Electronic optical system calibration device and semiconductor detection equipment

Abstract

The invention provides an electronic optical system calibration device and semiconductor detection equipment. The electronic optical system calibration device comprises a flexible calibration piece and a measuring instrument, the flexible calibration piece comprises a calibration piece and an elastic piece, the calibration piece is provided with a calibration end facing a pole shoe of the electronic optical system, the calibration end is used for being in contact with the pole shoe to calibrate the zero position of the electronic optical system, the calibration end is provided with a calibration mark, and the elastic piece is arranged on the calibration mark. The calibration mark is used for providing reference for adjustment of the electronic optical system, the elastic piece is connected with one end, back to the pole shoe, of the calibration piece, and the elastic piece is used for generating elastic deformation to provide buffering when the calibration piece is in contact with the pole shoe; and the measuring instrument is electrically connected with the calibration piece and the pole shoe and is used for forming an induction loop so as to be switched on when the calibration piece is in contact with the pole shoe and switched off when the calibration piece is separated from the pole shoe. The calibration precision is high, and the interchangeability among a plurality of electronic optical systems can be improved.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor technology, and in particular relates to an electronic optical system calibration device and a semiconductor detection equipment. Background Art

[0002] Critical Dimension Scanning Electron Microscope (CD-SEM) is an important equipment for the front-end process of semiconductor manufacturing, and is of great significance for verifying the rationality and reliability of the front-end process parameter settings.

[0003] When using CD-SEM for inspection, it is particularly important to place the inspected object within the working distance of the electronic optical system (EOS). How to calibrate the working distance of the EOS has become an important factor restricting CD-SEM inspection operations. Summary of the invention

[0004] The embodiments of the present application provide an electronic optical system calibration device and a semiconductor detection device, wherein the electronic optical system calibration device can improve the calibration accuracy of the working distance.

[0005] In a first aspect, an embodiment of the present application provides an electron optical system calibration device, which includes a flexible calibration piece and a measuring instrument; the flexible calibration piece is used to calibrate the electron optical system, the flexible calibration piece includes a calibration piece and an elastic piece, the calibration piece is provided with a calibration end facing the pole shoe of the electron optical system, the calibration end is used to contact the pole shoe to calibrate the zero position of the electron optical system, the calibration end is provided with a calibration mark, the calibration mark is used to provide a reference for adjustment of the electron optical system, the elastic piece is connected to an end of the calibration piece facing away from the pole shoe, the elastic piece is used to undergo elastic deformation to provide a buffer when the calibration piece contacts the pole shoe; the measuring instrument is electrically connected to the calibration piece and the pole shoe to form an induction loop to be turned on when the calibration piece contacts the pole shoe and disconnected when separated.

[0006] Optionally, the flexible calibration component also includes a base, the base is provided with a guide hole, the guide hole is used to provide a sliding guide, the calibration component is slidably matched with the guide hole, and the elastic component is connected between the calibration component and the base in the sliding direction.

[0007] Optionally, the guide hole includes a matching hole section, a limiting hole section and an avoidance hole section in sequence along its own axis; the calibration piece includes a matching section, a limiting section and an extension section in sequence along its own axis, the matching section is slidably matched with the matching hole section, the limiting section is located in the limiting hole section, the extension section passes through the avoidance hole section and protrudes from the base surface, and the calibration end is located on the extension section; wherein, one end of the elastic piece abuts against one end of the limiting hole section facing away from the avoidance hole section, and the other end abuts against one end of the limiting section facing away from the avoidance hole section, the contour of the limiting section is located outside the contours of the matching hole section and the avoidance hole section, and the limiting section is used to abut against the end face of the limiting hole section to limit the calibration piece.

[0008] Optionally, the guide hole also includes an accommodating hole section, which is located between the matching hole section and the limiting hole section and is used to provide an accommodating space for the elastic member; the contour of the accommodating hole section is located outside the contour of the matching hole section, and the contour of the limiting hole section is located outside the contour of the accommodating hole section; one end of the elastic member is abutted against one end of the accommodating hole section facing away from the avoidance hole section, and the other end is abutted against one end of the limiting section facing away from the avoidance hole section.

[0009] Optionally, the mating section protrudes from the surface of the base, and a connecting port is provided on an end surface of the mating section, and the connecting port is connected to a wire of the measuring instrument.

[0010] Optionally, the flexible calibration component also includes an adjustment rod, which is threadedly connected to the base and abuts against the end surface of the limiting section facing the avoidance hole section, so as to adjust the protrusion of the extension section on the surface of the base.

[0011] Optionally, the flexible calibration part also includes an adjustment sleeve, which is arranged on the outside of the calibration part, and the adjustment sleeve includes a flange portion and an extension portion, the flange portion covers the limiting section, and the extension portion at least partially covers the extension section, the flange portion is used to abut the adjustment rod to limit the calibration part, and the extension portion is used to strengthen the connection between the adjustment sleeve and the calibration part.

[0012] Optionally, the hardness of the adjustment sleeve is greater than the hardness of the calibration piece, and the hardness of the pole shoe is greater than the hardness of the calibration piece; the calibration piece is made of aluminum, and the adjustment sleeve is made of copper.

[0013] Optionally, the base includes a matching block, a limiting block and a connecting block in sequence along the axis of the guide hole, and the matching block, the limiting block and the connecting block are detachably connected; the matching block is provided with the matching hole section and the accommodating hole section, the limiting block is provided with the limiting hole section, the connecting block is provided with the avoidance hole section, and the connecting block is threadedly connected to the adjusting rod.

[0014] In a second aspect, an embodiment of the present application provides a semiconductor detection device, which includes an electron optical system, a stage and the electron optical system calibration device in any embodiment of the first aspect; wherein the flexible calibration member is detachably mounted on the stage.

[0015] In a third aspect, an embodiment of the present application provides an electronic optical system calibration method, which includes providing an electronic optical system calibration device, the electronic optical system calibration device including a flexible calibration piece and a measuring instrument, the flexible calibration piece is configured to undergo elastic deformation when abutting against a pole shoe of the electronic optical system, and a calibration mark is provided on the flexible calibration piece; the measuring instrument is electrically connected to the flexible calibration piece and the pole shoe to form an induction loop, wherein the measuring instrument can sense the on / off state between the flexible calibration piece and the pole shoe; the flexible calibration piece is moved to abut against the pole shoe, so that the induction loop is turned on and then the flexible calibration piece is moved away from the pole shoe, and the separation position of the flexible calibration piece and the pole shoe at the moment when the induction loop is turned off is recorded as a zero position; the flexible calibration piece is continued to be moved away from the pole shoe, and the calibration distance of the electronic optical system is moved to an adjustment position based on the zero position; the calibration mark located at the adjustment position is used as a reference to calibrate the electronic optical system, and the pixel of the calibration mark is adjusted to a maximum value within the depth of field of the electronic optical system to complete the calibration.

[0016] Optionally, when providing the electron optical system calibration device, the flexible calibration piece is mounted on a stage, and the stage is used to move toward or away from the pole shoe; the stage is configured so that the minimum motion resolution is smaller than the depth of field of the electron optical system; the flexible calibration piece is set on the stage, and the flexible calibration piece and the electron optical system are adjusted to overlap in center.

[0017] Optionally, the flexible calibration piece is moved to abut against the pole shoe, including limiting the stroke of the worktable, and the stroke of the worktable is set to be smaller than the maximum elastic deformation of the flexible calibration piece from the time when the flexible calibration piece starts to contact the pole shoe to the time when the flexible calibration piece starts to move away from the pole shoe.

[0018] Optionally, after the induction loop is turned on, the flexible calibration part is moved away from the pole shoe, including the stage driving the flexible calibration part to move away from the pole shoe with minimum motion resolution until the induction loop is disconnected.

[0019] Optionally, the separation position between the flexible calibration component and the pole shoe at the moment when the induction loop is disconnected is recorded as the zero position, including taking a single contact point on the pole shoe for multiple remeasurements, taking the average value or square root value of the separation position as the zero position; and / or taking multiple contact points around the circumference of the pole shoe for multiple remeasurements, taking the average value or square root value of the separation position as the zero position.

[0020] An embodiment of the present application provides an electronic optical system calibration device, which includes a flexible calibration part and a measuring instrument, and the flexible calibration part includes a calibration part and an elastic part. The elastic part can provide a buffer for the calibration part, thereby preventing the calibration part from crushing the pole shoe. The measuring instrument, the pole shoe and the calibration part form an induction loop, which can improve the accuracy of judgment when judging whether the calibration part is in contact with the pole shoe, thereby improving the calibration accuracy. The electronic optical system calibration device can realize zero-position calibration of the electronic optical system through the calibration part, the elastic part and the measuring instrument, and provide a reference for parameter adjustment of the electronic optical system through the calibration mark at the theoretical working distance of the electronic optical system, and adjust the theoretical working distance of the electronic optical system to be consistent with the actual working distance, so as to realize absolute calibration of the working distance, with small calibration error and high accuracy, which is conducive to improving the interchangeability between multiple electronic optical systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0022] Figure 1 It is a schematic diagram of the structure of the electron optical system;

[0023] Figure 2 A connection diagram of an electronic optical system calibration device according to some embodiments of the present application;

[0024] Figure 3 A schematic diagram of the structure of a flexible calibration component in some embodiments of the present application;

[0025] Figure 4 A schematic diagram of the disassembly of a flexible calibration piece according to some embodiments of the present application;

[0026] Figure 5 A cross-sectional view of a flexible calibration member according to some embodiments of the present application;

[0027] Figure 6 Flowchart of a method for calibrating an electron optical system according to some embodiments of the present application.

[0028] In the attached picture:

[0029] 1-pole shoe; 2-flexible calibration part; 21-base; 211-connecting block; 212-limiting block; 213-matching block; 214-avoidance hole section; 215-limiting hole section; 216-accommodating hole section; 217-matching hole section; 22-calibration part; 221-calibration mark; 222-extension section; 223-limiting section; 224-matching section; 225-connecting port; 23-adjusting rod; 24-adjusting sleeve; 241-extension part; 242-flange part; 25-elastic part; 3-stage; 4-measuring instrument; 5-electron gun; 6-first lens; 7-scanning coil; 8-second lens; 9-detector; 10-scanning circuit. DETAILED DESCRIPTION

[0030] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0031] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0032] Please refer to Figure 1 , Figure 1 Schematic diagram of the structure of the electron optical system.

[0033] CD-SEM is an important equipment in the front-end process of semiconductor manufacturing. It can be used to detect the performance and defects of wafers. Its interior must be in a high vacuum environment at all times to reduce the impact of the atmospheric environment on wafer detection. The electron optical system of CD-SEM includes an electron gun 5, a focusing lens, a scanning coil 7, a scanning circuit 10 and a detector 9. The focusing lens includes a first lens 6 and a second lens 8 located on both sides of the scanning coil 7. The first lens 6 and the second lens 8 are both provided with pole shoes. The electrons emitted by the electron gun 5 reach the sample on the stage 3 after passing through the first lens 6, the scanning coil 7 and the second lens 8. The secondary electrons generated by the sample are collected by the detector 9 and converted into images by the scanning circuit 10. In different electron optical systems, the working distances are different due to differences in internal structures. Some electron optical systems have a larger working distance, while others have a smaller working distance. In terms of design and use, it is particularly important to ensure that the object to be detected runs within the working distance range of the electron optical system. Therefore, it is necessary to calibrate the working distance of the electron optical system.

[0034] In the related art, when calibrating the working distance, the working distance is relatively calibrated based on the sensor on the CD-SEM (the sensor can be installed on the lens barrel of the electron optical system to detect the distance between the stage 3 and the pole shoe 1 on the second lens 8). During calibration, the sensor is calibrated first, and then the working distance of the electron optical system is calibrated. When calibrating the sensor, a sample is pasted on the sensor calibration tool and then installed on the stage. The sample is illuminated by light at a predetermined angle (for example, 45°). The reflected light of the sample is captured by the sensor and converted into an electrical signal. When the stage 3 is raised and lowered, the reflected light moves on the sensor. After comparing the moving distance of the stage 3 and the detection distance of the sensor, the sensor is adjusted to calibrate the sensor. When calibrating the working distance, the wafer with the pattern is moved to the position after the sensor is calibrated through the stage 3, and the distance of the pattern on the wafer is compared with the sensor grid distance. The calibration of the electron optical system is completed by adjusting the stage 3 until the two are consistent.

[0035] In the above calibration method, the relative calibration of the working distance is achieved by calibrating the sensor, and its calibration accuracy includes the processing and assembly errors of the parts and the calibration errors of the sensors. The calibration errors of the sensors involve the effects of angles, installation, and contaminants on light, etc., so there are deviations in the calibration of the sensors that cannot be eliminated and are difficult to calculate. When comparing the wafer pattern with the sensor grid, there are also calculation deviations, which cause error stacking, resulting in smaller relative error values ​​and larger absolute error values ​​(the difference between the actual working distance of the electron optical system and the working distance detected by the sensor is small, and the difference between the actual working distance of the electron optical system and the theoretical working distance marked on the nameplate of the electron optical system is large), resulting in different actual working distances for multiple electron optical systems of the same specification, and poor interchangeability between multiple electron optical systems.

[0036] In view of this, the present application provides an electronic optical system calibration device and a semiconductor detection equipment.

[0037] Please refer to Figures 2 to 5 , Figure 2 A connection diagram of an electronic optical system calibration device according to some embodiments of the present application; Figure 3 A schematic diagram of the structure of a flexible calibration component in some embodiments of the present application; Figure 4 A schematic diagram of the disassembly of a flexible calibration piece according to some embodiments of the present application; Figure 5 This is a cross-sectional view of a flexible calibration piece according to some embodiments of the present application.

[0038] An embodiment of the present application provides an electronic optical system calibration device, which includes a flexible calibration piece 2 and a measuring instrument 4; the flexible calibration piece 2 is used to calibrate the electronic optical system, the flexible calibration piece 2 includes a calibration piece 22 and an elastic piece 25, the calibration piece 22 is provided with a calibration end facing the pole shoe 1 of the electronic optical system, the calibration end is used to contact the pole shoe 1 to calibrate the zero position of the electronic optical system, the calibration end is provided with a calibration mark 221, the calibration mark 221 is used to provide a reference for the adjustment of the electronic optical system, the elastic piece 25 is connected to the end of the calibration piece 22 facing away from the pole shoe 1, the elastic piece 25 is used to undergo elastic deformation to provide a buffer when the calibration piece 22 contacts the pole shoe 1; the measuring instrument 4 is electrically connected to the calibration piece 22 and the pole shoe 1, and is used to form an induction loop to be turned on when the calibration piece 22 contacts the pole shoe 1 and disconnected when separated.

[0039] When calibrating the actual working distance of the electron optical system, the flexible calibration part 2 moves toward the pole shoe 1 until the calibration end abuts against the pole shoe 1 (the pole shoe 1 closest to the stage 3 in the electron optical system). When the calibration end abuts against the pole shoe 1, the deformation of the elastic part 25 changes, providing a buffer force for the calibration part 22. When the flexible calibration part 2 is in the adjustment position, the calibration mark 221 can provide a reference for adjusting the parameters of the electron optical system. Exemplarily, the elastic part 25 can be a spring, a rubber block, etc., which can undergo elastic deformation; the calibration mark 221 can be a cross of a predetermined size formed at the end of the calibration part 22.

[0040] The measuring instrument 4 is electrically connected to the calibration piece 22 and the pole shoe 1. For example, the measuring instrument 4 can be a multimeter. When the calibration piece 22 contacts the pole shoe 1, it is turned on and the indicator light is on. When the calibration piece 22 is separated from the pole shoe 1, it is disconnected and the indicator light is off. When the calibration piece 22 moves toward the pole shoe and contacts the pole shoe 1, the indicator light is on. At this time, the calibration piece 22 moves away from the pole shoe 1. When the calibration piece 22 is separated from the pole shoe 1, the indicator light is off. This separation position is recorded as the zero position.

[0041] In the technical solution of this embodiment, the electronic optical system calibration device includes a flexible calibration part 2 and a measuring instrument 4, and the flexible calibration part 2 includes a calibration part 22 and an elastic part 25. When the calibration end of the calibration part 22 abuts against the pole shoe 1, the elastic part 25 can provide a buffer for the calibration part 22, thereby preventing the calibration part 22 from crushing the pole shoe 1. When judging whether the calibration part 22 is in contact with the pole shoe 1, the accuracy of the judgment can be improved by forming an induction loop, thereby improving the calibration accuracy. The electronic optical system calibration device can realize the zero position calibration of the electronic optical system through the calibration part 22, the elastic part 25 and the measuring instrument 4, and provide a reference for the parameter adjustment of the electronic optical system through the calibration mark 221 at the theoretical working distance of the electronic optical system, and adjust the theoretical working distance of the electronic optical system to be consistent with the actual working distance, so as to realize the absolute calibration of the working distance, and its calibration error is only in the calibration of the zero position and the motion accuracy of the flexible calibration part 2, so the calibration error is small and the accuracy is high, which is conducive to improving the interchangeability between multiple electronic optical systems.

[0042] like Figure 3 and Figure 4 As shown, in some embodiments of the present application, the flexible calibration component 2 also includes a base 21, the base 21 is provided with a guide hole, the guide hole is used to provide a sliding guide, the calibration component 22 is slidably matched with the guide hole, and the elastic component 25 is connected between the calibration component 22 and the base 21 in the sliding direction.

[0043] In the flexible calibration member 2, the calibration member 22 is located in the guide hole of the base 21 and is slidably matched with the guide hole. The calibration member 22 extends out of the guide hole at least at one end provided with the calibration mark 221. The elastic member 25 is connected between the base 21 and the calibration member 22 to provide elastic force. When the calibration member 22 abuts against the pole shoe 1, the elastic member 25 can change the deformation amount to provide a buffer for the calibration member 22.

[0044] When the elastic member 25 is located between the base 21 and the calibration member 22 and the calibration member 22 is not in contact with the pole shoe 1, the elastic member 25 can be in a compressed state or in an extended state. That is, the elastic member 25 can be stretched between the base 21 and the calibration member 22 to provide a buffer by changing the stretching amount; the elastic member 25 can also be compressed between the base 21 and the calibration member 22 to provide a buffer by changing the compression amount.

[0045] In the technical solution of the above embodiment, the base 21 of the flexible calibration piece 2 is provided with a guide hole to provide a sliding guide for the calibration piece 22, which can improve the movement accuracy of the calibration piece 22, thereby improving the calibration accuracy of the zero position.

[0046] like Figure 4 and Figure 5As shown, in some embodiments of the present application, the guide hole includes a matching hole section 217, a limiting hole section 215 and an avoidance hole section 214 in sequence along its own axis; the calibration member 22 includes a matching section 224, a limiting section 223 and an extension section 222 in sequence along its own axis, the matching section 224 is slidably matched with the matching hole section 217, the limiting section 223 is located in the limiting hole section 215, the extension section 222 passes through the avoidance hole section 214 and protrudes from the surface of the base 21, and the calibration end is located on the extension section 222. Among them, one end of the elastic member 25 abuts against one end of the limiting hole section 215 facing away from the avoidance hole section 214, and the other end abuts against one end of the limiting section 223 facing away from the avoidance hole section 214, the contour of the limiting section 223 is located outside the contours of the matching hole section 217 and the avoidance hole section 214, and the limiting section 223 is used to abut against the end face of the limiting hole section 215 to limit the calibration member 22.

[0047] The end of the limiting hole section 215 facing away from the avoidance hole section 214 refers to the end of the limiting hole section 215 that is farthest from the avoidance hole section 214. The end of the limiting section 223 facing away from the avoidance hole section 214 refers to the end of the limiting section 223 that is farthest from the avoidance hole section 214.

[0048] The contour of the limiting segment 223 is located outside the contours of the matching hole segment 217 and the avoidance hole segment 214, that is, the contour of the limiting segment 223 is larger than the contours of the matching hole segment 217 and the avoidance hole segment 214. When the contours of each hole segment are circular, the relationship between the inside and outside of the hole segment can be characterized by diameter, and the diameter of the hole segment located on the outside is larger than the diameter of the hole segment located on the inside.

[0049] Exemplarily, the guide hole is a round hole, and the calibration member 22 is a round rod. The guide hole is a stepped hole with multiple hole sections, and the diameter of the matching hole section 217 is smaller than the diameter of the limiting hole section 215, and the diameter of the limiting hole section 215 is larger than the diameter of the avoidance hole section 214. The calibration member 22 is a stepped rod with multiple sections. The diameter of the matching section 224 is smaller than the diameter of the limiting section 223, and the diameter of the limiting section 223 is larger than the diameter of the extension section 222. The diameter of the limiting section 223 is larger than the diameter of the matching hole section 217 and the diameter of the avoidance hole section 214.

[0050] Exemplarily, the limiting section 223 is located in the limiting hole section 215, the diameter of the limiting hole section 215 is larger than the diameter of the limiting section 223, and a space is left in the circumferential direction of the limiting section 223, so that the limiting section 223 can be prevented from being interfered by the limiting hole section 215 in the circumferential direction when sliding. The diameter of the avoidance hole section 214 is larger than the diameter of the extension section 222, and a space is left in the circumferential direction of the extension section 222, so that the extension section 222 can be prevented from being interfered by the avoidance hole section 214 in the circumferential direction when sliding.

[0051] In the technical solution of the above embodiment, the matching hole section 217 and the matching section 224 are slidably matched, which can provide precise guidance for the sliding of the calibration piece 22. The contour of the limiting section 223 is located outside the contours of the matching hole section 217 and the avoidance hole section 214, and the calibration piece 22 can be limited by the end face of the limiting hole section 215, and the maximum protrusion of the calibration piece 22 on the surface of the base 21 is limited, thereby improving the assembly accuracy of the flexible calibration piece 2 itself, thereby improving the calibration accuracy.

[0052] like Figure 4 and Figure 5 As shown, in some embodiments of the present application, the guide hole also includes a receiving hole section 216, which is located between the matching hole section 217 and the limiting hole section 215, and is used to provide a receiving space for the elastic member 25; the contour of the receiving hole section 216 is located outside the contour of the matching hole section 217, and the contour of the limiting hole section 215 is located outside the contour of the receiving hole section 216, and one end of the elastic member 25 is against one end of the receiving hole section 216 facing away from the avoidance hole section 214, and the other end is against one end of the limiting section 223 facing away from the avoidance hole section 214.

[0053] Exemplarily, the outer contours of the limiting hole section 215, the receiving hole section 216, and the matching hole section 217 are all circular. The diameter of the matching hole section 217 is smaller than the diameter of the receiving hole section 216, and the diameter of the receiving hole section 216 is smaller than the diameter of the limiting hole section 215. The elastic member 25 is a spring, and the diameter of the receiving hole section 216 is larger than the outer diameter of the elastic member 25. The elastic member 25 is compressed and arranged between the limiting section 223 and the end surface of the receiving hole section 216 facing away from the avoidance hole section 214.

[0054] When the limit section 223 abuts against the end surface of the limit hole section 215 facing the avoidance hole section 214, the flexible calibration member 2 is used to calibrate the zero position. When the limit section 223 abuts against the end surface of the limit hole section 215 facing away from the avoidance hole section 214, the flexible calibration member 2 reaches the maximum elastic deformation, and the elastic member 25 does not reach the maximum elastic deformation.

[0055] In the technical solution of the above embodiment, the guide hole can provide an accommodation space for the elastic member 25 by setting an accommodating hole segment 216 between the matching hole segment 217 and the limiting hole segment 215. In addition, the setting of the accommodating hole segment 216 allows the limiting segment 223 to contact the two end faces of the limiting hole segment 215, which is convenient for measuring the maximum deformation of the flexible calibration member 2, thereby improving the safety during calibration.

[0056] like Figure 5 As shown, in some embodiments of the present application, the matching section 224 protrudes from the surface of the base 21 , and a connecting port 225 is provided on the end surface of the matching section 224 , and the connecting port 225 is connected to the wire of the measuring instrument 4 .

[0057] In the sliding direction of the calibration piece 22, both ends of the calibration piece 22 protrude from the surface of the base 21. A calibration mark 221 is set at the end of the calibration piece 22 facing the pole shoe 1 to provide a reference for calibration. A connecting port 225 is set at the end of the calibration piece 22 facing away from the pole shoe 1 to connect the wire of the measuring instrument 4.

[0058] Exemplarily, the connection port 225 may be a circular hole drilled on the end surface of the matching section 224 , and a wire connected to the measuring instrument 4 is inserted into the circular hole.

[0059] In the technical solution of the above embodiment, the mating section 224 protrudes from the surface of the base 21, and a connecting port 225 is provided on the end face of the mating section 224, which can provide a connection position for the wire of the measuring instrument 4, directly connect the calibration piece 22 and the measuring instrument 4, and will not affect the sliding of the calibration piece 22.

[0060] like Figure 4 and Figure 5 As shown, in some embodiments of the present application, the flexible calibration component 2 also includes an adjustment rod 23, which is threadedly connected to the base 21 and abuts against the end surface of the limiting section 223 facing the avoidance hole section 214, for adjusting the protrusion of the extension section 241 on the surface of the base 21.

[0061] The adjusting rod 23 is threadedly connected to the base 21 and abuts against the limiting section 223. By changing the length of the threaded connection between the adjusting rod 23 and the base 21, the length of the calibration member 22 protruding from the base 21 can be adjusted.

[0062] Exemplarily, the adjustment rod 23 may be a fully threaded stud, and the number may be three, which are arranged at an angle of 120° with the axis of the calibration piece 22 as the center.

[0063] In the technical solution of the above embodiment, the flexible calibration member 2 is provided with an adjustment rod 23, which is threadedly matched with the base 21 and abuts against the limit section 223, so as to adjust the overall height of the flexible calibration member 22, thereby improving the dimensional accuracy of the flexible calibration member 2 (the height of the flexible calibration member 2 has been adjusted when it participates in the calibration). In addition, the protrusion of the extension section 222 on the surface of the base 21 can be adjusted by the adjustment rod 23 to change the elastic force of the elastic member 25 and adjust the elastic force.

[0064] In order to prevent the calibration piece 22 from crushing the pole shoe 1 when in contact with the pole shoe 1, the calibration piece 22 is made of a softer metal, such as aluminum. When the adjustment rod 23 is in contact with the limit section 223 to adjust the overall height of the flexible calibration piece 22, the adjustment rod 23 is in contact with the limit section 223 for a long time, which may easily cause wear on the end surface of the limit section 223, thereby reducing the repeatability of the calibration piece 22. Figure 4 and Figure 5As shown, in some embodiments of the present application, the flexible calibration component 2 also includes an adjusting sleeve 24, which is sleeved on the outside of the calibration component 22. The adjusting sleeve 24 includes a flange portion 242 and an extension portion 241. The flange portion 242 covers the limiting section 223, and the extension portion 241 at least partially covers the extension section 222. The flange portion 242 is used to abut the adjusting rod 23 to limit the calibration component 22, and the extension portion 241 is used to strengthen the connection between the adjusting sleeve 24 and the calibration component 22.

[0065] The adjusting sleeve 24 can be made of a material having the same or similar hardness as the adjusting rod 23, such as iron, copper, etc., so as to reduce wear.

[0066] The flange portion 242 covers the limiting segment 223 in the circumferential direction of the limiting segment 223 and covers the end surface of the limiting segment 223 facing the extension segment 222, and can replace the limiting segment 223 to abut against the end surface of the limiting hole segment 215 and the adjusting rod 23. The flange portion 242 slides in the limiting hole segment 215, and a space is left between the limiting hole segment 215 and the limiting hole segment 215 in the circumferential direction.

[0067] The extension part 241 is sleeved on the extension section 222 and has an interference fit with the extension section 222, so that the adjustment sleeve 24 can be fastened to the calibration member 22. In the axial direction of the extension section 222, the extension part 241 can cover a part of the extension section 222, or the extension part 241 can cover the entire extension section 222, leaving only the calibration end of the extension section 222.

[0068] In the technical solution of the above embodiment, the flexible calibration part 2 is provided with an adjustment sleeve 24, which includes a flange portion 242 and an extension portion 241. The extension portion 241 can strengthen the connection and improve the connection strength between the adjustment sleeve 24 and the calibration part 22. The flange portion 242 can replace the limiting section 223 of the calibration part 22 to provide a limit for the calibration part 22, thereby avoiding wear of the calibration part 22 and improving the repeatability positioning accuracy of the calibration part 22.

[0069] like Figure 5 As shown, in some embodiments of the present application, the hardness of the adjustment sleeve 24 is greater than the hardness of the calibration piece 22, and the hardness of the pole shoe 1 is greater than the hardness of the calibration piece 22; the calibration piece 22 is made of aluminum, and the adjustment sleeve 24 is made of copper.

[0070] When calibrating the working distance of the electron optical system, damage to the electron optical system should be avoided. When designing, the value of the components is used as a yardstick. When facing possible damage, low-value components are damaged first to protect high-value components from damage.

[0071] When calibrating the zero position, the calibration piece 22 contacts the pole shoe 1, and the hardness of the calibration piece 22 can be reduced to protect the pole shoe 1. When the adjustment rod 23 uses a standard part, the hardness is greater than the hardness of the calibration piece 22. In order to protect the calibration piece 22 from wear, the adjustment sleeve 24 abuts against the adjustment rod 23, which can reduce the wear of the calibration piece 22.

[0072] In the technical solution of the above embodiment, the hardness of the adjustment sleeve 24 is greater than the hardness of the calibration piece 22, which can protect the calibration piece 22 and reduce the wear of the calibration piece 22, thereby improving the repeatability of the calibration piece 22. In addition, it can also reduce the generation of particulate matter and maintain a clean environment for the electronic optical system. The hardness of the pole shoe 1 is greater than the hardness of the calibration piece 22, which can protect the pole shoe 1 and prevent the pole shoe 1 from being crushed by the calibration piece 22.

[0073] like Figure 4 and Figure 5 As shown, in some embodiments of the present application, the base 21 includes a matching block 213, a limiting block 212 and a connecting block 211 in sequence along the axis of the guide hole, and the matching block 213, the limiting block 212 and the connecting block 211 are detachably connected; the matching block 213 is provided with a matching hole section 217 and a accommodating hole section 216, the limiting block 212 is provided with a limiting hole section 215, the connecting block 211 is provided with an avoidance hole section 214, and the connecting block 211 is threadedly connected to the adjusting rod 23.

[0074] The base 21 is a split design, which is assembled by a matching block 213, a limiting block 212 and a connecting block 211. When the matching block 213, the limiting block 212 and the connecting block 211 are connected, they can be connected as a whole by bolts. Among them, a threaded hole can be processed on the limiting block 212, and a through hole corresponding to the threaded hole can be processed on the matching block 213 and the limiting block 212. The matching block 213 and the connecting block 211 can be fixed on the limiting block 212 by passing the bolt through the through hole and threading it with the threaded hole.

[0075] In the technical solution of the above embodiment, the base 21 includes a matching block 213, a limiting block 212 and a connecting block 211 in sequence along the axis of the guide hole. The matching block 213, the limiting block 212 and the connecting block 211 can be processed independently, which can improve the processing accuracy of the matching hole section 217, the accommodating hole section 216, the limiting hole section 215, the avoidance hole section 214, and the two end faces of the limiting hole section 215, thereby improving the assembly accuracy of the flexible calibration component 2.

[0076] like Figure 2 As shown, in some embodiments of the present application, the flexible calibration member 2 can be placed on the stage 3 to achieve translation.

[0077] Exemplarily, the flexible calibration part 2 is detachably mounted on the stage 3, and the stage 3 includes a multi-stage transmission mechanism, which is used to drive the flexible calibration part 2 to translate toward and away from the pole shoe 1, and the minimum motion resolution of the multi-stage transmission mechanism is smaller than the depth of field of the electron optical system.

[0078] When calibrating the zero position, the stage 3 may first move toward the pole shoe 1 with a larger step, then move toward the pole shoe 1 with a smaller step, and finally move toward the pole shoe 1 with the minimum motion resolution. When the stage 3 moves away from the pole shoe 1 after the induction loop is turned on, it moves with the minimum motion resolution.

[0079] For example, when the distance between the calibration piece 22 and the pole shoe 1 is 10 mm, the stage 3 moves with a large step when the displacement is 0 to 6 mm, moves with a smaller step when the displacement is 6 to 9 mm, and moves with the minimum motion resolution when the displacement is above 9 mm. The minimum motion resolution of the stage 3 can be less than 1 μm.

[0080] Exemplarily, the stage 3 may use a stage 3 that is matched with an electronic optical system, making full use of existing equipment to realize functions.

[0081] In the technical solution of the above embodiment, the displacement accuracy of the flexible calibration member 2 can be improved by driving the stage 3 to displace the flexible calibration member 2, and the error can be made smaller than the depth of field of the optical system when calibrating the zero position.

[0082] The present application also provides a semiconductor detection device, which includes an electron optical system, a stage 3 and the electron optical system calibration device in any of the above embodiments; wherein the flexible calibration component 2 is detachably mounted on the stage 3.

[0083] Exemplarily, the flexible calibration part 2 can be connected to the stage 3 by bolt connection to achieve a detachable connection with the stage 3. When installing, the flexible calibration part 2 can be installed at a position on the stage 3 where no wafer is placed to avoid interfering with subsequent wafer detection. During calibration, the calibration operation can be started by adjusting the stage 3 in the horizontal direction so that the axis of the flexible calibration part 2 coincides with the axis of the pole shoe 1. After the calibration is completed, the flexible calibration part 2 remains connected to the stage 3 and is not removed, which can avoid the influence of multiple disassembly and assembly on the calibration operation.

[0084] The semiconductor inspection device of this embodiment includes an electron optical system calibration device, and thus has all the advantages of the electron optical system calibration devices of the above-mentioned embodiments, which will not be described in detail.

[0085] In addition, if Figure 6 As shown, the present application also provides an electronic optical system calibration method, including: step S1, deploying an electronic optical system calibration device and building an induction loop.

[0086] The electronic optical system calibration device is connected to the electronic optical system, wherein the electronic optical system calibration device includes a flexible calibration piece 2 and a measuring instrument 4. The measuring instrument 4 is electrically connected to the flexible calibration piece 2 and the pole shoe 1 of the electronic optical system to build an induction loop, which is turned on or off based on whether the flexible calibration piece 2 is in contact with the pole shoe 1. The flexible calibration piece 2 moves, approaches or moves away from the pole shoe 1. When the flexible calibration piece 2 is in contact with the pole shoe 1, the induction loop is turned on; when the flexible calibration piece 2 is not in contact with the pole shoe 1, the induction loop is disconnected. When the flexible calibration piece 2 abuts against the pole shoe 1, the flexible calibration piece 2 can undergo elastic deformation to provide a buffer to prevent the flexible calibration piece 2 from contacting the pole shoe 1 head-on and causing damage to the pole shoe 1. The flexible calibration piece 2 is configured to have a calibration mark 221 thereon, and the calibration mark 221 can provide a reference for subsequent calibration of the electronic optical system.

[0087] Step S2, calibrating the zero position of the electron optical system.

[0088] Move the flexible calibration piece 2 toward the pole shoe 1, and stop moving the flexible calibration piece 2 after the induction loop is turned on. At this time, the flexible calibration piece 2 is in contact with the pole shoe 1, and the flexible calibration piece 2 itself is elastically deformed. Then move the flexible calibration piece 2 away from the pole shoe 1, and separate the flexible calibration piece 2 from the pole shoe 1 when the induction loop is disconnected. Record this separation position as the zero position to achieve zero position calibration.

[0089] In the process of the flexible calibration part 2 moving toward the pole shoe 1 until it contacts the pole shoe 1 and then stops moving, the moving speed of the flexible calibration part 2 is gradually slowed down, for example, the displacement increment of the flexible calibration part 2 is gradually reduced. When the flexible calibration part 2 moves from static to away from the pole shoe 1 until it is separated from the pole shoe 1, the flexible calibration part 2 moves in the form of "jog", which means that the flexible calibration part 2 moves intermittently with a moving length of a motion resolution, for example, the moving length is less than 1μm, so that the flexible calibration part 2 moves intermittently with the moving length, stops after moving a moving length, and if the induction loop is not disconnected, continues to move a moving length and stops until the flexible calibration part 2 stops moving when the induction loop is disconnected, and this point is recorded as the zero position.

[0090] Step S3, calibrating the adjustment position with the zero position as the reference.

[0091] Move the flexible calibration piece 2 away from the pole shoe 1. When moving, use the zero position as the reference point and the theoretical working distance calibrated by the electronic optical system as the movement amount, and move the flexible calibration piece 2 to the adjustment position to achieve calibration of the adjustment position.

[0092] Step S4, using the calibration mark 221 located at the adjustment position as a reference, complete the calibration of the electronic optical system.

[0093] When the flexible calibration piece 2 is in the adjustment position, the calibration mark 221 on the flexible calibration piece 2 is selected as a reference to adjust the parameters of the electron optical system. When calibrating the electron optical system, the parameters such as the field of view and electron beam of the electron optical system can be adjusted to make the image of the calibration mark 221 appear clearly. When the clarity of the image reaches the maximum, it is determined that the electron optical system has completed the calibration. After calibration, the actual working distance of the electron optical system tends to be consistent with the theoretical working distance.

[0094] When adjusting the clarity of an image, the electron optical system has a floating range due to its imaging characteristics, which is called the depth of field (DOF) of the electron optical system. When adjusting the clarity of an image within the depth of field, the pixels of the image are used as the basis. When the pixels reach the maximum value, the clarity of the image reaches the maximum.

[0095] In the technical solution of the above embodiment, an electron optical system calibration device is configured, an induction loop is built, the zero position of the electron optical system is calibrated, and the theoretical working distance of the electron optical system is used as the adjustment position to calibrate the electron optical system. The actual working distance of the electron optical system can be calibrated to be consistent with the theoretical working distance. The error only exists in the calibration of the zero position and the movement accuracy from the zero position to the adjustment position, thereby reducing the calibration error and improving the accuracy of the working distance calibration. In addition, the actual working distance of the electron optical system is calibrated based on the theoretical working distance, which can unify the parameters of multiple electron optical systems of the same specification. Each sample to be tested (such as a wafer) is scanned and imaged under this parameter, thereby improving the interchangeability of multiple scanning electron microscopes for measuring feature sizes.

[0096] In some embodiments of the present application, step S1 further includes configuring a stage 3 , mounting the flexible calibration piece 2 on the stage 3 , and allowing the stage 3 to drive the flexible calibration piece 2 to move toward or away from the pole shoe 1 .

[0097] When configuring the stage 3, the stage 3 may be configured to have a plurality of motion resolutions, the plurality of motion resolutions being arranged from large to small, and the smallest motion resolution of the stage 3 is configured to be smaller than the depth of field of the electron optical system.

[0098] When installing the flexible calibration piece 2, the center of the flexible calibration piece 2 is adjusted to coincide with the center axis of the electron optical system, with the center axis of the electron optical system as a reference. When the center of the flexible calibration piece 2 is adjusted to coincide with the center axis of the electron optical system, the coaxiality of the flexible calibration piece 2 and the electron optical system does not affect the calibration accuracy.

[0099] In the technical solution of the above embodiment, by driving the flexible calibration part 2 to translate through the stage 3 and configuring the minimum motion resolution of the stage 3 to be smaller than the depth of field of the electron optical system, the calibration accuracy of the zero position can be made smaller than the minimum motion resolution of the stage 3, thereby improving the accuracy of the zero position calibration and avoiding the introduction of uncertainty and contingency into the subsequent parameter adjustment of the electron optical system.

[0100] In some embodiments of the present application, step S2 also includes limiting the travel of the loading platform 3.

[0101] In the process of the flexible calibration piece 2 moving toward the pole shoe 1 until it contacts the pole shoe 1, the stroke of the flexible calibration piece 2 is divided into two sections. The first section of the stroke is from the beginning of the movement of the flexible calibration piece 2 to the contact with the pole shoe 1 (that is, the stroke of the flexible calibration piece 2 when the induction loop is disconnected); the second section of the stroke is from the beginning of the contact with the pole shoe 1 to the stop of the displacement of the flexible calibration piece 2 (that is, the stroke of the flexible calibration piece 2 when the induction loop is turned on).

[0102] The stage 3 is limited in the second stroke, and the stroke of the stage 3 in the second stroke is set to be smaller than the maximum elastic deformation of the flexible calibration part 2, so that the flexible calibration part 2 always has an elastic margin in the second stroke to prevent the flexible calibration part 2 from crushing the pole shoe 1.

[0103] When limiting the stroke of the stage 3, the stroke of the stage 3 can be limited by a controller of the stage 3, or by designing a limiting structure. The limiting structure can be a block that hinders the movement of the stage 3. When the block abuts against the stage 3, the stage 3 stops moving close to the pole shoe 1.

[0104] In the technical solution of the above embodiment, by limiting the travel of the stage 3, it is possible to avoid hard contact between the flexible calibration part 2 and the pole shoe 1, which would cause the flexible calibration part 2 to crush the pole shoe 1, thereby effectively protecting the pole shoe 1.

[0105] In some embodiments of the present application, step S2 enables the stage 3 to move the flexible calibration piece 2 away from the pole shoe 1 with minimum motion resolution.

[0106] When the stage 3 drives the flexible calibration part 2 to move away from the pole shoe 1, the stage 3 is jogged to move at the minimum motion resolution. The stage 3 moves a minimum motion resolution distance and then stops. If the induction loop is in the on state at this time, the stage 3 continues to move a minimum motion resolution distance and then stops until the induction loop is disconnected. When the induction loop is disconnected, the recorded position is zero.

[0107] In the technical solution of the above embodiment, the flexible calibration part 2 is driven to move away from the pole shoe 1 with the minimum motion resolution by the stage 3. When calibrating the zero position, the error can be controlled to be smaller than the depth of field of the electron optical system, thereby improving the calibration accuracy.

[0108] In some embodiments of the present application, step S2 further includes performing multiple retests on the zero position and taking an average value.

[0109] When the zero position is re-measured multiple times, first, a single contact point is taken on the pole shoe 1 for multiple re-measurements, and the average value or square root value of the separation position is recorded as the zero position; second, multiple contact points are taken around the circumference of the pole shoe 1 for multiple re-measurements, and the average value or square root value of the separation position is recorded as the zero position; third, single-point re-measurement and multi-point re-measurement are simultaneously adopted to calibrate the zero position. You can choose any one of the three.

[0110] When taking the contact point on the pole shoe 1, it is achieved by changing the contact position of the measuring instrument 4 with the pole shoe 1. The measuring instrument 4 is connected to the pole shoe 1 through a wire, and the point on the surface of the pole shoe 1 facing the flexible calibration piece 2 with the smallest distance from the wire is the contact point.

[0111] In the technical solution of the above embodiment, taking contact points (single contact point and / or multiple contact points) on the pole shoe 1 for re-measurement can further improve the calibration accuracy of the zero position and the accuracy of the calibration of the working distance of the electron optical system. After the electron optical system is calibrated, the error between the actual working distance and the theoretical working distance can be less than ±1 / 2DOF.

[0112] In summary, in the electron optical system calibration device and semiconductor detection equipment provided in the embodiments of the present application, by installing the flexible calibration part 2 on the stage 3 and electrically connecting the measuring instrument 4 to the pole shoe 1 and the calibration part 22 to build an induction loop, the absolute working distance of the electron optical system can be calibrated using the flexible calibration part 2 and the measuring instrument 4. The zero position of the electron optical system is calibrated, and the parameters of the electron optical system are adjusted at the theoretical working distance position with the calibration mark 221 as a reference object. The actual working distance of the electron optical system can be calibrated to be consistent with the theoretical working distance (the error is less than ±DOF), thereby improving the calibration accuracy of the electron optical system and the interchangeability of CD-SEM during detection.

[0113] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. An electronic optical system calibration device, characterized in that: include: A flexible calibration piece (2) for calibrating an electron optical system, the flexible calibration piece (2) comprising a calibration piece (22) and an elastic piece (25), the calibration piece (22) being provided with a calibration end facing a pole shoe (1) of the electron optical system, the calibration end being used to contact the pole shoe (1) to calibrate the zero position of the electron optical system, the calibration end being provided with a calibration mark (221), the calibration mark (221) being used to provide a reference for adjusting the electron optical system, the elastic piece (25) being connected to an end of the calibration piece (22) facing away from the pole shoe (1), the elastic piece (25) being used to undergo elastic deformation to provide a buffer when the calibration piece (22) contacts the pole shoe (1); The measuring instrument (4) is electrically connected to the calibration piece (22) and the pole shoe (1) and is used to form an induction loop so as to be turned on when the calibration piece (22) and the pole shoe (1) are in contact and turned off when they are separated.

2. The electronic optical system calibration device according to claim 1, characterized in that: The flexible calibration member (2) further comprises a base (21), wherein the base (21) is provided with a guide hole, wherein the guide hole is used to provide a sliding guide, the calibration member (22) is slidably matched with the guide hole, and the elastic member (25) is connected between the calibration member (22) and the base (21) in the sliding direction.

3. The electronic optical system calibration device according to claim 2, characterized in that: The guide hole comprises a matching hole section (217), a limiting hole section (215) and an avoidance hole section (214) in sequence along its own axis; The calibration piece (22) comprises a matching section (224), a limiting section (223) and an extension section (222) in sequence along its own axis; the matching section (224) is slidably matched with the matching hole section (217); the limiting section (223) is located in the limiting hole section (215); the extension section (222) passes through the avoidance hole section (214) and protrudes from the surface of the base (21); and the calibration end is located on the extension section (222); One end of the elastic member (25) abuts against one end of the limiting hole section (215) facing away from the avoidance hole section (214), and the other end abuts against one end of the limiting section (223) facing away from the avoidance hole section (214); the contour of the limiting section (223) is located outside the contours of the matching hole section (217) and the avoidance hole section (214); the limiting section (223) is used to abut against the end face of the limiting hole section (215) to limit the calibration member (22).

4. The electronic optical system calibration device according to claim 3, characterized in that: The guide hole further comprises a receiving hole section (216), wherein the receiving hole section (216) is located between the matching hole section (217) and the limiting hole section (215), and is used to provide a receiving space for the elastic member (25); The contour of the accommodating hole section (216) is located outside the contour of the matching hole section (217), and the contour of the limiting hole section (215) is located outside the contour of the accommodating hole section (216); one end of the elastic member (25) abuts against one end of the accommodating hole section (216) facing away from the avoidance hole section (214), and the other end abuts against one end of the limiting section (223) facing away from the avoidance hole section (214).

5. The electronic optical system calibration device according to claim 3, characterized in that: The matching section (224) protrudes from the surface of the base (21), and a connecting port (225) is provided on the end surface of the matching section (224), and the connecting port (225) is connected to the wire of the measuring instrument (4).

6. The electronic optical system calibration device according to claim 4, characterized in that: The flexible calibration component (2) further comprises an adjusting rod (23), wherein the adjusting rod (23) is threadedly connected to the base (21) and abuts against the end surface of the limiting section (223) facing the avoidance hole section (214), and is used for adjusting the protrusion of the extension section (222) on the surface of the base (21).

7. The electronic optical system calibration device according to claim 6, characterized in that: The flexible calibration component (2) also includes an adjustment sleeve (24), the adjustment sleeve (24) is sleeved on the outer side of the calibration component (22), the adjustment sleeve (24) includes a flange portion (242) and an extension portion (241), the flange portion (242) covers the limiting section (223), the extension portion (241) at least partially covers the extension section (222), the flange portion (242) is used to abut the adjustment rod (23) to limit the calibration component (22), and the extension portion (241) is used to strengthen the connection between the adjustment sleeve (24) and the calibration component (22).

8. The electronic optical system calibration device according to claim 7, characterized in that: The hardness of the adjustment sleeve (24) is greater than the hardness of the calibration piece (22), and the hardness of the pole shoe (1) is greater than the hardness of the calibration piece (22); The material of the calibration piece (22) is aluminum, and the material of the adjustment sleeve (24) is copper.

9. The electronic optical system calibration device according to claim 7, characterized in that: The base (21) comprises a matching block (213), a limiting block (212) and a connecting block (211) in sequence along the axis of the guide hole, wherein the matching block (213), the limiting block (212) and the connecting block (211) are detachably connected; The matching block (213) is provided with the matching hole section (217) and the accommodating hole section (216), the limiting block (212) is provided with the limiting hole section (215), the connecting block (211) is provided with the avoiding hole section (214), and the connecting block (211) is threadedly connected to the adjusting rod (23).

10. A semiconductor testing device, characterized in that: include: An electron optical system, a stage (3) and an electron optical system calibration device as claimed in any one of claims 1 to 9; Wherein, the flexible calibration component (2) is detachably mounted on the object carrier (3).

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