiment, when the top surface of the elastic structure is connected to the top surface of the conductor, and the bottom surface of the elastic structure is connected to the bottom surface of the conductor, the top surface of the elastic structure and the bottom surface of the elastic structure are covered by the conductor.

[0011] In a feasible embodiment, at least a portion of the conductor is disposed in the space.

[0012] In a feasible embodiment, the material of the elastic structure is one of nickel alloy, nickel-cobalt alloy, platinum or platinum alloy.

[0013] In a feasible embodiment, the materials of the first conductor and the second conductor are high conductivity materials.

[0014] In a feasible embodiment, the first conductive body and the second conductive body are stacked and formed on the elastic structure by electroplating.

[0015] In a feasible embodiment, the first conductor and the second conductor are tightly combined with each other by fusion.

[0016] In a feasible embodiment, the first conductor and the second conductor are made of the same material.

[0017] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and description and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the elastic structure of the first embodiment of the probe with low needle pressure of the present invention; Figure 2 is a schematic diagram of a first embodiment of a probe with low needle pressure according to the present invention; Figure 3 A front view of a first embodiment of a probe with low needle pressure according to the present invention; Figure 4 For the present invention Figure 2 A cross-sectional view along the IV-IV direction; Figure 5 A schematic diagram of an elastic structure of a second embodiment of a probe with low needle pressure according to the present invention; Figure 6 is a schematic diagram of a second embodiment of a probe with low needle pressure according to the present invention; and Figure 7 FIG. 2 is a second schematic diagram of a second embodiment of a probe with low needle pressure according to the present invention.

[0019] Explanation of the reference numerals: 1: elastic structure; 11: first rib; 12: second rib; 13: first connecting section; 14: second connecting section; 15: first surface of elastic structure; 16: second surface of elastic structure; 17: bottom surface of elastic structure; 18: top surface of elastic structure; 19: side surface of elastic structure; 20: space; 21: conductor; 21a: first conductor; 21b: second conductor; 21c: third conductor; 100: probe with low needle pressure; 211: side edge of the top surface of conductor; 212: other side edge of the top surface of conductor; 181: one side edge of the first rib cross section; 182: one side edge of the second rib cross section; A1: first area; A2: second area; A3: third area; B: bottom surface of conductor; CL: center axis; S1: first rib cross section; S2: second rib cross section; T: top surface of conductor. DETAILED DESCRIPTION

[0020] [First embodiment] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 , Figure 1 FIG. 1 is a schematic diagram of an elastic structure 1 of a first embodiment of a probe 100 with low needle pressure according to the present invention. Figure 2 FIG. 1 is a schematic diagram of a first embodiment of a probe 100 with low needle pressure according to the present invention. Figure 3 FIG. 1 is a front view of a first embodiment of a probe 100 with low needle pressure according to the present invention. Figure 4 For the present invention Figure 2 Cross-sectional view along the IV-IV direction.

[0021] The present invention discloses a probe 100 with low needle pressure, comprising an elastic structure 1 and a conductor 21. The elastic structure 1 is a probe, which can be a single probe, can be in various shapes (such as an S-shaped probe), or can be a MEMS pogo pin probe structure, which is not limited by the present invention.

[0022] See also Figure 1 In the first embodiment of the present invention, the elastic structure 1 of the probe 100 with low needle pressure includes two ribs (a first rib 11 and a second rib 12) and two connecting segments (a first connecting segment 13 and a second connecting segment 14). The first connecting segment 13 connects one end corresponding to the first rib 11 and the second rib 12, and the second connecting segment 14 connects the other end corresponding to the first rib 11 and the second rib 12. A space 20 is formed between the first rib 11 and the second rib 12. It should be noted that the present invention does not limit the number of ribs, connecting segments and spaces 20. The ribs can be set to two, three or more than four, the connecting segments can be set to two, three or more than four, and the number of spaces 20 can be more than one in accordance with the number of ribs.

[0023] The elastic structure 1 has an elastic structure first surface 15 and an elastic structure second surface 16. The elastic structure first surface 15 and the elastic structure second surface 16 are located on two opposite surfaces of the elastic structure 1. The elastic structure 1 also includes an elastic structure bottom surface 17 and an elastic structure top surface 18, and the elastic structure bottom surface 17 and the elastic structure top surface 18 are respectively located at opposite ends of the central axis CL of the elastic structure 1. The elastic structure bottom surface 17 can be a surface of the first connecting section 13 away from the second connecting section 14, and the elastic structure top surface 18 can be a surface of the second connecting section 14 away from the first connecting section 13. The elastic structure first surface 15 connects the elastic structure top surface 18 and the elastic structure bottom surface 17, and the elastic structure second surface 16 connects the elastic structure top surface 18 and the elastic structure bottom surface 17. The elastic structure 1 also includes two elastic structure side surfaces 19. The two elastic structure side surfaces 19 respectively connect the elastic structure first surface 15, the elastic structure second surface 16, the elastic structure bottom surface 17 and the elastic structure top surface 18. See also Figure 2 The probe 100 with low needle pressure includes a conductor 21, and the conductor 21 includes a first conductor 21a and a second conductor 21b. The first surface 15 of the elastic structure corresponds to the first conductor 21a, and the second surface 16 of the elastic structure corresponds to the second conductor 21b. In one embodiment, the first conductor 21a and the second conductor 21b can be formed on the elastic structure 1 by electroplating. In one embodiment, the first conductor 21a and the second conductor 21b can be two separate components, which are then tightly combined by high pressure and / or high temperature fusion, and cover the elastic structure 1.

[0024] At least a portion of the first conductor 21a and the second conductor 21b may be disposed in the space 20. Specifically, the space 20 may also be covered with a plating layer due to the plating method, so that at least a portion of the first conductor 21a is disposed in a portion of the space 20, or at least a portion of the first conductor 21a is disposed in the entire space of the space 20; at least a portion of the second conductor 21b is disposed in a portion of the space 20, or at least a portion of the second conductor 21b is disposed in the entire space of the space 20. Specifically. By adopting the fusion method, at least a portion of the first conductor 21a is disposed in a portion of the space 20, or at least a portion of the first conductor 21a is disposed in the entire space of the space 20; at least a portion of the second conductor 21b is disposed in a portion of the space 20, or at least a portion of the second conductor 21b is disposed in the entire space of the space 20. That is, the space 20 may be filled with the first conductor 21a or the second conductor 21b, or may not be filled with the first conductor 21a or the second conductor 21b.

[0025] Please also read Figure 2 and Figure 3 The conductor 21 includes a conductor bottom surface B and a conductor top surface T. When the first conductor 21a and the second conductor 21b cover the elastic structure 1 and are tightly combined, the elastic structure bottom surface 17 can be flush with the conductor bottom surface B, and the elastic structure top surface 18 can be flush with the conductor top surface T. In addition, the two elastic structure side surfaces 19 of the elastic structure 1 are covered by the conductor 21. When the elastic structure top surface 18 is flush with the conductor top surface T, and the elastic structure bottom surface 17 is flush with the conductor bottom surface B, the elastic structure top surface 18 and the elastic structure bottom surface 17 are not covered by the conductor 21. In other words, the elastic structure bottom surface 17 is coplanar with the conductor bottom surface B, and the elastic structure top surface 18 is coplanar with the conductor top surface T. However, the present invention is not limited thereto. Specifically, in one embodiment, when the elastic structure top surface 18 is connected to the conductor top surface T, and the elastic structure bottom surface 17 is connected to the conductor bottom surface B, the elastic structure bottom surface 17 and the elastic structure top surface 18 can be covered by the conductor 21, which does not affect the test. However, usually after several tests, the elastic structure bottom surface 17 and the elastic structure top surface 18 will be exposed and not covered by the conductor 21.

[0026] See also Figure 4 , Figure 4 for Figure 2 The cross-sectional view along the IV-IV direction. Figure 4 It can be seen that the conductor 21 can be partially formed on the elastic structure 1 by electroplating to form a Figure 4 The third conductor 21c is shown. Then, the first conductor 21a and the second conductor 21b are tightly combined and covered by high pressure and / or high temperature fusion to form the elastic structure 1 on which the third conductor 21c is formed. Optionally, in this embodiment, at least a portion of the first conductor 21a and the second conductor 21b can also be disposed in the space 20, and the present invention is not limited thereto. Optionally, in this embodiment, the third conductor 21c tightly combined and covered with the elastic structure 1 can also form the entire conductor 21.

[0027] Optionally, the material of the elastic structure 1 may be one of nickel alloy, nickel-cobalt alloy, platinum or platinum alloy.

[0028] Optionally, the elastic structure 1 may be a conductor, and the conductivity of the first conductor 21 a and the second conductor 21 b may be greater than the conductivity of the elastic structure 1 .

[0029] Optionally, the first conductor 21 a and the second conductor 21 b may be made of a material with a high conductivity, such as gold, silver or copper.

[0030] Optionally, the material of the first conductor 21a and the material of the second conductor 21b may be the same material, so that the first conductor 21a and the second conductor 21b can be selectively and stably fused, or the electroplating process is easier to implement.

[0031] Optionally, the hardness of the elastic structure 1 is greater than the hardness of the conductor 21. Specifically, using the elastic structure 1 with higher hardness wrapped in the conductor 21 as a bracket not only does not excessively increase the needle pressure of the elastic structure 1 contacting the object to be tested, but also reduces impedance.

[0032] The arrangement of the conductor 21 of the present invention increases the current path of the probe 100 with low needle pressure, thereby reducing impedance. However, if the first conductor 21a and the second conductor 21b are made of a material with the same hardness as the elastic structure 1, or a material with a harder hardness than the elastic structure 1, the needle pressure will increase significantly, resulting in excessive contact pressure on the object to be tested, thereby affecting subsequent testing and processes of the chip.

[0033] Optionally, after the first conductor 21a and the second conductor 21b are fused by high pressure and / or high temperature, the cross-sectional area (probe size) of the probe can be adjusted by laser, CNC processing or etching. The material around the fused probe 100 with low needle pressure presents irregular protrusions, and the appearance of the probe can also be flattened by the above method.

[0034] [Second embodiment] See also Figures 5 to 7 , Figure 5 FIG. 1 is a schematic diagram of an elastic structure 1 of a second embodiment of a probe 100 with low needle pressure according to the present invention. Figure 6 FIG. 1 is a schematic diagram of a probe 100 with low needle pressure according to a second embodiment of the present invention. Figure 7 1 is a second schematic diagram of a second embodiment of the probe 100 with low needle pressure of the present invention. The second embodiment of the present invention is similar to the first embodiment in structure, and the same structure is not repeated. The difference between the second embodiment of the present invention and the first embodiment is that the elastic structure 1 of the second embodiment has only one connecting section connecting the first rib 11 and the second rib 12. According to the actual situation, the elastic structure 1 of the second embodiment may have only one connecting section (first connecting section 13) connecting one end corresponding to the first rib 11 and the second rib 12, and the other end corresponding to the first rib 11 and the second rib 12 is not connected, so that the first rib 11, the second rib 12 and the first connecting section 13 form an elastic structure 1 similar to a concave shape or a U shape.

[0035] See also Figure 5In the second embodiment, the first rib 11 of the elastic structure 1 has a first rib cross section S1, and the second rib 12 of the elastic structure 1 has a second rib cross section S2. The elastic structure bottom surface 17 may be a surface of the first connecting section 13 away from the first rib cross section S1 and the second rib cross section S2.

[0036] See also Figure 6 , the first connecting section 13 has a first area A1 in a cross section perpendicular to the central axis CL. One side 181 of the first rib cross section and one side 182 of the second rib cross section are adjacent to and face each other. The top surface T of the conductor has a conductor top surface side 211 and another side 212 of the conductor top surface that are parallel to each other. The conductor top surface side 211 is adjacent to one side 181 of the first rib cross section, and the other side 212 of the conductor top surface is adjacent to one side 182 of the second rib cross section. The area defined by the distance from one side 181 of the first rib cross section extending perpendicularly to the conductor top surface side 211 and one side 181 of the first rib cross section is the second area A2, and the area defined by the distance from one side 182 of the second rib cross section extending perpendicularly to the other side 212 of the conductor top surface and one side 182 of the second rib cross section is the third area A3. The sum of the second area A2 and the third area A3 is greater than or equal to the first area A1.

[0037] Optionally, see Figure 7 , Figure 7 The second schematic diagram of the second embodiment of the probe 100 with low needle pressure of the present invention, the distance from the side edge 211 of the top surface of the conductor to the other side edge 212 of the top surface of the conductor and the side edge 181 of the first rib section is defined as a fourth area A4. The fourth area A4 is greater than the first area A1.

[0038] Similarly, the conductor 21 includes a conductor bottom surface B and a conductor top surface T. When the first conductor 21a and the second conductor 21b cover the elastic structure 1 and are tightly combined, when the first rib section S1 of the first rib 11 and the second rib section S2 of the second rib 12 are respectively arranged in line with the conductor top surface T, that is, the first rib section S1 and the second rib section S2 are coplanar with the conductor top surface T and are not covered by the conductor 21; when the elastic structure bottom surface 17 is arranged in line with the conductor bottom surface B in a section perpendicular to the central axis CL, that is, the elastic structure bottom surface 17 is coplanar with the conductor bottom surface B and is not covered by the conductor 21. Similarly, the two side surfaces 19 of the elastic structure 1 are covered by the conductor 21. Similarly, in one embodiment, when the elastic structure top surface 18 is arranged in contact with the conductor top surface T, and the elastic structure bottom surface 17 is arranged in contact with the conductor bottom surface B, the elastic structure bottom surface 17 and the elastic structure top surface 18 may be covered by the conductor 21, which does not affect the test. However, usually after several tests, the elastic structure bottom surface 17 and the elastic structure top surface 18 will be exposed and not covered by the conductor 21 .

[0039] [Beneficial Effects of Embodiments] One of the beneficial effects of the present invention is that the probe with low needle pressure provided by the present invention can cover the elastic structure with higher hardness with a conductor with lower hardness, so that the overall current path of the probe with low needle pressure is increased to reduce impedance, and the risk of the probe breaking when contacting the object to be tested is effectively reduced, making the test process more efficient. Another beneficial effect of the present invention is that by arranging a plurality of ribs adjacent to each other and forming a space between two adjacent ribs, the needle pressure can be controlled, the scratching of the electrode part on the object to be tested can be reduced, and the subsequent chip welding process can be prevented from being affected.

[0040] The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the protection scope of the claims of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the protection scope of the claims of the present invention.

Claims

1. A probe with low needle pressure, characterized in that, The probe with low needle pressure comprises: The elastic structure has an elastic structure first surface and an elastic structure second surface, wherein the elastic structure first surface and the elastic structure second surface are located on two opposite surfaces of the elastic structure, and the elastic structure comprises: a plurality of ribs; and at least one connecting section, wherein the at least one connecting section connects two adjacent ribs, Wherein, two adjacent ribs and the at least one connecting segment jointly define at least one space, The conductor includes a first conductor and a second conductor; The first surface of the elastic structure corresponds to the first conductor, the second surface of the elastic structure corresponds to the second conductor, and the first conductor and the second conductor are tightly combined and cover at least a portion of the elastic structure. Wherein, the hardness of the elastic structure is greater than the hardness of the conductor.

2. The probe with low needle pressure according to claim 1, characterized in that: The plurality of ribs include a first rib and a second rib, the connecting section has a first area in a cross section perpendicular to a central axis of the elastic structure and exposed between the first rib and the second rib, The first rib has a first rib cross section, the second rib has a second rib cross section, and one side of the first rib cross section is adjacent to and faces the other side of the second rib cross section. The conductor has a conductor top surface and a conductor bottom surface, the conductor top surface and the conductor bottom surface are two opposite surfaces of the conductor, the conductor top surface has a conductor top surface side edge and another conductor top surface side edge parallel to each other, the conductor top surface side edge is adjacent to one side edge of the first rib cross section, and the conductor top surface other side edge is adjacent to one side edge of the second rib cross section, Among them, the distance extending vertically from one side of the first rib cross-section to the side of the top surface of the conductor and one side of the first rib cross-section are defined as the second area; the distance extending vertically from one side of the second rib cross-section to the other side of the top surface of the conductor and one side of the second rib cross-section are defined as the third area, and the sum of the second area and the third area is greater than or equal to the first area.

3. The probe with low needle pressure according to claim 2, characterized in that: The distance from the side edge of the top surface of the conductor to the other side edge of the top surface of the conductor and one side edge of the first rib cross section is defined as a fourth area. Wherein, the fourth area is larger than the first area.

4. The probe with low needle pressure according to claim 2, characterized in that: The elastic structure further includes an elastic structure top surface and an elastic structure bottom surface, the elastic structure top surface and the elastic structure bottom surface are respectively located at opposite ends of the central axis of the elastic structure, the elastic structure first surface connects the elastic structure top surface and the elastic structure bottom surface, and the elastic structure second surface connects the elastic structure top surface and the elastic structure bottom surface, When the top surface of the elastic structure is flush with the top surface of the conductor, and the bottom surface of the elastic structure is flush with the bottom surface of the conductor, the top surface of the elastic structure and the bottom surface of the elastic structure are not covered by the conductor.

5. The probe with low needle pressure according to claim 2, characterized in that: The elastic structure further comprises an elastic structure top surface and an elastic structure bottom surface, wherein the elastic structure top surface and the elastic structure bottom surface are respectively located at two opposite ends of the central axis of the elastic structure, the elastic structure first surface connects the elastic structure top surface and the elastic structure bottom surface, and the elastic structure second surface connects the elastic structure top surface and the elastic structure bottom surface. When the top surface of the elastic structure is bonded to the top surface of the conductor, and the bottom surface of the elastic structure is bonded to the bottom surface of the conductor, the top surface of the elastic structure and the bottom surface of the elastic structure are covered by the conductor.

6. The probe with low needle pressure according to claim 5, characterized in that: At least a portion of the conductor is disposed in the space.

7. The probe with low needle pressure according to claim 1, characterized in that: The material of the elastic structure is one of nickel alloy, nickel-cobalt alloy, platinum or platinum alloy.

8. The probe with low needle pressure according to claim 1, characterized in that: The first conductor and the second conductor are made of high conductivity materials.

9. The probe with low needle pressure according to claim 1, characterized in that: The first conductive body and the second conductive body are stacked and formed on the elastic structure by electroplating.

10. The probe with low needle pressure according to claim 1, characterized in that The first conductor and the second conductor are tightly bonded to each other by fusion.

11. The probe with low needle pressure according to claim 1, characterized in that The material of the first conductor and the material of the second conductor are the same.

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