Piezoelectric micropump, heat dissipation circulation system and electronic equipment

Abstract

The invention discloses a piezoelectric micropump, a heat dissipation circulation system and electronic equipment, and relates to the technical field of piezoelectric equipment.The piezoelectric micropump comprises a pump body assembly and a driving assembly, and the pump body assembly is provided with a plurality of one-way channels at intervals; the driving assembly comprises a first driving assembly and a second driving assembly, the first driving assembly and the second driving assembly are arranged on the two opposite sides of the pump body assembly correspondingly, and the first driving assembly and the second driving assembly define at least one first pump cavity and at least one second pump cavity correspondingly; the first pump cavity and the second pump cavity correspondingly communicate with two adjacent one-way channels and are arranged in series through the one-way channels to form a one-way flow channel, and a water inlet and a water outlet are formed in the two ends, corresponding to the one-way flow channel, of the first driving assembly and / or the second driving assembly; and under the driving of the driving assembly, the pressure intensity change in the first pump cavity is opposite to the pressure intensity change in the second pump cavity. The piezoelectric micropump provided by the invention has relatively small volume and relatively high back pressure and flow.

Description

Technical Field

[0001] The present invention relates to the technical field of piezoelectric equipment, and in particular to a piezoelectric micro pump, a heat dissipation circulation system and electronic equipment. Background Art

[0002] With the widespread application of AI in smart terminals, chip performance has been greatly improved, but it has also brought about serious heat dissipation problems. Excessive temperature will reduce the operating efficiency of the chip, shorten the service life of the terminal, and may even cause failures. Among them, piezoelectric micropumps have attracted widespread attention as a heat dissipation solution with small size, large driving force, high efficiency, and easy control.

[0003] Piezoelectric micro pump is a kind of pump that uses piezoelectric vibrator as power source, and converts electrical energy into mechanical energy of piezoelectric vibrator through inverse piezoelectric effect, so as to transport fluid. Piezoelectric pump can be divided into valved piezoelectric pump and valveless piezoelectric pump according to whether there is a valve. Among them, valved piezoelectric pump can effectively prevent fluid backflow due to the one-way valve, and the output efficiency is relatively high.

[0004] With the further thinning of the flow channel and the continuous increase in chip power, the back pressure of existing piezoelectric micropumps is relatively low and cannot fully meet the heat dissipation requirements of high-power chips. Summary of the invention

[0005] The main purpose of the present invention is to provide a piezoelectric micropump, a heat dissipation circulation system and an electronic device, so as to make the piezoelectric micropump have both a small volume and a high back pressure.

[0006] To achieve the above object, the present invention provides a piezoelectric micropump, the piezoelectric micropump comprising:

[0007] a pump assembly, the pump assembly being formed with a plurality of spaced one-way passages;

[0008] A drive assembly, the drive assembly comprising a first drive assembly and a second drive assembly, the first drive assembly and the second drive assembly are respectively arranged on opposite sides of the pump body assembly and respectively enclosed with the pump body assembly to form at least one first pump chamber and at least one second pump chamber;

[0009] The first pump chamber and the second pump chamber are correspondingly connected to two adjacent one-way channels, the first pump chamber and the second pump chamber are arranged in series through the one-way channels to form a one-way flow channel, and the first drive assembly and / or the second drive assembly form a water inlet and a water outlet at both ends of the one-way flow channel;

[0010] Under the driving of the first driving assembly and the second driving assembly, the pressure change in the first pump chamber is opposite to the pressure change in the second pump chamber.

[0011] In one embodiment, the sum of the number of the first pump chambers and the number of the second pump chambers is an odd number, and the water inlet and the water outlet are located on the same side.

[0012] In one embodiment, the one-way channel includes a first one-way channel, a second one-way channel, a third one-way channel and a fourth one-way channel arranged at intervals;

[0013] The first pump chamber is provided with two, one of which is connected to the first one-way channel and the second one-way channel, and the other is connected to the third one-way channel and the fourth one-way channel;

[0014] The second pump chamber is provided as one, and the second pump chamber is connected with the second one-way channel and the third one-way channel;

[0015] The two first pump chambers, the second pump chamber, the first one-way channel, the second one-way channel, the third one-way channel and the fourth one-way channel together form the one-way flow channel;

[0016] The water inlet is connected to the first one-way channel, and the water outlet is connected to the fourth one-way channel.

[0017] In one embodiment, the first driving component includes a first cavity plate, a first vibration plate and a first piezoelectric vibrator stacked in sequence on one side of the pump body component, the first cavity plate is provided with two first via holes spaced apart, the first vibration plate, the walls of the two first via holes and the pump body component enclose two first pump cavities, and two first piezoelectric vibrators are provided, and the two first piezoelectric vibrators are provided corresponding to the two first pump cavities.

[0018] In one embodiment, the first piezoelectric vibrator includes a first piezoelectric ceramic and a first metal substrate connected to each other, and the first metal substrates of the two first piezoelectric vibrators are an integrated structure.

[0019] In one embodiment, the first vibration plate is made of metal, and the first vibration plate and the first metal substrate are an integrated structure.

[0020] In one embodiment, the second driving assembly includes a second cavity plate, a second vibration plate, and a second piezoelectric vibrator which are sequentially stacked on the other side of the pump body assembly, the second cavity plate is provided with a second through hole, and the second vibration plate, the hole wall of the second through hole and the pump body assembly enclose the second pump cavity;

[0021] The second cavity plate is further provided with a water inlet connection hole and a water outlet connection hole, the water inlet connection hole corresponds to and is connected to the first one-way channel, and the water outlet connection hole corresponds to and is connected to the fourth one-way channel;

[0022] The second vibration plate is provided with a water inlet and a water outlet at intervals, the water inlet corresponds to and is connected to the water inlet connection hole, and the water outlet corresponds to and is connected to the water outlet connection hole.

[0023] In one embodiment, the second piezoelectric vibrator includes a second piezoelectric ceramic and a second metal substrate connected to each other; the second vibration plate is made of metal, and the second vibration plate and the second metal substrate are an integrated structure.

[0024] In one embodiment, the pump body assembly includes a first pressure plate, a valve plate, and a second pressure plate stacked in sequence, and a plurality of deformable valve plates are arranged at intervals on the valve plates. The first pressure plate and the second pressure plate correspond to the plurality of valve plates and are respectively provided with large flow holes and small flow holes. The area of ​​the valve plates is larger than the area of ​​the small flow holes and smaller than the area of ​​the large flow holes. One small flow hole forms a one-way channel with the corresponding valve plate and the large flow hole.

[0025] In one embodiment, the valve plate is a wheel-shaped structure, and the valve plate has a plurality of valve holes circumferentially formed on the periphery of the valve plate; or, the valve plate has a plurality of connection holes spaced apart, the valve plate is a cantilever structure, and one end is connected to the hole wall of the connection hole.

[0026] The present invention also provides a heat dissipation circulation system, which includes the piezoelectric micropump as described above.

[0027] The present invention also provides an electronic device, which includes the heat dissipation circulation system as described above.

[0028] In the piezoelectric micro pump provided by the present invention, a first drive assembly and a second drive assembly are respectively arranged on opposite sides of a pump body assembly, and the two drive assemblies are respectively enclosed with the pump body assembly to form at least one first pump chamber and at least one second pump chamber, the first pump body and the second pump chamber are arranged in series through a one-way channel on the pump body assembly, and form a one-way flow channel, and the first drive assembly and / or the second drive assembly form a water inlet and a water outlet at the two ends of the corresponding one-way flow channel, thereby, under the drive of the first drive assembly and the second drive assembly, by controlling the pressure changes in the first pump chamber and the second pump chamber to be opposite, the fluid can enter the one-way flow channel from the water inlet and finally flow out from the water outlet. Since the first pump chamber and the second pump chamber share the same pump body assembly and are arranged in series, under the drive of the drive assembly, the pressure change in the first pump chamber is opposite to the pressure change in the second pump chamber, and the directions of the pressures on both sides of the pump body assembly are also opposite, and these two forces act on the pump body assembly together, more effectively promoting the pump body assembly to move to quickly open and close the one-way flow channel, and the output efficiency is higher, thereby effectively improving the back pressure and flow of the piezoelectric micro pump. At the same time, since the first pump chamber and the second pump chamber share the same pump body assembly, the overall thickness of the piezoelectric micropump can be effectively reduced. That is, the piezoelectric micropump provided by the present invention has both a small volume and a high back pressure and flow rate, which can meet the heat dissipation requirements of high-power chips in electronic devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0030] Figure 1 A schematic diagram of the exploded structure of an embodiment of a piezoelectric micropump provided by the present invention;

[0031] Figure 2 for Figure 1 A schematic cross-sectional view of a piezoelectric micropump is provided;

[0032] Figure 3 for Figure 1 A structural diagram of the middle valve plate from another perspective;

[0033] Figure 4 for Figure 1 A schematic diagram of the structure of the first piezoelectric vibrator from another perspective;

[0034] Figure 5 for Figure 1 Schematic diagram of the structure of the second cavity plate from another perspective.

[0035] Description of Figure Numbers:

[0036] 100, piezoelectric micro pump; 1, pump body assembly; 11, valve plate; 111, valve sheet; 112, valve hole; 12, first pressure plate; 121, large flow hole; 122, small flow hole; 13, second pressure plate; 2, first drive assembly; 2a, first pump cavity; 21, first cavity plate; 211, first through hole; 22, first vibration plate; 23, first piezoelectric vibrator; 231, first piezoelectric ceramic; 232, first metal substrate; 3, second drive assembly; 3a, second pump cavity; 31, second cavity plate; 311, second through hole; 312, water inlet connection hole; 313, water outlet connection hole; 32, second vibration plate; 321, water inlet; 322, water outlet; 33, second piezoelectric vibrator; 331, second piezoelectric ceramic; 332, second metal substrate.

[0037] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0040] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0041] With the widespread application of AI in smart terminals, chip performance has been greatly improved, but it has also brought about serious heat dissipation problems. Excessive temperature will reduce the operating efficiency of the chip, shorten the service life of the terminal, and may even cause failures. Among them, piezoelectric micropumps have attracted widespread attention as a heat dissipation solution with small size, large driving force, high efficiency, and easy control.

[0042] Piezoelectric micro pump is a kind of pump that uses piezoelectric vibrator as power source, and converts electrical energy into mechanical energy of piezoelectric vibrator through inverse piezoelectric effect, so as to transport fluid. Piezoelectric pump can be divided into valved piezoelectric pump and valveless piezoelectric pump according to whether there is a valve. Among them, valved piezoelectric pump can effectively prevent fluid backflow due to the one-way valve, and the output efficiency is relatively high.

[0043] With the further thinning of the flow channel and the continuous increase in chip power, the back pressure of existing piezoelectric micropumps is relatively low and cannot fully meet the heat dissipation requirements of high-power chips.

[0044] In view of the above concepts and problems, the present invention proposes a piezoelectric micropump, which aims to make the piezoelectric micropump have both a small volume and a high back pressure, so as to meet the heat dissipation requirements of high-power chips.

[0045] See also Figure 1 and Figure 2 In one embodiment of the present invention, a piezoelectric micropump 100 includes a pump body assembly 1 and a drive assembly, wherein the pump body assembly 1 is formed with a plurality of spaced one-way channels (not shown); the drive assembly includes a first drive assembly 2 and a second drive assembly 3, wherein the first drive assembly 2 and the second drive assembly 3 are respectively arranged on opposite sides of the pump body assembly 1, and are respectively enclosed with the pump body assembly 1 to form at least one first pump chamber 2a and at least one second pump chamber 3a; the first pump chamber 2a and the second pump chamber 3a are both connected to two adjacent one-way channels, and the first pump chamber 2a and the second pump chamber 3a are arranged in series through the one-way channels to form a one-way flow channel, and the first drive assembly 2 and / or the second drive assembly 3 form a water inlet 321 and a water outlet 322 at both ends of the one-way flow channel; under the drive of the first drive assembly 2 and the second drive assembly 3, the pressure change in the first pump chamber 2a is opposite to the pressure change in the second pump chamber 3a.

[0046] The pump body assembly 1 is generally a flat plate structure, having a first side and a second side opposite to each other. The pump body assembly 1 has a plurality of one-way channels spaced apart and penetrating the first side and the second side. The plurality of one-way channels include an inlet valve structure and an outlet valve structure. The two valve body structures can be opened and closed under specific conditions (such as under pressure), so that the fluid can only enter through the inlet valve structure and then flow out from the outlet valve structure to achieve one-way flow of the fluid. The valve body structure herein includes but is not limited to a wheel valve structure or a cantilever beam valve structure, as long as the one-way flow of the fluid can be achieved. The pump body assembly 1 can be an integral structure, and a one-way channel is formed by opening a through hole. Alternatively, the pump body assembly 1 can be a split structure in which a plurality of plate structures are stacked, and a one-way channel is formed by opening through holes at corresponding positions on each split structure.

[0047] The first drive assembly 2 and the second drive assembly 3 are respectively located on the first side and the second side. The first drive assembly 2 and the first side of the pump body assembly 1 are enclosed to form at least one first pump chamber 2a. The first pump chamber 2a is connected to two adjacent one-way channels, one of which is the inlet channel of the first pump chamber 2a, and the other one-way channel is the outlet channel of the first pump chamber 2a. The second drive assembly 3 and the second side of the pump body assembly 1 are enclosed to form at least one second pump chamber 3a. The second pump chamber 3a is connected to two adjacent one-way channels, one of which is the inlet channel of the second pump chamber 3a, and the other one-way channel is the outlet channel of the second pump chamber 3a, and the outlet channel of the first pump chamber 2a is the inlet channel of the relative second pump chamber 3a, that is, the relative first pump chamber 2a and the second pump chamber 3a are connected to the same one-way channel, so that the first pump chamber 2a and the second pump chamber 3a are arranged in series through the one-way channel to form a one-way flow channel. Since the first pump chamber 2a and the second pump chamber 3a share the same pump body assembly 1, the overall thickness of the piezoelectric micropump 100 can be effectively reduced. The number of the first pump chambers 2a and the number of the second pump chambers 3a are not limited.

[0048] In one embodiment, the first pump chamber 2a and the second pump chamber 3a are both set as one, and the one-way channels are set as three, namely, the first one-way channel, the second one-way channel and the third one-way channel are arranged in sequence, the first pump chamber 2a connects the first one-way channel and the second one-way channel, the second pump chamber 3a connects the second one-way channel and the third one-way channel, and the first pump chamber 2a and the second pump chamber 3a are arranged in series through the three one-way channels to form a one-way flow channel.

[0049] In another embodiment, the first pump chamber 2a and the second pump chamber 3a are both provided in plurality, and the plurality of first pump chambers 2a and the plurality of second pump chambers 3a are spaced apart along the extension direction of the connecting line of the plurality of one-way channels, and each first pump chamber 2a is connected to two adjacent one-way channels, and each second pump chamber 3a is connected to two adjacent one-way channels. At the same time, the second pump chamber 3a is spaced apart to correspond to the interval between two adjacent first pump chambers 2a, and the first pump chamber 2a and the second pump chamber 3a are connected to the same one-way channel, thereby realizing that the plurality of first pump chambers 2a and the plurality of second pump chambers 3a are arranged in series through the plurality of one-way channels.

[0050] Of course, in some other embodiments, one of the first pump chamber 2a and the second pump chamber 3a is set to one, and the other is set to two, and the corresponding one-way channels are set to four. The first pump chamber 2a and the second pump chamber 3a can also be arranged in series through four one-way channels to form a one-way flow channel.

[0051] In some embodiments, the sum of the number of the first pump chamber 2a and the second pump chamber 3a is an odd number, and the water inlet 321 and the water outlet 322 are arranged on the same side, that is, the water inlet 321 and the water outlet 322 are opened at both ends of the corresponding one-way flow channel of the first drive component 2 or the second drive component 3. Optionally, the water inlet 321 and the water outlet 322 are located on one side of the pump chamber with a smaller number of the first pump chamber 2a and the second pump chamber 3a.

[0052] In other embodiments, the sum of the number of the first pump chamber 2a and the second pump chamber 3a is an even number, and the water inlet 321 and the water outlet 322 are arranged on different sides, that is, the first drive component 2 and the second drive component 3 are respectively provided with a water inlet 321 and a water outlet 322 at both ends of the one-way flow channel.

[0053] The first drive assembly 2 and the second drive assembly 3 can be a separate structure or an integral structure. The specific structure is not limited, as long as at least one first pump chamber 2a and at least one second pump chamber 3a can be formed on both sides of the pump body assembly 1.

[0054] Driven by the first drive component 2 and the second drive component 3, the pressure change in the first pump chamber 2a is opposite to the pressure change in the second pump chamber 3a, and the directions of the pressures on both sides of the pump body component 1 are also opposite. These two forces act on the pump body component 1 together, which more effectively drives the pump body component 1 to move to quickly open and close the one-way flow channel, and the fluid output efficiency is higher, thereby effectively improving the back pressure and flow rate of the piezoelectric micropump 100.

[0055] It should be noted that back pressure refers to the reverse pressure exerted on the fluid at the water outlet 322 of the piezoelectric micropump 100. The resultant force formed by the pressure difference on both sides of the pump body assembly 1 can more forcefully push the fluid out, so that the fluid can overcome greater resistance during the discharge process, thereby increasing the back pressure of the piezoelectric micropump 100.

[0056] Since the pump body assembly 1 can open and close the one-way channel relatively quickly, the fluid suction and discharge process is more efficient, and more suction and discharge cycles can be completed per unit time. At the same time, the stronger driving force also increases the amount of fluid discharged in each cycle, thereby improving the flow rate of the piezoelectric micropump 100.

[0057] The fluid may be cooling water. When the piezoelectric micropump 100 of the present invention is used for chip heat dissipation, the heat dissipation effect is good and the cost is low.

[0058] In the piezoelectric micropump 100 provided by the present invention, a first drive component 2 and a second drive component 3 are respectively arranged on opposite sides of a pump body component 1, and the two drive components are respectively enclosed with the pump body component 1 to form at least one first pump chamber 2a and at least one second pump chamber 3a. The first pump body and the second pump chamber 3a are arranged in series through a one-way channel on the pump body component 1 to form a one-way flow channel, and the first drive component 2 and / or the second drive component 3 form a water inlet 321 and a water outlet 322 at both ends of the one-way flow channel corresponding to the first drive component 2 and / or the second drive component 3. Therefore, under the drive of the drive component, by controlling the pressure changes in the first pump chamber 2a and the second pump chamber 3a to be opposite, the fluid can enter the one-way flow channel from the water inlet 321 and finally flow out from the water outlet 322. Since the first pump chamber 2a and the second pump chamber 3a share the same pump body assembly 1 and are arranged in series, under the drive of the driving assembly, the pressure change in the first pump chamber 2a is opposite to the pressure change in the second pump chamber 3a, and the directions of the pressures on both sides of the pump body assembly 1 are also opposite. These two forces act on the pump body assembly 1 together, more effectively promoting the movement of the pump body assembly 1 to quickly open and close the one-way flow channel, and the output efficiency is higher, thereby effectively improving the back pressure and flow rate of the piezoelectric micropump 100. At the same time, since the first pump chamber 2a and the second pump chamber 3a share the same pump body assembly 1, the overall thickness of the piezoelectric micropump 100 can be effectively reduced. That is, the piezoelectric micropump 100 provided by the present invention has both a smaller volume and a higher back pressure and flow rate, which can meet the heat dissipation requirements of high-power chips in electronic equipment.

[0059] In an optional embodiment of the present invention, the sum of the number of the first pump chamber 2a and the number of the second pump chamber 3a is an odd number, and the water inlet 321 and the water outlet 322 are located on the same side.

[0060] The piezoelectric micropump 100 provided in an embodiment of the present invention adopts an odd number of pump chambers arranged in series, and a water inlet 321 and a water outlet 322 are respectively opened at both ends of the unidirectional flow channel corresponding to the first drive component 2 or the second drive component 3, and the water inlet 321 and the water outlet 322 are located on the same side of the first pump chamber 2a and the second pump chamber 3a, which has a smaller number of pump chambers. This is conducive to connecting ultra-thin planar flow channels, saving space, and making the installation arrangement more flexible, reducing the space occupied by pipelines, and facilitating integrated design.

[0061] It should be noted that the specific number of the first pump chambers 2a and the second pump chambers 3a is not limited, as long as the sum of the two numbers is an odd number.

[0062] Refer to it again Figure 1 and Figure 2 In one embodiment of the present invention, the one-way channel includes a first one-way channel, a second one-way channel, a third one-way channel and a fourth one-way channel which are arranged in sequence; the first pump chamber 2a is set to two, one of which is connected to the first one-way channel and the second one-way channel, and the other is connected to the third one-way channel and the fourth one-way channel; the second pump chamber 3a is set to one, and the second pump chamber 3a is connected to the second one-way channel and the third one-way channel; the two first pump chambers 2a, the second pump chamber 3a, the first one-way channel, the second one-way channel, the third one-way channel and the fourth one-way channel together form a one-way flow channel; the water inlet 321 is connected to the first one-way channel, and the water outlet 322 is connected to the fourth one-way channel.

[0063] In the embodiment of the present invention, the piezoelectric micro pump 100 uses three pump chambers arranged in series, namely, two first pump chambers 2a and one second pump chamber 3a, wherein the two first pump chambers 2a are located on the first side of the pump body assembly 1, and the second pump chamber 3a is located on the second side of the pump body assembly 1, and the second pump chamber 3a is arranged at intervals corresponding to the two first pump chambers 2a. Correspondingly, the pump body assembly 1 is formed with four one-way channels, specifically, the first one-way channel, the second one-way channel, the third one-way channel and the fourth one-way channel are sequentially spaced along the direction from one of the first pump chambers 2a to the other first pump, the first one-way channel and the third one-way channel have the same fluid flow direction, which is a liquid inlet valve structure, the second one-way channel and the fourth one-way channel have the same fluid flow direction, which is a liquid outlet valve structure, that is, the liquid inlet valve structure and the liquid outlet structure are alternately spaced. One of the first pump chambers 2a corresponds to the first one-way channel and the second one-way channel, the other first pump chamber 2a corresponds to the third one-way channel and the fourth one-way channel, the second pump chamber 3a corresponds to the second one-way channel and the third one-way channel, the two first pump chambers 2a and the second pump chamber 3a are arranged in series through four one-way channels to form a one-way flow channel. That is, in the flow direction of the one-way flow channel, one of the first pump chambers 2a, the second pump chamber 3a, and the other first pump chamber 2a are arranged in sequence and in series. The water inlet 321 and the water outlet 322 are both opened in the second drive assembly 3, and are respectively located on both sides of the second pump chamber 3a, the water inlet 321 corresponds to and is connected to the first one-way channel, and the water outlet 322 corresponds to and is connected to the fourth channel.

[0064] When the pressure in the first pump chamber 2a decreases and the pressure in the second pump chamber 3a increases under the drive of the first drive assembly 2 and the second drive assembly 3, since the external pressure remains unchanged, the fluid enters the first pump chamber 2a through the first one-way channel from the water inlet 321, and the fluid in the second pump chamber 3a enters the first pump chamber 2a through the third one-way channel; when the pressure in the first pump chamber 2a increases and the pressure in the second pump chamber 3a decreases, since the external pressure remains unchanged, the fluid in one of the first pump chambers 2a enters the second pump chamber 3a through the second one-way channel, and the fluid in the other first pump chamber 2a enters the water outlet 322 through the fourth one-way channel. In this way, the one-way flow of the fluid in the one-way flow channel can be achieved.

[0065] The above structural arrangement enables the piezoelectric micropump 100 to have both a smaller volume and a higher back pressure and flow rate, and can meet the heat dissipation requirements of high-power chips in electronic devices.

[0066] Refer again Figure 1 and Figure 2In one embodiment of the present invention, the first driving component 2 includes a first cavity plate 21, a first vibration plate 22 and a first piezoelectric vibrator 23 which are sequentially stacked on one side of the pump body component 1. The first cavity plate 21 has two first through holes 211 spaced apart from each other. The first vibration plate 22, the walls of the two first through holes 211 and the pump body component 1 together form two first pump cavities 2a. Two first piezoelectric vibrators 23 are provided, and the two first piezoelectric vibrators 23 are provided corresponding to the two first pump cavities 2a.

[0067] In this embodiment, the first cavity plate 21 is arranged on the first side of the pump body assembly 1, and the first cavity plate 21 is provided with two first through holes 211 passing through it at intervals. The first through holes 211 can be elliptical, circular, square or other reasonable shapes, which are not limited here. After the first drive assembly 2 is assembled, the first vibration plate 22, the hole walls of the two first through holes 211 and the first side of the pump body assembly 1 are enclosed to form two first pump chambers 2a. The materials of the first cavity plate 21 and the first vibration plate 22 can be metal or plastic, etc. The shapes of the first cavity plate 21, the first vibration plate 22 and the pump body assembly 1 are adapted, and their sizes are also adapted, thereby forming a first pump chamber 2a with a larger area, so that it can correspond to and connect two adjacent one-way channels at the same time.

[0068] The embodiment of the present invention forms the first pump chamber 2a by setting the first cavity plate 21, which can increase the size of the first pump chamber 2a in the stacking direction, increase the volume of the first pump chamber 2a, enhance the driving force of the pumped fluid, and further increase the pumping volume.

[0069] Of course, in some other embodiments, the first vibration plate 22 may also be directly connected to the pump body assembly 1, specifically, the peripheral wall of the first vibration plate 22 is connected to the periphery of the pump body assembly 1, and the middle portion of the first vibration plate 22 is bent away from the pump body assembly 1, thereby forming a larger first pump chamber 2a.

[0070] The two first piezoelectric vibrators 23 are arranged corresponding to the two first pump chambers 2a. Since the two first pump chambers 2a are located on the same side, the two first piezoelectric vibrators 23 charge the first vibration plate 22 to vibrate in the same direction, so that the pressure in the two first pump chambers 2a increases or decreases at the same time.

[0071] In the embodiment of the present invention, two first piezoelectric vibrators 23 are used. Compared with a single piezoelectric vibrator, the displacement of the vibration is relatively large, and the pressure in the first pump chamber 2a varies greatly, so the driving pressure on the pump assembly 1 is relatively large, which is conducive to further improving the back pressure and flow rate of the piezoelectric micropump 100. At the same time, the manufacturing cost is relatively low.

[0072] Moreover, in the embodiment of the present invention, the first vibration plate 22 and the first cavity plate 21 both adopt an integral structure. Compared with a separate structure, the integral structure can ensure the consistency of vibration, has higher structural stability and reliability, and is convenient for installation and manufacturing.

[0073] Please refer to Figure 1 , Figure 2 and Figure 4 In some embodiments of the present invention, the first piezoelectric vibrator 23 includes a first piezoelectric ceramic 231 and a first metal substrate 232 connected to each other, and the first metal substrates 232 of the two first piezoelectric vibrators 23 are an integrated structure.

[0074] In the embodiment of the present invention, the two first piezoelectric vibrators 23 use the first metal substrate 232 of an integrated structure, and the two first piezoelectric vibrators 23 have the same phase, thereby ensuring the consistency of the vibration of the two first piezoelectric vibrators 23, increasing the vibration, and more effectively promoting the flow of the fluid in the piezoelectric micropump 100, thereby improving the flow rate, back pressure and output capacity of the piezoelectric micropump 100. At the same time, the overall structural strength and stability are ensured to be high.

[0075] In some embodiments, the first vibration plate 22 is made of metal, and the first vibration plate 22 is an integral structure with the first metal substrate 232. This can further reduce the overall thickness of the piezoelectric micropump 100, so that the piezoelectric micropump 100 has a smaller volume.

[0076] Refer again Figure 1 , Figure 2 and Figure 5 In one embodiment of the present invention, the second driving component 3 includes a second cavity plate 31, a second vibration plate 32 and a second piezoelectric vibrator 33 which are sequentially stacked on the other side of the pump body component 1. The second cavity plate 31 is provided with a second through hole 311. The second vibration plate 32, the hole wall of the second through hole 311 and the pump body component 1 are enclosed to form a second pump cavity 3a; the second cavity plate 31 is also provided with a water inlet connection hole 312 and a water outlet connection hole 313. The water inlet connection hole 312 corresponds to and is connected to the first one-way channel, and the water outlet connection hole 313 corresponds to and is connected to the fourth one-way channel; the second vibration plate 32 is spaced apart with a water inlet 321 and a water outlet 322. The water inlet 321 corresponds to and is connected to the water inlet connection hole 312, and the water outlet 322 corresponds to and is connected to the water outlet connection hole 313.

[0077] In this embodiment, the second cavity plate 31 is arranged on the second side of the pump body assembly 1, and the second cavity plate 31 is provided with a second through hole 311, a water inlet connection hole 312 and a water outlet connection hole 313 at intervals, and the water inlet connection hole 312 and the water outlet connection hole 313 are respectively located on both sides of the second through hole 311, and the sizes of the water inlet connection hole 312 and the water outlet connection hole 313 are both smaller than the size of the second through hole 311. Optionally, the size and shape of the second through hole 311 are the same as the size and shape of the first through hole 211. The material of the second cavity plate 31 and the second vibration plate 32 can be metal or plastic, etc. The shapes of the second cavity plate 31, the second vibration plate 32 and the pump body assembly 1 are adapted, and their sizes are also adapted, thereby forming a second pump cavity 3a with a larger area, so as to correspond to and connect two adjacent one-way channels at the same time. The second vibration plate 32 is further provided with a water inlet 321 and a water outlet 322, the water inlet 321 corresponds to and is connected to the water inlet connection hole 312, and the water outlet 322 corresponds to and is connected to the water outlet connection hole 313. Optionally, the water inlet 321 and the water inlet connection hole 312 have the same shape and size, and the water outlet 322 and the water outlet connection hole 313 have the same shape and size.

[0078] In the embodiment of the present invention, by setting a second cavity plate 31 to form a second pump cavity 3a, the size of the second pump cavity 3a in the stacking direction can be increased, the volume of the second pump cavity 3a can be increased, the driving force of the pumped fluid can be enhanced, and the pumping volume can be further increased.

[0079] Of course, in some other embodiments, the second vibration plate 32 may also be directly connected to the pump body assembly 1, specifically, the peripheral wall of the second vibration plate 32 is connected to the periphery of the pump body assembly 1, and the middle part of the second vibration plate 32 is bent away from the pump body assembly 1, thereby forming a larger second pump chamber 3a.

[0080] In one embodiment of the present invention, the second piezoelectric vibrator 33 includes a connected second piezoelectric ceramic 331 and a second metal substrate 332. Optionally, the second piezoelectric ceramic 331 has the same shape and size as the first piezoelectric ceramic 231; the second metal substrate 332 has the same size and shape as the first metal substrate 232.

[0081] In some embodiments of the present invention, the second vibration plate 32 is made of metal, and the second vibration plate 32 and the second metal substrate 332 are an integrated structure, thereby further reducing the overall thickness of the piezoelectric micropump 100 and making the piezoelectric micropump 100 have a smaller volume.

[0082] Refer again Figure 1 and Figure 2In one embodiment of the present invention, the pump body assembly 1 includes a first pressure plate 12, a valve plate 11 and a second pressure plate 13 which are stacked in sequence. The valve plate 11 is provided with a plurality of deformable valve sheets 111 at intervals. The first pressure plate 12 and the second pressure plate 13 correspond to the plurality of valve sheets 111 and are respectively provided with large flow holes 121 and small flow holes 122. The area of ​​the valve sheet 111 is larger than the area of ​​the small flow hole 122 and smaller than the area of ​​the large flow hole 121. A small flow hole 122 forms a one-way channel with the corresponding valve sheet 111 and the large flow hole 121.

[0083] In the embodiment of the present invention, the pump body assembly 1 is a split structure in which a plurality of plate bodies are stacked, and the first pressure plate 12, the valve plate 11 and the second pressure plate 13 together form the above-mentioned plurality of spaced one-way channels. The valve plate 11 is spaced apart with a plurality of deformable valve plates 111, and the plane areas of the valve plates 111 are substantially the same. The first pressure plate 12 and the second pressure plate 13 are both provided with a small flow hole 122 and a large flow hole 121 that penetrate through. The specific arrangement is not limited, as long as the large flow hole 121 and the small flow hole 122 are located on both sides of the same valve plate 111. The plane area of ​​the valve plate 111 is larger than the opening area of ​​the small flow hole 122 and smaller than the opening area of ​​the large flow hole 121, so that the valve plate 111 can only deform toward one side of the large flow hole 121 to achieve the pumping of the fluid. The corresponding small flow hole 122, valve plate 111 and large flow hole 121 together form the above-mentioned one-way channel. When the pressure on the side of the large flow hole 121 is less than the pressure on the side of the small flow hole 122, under the action of the pressure difference on both sides, the valve plate 111 deforms toward the side of the large flow hole 121, and the one-way channel opens; when the pressure on the side of the large flow hole 121 is greater than the pressure on the side of the small flow hole 122, under the action of the pressure difference on both sides, the valve plate 111 adheres to and covers the small flow hole 122, and the one-way channel is closed.

[0084] It should be noted that the shapes of the large flow hole 121 and the small flow hole 122 can be the same or different, the size of the large flow hole 121 on the first pressure plate 12 can be the same as or different from the size of the large flow hole 121 on the second pressure plate 13, and the size of the small flow hole 122 on the first pressure plate 12 can be the same as or different from the size of the small flow hole 122 on the second pressure plate 13. There is no limitation on this as long as it can cooperate with the valve plate 111 to form a one-way channel.

[0085] Combination Figure 1 and Figure 2 In a specific embodiment of the present invention, four valves are provided, and the first pressure plate 12 and the second pressure plate 13 are both provided with two small flow holes 122 and two large flow holes 121, and on the same pressure plate, the small flow holes 122 and the large flow holes 121 are alternately distributed, thereby forming four one-way channels.

[0086] Please refer to Figure 1 and Figure 3 In one embodiment of the present invention, the valve disc 111 is a wheel-shaped structure, and the valve plate 11 is provided with a plurality of valve holes 112 along the circumferential direction on the periphery of the valve disc 111 .

[0087] In the embodiment of the present invention, three valve holes 112 may be optionally provided in a circular arc hole structure, whereby the valve plate 111 may be deformed toward the large flow hole 121 under the action of the pressure difference. The structural setting is relatively simple, and the valve plate 111 itself has good elastic deformation, which can improve the efficiency of pumping fluid.

[0088] In some other embodiments, the valve plate 11 is provided with a plurality of connection holes at intervals, and the valve plate 111 is a cantilever structure, with one end connected to the hole wall of the connection hole.

[0089] The embodiment of the present invention uses a cantilever structure valve plate 111, one end of the valve plate 111 is connected to the hole wall of the connection hole, and the other end is suspended, so that under the drive of the fluid, the other end is deformed relative to the valve plate 11. The cantilever structure can have good elastic deformation to improve the efficiency of pumping fluid. The shape of the connection hole can be circular, square or other reasonable polygons.

[0090] In some other embodiments, the plurality of valve plates 111 may include valve plates 111 of a wheel structure and valves of a cantilever structure, and the specific number of the valve plates 111 is not limited.

[0091] Please combine Figure 2 , Figure 2 The dashed arrow indicates the fluid flow direction, and the plurality of valve plates 111 are sequentially the first valve plate 111, the second valve plate 111, the third valve plate 111 and the fourth valve plate 111. The working principle of the piezoelectric micro pump 100 provided by the present invention is as follows: the two first piezoelectric ceramics 231 have the same phase and are 180° out of phase with the second piezoelectric ceramic 331, thereby ensuring that the pressure change in the first pump chamber 2a on both sides of the pump body assembly 1 is opposite to the pressure change in the second pump chamber 3a. Specifically, when the two first piezoelectric ceramics 231 drive the first vibration plate 22 to vibrate upward, the volume in the first pump chamber 2a increases and the pressure decreases. At the same time, the second piezoelectric ceramic 331 drives the second vibration plate 32 to vibrate upward, the volume in the second pump chamber 3a decreases and the pressure increases. Since the external pressure remains unchanged, the fluid causes the first valve plate 111 and the third valve plate 111 to deform upward under the action of the pressure difference. At this time, the first one-way channel and the third one-way channel are opened. At the same time, the second valve plate 111 and the fourth valve plate 111 are tightly attached to and cover the small flow hole 122, and the second one-way channel and the fourth one-way channel are closed. The fluid enters the first pump chamber 2a from the water inlet 321 through the first one-way channel, and the fluid in the second pump chamber 3a enters the first pump chamber 2a through the third one-way channel.

[0092] When the two first piezoelectric ceramics 231 drive the first vibration plate 22 to vibrate downward, the volume in the first pump chamber 2a decreases and the pressure increases. At the same time, the second piezoelectric ceramic 331 drives the second vibration plate 32 to vibrate downward, the volume in the second pump chamber 3a increases and the pressure decreases. Since the external pressure remains unchanged, the fluid causes the second valve plate 111 and the fourth valve plate 111 to deform upward under the action of the pressure difference. At this time, the second one-way channel and the fourth one-way channel are opened. At the same time, the first valve plate 111 and the third valve plate 111 are tightly attached to and cover the small flow hole 122, and the first one-way channel and the third one-way channel are closed. The fluid in the first pump chamber 2a on the left enters the second pump chamber 3a through the second one-way channel, and the fluid in the first pump chamber 2a on the right enters the water outlet 322 through the fourth one-way channel.

[0093] The fluid flowing out of the water outlet 322 flows into the water inlet 321 through the external circulating water path, and the cycle repeats.

[0094] The present invention also proposes a heat dissipation circulation system, which includes a piezoelectric micropump 100. The specific structure of the piezoelectric micropump 100 refers to the above embodiment. Since the heat dissipation circulation system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here one by one.

[0095] The heat dissipation circulation system is the operating system of the chip, and the heat generated during the operation of the chip is dissipated through the piezoelectric micro pump 100.

[0096] In addition, the heat dissipation circulation system may further include a pipeline structure, which is connected to the water inlet 321 and the water outlet 322 of the piezoelectric micro pump 100 .

[0097] Since the piezoelectric micro pump 100 provided by the present invention has both a small volume and a high back pressure and flow rate, it can meet the heat dissipation requirements of high-power chips.

[0098] The present invention also proposes an electronic device, which includes a heat dissipation circulation system. The specific structure of the heat dissipation circulation system refers to the above-mentioned embodiment. Since the heat dissipation circulation system adopts all the technical solutions of all the above-mentioned embodiments, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be repeated here one by one.

[0099] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A piezoelectric micropump, characterized in that: The piezoelectric micropump comprises: a pump assembly, the pump assembly being formed with a plurality of spaced one-way passages; A drive assembly, the drive assembly comprising a first drive assembly and a second drive assembly, the first drive assembly and the second drive assembly are respectively arranged on opposite sides of the pump body assembly and respectively enclosed with the pump body assembly to form at least one first pump chamber and at least one second pump chamber; The first pump chamber and the second pump chamber are correspondingly connected to two adjacent one-way channels, the first pump chamber and the second pump chamber are arranged in series through the one-way channels to form a one-way flow channel, and the first drive assembly and / or the second drive assembly form a water inlet and a water outlet at both ends of the one-way flow channel; Under the driving of the first driving assembly and the second driving assembly, the pressure change in the first pump chamber is opposite to the pressure change in the second pump chamber.

2. The piezoelectric micropump according to claim 1, characterized in that The sum of the number of the first pump chambers and the number of the second pump chambers is an odd number, and the water inlet and the water outlet are located on the same side.

3. The piezoelectric micropump according to claim 2, characterized in that: The one-way channel comprises a first one-way channel, a second one-way channel, a third one-way channel and a fourth one-way channel which are arranged at intervals; The first pump chamber is provided with two, one of which is connected to the first one-way channel and the second one-way channel, and the other is connected to the third one-way channel and the fourth one-way channel; The second pump chamber is provided as one, and the second pump chamber is connected with the second one-way channel and the third one-way channel; The two first pump chambers, the second pump chamber, the first one-way channel, the second one-way channel, the third one-way channel and the fourth one-way channel together form the one-way flow channel; The water inlet is connected to the first one-way channel, and the water outlet is connected to the fourth one-way channel.

4. The piezoelectric micropump according to claim 3, characterized in that: The first driving component includes a first cavity plate, a first vibration plate and a first piezoelectric vibrator which are sequentially stacked on one side of the pump body component. The first cavity plate has two first via holes spaced apart from each other. The first vibration plate, the walls of the two first via holes and the pump body component together form two first pump cavities. Two first piezoelectric vibrators are provided, and the two first piezoelectric vibrators correspond to the two first pump cavities.

5. The piezoelectric micropump according to claim 4, characterized in that: The first piezoelectric vibrator includes a first piezoelectric ceramic and a first metal substrate connected to each other, and the first metal substrates of the two first piezoelectric vibrators are an integrated structure.

6. The piezoelectric micropump according to claim 5, characterized in that: The first vibration plate is made of metal, and the first vibration plate and the first metal substrate are an integrated structure.

7. The piezoelectric micropump according to claim 3, characterized in that: The second driving assembly comprises a second cavity plate, a second vibration plate and a second piezoelectric vibrator which are sequentially stacked on the other side of the pump body assembly, the second cavity plate is provided with a second through hole, and the second vibration plate, the hole wall of the second through hole and the pump body assembly are enclosed to form the second pump cavity; The second cavity plate is further provided with a water inlet connection hole and a water outlet connection hole, the water inlet connection hole corresponds to and is connected to the first one-way channel, and the water outlet connection hole corresponds to and is connected to the fourth one-way channel; The second vibration plate is provided with a water inlet and a water outlet at intervals, the water inlet corresponds to and is connected to the water inlet connection hole, and the water outlet corresponds to and is connected to the water outlet connection hole.

8. The piezoelectric micropump according to claim 7, characterized in that: The second piezoelectric vibrator includes a second piezoelectric ceramic and a second metal substrate connected to each other; The second vibration plate is made of metal, and the second vibration plate and the second metal substrate are an integrated structure.

9. The piezoelectric micropump according to any one of claims 1 to 8, characterized in that The pump body assembly includes a first pressure plate, a valve plate and a second pressure plate which are stacked in sequence, and a plurality of deformable valve plates are arranged at intervals on the valve plates. The first pressure plate and the second pressure plate correspond to a plurality of valve plates and are respectively provided with large flow holes and small flow holes. The area of ​​the valve plates is larger than the area of ​​the small flow holes and smaller than the area of ​​the large flow holes. One of the small flow holes forms a one-way channel with the corresponding valve plate and the large flow hole.

10. The piezoelectric micropump according to claim 9, characterized in that: The valve disc is a wheel-shaped structure, and the valve plate is provided with a plurality of valve holes along the circumferential direction on the periphery of the valve disc; or, The valve plate is provided with a plurality of connection holes at intervals, and the valve sheet is a cantilever structure, with one end connected to the hole wall of the connection hole.

11. A heat dissipation circulation system, characterized in that: The heat dissipation circulation system comprises the piezoelectric micropump according to any one of claims 1 to 10.

12. An electronic device, characterized in that: The electronic device comprises the heat dissipation circulation system as claimed in claim 11.

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