Short single crystal transfer device

Abstract

The invention provides a short single crystal transfer device and method, and relates to the technical field of crystal silicon processing, the short single crystal transfer device comprises a first transfer mechanism, the first transfer mechanism is provided with a base, the base is provided with a plurality of crystal taking slots, the bottom of the base is provided with a moving assembly, and the crystal taking slots are provided with positioning structures; the positioning structure is set to comprise an opening state and a locking state: when the positioning structure is in the opening state, the single crystal is placed in the positioning structure, or the single crystal is taken out of the positioning structure; and when the positioning structure is in the locking state, the moving assembly moves to transfer the single crystal, and the single crystal transfer device has the beneficial effects that risk points and defects existing in an existing operation mode are overcome, and the transfer efficiency is high.

Description

Technical Field

[0001] The invention relates to the technical field of crystalline silicon processing, and in particular to a short single crystal transport device. Background Art

[0002] Crystal rods usually break during the growth process, causing the single crystal furnace to produce shorter crystal rods and more crystal rods than conventional crystal rods. However, due to the small length of these crystal rods, conventional crystal extraction equipment is difficult to adapt to, resulting in the widespread problem of short single crystals being stranded on site.

[0003] Usually, the short single crystal is placed in the crystal removal barrel first, and then the crystal rod is tied with steel wire after the temperature of the crystal rod drops. Then, the short single crystal is lifted to the transfer vehicle with the help of an overhead crane. This method has low operating efficiency and high safety risks, and needs to be improved and optimized. Summary of the invention

[0004] The purpose of the present invention is to provide a short single crystal transport device to solve the technical problems in the prior art that the short single crystal is first placed in a crystal barrel, the crystal rod is tied with steel wire after the temperature of the crystal rod drops, and then the short single crystal is lifted to the transport vehicle by a crane. This method has low operating efficiency and high safety risks. 。 The various technical effects that can be produced by the preferred technical solutions among the various technical solutions provided by the present invention are described in detail below.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] The present invention provides a short single crystal transport device, comprising a first transport mechanism, wherein:

[0007] The first transfer mechanism is provided with a base, a plurality of crystal retrieval slots are provided on the base, and a moving component is provided at the bottom of the base, wherein the crystal retrieval slot is provided with a positioning structure, and the positioning structure is configured to include an open state and a locked state:

[0008] When the positioning structure is in an open state, placing a single crystal in the positioning structure, or taking the single crystal out of the positioning structure;

[0009] When the positioning structure is in a locked state, the moving component moves to transport the single crystal.

[0010] Preferably, it further comprises a second transport mechanism, wherein the second transport mechanism comprises a moving mechanism, a rotating mechanism arranged on the moving mechanism, and a clamping claw arranged on the rotating mechanism, wherein:

[0011] The moving mechanism is used to drive the rotating mechanism and the clamping claw to move;

[0012] The clamp is used to remove the single crystal from the first transport mechanism;

[0013] The rotating mechanism is used to drive the clamping jaws to rotate, so as to rotate the single crystal to a horizontal state.

[0014] Preferably, the positioning structure comprises a first positioning member and a second positioning member of a semicircular ring structure, and a "T"-shaped clamping shaft, wherein:

[0015] One end of the first positioning member is connected to the second positioning member by a hinge, the other end of the first positioning member is provided with a first clamping seat, and the other end of the second positioning member is provided with a second clamping seat;

[0016] The clamping shaft comprises a shaft handle and a first shaft end and a second shaft end which are arranged at the end of the shaft handle and extend to two sides of the shaft handle respectively;

[0017] The first clamping seat is provided with a first hole structure and a second hole structure for the first shaft end and the second shaft end to pass through, and the second clamping seat is provided with a groove structure for accommodating the shaft handle.

[0018] Preferably, the first card seat comprises a first card seat member and a second card seat member symmetrically arranged in an "L" shape, the first card seat member comprises a first connecting portion and a second connecting portion, and the second card seat member comprises a third connecting portion and a fourth connecting portion, wherein:

[0019] The first connecting portion and the third connecting portion are both fixedly connected to the first positioning member;

[0020] The second connecting portion is arranged in parallel with the fourth connecting portion, and the second connecting portion and the fourth connecting portion are respectively provided with hole structures for the first shaft end and the second shaft end to pass through;

[0021] The bottom of the second clamping seat is fixedly connected to the second positioning member, and the top of the second clamping seat is provided with a groove structure for accommodating the shaft handle.

[0022] Preferably, the groove structure separates the top of the second card seat into a first card block and a second card block, wherein:

[0023] A movable connection baffle on the end surface of the first clamping block;

[0024] A stop structure is formed by extending along one side of the second clamping block toward the end surface protruding from the second clamping block, and the stop structure is located at a side close to the first clamping seat.

[0025] Preferably, the clamping shaft includes a handle, which is arranged at the other end of the shaft handle and is perpendicular to the shaft handle, and the two ends of the handle have different lengths from the center of the shaft handle.

[0026] Preferably, columnar spacers are disposed in both the first positioning member and the second positioning member, wherein:

[0027] The cushion blocks are evenly distributed along the circumference of the positioning structure.

[0028] Preferably, a supporting structure and a connecting structure are also provided on the base, wherein:

[0029] The supporting structure is fixedly connected to the base, and the positioning structure is connected to the supporting structure via the connecting structure;

[0030] Each of the crystal retrieval slots is provided with at least two groups of the positioning structures, and at least two groups of the positioning structures are arranged in parallel.

[0031] Preferably, a limiting groove is provided on the base, the limiting groove corresponds to the crystal taking slot position one by one, and the center line of the limiting groove is on the same straight line as the center line of the crystal taking slot position.

[0032] Preferably, it also includes a marking component, wherein:

[0033] The identification component is arranged on the base, and the identification component is arranged on one side of the crystal retrieval slot, and each of the crystal retrieval slots corresponds to an identification component.

[0034] A short single crystal transport device provided by the present invention ， By setting a positioning structure at the crystal retrieval slot, and the positioning structure can be opened and closed, when in use, align the crystal retrieval slot with the crystal retrieval position, adjust the positioning structure, put it in an open state, start crystal retrieval and lower the single crystal into the crystal retrieval slot, and then adjust the positioning structure to be in a locked state. The base is provided with multiple crystal retrieval slots, which are transported under the drive of the mobile assembly after being filled in sequence, and transported to the next process. The positioning structure is opened again, and the single crystal can be smoothly taken out. Since the crystal retrieval slot is set, the bundling of the crystal rod is avoided, which overcomes the risks and disadvantages of the existing operation mode. With the setting of multiple crystal retrieval slots, the transportation efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 It is a structural schematic diagram of an embodiment of a short single crystal transport device of the present invention;

[0037] Figure 2It is a structural schematic diagram of the positioning structure in the short single crystal transport device of the present invention;

[0038] Figure 3 It is a schematic diagram of the opening and closing of the positioning structure in the short single crystal transport device of the present invention.

[0039] In the figure: 1, base; 10, crystal retrieval slot; 11, limit slot;

[0040] 2. Mobile components;

[0041] 3. Positioning structure; 31. First positioning member; 32. Second positioning member; 33. Clamping shaft; 331. First shaft end; 332. Second shaft end; 333. Shaft handle; 334. Handle; 34. Hinge; 35. First clamping seat; 351. First clamping seat member; 352. Second clamping seat member; 36. Second clamping seat; 360. Groove structure; 361. First clamping block; 3611. Blocking piece; 362. Second clamping block; 3621. Stopping structure; 37. Pad;

[0042] 4. Single crystal;

[0043] 5. Gripping jaws;

[0044] 6. Support structure; 61. First support frame; 62. Second support frame; 63. Third support frame; 64. Support rod;

[0045] 7. Connection structure;

[0046] 8. Identification parts;

[0047] 9. Push and pull handle;

[0048] 100, first connection part; 200, second connection part; 300, third connection part; 400, fourth connection part. DETAILED DESCRIPTION

[0049] To make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention.

[0050] The present invention provides a short single crystal transport device, Figure 1 Schematic diagram of the structure of this embodiment. Figure 1 Shown includes a first transfer mechanism.

[0051] The first transfer mechanism is provided with a base 1, a plurality of crystal retrieval slots 10 are provided on the base 1, a moving component 2 is provided at the bottom of the base 1, and a positioning structure 3 is provided at the crystal retrieval slot 10, and the positioning structure 3 is provided to include an open state and a locked state:

[0052] When the positioning structure 3 is in an open state, the single crystal 4 is placed in the positioning structure 3, or the single crystal 4 is taken out of the positioning structure 3;

[0053] When the positioning structure 3 is in a locked state, the moving component 2 moves to transport the single crystal 4 .

[0054] By setting a positioning structure 3 at the crystal retrieval slot 10, and the positioning structure 3 can be opened and closed, when in use, the crystal retrieval slot 10 is aligned with the crystal retrieval position, the positioning structure 3 is adjusted to be in an open state, crystal retrieval is started, and the single crystal 4 is lowered into the crystal retrieval slot 10, and then the positioning structure 3 is adjusted to be in a locked state. The base 1 is provided with a plurality of crystal retrieval slots 10, which are transported under the drive of the moving component 2 after being filled in sequence, and transported to the next process, and the positioning structure 3 is opened again, and the single crystal 4 can be smoothly taken out. Since the crystal retrieval slot 10 is set, the bundling of the crystal rod is avoided, and the risk points and disadvantages of the existing operation mode are overcome. With the setting of a plurality of crystal retrieval slots 10, the transportation efficiency is high.

[0055] As an optional embodiment, a second transfer mechanism is further included, which includes a moving mechanism (not shown in the figure), a rotating mechanism (not shown in the figure) arranged on the moving mechanism, and a clamp 5 arranged on the rotating mechanism.

[0056] Among them, the moving mechanism is used to drive the rotating structure and the clamp 5 to move; the clamp 5 is used to remove the single crystal 4 from the first transport mechanism; the rotating mechanism is used to drive the clamp 5 to rotate, and is used to rotate the single crystal 4 to a horizontal state.

[0057] The moving mechanism and rotating mechanism used in this embodiment are existing technologies, and reference can be made to the existing robotic arm structures currently on the market. Of course, other components that can drive the clamp 5 to move and rotate can also be used, such as a linear module combined with a rotating component. No specific limitation is made here, and it is sufficient to ensure that it can drive the clamp 5 to move and rotate.

[0058] It is understandable that in actual production and use, the clamping jaws 5 in this embodiment adopt an adjustable structure to facilitate adapting to single crystals 4 of different diameters. By adopting the second transport mechanism, the short single crystal 4 is taken off from the first transport mechanism and rotated to a horizontal state and then placed on the processing equipment for processing, thus completing the operation.

[0059] As an optional implementation, Figure 2 is a schematic diagram of the positioning structure in this embodiment, Figure 3This is the schematic diagram of the opening and closing of the positioning structure, such as Figure 2 and Figure 3 As shown, the positioning structure 3 includes a first positioning member 31 and a second positioning member 32 of a semicircular ring structure, and a “T”-shaped clamping shaft 33 .

[0060] Among them, one end of the first positioning member 31 is connected to the second positioning member 32 through a hinge 34, the other end of the first positioning member 31 is provided with a first clamping seat 35, and the other end of the second positioning member 32 is provided with a second clamping seat 36; the clamping shaft 33 includes a shaft handle 333 and a first shaft end 331 and a second shaft end 332 which are arranged at the end of the shaft handle 333 and extend to both sides of the shaft handle 333 respectively.

[0061] The first clamping seat 35 is provided with a first hole structure and a second hole structure for the first shaft end 331 and the second shaft end 332 to pass through, and the second clamping seat 36 is provided with a groove structure 360 ​​for accommodating the shaft handle 333 .

[0062] Specifically, in this embodiment, the first card seat 35 includes a first card seat member 351 and a second card seat member 352 which are symmetrically arranged in an "L" shape. The first card seat member 351 includes a first connecting portion 100 and a second connecting portion 200, and the second card seat member 352 includes a third connecting portion 300 and a fourth connecting portion 400.

[0063] The first connection part 100 and the third connection part 300 are both fixedly connected to the first positioning member 31;

[0064] The second connection part 200 is arranged in parallel with the fourth connection part 400, and the second connection part 200 and the fourth connection part 400 are respectively provided with hole structures for the first shaft end 331 and the second shaft end 332 to pass through;

[0065] The bottom of the second clamping seat 36 is fixedly connected to the second positioning member 32 , and the top of the second clamping seat 36 is provided with a groove structure 360 ​​for accommodating the shaft handle 333 .

[0066] In this embodiment, the groove structure 360 ​​separates the top of the second clamping seat 36 into a first clamping block 361 and a second clamping block 362. The end surface of the first clamping block 361 is movably connected to a blocking piece 3611; a stopper structure 3621 is formed along one side of the second clamping block 362 and extends toward the end surface protruding from the second clamping block 362. The stopper structure 3621 is located on a side close to the first clamping seat 35 and is used to limit the rotation direction of the blocking piece 3611 to ensure that the clamping shaft 33 will not arbitrarily escape from the groove structure 360.

[0067] As an optional embodiment, the clamping shaft 33 includes a handle 334, which is arranged at the other end of the shaft handle 333, perpendicular to the shaft handle 333, and the two ends of the handle 334 have different lengths from the center of the shaft handle 333.

[0068] In this embodiment, the length of the handle 334 from the center of the shaft 333 is 1 / 5 of the total length of the handle 334, and the total length of the other side is 4 / 5 of the total length of the handle. Under the premise of ensuring stable connection, it is easy to operate manually, convenient and labor-saving to use. Preferably, the length of the hand-operated end of the handle 334 from the center of the shaft 333 is 80 mm.

[0069] As an optional embodiment, columnar cushion blocks 37 are disposed in both the first positioning member 31 and the second positioning member 32. Specifically, the cushion blocks 37 are evenly distributed along the circumference of the positioning structure 3.

[0070] In this embodiment, the first positioning member 31 and the second positioning member 32 of the positioning structure 3 are both bent and formed by a stainless steel material with a thickness of 5 mm and a width of 50 mm. Four columnar pads 37 are arranged in the positioning structure 3. The pads 37 are made of polytetrafluoroethylene material. When in use, the four pads 37 are distributed at 90°, and the crystal lines of the single crystal 4 are aligned with the center lines of the pads. The base 1 is also made of polytetrafluoroethylene material, so that the single crystal does not come into contact with the metal during the entire transportation process, thereby improving the quality of the single crystal.

[0071] As an optional embodiment, a support structure 6 and a connection structure 7 are further provided on the base 1, wherein the support structure 6 is fixedly connected to the base 1, and the positioning structure 3 is connected to the support structure 6 via the connection structure 7. At least two groups of positioning structures 3 are provided for each crystal retrieval slot 10, and at least two groups of positioning structures 3 are provided in parallel.

[0072] Specifically, the support structure 6 adopts a bracket, the height of the bracket is 800mm, and the connection structure 7 adopts a connecting plate to achieve better support and connection effects. In this embodiment, the support structure 6 adopts an inverted "U" structure, including a first support frame 61 and a second support frame 62 on both sides, and a third support frame connected to the top of the first support frame 61 and the second support frame 62. The bottom of the third support frame 63 is also provided with a plurality of support rods 64 whose two ends respectively connect the third support frame 63 and the base 1. The support rod 64, the first support frame 61, and the second support frame 62 have the same height, and the plurality of positioning structures 3 are respectively connected to the first support frame 61, the second support frame 62, and the support rod 64 through the connecting structure 7.

[0073] In the present embodiment, six crystal retrieval slots 10 are provided, and the six crystal retrieval slots 10 are evenly distributed on the base, arranged in three rows and two columns, and the positioning structures 3 in each row of crystal retrieval slots 10 are symmetrically distributed, which can effectively improve the transportation efficiency of the single crystal.

[0074] Each crystal retrieval slot 10 is provided with two sets of positioning structures 3 arranged in parallel on the upper and lower sides, and the spacing between the two positioning structures 30 is 300 mm. The lower positioning structure 3 is 150 mm away from the base 1, which is more suitable for short single crystals with a length range of 400 mm-1500 mm and a diameter range of 240 mm-350 mm.

[0075] In actual production and use, a push-pull handle 9 may also be connected to the support structure 6 and / or the base, so that the first transfer mechanism forms a transfer vehicle to facilitate push-pull operations during manual transfer.

[0076] As an optional implementation, a limiting groove 11 is provided on the base 1 , the limiting groove 11 corresponds to the crystal retrieval slot 10 one by one, and the center line of the limiting groove 11 is on the same straight line as the center line of the crystal retrieval slot 10 .

[0077] By arranging upper and lower layers of positioning structures 3 at the crystal retrieval slot 10 and cooperating with the limiting grooves 11 on the base 1, the single crystals 4 of different lengths can be retrieved and fixed.

[0078] When in use, if the single crystal 4 is relatively short, only the positioning structure 3 of the lower layer can be used for fixing, and the limiting groove 11 can be used to limit the position, so that the single crystal 4 can be stably placed in the crystal retrieval slot 10; if the single crystal 4 is relatively long, only the positioning structure 3 of the upper layer can be used for fixing, and the limiting groove 11 can be used to limit the position, so that the single crystal 4 can be stably placed in the crystal retrieval slot 10. Of course, in actual production and use, for a relatively long single crystal 4, in order to improve its stability in the crystal retrieval slot 10, the positioning structures 3 of the upper and lower layers can also be used at the same time for effective fixing.

[0079] As an optional implementation, it also includes an identification component 8, which is arranged on the base 1, and the identification component 8 is arranged on one side of the crystal retrieval slot 10, and each crystal retrieval slot 10 corresponds to an identification component 8.

[0080] In this embodiment, the identification component 8 is a square or other shaped identification plate, which is used to identify the furnace number or other single crystal information corresponding to the single crystal 4, so as to facilitate the information flow of the single crystal 4.

[0081] In actual production and use, the identification component 8 can be in the form of a plate fixedly installed on the base 1 for identification, or it can be in the form of a marking area on the base 1, as long as it is convenient for identification and viewing.

[0082] The working process of this embodiment includes:

[0083] S1: Selecting a crystal retrieval slot 10, including selecting a crystal retrieval slot 10 to be placed, and aligning the crystal retrieval slot 10 with a crystal retrieval position;

[0084] S2: Open the positioning structure 3, including rotating the blocking piece 3611 clockwise to separate the card shaft 33 from the groove structure 360 ​​of the second card seat 36, and then rotating the blocking piece 3611 counterclockwise back to the original position;

[0085] S3: Crystal retrieval, crystal retrieval starts, and the single crystal 4 is lowered to the corresponding crystal retrieval slot 10;

[0086] S4: locking the positioning structure 3, including rotating the blocking piece 3611 clockwise to assemble the card shaft 33 into the groove structure 360 ​​of the second card seat 36, and then rotating the blocking piece 3611 counterclockwise back to the original position;

[0087] S5, repeat the above steps S1-S4, fill the crystal retrieval slots 10 in sequence, move the first transfer mechanism to the second transfer mechanism through the moving component 2, move the clamp 5 to the short single crystal 4 that needs to be grasped, clamp the short single crystal 4 and open the positioning structure 3 corresponding to the crystal retrieval slot 10, then move the short single crystal 4 to the processing station and rotate it to a horizontal state, place the short single crystal 4 at the processing station through the clamp 5 to start processing.

[0088] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A short single crystal transport device, characterized in that: It includes a first transfer mechanism, wherein: The first transfer mechanism is provided with a base, a plurality of crystal retrieval slots are provided on the base, and a moving component is provided at the bottom of the base, wherein the crystal retrieval slot is provided with a positioning structure, and the positioning structure is configured to include an open state and a locked state: When the positioning structure is in an open state, placing a single crystal in the positioning structure, or taking the single crystal out of the positioning structure; When the positioning structure is in a locked state, the moving component moves to transport the single crystal.

2. A short single crystal transport device according to claim 1, characterized in that: The invention also includes a second transport mechanism, wherein the second transport mechanism includes a moving mechanism, a rotating mechanism disposed on the moving mechanism, and a clamping claw disposed on the rotating mechanism, wherein: The moving mechanism is used to drive the rotating mechanism and the clamping claw to move; The clamp is used to remove the single crystal from the first transport mechanism; The rotating mechanism is used to drive the clamping jaws to rotate, so as to rotate the single crystal to a horizontal state.

3. A short single crystal transport device according to claim 1 or 2, characterized in that: The positioning structure includes a first positioning member and a second positioning member of a semicircular ring structure, and a "T"-shaped clamping shaft, wherein: One end of the first positioning member is connected to the second positioning member by a hinge, the other end of the first positioning member is provided with a first clamping seat, and the other end of the second positioning member is provided with a second clamping seat; The clamping shaft comprises a shaft handle and a first shaft end and a second shaft end which are arranged at the end of the shaft handle and extend to two sides of the shaft handle respectively; The first clamping seat is provided with a first hole structure and a second hole structure for the first shaft end and the second shaft end to pass through, and the second clamping seat is provided with a groove structure for accommodating the shaft handle.

4. A short single crystal transport device according to claim 3, characterized in that: The first card seat comprises a first card seat member and a second card seat member which are symmetrically arranged in an "L" shape, the first card seat member comprises a first connecting portion and a second connecting portion, and the second card seat member comprises a third connecting portion and a fourth connecting portion, wherein: The first connecting portion and the third connecting portion are both fixedly connected to the first positioning member; The second connecting portion is arranged in parallel with the fourth connecting portion, and the second connecting portion and the fourth connecting portion are respectively provided with hole structures for the first shaft end and the second shaft end to pass through; The bottom of the second clamping seat is fixedly connected to the second positioning member, and the top of the second clamping seat is provided with a groove structure for accommodating the shaft handle.

5. A short single crystal transport device according to claim 4, characterized in that: The groove structure separates the top of the second card seat into a first card block and a second card block, wherein: A movable connection baffle on the end surface of the first clamping block; A stop structure is formed by extending along one side of the second clamping block toward the end surface protruding from the second clamping block, and the stop structure is located at a side close to the first clamping seat.

6. A short single crystal transport device according to claim 5, characterized in that: The clamping shaft comprises a handle, which is arranged at the other end of the shaft handle and is perpendicular to the shaft handle, and the two ends of the handle have different lengths from the center of the shaft handle.

7. The short single crystal transport device according to claim 3, characterized in that: Columnar pads are disposed in the first positioning member and the second positioning member, wherein: The cushion blocks are evenly distributed along the circumference of the positioning structure.

8. A short single crystal transport device according to claim 1 or 2, characterized in that: The base is also provided with a supporting structure and a connecting structure, wherein: The supporting structure is fixedly connected to the base, and the positioning structure is connected to the supporting structure via the connecting structure; Each of the crystal retrieval slots is provided with at least two groups of the positioning structures, and at least two groups of the positioning structures are arranged in parallel.

9. A short single crystal transport device according to claim 1 or 2, characterized in that: The base is provided with a limiting groove, the limiting groove corresponds to the crystal taking slot position one by one, and the center line of the limiting groove is on the same straight line as the center line of the crystal taking slot position.

10. A short single crystal transport device according to claim 1 or 2, characterized in that: Also included is a logo component, wherein: The identification component is arranged on the base, and the identification component is arranged on one side of the crystal retrieval slot, and each of the crystal retrieval slots corresponds to an identification component.

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