Monolithic integrated F-P cavity photomechanical acceleration sensor and sensing method

Abstract

The invention relates to the technical field of integrated cavity photomechanical acceleration sensors, in particular to a monolithic integrated F-P cavity photomechanical acceleration sensor and a sensing method, and the method comprises the steps: a drive circuit drives an on-chip light source to emit broadband light, the broadband light enters a silicon-based micro-ring through an input grating, and the broadband light is filtered by the silicon-based micro-ring to output narrow-band light; the narrow-band light is coupled into the F-P cavity light force sensing probe through the silicon-based coupler; after the carrier platform receives an acceleration signal, a narrow-band optical signal is modulated through the F-P cavity optical force sensing probe, reflected light carrying the modulation signal enters the on-chip detector through the silicon-based coupler and the output grating, the on-chip detector converts the optical signal into an electric signal, and the initial acceleration of the carrier platform is obtained after amplification and demodulation. The sensor and the sensing method provided by the invention have the advantages of high sensitivity, miniaturization, chip formation, low cost and the like, and a new technical thought is provided for development of a novel high-performance integrated cavity photomechanical acceleration sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated cavity optomechanical acceleration sensing, and in particular to a monolithic integrated FP cavity optomechanical acceleration sensor and a sensing method. Background Art

[0002] Accelerometer is a sensor that measures the linear acceleration of a carrier. As a key device for inertial navigation, it is widely used in many fields such as aerospace and consumer electronics. However, with the rapid development of modern carrier platforms, such as drones, micro-satellites, and intelligent assisted driving, higher requirements have been placed on the performance of accelerometers. While meeting the requirements of miniaturization and low cost, high sensitivity, wide-band response, and chipization have become important requirements. Silicon-based monolithic integrated optical accelerometers compatible with CMOS technology have great potential in integrated chipization and production cost, but their low sensitivity greatly limits the promotion and application of this type of accelerometer. Therefore, the new high-sensitivity sensing method has important scientific significance for the research on silicon-based monolithic integrated cavity optomechanical accelerometers. Summary of the invention

[0003] In order to solve the technical problem that the low sensitivity of the prior art greatly limits the promotion and application of acceleration sensors, the embodiment of the present invention provides a monolithic integrated FP (Fabry-Perot) cavity optomechanical acceleration sensor and a sensing method. The technical solution is as follows:

[0004] On the one hand, a monolithic integrated FP cavity optical mechanical acceleration sensor is provided, comprising: a driving circuit, an on-chip light source, a silicon-based integrated optical chip, an input grating, a silicon-based micro-ring, a silicon-based coupler, an FP cavity optical force sensing probe, an on-chip detector, and a demodulation circuit;

[0005] The driving circuit drives the on-chip light source to emit broadband light, and the broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating;

[0006] Broadband light enters the silicon-based microring from the optical waveguide through evanescent wave coupling and outputs narrowband light; narrowband light enters the optical waveguide on the other side through evanescent wave coupling;

[0007] The narrowband light output from the silicon-based microring enters the silicon-based coupler through the silicon waveguide, and the output coupling light of the silicon-based coupler enters the FP cavity optical force sensing probe;

[0008] The FP cavity optical force sensing probe reflects the input light, and the reflected light signal is input into the silicon-based coupler again through the on-chip optical waveguide, and the coupled light signal is output to the output grating through the silicon-based coupler;

[0009] The output grating output signal is sent to the on-chip detector, the signal is optically detected by the on-chip detector, and the detected optical signal is output to the demodulation circuit to demodulate the initial acceleration signal.

[0010] Optionally, broadband light enters the silicon-based microring from the optical waveguide in the form of evanescent wave coupling, and outputs narrowband light, including:

[0011] Broadband light enters the silicon-based microring from the optical waveguide through evanescent wave coupling, generating resonance in the silicon-based microring. Light in the resonant frequency band passes through the silicon-based microring and outputs narrowband light.

[0012] Optionally, a FP cavity optical force sensing probe, comprising:

[0013] Silicon-based FP resonant cavity and silicon mass block;

[0014] The silicon-based FP resonant cavity includes two reflective layers and a polymer layer

[0015] Optionally, the FP cavity optical force sensing probe outputs an optical signal to a silicon-based coupler, and the coupled signal is output through the silicon-based coupler, including:

[0016] After the output light of the silicon-based coupler enters the silicon-based FP resonant cavity through the optical waveguide, multi-beam interference occurs;

[0017] Based on the motion state of the carrier platform, the FP cavity optical force sensing probe outputs light signals of different intensities to the silicon-based coupler;

[0018] A silicon-based coupler transfers the optical signal to the output grating.

[0019] Optionally, based on the motion state of the carrier platform, the FP cavity optical force sensing probe outputs interference light of different intensities to the silicon-based coupler, including:

[0020] When the carrier platform is stationary or moving at a constant speed, the light intensity signal reflected by the FP resonant cavity is a constant value;

[0021] When the carrier platform is linearly accelerated, the silicon mass block exerts force on the silicon-based FP resonant cavity. At this time, the resonant cavity is deformed, and the intensity of the light returning to the optical waveguide changes. The light that enters the silicon-based integrated optical chip again enters the silicon-based coupler through the optical waveguide.

[0022] Optionally, the silicon mass applies a force to the silicon-based FP resonant cavity, and the resonant cavity is deformed, including:

[0023] After receiving the acceleration signal, the silicon mass block converts the acceleration signal into a mechanical signal, which is then applied to the silicon-based FP resonant cavity, causing the silicon-based FP resonant cavity to deform.

[0024] On the other hand, a monolithic integrated FP cavity optomechanical acceleration sensing method is provided, the method is applied to a monolithic integrated FP cavity optomechanical acceleration sensor, the method comprising:

[0025] S1, a driving circuit drives the on-chip light source to emit broadband light, and the broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating;

[0026] S2, broadband light enters the silicon-based microring from the optical waveguide through evanescent wave coupling and outputs narrowband light; narrowband light enters the optical waveguide on the other side through evanescent wave coupling;

[0027] S3, the narrowband light output from the silicon-based microring enters the silicon-based coupler through the silicon waveguide, and the coupled light output from the silicon-based coupler enters the FP cavity optical force sensing probe;

[0028] S4, the FP cavity optical force sensing probe outputs an optical signal to a silicon-based coupler, and outputs a coupled signal through the silicon-based coupler;

[0029] S5. The on-chip detector performs optical signal detection on the coupled signal, outputs the detected optical signal to the demodulation circuit, and demodulates an initial acceleration signal.

[0030] Optionally, S2 includes:

[0031] Broadband light enters the silicon-based microring from the optical waveguide in the form of evanescent wave coupling, generates resonance in the silicon-based microring, and light in the resonance frequency band passes through the silicon-based microring and outputs narrowband light.

[0032] On the other hand, a monolithic integrated FP cavity optomechanical acceleration sensing system is provided, wherein the monolithic integrated FP cavity optomechanical acceleration sensing system comprises:

[0033] ARM processor, the ARM processor processes the collected signal and demodulates the acceleration value;

[0034] A memory, wherein the memory stores ARM processor-readable instructions and temporarily stores the collected data, and when the ARM processor-readable instructions are executed by the ARM processor, any one of the above-mentioned monolithic integrated FP cavity optomechanical acceleration sensing methods is implemented.

[0035] On the other hand, an ARM processor-readable storage medium is provided, wherein the storage medium stores at least one instruction, and the at least one instruction is loaded and executed by the ARM processor to implement any one of the above-mentioned monolithic integrated FP cavity optomechanical acceleration sensing methods.

[0036] The beneficial effects brought about by the technical solution provided by the embodiment of the present invention include at least:

[0037] In the embodiment of the present invention, a monolithic integrated FP cavity optomechanical accelerometer and a sensing method are provided, based on a silicon-based micro-ring filter to filter out narrowband light, and a modulation electrode is used to achieve narrowband light offset, thereby achieving frequency matching with the FP resonant cavity, which is used to drive the FP cavity optomechanical accelerometer, and finally the system is integrated on a single chip through heterogeneous integration of on-chip devices, which has the advantages of high integration, chipization and low cost. The implementation of the present invention will provide a theoretical basis and technical support for the development of silicon-based monolithic integrated cavity optomechanical accelerometers with the advantages of high sensitivity, miniaturization, chipization and low cost, and further expand its application in more fields, thereby generating huge social application value and economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0039] Figure 1 It is a structural diagram of a monolithic integrated FP cavity optomechanical acceleration sensor provided by an embodiment of the present invention;

[0040] Figure 2 is a structural diagram of a FP cavity optical force sensing probe provided by an embodiment of the present invention;

[0041] Figure 3 This is a signal flow chart of a silicon-based micro-ring modulated light-driven monolithic integrated FP cavity optomechanical acceleration sensor provided by an embodiment of the present invention;

[0042] Figure 4 It is a schematic diagram of an acceleration signal provided by an embodiment of the present invention, which is amplified via an FP resonant cavity and outputs an optical signal demodulation principle;

[0043] Figure 5 This is a flow chart of a monolithic integrated FP cavity optomechanical acceleration sensing method provided by an embodiment of the present invention;

[0044] Figure 6 It is a structural schematic diagram of a monolithic integrated FP cavity optomechanical acceleration sensing system provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0045] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0046] In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0047] The embodiment of the present invention provides a monolithic integrated FP cavity optomechanical acceleration sensor, such as Figure 1 The structure diagram of the monolithic integrated FP cavity optomechanical acceleration sensor shown in the figure, the sensing system of the present invention comprises:

[0048] Driving circuit 1, on-chip light source 2, input grating 3, silicon-based microring 4, modulation circuit 5, silicon-based coupler 6, FP cavity optical force sensor probe 7, output grating 8, on-chip detector 9, demodulation circuit 10, silicon-based integrated optical chip 11;

[0049] The driving circuit 1 drives the on-chip light source 2 to emit broadband light, and the broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating 3;

[0050] Broadband light enters the silicon-based microring 4 from the optical waveguide through evanescent wave coupling, and outputs narrowband light; the narrowband light enters the optical waveguide on the other side through evanescent wave coupling;

[0051] The narrowband light output from the silicon-based microring 4 enters the silicon-based coupler 6 through the silicon waveguide, and the coupled light output from the silicon-based coupler 6 enters the FP cavity optical force sensing probe 7;

[0052] The FP cavity optical force sensing probe 7 reflects the input light, and the reflected light signal is input to the silicon-based coupler 6 again through the on-chip optical waveguide, and the coupled signal is output to the output grating 8 through the silicon-based coupler 6;

[0053] The output grating 8 outputs a signal to an on-chip detector 9, which performs optical signal detection on the signal, and outputs the detected optical signal to a demodulation circuit 10, which is demodulated to obtain an initial acceleration signal.

[0054] In a feasible implementation, the input grating 3, the silicon-based micro-ring 4, the silicon-based coupler 6, and the output grating 8 are all fabricated on the silicon-based integrated optical chip 11 by ultraviolet exposure process;

[0055] The connection between all devices on the silicon-based integrated optical chip 11 of the present invention is optical waveguide connection; the on-chip light source 2, the on-chip detector 9 and the silicon-based integrated optical chip 11 are connected through a bonding process; the driving circuit 1 and the on-chip light source 2, the on-chip detector 9 and the demodulation circuit 10 are connected through wires; the FP cavity optical force sensor probe 7 and the silicon-based integrated optical chip 11 are connected through a bonding process.

[0056] In a feasible implementation, the modulation circuit 5 outputs a voltage signal to modulate the silicon-based microring 4, and the generated electric field will deform the silicon-based microring 4, thereby changing the resonance channel of the microring. The ultimate goal is to change the center frequency of the narrowband light output by the silicon-based microring 4.

[0057] In a feasible implementation, light enters the silicon-based microring 4 in the form of evanescent wave coupling and outputs narrowband light, including:

[0058] Light enters the silicon-based microring 4 in the form of evanescent wave coupling, generates resonance in the silicon-based microring 4, and light in the resonance frequency band passes through the silicon-based microring 4 and outputs narrow-band light.

[0059] In a feasible implementation, the present invention has found, through research on the characteristics of silicon-based microrings and integrated optical microsystems, that the center frequency of the silicon-based microring filtering narrowband light can be modulated by voltage, thereby driving the FP cavity optomechanical structure to achieve high-sensitivity acceleration sensing, which provides a new solution for the development of silicon-based integrated cavity optomechanical acceleration sensors compatible with CMOS processes.

[0060] In a feasible implementation manner, the FP cavity optical force sensing probe 7 comprises:

[0061] Silicon-based FP resonant cavity 71 and silicon mass block 72;

[0062] The silicon-based FP resonant cavity 71 includes a reflective layer 711 and a polymer layer 712 .

[0063] In a feasible implementation manner, the silicon-based coupler 6 transmits narrowband light to the FP cavity optical force sensing probe 7, and the modulated reflected light signal returns to the silicon-based coupler 6 again, and the coupled signal is output through the silicon-based coupler 6, including:

[0064] After the output light of the silicon-based coupler 6 enters the silicon-based FP resonant cavity 71 through the optical waveguide 12, multi-beam interference occurs;

[0065] Based on the motion state of the carrier platform, the FP cavity optical force sensing probe 7 outputs interference light of different intensities to the silicon-based coupler 6;

[0066] The silicon-based coupler 6 outputs a modulated signal.

[0067] In a feasible implementation, based on the motion state of the carrier platform, the FP cavity optical force sensing probe 7 outputs interference light of different intensities to the silicon-based coupler 6, including:

[0068] When the carrier platform is stationary or moving at a constant speed, the light intensity signal reflected by the FP resonant cavity is a constant value;

[0069] When the carrier platform is linearly accelerated, the silicon mass block 72 exerts force on the silicon-based FP resonant cavity 71. At this time, the silicon-based FP resonant cavity 71 is deformed, and the intensity of the light returning to the on-chip optical waveguide changes. The light that enters the silicon-based integrated optical chip 11 again enters the silicon-based coupler 6 through the on-chip optical waveguide.

[0070] In a feasible implementation manner, the silicon mass block 72 applies force to the silicon-based FP resonant cavity 71, and the silicon-based FP resonant cavity 71 is deformed, including:

[0071] After receiving the acceleration signal, the silicon mass block 72 converts the acceleration signal into a mechanical signal, and the mechanical signal is then applied to the FP resonant cavity 71, and at this time, the silicon-based FP resonant cavity 71 is deformed.

[0072] In a feasible implementation, Figure 2 The structure diagram of the FP cavity optical force sensor probe 7 is shown. After the light from the silicon-based coupler 6 enters the silicon-based FP resonant cavity 71 through the on-chip optical waveguide, multi-beam interference occurs. When the carrier platform is stationary or moving at a constant speed, the light intensity signal reflected by the silicon-based FP resonant cavity 71 is a constant value. However, when the carrier platform is linearly accelerated, due to Newton's second law, the silicon mass block 72 applies inertial force to the silicon-based FP resonant cavity 71, causing the resonant cavity to deform, thereby causing the light intensity returning to the on-chip optical waveguide to change. The light that enters the silicon-based integrated optical chip 11 again will enter the silicon-based coupler 6 through the optical waveguide.

[0073] In a feasible implementation, the signal flow of the silicon-based micro-ring modulated light-driven monolithic integrated FP cavity optomechanical accelerometer is as follows: Figure 3 First, the driving circuit 1 drives the on-chip light source 2 to emit broadband light, which is filtered into narrowband light by the silicon-based microring 4. The modulation circuit 5 controls the silicon-based microring 4 to shift the frequency of the narrowband light so that it matches the FP resonant cavity channel frequency, thereby realizing the output of the intensity signal, and the signal is demodulated by the demodulation circuit 10.

[0074] In a feasible implementation manner, the acceleration signal is amplified by the silicon-based FP resonant cavity 71 and the optical signal demodulation principle diagram is as follows: Figure 4 As shown. According to Newton's second law, after receiving the acceleration signal, the silicon mass block 72 converts the acceleration signal into a mechanical signal, and then applies it to the silicon-based FP resonant cavity 71, thereby causing the size of the silicon-based FP resonant cavity 71 to change, thereby causing the displacement of its resonant channel. At this time, the change in the acceleration signal is converted into a change in the optical intensity signal. Since the FP resonant cavity has an extremely steep resonance peak, the silicon-based FP resonant cavity 71 has an extremely high amplification factor. In addition, since the silicon-based micro-ring modulated light can not only filter out extremely narrow light, but also achieve precise matching between the narrow-band light frequency and the resonant channel frequency of the silicon-based FP resonant cavity 71 through circuit modulation, it can not only greatly reduce the volume of the driving light source, but also has extremely high frequency matching. A slight change in the external acceleration intensity will destroy the matching between the narrow-band light and the frequency of the silicon-based FP resonant cavity 71, thereby enabling the sensing system to achieve extremely high acceleration detection sensitivity.

[0075] In the embodiment of the present invention, a monolithic integrated FP cavity optomechanical accelerometer is provided, which filters out narrowband light based on silicon-based micro-rings, and uses modulation electrodes to achieve narrowband light offset, thereby achieving frequency matching with the silicon-based FP resonant cavity, and is used to drive the FP cavity optomechanical accelerometer. Finally, the system is integrated on a single chip through heterogeneous integration of on-chip devices, and has the advantages of high integration, chipization, and low cost. The implementation of the present invention will provide a theoretical basis and technical support for the development of silicon-based monolithic integrated cavity optomechanical accelerometers with the advantages of high sensitivity, miniaturization, chipization, and low cost, and further expand its application in more fields, thereby generating huge social application value and economic benefits.

[0076] The embodiment of the present invention provides a monolithic integrated FP cavity optomechanical acceleration sensing method, which is implemented by a monolithic integrated FP cavity optomechanical acceleration sensor. Figure 5 The process flow chart of the monolithic integrated FP cavity optomechanical acceleration sensing method shown in the figure may include the following steps:

[0077] S1, a driving circuit drives the on-chip light source to emit broadband light, and the broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating;

[0078] S2, broadband light enters the silicon-based microring from the optical waveguide through evanescent wave coupling, and outputs narrowband light; the narrowband light enters the optical waveguide on the other side through evanescent wave coupling;

[0079] S3, the narrowband light output from the silicon-based microring enters the silicon-based coupler through the silicon waveguide, and the coupled light output from the silicon-based coupler enters the FP cavity optical force sensing probe;

[0080] S4, FP cavity optical force sensing probe reflects the input light, and the reflected light signal is input to the silicon-based coupler again through the on-chip optical waveguide, and the light signal is output to the output grating through the silicon-based coupler;

[0081] S5, outputting the grating output signal to the on-chip detector, performing optical signal detection on the signal through the on-chip detector, outputting the detected optical signal to the demodulation circuit, and demodulating the initial acceleration signal.

[0082] Optionally, S2 includes:

[0083] Broadband light enters the silicon-based microring from the optical waveguide in the form of evanescent wave coupling, generates resonance in the silicon-based microring, and light in the resonance frequency band passes through the silicon-based microring and outputs narrowband light.

[0084] Optionally, a FP cavity optical force sensing probe, comprising:

[0085] FP resonant cavity and silicon mass block;

[0086] The FP resonant cavity consists of two reflective layers and a polymer layer

[0087] Optionally, in S4, the FP cavity optical force sensing probe outputs an optical signal to a silicon-based coupler, and the coupled signal is output through the silicon-based coupler, including:

[0088] After the output light of the silicon-based coupler enters the FP resonant cavity through the optical waveguide, multi-beam interference occurs;

[0089] Based on the motion state of the carrier platform, the FP cavity optical force sensing probe outputs interference light of different intensities to the silicon-based coupler;

[0090] The silicon-based coupler outputs a modulated optical signal.

[0091] Optionally, based on the motion state of the carrier platform, the FP cavity optical force sensing probe outputs interference light of different intensities to the silicon-based coupler, including:

[0092] When the carrier platform is stationary or moving at a constant speed, the light intensity signal reflected by the FP resonant cavity is a constant value;

[0093] When the carrier platform is linearly accelerated, the silicon mass exerts a force on the FP resonant cavity, which then deforms and changes the intensity of the light returning to the optical waveguide. The light that enters the silicon-based integrated optical chip again enters the silicon-based coupler through the optical waveguide.

[0094] Optionally, the silicon mass applies a force to the FP resonant cavity, and the resonant cavity is deformed, including:

[0095] After receiving the acceleration signal, the silicon mass block converts the acceleration signal into a mechanical signal and applies the mechanical signal to the FP resonant cavity, at which time the size of the FP resonant cavity changes.

[0096] The present invention provides a monolithic integrated FP cavity optomechanical acceleration sensing method, which is based on a silicon-based micro-ring filter to filter out narrowband light, and uses a modulation electrode to achieve narrowband light frequency shift, thereby achieving frequency matching with the FP resonant cavity, and is used to drive the FP cavity optomechanical acceleration sensor. The system is finally integrated on a single chip through on-chip device integration, and has the advantages of high integration, chipization, and low cost. The implementation of the present invention will provide a theoretical basis and technical support for the development of silicon-based monolithic integrated cavity optomechanical acceleration sensors with high sensitivity, miniaturization, chipization, and low cost, and further expand their application in more fields, thereby generating huge social application value and economic benefits.

[0097] Figure 6 is a structural schematic diagram of a monolithic integrated FP cavity optomechanical acceleration sensing system provided by an embodiment of the present invention, such as Figure 6As shown, the monolithic integrated FP cavity optomechanical acceleration sensing system may include the above Figure 1 The monolithic integrated FP cavity optomechanical accelerometer shown.

[0098] Optionally, the monolithic integrated FP cavity optomechanical acceleration sensing system 610 may include a first ARM processor 6001 and a monolithic integrated FP cavity optomechanical acceleration sensor 6003 .

[0099] Optionally, the monolithic integrated FP cavity optomechanical acceleration sensing system 610 may further include a memory 6002 .

[0100] The first ARM processor 6001, the memory 6002 and the monolithic integrated FP cavity optomechanical acceleration sensor 6003 may be connected via a communication bus.

[0101] Combine the following Figure 6 The components of the monolithic integrated FP cavity optomechanical acceleration sensing system 610 are specifically introduced:

[0102] Among them, the first ARM processor 6001 is a monolithic integrated FP cavity optomechanical acceleration sensing system 610 is a monolithic integrated FP cavity optomechanical acceleration sensor 6003, and the silicon-based micro-ring applies voltage to change the control center of the narrow-band light center frequency.

[0103] Optionally, the second ARM processor 6004 can realize various functions of the monolithic integrated FP cavity optomechanical acceleration sensor system 610 by running or executing the software program stored in the memory 6002. The memory 6002 is used to store the data collected by executing the scheme of the present invention, and the second ARM processor 6004 controls the execution of data collection and temporarily stores it in the memory 6002; the specific implementation method can refer to the above method embodiment, which will not be repeated here.

[0104] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A monolithic integrated FP cavity optomechanical accelerometer, characterized in that: include: Driving circuit, on-chip light source, silicon-based integrated optical chip, input grating, silicon-based micro-ring, silicon-based coupler, FP cavity optical force sensor probe, on-chip detector, demodulation circuit; The driving circuit drives the on-chip light source to emit broadband light, and the broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating; Broadband light enters the silicon-based microring from the optical waveguide in the form of evanescent wave coupling, and outputs narrowband light; the narrowband light enters the optical waveguide on the other side through evanescent wave coupling; The narrowband light output from the silicon-based microring enters the silicon-based coupler through the silicon waveguide, and the coupled light output from the silicon-based coupler enters the FP cavity optical force sensing probe; The FP cavity optical force sensing probe reflects the input light, and the reflected light signal is input into the silicon-based coupler again through the on-chip optical waveguide, and the silicon-based coupler outputs the light signal to the output grating; The output grating outputs a signal to the on-chip detector, and the on-chip detector performs optical signal detection on the signal, and outputs the detected optical signal to the demodulation circuit to demodulate an initial acceleration signal.

2. The monolithic integrated FP cavity optomechanical accelerometer according to claim 1, characterized in that: Broadband light enters the silicon-based microring from the optical waveguide in the form of evanescent wave coupling, and outputs narrowband light, including: Broadband light enters the silicon-based microring from the optical waveguide in the form of evanescent wave coupling, generates resonance in the silicon-based microring, and light in the resonance frequency band passes through the silicon-based microring and outputs narrowband light.

3. The monolithic integrated FP cavity optomechanical accelerometer according to claim 2, characterized in that: The FP cavity optical force sensing probe comprises: Silicon-based FP resonant cavity and silicon mass block; The silicon-based FP resonant cavity includes two reflective layers and a polymer layer.

4. The monolithic integrated FP cavity optomechanical accelerometer according to claim 3, characterized in that: The FP cavity optical force sensing probe outputs an optical signal to a silicon-based coupler, and outputs a coupled signal through the silicon-based coupler, including: After the output light of the silicon-based coupler enters the FP resonant cavity through the optical waveguide, multi-beam interference occurs; Based on the motion state of the carrier platform, outputting optical signals of different intensities to the silicon-based coupler through the FP cavity optical force sensing probe; The silicon-based coupler transmits the optical signal to the output grating.

5. The monolithic integrated FP cavity optomechanical accelerometer according to claim 4, characterized in that: The method outputs interference light of different intensities to the silicon-based coupler through the FP cavity optical force sensing probe based on the motion state of the carrier platform, including: When the carrier platform is stationary or moving at a constant speed, the light intensity signal reflected by the silicon-based FP resonant cavity is a constant value; When the carrier platform is linearly accelerated, the silicon mass block exerts force on the silicon-based FP resonant cavity. At this time, the resonant cavity is deformed, and the intensity of the light returning to the optical waveguide changes. The light that enters the silicon-based integrated optical chip again enters the silicon-based coupler through the optical waveguide.

6. The monolithic integrated FP cavity optomechanical accelerometer according to claim 5, characterized in that: The silicon mass exerts a force on the silicon-based FP resonant cavity, which then deforms the cavity, including: After receiving the acceleration signal, the silicon mass block converts the acceleration signal into a mechanical signal, and the mechanical signal is applied to the silicon-based FP resonant cavity, and the silicon-based FP resonant cavity is deformed.

7. A monolithic integrated FP cavity optomechanical acceleration sensing method, wherein the monolithic integrated FP cavity optomechanical acceleration sensing method is used to implement any monolithic integrated FP cavity optomechanical acceleration sensor as claimed in any one of claims 1 to 6, characterized in that: The method comprises: S1, a driving circuit drives the on-chip light source to emit broadband light, and the broadband light is coupled into the on-chip silicon-based optical waveguide through the input grating; S2, broadband light enters the silicon-based microring from the optical waveguide through evanescent wave coupling, and outputs narrowband light; the narrowband light enters the optical waveguide on the other side through evanescent wave coupling; S3, the narrowband light output from the silicon-based microring enters the silicon-based coupler through the silicon waveguide, and the coupled light output from the silicon-based coupler enters the FP cavity optical force sensing probe; S4, the FP cavity optical force sensing probe outputs an optical signal to a silicon-based coupler, and outputs a coupled signal through the silicon-based coupler; S5. The on-chip detector performs optical signal detection on the coupled signal, outputs the detected optical signal to the demodulation circuit, and demodulates an initial acceleration signal.

8. The method for optical mechanical acceleration sensing based on monolithic integrated FP cavity according to claim 6, characterized in that: The S2 includes: Broadband light enters the silicon-based microring from the optical waveguide in the form of evanescent wave coupling, generates resonance in the silicon-based microring, and light in the resonance frequency band passes through the silicon-based microring and outputs narrowband light.

9. A monolithic integrated FP cavity optomechanical acceleration sensing system, characterized in that: The monolithic integrated FP cavity optomechanical acceleration sensing system comprises: An ARM processor processes the collected signal and demodulates the acceleration value; A memory, wherein the memory stores ARM processor-readable instructions and temporarily stores the collected data, and when the ARM processor-readable instructions are executed by the ARM processor, the method according to any one of claims 7 to 8 is implemented.

10. An ARM processor readable storage medium, characterized in that: The ARM processor can read a storage medium storing program code, and the program code can be called by the processor to execute the method according to any one of claims 7 to 8.

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