Wafer loading equipment debugging system and method
By designing a wafer loading equipment debugging system, using the collaborative work of interactive equipment, debugging control board and wafer loading control board, the problems of high labor costs and low efficiency of traditional debugging methods are solved, and fast and accurate equipment debugging and automated evaluation are achieved.
Patent Information
- Application Number
- CN202411995075.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-04-22
AI Technical Summary
The traditional wafer loading equipment debugging method requires the participation of a large number of technical personnel, and the labor cost is high, and abnormal situations in the operation of the equipment cannot be discovered in a timely manner. The debugging accuracy and efficiency are low, so the stable operation of the equipment cannot be guaranteed.
A wafer loading equipment debugging system is designed, including interactive equipment, debugging control board and wafer loading control board. By automatically generating and sending control parameter modification instructions, precise debugging and automated evaluation of the equipment is achieved.
It realizes rapid debugging of wafer loading equipment, reduces labor costs, and can promptly detect abnormal situations in the operation of the equipment, improves debugging accuracy and efficiency, and ensures the stable operation of the equipment.
Smart Images
Figure CN119861694A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of semiconductor technology, and in particular to a wafer loading equipment debugging system and method. Background Art
[0002] As the core material of semiconductor manufacturing, the processing accuracy and efficiency of wafers are directly related to the performance and quality of the final product. Therefore, as an important part of the semiconductor production line, the performance and stability of wafer loading equipment are crucial to the operating efficiency of the entire production line.
[0003] At present, the traditional wafer loading equipment debugging method often relies on a large number of technicians to manually set equipment parameters to achieve the debugging of the wafer loading equipment. However, the traditional wafer loading equipment debugging method requires the participation of a large number of technicians, with high labor costs, and cannot timely discover abnormal conditions during the operation of the wafer loading equipment. The debugging accuracy and debugging efficiency of the wafer loading equipment are low, and the stable operation of the wafer loading equipment cannot be guaranteed. Summary of the invention
[0004] The present invention provides a wafer loading equipment debugging system and method to achieve rapid debugging of the wafer loading equipment, reduce labor costs, timely discover abnormal conditions during the operation of the wafer loading equipment, improve the debugging accuracy and debugging efficiency of the wafer loading equipment, and thus ensure the stable operation of the wafer loading equipment.
[0005] In a first aspect, an embodiment of the present invention provides a wafer loading device debugging system, the wafer loading device debugging system comprising: an interactive device, a debugging control board and a wafer loading control board, the interactive device, the debugging control board and the wafer loading control board are all mounted on the wafer loading device; wherein,
[0006] The interactive device is used to generate a control parameter modification instruction corresponding to the wafer loading device based on a debugging trigger operation on the wafer loading device, and send the control parameter modification instruction to the debugging control board;
[0007] The debugging control board is used to send the received control parameter modification instruction to the wafer loading control board;
[0008] The wafer loading control board is used to modify the control parameters of the wafer loading device based on the received control parameter modification instruction, obtain the target operating status data corresponding to the modified wafer loading device, and send the target operating status data to the debugging control board;
[0009] The debugging control board is also used to determine that the debugging of the wafer loading equipment is completed if it is detected that the wafer loading equipment after parameter adjustment is in a standard operating state based on the received target operating state data.
[0010] In a second aspect, an embodiment of the present invention further provides a wafer loading device debugging method, the method comprising:
[0011] Generate, through the interactive device, a control parameter modification instruction corresponding to the wafer loading device based on the debugging trigger operation of the wafer loading device, and send the control parameter modification instruction to the debugging control board;
[0012] The received control parameter modification instruction is sent to the wafer loading control board through the debugging control board;
[0013] By means of the wafer loading control board, the control parameters of the wafer loading device are modified based on the received control parameter modification instruction, target operation status data corresponding to the modified wafer loading device is obtained, and the target operation status data is sent to the debugging control board;
[0014] Through the debugging control board, if it is detected that the wafer loading device after parameter adjustment is in a standard operating state based on the received target operating state data, it is determined that the debugging of the wafer loading device is completed.
[0015] The wafer loading device debugging system of the embodiment of the present invention comprises: an interactive device, a debugging control board and a wafer loading control board, wherein the interactive device, the debugging control board and the wafer loading control board are all mounted on the wafer loading device; wherein the interactive device is used to generate a control parameter modification instruction corresponding to the wafer loading device based on the debugging trigger operation of the wafer loading device, and send the control parameter modification instruction to the debugging control board, providing an intuitive user interface so that the user can easily input the debugging requirements. By automatically generating instructions and sending them to the debugging control board, manual intervention is reduced and the debugging efficiency is improved. The debugging control board is used to send the received control parameter modification instruction to the wafer loading control board, making the communication between the interactive device and the wafer loading control board more flexible and scalable. The wafer loading control board is used to modify the control parameters of the wafer loading device based on the received control parameter modification instruction, obtain the target operating status data corresponding to the modified wafer loading device, and send the target operating status data to the debugging control board, so that the control parameters of the wafer loading device can be accurately modified to meet the debugging requirements. The debugging control board is also used to determine that the debugging of the wafer loading device is completed if it is detected that the wafer loading device after parameter adjustment is in a standard operating state based on the received target operating state data, thereby making the debugging process more transparent and traceable. Through the collaborative work of the interactive device, the debugging control board and the wafer loading control board, accurate debugging and automated evaluation of the wafer loading device are achieved, the debugging efficiency and accuracy are improved, and manual intervention and costs are reduced.
[0016] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0018] Figure 1 It is a structural schematic diagram of a wafer loading equipment debugging system provided by Embodiment 1 of the present invention;
[0019] Figure 2 This is an exemplary diagram of a wafer loading equipment debugging system according to Embodiment 1 of the present invention;
[0020] Figure 3It is a flow chart of a wafer loading equipment debugging method provided in the second embodiment of the present invention. DETAILED DESCRIPTION
[0021] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.
[0022] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.
[0023] Embodiment 1
[0024] Figure 1 The structure block diagram of a wafer loading equipment debugging system provided by an embodiment of the present invention is shown in FIG. Figure 1 As shown, the wafer loading equipment debugging system includes: an interactive device 101, a debugging control board 102 and a wafer loading control board 103; wherein,
[0025] The interactive device 101 is used to generate a control parameter modification instruction corresponding to the wafer loading device based on a debugging trigger operation on the wafer loading device, and send the control parameter modification instruction to the debugging control board 102;
[0026] The debugging control board 102 is used to send the received control parameter modification instruction to the wafer loading control board 103;
[0027] The wafer loading control board 103 is used to modify the control parameters of the wafer loading device based on the received control parameter modification instruction, obtain the target operating state data corresponding to the modified wafer loading device, and send the target operating state data to the debugging control board 102;
[0028] The debugging control board 102 is also used to determine that the debugging of the wafer loading device is completed if it is detected that the wafer loading device after parameter adjustment is in a standard operating state based on the received target operating state data.
[0029] In an embodiment of the present invention, the interactive device 101 is used to generate a control parameter modification instruction corresponding to the wafer loading device based on a debug trigger operation on the wafer loading device, and send the control parameter modification instruction to the debug control board. The interactive device can provide an intuitive user interface so that the user can easily input debugging requirements. Among them, the interactive device may refer to an interface or interface for the user to interact with the wafer loading device debugging system. The wafer loading device may refer to a key device for loading, transporting and positioning wafers in the semiconductor manufacturing process. The debug trigger operation may refer to an instruction input by the user through the interactive device to start the wafer loading device debugging system. The control parameter modification instruction may refer to an instruction generated by the interactive device according to the user's debugging requirements to modify the control parameters of the wafer loading device.
[0030] The debugging control board 102 is used to send the received control parameter modification instruction to the wafer loading control board. The debugging control board serves as an intermediate layer, making the communication between the interactive device and the wafer loading control board more flexible and scalable. Among them, the debugging control board may refer to one of the core components of the wafer loading device debugging system, which is responsible for receiving the control parameter modification instruction from the interactive device and forwarding it to the wafer loading control board. The wafer loading control board may refer to the control center of the wafer loading device.
[0031] The wafer loading control board 103 is used to modify the control parameters of the wafer loading device based on the received control parameter modification instruction, obtain the target operating status data corresponding to the modified wafer loading device, and send the target operating status data to the debugging control board, so that the wafer loading device can immediately operate according to the new control parameters and generate real-time data for subsequent analysis and evaluation. Among them, the control parameters may refer to the instructions or settings that need to be followed during the operation of the wafer loading device. The target operating status data may refer to the data generated by the wafer loading device operating under the modified control parameters.
[0032] The debugging control board 102 is also used to determine that the debugging of the wafer loading device is completed if it is detected that the wafer loading device after parameter adjustment is in the standard operating state based on the received target operating state data, and the wafer loading control board sends real-time data to the debugging control board, making the debugging process more transparent and traceable. Among them, the standard operating state can refer to the state standard that the wafer loading device should reach during normal operation.
[0033] Optionally, before the interactive device 101 generates a control parameter modification instruction corresponding to the wafer loading device based on the debug trigger operation on the wafer loading device, it also includes: the wafer loading control board is also used to obtain the initial operating status data of the wafer loading device, and send the initial operating status data to the debug control board; the debug control board is also used to perform a status detection on the wafer loading device based on the received initial operating status data, and if it is detected that the wafer loading device is not in a standard operating state, the interactive device is controlled to display debug prompt information, so that the user can perform a debug trigger operation on the wafer loading device based on the debug prompt information.
[0034] The initial operation state data may refer to the state data of the wafer loading device before starting operation or debugging. The debugging prompt information may refer to the prompt information provided by the debugging system to the user when the device is not in a standard operation state or has potential problems during the debugging process of the wafer loading device.
[0035] Specifically, the wafer loading control board, as the core control unit of the wafer loading device, is responsible for real-time monitoring and recording the operating status of the wafer loading device. When the wafer loading device starts to run, the wafer loading control board will immediately start to collect the initial operating status data of the device, including the wafer loading device operation log, sensor data and wafer initial status data. The collected initial operating status data will be sent to the debugging control board in real time through the preset communication protocol and channel for subsequent analysis and processing. The debugging control board is a key component of the wafer loading device debugging system and is responsible for receiving and analyzing data from the wafer loading control board. The debugging control board will monitor and analyze the operating status of the wafer loading device in real time based on the received initial operating status data. By comparing with the preset standard operating status, it is determined whether the device is in the standard operating state. If it is detected that the wafer loading device is not in the standard operating state, the debugging control board will immediately trigger the generation of debugging prompt information. This information will be displayed to the user through interactive devices (such as display screens, touch screens, etc.) so that the user can understand the current status of the device and perform corresponding debugging operations. By real-time monitoring and debugging of the operating status of wafer loading equipment, potential problems can be discovered and resolved in a timely manner, thereby improving the stability and reliability of the equipment.
[0036] It should be noted that the normal operation of the wafer loading equipment is the most important task, and the importance of reporting information during operation is relatively small. If a half-duplex bus or a communication method with a handshake protocol is used, the burden on the wafer loading control board will be increased, and the timeliness of the real-time tasks / instructions will be affected by non-real-time control tasks / instructions. The RS-422 interface is a serial communication standard for unidirectional and balanced transmission with single-machine transmission and multi-machine reception. It has the advantages of full-duplex, direct transmission without handshake protocol, high transmission rate, and simple control. In order to distinguish the operation log of the wafer loading equipment, sensor data, the original data of the wafers in each slot in the crystal box (wafer initial state data) and control commands, a custom application layer transmission protocol is used, and the frame header provides feature information. Therefore, the RS-422 interface can be used as the communication interface between the debug control board and the wafer loading control board. By adopting a full-duplex, non-handshake protocol between the debug control board and the wafer loading control board, when the debug control board fails, the wafer loading control board can still receive control instructions from other devices to continue working, thereby improving the flexibility of the system.
[0037] Optionally, the system further includes: a data storage device, wherein the data storage device is used to obtain and store the operating status data received by the debugging control board each time, and send the operating status data to the interactive device so that the interactive device displays the operating status data.
[0038] Specifically, Figure 2 As shown, the data storage device establishes a communication connection with the debug control board to ensure that the operating status data sent by the debug control board can be received in real time. Whenever the debug control board receives the operating status data of the wafer loading device, the data storage device will immediately obtain these data. The data storage device stores the acquired operating status data for subsequent analysis and processing. The data storage device can send the stored operating status data to the interactive device for the user to view and analyze. The sending method can be real-time sending, scheduled sending, or sending when the user requests, which can depend on the design of the system and user needs. After receiving the operating status data, the interactive device will parse and display it. The display method can be a chart, a curve, a text description, etc., so that the user can intuitively understand the operating status of the device. Through the data storage device, the user can easily trace the operating status data of the wafer loading device and understand the operating history of the device.
[0039] It should be noted that the operating status data stored in the data storage device includes the operating status data of the wafer loading device in the standard operating state and the operating status data of the wafer loading device in the debugging state.
[0040] Optionally, the data storage device comprises: a data classification unit and a data storage unit, wherein the data classification unit is used to classify the running status data based on the data types in the running status data, and generate running status data corresponding to each data type; and the data storage unit is used to generate a log file corresponding to the running status data of each data type based on the time parameters corresponding to the running status data of each data type, and store the log file.
[0041] The data type may refer to the type or category of the running status data. The time parameter may refer to the time information associated with the running status data. The log file may refer to a file that records the running status data and the time parameter.
[0042] Specifically, the data classification unit first receives the running status data from the debugging control board. These data may contain multiple types, such as sensor data, device configuration parameters, abnormal alarm information, etc. The data classification unit parses the received running status data and identifies the type of each data. This is usually achieved through a preset data format or identifier. According to the identified data type, the data classification unit classifies the running status data and generates a running status data set corresponding to each data type. Through data classification, different types of running status data can be processed separately to avoid data confusion and misoperation, thereby improving data processing efficiency. The data storage unit extracts time parameters such as data generation time and reception time from the classified running status data. Based on the extracted time parameters, the data storage unit generates a corresponding log file for the running status data of each data type. The log file usually contains information such as data type, data content, timestamp, etc. The generated log file is stored in the data storage unit, which can be a local storage device, a network storage device, or a cloud storage device. By generating a corresponding log file for the running status data of each data type and storing it based on the time parameter, orderly storage and management of data can be achieved. This helps users quickly find the required data and improve data retrieval efficiency.
[0043] It should be noted that the operating status data of each data type in the data storage device can be uploaded separately when the data changes to ensure maximum traceability.
[0044] Optionally, the target operating status data includes: wafer loading equipment operating log, sensor data and wafer initial status data.
[0045] Among them, the wafer loading equipment operation log may refer to the data automatically recorded by the wafer loading equipment during operation, which records in detail the equipment's operating status, operation steps, timestamps and other information. These log data help users understand the equipment's operating history, track equipment performance changes, and locate and solve potential problems. Sensor data may refer to data collected by sensors installed on the wafer loading equipment, which reflect the real-time operating status and environmental conditions of the equipment. Sensors may include position sensors, speed sensors, acceleration sensors, etc., which can monitor key parameters such as the position, speed, and acceleration of the wafer loading equipment. Wafer initial state data may refer to the wafer initial state data refers to the state data of the wafer before the wafer loading equipment starts running. These data may include the position, size, weight, material properties, etc. of the wafer, which are crucial for determining the control parameters and debugging strategies of the wafer loading equipment.
[0046] Exemplarily, the acquisition of the initial state data of the wafer can be described as follows: after the wafer loading device identifies the state of the wafer in each slot in the crystal box, it reports the state identification result of the wafer in each slot in the crystal box and the original data of identifying the state of the wafer in each slot in the crystal box to the debugging control board, that is, the initial state data of the wafer. The general principle of the wafer loading device to identify the state of the wafer in each slot in the crystal box is that the wafer box remains stationary, and a longitudinal motion mechanism drives the sensor to scan the wafer in the wafer box. The longitudinal motion mechanism is positioned by the encoder. Each time the encoder increments, the sensor samples once, and finally analyzes the sampled data. Assuming that the motion mechanism moves 5um, the encoder count changes by 1, and the process of identifying the state of the wafer in each slot in the crystal box is about 300mm, then a total of 300×1000÷5=60000 samples are required, and each sampling data is saved by 1 byte, with a total of 60KB of data. RS-422 is designed with 1Mbps and the transmission is completed in about 0.6s.
[0047] Optionally, the wafer loading control board 103 includes: a control instruction generation unit, a control instruction distribution unit, a control instruction execution unit and a data acquisition unit, wherein the control instruction generation unit is used to generate wafer loading control instructions and send the wafer loading control instructions to the control instruction distribution unit; the control instruction distribution unit is used to send the received wafer loading control instructions to the control instruction execution unit; the control instruction execution unit is used to control the wafer loading device to execute the wafer loading control instructions based on the received wafer loading control instructions; the data acquisition unit is used to collect data from the wafer loading device to obtain the operating status data of the wafer loading device.
[0048] Among them, the wafer loading control instruction may refer to an instruction generated by a control instruction generation unit of a wafer loading control board during the wafer loading process, which is used to control the wafer loading equipment to perform a specific loading operation.
[0049] Specifically, Figure 2 As shown, the control instruction generation unit generates wafer loading control instructions according to a preset loading program or instructions input by a user. These instructions may include parameters such as the position, speed, and force of wafer loading. The generated wafer loading control instructions are sent to the control instruction distribution unit. The control instruction distribution unit receives the wafer loading control instructions from the control instruction generation unit. The received wafer loading control instructions are distributed to the control instruction execution unit. The control instruction execution unit receives the wafer loading control instructions from the control instruction distribution unit. According to the received wafer loading control instructions, the wafer loading device is controlled to perform corresponding loading operations. This includes driving mechanical parts to move, adjusting loading parameters, etc. The data acquisition unit collects data from the wafer loading device, including sensor data, device status data, etc. The collected data is sent to a data storage device or other processing unit for further analysis and processing. The various units of the wafer loading control board work together to realize the automation, intelligence, and precise control of the wafer loading process.
[0050] It should be noted that after receiving the control parameter modification instruction, the wafer loading control board can decide whether to execute the movement based on the sensor status in the wafer loading equipment, determine the movement behavior based on the parameters, drive the control instruction execution unit (actuator) to perform specific movement, and reply to the instruction based on the movement result.
[0051] Optionally, the wafer loading control board 103 further includes: a debugging state switching unit; the wafer loading control board modifies the control parameters of the wafer loading device based on the received control parameter modification instruction, including: when the current state of the debugging state switching unit is a non-debugging state, the wafer loading control board refuses to execute the control parameter modification instruction; when the current state of the debugging state switching unit is a debugging state, the wafer loading control board modifies the control parameters of the wafer loading device according to the control parameter modification instruction.
[0052] Specifically, the main function of the debugging state switching unit is to control whether the wafer loading control board is in the debugging state. When the unit is in the non-debugging state, the wafer loading control board will refuse to execute any control parameter modification instructions to ensure the stability and safety of the production process. When the unit is switched to the debugging state, the wafer loading control board allows the control parameters of the wafer loading equipment to be adjusted according to the received control parameter modification instructions, so as to debug and optimize the equipment.
[0053] Optionally, the interactive device includes: an operation data query unit, an operation status query unit and an equipment debugging unit; wherein the operation data query unit is used to display the operation status data of the wafer loading device based on a data query trigger operation on the wafer loading device; the operation status query unit is used to display the operation status detection result of the wafer loading device based on a status query trigger operation on the wafer loading device; the equipment debugging unit is used to generate a control parameter modification instruction corresponding to the wafer loading device based on a debugging trigger operation on the wafer loading device, and send the control parameter modification instruction to the debugging control board.
[0054] Specifically, the user clicks on the operation data query unit through the interface of the interactive device to trigger the operation data query operation of the wafer loading device. After the interactive device receives the query trigger signal, it sends a data query request to the data storage device through the internal communication protocol or interface. After receiving the request, the data storage device returns the operation status data to the interactive device through the communication protocol or interface. After receiving the data, the interactive device displays the operation status data of the wafer loading device on the interface, such as the device temperature, humidity, air pressure, and the movement status of the mechanical parts. The user clicks on the operation status query unit through the interface of the interactive device to trigger the operation of the operation status detection result query operation of the wafer loading device. After receiving the query trigger signal, the interactive device sends a status detection result query request to the debugging control board. The debugging control board returns the detection result to the interactive device through the communication protocol or interface. After receiving the detection result, the interactive device displays the operation status detection result of the wafer loading device on the interface, such as whether the device is operating normally, whether there is a fault or abnormality, etc. The user clicks on the device debugging unit through the interface of the interactive device to trigger the debugging operation of the wafer loading device. After receiving the debugging trigger signal, the interactive device generates a control parameter modification instruction according to the user's input or the preset debugging parameters. The interactive device sends the control parameter modification instruction to the wafer loading control board through the debugging control board. After receiving the instruction, the wafer loading control board modifies the control parameters of the wafer loading device according to the instruction content. After the modification is completed, the wafer loading control board feeds back the modification results to the interactive device, and the user can view the debugging results on the interface.
[0055] It should be noted that the interactive device can provide logout to protect data security and save energy.
[0056] Optionally, the debugging control board is also used to: if it is detected that the wafer loading device is not in a standard operating state, continue to debug the wafer loading device after the parameter adjustment until the state detection result corresponding to the wafer loading device after the parameter adjustment obtained in this debugging shows that the wafer loading device is in a standard operating state.
[0057] Specifically, if it is detected that the wafer loading device is not in the standard operating state, the debugging control board will immediately trigger the generation of debugging prompt information. This information will be displayed to the user through interactive devices (such as display screens, touch screens, etc.) so that the user can understand the current status of the device and continue the corresponding debugging operations. By real-time monitoring and debugging the operating status of the wafer loading device, potential problems can be discovered and solved in a timely manner, thereby improving the stability and reliability of the equipment. After the parameters are adjusted, the debugging control board will perform a status check on the wafer loading device again to determine whether the adjusted device has reached the standard operating state. If the device still does not reach the standard operating state, the debugging control board will repeat the above parameter adjustment and status detection steps until the device reaches the standard operating state. By continuously debugging and optimizing the control parameters of the wafer loading device, the debugging control board can ensure that the device maintains a stable operating state during long-term operation.
[0058] The wafer loading device debugging system provided in the embodiment of the present invention includes: an interactive device, a debugging control board and a wafer loading control board, wherein the interactive device, the debugging control board and the wafer loading control board are all mounted on the wafer loading device; wherein the interactive device is used to generate a control parameter modification instruction corresponding to the wafer loading device based on the debugging trigger operation of the wafer loading device, and send the control parameter modification instruction to the debugging control board, providing an intuitive user interface so that the user can easily input the debugging requirements. By automatically generating instructions and sending them to the debugging control board, manual intervention is reduced and the debugging efficiency is improved. The debugging control board is used to send the received control parameter modification instruction to the wafer loading control board, so that the communication between the interactive device and the wafer loading control board is more flexible and scalable. The wafer loading control board is used to modify the control parameters of the wafer loading device based on the received control parameter modification instruction, obtain the target operating status data corresponding to the modified wafer loading device, and send the target operating status data to the debugging control board, which can accurately modify the control parameters of the wafer loading device to meet the debugging requirements. The debugging control board is also used to determine that the debugging of the wafer loading device is completed if it is detected that the wafer loading device after parameter adjustment is in a standard operating state based on the received target operating state data, thereby making the debugging process more transparent and traceable. Through the collaborative work of the interactive device, the debugging control board and the wafer loading control board, accurate debugging and automated evaluation of the wafer loading device are achieved, the debugging efficiency and accuracy are improved, and manual intervention and costs are reduced.
[0059] Embodiment 2
[0060] This embodiment provides a wafer loading equipment debugging method based on the wafer loading equipment debugging system provided in the above embodiment. Figure 3A schematic diagram of a process flow of a wafer loading device debugging method provided by an embodiment of the present invention, such as Figure 3 As shown, the method comprises the following steps:
[0061] S210. Generate a control parameter modification instruction corresponding to the wafer loading device based on a debug trigger operation on the wafer loading device through an interactive device, and send the control parameter modification instruction to a debug control board.
[0062] Specifically, the user can input debugging requirements for the wafer loading device through an interactive device (such as a touch screen, keyboard, etc.), such as adjusting parameters such as speed, acceleration, and position accuracy. The interactive device receives the user's input and generates corresponding control parameter modification instructions based on these inputs. These instructions are specific to the wafer loading device and are used to modify its control parameters. The generated instructions are sent to the debugging control board through an internal communication protocol (such as serial port communication, network communication, etc.). By automatically generating instructions and sending them to the debugging control board, manual intervention is reduced and debugging efficiency is improved.
[0063] Exemplarily, before S210, it may also include: obtaining the initial operating status data of the wafer loading device through the wafer loading control board, and sending the initial operating status data to the debugging control board; performing a status detection on the wafer loading device based on the received initial operating status data through the debugging control board, and if it is detected that the wafer loading device is not in a standard operating state, controlling the interactive device to display debugging prompt information, so that the user can perform a debugging trigger operation of the wafer loading device based on the debugging prompt information.
[0064] Specifically, the wafer loading control board, as the core control unit of the wafer loading device, is responsible for real-time monitoring and recording the operating status of the wafer loading device. When the wafer loading device starts to run, the wafer loading control board will immediately start to collect the initial operating status data of the device, including the wafer loading device operation log, sensor data and wafer initial status data. The collected initial operating status data will be sent to the debugging control board in real time through the preset communication protocol and channel for subsequent analysis and processing. The debugging control board is a key component of the wafer loading device debugging system and is responsible for receiving and analyzing data from the wafer loading control board. The debugging control board will monitor and analyze the operating status of the wafer loading device in real time based on the received initial operating status data. By comparing with the preset standard operating status, it is determined whether the device is in the standard operating state. If it is detected that the wafer loading device is not in the standard operating state, the debugging control board will immediately trigger the generation of debugging prompt information. This information will be displayed to the user through interactive devices (such as display screens, touch screens, etc.) so that the user can understand the current status of the device and perform corresponding debugging operations. By real-time monitoring and debugging of the operating status of wafer loading equipment, potential problems can be discovered and resolved in a timely manner, thereby improving the stability and reliability of the equipment.
[0065] Exemplarily, the above-mentioned wafer loading equipment debugging method may also include: acquiring and storing the operating status data received by the debugging control board each time through a data storage device, and sending the operating status data to the interactive device so that the interactive device displays the operating status data.
[0066] Specifically, the data storage device establishes a communication connection with the debugging control board to ensure that the operating status data sent by the debugging control board can be received in real time. Whenever the debugging control board receives the operating status data of the wafer loading device, the data storage device will immediately obtain these data. The data storage device stores the acquired operating status data for subsequent analysis and processing. The data storage device can send the stored operating status data to the interactive device for the user to view and analyze. The sending method can be real-time sending, scheduled sending, or sending when the user requests, which can depend on the design of the system and user needs. After receiving the operating status data, the interactive device will parse and display it. The display method can be a chart, curve, text description, etc., so that the user can intuitively understand the operating status of the device. Through the data storage device, the user can easily trace the operating status data of the wafer loading device and understand the operating history of the device.
[0067] Exemplarily, the above-mentioned data storage device may include: a data classification unit and a data storage unit, wherein, through the data classification unit, based on the data type in the running status data, the running status data is classified to generate running status data corresponding to each data type; through the data storage unit, based on the time parameters corresponding to the running status data of each data type, a log file corresponding to the running status data of each data type is generated, and the log file is stored.
[0068] Specifically, the data classification unit first receives the running status data from the debugging control board. These data may contain multiple types, such as sensor data, device configuration parameters, abnormal alarm information, etc. The data classification unit parses the received running status data and identifies the type of each data. This is usually achieved through a preset data format or identifier. According to the identified data type, the data classification unit classifies the running status data and generates a running status data set corresponding to each data type. Through data classification, different types of running status data can be processed separately to avoid data confusion and misoperation, thereby improving data processing efficiency. The data storage unit extracts time parameters such as data generation time and reception time from the classified running status data. Based on the extracted time parameters, the data storage unit generates a corresponding log file for the running status data of each data type. The log file usually contains information such as data type, data content, timestamp, etc. The generated log file is stored in the data storage unit, which can be a local storage device, a network storage device, or a cloud storage device. By generating a corresponding log file for the running status data of each data type and storing it based on the time parameter, orderly storage and management of data can be achieved. This helps users quickly find the required data and improve data retrieval efficiency.
[0069] Exemplarily, the "interactive device" in S210 may include: an operation data query unit, an operation status query unit and an equipment debugging unit; wherein the operation data query unit is used to display the operation status data of the wafer loading device based on a data query trigger operation on the wafer loading device; the operation status query unit is used to display the operation status detection result of the wafer loading device based on a status query trigger operation on the wafer loading device; the equipment debugging unit is used to generate a control parameter modification instruction corresponding to the wafer loading device based on a debugging trigger operation on the wafer loading device, and send the control parameter modification instruction to the debugging control board.
[0070] Specifically, the user clicks on the operation data query unit through the interface of the interactive device to trigger the operation data query operation of the wafer loading device. After the interactive device receives the query trigger signal, it sends a data query request to the data storage device through the internal communication protocol or interface. After receiving the request, the data storage device returns the operation status data to the interactive device through the communication protocol or interface. After receiving the data, the interactive device displays the operation status data of the wafer loading device on the interface, such as the device temperature, humidity, air pressure, and the movement status of the mechanical parts. The user clicks on the operation status query unit through the interface of the interactive device to trigger the operation of the operation status detection result query operation of the wafer loading device. After receiving the query trigger signal, the interactive device sends a status detection result query request to the debugging control board. The debugging control board returns the detection result to the interactive device through the communication protocol or interface. After receiving the detection result, the interactive device displays the operation status detection result of the wafer loading device on the interface, such as whether the device is operating normally, whether there is a fault or abnormality, etc. The user clicks on the device debugging unit through the interface of the interactive device to trigger the debugging operation of the wafer loading device. After receiving the debugging trigger signal, the interactive device generates a control parameter modification instruction according to the user's input or the preset debugging parameters. The interactive device sends the control parameter modification instruction to the wafer loading control board through the debugging control board. After receiving the instruction, the wafer loading control board modifies the control parameters of the wafer loading device according to the instruction content. After the modification is completed, the wafer loading control board feeds back the modification results to the interactive device, and the user can view the debugging results on the interface.
[0071] S220, sending the received control parameter modification instruction to the wafer loading control board through the debugging control board.
[0072] Specifically, the debug control board receives control parameter modification instructions from the interactive device. The debug control board can verify and parse the received instructions to ensure their correctness and completeness. After verification, the debug control board forwards the instructions to the wafer loading control board. With the debug control board as an intermediate layer, the communication between the interactive device and the wafer loading control board is more flexible and scalable.
[0073] S230, modifying the control parameters of the wafer loading device based on the received control parameter modification instruction through the wafer loading control board, obtaining target operating status data corresponding to the modified wafer loading device, and sending the target operating status data to the debugging control board.
[0074] Specifically, the wafer loading control board receives the control parameter modification instruction from the debugging control board. The wafer loading control board modifies the control parameters of the wafer loading device accordingly according to the instruction content. The modified wafer loading device starts to operate according to the new control parameters and generates corresponding target operation status data to meet the debugging requirements.
[0075] Exemplarily, the target operating status data includes: wafer loading equipment operating log, sensor data and wafer initial status data.
[0076] Exemplarily, the "wafer loading control board" in S230 may include: a control instruction generation unit, a control instruction distribution unit, a control instruction execution unit and a data acquisition unit, wherein the control instruction generation unit is used to generate wafer loading control instructions and send the wafer loading control instructions to the control instruction distribution unit; the control instruction distribution unit is used to send the received wafer loading control instructions to the control instruction execution unit; the control instruction execution unit is used to control the wafer loading device to execute the wafer loading control instructions based on the received wafer loading control instructions; the data acquisition unit is used to collect data from the wafer loading device to obtain the operating status data of the wafer loading device.
[0077] Specifically, the control instruction generation unit generates wafer loading control instructions according to a preset loading program or instructions input by a user. These instructions may include parameters such as the position, speed, and force of wafer loading. The generated wafer loading control instructions are sent to the control instruction distribution unit. The control instruction distribution unit receives the wafer loading control instructions from the control instruction generation unit. The received wafer loading control instructions are distributed to the control instruction execution unit. The control instruction execution unit receives the wafer loading control instructions from the control instruction distribution unit. According to the received wafer loading control instructions, the wafer loading device is controlled to perform corresponding loading operations. This includes driving mechanical parts to move, adjusting loading parameters, etc. The data acquisition unit collects data from the wafer loading device, including sensor data, equipment status data, etc. The collected data is sent to a data storage device or other processing unit for further analysis and processing. The various units of the wafer loading control board work together to realize the automation, intelligence, and precise control of the wafer loading process.
[0078] Exemplarily, the "wafer loading control board" in S230 may also include: a debugging state switching unit; the wafer loading control board modifies the control parameters of the wafer loading device based on the received control parameter modification instruction, including: when the current state of the debugging state switching unit is a non-debugging state, the wafer loading control board refuses to execute the control parameter modification instruction; when the current state of the debugging state switching unit is a debugging state, the wafer loading control board modifies the control parameters of the wafer loading device according to the control parameter modification instruction.
[0079] Specifically, the main function of the debugging state switching unit is to control whether the wafer loading control board is in the debugging state. When the unit is in the non-debugging state, the wafer loading control board will refuse to execute any control parameter modification instructions to ensure the stability and safety of the production process. When the unit is switched to the debugging state, the wafer loading control board allows the control parameters of the wafer loading equipment to be adjusted according to the received control parameter modification instructions, so as to debug and optimize the equipment.
[0080] S240. If, through the debugging control board, it is detected based on the received target operating status data that the wafer loading equipment after parameter adjustment is in a standard operating state, it is determined that the debugging of the wafer loading equipment is completed.
[0081] Specifically, the wafer loading control board sends the target operating status data (such as speed, position, acceleration, etc.) corresponding to the modified wafer loading equipment to the debugging control board through the internal communication protocol. These data are used to evaluate whether the operating status of the wafer loading equipment under the modified control parameters meets the standards, making the debugging process more transparent and traceable.
[0082] Exemplarily, the "debugging control version" in S240 is also specifically used for: if it is detected that the wafer loading device is not in the standard operating state, then continue to debug the wafer loading device after the parameter adjustment until the state detection result corresponding to the wafer loading device after the parameter adjustment obtained in this debugging shows that the wafer loading device is in the standard operating state.
[0083] Specifically, if it is detected that the wafer loading device is not in the standard operating state, the debugging control board will immediately trigger the generation of debugging prompt information. This information will be displayed to the user through interactive devices (such as display screens, touch screens, etc.) so that the user can understand the current status of the device and continue the corresponding debugging operations. By real-time monitoring and debugging the operating status of the wafer loading device, potential problems can be discovered and solved in a timely manner, thereby improving the stability and reliability of the equipment. After the parameters are adjusted, the debugging control board will perform a status check on the wafer loading device again to determine whether the adjusted device has reached the standard operating state. If the device still does not reach the standard operating state, the debugging control board will repeat the above parameter adjustment and status detection steps until the device reaches the standard operating state. By continuously debugging and optimizing the control parameters of the wafer loading device, the debugging control board can ensure that the device maintains a stable operating state during long-term operation.
[0084] The wafer loading device debugging method provided in the embodiment of the present invention, the interactive device is used to generate the control parameter modification instruction corresponding to the wafer loading device based on the debugging trigger operation of the wafer loading device, and send the control parameter modification instruction to the debugging control board, providing an intuitive user interface, so that the user can easily input the debugging requirements. By automatically generating instructions and sending them to the debugging control board, manual intervention is reduced and the debugging efficiency is improved. The debugging control board is used to send the received control parameter modification instruction to the wafer loading control board, so that the communication between the interactive device and the wafer loading control board is more flexible and scalable. The wafer loading control board is used to modify the control parameters of the wafer loading device based on the received control parameter modification instruction, obtain the target operating status data corresponding to the modified wafer loading device, and send the target operating status data to the debugging control board, which can accurately modify the control parameters of the wafer loading device to meet the debugging requirements. The debugging control board is also used to determine that the debugging of the wafer loading device is over if it is detected that the wafer loading device after parameter adjustment is in a standard operating state based on the received target operating status data, so that the debugging process is more transparent and traceable. Through the collaborative work of the interactive device, the debugging control board and the wafer loading control board, accurate debugging and automated evaluation of the wafer loading equipment are achieved, which improves debugging efficiency and accuracy and reduces manual intervention and costs.
[0085] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims
1. A wafer loading equipment debugging system, characterized in that: include: Interactive equipment, debugging control board and wafer loading control board, the interactive equipment, debugging control board and wafer loading control board are all mounted on the wafer loading equipment; wherein, The interactive device is used to generate a control parameter modification instruction corresponding to the wafer loading device based on a debugging trigger operation on the wafer loading device, and send the control parameter modification instruction to the debugging control board; The debugging control board is used to send the received control parameter modification instruction to the wafer loading control board; The wafer loading control board is used to modify the control parameters of the wafer loading device based on the received control parameter modification instruction, obtain the target operating status data corresponding to the modified wafer loading device, and send the target operating status data to the debugging control board; The debugging control board is also used to determine that the debugging of the wafer loading equipment is completed if it is detected that the wafer loading equipment after parameter adjustment is in a standard operating state based on the received target operating state data.
2. The system according to claim 1, characterized in that Before the interactive device generates a control parameter modification instruction corresponding to the wafer loading device based on the debugging trigger operation of the wafer loading device, the method further includes: The wafer loading control board is also used to obtain initial operation status data of the wafer loading device and send the initial operation status data to the debugging control board; The debugging control board is also used to perform status detection on the wafer loading device based on the received initial operating status data. If it is detected that the wafer loading device is not in a standard operating state, the interactive device is controlled to display debugging prompt information so that the user can perform debugging trigger operations on the wafer loading device based on the debugging prompt information.
3. The system according to claim 1, characterized in that Also includes: A data storage device, wherein The data storage device is used to obtain and store the running status data received by the debugging control board each time, and send the running status data to the interactive device so that the interactive device displays the running status data.
4. The system according to claim 3, characterized in that The data storage device comprises: a data classification unit and a data storage unit, wherein: The data classification unit is used to classify the running status data based on the data types in the running status data, and generate running status data corresponding to each data type; The data storage unit is used to generate a log file corresponding to the running status data of each data type based on the time parameter corresponding to the running status data of each data type, and store the log file.
5. The system according to claim 1, characterized in that The target operating status data includes: wafer loading equipment operating log, sensor data and wafer initial status data.
6. The system according to claim 1, characterized in that The wafer loading control board includes: a control instruction generating unit, a control instruction distributing unit, a control instruction executing unit and a data collecting unit, wherein: The control instruction generating unit is used to generate a wafer loading control instruction and send the wafer loading control instruction to the control instruction distributing unit; The control instruction distribution unit is used to send the received wafer loading control instruction to the control instruction execution unit; The control instruction execution unit is used to control the wafer loading device to execute the wafer loading control instruction based on the received wafer loading control instruction; The data acquisition unit is used to collect data from the wafer loading device to obtain the operating status data of the wafer loading device.
7. The system according to claim 1, characterized in that The wafer loading control board further includes: a debugging state switching unit; The wafer loading control board modifies the control parameters of the wafer loading device based on the received control parameter modification instruction, including: When the current state of the debugging state switching unit is a non-debugging state, the wafer loading control board refuses to execute the control parameter modification instruction; When the current state of the debugging state switching unit is the debugging state, the wafer loading control board modifies the control parameters of the wafer loading device according to the control parameter modification instruction.
8. The system according to claim 1, characterized in that The interactive device comprises: an operation data query unit, an operation status query unit and a device debugging unit; wherein, The operation data query unit is used to display the operation status data of the wafer loading device based on the data query trigger operation of the wafer loading device; The operation status query unit is used to display the operation status detection result of the wafer loading device based on the state query trigger operation of the wafer loading device; The equipment debugging unit is used to generate a control parameter modification instruction corresponding to the wafer loading equipment based on a debugging trigger operation on the wafer loading equipment, and send the control parameter modification instruction to the debugging control board.
9. The system according to any one of claims 1 to 8, wherein the debugging control board is further used for: If it is detected that the wafer loading device is not in the standard operating state, the wafer loading device after the parameter adjustment is continuously debugged until the state detection result corresponding to the wafer loading device after the parameter adjustment obtained in this debugging indicates that the wafer loading device is in the standard operating state.
10. A wafer loading equipment debugging method, characterized in that: include: Generate, through the interactive device, a control parameter modification instruction corresponding to the wafer loading device based on the debugging trigger operation of the wafer loading device, and send the control parameter modification instruction to the debugging control board; The received control parameter modification instruction is sent to the wafer loading control board through the debugging control board; By means of the wafer loading control board, the control parameters of the wafer loading device are modified based on the received control parameter modification instruction, target operation status data corresponding to the modified wafer loading device is obtained, and the target operation status data is sent to the debugging control board; Through the debugging control board, if it is detected that the wafer loading device after parameter adjustment is in a standard operating state based on the received target operating state data, it is determined that the debugging of the wafer loading device is completed.