Metal powder vacuum drying system

Abstract

The invention provides a metal powder vacuum drying system, which relates to the technical field of metal processing, and comprises a drying box in which metal powder to be subjected to vacuum drying is stored; the heating system is integrated in the drying box and used for heating the interior of the drying box; the vacuum system communicates with the interior of the drying box and is used for vacuumizing the interior of the drying box; the water cooling system is integrated in the box body of the drying box and is used for cooling the drying box; and the electric control system is used for controlling the vacuum system to vacuumize the drying box, then controlling the heating system to heat the drying box body, controlling the water cooling system to empty the water cooling liquid, controlling the water cooling system to cool the drying box after drying and heating are completed, and closing the vacuum system and supplementing air to the drying box after cooling is completed. The vacuum drying device has the beneficial effects that a vacuum heating mode is adopted, the phenomenon that the purity is reduced due to the fact that metal powder easily reacts with air in a high-temperature state is avoided, the drying efficiency is improved, and energy consumption is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of metal processing, and in particular to a metal powder vacuum drying system. Background Art

[0002] In the semiconductor integrated circuit industry, the manufacture of sputtering targets has extremely strict requirements on the purity of metal materials, usually requiring a purity level of 4N (i.e. 99.99%) or above, and requiring extremely low water content. Such high standards pose a great challenge to the melting process of high-purity metal particles. Before melting, high-purity metal powders must undergo strict drying treatment to ensure that their moisture content meets production requirements.

[0003] However, due to the large surface energy of high-purity metal powder, the traditional drying process is very likely to cause sparks during operation, which not only poses a serious risk of fire and explosion, but may also contaminate the metal powder due to the introduction of external impurities, resulting in a decrease in its purity. Therefore, how to ensure the drying effect of high-purity metal powder while effectively avoiding the risk of fire and explosion, as well as preventing impurity contamination, has become a technical problem that needs to be solved in the field of high-purity metal powder processing. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides a metal powder vacuum drying system, comprising:

[0005] A drying box, wherein metal powder to be vacuum dried is stored inside the drying box;

[0006] A heating system, integrated in the drying box, for heating the interior of the drying box;

[0007] A water cooling system, integrated in the body of the drying box, for cooling the drying box;

[0008] The electric control system is electrically connected to the vacuum system, the water cooling system and the heating system, and is used to control the vacuum system to evacuate the drying box, then control the heating system to heat the drying box body and control the water cooling system to drain the water coolant, control the water cooling system to cool the drying box after the drying and heating are completed, and close the vacuum system and replenish air to the drying box after the cooling is completed.

[0009] Preferably, the drying oven comprises:

[0010] A box body, wherein multiple layers of baking tray brackets are arranged from bottom to top in the box body, the heating system is arranged below each of the baking tray brackets, and a vacuum flange interface is arranged on the top of the box body, and the vacuum flange interface is connected to the vacuum system;

[0011] A protective gas vacuum breaking interface is arranged on the side of the box body and communicates with the interior of the box body;

[0012] The box door is installed on the box body through a hinge pin shaft, and a hole expansion observation window is provided on the box door. A temperature gauge is provided on one side of the hole expansion observation window. When the box door and the box body are closed, there is a gap between the box door and the box body, and a lip sealing strip is provided in the gap.

[0013] Preferably, the box body comprises an outer box body and an inner box body, and a reinforcing rib structure is provided between the outer box body and the inner box body.

[0014] Preferably, the water cooling system comprises:

[0015] A cooling water jacket is welded and attached to a side of the inner box body facing the outer box body, and the gap between the cooling water jacket and the outer box body and the inner box body is filled with thermal insulation cotton;

[0016] The water inlet of the cooling water jacket is arranged on the bottom surface of the box body, and the water outlet of the cooling water jacket is arranged on the top surface of the box body.

[0017] Preferably, a spare flange interface is further provided on the top of the box body, a circular blind plate is provided on the spare flange interface for sealing, and a vacuum gauge seat is led out from the circular blind plate through a section of bent stainless steel pipe.

[0018] Preferably, multiple layers of baking tray brackets are arranged in the drying box from bottom to top, and the heating system includes:

[0019] A plurality of heating tubes are provided under each layer of the baking tray bracket, and the joints at both ends of each heating tube are installed outside the drying box body, and the middle section of the heating tube is bent into a "W" shape inside the drying box body.

[0020] Preferably, there is a gap between the heating tube and the corresponding baking tray bracket.

[0021] Preferably, the vacuum system comprises:

[0022] A vacuum pump group is connected to a vacuum flange interface on the top of the drying box through a vacuum pipeline.

[0023] Preferably, the vacuum pump group includes a water ring pump and a Roots pump.

[0024] Preferably, the electronic control system comprises:

[0025] An electric control cabinet, wherein the electric control cabinet is provided with a master control switch for controlling the vacuum system, the heating system and the water cooling system, and a plurality of independent sub-control switches corresponding to the vacuum system, the heating system and the water cooling system;

[0026] An instrument box, the instrument box comprising a resistance vacuum gauge and a temperature control display box arranged on the box body of the drying box;

[0027] The operation box is arranged on the side of the box body of the drying box, is electrically connected to the electric control cabinet, and includes a plurality of operation buttons.

[0028] The above technical solution has the following advantages or beneficial effects: The system adopts vacuum heating, which can effectively prevent the introduction of external impurities during the drying process, ensuring that the purity of the metal powder is not affected. It avoids the high-purity metal powder from being active on the surface and easily reacting with diatomic gases in the air under high temperature, resulting in reduced purity of the high-purity metal powder, as well as the risk of explosion. At the same time, the saturated vapor pressure of water is greatly reduced, the temperature and duration of metal powder drying are reduced, and the energy consumption of the high-purity metal powder drying process is reduced. At the same time, the vacuum environment also greatly improves the drying efficiency, reduces heat loss, and reduces energy consumption. This innovative drying system not only successfully solves the technical problems in the drying process of high-purity metal powders, but also provides strong support for large-scale production in the field of metal purification. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the front structure of a metal powder vacuum drying system in a preferred embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the front structure of the door and the body of the drying oven in a preferred embodiment of the present invention;

[0031] Figure 3 The figure is a schematic diagram of the side cross-sectional structure of the drying box in a preferred embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of a top view of the drying box in a preferred embodiment of the present invention;

[0033] Figure 5 In a preferred embodiment of the present invention, Figure 4 Structural schematic diagram of the heating system from the same viewing angle. DETAILED DESCRIPTION

[0034] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. The present invention is not limited to this embodiment, and other embodiments may also fall within the scope of the present invention as long as they conform to the gist of the present invention.

[0035] In a preferred embodiment of the present invention, based on the above problems existing in the prior art, a metal powder vacuum drying system is provided. Figure 1-5 Shown include:

[0036] A drying box 1, wherein metal powder to be vacuum dried is stored inside the drying box 1;

[0037] A heating system 2, integrated in the drying box 1, for heating the interior of the drying box 1;

[0038] The vacuum system 3 is connected to the interior of the drying box 1 and is used to evacuate the interior of the drying box 1;

[0039] A water cooling system 4, integrated in the body of the drying box 1, for cooling the drying box 1;

[0040] The electric control system 5 is electrically connected to the vacuum system 3, the water cooling system 4 and the heating system 2, and is used for controlling the vacuum system 3 to evacuate the drying box 1, and then controlling the heating system 2 to heat the drying box 1 and controlling the water cooling system 4 to drain the water coolant, and controlling the water cooling system 4 to cool the drying box 1 after the drying and heating are completed, and after the cooling is completed, closing the vacuum system 3 and replenishing air to the drying box 1.

[0041] Specifically, in order to overcome the existing technical difficulties, the present invention proposes a new high-purity metal powder vacuum drying system. The system adopts a vacuum heating method, which can effectively prevent the introduction of external impurities during the drying process and ensure that the purity of the metal powder is not affected. At the same time, the vacuum environment also greatly improves the drying efficiency, reduces heat loss, and reduces energy consumption. This innovative drying system not only successfully solves the technical difficulties in the drying process of high-purity metal powders, but also provides strong support for large-scale production in the field of metal purification.

[0042] In a preferred embodiment of the present invention, Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the drying box 1 comprises:

[0043] A box body 11 is provided with multiple layers of baking tray brackets 12 from bottom to top in the box body 11. The baking tray brackets 12 are made of stainless steel. The bottom of the baking tray brackets 13 is fixed to the inner surface of the bottom of the box body 11 or is erected on the inner surface of the bottom of the box body 11 by using guide wheels. Each layer of the baking tray brackets 12 is used to place metal powder to be vacuum dried. The heating system 2 is arranged below each baking tray bracket 12. A vacuum flange interface 13 is provided on the top of the box body 11, and the vacuum flange interface 13 is connected to the vacuum system 3.

[0044] A protective gas vacuum breaking interface is provided on the side of the box body and communicated with the inside of the box body;

[0045] The box door 14 is installed on the box body through a hinge pin 15. The box door 14 is provided with a hole expansion observation window 16. A temperature gauge is provided on one side of the hole expansion observation window 16. When the box door 14 and the box body 11 are closed, there is a gap between the box door 14 and the box body 11, and a lip sealing strip 17 is provided in the gap.

[0046] Specifically, in this embodiment, Figure 2 The box body 11 is on the right side, and the box door 14 is on the left side. When the high-purity metal powder vacuum drying system is used to dry the metal powder, the metal powder is first spread on the baking tray and placed on the baking tray bracket 13 in the system. After closing the box door 14, the vacuum system 3 is turned on by the electronic control system 5. When the vacuum degree reaches the set value, the heating system 2 is turned on, and the cooling water in the water cooling system 4 is automatically emptied, thereby reducing the heat loss of the drying system; when the heating temperature and time reach the set value, the system automatically turns off the heating system, and turns on the water circulation of the water cooling system 4 to cool the metal powder in the box body 11. When the temperature drops to the set value, the vacuum system 3 is turned off, and the air supply system (i.e., the protective gas vacuum breaking interface) is turned on to break the vacuum. When the air pressure inside and outside the drying box 1 is the same, the air supply system is turned off, and the power supply of the powder vacuum drying system is turned off at the same time. After opening the box door 11, the material packaging process can be operated. This system avoids the high-purity metal powder from being active on the surface at high temperature and easily reacting with the diatomic gas in the air, resulting in a reduction in the purity of the high-purity metal powder, as well as the risk of explosion. At the same time, under vacuum conditions, the saturated vapor pressure of water is greatly reduced, which reduces the temperature and duration of metal powder drying, thereby reducing the energy consumption of the high-purity metal powder drying process.

[0047] Further specifically, the design of the multi-layer baking tray bracket 12 allows multiple batches of metal powder to be dried simultaneously, thereby improving the drying efficiency. In addition, this design also makes the operation more flexible, and the amount of metal powder placed on each layer of the baking tray bracket can be adjusted as needed to meet the drying requirements of different batches.

[0048] The heating system 2 is disposed below each baking tray bracket 13, which helps to ensure that the metal powder on each baking tray bracket can be heated evenly, thereby avoiding the problem of local overheating or uneven drying.

[0049] The lip seal 17 not only provides sealing between the door 14 and the box body 11, but also prevents air leakage caused by changes in air pressure during the drying process. This helps to maintain the vacuum degree in the box body and ensure the stability and effectiveness of the drying process. The hinge pin 15 between the box body 11 and the door 14 is provided with an anti-slip structure, so that the door 14 and the box body 11 do not tilt when the door is closed, and there is a moving space between the door 14 and the box body 11 for the lip seal 17 to deform when vacuuming, so as to avoid rigid contact affecting the vacuum seal.

[0050] The expansion observation window 16 allows the operator to observe the state of the metal powder in the box body 11 without opening the box door 14, thereby avoiding interference with the drying process. The temperature meter provides real-time temperature information, which helps the operator monitor and adjust the drying parameters.

[0051] The inner plate of the box body 11 and the inner plate of the box door are made of stainless steel. The inner plate of the box body 11 is fully welded inside and outside, and the inner surface of the box body is polished.

[0052] In a preferred embodiment of the present invention, the box body 11 includes an outer box body and an inner box body, and a reinforcing rib structure 18 made of carbon steel is provided between the outer box body and the inner box body.

[0053] Specifically, the box door 14 uses the same inner and outer layers and reinforcing rib structure 18 as the box body 11. Figure 1 , Figure 2 The reinforcing rib structure 18 in the door 14 is shown in the figure, and the reinforcing rib structure 18 in the box body 11 is not shown. Figure 4 The reinforcing rib structure 18 in the box 11 is shown in the figure, which significantly enhances the overall structural strength of the box 11 by providing additional support between the outer box and the inner box. This helps prevent the box from being deformed or broken due to temperature changes or external forces during the drying process, thereby ensuring the stability and safety of the system.

[0054] During the vacuum drying process, it is crucial to maintain the vacuum degree in the box 11. The design of the reinforcing rib structure 18 helps to reduce the deformation or leakage of the box due to the pressure difference between the inside and outside, thereby maintaining the stability of the vacuum degree. This helps to ensure the uniformity and consistency of the drying process and improve product quality.

[0055] In a preferred embodiment of the present invention, Figure 1 and Figure 3 The water cooling system 4 shown includes:

[0056] The cooling water jacket 41 is welded and attached to the side of the inner box body facing the outer box body, and the gaps between the cooling water jacket 41 and the outer box body and the inner box body are filled with thermal insulation cotton;

[0057] The water inlet 42 of the cooling water jacket 41 is disposed on the bottom surface of the housing 11 , and the water outlet 43 of the cooling water jacket 41 is disposed on the top surface of the housing 11 .

[0058] Specifically, the water cooling system 4 is composed of a cooling water jacket 41 and a valve 44. The cooling water jacket 41 is arranged between the inner and outer layers of the box body 11 and is welded to one side of the inner layer. The cooling water jacket 41 is made of stainless steel. Except for the box door 14, the other five sides of the box body 11 are all provided with the cooling water jacket 41. The cooling water enters from the bottom and exits from the top. The water inlet 42 is arranged below the box body 11 on the left side of the box door, and the water outlet 43 is arranged on the top surface of the box body 11. The valve 44 is connected to the water outlet 43 and the water inlet 42 by a pipe, which is not shown. When the heating is turned on, the cooling water in the cooling water jacket 41 is automatically drained synchronously. After the heating is completed, the cooling water is pumped into the cooling water jacket 41 by the pump connected to the valve 44.

[0059] The design of the cooling water jacket 41 in this embodiment allows the cooling water to form a continuous cooling layer on the inner wall of the box 11, effectively absorbing and taking away the heat generated during the drying process. This design not only improves the cooling efficiency, but also helps to maintain the uniformity of the temperature in the box and prevent local overheating.

[0060] By arranging the water inlet 42 at the bottom surface and the water outlet 43 at the top surface, it is possible to ensure that the cooling water forms natural convection in the cooling water jacket, thereby improving the heat exchange efficiency. At the same time, this design also helps to reduce the retention time of the cooling water, avoid the formation of a "dead water" area in the system, and further improve the effect of thermal management.

[0061] The filling of thermal insulation cotton effectively reduces the heat transfer between the outer box and the inner box, reducing heat loss. This not only helps to maintain a stable temperature inside the box, but also reduces energy consumption and improves the energy efficiency of the entire system.

[0062] In a preferred embodiment of the present invention, Figure 3 , Figure 4 As shown, a spare flange interface 19 is also provided on the top of the box body 11 , and a circular blind plate 110 is provided on the spare flange interface 19 for sealing, and a vacuum gauge seat 111 is led out from the circular blind plate 110 through a section of bent stainless steel pipe.

[0063] Specifically, the design of the spare flange interface 19 makes it more convenient when the system may need to be expanded or modified in the future. For example, if it is necessary to add additional vacuum measurement points or connect other equipment, it can be easily achieved through the spare flange interface 19 without major modifications to the entire box. And when the vacuum flange interface 13 fails, the vacuum system 3 can evacuate the drying box 1 through the spare flange interface 19.

[0064] The use of the circular blind plate 110 ensures the sealing of the spare flange interface 19 when not in use, prevents the entry of external air or impurities, and thus ensures the vacuum and cleanliness inside the system. This is crucial for the high-purity metal powder drying process that requires a high vacuum and high cleanliness environment.

[0065] The vacuum gauge seat 111 led out from the circular blind plate 110 can be conveniently connected to monitoring equipment such as a vacuum gauge to monitor the vacuum degree inside the system in real time. This helps operators to understand and adjust the operating status of the system in a timely manner and ensure the stability and controllability of the drying process.

[0066] In a preferred embodiment of the present invention, a plurality of drying tray brackets 13 are arranged from bottom to top in the drying box 11. Figure 2 , Figure 3 , Figure 5 As shown, the heating system 2 comprises:

[0067] There are multiple heating tubes 21, one heating tube 21 is provided under each layer of the baking tray bracket 13, and the joints 22 at both ends of each heating tube 21 are installed outside the drying box 11, and the middle section of the heating tube 21 is bent into a "W" shape inside the drying box 11.

[0068] In a preferred embodiment of the present invention, Figure 2 , Figure 3 As shown, there is a gap between the heating tube 21 and the corresponding baking tray bracket 13 .

[0069] Specifically, the heating system 2 of the present embodiment is composed of stainless steel explosion-proof heating tubes, which are arranged inside the drying box 11 and distributed 1-2 cm below the bracket of each layer of material baking tray 13. Each layer of heating tubes 21 is not in direct contact with the material baking tray bracket 13 to prevent local overheating of the material. The explosion-proof joints 22 at both ends of the heating tubes 21 are installed on the outside of the drying box 11 of the vacuum drying system, and a group of heating tubes are installed below each layer of material baking tray bracket in the box. The heating power is preferably 2KW, and each layer is one in and one out for easy replacement. The arrangement form of each layer of heating tubes 21 inside the box 11 is "W" shaped, and the resistance value of each layer of heating tubes is consistent. The maximum resistance and minimum resistance values ​​of the heating tubes are within 3% of the design value.

[0070] In a preferred embodiment of the present invention, the vacuum system 3 comprises:

[0071] The vacuum pump group 31 is connected to the vacuum flange interface 13 on the top of the drying box 1 through a vacuum pipeline 32 .

[0072] In a preferred embodiment of the present invention, the vacuum pump group 31 includes a water ring pump and a Roots pump.

[0073] Specifically, the vacuum system 3 in this embodiment is composed of a sealing ring, a vacuum pipe 32 and a vacuum pump group 31. The connection between the vacuum pipe 32, the vacuum pump group 31 and the drying box 1 is provided with a sealing ring using a lip seal, the inner and outer fixing strips are plug welded, and the inner side of the inner fixing strip is fully welded. The vacuum flange interface 13, the spare flange interface 19 and the door seal of the box body 11 of the drying box 1 are sealed with fluororubber. The vacuum pipe 32 is a stainless steel seamless pipe. The vacuum pump group 32 is a combination of a water ring pump and a Roots pump. The circulating water volume of the water ring pump is preferably 1.2 cubic meters / hour. The Roots pump group is selected to use a combination of 300L / S and 150L / S of suction volume. The ultimate vacuum degree of the equipment is less than 30Pa, and the pressure rise rate of the equipment is less than 0.01Pa / min.

[0074] In a preferred embodiment of the present invention, Figure 1 As shown, the electronic control system 5 includes:

[0075] An electric control cabinet 51, in which a master control switch for controlling the vacuum system 3, the heating system 2 and the water cooling system 4, and a plurality of independent sub-control switches corresponding to the vacuum system 3, the heating system 2 and the water cooling system 4 are arranged;

[0076] An instrument box 53, the instrument box 53 includes a resistance vacuum gauge and a temperature control display box arranged on the box body 11 of the drying box 1;

[0077] The operation box 54 is disposed on the side of the box body 11 of the drying box 1, is electrically connected to the electric control cabinet 51, and includes a plurality of operation buttons.

[0078] Specifically, the electric control system 5 in this embodiment is composed of an electric control cabinet 51, an instrument box 53, an operation box 54 and a power supply 55. The electric control cabinet 51 is provided with a master control switch, and branches corresponding to the vacuum system 3, the heating system 2 and the water cooling system 4 respectively. Each branch is provided with an independent control switch, PLC, contactor, relay, power regulator and other electrical components. The hardware circuit can adopt the circuit design in the prior art to realize signal transmission and hardware switch control. The electric control cabinet 51 is provided with a linkage and single-action conversion switch, that is, a switch for synchronously controlling the vacuum system, and / or the heating system, and / or the water cooling system, and a switch for individually controlling the vacuum system, the heating system and the water cooling system; the instrument box 53 is equipped with a resistance vacuum gauge 53 and an electric heating temperature control meter for real-time monitoring of the vacuum degree and temperature inside the drying box 1; the operation box 54 is arranged with buttons such as vacuum open, vacuum close, main valve open, main valve close, heating open, heating close, vent open, vent close and emergency stop. The linkage operation state can be remotely operated by the button box.

[0079] The above are only preferred embodiments of the present invention, and are not intended to limit the implementation methods and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the contents of this specification and illustrations should be included in the protection scope of the present invention.

Claims

1. A metal powder vacuum drying system, characterized in that: include: A drying box, wherein metal powder to be vacuum dried is stored inside the drying box; A heating system, integrated in the drying box, for heating the interior of the drying box; A vacuum system, connected to the interior of the drying box, for evacuating the interior of the drying box; A water cooling system, integrated in the body of the drying box, for cooling the drying box; The electric control system is electrically connected to the vacuum system, the water cooling system and the heating system, and is used to control the vacuum system to evacuate the drying box, then control the heating system to heat the drying box body and control the water cooling system to drain the water coolant, control the water cooling system to cool the drying box after the drying and heating are completed, and close the vacuum system and replenish air to the drying box after the cooling is completed.

2. The metal powder vacuum drying system according to claim 1, characterized in that: The drying oven comprises: A box body, wherein multiple layers of baking tray brackets are arranged from bottom to top in the box body, each layer of the baking tray brackets is used to place the metal powder to be vacuum dried, the heating system is arranged below each of the baking tray brackets, and a vacuum flange interface is arranged on the top of the box body, and the vacuum flange interface is connected to the vacuum system; A protective gas vacuum breaking interface is arranged on the side of the box body and communicates with the interior of the box body; The box door is installed on the box body through a hinge pin shaft, and a hole expansion observation window is provided on the box door. A temperature gauge is provided on one side of the hole expansion observation window. When the box door and the box body are closed, there is a gap between the box door and the box body, and a lip sealing strip is provided in the gap.

3. The metal powder vacuum drying system according to claim 2, characterized in that: The box body comprises an outer box body and an inner box body, and a reinforcing rib structure is arranged between the outer box body and the inner box body.

4. The metal powder vacuum drying system according to claim 3, characterized in that: The water cooling system comprises: A cooling water jacket is welded and attached to a side of the inner box body facing the outer box body, and the gap between the cooling water jacket and the outer box body and the inner box body is filled with thermal insulation cotton; The water inlet of the cooling water jacket is arranged on the bottom surface of the box body, and the water outlet of the cooling water jacket is arranged on the top surface of the box body.

5. The metal powder vacuum drying system according to claim 2, characterized in that: A spare flange interface is also provided on the top of the box body, and a circular blind plate is provided on the spare flange interface for sealing, and a vacuum gauge seat is led out from the circular blind plate through a section of bent stainless steel pipe.

6. The metal powder vacuum drying system according to claim 1, characterized in that: The drying box is provided with multiple layers of baking tray brackets from bottom to top, and the heating system comprises: A plurality of heating tubes are provided under each layer of the baking tray bracket, and the joints at both ends of each heating tube are installed outside the box body of the drying box, and the middle section of the heating tube is bent into a "W" shape inside the box body of the drying box.

7. The metal powder vacuum drying system according to claim 6, characterized in that: There is a gap between the heating tube and the corresponding baking tray bracket.

8. The metal powder vacuum drying system according to claim 1, characterized in that: The vacuum system comprises: A vacuum pump group is connected to a vacuum flange interface on the top of the drying box through a vacuum pipeline.

9. The metal powder vacuum drying system according to claim 8, characterized in that: The vacuum pump group includes a water ring pump and a Roots pump.

10. The metal powder vacuum drying system according to claim 1, characterized in that: The electronic control system comprises: An electric control cabinet, wherein the electric control cabinet is provided with a master control switch for controlling the vacuum system, the heating system and the water cooling system, and a plurality of independent sub-control switches corresponding to the vacuum system, the heating system and the water cooling system; An instrument box, the instrument box comprising a resistance vacuum agent and a temperature control display box arranged on the box body of the drying box; The operation box is arranged on the side of the box body of the drying box, is electrically connected to the electric control cabinet, and includes a plurality of operation buttons.

Images