Angular velocity sensing method and system based on double-silicon-based micro-ring resonance demodulation

Abstract

The invention relates to the technical field of integrated optical gyroscopes, in particular to an angular velocity sensing method and system based on double-silicon-based micro-ring resonance demodulation. The device is characterized in that the driving circuit drives broadband light emitted by the on-chip light source to be coupled into the on-chip silicon-based optical waveguide through the input grating; the broadband light is modulated into narrowband light after passing through the first silicon-based micro-ring; the narrow-band light enters the silicon-based sensing ring, and when the silicon-based sensing ring rotates, the narrow-band light generates Sagnac frequency shift; the second silicon-based micro-ring changes a channel frequency band through electric modulation, and when the channel frequency band is matched with the frequency of the frequency-shifted narrow-band optical signal, resonance demodulation is realized; and the demodulated optical signal enters an on-chip detector through an output grating and is converted into an electric signal, and the initial angular velocity of the carrier platform is demodulated after the electric signal is processed by a demodulation circuit. According to the invention, high-sensitivity sensing of the angular velocity is realized based on double-silicon-based micro-ring resonance demodulation; and a theoretical basis and a technical support are provided for the development of an integrated optical gyroscope with the advantages of high sensitivity, miniaturization, chip formation and low cost.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated optical gyroscopes, and in particular to an angular velocity sensing method and system based on dual silicon-based micro-ring resonant demodulation. Background Art

[0002] Optical gyroscopes are sensors used to measure the angular velocity of carrier platforms. They are currently widely used in aerospace, military weapons, earthquake monitoring and many other fields. However, with the rapid development of modern carrier platforms such as micro-satellites, intelligent ammunition, drones and smart driving cars, gyroscopes with high sensitivity, wide-band response, integration, chip-based and low-cost advantages have become an important demand. Silicon-based monolithic integrated optical gyroscopes compatible with CMOS technology have great potential in integrated chip-based and production costs, but their low sensitivity greatly limits the promotion and application of such gyroscopes. Therefore, new high-sensitivity demodulation methods are of great scientific significance to the research on silicon-based monolithic integrated optical gyroscopes.

[0003] Silicon-based monolithic integrated optical microsystems are compatible with CMOS technology and are often used in the production of temperature, magnetic field and other parameter sensing systems. At present, the heterogeneous integration process of silicon-based chips and III-V light sources and photodetectors is very mature. Silicon-based monolithic integrated optical gyroscope solutions have been reported from time to time, and angular motion sensing has been achieved in a very small volume. However, the sensitivity of the existing demodulation method is still low, which greatly limits the promotion and application of integrated optical gyroscopes. Summary of the invention

[0004] In order to solve the technical problem of low sensitivity of existing integrated optical gyroscope demodulation methods, the embodiment of the present invention provides an angular velocity sensing method and system based on dual silicon-based micro-ring resonant demodulation. The technical solution is as follows:

[0005] On the one hand, a sensing system based on dual silicon-based microring resonant demodulation is provided, comprising: a driving circuit, an on-chip light source, an input grating, a first silicon-based microring, a silicon-based sensing ring, a second silicon-based microring, a modulation circuit, an output grating, an on-chip detector, and a demodulation circuit;

[0006] The on-chip light source is driven by a driving circuit, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through an input grating;

[0007] When light is transmitted to the first optical waveguide of the first silicon-based microring, it enters the first silicon-based microring in the form of evanescent wave coupling and generates resonance in the microring; wherein the first optical waveguide is located on the light input side of the first silicon-based microring;

[0008] Light in the resonant frequency band outputs narrowband light through the first silicon-based microring and enters the second optical waveguide of the first silicon-based microring through evanescent wave coupling; wherein the second optical waveguide is located on the light output side of the first silicon-based microring;

[0009] Narrowband light enters the silicon-based sensing ring through an optical waveguide. When the silicon-based sensing ring rotates, the output light frequency changes with the rotation of the silicon-based microring.

[0010] After passing through the silicon-based sensing ring, the narrowband light enters the second silicon-based microring through evanescent wave coupling. Under the control of the electric field of the modulation circuit, the resonant channel of the silicon-based microring shifts. When the channel matches the signal, resonant demodulation is achieved and an intensity modulated signal is output.

[0011] The optical signal output by the second silicon-based micro-ring enters the on-chip detector through the output grating and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit and then demodulated to obtain the initial angular velocity signal of the angular velocity sensing system.

[0012] Optionally, only light in the resonant frequency band can pass through the silicon-based microring.

[0013] Optionally, narrowband light enters the silicon-based sensor ring, and the frequency of light output by the silicon-based sensor ring shifts as the sensor ring rotates, including:

[0014] Narrowband light enters the silicon-based sensor ring, and the light propagates in the optical waveguide of the silicon-based sensor ring. When the silicon-based sensor ring does not rotate, the output light frequency remains unchanged.

[0015] When the silicon-based sensor ring rotates along the plane where the ring is located, the light will show a relativistic effect during transmission in the ring, thereby generating a Sagnac phase shift. At this time, the narrowband light frequency shifts. The magnitude of the light frequency shift output by the silicon-based sensor ring is judged. The faster the rotation speed, the greater the shift.

[0016] Optionally, judging the magnitude of the optical frequency shift output by the silicon-based sensor ring further includes:

[0017] The carrier rotation angular velocity is demodulated by detecting the shift in the narrowband light frequency.

[0018] Optionally, the angular velocity of the carrier platform is demodulated, including:

[0019] Based on the first silicon-based micro-ring, broadband light is converted into narrow-band light, and narrow-band light with extremely narrow frequency band is demodulated;

[0020] After the narrow-band light passes through the rotating silicon-based sensing ring, it forms frequency-shifted narrow-band light and then enters the second silicon-based micro-ring.

[0021] Optionally, modulation is applied to the electrodes on the silicon-based microring through a modulation circuit; the offset of the resonant channel is obtained by fine-tuning the size of the silicon-based microring, and the center frequency of the narrowband light is biased to the highest sensitivity on one side of the resonant channel, thereby completing the demodulation of the directionality of the carrier platform.

[0022] On the other hand, a dual silicon-based micro-ring resonant demodulation method is provided, which is applied to an angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation, and the method comprises:

[0023] S1, driving the on-chip light source through the driving circuit, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating;

[0024] S2, when the light is transmitted to the first optical waveguide of the first silicon-based microring, it enters the first silicon-based microring in the form of evanescent wave coupling and resonates in the microring; wherein the first optical waveguide is located at the light input side of the first silicon-based microring;

[0025] S3, the light in the resonant frequency band passes through the first silicon-based microring and outputs narrowband light, and enters the second optical waveguide of the first silicon-based microring through evanescent wave coupling; wherein the second optical waveguide is located on the light output side of the first silicon-based microring;

[0026] S4, narrowband light enters the silicon-based sensor ring through the optical waveguide. When the silicon-based sensor ring rotates, the output light frequency shifts with the rotation of the sensor ring;

[0027] S5, after passing through the silicon-based sensing ring, the narrowband light enters the second silicon-based micro-ring through evanescent wave coupling. Under the control of the electric field of the modulation circuit, the resonant channel of the silicon-based micro-ring shifts; when the channel matches the signal, resonant demodulation is achieved and an intensity modulated signal is output;

[0028] S6. The optical signal output by the second silicon-based micro-ring enters the on-chip detector through the output grating and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit and then demodulated to obtain the initial angular velocity signal of the angular velocity sensing system.

[0029] Optionally, in S2, only light in the resonant frequency band can pass through the silicon-based microring.

[0030] Optionally, S4 includes: narrowband light enters the silicon-based sensor ring, the light propagates in the optical waveguide of the silicon-based sensor ring, and when the silicon-based sensor ring does not rotate, the output light frequency remains unchanged;

[0031] When the silicon-based sensor ring rotates along the plane where the ring is located, the light will show a relativistic effect during transmission in the ring, thereby generating a Sagnac phase shift. At this time, the narrowband light frequency shifts. The magnitude of the light frequency shift output by the silicon-based sensor ring is judged. The faster the rotation speed, the greater the shift.

[0032] On the other hand, an angular velocity sensing device based on dual silicon-based micro-ring resonant demodulation is provided, and the angular velocity sensing device based on dual silicon-based micro-ring resonant demodulation comprises:

[0033] A processor processes the collected signal to obtain an angular velocity value;

[0034] The memory stores ARM processor readable instructions and temporarily stores the collected data. When the ARM processor readable instructions are executed by the processor, any one of the above-mentioned angular velocity sensing methods based on dual silicon-based micro-ring resonant demodulation is implemented.

[0035] On the other hand, an ARM processor-readable storage medium is provided, in which at least one instruction is stored, and the at least one instruction is loaded and executed by the processor to implement any one of the above-mentioned angular velocity sensing methods based on dual silicon-based microring resonant demodulation.

[0036] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0037] In the embodiment of the present invention, through various studies on silicon-based monolithic integrated optical gyroscopes, it is found that the high-sensitivity detection of Sagnac frequency shift can be achieved based on the dual silicon-based micro-ring resonant demodulation method, thereby realizing the sensing of angular velocity; the present invention provides a new solution for the realization of high-sensitivity silicon-based monolithic integrated optical gyroscopes compatible with CMOS processes. The implementation of the present invention will provide a theoretical basis and technical support for the development of integrated optical gyroscopes with the advantages of high sensitivity, miniaturization, chip-based and low cost, further expand their application in more fields, and generate huge social application value and economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0039] Figure 1 It is a structural diagram of an angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation provided by an embodiment of the present invention;

[0040] Figure 2 It is a signal flow chart of a dual silicon-based micro-ring resonant demodulation angular velocity sensor system provided by an embodiment of the present invention;

[0041] Figure 3 This is a schematic diagram of a silicon-based micro-ring provided in an embodiment of the present invention that realizes signal demodulation by channel shift under voltage modulation;

[0042] Figure 4 It is a flow chart of an angular velocity sensing method based on dual silicon-based micro-ring resonant demodulation provided by an embodiment of the present invention;

[0043] Figure 5 The present invention provides a schematic diagram of the structure of an angular velocity sensor device based on dual silicon-based micro-ring resonant demodulation. DETAILED DESCRIPTION

[0044] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0045] In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0046] The embodiment of the present invention provides an angular velocity sensing method and system based on dual silicon-based micro-ring resonant demodulation, such as Figure 1 The structure diagram of the angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation is shown, and the sensing system of the present invention includes:

[0047] Driving circuit 1, on-chip light source 2, input grating 3, first silicon-based micro-ring 4, silicon-based sensing ring 5, second silicon-based micro-ring 6, modulation circuit 7, output grating 8, on-chip detector 9, demodulation circuit 10;

[0048] The on-chip light source 2 is driven by the driving circuit 1, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating 3;

[0049] When light is transmitted to the first optical waveguide of the first silicon-based microring 4, it enters the first silicon-based microring 4 in the form of evanescent wave coupling and generates resonance in the microring; wherein the first optical waveguide is located at the light input side of the first silicon-based microring 4;

[0050] The light in the resonant frequency band passes through the first silicon-based microring 4 and outputs narrowband light, and enters the second optical waveguide of the first silicon-based microring 4 through evanescent wave coupling; wherein the second optical waveguide is located at the light output side of the first silicon-based microring 4;

[0051] The narrowband light enters the silicon-based sensor ring 5 through the optical waveguide. When the silicon-based sensor ring 5 rotates, the output light frequency shifts with the rotation of the sensor ring.

[0052] After passing through the silicon-based sensing ring 5, the narrowband light enters the second silicon-based micro-ring 6 through evanescent wave coupling. Under the control of the electric field of the modulation circuit 7, the resonant channel of the silicon-based micro-ring shifts; when the channel matches the signal, resonant demodulation is achieved and an intensity modulated signal is output;

[0053] The optical signal output by the second silicon-based micro-ring 6 enters the on-chip detector 9 through the output grating 8 and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit 10 and then demodulated to obtain an initial angular velocity signal.

[0054] In a feasible implementation manner, only light in the resonance frequency band can pass through the first silicon-based microring 4 .

[0055] In a feasible implementation, narrowband light enters the silicon-based sensing ring 5, and the frequency of light output by the silicon-based sensing ring 5 changes with the rotation of the silicon-based microring, including:

[0056] When light propagates in the optical waveguide of the silicon-based sensor ring 5, if the platform where the silicon-based sensor ring 5 is located does not rotate, the output light frequency remains unchanged; when the sensor ring rotates along the plane where the ring 5 is located, the light will show a relativistic effect during transmission in the ring, thereby generating a Sagnac phase shift. At this time, the narrowband light frequency shifts. The magnitude of the light frequency shift output by the silicon-based sensor ring 5 is judged. The greater the rotation speed, the greater the shift.

[0057] In a feasible implementation manner, judging whether the optical frequency output by the silicon-based sensor ring 5 is offset further includes:

[0058] The carrier rotation angular velocity is demodulated by detecting the shift in the narrowband light frequency.

[0059] In a feasible implementation manner, demodulating the rotational angular velocity of the carrier includes:

[0060] Based on silicon-based micro-rings, broadband light is converted into narrow-band light, and narrow-band light with extremely narrow frequency band is filtered out;

[0061] After the narrow-band light passes through the rotating silicon-based microring, it forms frequency-shifted narrow-band light, and then enters the silicon-based microring.

[0062] In a feasible implementation, modulation is applied to the electrodes on the silicon-based microring by means of the modulation circuit 7; the size of the silicon-based microring is fine-tuned to obtain an offset of the resonant channel, thereby biasing the center frequency of the narrowband light to the highest sensitivity on one side of the resonant channel, thereby completing the demodulation of the directionality of the carrier platform.

[0063] In a feasible implementation, in the present invention, when the carrier platform does not rotate, the light frequency in the silicon-based sensor ring 5 is constant, but when it rotates, the light in the silicon-based sensor ring 5 will produce a Sagnac frequency shift due to the relativistic effect, and the carrier rotation angular velocity can be demodulated by detecting the frequency shift. In order to demodulate the tiny frequency shift, the resonance of two identical silicon-based microrings is used to achieve this. The signal flow of the dual silicon-based microring demodulation angular velocity sensor system provided in the embodiment of the present invention is as follows: Figure 2 As shown, firstly, broadband light is converted into narrowband light based on the first silicon-based microring 4. Since only light with the same resonance frequency as the microring can pass through, narrowband light with extremely narrow frequency band can be screened out. After the narrowband light passes through the rotating first silicon-based microring 4, it forms frequency-shifted narrowband light, and then enters the second silicon-based microring 6. When the frequency is not shifted, the first silicon-based microring 4 and the second silicon-based microring 6 have the same resonance channel. At this time, the output light intensity is theoretically the largest, but after the frequency shift, the narrowband light will offset the resonance channel of the second silicon-based microring 6. At this time, the output light intensity will decrease. The demodulation of the angular velocity can be achieved by demodulating the intensity signal.

[0064] In a feasible implementation, Figure 3 A schematic diagram of a silicon-based microring provided in an embodiment of the present invention for achieving signal demodulation by channel deviation under voltage modulation: a modulation circuit 7 applies an electric field to the silicon-based microring through an electrode, and changes the central resonance frequency of its resonance channel by changing the deformation of the silicon-based microring, so that it matches the central frequency of the narrowband light, thereby enabling the system to achieve demodulation of angular velocity.

[0065] In a feasible implementation, the carrier platform will cause a decrease in the light intensity signal when rotating in both clockwise and counterclockwise directions. In order to realize the detection of the system in different directions, the modulation circuit 7 is used to modulate the electrodes on the second silicon-based microring 6, and the offset of the resonance channel is realized by fine-tuning the size of the silicon-based microring, thereby biasing the narrow-band light center frequency to the highest sensitivity on one side of the resonance channel. The modulation of the second silicon-based microring 6 can not only solve the demodulation of the directionality of the carrier platform, but also enable the system to achieve the highest sensitivity.

[0066] In the embodiment of the present invention, an angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation is provided through the elaboration of the above technical features, that is, a monolithic integrated optical gyroscope based on dual silicon-based micro-ring resonant demodulation; the present invention finds through various studies on silicon-based monolithic integrated optical gyroscopes that a high-sensitivity detection of Sagnac frequency shift can be achieved based on a dual silicon-based micro-ring resonant demodulation method, thereby achieving angular velocity sensing, which provides a new solution for the realization of a high-sensitivity silicon-based monolithic integrated optical gyroscope compatible with CMOS technology. The implementation of the present invention will provide a theoretical basis and technical support for the development of integrated optical gyroscopes with the advantages of high sensitivity, miniaturization, chip-based and low cost, further expand their application in more fields, and generate huge social application value and economic benefits.

[0067] The embodiment of the present invention provides an angular velocity sensing method based on dual silicon-based micro-ring resonant demodulation, and the method is implemented by an angular velocity sensing device based on dual silicon-based micro-ring resonant demodulation. Figure 4 The flowchart of the demodulation method based on dual silicon-based micro-ring resonance is shown, and the processing flow of the method may include the following steps:

[0068] S1, driving the on-chip light source through the driving circuit, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating;

[0069] S2, when the light is transmitted to the first optical waveguide of the first silicon-based microring, it enters the first silicon-based microring in the form of evanescent wave coupling and resonates in the microring; wherein the first optical waveguide is located at the light input side of the first silicon-based microring;

[0070] S3, the light in the resonant frequency band passes through the first silicon-based microring and outputs narrowband light, and enters the second optical waveguide of the first silicon-based microring through evanescent wave coupling; wherein the second optical waveguide is located on the light output side of the first silicon-based microring;

[0071] S4, narrowband light enters the silicon-based sensor ring through the optical waveguide. When the silicon-based sensor ring rotates, the output light frequency shifts with the rotation of the sensor ring;

[0072] S5, after passing through the silicon-based sensing ring, the narrowband light enters the second silicon-based micro-ring through evanescent wave coupling. Under the control of the electric field of the modulation circuit, the resonant channel of the silicon-based micro-ring shifts; when the channel matches the signal, resonant demodulation is achieved and an intensity modulated signal is output;

[0073] S6. The optical signal output by the second silicon-based micro-ring enters the on-chip detector through the output grating and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit and then demodulated to obtain the initial angular velocity signal of the angular velocity sensing system.

[0074] Optionally, in S2, only light in the resonant frequency band can pass through the first silicon-based microring.

[0075] Optionally, S4 includes: narrowband light enters the silicon-based sensor ring, the light propagates in the optical waveguide of the silicon-based sensor ring, and when the silicon-based sensor ring does not rotate, the output light frequency remains unchanged;

[0076] When the silicon-based sensor ring rotates along the plane where the ring is located, the light will show a relativistic effect during transmission in the ring, thereby generating a Sagnac phase shift. At this time, the narrowband light frequency shifts. The magnitude of the light frequency shift output by the silicon-based sensor ring is judged. The faster the rotation speed, the greater the shift.

[0077] Optionally, judging the magnitude of the optical frequency shift output by the silicon-based sensor ring further includes:

[0078] The angular velocity of the carrier platform rotation is demodulated by detecting the shift in the narrowband light frequency.

[0079] Optionally, the angular velocity of the carrier platform rotation is demodulated, including:

[0080] Based on the first silicon-based micro-ring, broadband light is converted into narrow-band light, and narrow-band light with extremely narrow frequency band is screened out;

[0081] After the narrow-band light passes through the rotating silicon-based sensing ring, it forms frequency-shifted narrow-band light and then enters the second silicon-based micro-ring.

[0082] Optionally, modulation is applied to the electrodes on the silicon-based microring through a modulation circuit; the offset of the resonant channel is obtained by fine-tuning the size of the silicon-based microring, and the center frequency of the narrowband light is biased to the highest sensitivity on one side of the resonant channel, thereby completing the demodulation of the directionality of the carrier platform.

[0083] Through extensive research on silicon-based monolithic integrated optical microsystems, the present invention finds that the detection of Sagnac frequency shift can be realized based on the dual silicon-based microring resonant demodulation method, thereby realizing high-sensitivity sensing of angular velocity, which provides a new solution for the realization of high-sensitivity silicon-based monolithic integrated optical gyroscopes compatible with CMOS processes. The implementation of the present invention will provide a theoretical basis and technical support for the development of integrated optical gyroscopes with the advantages of high sensitivity, miniaturization, chip-based and low cost, further expand their application in more fields, and generate huge social application value and economic benefits.

[0084] Figure 5 is a schematic diagram of the structure of an angular velocity sensor device based on dual silicon-based micro-ring resonant demodulation provided by an embodiment of the present invention, such as Figure 5 As shown, the angular velocity sensing device based on dual silicon-based micro-ring resonant demodulation may include the above Figure 1 The angular velocity sensing system based on dual silicon-based microring resonant demodulation is shown.

[0085] Optionally, the angular velocity sensing device 510 based on dual silicon-based micro-ring resonance demodulation may include a first ARM processor 5001 .

[0086] Optionally, the angular velocity sensing device 510 based on dual silicon-based micro-ring resonance demodulation may further include a memory 5002 and a transceiver 5003 .

[0087] The first ARM processor 5001, the memory 5002 and the transceiver 5003 may be connected via a communication bus.

[0088] Combine the following Figure 5 The components of the angular velocity sensor device 510 based on dual silicon-based micro-ring resonant demodulation are specifically introduced:

[0089] The first ARM processor 5001 is a control center for signal acquisition of the angular velocity sensor device 510 based on dual silicon-based micro-ring resonance demodulation.

[0090] Optionally, the first ARM processor 5001 can implement various functions of the angular velocity sensing device 510 based on dual silicon-based micro-ring resonance demodulation by running or executing a software program stored in the memory 5002 and calling voltage control data stored in the memory 5002 .

[0091] Optionally, the memory 5002 is used to store data collected by executing the solution of the present invention, and the first ARM processor 5001 controls the execution of data collection and temporarily stores it in the memory 5002; the specific implementation method can refer to the above method embodiment and will not be repeated here.

[0092] Optionally, in a specific implementation, as an embodiment, the angular velocity sensor device 510 based on dual silicon-based micro-ring resonant demodulation may also include multiple processors, such as Figure 5 The first ARM processor 5001 and the second ARM processor 5004 are shown.

[0093] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. An angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation, characterized in that: include: Driving circuit, on-chip light source, input grating, first silicon-based micro-ring, silicon-based sensing ring, second silicon-based micro-ring, modulation circuit, output grating, on-chip detector, demodulation circuit; The on-chip light source is driven by a driving circuit, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through an input grating; When light is transmitted to the first optical waveguide of the first silicon-based microring, it enters the first silicon-based microring in the form of evanescent wave coupling and generates resonance in the microring; wherein the first optical waveguide is located at the light input side of the first silicon-based microring; The light in the resonant frequency band passes through the first silicon-based microring and outputs narrowband light, and enters the second optical waveguide of the first silicon-based microring through evanescent wave coupling; wherein the second optical waveguide is located at the light output side of the first silicon-based microring; The narrowband light enters the silicon-based sensing ring through the optical waveguide, and when the silicon-based sensing ring rotates, the center frequency of the narrowband light shifts; After passing through the silicon-based sensing ring, the narrowband light enters the second silicon-based microring through evanescent wave coupling, and the resonant channel of the silicon-based microring is shifted under the electric field control of the modulation circuit; when the channel matches the signal, resonant demodulation is achieved and an intensity modulated signal is output; The optical signal output by the second silicon-based micro-ring enters the on-chip detector through the output grating and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit and then demodulated to obtain an initial angular velocity signal of the angular velocity sensor system.

2. The angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation according to claim 1 is characterized in that: Only light in the resonant frequency band can pass through the first silicon-based microring.

3. The angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation according to claim 2 is characterized in that: The narrowband light enters the silicon-based sensing ring through a waveguide, and the light frequency output by the silicon-based sensing ring changes with the rotation of the silicon-based microring, specifically including: Narrowband light enters the silicon-based sensor ring, and the light propagates in the optical waveguide of the silicon-based sensor ring. When the silicon-based sensor ring does not rotate, the output light frequency remains unchanged. When the silicon-based sensor ring rotates along the plane where the ring is located, the light will show a relativistic effect during transmission in the ring, thereby generating a Sagnac phase shift. At this time, the narrowband light frequency shifts. The magnitude of the shift of the light frequency output by the silicon-based sensor ring is judged. The faster the rotation speed, the greater the shift.

4. The angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation according to claim 3 is characterized in that: The method further comprises: determining the magnitude of the optical frequency offset output by the silicon-based sensor ring; The angular velocity of the carrier platform rotation is demodulated by detecting the shift in the narrowband light frequency.

5. The angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation according to claim 4 is characterized in that: The demodulating the angular velocity of the carrier platform rotation includes: Based on the first silicon-based micro-ring, broadband light is converted into narrow-band light, and narrow-band light with extremely narrow frequency band is filtered out; After the narrow-band light passes through the rotating silicon-based sensing ring, it forms frequency-shifted narrow-band light and then enters the second silicon-based micro-ring.

6. The angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation according to claim 5 is characterized in that: Modulation is applied to the electrode on the second silicon-based microring through a modulation circuit; the offset of the resonance channel is obtained by fine-tuning the size of the silicon-based microring, and the center frequency of the narrowband light is biased to the highest sensitivity on one side of the resonance channel, thereby completing the demodulation of the directionality of the carrier platform.

7. An angular velocity sensing method based on dual silicon-based microring resonant demodulation, the method based on dual silicon-based microring resonant demodulation is used to implement any angular velocity sensing system based on dual silicon-based microring resonant demodulation as claimed in any one of claims 1 to 6, characterized in that: The method comprises: S1, driving the on-chip light source through the driving circuit, and the emitted broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating; S2, when light is transmitted to the first optical waveguide of the first silicon-based microring, it enters the first silicon-based microring in the form of evanescent wave coupling and resonates in the microring; wherein the first optical waveguide is located at the light input side of the first silicon-based microring; S3, the light in the resonant frequency band passes through the first silicon-based microring and outputs narrowband light, and enters the second optical waveguide of the first silicon-based microring through evanescent wave coupling; wherein the second optical waveguide is located at the light output side of the first silicon-based microring; S4, the narrowband light enters the silicon-based sensing ring through the optical waveguide, and when the silicon-based sensing ring rotates, the center frequency of the narrowband light shifts; S5, the narrowband light passes through the silicon-based sensing ring and enters the second silicon-based microring through evanescent wave coupling, and the resonant channel of the silicon-based microring is shifted under the electric field control of the modulation circuit; when the channel matches the signal, resonant demodulation is achieved and an intensity modulated signal is output; S6. The optical signal output by the second silicon-based micro-ring enters the on-chip detector through the output grating and is converted into an electrical signal. The electrical signal is processed by the demodulation circuit and then demodulated to obtain an initial angular velocity signal of the angular velocity sensing system.

8. The sensing method based on dual silicon-based micro-ring resonant demodulation according to claim 6 is characterized in that: In S2, only light in the resonant frequency band can pass through the first silicon-based microring.

9. An angular velocity sensing device based on dual silicon-based micro-ring resonant demodulation, characterized in that: The device is used for an angular velocity sensing system based on dual silicon-based micro-ring resonant demodulation, comprising: A processor, wherein the processor processes the collected signal to obtain an angular velocity value; A memory, wherein the memory stores ARM processor-readable instructions and temporarily stores the collected data, and when the ARM processor-readable instructions are executed by the processor, the method according to any one of claims 7 to 8 is implemented.

10. An ARM processor readable storage medium, characterized in that: The ARM processor can read a storage medium storing program code, and the program code can be called by the processor to execute the method according to any one of claims 7 to 8.

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