Fluid supply mechanism and fluid supply method

Abstract

The present invention provides a fluid supply mechanism (100) that repeats supply and stop of a fluid to a chamber (CH), the fluid supply mechanism (100) comprising: a fluid supply channel (L1) that communicates with the chamber (100); a container (T) which is provided in the fluid supply channel (L1) and into which the fluid is introduced; and a downstream-side valve (Vd) provided downstream of the container (T) in the fluid supply passage, the container (T) changing the internal volume by deformation.

Description

Technical Field

[0001] The invention relates to a fluid supply mechanism and a fluid supply method. Background Art

[0002] Conventionally, as one of the film forming technologies in semiconductor manufacturing processes, there is a technology called ALD (Atomic Layer Deposition) method in which a material gas is supplied in a pulsed manner. By using this technology, a thin film in atomic units can be formed on a substrate.

[0003] In the ALD method, a container is filled with a material gas, and a secondary-side valve provided on the downstream side of the container is opened and closed at a high speed, thereby repeatedly supplying and stopping the material gas.

[0004] In recent years, for example, due to the increase in film formation area, it is required to supply a large flow rate of material gas in a pulsed manner. However, in the conventional structure, the supply amount of material gas depends on the Cv value of the secondary side valve, and there is a limit to increasing the flow rate.

[0005] In addition, such a demand for increasing the flow rate of the material gas is not limited to the ALD method, but is also common when the material is continuously supplied to the chamber.

[0006] To address this problem, the technology shown in Patent Document 1 provides a piston in a container. After the material gas is introduced into the container, the piston is moved to compress the material gas in the container. In this state, the secondary side valve is opened, thereby achieving a large flow rate of the supplied material gas.

[0007] However, if such a structure using a piston is adopted, there is a concern that particles may be generated in the container, and it is difficult to adopt it in a semiconductor manufacturing process in reality.

[0008] Patent Document 1: Japanese Patent Application Publication No. 2010-84156 Summary of the invention

[0009] Therefore, the present invention has been made to solve the above-mentioned problems, and a main object of the present invention is to supply a large flow rate of fluid while suppressing the generation of particles.

[0010] The fluid supply mechanism of the present invention repeatedly supplies and stops the fluid to the chamber, and includes: a fluid supply channel connected to the chamber; a container, which is arranged in the fluid supply channel and into which the fluid is introduced; and a downstream side valve, which is arranged on the downstream side of the container in the fluid supply channel, and the container changes its internal volume by deformation.

[0011] According to the fluid supply mechanism constructed in this way, by introducing fluid into a container in a state of large internal volume, the container is deformed in such a way that the internal volume of the container becomes smaller from this state, thereby supplying a large flow of fluid to the chamber. Moreover, since the container itself is deformed, the generation of particles can also be suppressed.

[0012] As a more specific embodiment, the following method can be listed: the container is deformed between a first form in which the internal volume is a first volume and a second form in which the internal volume is a second volume smaller than the first volume, and the fluid is introduced into the container when the downstream side valve is closed and the container is in the first form, and the fluid is supplied from the container to the chamber when the downstream side valve is opened and the container is in the second form.

[0013] According to the above embodiment, when the container is deformed from the first form to the second form, there is a concern that the fluid in the container may flow back toward the upstream side. Therefore, it is preferred that it also includes an upstream side valve, which is arranged on the upstream side of the container in the fluid supply channel, and when the upstream side valve is opened, the fluid is introduced into the container in the first form, and when the upstream side valve is closed, the container is deformed from the first form to the second form. According to this structure, since the container is deformed in a state where the upstream valve is closed, it is possible to prevent the backflow of the fluid during the deformation.

[0014] Preferably, the container is repeatedly deformed from one of the first and second forms to the other and from the other to one at predetermined deformation timings, and the downstream valve is repeatedly opened and closed at predetermined opening and closing timings. As described above, as long as the deformation of the container or the opening and closing of the downstream valve is controlled in terms of time, the present invention can be applied without significantly changing the existing procedure.

[0015] Preferably, the device comprises: a pressure sensor for detecting the pressure of the container; and a valve control unit for closing the upstream valve when the detection value of the pressure sensor reaches a threshold value. If the upstream valve is closed at such a timing, the container is subsequently deformed from the first state to the second state, so that the standby state before the fluid is supplied to the chamber can be maintained in a substantially same state every time.

[0016] If the internal volume of the container is known, the amount of fluid supplied can be determined by monitoring the pressure of the container. Therefore, it is preferable to include: a pressure sensor for detecting the pressure of the container; and a valve control unit for controlling the opening degree of the downstream valve based on the detection value of the pressure sensor. With such a configuration, the valve opening can be controlled based on the supply amount obtained from the detection value of the pressure sensor, and for example, the supply amount can be maintained constant or gradually increased.

[0017] Preferably, the plurality of fluid supply channels are connected in parallel with each other, and the containers are respectively arranged in the plurality of fluid supply channels. If this structure is used, for example, by introducing fluid into another container in advance while the fluid is being supplied from one container to the chamber, the fluid can be supplied to the chamber from the latter container after the supply from the former container is completed, and the supply and stop of the fluid to the chamber can be repeated at various times.

[0018] If it takes a long time for the container to return to its original shape after being deformed, it will be difficult to quickly repeat the deformation of the container. Therefore, it is preferred that the device further includes: a driving source, which outputs a driving force that causes the container to deform from the first form to the second form, or from the second form to the first form; and a force-applying member, which applies a force to the container in the opposite direction to the driving force, thereby applying force to the container in such a manner that the container changes from the second form to the first form, or from the first form to the second form. According to this structure, after the container is deformed by the driving force, the container can be restored by the biasing member, so that the container can be deformed repeatedly and rapidly.

[0019] As another embodiment for rapidly and repeatedly deforming the container, the following embodiment can be cited: further comprising a driving source that outputs a driving force for deforming the container from the first form to the second form, and outputs a driving force for deforming the container from the second form to the first form.

[0020] In addition, the fluid supply method of the present invention uses a fluid supply mechanism that repeatedly supplies and stops the fluid to the chamber, wherein the fluid supply mechanism includes: a fluid supply channel connected to the chamber; a container arranged in the fluid supply channel and into which the fluid is introduced; and a downstream side valve arranged on the downstream side of the container in the supply channel, which changes the internal volume by deforming the container. This fluid supply method can produce the same effects as those of the above-mentioned fluid supply mechanism.

[0021] Furthermore, the fluid supply mechanism of the present invention includes: a plurality of fluid supply channels, which are connected to the chamber and connected in parallel with each other; containers, which are respectively arranged in the plurality of fluid supply channels and into which the fluid is introduced; and downstream side valves, which are respectively arranged on the downstream side of the containers in the plurality of supply channels, and the containers change their internal volumes by deformation. The fluid supply mechanism thus constructed is not limited to a structure that repeatedly supplies and stops the fluid to the chamber, but can also supply a large flow rate of fluid while suppressing the generation of particles in a structure that continuously supplies the fluid to the chamber.

[0022] According to the present invention described above, a large flow rate of fluid can be supplied while suppressing the generation of particles. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram showing the structure of a fluid supply mechanism according to one embodiment of the present invention. Figure 2 It is a diagram showing the on-off cycle of the downstream side valve in the same embodiment. Figure 3 The diagrams are schematic diagrams showing a first form and a second form of a container according to the same embodiment. Figure 4 This is a schematic diagram showing a movable portion of a container according to the same embodiment. Figure 5 It is a schematic diagram showing a biasing member according to the same embodiment. Figure 6 It is a functional block diagram showing the functions of the control device according to the same embodiment. Figure 7 It is a schematic diagram showing the operation of the fluid supply mechanism according to the same embodiment. Figure 8 This is a flowchart showing the operation of the control device according to the same embodiment. Fig. 9 It is a schematic diagram showing the structure of a movable part according to another embodiment. Fig.10 It is a schematic diagram showing the structure of a fluid supply mechanism according to another embodiment. Fig.11 It is a schematic diagram showing the structure of a fluid supply mechanism according to another embodiment. DETAILED DESCRIPTION

[0024] Hereinafter, a fluid supply mechanism according to an embodiment of the present invention will be described with reference to the drawings.

[0025] <<Device Structure>> The fluid supply mechanism is used, for example, in an atomic layer deposition apparatus (hereinafter also referred to as an ALD apparatus), and supplies the fluid to a chamber as a supply target in a pulsed (intermittent) manner. More specifically, the ALD apparatus is configured to repeatedly supply and stop the fluid to the chamber, and sequentially introduce at least two reactive precursors to at least one substrate accommodated in the chamber.

[0026] In addition, the fluid supplied to the chamber is, for example, a material gas obtained by vaporizing a liquid material. The concept of material gas includes gases required for the process in the chamber, such as component gases for film formation and etching gases. In addition, the substance supplied to the chamber by the fluid supply mechanism may be various gases or liquids, such as the liquid material itself, the material gas obtained by vaporizing the liquid material, and the mixed gas obtained by mixing the material gas with a carrier gas.

[0027] Specifically, if Figure 1 As shown, the fluid supply mechanism 100 includes at least a fluid supply channel L1 communicating with the chamber CH, a container T disposed in the fluid supply channel L1, and a downstream valve Vd disposed on the downstream side of the container T in the fluid supply channel L1.

[0028] The upstream end of the fluid supply channel L1 is connected to, for example, a vaporizer (not shown) for vaporizing a liquid material, and the downstream end is connected to the chamber CH. In addition, the upstream end of the fluid supply channel L1 is not necessarily connected to the vaporizer, and may be connected to various fluid sources. In addition, a mass flow controller (not shown) may be provided on the upstream side of the container T in the fluid supply channel L1.

[0029] The container T functions as a storage unit into which a fluid is introduced and stores the fluid, and the internal volume is known. The container T of this embodiment is provided with a pressure sensor P for detecting the internal pressure. In addition, since the container T and its surroundings have characteristic points, the detailed structure will be described later.

[0030] The downstream valve Vd is provided between the container T and the chamber CH, and is used to supply the fluid from the container T to the chamber CH and stop the supply. That is, the fluid is supplied from the container T to the chamber CH by opening the downstream valve Vd, and the supply of the fluid from the container T to the chamber CH is stopped by closing the downstream valve Vd.

[0031] like Figure 2 As shown, the downstream valve Vd of this embodiment is repeatedly opened or fully closed by pulse control of repeatedly turning on and off every predetermined period. The pulse width during the on period is set to, for example, 10 msec level, and the overall period is set to, for example, 100 msec level. However, the pulse width is not limited to this and can be changed appropriately.

[0032] The downstream valve Vd only needs to be opened and closed at high speed, and can be, for example, a pneumatic valve with improved responsiveness for the ALD process, a piezoelectric valve using a piezoelectric actuator, or a solenoid valve. Various types of valves can be used.

[0033] like Figure 1 As shown, the fluid supply mechanism 100 of the present embodiment further includes an upstream valve Vu provided on the upstream side of the container T in the fluid supply passage L1.

[0034] The upstream valve Vu is used to introduce and stop the fluid into the container T. That is, the fluid is introduced into the container T by opening the upstream valve Vu, and the introduction of the fluid into the container T is stopped by closing the upstream valve Vu.

[0035] The upstream valve Vu of this embodiment is similar to the downstream valve Vd, and is repeatedly opened or fully closed by pulse control of repeatedly turning on and off every predetermined period. The pulse width during the on period is set to, for example, 10 msec, and the overall period is set to, for example, 100 msec. However, the pulse width is not limited to this and can be changed appropriately.

[0036] The upstream valve Vu only needs to be opened and closed at high speed, and may be, for example, a pneumatic valve with improved responsiveness for use in the ALD process, a piezoelectric valve using a piezoelectric actuator, or an electromagnetic valve. Various types of valves may be used.

[0037] Furthermore, the fluid supply mechanism 100 is characterized in that the container T changes its internal volume by deformation.

[0038] The internal volume of container T can be changed by its own deformation, such as Figure 3 As shown, the internal volume is deformed between a first state X in which the internal volume is a first volume and a second state Y in which the internal volume is a second volume smaller than the first volume. In addition, the first volume and the second volume are known.

[0039] like Figure 3 and Figure 4 As shown, the container T of this embodiment is, for example, a cylindrical shape that can be extended and retracted in the axial direction, and has a movable portion T1 that can partially or completely extend and retract in the axial direction. The movable portion T1 is formed by, for example, a bellows in this embodiment. Figure 4 In the figure, for the convenience of explanation, one opening of the container T is opened, but the opening is closed during use.

[0040] like Figure 3As shown, the fluid supply mechanism 100 of this embodiment includes a driving source 10, and the driving source 10 outputs a driving force that causes the container T to deform from the first form X to the second form Y or from the second form Y to the first form X. In addition, the power source of this embodiment is used to cause the container T to deform from the first form X to the second form Y.

[0041] The driving source 10 outputs, for example, a mechanical, electrical, or fluid driving force, and the driving force acts on, for example, an end surface of the container T that is orthogonal to the axial direction and to which a pipe is not connected. Specifically, the driving source may be a variety of driving sources such as a motor, a pneumatic valve, a solenoid, or a piezoelectric element.

[0042] Furthermore, as the fluid supply mechanism 100, Figure 5 As shown, a force applying member 20 may be included, and the force applying member 20 applies a force in the opposite direction to the driving force to the container T, and applies a force to the container T in a manner of changing from the second form Y to the first form X, or in a manner of changing from the first form X to the second form Y. In addition, the force applying member 20 of this embodiment applies a force to the container T in a manner of changing from the second form Y to the first form X.

[0043] The force applying member 20 applies force to the restoring force of the container T itself that attempts to return the container T deformed from the first form X to the second form Y by the driving force from the second form Y to the first form X. Specifically, it is one or more elastic bodies provided outside the container T. The elastic body of this embodiment is provided so that when the container T is in the first form X, for example, it has a natural length, and when the container T is in the second form Y, it is shortened from the natural length. Alternatively, the elastic body may be provided so that when the container T is in the second form Y, for example, it has a natural length, and when the container T is in the first form X, it is extended from the natural length. In this case, the elastic body applies force to the container T in such a manner that the container T changes from the first form X to the second form Y.

[0044] Specific examples of the elastic body of the urging member 20 include: Figure 5 The spring shown in (a) wound around the outer peripheral surface of the container T, or Figure 5 (b) shows a spring or the like wound around the shaft member 30 which is attached to the container T and expands and contracts together with the container T.

[0045] In this structure, the fluid supply mechanism 100 is as follows Figure 6 As shown, the control device C includes a memory and a CPU (Central Processing Unit), etc. The control device C functions as a valve control unit C1 and a container control unit C2 by making the CPU and its peripheral devices cooperate according to a program stored in the memory.

[0046] Below, combined with the description of the functions of each part, refer to Figure 7 Schematic diagram and Figure 8 The operation of the control device C is explained in the flowchart.

[0047] <<Action Description>> First, before the process starts, the upstream valve Vu and the downstream valve Vd are closed, and the container T is in the first state X.

[0048] Then, when the process starts, the valve control unit C1 opens the upstream valve Vu (S1). At this time, the valve control unit C1 keeps the downstream valve Vd closed, and the container control unit C2 keeps the container T in the first state X. Figure 7 As shown in (a) of FIG. 1 , the fluid is introduced into the container T of the first form X in a state where the upstream valve Vu is opened and the downstream valve Vd is closed.

[0049] Next, the valve control unit C1 closes the upstream valve Vu, and the container control unit C2 controls the driving source 10 to transform the container T from the first form X to the second form Y (S2). At this time, the valve control unit C1 maintains the downstream valve Vd closed. Figure 7 As shown in (b), the fluid filled into the container T is compressed.

[0050] In addition, in S2, in the present embodiment, after the upstream valve Vu is closed, the container T is transformed from the first form X to the second form Y. In other words, in the state where the upstream valve Vu is closed, the container T is transformed from the first form X to the second form Y. However, the upstream valve Vu may be closed in the middle of the transformation of the container T from the first form X to the second form Y, and further, the upstream valve Vu may be closed immediately after the transformation of the container T from the first form X to the second form Y.

[0051] Next, the valve control unit C1 opens the downstream valve Vd (S3). At this time, the valve control unit C1 maintains the upstream valve Vu closed, and the container control unit C2 maintains the container T in the second state Y. Figure 7 As shown in (c) of FIG. 1 , when the downstream valve Vd is opened and the container T is in the second state Y, the fluid is supplied from the container T to the chamber CH.

[0052] In addition, in S2 and S3, in the present embodiment, the downstream valve Vd is opened after the container T is deformed from the first form X to the second form Y, but the downstream valve Vd may be opened in the middle of the container T being deformed from the first form X to the second form Y, or the container T may be quickly deformed from the first form X to the second form Y after the downstream valve Vd is opened. As an embodiment in which the downstream valve Vd is opened in the middle of the container T being deformed from the first form X to the second form Y, the following embodiment can be cited: when the detection value of the pressure sensor P provided in the container T reaches a threshold value, the downstream valve Vd is opened.

[0053] Then, the valve control unit C1 closes the downstream valve Vd, and the container control unit C2 turns off the driving force generated by the driving source 10, so that the container T is deformed from the second state Y to the first state X by its own restoring force and / or the force of the urging member 20 (S4).

[0054] In addition, in S4, in the present embodiment, after the downstream valve Vd is closed, the container T is deformed from the second form Y to the first form X. In other words, in a state where the downstream valve Vd is closed, the container T is deformed from the second form Y to the first form X. However, the downstream valve Vd may be closed in the middle of the deformation of the container T from the second form Y to the first form X, and further, the downstream valve Vd may be closed after the deformation of the container T from the second form Y to the first form X.

[0055] Then, the valve control unit C1 returns to the operation of S1, opens the upstream valve Vu, and returns to Figure 7 (a) state.

[0056] By repeating the operations of S1 to S4 in this manner, the supply of the fluid to the chamber CH and the stop of the supply are repeated alternately.

[0057] Here, if Figure 6 As shown, the control device C of this embodiment includes a timer C3, and the valve control unit C1 obtains a signal from the timer C3 to open and close the downstream valve Vd and the upstream valve Vu according to their respective predetermined cycles. That is, the on-period during which the downstream valve Vd is opened and the off-period during which it is closed are repeated in a predetermined cycle, and the on-period during which the upstream valve Vu is opened and the off-period during which it is closed are repeated in a predetermined cycle. In addition, the length of the on-period and the length of the off-period may be the same or different, and one or both of them may be made variable. In addition, the cycle of opening and closing the upstream valve Vu and the cycle of opening and closing the downstream valve Vd may be the same or different.

[0058] Thus, the downstream valve Vd is repeatedly opened and closed at the predetermined first opening and closing timing, and the upstream valve Vu is repeatedly opened and closed at the predetermined second opening and closing timing.

[0059] In addition, the container control unit C2 of the present embodiment obtains a signal from the timer C3, and turns the drive source 10 on and off at predetermined intervals. That is, the on period during which the drive source 10 outputs the driving force and the off period during which the output is stopped are repeated at predetermined intervals. In addition, the length of the on period and the length of the off period may be the same or different, and one or both of them may be made variable. In addition, the on-off cycle of the drive source 10 may be the same as or different from the on-off cycle of the downstream valve Vd or the on-off cycle of the upstream valve Vu.

[0060] Thus, the container T is repeatedly deformed from one of the first form X and the second form Y to the other, and deformed from the other to one of the first form X and the second form Y at predetermined deformation timings.

[0061] <<Effects of the present embodiment>> According to the fluid supply mechanism 100 constructed in this way, since the fluid is introduced into the container T of the first form X with a large internal volume, the container T is deformed from this state into the second form Y with a small internal volume, and the fluid is supplied from the container T to the chamber CH, it is possible to supply a large flow rate of fluid to the chamber CH, and further, since the container T itself is deformed, the generation of particles can also be suppressed.

[0062] Furthermore, since the container T is deformed from the first state X to the second state Y in the state where the upstream valve Vu is closed, the backflow of the fluid during the deformation can be prevented.

[0063] Furthermore, since the downstream valve Vd is repeatedly opened and closed at predetermined opening and closing timings, the present invention can be applied without significantly changing the existing procedure.

[0064] Furthermore, since the urging member 20 urges the restoring force of the container T itself, after the container T is deformed by the driving force, the deformation of the container T can be repeated rapidly.

[0065] <<Other Implementation Methods>> In addition, the present invention is not limited to the above-described embodiments.

[0066] For example, in the above-described embodiment, an upstream valve Vu is provided upstream of the container T. However, the upstream valve Vu may not be provided if the influence of the backflow from the container T is small. In addition, the upstream valve Vu may be a check valve that can introduce fluid into the container T and prevent the fluid from flowing back from the container T.

[0067] In the above embodiment, the valve control unit C1 opens and closes the upstream valve Vu at predetermined opening and closing timings, but may be configured to close the upstream valve Vu when the detection value of the pressure sensor P provided in the container T reaches a threshold value. According to this structure, by changing the container T from the first state to the second state after closing the upstream valve Vu, the standby state before supplying the fluid to the chamber CH can be maintained in a substantially same state every time.

[0068] Furthermore, the valve control unit C1 opens and closes the downstream valve Vd at predetermined opening and closing timings in the above embodiment, but may be configured to close the downstream valve Vd when the detection value of the pressure sensor P drops to a predetermined pressure value. In addition, even in the case where the downstream side valve Vd is opened and closed based on the detection value of the pressure sensor P, as long as the opening degree of the downstream side valve Vd is controlled, the supply time of the fluid to the chamber CH (i.e., the time for opening the downstream side valve Vd) can be adjusted to the desired time, and the supply of the fluid to the chamber CH and the stop of the supply can be repeated at a desired cycle.

[0069] In addition, the container control unit C2 repeatedly deforms the container T at a predetermined deformation timing in the embodiment, but can also be configured such that, during the action of deforming the container T so that the internal volume changes from a first volume to a second volume, when the detection value of the pressure sensor P reaches a threshold value in the middle of the action, the container T is deemed to have reached the second volume, and the driving force applied from the driving source 10 to the container T is maintained (adjusted) to maintain the pressure in the container T at this time. By such control, it is possible to suppress variations in the pressure in the container T before the fluid is supplied to the chamber CH, and it is possible to suppress variations in the amount of fluid supplied to the chamber CH.

[0070] Furthermore, the pressure sensor P can also be used to confirm that the container T has been deformed from the first form X to the second form Y. That is, the container control unit C2 can also be configured to determine that the container T has been deformed to the second form Y when the detection value of the pressure sensor P reaches the target value, and maintain (adjust) the driving force applied to the container T from the driving source 10 to maintain the container T in the second form Y. In addition, if the driving source 10 causes the container T to be deformed from the second form Y to the first form X, the pressure sensor P may be used to confirm that the container T has been deformed from the second form Y to the first form X. That is, the container control unit C2 may be configured to determine that the container T has been deformed to the first form X when the detection value of the pressure sensor P reaches the target value, and maintain (adjust) the driving force applied from the driving source 10 to the container T so as to maintain the container T in the first form X.

[0071] If the internal volume of the container T is known, the supply amount of the fluid can be obtained by monitoring the pressure of the container T. Therefore, the valve control unit C1 may control the opening degree of the downstream valve Vd based on the detection value of the pressure sensor P provided in the tank T. As a specific implementation of the valve control unit C1, the following method can be listed: based on the time rate of change of the internal volume of the container T and the detection value of the pressure sensor P, the actual supply amount supplied from the container T to the chamber CH is calculated, and the opening of the downstream side valve Vd is adjusted in such a way that the actual supply amount is close to a predetermined target supply amount. With this structure, since the valve opening is controlled based on the detection value of the pressure sensor P, the supply amount can be maintained constant or gradually increased by setting the target flow rate to a fixed flow rate or a gradually increasing flow rate, for example.

[0072] Furthermore, the valve control unit may control the downstream valve Vd based on the pressure or concentration by pre-monitoring the pressure or concentration in the chamber CH. As a specific embodiment of this case, the downstream valve Vd may be opened when the pressure or concentration exceeds a predetermined threshold.

[0073] As the movable part T1 of the container T, a bellows is used in the above embodiment, but Fig. 9 As shown, a member having elasticity such as a diaphragm may be used. As an embodiment in this case, a mode in which a part of the wall surface of the container T is constituted by the diaphragm can be cited.

[0074] In the above embodiment, the driving source 10 outputs a driving force for deforming the container T from the first form X to the second form Y, or outputs a driving force for deforming the container T from the second form Y to the first form X, but may output a driving force for deforming the container T from the first form X to the second form Y, and output a driving force for deforming the container T from the second form Y to the first form X. In this case, the force applying member 20 may apply a force to the container T in such a manner as to change from the first form X to the second form Y, or in such a manner as to change from the second form Y to the first form X, or the force applying member 20 may not be provided.

[0075] In the above-described embodiment, one or more springs are used as an example of the urging member 20 . However, in addition to the spring, an elastic body such as a diaphragm or rubber may be used.

[0076] Furthermore, the fluid supply mechanism 100 of the present invention may also be Fig.10 As shown, a plurality of fluid supply channels L1 are connected in parallel with each other, and containers T are respectively disposed in the plurality of fluid supply channels L1. If this structure is used, for example, by introducing fluid into another container T in advance while the fluid is being supplied from a certain container T to the chamber CH, the fluid can be supplied to the chamber CH from the latter container T after the supply from the former container T is completed, and the supply and stop of the fluid to the chamber CH can be repeated at various timings.

[0077] Furthermore, the fluid supply mechanism 100 of the present invention is not limited to being used in an ALD apparatus and repeatedly supplies and stops the fluid to the chamber CH. As the fluid supply mechanism 100, Fig.11 As shown, the following mechanisms can be listed, which include: a plurality of fluid supply channels L1, which are connected to the chamber CH and connected in parallel with each other; containers T, which are respectively arranged in the plurality of fluid supply channels L1 and into which fluid is introduced; and a downstream side valve Vd, which is arranged on the downstream side of the container T in each of the plurality of supply channels, and the container T changes its internal volume by deformation. With this structure, the downstream valve Vd does not need to be opened and closed at high speed, and a cheaper on-off valve can be used. According to the fluid supply mechanism 100 configured in this manner, even in a configuration in which the fluid is continuously supplied to the chamber CH, it is possible to supply the fluid at a large flow rate while suppressing the generation of particles.

[0078] Furthermore, various embodiments may be modified or combined as long as they do not depart from the spirit of the present invention. Industrial Applicability

[0079] According to the present invention, a large flow rate of fluid can be supplied while suppressing the generation of particles. Description of Reference Numerals

[0080] 100: Fluid supply mechanism CH: Chamber L1: Fluid supply channel T: container Vd: Downstream valve Vu: Upstream valve P: Pressure sensor X: First Form Y: Second Form T1: movable part 10: Driving source 20: Force-applying member 30: Shaft component C: Control device C1: Valve control unit C2: Container Control Unit C3: Timer.

Claims

1. A fluid supply mechanism that repeatedly supplies and stops the fluid to a chamber, comprising: a fluid supply channel, communicating with the chamber; a container, disposed in the fluid supply channel and into which the fluid is introduced; as well as a downstream valve disposed on the downstream side of the container in the fluid supply passage, The container changes its internal volume by deformation.

2. The fluid supply mechanism according to claim 1, wherein: The container is deformed between a first state in which the internal volume is a first volume and a second state in which the internal volume is a second volume smaller than the first volume. In a state where the downstream valve is closed and the container is in the first state, the fluid is introduced into the container, The fluid is supplied from the container to the chamber in a state where the downstream valve is opened and the container is in the second state.

3. The fluid supply mechanism according to claim 2, wherein: The device further comprises an upstream valve, wherein the upstream valve is disposed on the upstream side of the container in the fluid supply channel. In a state where the upstream valve is opened, the fluid is introduced into the container of the first form, In a state where the upstream valve is closed, the container is deformed from the first state to the second state.

4. The fluid supply mechanism according to any one of claims 1 to 3, wherein: The container is repeatedly deformed from one of the first and second forms toward the other and from the other toward one at predetermined deformation timings. The downstream side valve is repeatedly opened and closed at predetermined opening and closing timings.

5. The fluid supply mechanism according to claim 3, comprising: A pressure sensor for detecting the pressure of the container; as well as The valve control unit closes the upstream valve when the detection value of the pressure sensor reaches a threshold value.

6. The fluid supply mechanism according to any one of claims 1 to 4, comprising: A pressure sensor for detecting the pressure of the container; as well as The valve control unit controls the opening degree of the downstream valve based on the detection value of the pressure sensor.

7. The fluid supply mechanism according to any one of claims 1 to 6, wherein: The plurality of fluid supply channels are connected in parallel with each other, The containers are respectively arranged in the plurality of fluid supply channels.

8. The fluid supply mechanism according to any one of claims 1 to 7, further comprising: a driving source that outputs a driving force that causes the container to be transformed from the first form to the second form, or from the second form to the first form; as well as The urging member applies a force in a direction opposite to the driving force to the container, and urges the container to change from the second state to the first state, or to change from the first state to the second state.

9. The fluid supply mechanism according to any one of claims 1 to 7, wherein: The device further includes a driving source that outputs a driving force for deforming the container from the first state to the second state, and outputs a driving force for deforming the container from the second state to the first state.

10. A fluid supply method, using a fluid supply mechanism that repeatedly supplies and stops a fluid to a chamber, wherein: The fluid supply mechanism comprises: a fluid supply channel, communicating with the chamber; a container, disposed in the fluid supply channel and into which the fluid is introduced; and a downstream valve disposed on the downstream side of the container in the supply flow channel, The internal volume is varied by deforming the container.

11. A fluid supply mechanism, comprising: a plurality of fluid supply channels, communicating with the chamber and connected in parallel with each other; Containers, respectively disposed in the plurality of fluid supply channels and into which the fluids are introduced; as well as The downstream valves are respectively provided on the downstream sides of the containers in the plurality of supply flow paths, and the containers change their internal volumes by deformation.

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