Valve assembly for semiconductor equipment platform

Abstract

The present invention discloses a valve assembly for a semiconductor equipment platform, specifically related to the field of valves. The valve assembly for a semiconductor equipment platform includes a valve body and a valve plate. The outer side of the valve body has a driving end with a driving unit. The output end of the driving unit is provided with a driving member, which drives the valve plate to move vertically or horizontally. A driving member movement stroke changing mechanism is further provided inside the driving end for changing the movement of the driving member in the vertical or horizontal direction. It also includes a pressure rod arranged inside the valve body. The pressure rod cooperates with the driving member to evenly distribute the sealing pressure on the valve plate. By providing the driving member inside the driving end, through the stroke changing mechanism, the valve plate that could originally only move vertically can be changed to horizontal movement when it runs to the position of the valve hole, that is, the movement track of the valve plate is an "L" shape, thereby solving the friction problem generated between the valve plate and the valve body during the opening and closing process in the prior art and effectively avoiding the deposits generated inside the valve.

Description

Technical Field

[0001] The present invention relates to the technical field of valves, and more specifically, to a valve assembly for a semiconductor equipment platform. Background Art

[0002] In semiconductor equipment, a rectangular transfer valve is an isolation valve designed specifically for a wafer transfer system. Its valve port has a rectangular structure to match the geometric requirements of the wafer transfer path, ensuring efficient and stable vacuum isolation and wafer exchange. It is a key component for controlling the on / off between a transfer chamber and a process chamber.

[0003] In order to solve the problem that the valve plate of the existing valve assembly is prone to deposition due to contact friction with the valve body during the opening and closing process, which affects the vacuum degree during the process, a valve assembly is proposed to change the movement mode of the existing valve plate during the opening and closing process. Summary of the Invention

[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a valve assembly for a semiconductor equipment platform. By providing a driving member inside the driving end, the driving member can, through a stroke changing mechanism, change the valve plate that could originally only perform vertical movement into horizontal movement when it reaches the position of the valve hole, thereby solving the friction problem between the valve plate and the valve body during the opening and closing process in the prior art.

[0005] To achieve the above object, the present invention provides the following technical solution: A valve assembly for a semiconductor equipment platform, including a valve body and a valve plate for opening and closing. The outside of the valve body has a driving end with a driving unit;

[0006] The output end of the driving unit is provided with a driving member, which drives the valve plate to move vertically or horizontally;

[0007] The driving end further internally provides a driving member movement stroke changing mechanism for changing the movement of the driving member in the vertical or horizontal direction;

[0008] It further includes a pressure rod arranged inside the valve body, and the pressure rod cooperates with the driving member to evenly distribute the sealing pressure on the valve plate.

[0009] In a preferred embodiment, the valve body is provided with a valve hole, and the valve plate moves to the valve hole to achieve closing.

[0010] In a preferred embodiment, the stroke changing mechanism is a stroke track opened on the side wall inside the driving end. The stroke track is a track groove concave towards the side wall of the driving end, and the driving member is arranged at the driving rod end of the driving unit;

[0011] The driving member is provided with a push rod, and one end of the push rod is installed with the valve plate.

[0012] In a preferred embodiment, mounting holes one and two are respectively formed at both ends of the driving member, mounting holes one and two intersect perpendicularly, the end of the driving rod passes through mounting hole one, and the diameter of mounting hole one is greater than the diameter of the driving rod;

[0013] Rollers one are arranged on the side surfaces at both ends of the driving member, and rollers one roll within the travel track;

[0014] Two short rods are symmetrically arranged at the end of the driving rod, and the short rods pass through mounting hole two on the driving member.

[0015] In a preferred embodiment, the travel track is divided into a closed section and an open section, and the connection between the closed section and the open section is a track groove with a section of inclined connection.

[0016] In a preferred embodiment, the pressure rod has an "X" - shaped structure, and the inside of the pressure rod is hollow - provided, that is, the pressure rod is divided into two - layer structures of a stress plate and a bottom plate;

[0017] The bottom plate is connected and installed with the valve plate, and a pull - plate with a round hole is arranged at the center of the stress plate;

[0018] At least one mounting sleeve is arranged on the side of the valve plate for mounting the valve plate at the end of the push rod. The valve plate can move axially at the end of the push rod, and the push rod is installed at the center of the bottom plate of the pressure rod.

[0019] In a preferred embodiment, an inner rod is inserted into the push rod. One end of the inner rod is provided with a tapered head. The pull - plate on the pressure rod extends into the push rod, and the tapered head and the round hole of the pull - plate are in an eccentric state;

[0020] A limiting member, that is, a limiting baffle, is arranged at one end of the inner rod where the tapered head is located;

[0021] A baffle is arranged at both ends of the valve body where the valve hole is located.

[0022] In a preferred embodiment, a collar is arranged on the push rod, and a spring is sleeved on the push rod. Both ends of the spring are connected to the collar and the side of the valve plate.

[0023] In a preferred embodiment, a wedge - shaped plate is arranged on the side wall of the driving end. One side of the driving member is provided with an inclined surface that fits the wedge - shaped plate, and the driving member moves along the inclined surface of the wedge - shaped plate;

[0024] A follower rod is arranged at both ends of the side of the driving member. The end of the follower rod contacts the inner wall of the driving end. The follower rod and the driving member are movably inserted and assembled, and a spring is arranged inside.

[0025] In a preferred embodiment, the pressure rod is a cuboid member and there are two of them, symmetrically located on both sides of the valve plate;

[0026] There are two dead stops inside the valve body. The dead stops are located at both ends of the pressure rod. There is an inclined surface at the bottom of the dead stop, and two rollers are provided at both ends of the pressure rod.

[0027] Technical effects and advantages of the present invention:

[0028] 1. By providing a driving member inside the driving end, through a stroke changing mechanism, the valve plate that could originally only achieve vertical movement can be changed to horizontal movement when it runs to the position of the valve hole, that is, the movement trajectory of the valve plate is "L" shaped, thus solving the friction problem generated between the valve plate and the valve body during the opening and closing process in the prior art and effectively avoiding the deposits generated inside the valve;

[0029] 2. In the present invention, when the valve plate runs to close the valve hole, a dedicated pressure rod is also used to ensure that the sealing levels of all parts on the long side of the entire valve plate are roughly the same. The valve plate is equipped with at least one dedicated pressure rod. The pressure rod ensures that the sealing pressure is evenly distributed on the valve plate. Description of the Drawings

[0030] Figure 1 It is a schematic diagram of the overall structure of the valve of the present invention.

[0031] Figure 2 It is a schematic diagram of the valve structure of the present invention.

[0032] Figure 3 It is a schematic diagram of the split structure of the driving member of the present invention.

[0033] Figure 4 It is a schematic diagram of the opening position of the valve hole of the present invention.

[0034] Figure 5 It is a schematic diagram of the opening position of the waist hole of the present invention.

[0035] Figure 6 It is a schematic diagram of the assembly structure of the push rod of the present invention.

[0036] Figure 7 It is Figure 6 The enlarged structure schematic diagram at A in

[0037] Figure 8 It is a schematic diagram of the overall structure of the pressure rod of the present invention.

[0038] Figure 9 It is a schematic diagram of the installation position of the wedge-shaped plate of the present invention.

[0039] Figure 10 It is a schematic diagram of the position of the pressure rod after the valve plate of the present invention is closed.

[0040] Figure 11 It is a schematic diagram of the structure of the position of the pressure rod after the valve plate of the present invention is closed.

[0041] Figure 12 Schematic diagram of the overall structure of the "X"-shaped pressure bar of the present invention.

[0042] Figure 13 is Figure 6 Enlarged structure diagram at position B in

[0043] The reference numerals are: 1, valve body; 2, pressure bar; 201, dial plate; 202, spring; 203, mounting sleeve; 204, push rod; 205, baffle; 206, collar; 207, inner rod; 208, limiting member; 209, pull plate; 210, conical head; 211, bottom plate; 212, stress plate; 3, valve plate; 4, driving end; 401, driving unit; 402, travel track; 4021, closing section; 4022, opening section; 403, mounting hole 1; 404, driving rod; 405, driving member; 406, mounting hole 2; 407, roller 1; 408, partition; 409, short rod; 410, chute; 411, waist-shaped hole; 5, valve hole; 6, dead stop; 601, roller 2; 7, wedge plate; 701, follower rod. Detailed implementation manners

[0044] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0045] As Figure 1 to Figure 7 shown, the valve assembly for a semiconductor equipment platform includes a valve body 1. A rectangular valve hole 5 for wafer transfer is opened on the valve body 1. A valve plate 3 is movably arranged inside the valve body 1 at the position of the valve hole 5. The opening and closing of the valve hole 5 are realized by the movement of the valve plate 3.

[0046] To achieve the movement of the valve plate 3, a driving end 4 for driving the movement of the valve plate 3 is arranged on the side of the valve body 1. A driving unit 401 is assembled inside the driving end 4, which can be a driving device such as a cylinder or a hydraulic cylinder in application.

[0047] In the existing wafer valve assembly, deposits are likely to be generated on the valve plate 3, affecting the vacuum degree during the process, and the installation thickness dimension of the gate valve is large (the thickness can be controlled within 150 mm).

[0048] To avoid the sealing ring during the opening and closing process of the valve plate 3, as well as the friction generated by the contact between the valve plate 3 and the valve body 1, resulting in the damage of the sealing ring and the deposits generated by the friction, the movement path of the valve plate 3 in the valve body 1 in the technical solution of the present invention adopts an "L"-shaped movement trajectory, that is, the valve plate 3 does not contact the valve body 1 during the vertical up and down movement, and when it moves to the valve hole 5, it moves horizontally to complete the closing of the valve hole 5, thereby reducing the friction between the valve plate 3 and the valve body 1 and avoiding the generation of a large amount of deposits, which affects the vacuum degree of the process.

[0049] To achieve the "L"-shaped movement trajectory of the valve plate 3, a stroke track 402 is provided on the inner side wall of the driving end 4. The stroke track 402 is a track groove concave towards the side wall of the driving end 4, and a driving member 405 is provided at the end of the driving rod 404 of the driving unit 401. In the present invention, the driving member 405 is provided in a cuboid structure, and a push rod 204 is installed on the driving member 405. One end of the push rod 204 is installed with the valve plate 3 to realize the movement of driving the valve plate 3.

[0050] Mounting holes one 403 and mounting holes two 406 are respectively opened at both ends of the driving member 405. The mounting holes one 403 and the mounting holes two 406 are vertically intersecting. The end of the driving rod 404 passes through the mounting holes one 403, and the diameter of the mounting holes one 403 is larger than the diameter of the driving rod 404 to ensure that the driving member 405 can move radially on the driving rod 404.

[0051] At the same time, rollers one 407 are provided on the side surfaces at both ends of the driving member 405, and the rollers one 407 are located inside the stroke track 402 and roll.

[0052] To ensure that the driving member 405 can move horizontally while following the vertical movement of the driving rod 404, two short rods 409 are symmetrically provided at the end of the driving rod 404. The short rods 409 pass through the mounting holes two 406 on the driving member 405. During operation, the driving member 405 can move vertically with the driving rod 404. When the movement direction is changed by the stroke track 402, the driving member 405 can move axially along the short rods 409, that is, horizontally.

[0053] Reference Figure 13 , the stroke track 402 is divided into a closed section 4021 and an open section 4022. The connection between the closed section 4021 and the open section 4022 is a track groove with a section of inclined connection. That is, when the driving unit 401 carries the driving member 405 to move in the open section 4022 of the stroke track 402, the valve plate 3 does not contact the valve body 1. When it runs to the closed section 4021, the valve plate 3 contacts the valve body 1 and completes the closing of the valve hole 5.

[0054] Such as Figure 12As shown, in the present invention, to ensure that after the valve plate 3 is closed, the valve plate 3 can closely adhere to the valve body 1 and ensure that the sealing pressure is evenly distributed on the valve plate 3, a special pressure bar 2 is provided on the valve plate 3. The pressure bar 2 is in an "X" - shaped structure. The inside of the pressure bar 2 is hollow - set, that is, the pressure bar 2 is divided into two - layer structures of a stress plate 212 and a bottom plate 211. Its bottom plate 211 is used for connecting and installing with the valve plate 3. A pull - plate 209 with a round hole is provided at the center of the stress plate 212. When the pull - plate 209 is subjected to a pulling force, the pressure will be evenly distributed to the four points of the pressure bar 2, ensuring that the pressure bar 2 evenly distributes the sealing pressure on the valve plate 3.

[0055] In the present invention, at least one mounting sleeve 203 is provided on the side of the valve plate 3 for mounting the valve plate 3 at the end of the push rod 204. After the push rod 204 is installed through the mounting sleeve 203, the valve plate 3 can axially move at the end of the push rod 204. At the same time, the installation of the push rod 204 is located at the center of the bottom plate 211 of the pressure bar 2.

[0056] An inner rod 207 is inserted into the inside of the push rod 204. One end of the inner rod 207 is provided with a tapered head 210. The pull - plate 209 on the pressure bar 2 extends into the inside of the push rod 204. In the initial state, the tapered head 210 and the round hole of the pull - plate 209 are in an eccentric state, but the end of the tapered head 210 does not break away from the round hole of the pull - plate 209. When the inner rod 207 moves into the push rod 204, the tapered head 210 is inserted into the round hole of the pull - plate 209, realizing the pulling of the stress plate 212 to ensure that the four points of the pressure bar 2 can be evenly stressed.

[0057] To ensure that the inner rod 207 does not fall out of the push rod 204 during the assembly of the valve body 1, a limiting member 208, that is, a limiting baffle, is provided at one end of the inner rod 207 where the tapered head 210 is located, to prevent the inner rod 207 from falling off the end of the push rod 204. At the same time, the limiting member 208 can prevent the inner rod 207 from being inserted into the round hole of the pull - plate 209. When the inner rod 207 is not under pressure, the stress plate 212 of the pressure bar 2 will bulge outwards, forcing the inner rod 207 to reset.

[0058] A baffle 205 is provided at both ends of the valve hole 5 on the valve body 1. After the valve plate 3 is pushed by the push rod 204 and contacts the baffle 205, it is accurately positioned. At this time, the push rod 204 can still continue to push, enabling the inner rod 207 in the push rod 204 to contact the inner wall of the valve body 1 and move into the push rod 204 so that its tapered head 210 is inserted into the round hole of the pull - plate 209.

[0059] A collar 206 is provided on the push rod 204, and a spring 202 is sleeved on the push rod 204. Both ends of the spring 202 are connected to the collar 206 and the side of the valve plate 3. After the push rod 204 pushes the valve plate 3 to run to the valve hole 5, at this time, if the push rod 204 continues to push, it will compress the spring 202, enabling the inner rod 207 to contact the inner wall of the valve body 1.

[0060] To ensure that the push rod 204 can carry the valve plate 3 to move and open the valve hole 5 when contracting, a dial plate 201 is provided on the circumferential surface of the end of the push rod 204. This dial plate 201 is used to carry the valve plate 3 out of the closing of the valve hole 5 when the push rod 204 contracts.

[0061] To ensure that the valve body 1 and the driving end 4 are two independent working chambers, a kidney-shaped hole 411 is opened at the connection between the valve body 1 and the driving end 4, and a sliding groove 410 is provided outside the valve body 1. A partition plate 408 is slidably assembled, and the partition plate 408 can slide horizontally along the sliding groove 410. At the same time, the push rod 204 passes through the partition plate 408 and the kidney-shaped hole 411, and the partition plate 408 moves along with the push rod 204.

[0062] In the present invention, when the rollers 407 at both ends of the driving member 405 run to the closing section 4021, the valve plate 3 contacts the baffle 205, and the valve plate 3 closes the valve hole 5. When the rollers 407 continue to move along the closing section 4021, the push rod 204 moves to make the inner rod 207 contact the side wall of the valve body 1, realizing the downward movement of the force-receiving plate 212 of the pressure rod 2.

[0063] As Figures 8 to 11 shown, as another implementation manner for controlling the movement direction of the driving member 405 in the valve assembly, a wedge-shaped plate 7 is provided on the side wall of the driving end 4, and an inclined surface that fits the wedge-shaped plate 7 is provided on one side of the driving member 405. The driving member 405 moves along with the inclined surface of the wedge-shaped plate 7. A follower rod 701 is provided at both ends of the side surface of the driving member 405, and the end of the follower rod 701 contacts the inner wall of the driving end 4. The follower rod 701 and the driving member 405 are movably inserted and assembled, and a spring 202 (not shown in the figure) is provided inside to ensure that the follower rod 701 can expand and contract when the driving member 405 moves under the action of the wedge-shaped plate 7, ensuring that the driving member 405 can closely move along the wedge-shaped plate 7 to complete the "L"-shaped movement trajectory of the valve plate 3.

[0064] In this embodiment, the pressure rod 2 is a rectangular parallelepiped member and there are two of them, symmetrically located on both sides of the valve plate 3.

[0065] Two dead stops 6 are provided inside the valve body 1. The positions of the dead stops 6 are at both ends of the pressure rod 2. The bottom of the dead stop 6 is provided with an inclined surface, and roller two 601 is provided at both ends of the pressure rod 2. When the driving member 405 carries the valve plate 3 to run to the valve hole 5, the roller two 601 at both ends of the pressure rod 2 contacts the inclined surface of the dead stop 6. By applying pressure to both ends of the pressure rod 2, it is ensured that multiple pressure rods 2 can evenly distribute the sealing pressure on the valve plate 3.

[0066] The following points should be noted: First, in the description of this application, it should be noted that unless otherwise specified and defined, the terms "installed", "connected", and "linked" should be understood in a broad sense. It can be a mechanical connection or an electrical connection, or it can be the communication inside two components. It can be directly connected. The terms "upper", "lower", "left", "right", etc. are only used to represent the relative position relationship. When the absolute position of the object being described changes, the relative position relationship may change;

[0067] Second, in the attached drawings of the disclosed embodiments of the present invention, only the structures related to the disclosed embodiments are involved. For other structures, reference can be made to the general design. Without conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

[0068] Finally, the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A valve assembly for a semiconductor equipment platform, comprising a valve body (1) and a valve plate (3) for switching, characterized in that: The valve body (1) has a driving end (4) with a driving unit (401) on the outside thereof; A driving member (405) is provided at the output end of the driving unit (401), and the driving member (405) drives the valve plate (3) to move vertically or horizontally; The valve body (1) is provided with a valve hole (5), and the valve plate (3) moves to the valve hole (5) to achieve closing; A driving member (405) movement stroke changing mechanism is also provided inside the driving end (4) for changing the movement of the driving member (405) in a vertical or horizontal direction; The stroke changing mechanism is a stroke track (402) provided on the side wall inside the driving end (4), the stroke track (402) being a track groove concave toward the side wall of the driving end (4), and the driving member (405) being provided at the end of the driving rod (404) of the driving unit (401); A push rod (204) is provided on the driving member (405), and one end of the push rod (204) is mounted on the valve plate (3); The driving member (405) has a mounting hole 1 (403) and a mounting hole 2 (406) respectively formed at both ends, the mounting hole 1 (403) and the mounting hole 2 (406) intersect each other vertically, the end of the driving rod (404) passes through the mounting hole 1 (403), and the diameter of the mounting hole 1 (403) is larger than the diameter of the driving rod (404); Roller 1 (407) is disposed on the side surfaces of both ends of the driving member (405), and the roller 1 (407) is located in the travel track (402) and rolls; Two short rods (409) are symmetrically arranged at the end of the driving rod (404), and the short rods (409) pass through the second mounting hole (406) on the driving member (405); The travel track (402) is divided into a closed section (4021) and an open section (4022), and the connection between the closed section (4021) and the open section (4022) is a track groove having an inclined connection; It also includes a pressure rod (2) arranged in the valve body (1), the pressure rod (2) cooperates with the driving member (405) to evenly distribute the sealing pressure on the valve plate (3).

2. The valve assembly for semiconductor equipment platform according to claim 1, characterized in that: The compression rod (2) has an "X"-shaped structure, and the interior of the compression rod (2) is hollow, that is, the compression rod (2) is divided into a two-layer structure of a force-bearing plate (212) and a bottom plate (211); The bottom plate (211) is connected and installed with the valve plate (3), and a pull plate (209) having a circular hole is arranged at the center of the force-bearing plate (212); At least one mounting sleeve (203) is provided on the side of the valve plate (3) for mounting the valve plate (3) on the end of the push rod (204); the valve plate (3) is capable of axially moving on the end of the push rod (204); the push rod (204) is mounted at the center of the bottom plate (211) of the pressure rod (2).

3. The valve assembly for semiconductor equipment platform according to claim 2, characterized in that: An inner rod (207) is inserted into the push rod (204), one end of the inner rod (207) is provided with a conical head (210), a pull plate (209) on the pressure rod (2) extends into the push rod (204), and the circular hole of the conical head (210) and the pull plate (209) are in an eccentric state; A limiting member (208), i.e., a limiting baffle, is provided on the inner rod (207) at one end of the conical head (210); A baffle (205) is provided on the valve body (1) at both ends of the valve hole (5).

4. The valve assembly for semiconductor equipment platform according to claim 2, characterized in that: The push rod (204) is provided with a collar (206), and a spring (202) is sleeved on the push rod (204), with two ends of the spring (202) connected to the collar (206) and the side surface of the valve plate (3).

5. The valve assembly for semiconductor equipment platform according to claim 4, characterized in that: A wedge-shaped plate (7) is disposed on the side wall of the driving end (4), and an inclined surface that fits the wedge-shaped plate (7) is disposed on one side of the driving member (405), so that the driving member (405) moves in accordance with the inclined surface of the wedge-shaped plate (7); A follower rod (701) is provided at both ends of the side surface of the driving member (405), the end of the follower rod (701) contacts the inner wall of the driving end (4), the follower rod (701) and the driving member (405) are movably plug-in assembled, and a spring (202) is provided inside.

6. The valve assembly for semiconductor equipment platform according to claim 1 or 4, characterized in that: The pressure rod (2) is a rectangular parallelepiped component and is provided with two of them, which are symmetrically located on both sides of the valve plate (3); Two dead stops (6) are arranged inside the valve body (1). The dead stops (6) are located at two ends of the pressure rod (2). An inclined surface is arranged at the bottom of the dead stops (6), and two rollers (601) are arranged at two ends of the pressure rod (2).

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