Double-drive gate valve applied to large-bore ultra-high vacuum environment

Abstract

The present invention belongs to the technical field of vacuum evaporation coating equipment, and particularly relates to a double-drive gate valve applied to a large-diameter ultra-high vacuum environment, including: a valve seat movably embedded in a guide rail, the valve seat being formed into a frame-like structure, with a limiting groove extending along the Z direction provided on its side wall and a slot hole extending along the X direction provided on its top; a movable plate embedded in the valve seat and movably connected to the valve seat, and a hanging section being provided on the top of the movable plate, the hanging section being inserted into the slot hole; a valve plate formed into a structure adapted to a through hole; the valve plate being rotatably connected to the movable plate through a transmission assembly; a first driver provided on a base, the first driver being drivingly connected to the valve seat; and a second driver provided on the valve seat, a hooking section engaged with the hanging section being provided at the output end of the second driver for pushing the movable plate to move along the Z direction of the valve seat and causing the valve plate to move along the Y direction under the push of the transmission assembly. Thus, it can meet the closing requirements of a large diameter.

Description

Technical Field

[0001] The present invention belongs to the technical field of pipeline valves, and particularly relates to a double-drive gate valve applied to a large-diameter ultra-high vacuum environment. Background Art

[0002] The working principle of the gate valve is mainly based on the tight contact seal between the valve plate and the valve seat. By opening and closing the valve plate, the valve plate is completely disengaged from and mated with the through-hole seat. Its function is to control the on-off of the fluid and the flow regulation. The characteristic is that it can achieve a large through-diameter and often shows unique advantages in the conveying pipelines of dust, solid particles or powder materials.

[0003] In the gate valve technology, most of the valve plates open and close by moving from top to bottom, which leads to the larger the through-diameter, the larger the valve plate size, the higher the overall lifting height of the valve plate, the longer the required cylinder, and the higher the overall size, which is both dangerous and unsightly. The usual solution is to change the opening and closing movement of the valve from the cylinder to the motor to shorten the overall height caused by the cylinder. This method solves part of the height problem but does not reduce the degree of danger.

[0004] In the vacuum industry, the gate valve is less used due to its relatively poor sealing performance compared with other types of valves. The current gate valve includes a valve housing, a valve plate, a cylinder, a hinge and a limit wheel, and drives the valve plate to move through the transmission of components such as the cylinder and the hinge, so as to realize the closing and opening of the through-diameter. The through-diameter of the vacuum gate valve is mostly circular, and the size of the valve plate is small, which cannot meet the demand for a large through-diameter. The current demand and requirements for connecting two vacuum chambers are gradually increasing, and the traditional gate valve is even more insufficient in sealing performance, the valve through-diameter is not large enough, and the problem of the transmission mode of the large-through-diameter valve is exposed.

[0005] Therefore, it is still necessary to optimize and improve the structure of the current valve so that it can meet the closing requirements of a large through-diameter. Summary of the Invention

[0006] The purpose of the present invention is to provide a double-drive gate valve applied to a large-diameter ultra-high vacuum environment so that it can meet the closing requirements of a large through-diameter.

[0007] To achieve the above purpose, the present invention provides a double-drive gate valve applied to a large-diameter ultra-high vacuum environment for a vacuum coating device. The vacuum coating device has a first chamber and a second chamber, and there is a through-hole between the first chamber and the second chamber. A base is provided at the through-hole; a guide rail extending in the X direction is provided on the base; the double-drive gate valve includes:

[0008] A valve seat movably embedded in the guide rail. The valve seat is formed into a frame structure, and its side wall is provided with a limiting groove extending in the Z direction, and its top is provided with a slot hole extending in the X direction;

[0009] A movable plate is embedded in the valve seat and is movably connected to the valve seat. A hanging section is provided at the top of the movable plate, and the hanging section is inserted into the slot hole.

[0010] A valve plate is configured to be adapted to the through hole for covering and sealing the through hole; the valve plate is rotatably connected to the movable plate through a transmission assembly.

[0011] A first driver is provided on the base, and the first driver is drivingly connected to the valve seat to push the valve seat to move along the guide rail; and,

[0012] A second driver is provided on the valve seat. A hooking section that is hooked to the hanging section is provided at the output end of the second driver, which is used to push the movable plate to move in the Z direction of the valve seat and make the valve plate move in the Y direction under the push of the transmission assembly, so that the valve plate blocks or unblocks the through hole.

[0013] In a possible design, a rotatable guide wheel is provided at the lower end of the valve seat, and the guide wheel is arranged on the guide rail.

[0014] In a possible design, rotatable limit wheels are provided at both the upper end and the lower end of the valve seat. The limit wheels are embedded on the guide rail to be able to move along the guide rail.

[0015] In a possible design, two guide wheels are provided and arranged outside the limit wheels.

[0016] In a possible design, at least two limit wheels are provided at both the upper end and the lower end of the valve seat, and the limit wheels located above are arranged in a staggered manner relative to the limit wheels below.

[0017] In a possible design, a height limiting plate is provided below the movable plate. The height limiting plate is fixedly arranged on the valve seat. When the movable plate descends and is arranged on the height limiting plate, the hanging section is disengaged from the contact relationship with the hooking section.

[0018] In a possible design, the hooking section is configured as an L-shaped hooking plate, and the hanging section is configured as a Γ-shaped hanging plate;

[0019] / and, the hanging plates are configured as multiple and are arranged at intervals along the movement direction of the movable plate.

[0020] In a possible design, the second driver is configured as a cylinder, and the hooking section is provided on the telescopic shaft of the cylinder.

[0021] In a possible design, the first driver includes a motor, a sprocket, and a transmission chain. The motor is disposed on the base, and two sprockets are respectively disposed at both ends of the base. The output shaft of the motor is drivingly connected to one of the sprockets; the transmission chain is wound around the sprockets and connected to the motor. When the motor is driven, the sprockets rotate and drive the transmission chain to move in the X direction.

[0022] In a possible design, the double-drive flap valve further includes a controller and a position detector. The position detector is disposed on the base for detecting the current position information of the valve seat; the controller is communicatively connected to the position detector, the first driver, and the second driver.

[0023] The working principle of the double-drive flap valve is as follows: The double-drive flap valve is used to perform sealing or dredging operations at the through-hole between the first chamber and the second chamber of the vacuum coating equipment, ensuring the integrity and stability of the vacuum environment. Its core lies in respectively controlling the movement of the valve seat and the movable plate by the first driver and the second driver, thereby driving the valve plate to close and connect the through-holes of the first chamber and the second chamber.

[0024] The first driver is responsible for pushing the valve seat to move in the X direction, so that the entire valve system can slide on the guide rail to reach or leave the through-hole position. The second driver is connected to the hook of the hanging section at the top of the movable plate, and pushes the movable plate to move in the Z direction, and makes the valve plate move in the Y direction through the transmission component to complete the blocking or opening action of the through-hole.

[0025] The movement process of the double-drive flap valve is as follows: When not started, the valve plate is usually in the non-working position, that is, not directly above the through-hole, ensuring that the two chambers can communicate through the through-hole. When it is necessary to close the through-hole, the first driver is started to drive the valve seat to move along the guide rail on the base towards the through-hole until the valve seat is exactly directly above the through-hole and ready for the next operation. Then, the second driver starts to work, and the hooking section at the output end of it is hooked to the hanging section at the top of the movable plate, and pulls the movable plate upward. Since the movable plate and the valve plate are connected by a uniformly distributed hinge structure, during this process, the valve plate is forced by the transmission component to move upward in the Y-axis direction, gradually approaching and finally covering the through-hole to complete the sealing action. On the contrary, when it is necessary to reopen the through-hole, the above steps are executed in reverse. First, the second driver lifts the movable plate, and then the first driver moves the valve seat away to restore to the initial state.

[0026] Through the above technical solution, by independently controlling the movement of the valve seat and the movable plate, precise operation of opening and closing the through hole can be achieved, meeting different process requirements. Using an articulated structure such as a transmission member to connect the movable plate and the valve plate, the adjustment of the position of the valve plate in the Y direction can be realized by moving the position of the movable plate in the Z direction, thereby achieving the closing and conduction of the through hole between the first chamber and the second chamber. In this way, the complex mechanical structure of the traditional valve can be simplified, the maintenance cost can be reduced, and the working efficiency can be improved. It is especially suitable for applications in large-diameter ultra-high vacuum environments, such as vacuum coating equipment and other occasions. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0028] Figure 1 The front view structural schematic diagram of the double-drive gate valve applied to the large-diameter ultra-high vacuum environment provided by the present invention in one embodiment;

[0029] Figure 2 is the side view structural schematic diagram of the double-drive gate valve applied to the large-diameter ultra-high vacuum environment provided by the present invention in the initial state (the valve plate does not close the through hole);

[0030] Figure 3 is the side view structural schematic diagram of the double-drive gate valve applied to the large-diameter ultra-high vacuum environment provided by the present invention in the closed state (the valve plate closes the through hole).

[0031] In the above-mentioned drawings: 1 - base, 2 - valve seat, 21 - guide rail, 3 - movable plate, 4 - valve plate, 5 - first driver, 6 - second driver, 71 - guide wheel, 72 - limit wheel, 81 - hook-fixed section, 82 - hanging section, 9 - position detector, 10 - transmission member, 11 - height-limiting plate. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0032] The following will further elaborate on the present invention in conjunction with the drawings and specific embodiments. It should be noted here that the description of these embodiments is for helping to understand the present invention, but does not constitute a limitation to the present invention. The specific structural and functional details disclosed herein are only used to describe the embodiments of the present invention. However, the present invention can be embodied in many alternative forms and should not be construed as being limited to the embodiments described herein.

[0033] According to the first aspect of the present invention, a double-drive gate valve applied to a large-diameter ultra-high vacuum environment is provided. Among them,Figures 1 to 3 One specific embodiment is shown.

[0034] Refer to Figures 1 to 3 As shown, the double-drive gate valve applied to the large-bore ultra-high vacuum environment is used in a vacuum coating equipment. The vacuum coating equipment has a first chamber and a second chamber, and a through-hole is provided between the first chamber and the second chamber. A base 1 is provided at the through-hole; a guide rail 21 extending in the X direction is provided on the base 1.

[0035] The double-drive gate valve includes: a valve seat 2 movably embedded in the guide rail 21. The valve seat 2 is formed into a frame-like structure, and its side wall is provided with a limit groove extending in the Z direction, and its top is provided with a slot hole extending in the X direction; a movable plate 3 embedded in the valve seat 2 and movably connected to the valve seat 2. A hanging section 82 is provided at the top of the movable plate 3, and the hanging section is inserted into the slot hole; a valve plate 4 formed into a structure adapted to the through-hole for covering and sealing the through-hole; the valve plate 4 is rotatably connected to the movable plate 3 through a transmission component; a first driver 5 provided on the base 1, and the first driver 5 is drivingly connected to the valve seat 2 to push the valve seat 2 to move along the guide rail 21; a second driver 6 provided on the valve seat 2, and a hooking section 81 engaged with the hanging section 82 is provided at the output end of the second driver 6 for pushing the movable plate 3 to move in the Z direction of the valve seat 2 and enabling the valve plate 4 to move in the Y direction under the push of the transmission component, so that the valve plate 4 blocks or unblocks the through-hole.

[0036] The working principle of the double-drive gate valve is as follows: The double-drive gate valve is used to perform sealing or unblocking operations at the through-hole between the first chamber and the second chamber of the vacuum coating equipment, ensuring the integrity and stability of the vacuum environment. The core lies in controlling the movement of the valve seat 2 and the movable plate 3 respectively through the first driver 5 and the second driver 6, thereby driving the valve plate 4 to close and communicate the through-holes of the first chamber and the second chamber.

[0037] The first driver 5 is responsible for pushing the valve seat 2 to move in the X direction, so that the entire valve system can slide on the guide rail 21 to reach or leave the position of the through-hole. The second driver 6 is connected to the hanging section 82 at the top of the movable plate 3 through a hook, pushes the movable plate 3 to move in the Z direction, and enables the valve plate 4 to move in the Y direction through the transmission component, completing the blocking or opening action of the through-hole.

[0038] The movement process of the double-drive flap valve is as follows: When not started, the valve plate 4 is usually in the non-working position, that is, not directly above the through-hole, ensuring that the two chambers can communicate through the through-hole. When it is necessary to close the through-hole, the first driver 5 is activated, driving the valve seat 2 to move along the guide rail 21 on the base 1 towards the through-hole until the valve seat 2 is exactly directly above the through-hole, ready for the next operation. Then, the second driver 6 starts to work, and the hook section 81 at the output end engages with the hanging section 82 at the top of the movable plate 3, pulling the movable plate 3 upward. Since the movable plate 3 and the valve plate 4 are connected by a uniformly distributed hinge structure, during this process, the valve plate 4 is forced by the transmission component to move upward along the Y-axis direction, gradually approaching and finally covering the through-hole, completing the sealing action. Conversely, when it is necessary to reopen the through-hole, the above steps are executed in reverse. First, the second driver 6 lifts the movable plate 3, and then the first driver 5 moves the valve seat 2 away, restoring to the initial state.

[0039] Through the above technical solution, by independently controlling the movement of the valve seat 2 and the movable plate 3, precise operation of opening and closing the through-hole can be achieved, adapting to different process requirements. Using a hinge structure such as the transmission part 10 to connect the movable plate 3 and the valve plate 4 can adjust the position of the valve plate 4 in the Y-direction by moving the position of the movable plate 3 in the Z-direction, thereby realizing the closing and opening of the through-hole between the first chamber and the second chamber. In this way, the complex mechanical structure of traditional valves can be simplified, the maintenance cost can be reduced, and the work efficiency can be improved. It is particularly suitable for applications in large-diameter ultra-high vacuum environments, such as vacuum coating equipment and other occasions.

[0040] It should be noted that for the X-direction, Y-direction, and Z-direction described in this article, reference can be made to the spatial rectangular coordinate system, specifically, reference can be made to Figure 1 the illustrated drawing direction. Among them, the X-direction is the length direction of the guide rail, the Y-direction is the width direction of the guide rail, and the Z-direction is the height direction of the guide rail. In this regard, those skilled in the art can comprehensively understand it in combination with Figures 1 to 3 the structure and working environment of the flap valve.

[0041] In an embodiment provided by the present disclosure, a rotatable guide wheel 71 is provided at the lower end of the valve seat 2, and the guide wheel 71 is arranged on the guide rail 21. The guide wheel 71 not only plays a guiding and positioning role but also can bear the weight of the valve body assembly. Based on the rotatable characteristic of the guide wheel, the friction can be reduced, thereby enabling the valve seat 2 to slide smoothly on the guide rail 21 while ensuring the stability and safety of the structure. By using rolling contact instead of traditional sliding contact, the friction between the guide wheel and the guide rail 21 is significantly reduced, thereby reducing the wear between components and extending the service life of the flap valve.

[0042] In the present disclosure, rotatable limit wheels 72 are provided at both the upper and lower ends of the valve seat 2. The limit wheels 72 are embedded in the guide rail 21 so as to be able to move along the guide rail 21. In this way, the limit wheels 72 can play a certain constraining role on the valve seat 2 in the Y direction, preventing it from offsetting and / or vibrating during movement, ensuring its smooth movement along the X direction, and thus accurately realizing the opening and closing of the through hole (or called the diameter).

[0043] By additionally providing two guide wheels 71 on the outer side of the limit wheels 72, the weight of the entire plug valve (including components such as the valve plate 4, the movable plate 3, and the valve seat 2) can be more evenly distributed, ensuring that each wheel can effectively share the load, which helps to reduce the wear of a single wheel and extend the service life of the equipment. The guide wheels 71 and the limit wheels 72 work together to form a stable rolling system, effectively preventing the valve seat 2 from swaying left and right or deviating from the track during movement.

[0044] The position of the guide wheels 71 on the outer side can better control the movement of the valve seat 2 in the Y direction, ensuring its precise movement along the X-axis direction. Using rolling contact instead of sliding contact significantly reduces the frictional resistance, enabling the valve seat 2 to move more smoothly along the guide rail 21 and improving the operation efficiency. At the same time, by additionally providing guide wheels 71 on the outer side of the limit wheels 72, the overall stability of the valve seat 2 during movement can also be enhanced, avoiding problems such as offset or vibration caused by uneven load, and ensuring the safety and reliability of the operation.

[0045] Specifically, the guide wheels 71 and the bottom of the groove of the guide rail 21 are in a point contact relationship, that is, the axis line of the guide wheels 71 is parallel to the width direction of the guide rail 21 (this direction is the Y direction); the limit wheels 72 and the groove wall of the guide rail 21 are in a point contact relationship, that is, the axis line of the limit wheels 72 is parallel to the depth direction of the groove of the guide rail 21 (this direction is the Z direction).

[0046] In the present disclosure, two guide wheels 71 are provided and arranged on the outer side of the limit wheels 72, which can more evenly distribute the weight of the entire valve body (including components such as the valve plate 4, the movable plate 3, and the valve seat 2). Each wheel can effectively share the load, which helps to reduce the wear of a single wheel and extend the service life of the equipment. The guide wheels 71 and the limit wheels 72 work together to form a stable rolling system, effectively preventing the valve seat 2 from swaying left and right or deviating from the track during movement. The position of the guide wheels 71 on the outer side can better control the movement of the valve seat 2 in the Y direction, ensuring its precise movement along the X-axis direction. At the same time, the overall stability of the valve seat 2 during movement can also be effectively improved, avoiding problems such as offset or vibration caused by uneven load, and ensuring the safety and reliability of the operation.

[0047] Furthermore, at least two limiting wheels 72 are provided at the upper and lower ends of the valve seat 2, and the limiting wheel 72 located at the upper end is staggered relative to the limiting wheel 72 located at the lower end. At least two limiting wheels 72 can increase the number of support points and provide a more stable support structure. The upper limiting wheel 72 is staggered relative to the lower limiting wheel 72, so that they are not on the same vertical line, but are staggered. This layout can effectively prevent the valve seat 2 from rotating or shifting during movement. In this way, by increasing the number of limiting wheels 72 and adopting a staggered arrangement, additional support force is provided in multiple directions, which can prevent the valve seat 2 from tilting or shifting under high speed or heavy load conditions, and ensure that it always moves in a straight line along the guide rail 21. The staggered limiting wheels 72 can better resist external interference forces, reduce the offset phenomenon caused by uneven force on one side, and ensure the smooth operation of the valve seat 2 throughout the entire stroke. The configuration of multiple limiting wheels 72 makes the weight of the valve body more evenly distributed on each wheel, reduces the load of a single wheel, and extends the service life of the equipment.

[0048] In one embodiment provided in the present disclosure, a height limiting plate 11 is provided below the movable plate 3, and the height limiting plate 11 is fixedly disposed on the valve seat 2. When the movable plate 3 descends and is disposed on the height limiting plate, the hanging section releases the contact relationship with the hooking section. When the movable plate 3 descends to the lowest point and contacts the height limiting plate 11, the height limiting plate 11 prevents the movable plate 3 from moving further downward, thereby protecting the entire structure from mechanical damage caused by excessive downward movement. Once the movable plate 3 reaches the height limiting plate 11, the hanging section will be released from the contact relationship with the hooking section, and the second driver 6 will no longer apply additional downward thrust to the movable plate 3. When it is necessary to release the seal or reopen the through hole, the valve seat 2 as a whole can be moved along the guide rail 21 driven by the first driver 5 and return to the initial position.

[0049] In an embodiment provided by the present disclosure, the hooking section 81 is configured as an L-shaped hooking plate, and the hanging section 82 is configured as a Γ-shaped hanging plate. The hanging section 82 is designed in a Γ shape, which allows the hanging plate to be easily matched with the L-shaped hooking plate and increases the contact area between the two, thereby improving the stability of the movable plate 3 during movement.

[0050] The hook section 81 is designed in an L-shape, which allows the hook plate to apply tension in the horizontal and vertical directions, thereby effectively pulling the hook plate to move upward, and the valve plate 4 is driven by the hook plate to move in an inclined upward direction and block the through hole, thereby isolating the first chamber and the second chamber. When the first chamber and the second chamber need to be connected, the second driver 6 drives the hook plate to move downward, and the movable plate 3 moves downward and resets under the action of gravity, and finally falls on the height limit plate 11, releasing the lock with the hook plate. At this time, the entire valve seat 2 can move along the guide rail 21 under the action of the first driver 5.

[0051] In the present disclosure, a plurality of hanging plates are provided and arranged at intervals along the moving direction of the movable plate 3. Each hanging plate is designed in a Γ shape so that it can cooperate with the L-shaped hook fixing plate to ensure that the movable plate 3 can move up and down along the Z direction under precise control. By providing a plurality of hanging plates, the acting points of the force can be more evenly distributed, avoiding deformation or damage of a single hanging plate due to excessive force, thereby improving the overall stability of the system. The design of the plurality of hanging plates helps to reduce the shaking and offset of the movable plate 3 during movement, ensuring that it can reach the predetermined position more accurately. When the movable plate 3 descends to the lowest point and contacts the height limiting plate 11, all the hanging plates can slip off from the corresponding L-shaped hook fixing plates, releasing the contact relationship between the two, so that the valve seat 2 can move along the guide rail 21 under the drive of the first driver 5.

[0052] It should be understood that for the term "and / or" appearing in this article, it is merely a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, B exists alone, and both A and B exist simultaneously; for the term " / and" appearing in this article, it is a description of another association object relationship, indicating that there can be two relationships. For example, A / and B can represent: A exists alone, and both A and B exist; in addition, for the character " / " appearing in this article, generally it means that the associated objects before and after are in an "or" relationship.

[0053] In the present disclosure, the second driver 6 is configured as a cylinder, and a hook fixing section 81 is provided on the telescopic shaft of the cylinder. The cylinder can provide a stable and precise pushing and pulling force, enabling the movable plate 3 to move up and down along the Z direction under controlled conditions, ensuring that the valve plate 4 accurately blocks or opens the through hole. The hook fixing section 81 (L-shaped hook fixing plate) is directly installed on the telescopic shaft of the cylinder, and the hanging plate is pulled along with the telescopic movement of the telescopic shaft. When the movable plate 3 descends to the lowest point and contacts the height limiting plate 11, all the Γ-shaped hanging plates can slip off from the corresponding L-shaped hook fixing plates, releasing the contact relationship between the two and avoiding mechanical damage.

[0054] In the present disclosure, the first driver 5 includes a motor, a sprocket, and a transmission chain. The motor is arranged on the base 1, two sprockets are respectively arranged at both ends of the base 1, and the output shaft of the motor is drivingly connected to one of the sprockets; the transmission chain is wound around the sprockets and connected to the motor. When the motor is driven, the sprockets rotate and drive the transmission chain to move along the X direction. When the motor is started, its output shaft rotates, driving one of the sprockets to rotate. Since the transmission chain is wound around these two sprockets, the rotation of the sprockets will drive the transmission chain to move along the X direction. A part of the transmission chain is fixedly connected to the valve seat 2. Therefore, as the transmission chain moves, the valve seat 2 will also move forward or backward smoothly along the guide rail 21 to reach the predetermined position.

[0055] In the non-starting state, the valve seat 2 is located away from the through hole, ready to receive instructions from the motor to start moving. When the through hole needs to be closed or opened, the motor starts, the output shaft rotates and drives the sprocket connected to it to rotate. The rotation of the sprocket causes the transmission chain to move along the X direction, and the movement of the transmission chain drives the valve seat 2 to move forward or backward along the guide rail 21 until the valve seat 2 is directly above the through hole or leaves the through hole. When the valve seat 2 reaches the specified position, the second driver 6 (cylinder) starts to work and controls the movable plate 3 and the valve plate 4 in the manner described above to complete the blocking or opening of the through hole. When it is necessary to release the seal or reopen the through hole, the above steps are performed in reverse, and the motor operates in reverse to return the valve seat 2 to the initial position.

[0056] The motor can provide precise speed and position control to ensure that the valve seat 2 can accurately reach the predetermined position. This design is suitable for applications with extremely high precision requirements, such as valve control in vacuum coating equipment. The combination of sprocket and transmission chain provides smooth power transmission, reduces vibration and noise, and extends the service life of the equipment.

[0057] In one embodiment provided by the present disclosure, the dual-drive gate valve further includes a controller and a position detector 9, the position detector 9 is arranged on the base 1, and is used to detect the current position information of the valve seat 2; the controller is communicatively connected to the position detector 9, the first driver 5 and the second driver 6. The position detector 9 continuously detects the position of the valve seat 2 and sends the data to the controller. The controller determines whether the valve seat 2 has reached the predetermined position or whether the moving speed or direction needs to be adjusted based on the data. Based on the received position information, the controller sends instructions to the first driver 5 and the second driver 6 to ensure that they operate according to the set parameters and realize precise control of the movable plate 3 and the valve plate 4.

[0058] In the non-starting state, the valve seat 2 is located away from the through hole, and the position detector 9 detects the initial position of the valve seat 2 and transmits this information to the controller. When the through hole needs to be closed or opened, the controller starts the motor according to the preset program. The motor drives the sprocket to rotate, driving the transmission chain to move along the X direction, so that the valve seat 2 moves forward or backward along the guide rail 21. The position detector 9 detects the position of the valve seat 2 in real time and feeds back the position information to the controller. The controller adjusts the speed and direction of the motor based on this information to ensure that the valve seat 2 accurately reaches the predetermined position. As the valve seat 2 reaches the specified position, the controller sends a command to the second driver 6 (cylinder) to start working. The cylinder telescopic shaft extends, driving the L-shaped hook plate to pull up multiple Γ-shaped hook plates, so that the movable plate 3 gradually rises along the limit groove in the valve seat 2. The valve plate 4 moves along the Y-axis direction through the transmission assembly, gradually approaches and finally covers the through hole, completing the sealing action. The position detector 9 continues to detect the position of the movable plate 3 and feeds back the data to the controller to ensure that it stops accurately at the required position. When it is necessary to release the seal or reopen the through hole, the controller operates in reverse, sequentially controlling the second driver 6 to lift the movable plate 3 back to the initial position, and then controlling the first driver 5 to move the valve seat 2 back to the original position.

[0059] Through the coordinated work of the position detector 9 and the controller, the position of the valve seat 2 and the movable plate 3 can be precisely controlled, significantly improving the accuracy of the operation. The entire system realizes automatic control, reduces the need for manual intervention, and improves work efficiency and response speed. The position detector 9 can monitor the position of the valve seat 2 and the movable plate 3 in real time, and feed back the information to the controller, so that the system can be dynamically adjusted according to actual conditions, improving the reliability and adaptability of the system. The controller can detect abnormal conditions (such as excessive position deviation) in time based on the data provided by the position detector 9, and prevent failures through alarms or automatic corrective measures, thereby extending the service life of the equipment.

[0060] By integrating the controller and the position detector 9, the dual-drive gate valve is precisely controlled and detected in real time, which not only improves the working efficiency and stability of the valve, but also provides strong support for a more efficient and stable vacuum coating process. It is particularly suitable for high-precision environments where large-diameter through holes need to be frequently opened and closed, which helps to improve the overall performance and service life of the equipment. By ensuring that the valve seat 2 and the movable plate 3 stop moving at a specific position, the reliability and durability of the system are enhanced. At the same time, the automated control mechanism also greatly simplifies the operation process and improves production efficiency.

[0061] In the present disclosure, the position detector 9 includes at least one of a limit switch, a ranging sensor, a laser displacement sensor, or a radar. At the same time, multiple groups of detection devices are arranged on the base 1, thereby achieving accurate detection of the position of the valve plate 4, and further obtaining more accurate position information, so that the controller can issue correct instructions according to the obtained information.

[0062] On this basis, a pressure sensor is provided on at least one of the contact surfaces of the hanging section 82 and the hooking section 81, and the pressure sensor is communicatively connected to the controller. In this way, the controller can judge whether there is a contact relationship between the hanging section 82 and the hooking section 81 according to the pressure information obtained by the pressure sensor, so as to more accurately control the operation of the second driver 6.

[0063] In the present disclosure, the controller is configured as a Central Processing Unit (CPU).

[0064] In other embodiments, the controller can also be configured as a PLC logic controller. In other embodiments, the controller can also be one configured as a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), or a Field-Programmable Gate Array (FPGA).

[0065] In the present disclosure, the controller is communicatively connected to the position detector 9, the first driver 5, and the second driver 6 through cables respectively. In other embodiments, the controller can also be connected to the position detector 9, the first driver 5, and the second driver 6 through wireless communication modules such as Wi-Fi modules and ZigBee modules. In this regard, those skilled in the art can flexibly arrange them under the technical concept of the present disclosure.

[0066] Finally, it should be noted that the present invention is not limited to the above optional embodiments, and anyone can obtain other various forms of products under the inspiration of the present invention. The above specific embodiments should not be construed as limiting the protection scope of the present invention, and the protection scope of the present invention should be defined by the claims, and the specification can be used to interpret the claims.

Claims

1. A double-drive gate valve for use in a large-caliber ultra-high vacuum environment, used in a vacuum coating device, wherein the vacuum coating device comprises a first chamber and a second chamber, wherein a through hole is provided between the first chamber and the second chamber, and a base is provided at the through hole; characterized in that: The base is provided with a guide rail extending along the X direction; the double-drive gate valve comprises: A valve seat is movably embedded in the guide rail, the valve seat is formed into a frame-like structure, a side wall of which is provided with a limiting groove extending along the Z direction, and a top of which is provided with a slot hole extending along the X direction; A movable plate is embedded in the valve seat and movably connected to the valve seat, a hanging section is provided on the top of the movable plate, and the hanging section is inserted in the slot; A valve plate is formed into a structure adapted to the through hole so as to cover and seal the through hole; the valve plate is rotatably connected to the movable plate through a transmission assembly; a first driver, disposed on the base, the first driver being drivingly connected to the valve seat to push the valve seat to move along the guide rail; and The second driver is arranged on the valve seat, and the output end of the second driver is provided with a hooking section engaged with the hanging section, which is used to push the movable plate to move along the Z direction of the valve seat, and make the valve plate move along the Y direction under the push of the transmission component, so that the valve plate blocks or clears the through hole.

2. The double-drive gate valve for large-caliber ultra-high vacuum environment according to claim 1, characterized in that: A rotatable guide wheel is provided at the lower end of the valve seat, and the guide wheel is arranged on the guide rail.

3. The double-drive gate valve for use in a large-caliber ultra-high vacuum environment according to claim 2, characterized in that: The upper end and the lower end of the valve seat are both provided with rotatable limiting wheels, and the limiting wheels are embedded in the guide rail so as to be able to move along the guide rail.

4. The double-drive gate valve for use in a large-caliber ultra-high vacuum environment according to claim 3, characterized in that: The guide wheels are provided in two numbers and are arranged at the outer sides of the limiting wheels.

5. The double-drive gate valve for use in a large-caliber ultra-high vacuum environment according to claim 3, characterized in that: At least two limiting wheels are disposed at the upper end and the lower end of the valve seat, and the limiting wheel located at the upper end is staggered relative to the limiting wheel located at the lower end.

6. The double-drive gate valve for large-caliber ultra-high vacuum environment according to claim 1, characterized in that: A height limiting plate is provided below the movable plate, and the height limiting plate is fixedly arranged on the valve seat. When the movable plate descends and is arranged on the height limiting plate, the hanging section releases the contact relationship with the hooking section.

7. The double-drive gate valve for use in a large-caliber ultra-high vacuum environment according to claim 1, characterized in that: The hooking section is provided as an L-shaped hooking plate, and the hanging section is provided as a Γ-shaped hanging plate; / and, the mounting plates are provided in plurality and are spaced apart along the moving direction of the movable plate.

8. The double-drive gate valve for use in a large-caliber ultra-high vacuum environment according to claim 1, characterized in that: The second driver is configured as a cylinder, and the hooking section is provided on the telescopic shaft of the cylinder.

9. The double-drive gate valve for use in a large-caliber ultra-high vacuum environment according to claim 1, characterized in that: The first driver includes a motor, a sprocket and a transmission chain. The motor is arranged on a base, and two sprockets are respectively arranged at two ends of the base. The output shaft of the motor is connected to one of the sprockets; the transmission chain is wound around the sprocket and connected to the motor. When the motor is driven, the sprocket rotates and drives the transmission chain to move along the X direction.

10. The double-drive gate valve for large-caliber ultra-high vacuum environment according to claim 1, characterized in that: The dual-drive gate valve further comprises a controller and a position detector, wherein the position detector is arranged on the base to detect current position information of the valve seat; and the controller is communicatively connected to the position detector, the first driver and the second driver.

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