Electronic-grade high-purity air bag pump and working method thereof

By designing an electronic-grade high-purity air bag pump, and using a separate reversing valve to promote the telescopic movement of the air bag assembly, the existing pump's complex structure, difficulty in maintenance and medium pollution problems are solved, and the pump body performance with high purity and long life is achieved.

CN119914505APending Publication Date: 2025-05-02RUISHAN FLUID SYST TECH (NANTONG) CO LTD
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Patent Information

Application Number
CN202510278946.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-11
Publication Date
2025-05-02

AI Technical Summary

Technical Problem

The existing reciprocating fluid pumps have complex structures, difficult maintenance, short service life, and the use of metal materials will cause media contamination and affect purity.

Method used

An electronic-grade high-purity air bag pump is designed to introduce compressed air into the air bag assembly through a separate reversing valve, which promotes its telescopic movement left and right, changes the volume of left and right chambers of the central pump body, and realizes alternating liquid suction and discharge.

Benefits of technology

It realizes a high-purity air bag pump with a simple structure and easy production, extends its service life, avoids media pollution, and meets the use needs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses an electronic-grade high-purity air bag pump and a working method thereof. The electronic-grade high-purity air bag pump comprises a pump body and a separating type reversing valve, the pump body comprises a center pump body, a first air bag assembly, a second air bag assembly and a center rod, and the first air bag assembly and the second air bag assembly are oppositely arranged at the two ends of the center pump body; the center rod is arranged between the first air bag assembly and the second air bag assembly. A sealing piece is arranged at the joint of the piston rod and the central pump body; the separated reversing valve is arranged on one side of the pump body and connected with the two ends of the pump body through the air supply pipeline assembly. According to the electronic-grade high-purity air bag pump, the structure of the air bag pump is improved, compressed air enters the first air bag assembly or the second air bag assembly through the separation type reversing valve to push the air bag assemblies to do left-right telescopic motion, and therefore the volume of a left cavity and the volume of a right cavity of the center pump body are changed, and alternate liquid suction and drainage of the left cavity and the right cavity are achieved; and the use requirements can be better met.
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Description

Technical Field

[0001] The invention belongs to the technical field of pump bodies, and in particular relates to an electronic-grade high-purity air bag pump and a working method thereof. Background Art

[0002] Reciprocating fluid pumps are used in many industries. Reciprocating fluid pumps usually include two fluid chambers in the pump body. The existing reciprocating fluid pumps have a relatively complex structure, which leads to problems such as difficulty in later maintenance and short service life. Some existing reciprocating fluid pumps are made of metal materials, which will cause metal contamination to the medium during use, which will affect the purity of the medium. Therefore, the existing technology needs to be improved. Summary of the invention

[0003] Purpose of the invention: In order to overcome the above shortcomings, the purpose of the present invention is to provide an electronic grade high-purity wind bag pump, which has a simple structure, reasonable design and is easy to produce. By improving the structure of the wind bag pump, compressed gas enters the first wind bag assembly or the second wind bag assembly through a separate reversing valve, pushing the wind bag assembly to telescope left and right, thereby changing the volume of the left and right cavities of the central pump body, and realizing alternating suction and discharge of liquids in the left and right cavities, so that it can better meet the needs of use.

[0004] Technical solution: In order to achieve the above purpose, the present invention provides an electronic grade high purity air bladder pump, comprising: A pump body, the pump body comprising a central pump body, a first air bag assembly, a second air bag assembly, and a central rod, wherein the first air bag assembly and the second air bag assembly are arranged at two ends of the central pump body opposite to each other, and the central rod is arranged between the first air bag assembly and the second air bag assembly; and a sealing member is arranged at the connection between the central rod and the central pump body; The separate reversing valve is arranged on one side of the pump body and connected to both ends of the pump body through an air supply pipe assembly. The electronic grade high-purity air bag pump described in the present invention improves the structure of the air bag pump, and the compressed air enters the first air bag assembly or the second air bag assembly through the separate reversing valve, pushing the air bag assembly to move left and right, thereby changing the volume of the left and right cavities of the central pump body, realizing the alternating suction and discharge of the left and right cavities, so that it can better meet the needs of use.

[0005] Among them, the separate reversing valve includes a reversing valve body and a reversing assembly, a cavity is provided in the reversing valve body, and a first air supply channel, a second air supply channel, a third air supply channel and a fourth air supply channel are respectively provided on both sides of the cavity, and a first exhaust hole and a second exhaust hole are respectively provided on both sides of the reversing valve body, and the reversing assembly is arranged in the cavity.

[0006] Furthermore, the reversing assembly includes a reversing valve stem and an exhaust pipe, wherein a first cavity is provided in the exhaust pipe, the reversing valve stem is provided in the first cavity of the exhaust pipe, and the length of the reversing valve stem is less than the height of the first cavity; The exhaust pipe is provided with a first sealing member and a second sealing member at both ends. Compressed gas enters the first air bag assembly or the second air bag assembly through the separation reversing valve, pushing the first air bag assembly or the second air bag assembly to telescope left and right. When the first air bag assembly or the second air bag assembly moves to the correct position, the compressed gas enters the reversing valve stem, pushing the reversing valve stem to change position, thereby switching the compressed gas inlet and outlet pipelines, pushing the movement direction of the first air bag assembly and the second air bag assembly to change, thereby changing the original cavity for absorbing liquid into the cavity for discharging liquid, and the cavity for discharging liquid into the cavity for absorbing liquid. After the compressed gas is cut off, the compressed gas in the air supply pipeline is automatically discharged without causing the air bag to be pressurized.

[0007] Preferably, the reversing valve stem is provided with a first groove and a second groove.

[0008] Furthermore, a plurality of exhaust holes are provided in the circumference of the exhaust pipe from bottom to top, and a group of air guides are provided in the reversing valve body outside the exhaust holes.

[0009] The first sealing member and the second sealing member are provided with an air supply channel.

[0010] The central pump body comprises a central pump shell, a liquid inlet and a liquid outlet are arranged on one side of the central pump shell, a liquid inlet channel and a liquid outlet channel are arranged inside, and the liquid inlet channel and the liquid outlet channel are connected to the liquid inlet and the liquid outlet respectively; It also includes a first channel and a second channel, the first channel and the second channel are vertically arranged and communicate with the liquid inlet channel and the liquid outlet channel; a sac cavity is arranged on both sides of the first channel and the second channel, the first air sac assembly and the second air sac assembly are arranged in the corresponding sac cavity, and both ends are threadedly connected to the central pump housing through end covers, and a cavity is arranged between the first air sac assembly, the second air sac assembly and the corresponding sac cavity; In addition, the first channel and the second channel are both provided with a liquid suction regulating mechanism. When working, the compressed gas enters the first air bag assembly or the second air bag assembly through the separate reversing valve, pushing the first or second air bag assembly to move left and right. When the first air bag assembly or the second air bag assembly moves to the correct position, the compressed gas enters the reversing valve stem, pushing the reversing valve stem to change position, thereby switching the compressed gas inlet and outlet pipelines, pushing the movement direction of the first air bag assembly and the second air bag assembly to change. When the movement direction of the first air bag assembly and the second air bag assembly changes, the change of their cavities will adjust the position of the liquid suction regulating mechanism of the first channel and the second channel, thereby changing the original liquid suction cavity into a liquid discharge cavity, and changing the liquid discharge cavity into a liquid suction cavity.

[0011] Preferably, the liquid suction regulating mechanism comprises a support tube, a valve body is provided above the support tube, and regulating valves are provided in the support tube and the valve body; The lower inner wall of the support tube is conical, and the opening diameter thereof is smaller than the diameter of the regulating valve; The valve body includes an upper valve body and a lower valve body, which are threadedly connected to the central pump body, and a group of perforations are arranged in the circumference of the lower part of the lower valve body, and the outer side of the perforations is connected to the corresponding bladder cavity through the liquid guide assembly; the upper valve body is provided with an adjustment cavity, and the adjustment valve is arranged in the adjustment cavity of the upper valve body, and the diameter of the lower valve body is smaller than the diameter of the adjustment valve. When working, the change of the movement direction of the first air bag assembly and the second air bag assembly will adjust the position of the adjustment valve in the first channel and the second channel, thereby controlling the liquid flow path of the pump body.

[0012] The first wind bag assembly and the second wind bag assembly both include a wind bag and a wind bag driving assembly. The wind bag is arranged in a bag cavity, the wind bag driving assembly is arranged in the wind bag, and a first piston rod is arranged in the wind bag driving assembly. One end of the first piston rod passes through the bag body of the wind bag and extends into the plunger of the wind bag.

[0013] The air supply pipeline assembly includes a first air supply pipeline, a second air supply pipeline, a third air supply pipeline and a fourth air supply pipeline, wherein one end of the first air supply pipeline is connected to the air supply channel of the first sealing member, and the other end is connected to the air bag driving assembly in the first air bag assembly; One end of the second air supply pipeline is connected to the air guide corresponding to the outer side of the second groove, and the other end is connected to the first air bag assembly; One end of the third air supply pipeline is connected to the air guide corresponding to the outer side of the first groove, and the other end is connected to the second air bag assembly; One end of the fourth air supply pipeline is connected to the air supply channel of the second sealing member, and the other end is connected to the wind bag driving assembly in the second wind bag assembly.

[0014] The end of the air bag near the piston rod is provided with a groove, the groove port and the end surface of the bag column are inclined, and the end of the piston rod is provided with an inclined surface in the circumferential direction, and the inclined surface matches the groove. The matching of the groove and the inclined surface can improve the sealing performance between the piston rod and the air bag.

[0015] It can be seen from the above technical solution that the present invention has the following beneficial effects: 1. The electronic-grade high-purity air bag pump described in the present invention improves the structure of the air bag pump. The compressed gas enters the first air bag assembly or the second air bag assembly through a separate reversing valve, pushing the air bag assembly to move left and right, thereby changing the volume of the left and right cavities of the central pump body, and realizing the alternating suction and discharge of the left and right cavities, so that it can better meet the needs of use.

[0016] 2. The separate reversing valve described in the present invention adopts a unique structural design. The compressed gas enters the first wind bag assembly or the second wind bag assembly through the separate reversing valve, pushing the first or second wind bag assembly to telescope left and right. When the first wind bag assembly or the second wind bag assembly runs to the correct position, the compressed gas enters the reversing valve stem, pushing the reversing valve stem to change position, thereby switching the compressed gas inlet and outlet pipelines, pushing the movement direction of the first wind bag assembly and the second wind bag assembly to change, thereby changing the original liquid absorption cavity into a liquid discharge cavity, and the liquid discharge cavity into a liquid absorption cavity. After the compressed gas is cut off, the compressed gas in the air supply pipeline is automatically discharged, and will not cause the wind bag to be pressurized.

[0017] 3. A groove is provided at one end of the air bag near the piston rod, and the groove port is inclined with the end surface of the bag column. A slope is provided at the end of the piston rod, and the slope matches the groove. The matching of the groove and the slope can improve the sealing performance between the piston rod and the air bag. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of the electronic grade high purity air bag pump of the present invention; Figure 2 It is a schematic diagram of the internal structure of the separation type reversing valve described in the present invention; Figure 3 It is a cross-sectional view of the separate reversing valve in the present invention; Figure 4 It is a structural schematic diagram of the cross section of the pump body in the present invention; Figure 5 It is a structural schematic diagram of the longitudinal section of the pump body in the present invention; Figure 6 It is a schematic diagram of the left suction and right discharge state of the electronic grade high purity air bag pump in the present invention when it is working; Figure 7 It is a schematic diagram of the right suction and left discharge state of the electronic grade high purity air bag pump in the present invention when it is working. DETAILED DESCRIPTION

[0019] The present invention is further explained below in conjunction with the accompanying drawings and specific embodiments. Example

[0020] like Figures 1 to 7 An electronic grade high purity air bag pump shown in the figure comprises: a pump body 1 and a separate reversing valve 2, the pump body 1 comprises a central pump body 11, a first air bag assembly 12, a second air bag assembly 13, and a central rod 14, the first air bag assembly 12 and the second air bag assembly 13 are arranged at two ends of the central pump body 11 opposite to each other, the central rod 14 is arranged between the first air bag assembly 12 and the second air bag assembly 13; and a sealing member 15 is arranged at the connection between the central rod 14 and the central pump body 11; The separate reversing valve 2 is arranged on one side of the pump body 1 and connected to both ends of the pump body 1 through the air supply pipe assembly 3. It should be noted that all parts of the electronic grade high-purity air bag pump that contact the liquid are made of high-purity PTFE / PFA materials, without ion precipitation, and a special overall metal-free design. Even if the air bag is damaged, there will be no metal ion contamination of chemicals. The precision-machined air bag has a cycle life of up to 100 million times and can work continuously for 24 hours without maintenance.

[0021] like Figure 2 , Figure 3 The shown separate reversing valve 2 includes a reversing valve body 21 and a reversing assembly 22, with a liquid inlet and a liquid outlet provided on one side, a cavity provided inside the reversing valve body 21, and a first air supply channel 211, a second air supply channel 212, a third air supply channel 213 and a fourth air supply channel 214 provided on both sides of the cavity, and a first exhaust hole 215 and a second exhaust hole 216 provided on both sides of the reversing valve body 21, and the reversing assembly 22 is arranged in the cavity.

[0022] like Figure 3 The reversing assembly 22 shown includes a reversing valve stem 221 and an exhaust pipe 222. The exhaust pipe 222 is provided with a first cavity. The reversing valve stem 221 is provided in the first cavity of the exhaust pipe 222, and the length of the reversing valve stem 221 is less than the height of the first cavity. The exhaust pipe 222 is provided with a first sealing member 223 and a second sealing member 224 at both ends. It should be noted that the reversing valve stem 221 and the exhaust pipe 222 are both made of ceramic material, which can provide good wear resistance and corrosion resistance. It can be imagined that the material of the reversing valve stem 221 and the exhaust pipe 222 can be selected according to actual needs.

[0023] The reversing valve stem 221 is provided with a first groove 2211 and a second groove 2212 .

[0024] The exhaust pipe 222 is provided with a plurality of exhaust holes from bottom to top in the circumference thereof, and a group of air guides 217 is provided on the outside of the exhaust holes in the reversing valve body 21 .

[0025] The first sealing member 223 and the second sealing member 224 are provided with air supply channels.

[0026] The central pump body 11 comprises a central pump shell 111, a liquid inlet and a liquid outlet are arranged on one side of the central pump shell 111, and a liquid inlet channel and a liquid outlet channel are arranged inside, and the liquid inlet channel and the liquid outlet channel are connected to the liquid inlet and the liquid outlet respectively; like Figure 5The pump body also includes a first channel and a second channel, which are vertically arranged and communicate with the liquid inlet channel and the liquid outlet channel; a sac cavity 112 is arranged on both sides of the first channel and the second channel, the first air bag assembly 12 and the second air bag assembly 13 are arranged in the corresponding sac cavity 112, and both ends are threadedly connected to the central pump housing 111 through the end cover 113, and a cavity is arranged between the first air bag assembly 12, the second air bag assembly 13 and the corresponding sac cavity 112; The first channel and the second channel are both provided with a liquid suction regulating mechanism 114. It should be noted that the liquid suction regulating mechanism 114 can select a suitable structure according to actual needs.

[0027] The liquid suction regulating mechanism 114 includes a support tube 1141, a valve body 1142 is disposed above the support tube 1141, and regulating valves 1143 are disposed in both the support tube 1141 and the valve body 1142; The lower inner wall of the support tube 1141 is conically arranged, and its opening diameter is smaller than the diameter of the regulating valve 1143; it should be noted that the regulating valve 1143 in this case preferably adopts a ball valve, and the regulating valve 1143 cooperates with the conical inclined surface of the lower inner wall of the support tube 1141, which plays a good sealing role and can effectively improve the self-priming ability of the pump.

[0028] The valve body 1142 includes an upper valve body 11421 and a lower valve body 11422, wherein the 11421 is threadedly connected to the central pump body 11, and a group of perforations are arranged in the circumferential direction of the lower portion of the lower valve body 11422, and the outer side of the perforations is connected to the corresponding sac cavity 112 through a liquid guide assembly 1144; an adjusting cavity is arranged in the upper valve body 11421, and the adjusting valve 1143 is arranged in the adjusting cavity of the upper valve body 11421, and the diameter of the lower valve body 11422 is smaller than the diameter of the adjusting valve 1143. The tapered surfaces of the adjusting valve 1143 and the lower valve body 1142 are also more closely fitted, which can also effectively improve the sealing performance and increase the self-priming ability of the pump.

[0029] The first wind bag assembly 12 and the second wind bag assembly 13 both include a wind bag 121 and a wind bag driving assembly 122. The wind bag 121 is disposed in the bag cavity 113. The wind bag driving assembly 122 is disposed in the wind bag 121. A first piston rod 1221 is disposed in the wind bag driving assembly 122. One end of the first piston rod 1221 passes through the bag body of the wind bag 121 and extends into the plunger of the wind bag 121.

[0030] The air supply pipeline assembly 3 includes a first air supply pipeline 31, a second air supply pipeline 32, a third air supply pipeline 33 and a fourth air supply pipeline 34, one end of the first air supply pipeline 31 is connected to the air supply channel of the first sealing member 223 through the first air supply channel 211, and the other end is connected to the air bag driving assembly 122 in the first air bag assembly 12; One end of the second air supply pipe 32 is connected to the air guide 217 corresponding to the outer side of the second groove 2212 through the second air supply channel 212, and the other end is connected to the first air bag assembly 12; One end of the third air supply pipe 33 is connected to the air guide 217 corresponding to the outer side of the first groove 2211 through the third air supply channel 213, and the other end is connected to the second air bag assembly 13; One end of the fourth air supply pipe 34 is connected to the air supply channel of the second sealing member 224 through the fourth air supply channel 214 , and the other end is connected to the air bag driving assembly 122 in the second air bag assembly 13 .

[0031] A groove 1211 is formed at one end of the air bag 121 close to the center rod 14 . The end of the groove 1211 is inclined to the end surface of the bag column. An inclined surface is formed circumferentially at the end of the center rod 14 , and the inclined surface matches the groove 1211 .

[0032] The working method of an electronic grade high purity air bag pump described in this embodiment is as follows: When it is used first, since the ceramic rod 221 is installed vertically, it will always be at the bottom of the exhaust pipe 222 due to gravity. When the gas is taken in from the center of the separate reversing valve 2, the gas is connected to the third air supply pipe 33, and the gas enters the second air bag assembly 13. The second air bag assembly 13 moves to the right, and at the same time drives the first piston rod 1221 in the second air bag assembly 13 to move. During this process, the left capsule cavity is stretched, and the right capsule cavity 112 is compressed, allowing liquid to enter from the liquid inlet channel, push open the regulating valve 1143 in the first channel, enter the right capsule cavity 112, and the right capsule cavity 112 absorbs liquid; When the first piston rod 1221 in the second air bag assembly 13 moves to a certain position, the compressed gas discharges from the middle hole of the second air bag assembly 13 and supplies air to the fourth air supply pipe 34. The gas will push the reversing valve stem 221 upward. When it is pushed to the top, the middle air inlet hole of the separate reversing valve 2 supplies air to the second air supply pipe 32 through the second air supply channel 212, pushing the first air bag assembly 12 to move left. The first air bag assembly 12 on the left compresses the right chamber, pushing the liquid in the right chamber to the outlet of the central pump body 11, and the gas in the left chamber enters the separate reversing valve 2 from the third air supply pipe 33 and is discharged from the outlet of the second exhaust hole 216; at the same time, after the first piston rod 1221 in the first air bag assembly 12 moves to a certain position to the left, the compressed gas discharges from the middle hole of the first air bag assembly 12, supplies air to the first air supply pipe 31, and the gas pushes the reversing valve stem 221 to move downward, thus completing a complete cycle.

[0033] During this process, the changes in the capsule cavity will adjust the positions of the first channel and the second channel suction regulating mechanisms, thereby changing the original suction cavity into a discharge cavity and the discharge cavity into a suction cavity.

[0034] The above description is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several improvements without departing from the principle of the present invention, and these improvements should also be regarded as within the protection scope of the present invention.

Claims

1. An electronic grade high purity air bladder pump, characterized in that: include: A pump body (1), the pump body (1) comprising a central pump body (11), a first air bag assembly (12), a second air bag assembly (13), and a central rod (14), the first air bag assembly (12) and the second air bag assembly (13) being arranged at two ends of the central pump body (11) opposite to each other, the central rod (14) being arranged between the first air bag assembly (12) and the second air bag assembly (13); and a sealing member (15) being arranged at a connection between the central rod (14) and the central pump body (11); A separate reversing valve (2), wherein the separate reversing valve (2) is arranged on one side of the pump body (1) and is connected to both ends of the pump body (1) via an air supply pipeline assembly (3).

2. The electronic grade high purity air bladder pump according to claim 1, characterized in that: The split-type reversing valve (2) comprises a reversing valve body (21) and a reversing assembly (22); a cavity is provided in the reversing valve body (21); a first air supply channel (211), a second air supply channel (212), a third air supply channel (213) and a fourth air supply channel (214) are provided on both sides of the cavity; a first exhaust hole (215) and a second exhaust hole (216) are provided on both sides of the reversing valve body (21); and the reversing assembly (22) is arranged in the cavity.

3. The electronic grade high purity air bladder pump according to claim 2 is characterized in that: The reversing assembly (22) comprises a reversing valve stem (221) and an exhaust pipe (222), wherein a first cavity is provided in the exhaust pipe (222), the reversing valve stem (221) is arranged in the first cavity of the exhaust pipe (222), and the length of the reversing valve stem (221) is smaller than the height of the first cavity; A first sealing member (223) and a second sealing member (224) are respectively provided at both ends of the exhaust pipe (222); and a first groove (2211) and a second groove (2212) are provided on the reversing valve stem (221).

4. The electronic grade high purity air bladder pump according to claim 3 is characterized in that: The exhaust pipe (222) is provided with a plurality of exhaust holes in the circumferential direction from bottom to top, and a group of air guides (217) is provided on the outside of the exhaust holes in the reversing valve body (21).

5. The electronic grade high purity air bladder pump according to claim 3 is characterized in that: The first sealing member (223) and the second sealing member (224) are provided with air supply channels.

6. The electronic grade high purity air bladder pump according to claim 1, characterized in that: The central pump body (11) comprises a central pump shell (111), a liquid inlet and a liquid outlet are provided on one side of the central pump shell (111), a liquid inlet channel (1101) and a liquid outlet channel (1102) are provided inside the central pump shell, and the liquid inlet channel (1101) and the liquid outlet channel (1102) are connected to the liquid inlet and the liquid outlet respectively; It also includes a first channel and a second channel, the first channel and the second channel are arranged vertically and communicate with the liquid inlet channel and the liquid outlet channel; a sac cavity (112) is provided on both sides of the first channel and the second channel, the first air bag assembly (12) and the second air bag assembly (13) are arranged in the corresponding sac cavity (112), and both ends are threadedly connected to the central pump housing (111) through the end cover (113); a cavity is provided between the first air bag assembly (12), the second air bag assembly (13) and the corresponding sac cavity (112); Furthermore, a liquid suction regulating mechanism (114) is provided in both the first channel and the second channel.

7. The electronic grade high purity air bladder pump according to claim 6, characterized in that: The liquid suction regulating mechanism (114) comprises a support tube (1141), a valve body (1142) is provided above the support tube (1141), and regulating valves (1143) are provided in both the support tube (1141) and the valve body (1142); The lower inner wall of the support tube (1141) is arranged in a conical shape, and the opening diameter thereof is smaller than the diameter of the regulating valve (1143); The valve body (1142) comprises an upper valve body (11421) and a lower valve body (11422); the valve body (11421) is threadedly connected to the central pump body (11), and a group of perforations are circumferentially arranged at the lower part of the lower valve body (11422), and the outer side of the perforations is connected to the corresponding sac cavity (112) through a liquid guide component (1144); an adjusting cavity is arranged in the upper valve body (11421), and the adjusting valve (1143) is arranged in the adjusting cavity of the upper valve body (11421); the diameter of the lower valve body (11422) is smaller than the diameter of the adjusting valve (1143).

8. The electronic grade high purity air bladder pump according to claim 7, characterized in that: The first wind bag assembly (12) and the second wind bag assembly (13) both comprise a wind bag (121) and a wind bag driving assembly (122); the wind bag (121) is arranged in the bag cavity (113); the wind bag driving assembly (122) is arranged in the wind bag (121); a first piston rod (1221) is arranged in the wind bag driving assembly (122); one end of the first piston rod (1221) passes through the bag body of the wind bag (121) and extends into the plunger of the wind bag (121).

9. The electronic grade high purity air bladder pump according to claim 3, characterized in that: The air supply pipeline assembly (3) comprises a first air supply pipeline (31), a second air supply pipeline (32), a third air supply pipeline (33) and a fourth air supply pipeline (34); one end of the first air supply pipeline (31) is connected to the air supply channel of the first sealing member (223) via a first air supply channel (211), and the other end is connected to the air bag driving assembly (122) in the first air bag assembly (12); One end of the second air supply pipe (32) is connected to an air guide (217) corresponding to the outer side of the second groove (2212) through a second air supply channel (212), and the other end is connected to the first air bag assembly (12); One end of the third air supply pipeline (33) is connected to the air guide (217) corresponding to the outer side of the first groove (2211) through the third air supply channel (213), and the other end is connected to the second air bag assembly (13); One end of the fourth air supply pipeline (34) is connected to the air supply channel of the second sealing component (224) via the fourth air supply channel (214), and the other end is connected to the air bag driving component (122) in the second air bag component (13).

10. The electronic grade high purity air bladder pump according to claim 8, characterized in that: The wind bag (121) is provided with a groove (1211) at one end close to the center rod (14), the port of the groove (1211) is inclined to the end surface of the bag column, and the end of the center rod (14) is provided with an inclined surface in the circumferential direction, and the inclined surface matches the groove (1211).