Valve assembly for semiconductor equipment platform

Abstract

The invention discloses a valve assembly for a semiconductor equipment platform, and particularly relates to the field of valves, the valve assembly for the semiconductor equipment platform comprises a valve body and a valve plate, the outer side of the valve body is provided with a driving end with a driving unit, the output end of the driving unit is provided with a driving piece, and the driving piece drives the valve plate to move vertically or horizontally. A driving piece movement stroke changing mechanism is further arranged in the driving end and used for changing movement of the driving piece in the vertical or horizontal direction, the sealing device further comprises a pressing rod arranged in the valve body, the pressing rod is matched with the driving piece to evenly distribute sealing pressure on the valve plate, and the driving piece is arranged in the driving end, and the sealing pressure is evenly distributed on the valve plate through the driving piece by means of the stroke changing mechanism. According to the technical scheme, when the valve plate which can only move vertically originally moves to the position of the valve hole, the movement of the valve plate is changed into the horizontal movement, namely the movement track of the valve plate is L-shaped, so that the problem of friction generated in the opening and closing process of the valve plate and the valve body in the prior art is solved, and sediments generated in the valve are effectively avoided.

Description

Technical Field

[0001] The present invention relates to the field of valve technology, and more particularly to a valve assembly for a semiconductor equipment platform. Background Art

[0002] In semiconductor equipment, the rectangular transfer valve is an isolation valve designed specifically for the wafer transfer system. Its valve port has a rectangular structure to match the geometric requirements of the wafer transfer path, ensuring efficient and stable vacuum isolation and wafer exchange. It is a key component for controlling the on and off of wafers between the transfer chamber and the process chamber.

[0003] In order to solve the problem that the valve plate of the existing valve assembly is prone to deposits due to friction with the valve body during the switching process, thereby affecting the vacuum degree during the process, a valve assembly is proposed to change the movement mode of the existing valve plate during the switching process. Summary of the invention

[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a valve assembly for a semiconductor equipment platform, wherein a driving member is arranged inside the driving end. The driving member can change the valve plate, which originally can only realize vertical movement, into horizontal movement when it runs to the valve hole position through a stroke changing mechanism, thereby solving the friction problem generated between the valve plate and the valve body in the switching process of the prior art.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a valve assembly for a semiconductor equipment platform, comprising a valve body and a valve plate for switching, wherein the outer side of the valve body has a driving end with a driving unit; A driving member is provided at the output end of the driving unit, and the driving member drives the valve plate to move vertically or horizontally; A driving member movement stroke changing mechanism is also provided inside the driving end, which is used to change the movement of the driving member in the vertical or horizontal direction; It also includes a pressure rod arranged in the valve body, and the pressure rod cooperates with the driving member to evenly distribute the sealing pressure on the valve plate.

[0006] In a preferred embodiment, a valve hole is provided on the valve body, and the valve plate moves to the valve hole to achieve closing.

[0007] In a preferred embodiment, the stroke changing mechanism is a stroke track opened on the side wall inside the driving end, the stroke track is a track groove concave toward the side wall of the driving end, and the driving member is arranged at the driving rod end of the driving unit; A push rod is provided on the driving member, and one end of the push rod is installed with the valve plate.

[0008] In a preferred embodiment, the driving member has two ends respectively provided with a mounting hole 1 and a mounting hole 2, the mounting hole 1 and the mounting hole 2 intersect vertically, the end of the driving rod passes through the mounting hole 1, and the diameter of the mounting hole 1 is greater than the diameter of the driving rod; Roller one is arranged on the side surfaces of both ends of the driving member, and the roller one rolls in the travel track; Two short rods are symmetrically arranged at the end of the driving rod, and the short rods pass through the second mounting hole on the driving member.

[0009] In a preferred embodiment, the travel track is divided into a closed section and an open section, and the connection between the closed section and the open section is a track groove with an inclined connection.

[0010] In a preferred embodiment, the compression rod has an "X"-shaped structure, and the interior of the compression rod is hollow, that is, the compression rod is divided into a two-layer structure of a force-bearing plate and a bottom plate; The bottom plate is connected and installed with the valve plate, and a pull plate with a circular hole is arranged at the center of the force-bearing plate; At least one mounting sleeve is arranged on the side of the valve plate for mounting the valve plate on the end of the push rod. The valve plate can move axially at the end of the push rod. The push rod is mounted at the center of the bottom plate of the pressure rod.

[0011] In a preferred embodiment, an inner rod is inserted into the push rod, one end of the inner rod is set as a conical head, the pull plate on the pressure rod extends into the push rod, and the conical head and the circular hole of the pull plate are in an eccentric state; A limit piece, namely a limit baffle, is arranged on one end of the conical head of the inner rod; A baffle is arranged on the valve body at both ends of the valve hole.

[0012] In a preferred embodiment, a collar is provided on the push rod, and a spring is sleeved on the push rod, with two ends of the spring connecting the collar and the side surface of the valve plate.

[0013] In a preferred embodiment, a wedge-shaped plate is provided on the side wall of the driving end, and a slope that fits the wedge-shaped plate is provided on one side of the driving member, and the driving member moves in accordance with the slope of the wedge-shaped plate; A follower rod is arranged at both ends of the side surface of the driving member, the end of the follower rod contacts the inner wall of the driving end, the follower rod and the driving member are movably plug-in assembled, and a spring is arranged inside.

[0014] In a preferred embodiment, the pressure rod is a rectangular parallelepiped member and two are provided, which are symmetrically located on both sides of the valve plate; Two dead stops are arranged inside the valve body, the dead stops are located at the two ends of the pressure rod, an inclined surface is arranged at the bottom of the dead stop, and two rollers are arranged at the two ends of the pressure rod.

[0015] Technical effects and advantages of the present invention: 1. Through the driving member arranged inside the driving end, the driving member can change the valve plate, which can only realize vertical movement, into horizontal movement when it moves to the valve hole position through the stroke changing mechanism, that is, the movement track of the valve plate is "L" shaped, thereby solving the friction problem between the valve plate and the valve body in the switching process of the prior art and effectively avoiding the deposits generated in the valve; 2. In the present invention, when the valve plate moves to close the valve hole, a dedicated pressure rod is used to ensure that the sealing level of each part on the long side of the entire valve plate is roughly the same. The valve plate is equipped with at least one dedicated pressure rod. The pressure rod ensures that the sealing pressure is evenly distributed on the valve plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the valve of the present invention.

[0017] Figure 2 It is a schematic diagram of the valve structure of the present invention.

[0018] Figure 3 It is a schematic diagram of the structure of the drive member after being disassembled according to the present invention.

[0019] Figure 4 It is a schematic diagram of the position of the valve hole of the present invention.

[0020] Figure 5 It is a schematic diagram of the position of the waist hole of the present invention.

[0021] Figure 6 It is a schematic diagram of the push rod assembly structure of the present invention.

[0022] Figure 7 for Figure 6 Enlarged structural diagram at A in the middle.

[0023] Figure 8 It is a schematic diagram of the overall structure of the pressure rod of the present invention.

[0024] Figure 9 It is a schematic diagram of the installation position of the wedge plate of the present invention.

[0025] Figure 10 This is a schematic diagram of the position of the pressure rod after the valve plate of the present invention is closed.

[0026] Figure 11 This is a schematic diagram of the structure of the pressure rod position after the valve plate is closed according to the present invention.

[0027] Figure 12 It is a schematic diagram of the overall structure of the "X"-shaped pressure rod of the present invention.

[0028] Figure 13 for Figure 6 Enlarged structural diagram at B in the middle.

[0029] The accompanying drawings are marked as follows: 1. valve body; 2. pressure rod; 201. dial plate; 202. spring; 203. mounting sleeve; 204. push rod; 205. baffle; 206. collar; 207. inner rod; 208. limiter; 209. pull plate; 210. conical head; 211. bottom plate; 212. force plate; 3. valve plate; 4. driving end; 401. driving unit; 402. travel track; 4021. closing section; 4022. opening section; 403. mounting hole one; 404. driving rod; 405. driving member; 406. mounting hole two; 407. roller one; 408. partition; 409. short rod; 410. slide groove; 411. waist hole; 5. valve hole; 6. dead stop; 601. roller two; 7. wedge plate; 701. follower rod. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] As attached Figure 1 To Attachment Figure 7 The valve assembly for the semiconductor equipment platform shown includes a valve body 1, on which a rectangular valve hole 5 for wafer transportation is provided, and a valve plate 3 is movably arranged at the position of the valve hole 5 inside the valve body 1, and the valve hole 5 is opened and closed by the movement of the valve plate 3.

[0032] In order to realize the movement of the valve plate 3, a driving end 4 for driving the movement of the valve plate 3 is arranged on the side of the valve body 1. A driving unit 401 is assembled inside the driving end 4, which can be a driving device such as a cylinder or a hydraulic cylinder in application.

[0033] In the existing wafer valve assembly, the valve plate 3 is prone to deposits, which affects the vacuum degree during the process, and the thickness of the gate valve installation is large (the thickness can be controlled within 150mm).

[0034] In order to avoid the sealing ring of the valve plate 3 during the switching process, and the friction between the valve plate 3 and the valve body 1, which may cause damage to the sealing ring and deposits caused by friction, the movement path of the valve plate 3 in the valve body 1 in the technical solution of the present invention adopts an "L"-shaped motion trajectory, that is, the valve plate 3 does not contact the valve body 1 when it moves vertically up and down, and moves horizontally to complete the closing of the valve hole 5 when moving to the valve hole 5, thereby reducing the friction between the valve plate 3 and the valve body 1, avoiding the generation of a large amount of deposits, and affecting the vacuum degree of the process.

[0035] In order to realize the "L"-shaped motion trajectory of the valve plate 3, a travel track 402 is opened on the side wall inside the driving end 4, and the travel track 402 is a track groove concave to the side wall of the driving end 4, and a driving member 405 is arranged at the end of the driving rod 404 of the driving unit 401. In the present invention, the driving member 405 is arranged as a rectangular structure, and a push rod 204 is installed on the driving member 405. One end of the push rod 204 is installed with the valve plate 3 to realize the movement of the driving valve plate 3.

[0036] A mounting hole 1 403 and a mounting hole 2 406 are respectively provided at both ends of the driving member 405, and the mounting hole 1 403 and the mounting hole 2 406 intersect vertically. The end of the driving rod 404 passes through the mounting hole 1 403, and the diameter of the mounting hole 1 403 is larger than the diameter of the driving rod 404, thereby ensuring that the driving member 405 can move radially on the driving rod 404.

[0037] At the same time, rollers 407 are arranged on the sides of both ends of the driving member 405 , and the rollers 407 are located in the travel track 402 and roll.

[0038] In order to ensure that the driving member 405 can move vertically and horizontally while following the driving rod 404, two short rods 409 are symmetrically arranged at the end of the driving rod 404. The short rods 409 pass through the second mounting hole 406 on the driving member 405. During operation, the driving member 405 can move vertically with the driving rod 404. When the movement direction is changed by the travel track 402, the driving member 405 can move axially along the short rods 409, that is, move horizontally.

[0039] refer to Figure 13 The travel track 402 is divided into a closing section 4021 and an opening section 4022. The connection between the closing section 4021 and the opening section 4022 is a track groove with an inclined connection, that is, when the driving unit 401 carries the driving member 405 to move in the opening section 4022 of the travel track 402, the valve plate 3 does not contact the valve body 1. When it moves to the closing section 4021, the valve plate 3 contacts the valve body 1 and completes the closure of the valve hole 5.

[0040] like Figure 12 As shown, in the present invention, in order to ensure that the valve plate 3 can be tightly attached to the valve body 1 after closing, and to ensure that the sealing pressure is evenly distributed on the valve plate 3, a special pressure rod 2 is arranged on the valve plate 3, and the pressure rod 2 is in an "X" shape. The interior of the pressure rod 2 is hollow, that is, the pressure rod 2 is divided into a two-layer structure of a force-bearing plate 212 and a bottom plate 211, and the bottom plate 211 is used for connecting and installing with the valve plate 3, and a pull plate 209 with a circular hole is arranged at the center of the force-bearing plate 212. When the pull plate 209 is subjected to tension, the pressure will be evenly distributed to the four points of the pressure rod 2, so as to ensure that the pressure rod 2 will evenly distribute the sealing pressure on the valve plate 3.

[0041] In the present invention, at least one mounting sleeve 203 is provided on the side of the valve plate 3 for mounting the valve plate 3 on the end of the push rod 204. After the push rod 204 is mounted through the mounting sleeve 203, the valve plate 3 can move axially at the end of the push rod 204. At the same time, the push rod 204 is installed at the center of the bottom plate 211 of the pressure rod 2.

[0042] An inner rod 207 is inserted into the push rod 204, and one end of the inner rod 207 is set to a conical head 210. The pull plate 209 on the pressure rod 2 extends to the inside of the push rod 204. In the initial state, the conical head 210 and the circular hole of the pull plate 209 are in an eccentric state, but the end of the conical head 210 does not separate from the circular hole of the pull plate 209. When the inner rod 207 moves into the push rod 204, the conical head 210 is inserted into the circular hole of the pull plate 209, thereby pulling the force plate 212 to ensure that the four points of the pressure rod 2 can be evenly stressed.

[0043] To ensure that the inner rod 207 does not fall off the push rod 204 when the valve body 1 is assembled, a limit member 208, i.e. a limit baffle, is provided on one end of the conical head 210 of the inner rod 207 to prevent the inner rod 207 from falling off from the end of the push rod 204. At the same time, the limit member 208 can prevent the inner rod 207 from being inserted into the circular hole of the pull plate 209. When the inner rod 207 is not subjected to pressure, the force plate 212 of the pressure rod 2 will protrude outward, forcing the inner rod 207 to reset.

[0044] A baffle 205 is set at both ends of the valve hole 5 on the valve body 1. The valve plate 3 is pushed by the push rod 204 and contacts the baffle 205 for precise positioning. At this time, the push rod 204 can continue to push so that the inner rod 207 in the push rod 204 can contact the inner wall of the valve body 1 and move into the push rod 204 so that its conical head 210 is inserted into the circular hole of the pull plate 209.

[0045] A collar 206 is provided on the push rod 204, and a spring 202 is sleeved on the push rod 204, and both ends of the spring 202 are connected to the collar 206 and the side of the valve plate 3. After the push rod 204 pushes the valve plate 3 to run to the valve hole 5, the push rod 204 continues to push to compress the spring 202, so that the inner rod 207 contacts the inner wall of the valve body 1.

[0046] In order to ensure that the push rod 204 can carry the valve plate 3 to move and open the valve hole 5 when it shrinks, a pull plate 201 is set on the circumferential surface of the end of the push rod 204. The pull plate 201 is used to carry the valve plate 3 out of closing the valve hole 5 when the push rod 204 shrinks.

[0047] To ensure that the valve body 1 and the driving end 4 are two independent working chambers, a kidney-shaped hole 411 is provided at the connection between the valve body 1 and the driving end 4, and a chute 410 is arranged outside the valve body 1, and a partition plate 408 is slidably assembled. The partition plate 408 can slide horizontally along the chute 410. At the same time, the push rod 204 passes through the partition plate 408 and the kidney-shaped hole 411, and the partition plate 408 moves along with the push rod 204.

[0048] In the present invention, when the rollers 407 at both ends of the driving member 405 run to the closing section 4021, the valve plate 3 contacts the baffle 205, and the valve plate 3 closes the valve hole 5. When the roller 407 continues to move along the closing section 4021, the push rod 204 moves to make the inner rod 207 contact the side wall of the valve body 1, realizing the downward movement of the force-bearing plate 212 of the pressure rod 2.

[0049] As Figures 8 to 11 shown, as another implementation manner for controlling the movement direction of the driving member 405 in the valve assembly, a wedge plate 7 is provided on the side wall of the driving end 4, and an inclined surface fitting the wedge plate 7 is provided on one side of the driving member 405. The driving member 405 moves along with the inclined surface of the fitting wedge plate 7. A follower rod 701 is provided at both ends of the side surface of the driving member 405, and the end of the follower rod 701 contacts the inner wall of the driving end 4. The follower rod 701 and the driving member 405 are movably inserted and assembled, and a spring 202 (not shown in the figure) is provided inside to ensure that the follower rod 701 can expand and contract when the driving member 405 moves under the action of the wedge plate 7, ensuring that the driving member 405 can closely follow the wedge plate 7 to move and completing the "L"-shaped movement trajectory of the valve plate 3.

[0050] In this embodiment, the pressure rods 2 are rectangular parallelepiped members and there are two of them, which are symmetrically located on both sides of the valve plate 3.

[0051] Two dead stops 6 are arranged inside the valve body 1. The positions of the dead stops 6 are at both ends of the pressure rod 2. The bottom of the dead stop 6 is provided with an inclined surface, and roller two 601 is provided at both ends of the pressure rod 2. When the driving member 405 drives the valve plate 3 to run to the valve hole 5, the roller two 601 at both ends of the pressure rod 2 contacts the inclined surface of the dead stop 6. By applying pressure to both ends of the pressure rod 2, it is ensured that the multiple pressure rods 2 can evenly distribute the sealing pressure on the valve plate 3.

[0052] Finally, several points should be noted: First, in the description of the present application, it should be noted that unless otherwise specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense, which can be mechanical connection or electrical connection, or the communication inside two components, and can be directly connected. "Up", "down", "left", "right", etc. are only used to represent the relative position relationship. When the absolute position of the described object changes, the relative position relationship may change; Secondly: In the drawings of the embodiments disclosed in the present invention, only the structures related to the embodiments disclosed in the present invention are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present invention can be combined with each other; Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A valve assembly for a semiconductor equipment platform, comprising a valve body (1) and a valve plate (3) for switching, characterized in that: The valve body (1) has a driving end (4) with a driving unit (401) on the outside thereof; A driving member (405) is provided at the output end of the driving unit (401), and the driving member (405) drives the valve plate (3) to move vertically or horizontally; A driving member (405) movement stroke changing mechanism is also provided inside the driving end (4) for changing the movement of the driving member (405) in a vertical or horizontal direction; It also includes a pressure rod (2) arranged in the valve body (1), the pressure rod (2) cooperates with the driving member (405) to evenly distribute the sealing pressure on the valve plate (3).

2. The valve assembly for semiconductor equipment platform according to claim 1, characterized in that: The valve body (1) is provided with a valve hole (5), and the valve plate (3) moves to the valve hole (5) to achieve closing.

3. The valve assembly for semiconductor equipment platform according to claim 2, characterized in that: The stroke changing mechanism is a stroke track (402) provided on the side wall inside the driving end (4), the stroke track (402) being a track groove concave toward the side wall of the driving end (4), and the driving member (405) being provided at the end of the driving rod (404) of the driving unit (401); A push rod (204) is provided on the driving member (405), and one end of the push rod (204) is mounted on the valve plate (3).

4. The valve assembly for semiconductor equipment platform according to claim 3, characterized in that: The driving member (405) has a mounting hole 1 (403) and a mounting hole 2 (406) respectively formed at both ends, the mounting hole 1 (403) and the mounting hole 2 (406) intersect each other vertically, the end of the driving rod (404) passes through the mounting hole 1 (403), and the diameter of the mounting hole 1 (403) is larger than the diameter of the driving rod (404); Roller 1 (407) is disposed on the side surfaces of both ends of the driving member (405), and the roller 1 (407) is located in the travel track (402) and rolls; Two short rods (409) are symmetrically arranged at the end of the driving rod (404), and the short rods (409) pass through the second mounting hole (406) on the driving member (405).

5. The valve assembly for semiconductor equipment platform according to claim 4, characterized in that: The travel track (402) is divided into a closed section (4021) and an open section (4022), and the connection between the closed section (4021) and the open section (4022) is a track groove having an inclined connection.

6. The valve assembly for a semiconductor equipment platform according to any one of claims 1 to 5, characterized in that: The compression rod (2) has an "X"-shaped structure, and the interior of the compression rod (2) is hollow, that is, the compression rod (2) is divided into a two-layer structure of a force-bearing plate (212) and a bottom plate (211); The bottom plate (211) is connected and installed with the valve plate (3), and a pull plate (209) having a circular hole is arranged at the center of the force-bearing plate (212); At least one mounting sleeve (203) is provided on the side of the valve plate (3) for mounting the valve plate (3) on the end of the push rod (204); the valve plate (3) is capable of axially moving on the end of the push rod (204); the push rod (204) is mounted at the center of the bottom plate (211) of the pressure rod (2).

7. The valve assembly for semiconductor equipment platform according to claim 6, characterized in that: An inner rod (207) is inserted into the push rod (204), one end of the inner rod (207) is provided with a conical head (210), a pull plate (209) on the pressure rod (2) extends into the push rod (204), and the circular hole of the conical head (210) and the pull plate (209) are in an eccentric state; A limiting member (208), i.e., a limiting baffle, is provided on the inner rod (207) at one end of the conical head (210); A baffle (205) is provided on the valve body (1) at both ends of the valve hole (5).

8. The valve assembly for semiconductor equipment platform according to claim 7, characterized in that: The push rod (204) is provided with a collar (206), and a spring (202) is sleeved on the push rod (204), with two ends of the spring (202) connected to the collar (206) and the side surface of the valve plate (3).

9. The valve assembly for a semiconductor equipment platform according to any one of claims 1 to 5, characterized in that: A wedge-shaped plate (7) is disposed on the side wall of the driving end (4), and an inclined surface that fits the wedge-shaped plate (7) is disposed on one side of the driving member (405), so that the driving member (405) moves in accordance with the inclined surface of the wedge-shaped plate (7); A follower rod (701) is provided at both ends of the side surface of the driving member (405), the end of the follower rod (701) contacts the inner wall of the driving end (4), the follower rod (701) and the driving member (405) are movably plug-in assembled, and a spring (202) is provided inside.

10. The valve assembly for semiconductor equipment platform according to claim 9, characterized in that: The pressure rod (2) is a rectangular parallelepiped component and is provided with two of them, which are symmetrically located on both sides of the valve plate (3); Two dead stops (6) are arranged inside the valve body (1). The dead stops (6) are located at two ends of the pressure rod (2). An inclined surface is arranged at the bottom of the dead stops (6), and two rollers (601) are arranged at two ends of the pressure rod (2).

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