Round heat preservation part and heating furnace comprising same

Abstract

The circular heat preservation piece comprises semicircular heat preservation blocks, step faces are arranged at the ends of the heat preservation blocks so that the two heat preservation blocks can be spliced to form an annular heat preservation ring, and the multiple heat preservation rings are sequentially arranged on the outer side of a spiral heater so that the circular heat preservation piece can be formed, and heat preservation can be achieved; a plurality of grooves are formed in the inner side of the heat preservation block in the radial direction, the grooves are used for embedding the insulators, and the multiple insulators are arranged on the periphery of the heater in the radial direction. The circular heating body has the characteristics of compact structure, convenience in disassembly and assembly, good heat preservation performance and the like, and the use safety of the circular heating body is improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment, and in particular to a circular heat-insulating component and a heating furnace comprising the same. Background Art

[0002] The circular heating element is a key component of semiconductor equipment, which will be heated to a temperature above 1100°C when in use. In the circular heating element, the refractory fiber blanket is in contact with the heater, and after a period of heating, it will shrink and collapse, causing the heater to sink, affecting the normal use of the semiconductor heating equipment.

[0003] In order to solve the problem of shrinkage and collapse of the circular heating body and sinking of the heater during use, the existing technology is to wrap a compressed refractory fiber blanket on the heater. The degree of compression of the refractory fiber blanket directly affects whether the circular heating body sinks, but the degree of compression of the refractory fiber blanket cannot be accurately controlled. In addition, the existing processing method is mainly to spread the refractory fiber blanket flat and then roll it back and forth on the refractory fiber blanket with a rolling roller to achieve the purpose of compacting the refractory fiber blanket. The time that the rolling roller stays on the refractory fiber will directly affect the tightness of the refractory fiber blanket, and the refractory fiber blanket will rebound within a certain period of time. The existing operation method requires high skills of the operator, and the product qualification rate is uncontrollable. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a circular insulation component and a heating furnace containing the same which have compact structure, convenient assembly and disassembly and significant insulation effect, in view of the defects of shrinkage and collapse of fiber blanket and sinking of heater in the existing insulation device of circular heating body.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0006] A circular insulation component comprises a semicircular insulation block, wherein the end of the insulation block is provided with a step surface so that two insulation blocks can be spliced ​​together to form a circular insulation ring, and a plurality of insulation rings are arranged in sequence on the outside of a spiral heater to form a circular insulation component to achieve insulation; a plurality of grooves are radially provided on the inner side of the insulation block, and the grooves are used to accommodate insulators, and a plurality of insulators are radially arranged on the outer periphery of the heater.

[0007] As a further improvement of the present invention, the insulation block is obtained by cutting a square HTA block.

[0008] As a further improvement of the present invention, the square HTA block is formed by pressing refractory fiber wool, and the bulk density of the square HTA block is greater than 210 kg per cubic meter.

[0009] As a further improvement of the present invention, the radial length of the heat-insulating block is (1 / 10) to (1 / 8) of the total length of the heater.

[0010] As a general technical concept, the present invention also provides a heating furnace, including a heater, an insulator, a furnace barrel and the above-mentioned circular insulation member; the heater is arranged in the furnace barrel, the circular insulation member and multiple insulators are nested on the outside of the heater, and a groove for accommodating the insulator is provided on the inner side of the circular insulation member.

[0011] As a further improvement of the present invention, a furnace body end plate is provided at the end of the furnace barrel, and a cotton ring is provided between the furnace body end plate and the end of the heater.

[0012] As a further improvement of the present invention, there is a gap between the inner wall of the furnace drum and the cotton ring, and the gap is filled with thermal insulation cotton.

[0013] As a further improvement of the present invention, a plurality of wiring brackets and a plurality of thermocouple brackets are provided on the side of the furnace drum.

[0014] As a further improvement of the present invention, the heater is formed by winding a whole heating wire to form a spiral structure.

[0015] As a further improvement of the present invention, the furnace drum is made of stainless steel.

[0016] Compared with the prior art, the advantages of the present invention are:

[0017] The circular insulation component of the present invention is a circular insulation ring formed by splicing two semicircular insulation blocks with step surfaces at the ends. The structure is simple and compact, and the insulation ring is easy to disassemble and assemble on the outer periphery of the heater. Multiple insulation rings are arranged in sequence on the outside of the heater, which can support the heater and prevent the heater from sinking, thereby improving the safety of the heater operation. Furthermore, the two insulation blocks are spliced ​​with stepped surfaces, which can also prevent heat from radiating from the through-slits of the two insulation blocks after the heater is heated up, thereby improving the utilization rate of thermal energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure principle of a circular heat-insulating member in a specific embodiment of the present invention;

[0019] Figure 2 It is a schematic diagram of the structural principle of the heat preservation block in a specific embodiment of the present invention;

[0020] Figure 3 It is a schematic diagram of the assembly structure principle of the circular heat-insulating member and the heater in a specific embodiment of the present invention;

[0021] Figure 4 It is a schematic diagram of the structural principle of a heater in a specific embodiment of the present invention;

[0022] Figure 5It is a schematic diagram of the structural principle of a heating furnace in a specific embodiment of the present invention;

[0023] Legend: 1. Insulation ring; 2. Heater; 3. Screw; 4. Insulator; 5. Furnace tube; 6. Nut; 7. Cotton ring; 8. Furnace end plate; 9. Wiring bracket; 10. Handle; 11. Insulation block; 12. Groove; 13. Step surface; 14. Thermocouple seat. DETAILED DESCRIPTION

[0024] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0025] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0027] Example

[0028] like Figure 1 , Figure 2 and Figure 3 As shown, the circular heat-insulating component of the present invention comprises a semicircular heat-insulating block 11, and a step surface 13 is provided at the end of the heat-insulating block 11 to realize that two heat-insulating blocks 11 are spliced ​​to form a circular heat-insulating ring 1, and a plurality of heat-insulating rings 1 are sequentially arranged on the outside of the spiral heater 2 to form a circular heat-insulating component to achieve heat preservation. A plurality of grooves 12 are radially provided on the inner side of the heat-insulating block 11, and the size of the grooves 12 is slightly larger than the outer size of the insulator 4 to accommodate the insulator 4, and a plurality of insulators 4 are radially arranged on the outer periphery of the heater 2.

[0029] In this embodiment, the annular insulation ring 1 is formed by splicing two semicircular insulation blocks 11 with step surfaces 13 at the ends. The structure is simple and compact, and the insulation ring 1 is easy to disassemble and assemble on the outer periphery of the heater 2. Multiple insulation rings 1 are arranged in sequence on the outside of the heater 2, which can support the heater 2, prevent the heater 2 from sinking, and improve the safety of the operation of the heater 2. Furthermore, the step surface 13 is used between the two insulation blocks 11 to prevent the heat from radiating out from the through seam of the two insulation blocks 11 after the heater 2 is heated, thereby improving the utilization rate of thermal energy.

[0030] In this embodiment, refractory fiber wool raw material is used and pressed into a rectangular HTA block with a bulk density greater than 210 kg per cubic meter, and then the rectangular HTA block is cut into semi-cylindrical insulation blocks 11.

[0031] like Figure 3 As shown, further, the radial length of each insulation block 11 is 1 / 10 of the total length of the heater 2. In other embodiments, the radial length of each insulation block 11 can be 1 / 10 to 1 / 8 of the total length of the heater 2 to prevent the insulation block 11 from shrinking and collapsing and causing the heater 2 to sink.

[0032] like Figure 5 As shown, in this embodiment, a heating furnace is also provided, including a heater 2, an insulator 4, a furnace barrel 5 and the above-mentioned circular insulation member. The furnace barrel 5 is made of stainless steel material, the heater 2 is arranged in the furnace barrel 5, the circular insulation member and a plurality of insulators 4 are nested on the outside of the heater 2, and a groove 12 for accommodating the insulator 4 is provided on the inner side of the circular insulation member. The inner diameter of the insulation block 11 is equal to the outer diameter of the heater 2, and the outer diameter of the insulation block 11 is slightly smaller than the outer diameter of the furnace barrel 5 to ensure that the insulation ring 1 can fit tightly between the heater 2 and the furnace barrel 5 to prevent the heater 2 from sinking. The insulation elements on the same insulator 4 are connected in series through the screw 3, and the nuts 6 are used to lock the two ends of the screw 3 to ensure that the insulator 4 is firmly installed on the outside of the heater 2.

[0033] In this embodiment, a furnace body end plate 8 is provided at the end of the furnace tube 5 , and a cotton ring 7 is provided between the furnace body end plate 8 and the end of the heater 2 .

[0034] Furthermore, there is a gap between the inner wall of the furnace tube 5 and the cotton ring 7, and the gap is filled with thermal insulation cotton to prevent the cotton ring 7 from cracking.

[0035] like Figure 5 As shown, a plurality of wiring brackets 9 and a plurality of thermocouple brackets 14 are provided on the side of the furnace drum 5 to facilitate the installation of thermocouples in the wiring box.

[0036] like Figure 4 As shown, the heater 2 is formed by winding a whole heating wire into a spiral structure to ensure uniform heating.

[0037] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A circular heat-insulating member, characterized in that: The invention comprises a semicircular heat-insulating block (11), wherein the end of the heat-insulating block (11) is provided with a step surface (13) so that two heat-insulating blocks (11) can be spliced ​​together to form a circular heat-insulating ring (1), and a plurality of heat-insulating rings (1) are sequentially arranged on the outside of a spiral heater (2) to form a circular heat-insulating member to achieve heat preservation; a plurality of grooves (12) are radially provided on the inside of the heat-insulating block (11), and the grooves (12) are used to accommodate insulators (4), and a plurality of insulators (4) are radially arranged on the outer periphery of the heater (2).

2. The circular heat-insulating member according to claim 1, characterized in that: The heat-insulating block (11) is obtained by cutting a square HTA block.

3. The circular heat-insulating member according to claim 2, characterized in that: The square HTA block is formed by pressing refractory fiber wool, and the bulk density of the square HTA block is greater than 210 kg per cubic meter.

4. The circular heat-insulating member according to claim 3, characterized in that: The radial length of the heat-insulating block (11) is (1 / 10) to (1 / 8) of the total length of the heater (2).

5. A heating furnace, characterized in that: It comprises a heater (2), an insulating rod (4), a furnace drum (5) and a circular thermal insulation member as claimed in any one of claims 1 to 4; the heater (2) is arranged in the furnace drum (5), the circular thermal insulation member and a plurality of insulating rods (4) are nested on the outside of the heater (2), and a groove (12) for accommodating the insulating rod (4) is provided on the inside of the circular thermal insulation member.

6. The heating furnace according to claim 5, characterized in that: A furnace body end plate (8) is provided at the end of the furnace barrel (5), and a cotton ring (7) is provided between the furnace body end plate (8) and the end of the heater (2).

7. The heating furnace according to claim 6, characterized in that: There is a gap between the inner wall of the furnace drum (5) and the cotton ring (7), and the gap is filled with thermal insulation cotton.

8. The heating furnace according to claim 5, characterized in that: The side of the furnace drum (5) is provided with a plurality of wiring brackets (9) and a plurality of thermocouple brackets (14).

9. The heating furnace according to any one of claims 5 to 8, characterized in that: The heater (2) is formed by winding a whole heating wire to form a spiral structure.

10. The heating furnace according to any one of claims 5 to 8, characterized in that: The furnace drum (5) is made of stainless steel.

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