Adjusting mechanism of monochromator crystal

Abstract

The monochromator crystal adjusting mechanism comprises a base, a flexible hinge wheel, a first driving mechanism and a second driving mechanism, the flexible hinge wheel comprises an inner wheel, an outer wheel and a plurality of flexible hinge joints, the inner wheel is located in the outer wheel, the two ends of each flexible hinge joint are connected with the inner wheel and the outer wheel respectively, and the flexible hinge joints can elastically deform under the action of external force; the inner wheel and the first driving mechanism are both fixed to the base, and the first driving mechanism is connected with the outer wheel and used for applying Z-direction force to the outer wheel so that the outer wheel can rotate around the X axis relative to the inner wheel. A rotating piece is arranged on the outer wheel, is rotationally connected with the outer wheel and can rotate around the Y axis relative to the outer wheel; the second driving mechanism is fixed to the outer wheel, connected with the rotating piece and used for driving the rotating piece to rotate around the Y axis. And a clamping mechanism is fixed on the rotating piece and is used for fixing the monochromator crystal. The adjusting mechanism of the monochromator crystal is more compact in structure, and the space utilization rate in a monochromator can be improved to a great extent.

Description

Technical Field

[0001] The present invention relates to the technical field of monochromators, and more particularly to an adjustment mechanism for a monochromator crystal. Background Art

[0002] Monochromator is the core equipment for energy selection and monochromation in synchrotron radiation and hard X-ray free electron laser beam lines. Its performance directly determines the stability of monochromatic light and ultimately affects the quality and reliability of experimental methods such as imaging, spectroscopy and scattering.

[0003] In traditional monochromator design, the monochromator crystal is the core component, and the adjustment of its installation angle (including pitch angle and roll angle) is crucial to achieve the selection of specific wavelengths and optical path optimization. The monochromator crystal is usually installed on an adjustment mechanism, and the pitch angle (pitch) and roll angle (roll) of the crystal are adjusted through the adjustment mechanism to make it meet the Bragg diffraction conditions to select monochromatic light of a specific wavelength, and fine-tune the spot position and optimize the beam quality.

[0004] However, the existing adjustment mechanism occupies a large space. When it is installed in the monochromator, it will affect the space utilization inside the monochromator, resulting in restrictions on the optical path design, especially the canted beam line design and the monochromator design, affecting the overall compactness and flexibility of the system. Summary of the invention

[0005] The object of the present invention is to provide an adjustment mechanism for a monochromator crystal, which has a more compact structure and can greatly improve the space utilization rate inside the monochromator.

[0006] Based on the above-mentioned purpose, the present invention provides an adjustment mechanism for a monochromator crystal, comprising a base, a flexible hinge wheel, a first driving mechanism and a second driving mechanism, the flexible hinge wheel comprising an inner wheel, an outer wheel and a plurality of flexible hinge joints, the inner wheel being located inside the outer wheel, the two ends of each of the flexible hinge joints being respectively connected to the inner wheel and the outer wheel and being elastically deformable under the action of an external force, the inner wheel and the first driving mechanism being fixed on the base, the first driving mechanism being connected to the outer wheel and being used to apply a force in the Z direction to the outer wheel so that the outer wheel rotates around the X axis relative to the inner wheel; a rotating member is provided on the outer wheel, the rotating member is rotatably connected to the outer wheel and can rotate around the Y axis relative to the outer wheel; the second driving mechanism is fixed on the outer wheel and connected to the rotating member, being used to drive the rotating member to rotate around the Y axis; a clamping mechanism is fixed on the rotating member, and the clamping mechanism is used to fix the monochromator crystal.

[0007] Further, the first driving mechanism includes a first telescopic component and a second telescopic component, the first telescopic component includes a first motor and a first motor head, the first motor is connected to the first motor head so that the first motor head moves in the Z direction, the second telescopic component includes a first sinusoidal rod, a first piezoelectric actuator and a first elastic member, the first piezoelectric actuator has a first piezoelectric actuator head, the first piezoelectric actuator is configured to move the first piezoelectric actuator head in the Z direction based on the piezoelectric effect, the first sinusoidal rod is fixed on the first piezoelectric actuator and fixedly connected to the outer wheel, the first piezoelectric actuator head and the first motor head are supported against each other, and the first elastic member is respectively connected to the base and the first piezoelectric actuator, for providing an elastic force toward the first motor head to the first piezoelectric actuator so that the first motor head and the first piezoelectric actuator head remain in contact.

[0008] Furthermore, the second driving mechanism includes a fixed frame, a second motor, a second motor head, a motion conversion component, a second sinusoidal rod, a second piezoelectric actuator and a second elastic member, the fixed frame is fixedly connected to the outer wheel, the second motor is fixed to the fixed frame, the second motor is connected to the second motor head, and is used to make the second motor head move in the Y direction, the second motor head is connected to the motion conversion component, the second sinusoidal rod is respectively fixed to the fixed frame and the second piezoelectric actuator, the second piezoelectric actuator has a second piezoelectric actuator head, and the second piezoelectric actuator is configured based on piezoelectric effect The second piezoelectric actuator head moves in the X direction in response, the second piezoelectric actuator head is connected to the motion conversion assembly, and the second elastic member is respectively connected to the second piezoelectric actuator and the fixed frame to provide an elastic force toward the fixed frame to the second piezoelectric actuator; the motion conversion assembly is used to move in the X direction in response to the movement of the second motor head in the Y direction, and to move the second piezoelectric actuator head, the second piezoelectric actuator and the second sinusoidal rod in the X direction; the second sinusoidal rod is connected to the rotating member, and the movement of the second sinusoidal rod in the X direction causes the rotating member to rotate around the Y axis.

[0009] Furthermore, the first motor is fixed on the base through a first fixing base.

[0010] Furthermore, a second fixing seat is provided on the base, one end of the first elastic member is connected to the second fixing seat, and the other end of the first elastic member is connected to the first piezoelectric actuator.

[0011] Further, the motion conversion assembly includes a shell, a first wedge block and a second wedge block, the shell is fixed on the fixed frame, the first wedge block and the second wedge block are both slidably arranged in the shell, the first wedge block can move in the Y direction relative to the shell, and the second wedge block can move in the X direction relative to the shell, the first wedge block has a first inclined surface, the second wedge block has a second inclined surface, the first inclined surface and the second inclined surface are slidably matched, the second motor head is connected to the first wedge block, and the second piezoelectric actuator head supports the second wedge block.

[0012] Furthermore, a support is provided on the outer wheel, and the rotating member is rotatably connected to the outer wheel via a bearing.

[0013] Furthermore, the outer wheel is provided with a first angle encoder, and the first angle encoder is used to measure the rotation angle of the outer wheel; the rotating member is provided with a second angle encoder, and the second angle encoder is used to measure the rotation angle of the rotating member.

[0014] Furthermore, a first limiting structure is provided on the outer wheel, and a second limiting structure and a third limiting structure are provided on the base, the second limiting structure and the third limiting structure are arranged relatively to each other, the first limiting structure is located between the second limiting structure and the third limiting structure, and the first limiting structure cooperates with the second limiting structure and the third limiting structure respectively to limit the position of the first limiting structure and the rotation angle of the outer wheel.

[0015] Furthermore, a fourth limiting structure is provided on the fixing frame, and a fifth limiting structure is provided on the rotating member. The fourth limiting structure and the fifth limiting structure cooperate with each other to limit the rotation angle of the rotating member.

[0016] In the adjustment mechanism of the monochromator crystal of the present invention, the motion conversion component of the second drive mechanism can convert the Y-direction motion into the X-direction motion, so that the second motor, the second motor head, etc. can be arranged along the Y-direction, and the second piezoelectric actuator is arranged along the X-direction, thereby greatly optimizing the space limitation of the second drive mechanism; the first drive mechanism is arranged along the Z-direction as a whole and does not interfere with the second drive mechanism, so the space utilization rate is higher and the structure is more compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A structural schematic diagram of an adjustment mechanism of a monochromator crystal according to an embodiment of the present invention from one viewing angle; Figure 2 is a structural schematic diagram of another viewing angle of the adjustment mechanism of the monochromator crystal according to an embodiment of the present invention; Figure 3This is a schematic structural diagram of the adjustment mechanism of the monochromator crystal according to an embodiment of the present invention after the clamping mechanism is removed; Figure 4 This is a schematic structural diagram of the adjustment mechanism of the monochromator crystal according to an embodiment of the present invention after removing the clamping mechanism and the rotating member; Figure 5 It is a structural schematic diagram of a flexible hinge wheel of an adjustment mechanism of a monochromator crystal according to an embodiment of the present invention; Figure 6 is a schematic structural diagram of a second driving mechanism of an adjustment mechanism of a monochromator crystal according to an embodiment of the present invention; Figure 7 for Figure 6 A schematic diagram of the structure of the second driving mechanism after the fixing frame is removed; Figure 8 for Figure 6 A schematic diagram of the structure of the second driving mechanism after removing the housing of the motion conversion assembly. DETAILED DESCRIPTION

[0018] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings and described in detail.

[0019] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the present invention provides an adjustment mechanism for a monochromator crystal, comprising a base 100, a flexible hinge wheel 200, a first driving mechanism 300 and a second driving mechanism 400, wherein the flexible hinge wheel 200 comprises an inner wheel 210, an outer wheel 220 and a plurality of flexible hinge sections 230, wherein the inner wheel 210 is located inside the outer wheel 220, and each flexible hinge section 230 is arranged around the inner wheel 210, and each two ends of each flexible hinge section 230 are respectively fixedly connected to the inner wheel 210 and the outer wheel 220, so that the inner wheel 210 and the outer wheel 220 are connected by each flexible hinge section. The hinge joints 230 are connected, and both ends of each flexible hinge joint 230 can be elastically deformed under the action of external force. The inner wheel 210 is fixed on the base 100, and the first driving mechanism 300 is also fixed on the base 100. The first driving mechanism 300 is connected to the outer wheel 220. The inner wheel 210 extends along the X direction. The first driving mechanism 300 is configured to apply a Z-direction force to the outer wheel 220. Under the action of this force, both ends of each flexible hinge joint 230 will be deformed, so that the outer wheel 220 can rotate relative to the inner wheel 210, that is, the outer wheel 2 20 will rotate around the X-axis; a rotating member 500 is provided on the outer wheel 220, the rotating member 500 is rotatably connected to the outer wheel 220, and can rotate around the Y-axis relative to the outer wheel 220, the second driving mechanism 400 is fixed on the outer wheel 220, the second driving mechanism 400 is connected to the rotating member 500, and is used to drive the rotating member 500 to rotate around the Y-axis relative to the outer wheel 220; a clamping mechanism 600 is fixed on the rotating member 500, and the clamping mechanism 600 is used to fix the monochromator crystal 610 (the monochromator crystal 610 is located in the XY plane), so When the outer wheel 220 rotates around the X-axis, the rotating member 500, the clamping mechanism 600 and the monochromator crystal 610 can also rotate around the X-axis. When the rotating member 500 rotates around the Y-axis, the clamping mechanism 600 and the monochromator crystal 610 can also rotate around the Y-axis. Therefore, the monochromator crystal 610 can be driven to rotate around the X-axis by the first driving mechanism 300, thereby adjusting the projection angle of the monochromator crystal 610. The monochromator crystal 610 can be driven to rotate around the Y-axis by the second driving mechanism 400, thereby adjusting the roll angle of the monochromator crystal 610.

[0020] In some embodiments, both ends of each flexible hinge joint 230 are formed as a weakened structure 231, that is, the strength of the weakened structure 231 is weaker than that of other parts of the flexible hinge joint 230. In this way, when the outer wheel 220 is acted upon by the driving force of the first driving mechanism 300, the force is transmitted to the weakened structure 231, causing the weakened structure 231 to deform, thereby causing the outer wheel 220 to rotate relative to the inner wheel 210.

[0021] In some embodiments, the first driving mechanism 300 includes a first telescopic assembly 310 and a second telescopic assembly 320. The first telescopic assembly 310 includes a first motor 311 and a first motor head 312. The first motor 311 is fixed to the base 100 through a first fixing seat 313 and is connected to the first motor head 312 through a transmission mechanism (not shown in the figure) so that the first motor head 312 moves back and forth in the Z direction. The second telescopic assembly 320 includes a first sinusoidal rod 321, a first piezoelectric actuator 322, and a first elastic member 323. The first piezoelectric actuator 322 has a first piezoelectric actuator head 3221. The first piezoelectric actuator 322 is configured to enable the first piezoelectric actuator head 3221 to move back and forth in the Z direction based on the piezoelectric effect. The first sinusoidal rod 321 is fixed on the first piezoelectric actuator 322 and fixedly connected to the outer wheel 220. The first piezoelectric actuator head 3221 and the first motor head 312 are supported against each other. The first elastic member 323 is respectively connected to the base 100 and the first piezoelectric actuator 322, and is used to provide an elastic force to the first piezoelectric actuator 322 toward the first motor head 312. Under the action of the elastic force, the first piezoelectric actuator head 3221 will maintain close contact with the first motor head 312.

[0022] The driving principle of the first driving mechanism 300 is as follows: The adjustment range of the first telescopic assembly 310 is greater than that of the second telescopic assembly 320 , but the precision is less than that of the second telescopic assembly 320 , so coarse adjustment can be performed by the first telescopic assembly 310 , and then fine adjustment can be performed by the second telescopic assembly 320 . Specifically, during coarse adjustment, the first motor 311 can be used to move the first motor head 312 in the Z direction. The movement of the first motor head 312 will move the first sinusoidal rod 321, and the first sinusoidal rod 321 will cause the outer wheel 220 to rotate around the X-axis, thereby adjusting the pitch angle of the monochromator crystal 610. During the movement of the first motor head 312, the first piezoelectric actuator 322 will not cause the first piezoelectric actuator head 3221 to move in the Y direction, but the second telescopic assembly 320 as a whole will move synchronously with the movement of the first motor head 312. For example, when the first motor head 312 moves in a direction away from the first motor 311, the first motor head 312 will push the first piezoelectric actuator head 3221 to cause the second telescopic assembly 320 to move in a direction away from the first motor 311. When the first motor head 312 moves in a direction close to the first motor 311, the second telescopic assembly 320 will move in a direction close to the first motor 311 under the action of the first elastic member 323. During fine adjustment, the first motor head 312 remains stationary, and the first piezoelectric actuator 322 causes the first piezoelectric actuator head 3221 to move in the Z direction. Since the first piezoelectric actuator head 3221 is supported by the first motor head 312, the first piezoelectric actuator head 3221 will remain stationary, and the other parts of the first piezoelectric actuator 322 except the first piezoelectric actuator head 3221 and the first sinusoidal rod 321 will move in the Z direction relative to the first motor head 312. The movement of the first sinusoidal rod 321 will cause the outer wheel 220 to move around the X axis, thereby achieving fine adjustment. The movement amount of the first motor head 312 in the Z direction and the rotation angle of the outer wheel 220 are in a sinusoidal relationship.

[0023] In some embodiments, a second fixed seat 324 may be fixed on the base 100, one end of the first elastic member 323 is connected to the second fixed seat 324, and the other end is connected to the first piezoelectric actuator 322, and the first elastic member 323 is in a compressed state, thereby providing an elastic force to the first piezoelectric actuator 322 toward the first motor head 312.

[0024] like Figure 6 , Figure 7 and Figure 8As shown, the second driving mechanism 400 may include a fixed frame 410, a second motor 420, a second motor head 430, a motion conversion assembly 440, a second sinusoidal rod 450, a second piezoelectric actuator 460 and a second elastic member 470. The fixed frame 410 is fixedly connected to the outer wheel 220, the second motor 420 is fixed on the fixed frame 410, and the second motor 420 can be connected to the second motor head 430 through a transmission mechanism (not shown in the figure) so that the second motor head 430 moves back and forth in the Y direction; the second motor head 430 is connected to the motion conversion assembly 440, the second sinusoidal rod 450 is fixed on the fixed frame 410, the second piezoelectric actuator 460 is fixed to the second sinusoidal rod 450, the second piezoelectric actuator 460 has a second piezoelectric actuator head 461, and the second piezoelectric actuator 460 is configured to make the second piezoelectric actuator head 461 move back and forth in the X direction based on the piezoelectric effect. The actuator head 461 is connected to the motion conversion component 440, and the second elastic member 470 is respectively connected to the second piezoelectric actuator 460 and the fixed frame 410, and is used to provide an elastic force toward the fixed frame 410 to the second piezoelectric actuator 460; the motion conversion component 440 is used to move in the X direction in response to the movement of the second motor head 430 in the Y direction (that is, converting the Y-direction movement of the second motor head 430 into its own X-direction movement), and the movement of the motion conversion component 440 in the X direction causes the second piezoelectric actuator head 461, the second piezoelectric actuator 460 and the second sinusoidal rod 450 to move together in the X direction; the second sinusoidal rod 450 is connected to the rotating member 500, and when the second sinusoidal rod 450 moves in the X direction, the rotating member 500 will rotate around the Y axis, and the rotation of the rotating member 500 around the Y axis will cause the clamping mechanism 600 and the monochromator crystal 610 to rotate together around the Y axis, thereby adjusting the roll angle of the monochromator crystal 610.

[0025] In some embodiments, the motion conversion assembly 440 includes a housing 441, a first wedge 442, and a second wedge 443. The housing 441 is fixed to the fixing frame 410. The first wedge 442 and the second wedge 443 are both slidably disposed in the housing 441. The first wedge 442 can move relative to the housing 441 in the Z direction, and the second wedge 443 can move relative to the housing 441 in the X direction. The first wedge 442 has a first inclined surface, and the second wedge 443 has a second inclined surface. The first inclined surface and the second inclined surface are The inclined surfaces fit each other and slide together (that is, the two can slide relative to each other). The second motor head 430 is connected to the first wedge block 442 to make the first wedge block 442 move in the Y direction. When the first wedge block 442 moves in the Y direction, the second wedge block 443 will move in the X direction, and the second piezoelectric actuator head 461 will support the second wedge block 443. In this way, when the second wedge block 443 moves in the X direction, the second piezoelectric actuator head 461, the second piezoelectric actuator 460, and the second sinusoidal rod 450 will also move in the X direction.

[0026] In some embodiments, the sliding between the first inclined surface of the first wedge block 442 and the second inclined surface of the second wedge block 443 can be achieved by means of a guide rail and a chute, that is, one of them is provided with a guide rail and the other is provided with a chute, and the guide rail slides in the chute, so as to achieve a sliding fit. The sliding between the first wedge block 442 and the second wedge block 443 and the housing 441 can be achieved by a precision guiding slider to ensure the straight-line requirement during the movement process. The relationship between the movement step Sx in the X direction and the movement step Sy in the Y direction is: Sx = Sy × tanα, where α is the angle between the first inclined surface and the YZ plane. When α < 45°, Sx < Sy. When the minimum step of the second motor is certain, a higher-precision resolution requirement can be achieved; when α > 45°, Sx > Sy. When the total stroke of the motor is certain, a larger adjustment range requirement can be achieved.

[0027] The driving principle of the second driving mechanism 400 is as follows: The movement step of the second motor head 430 is greater than that of the second piezoelectric actuator head 461. Therefore, coarse adjustment can be performed by the movement of the second motor head 430, and fine adjustment can be performed by the movement of the second piezoelectric actuator head 461. Specifically, during coarse adjustment, the second motor 420 can be used to move the second motor head 430 in the Y direction. The second motor head 430 will drive the first wedge block 442 to move in the Y direction together. Due to the movement of the first wedge block 442 in the Y direction, relative sliding will occur between the first wedge block 442 and the second wedge block 443. The second wedge block 443 will move in the X direction and drive the second piezoelectric actuator head 461, the second piezoelectric actuator 460, and the second sine rod 450 to move in the X direction together. The movement of the second sine rod 450 in the X direction will cause the rotating member 500 to rotate around the Y axis, so that the monochromator crystal 610 rotates around the Y axis to achieve the adjustment of the roll angle. During fine adjustment, the second motor 420 stops running and the second motor head 430 remains stationary. Correspondingly, the first wedge block 442 and the second wedge block 443 also remain stationary. The second piezoelectric actuator 460 moves the second piezoelectric actuator head 461 in the X direction. Since the second piezoelectric actuator head 461 always abuts against the second wedge block 443 under the action of the second elastic member 470 and the second wedge block 443 remains stationary, the second piezoelectric actuator head 461 will also remain stationary. The second piezoelectric actuator 460 (the part other than the second piezoelectric actuator head 461) will drive the second sine rod 450 to move in the X direction together, so that the monochromator crystal 610 rotates around the Y axis; for example, when the second piezoelectric actuator 460 extends the second piezoelectric actuator head 461, the second piezoelectric actuator 460 will overcome the elastic force of the second elastic member 470 and move away from the fixed frame 410 in the X direction. When the second piezoelectric actuator 460 retracts the second piezoelectric actuator head 461, the second piezoelectric actuator 460 approaches the fixed frame 410 under the action of the elastic force of the second elastic member 470.

[0028] In some embodiments, the second elastic member 470 is a spring, which is in a stretched state, with one end fixed to the housing of the second piezoelectric actuator 460 and the other end fixed to the fixing frame 410. The tension of the spring can enable the second piezoelectric actuator head 461 to press against the second wedge block 443, and the two will always maintain close contact.

[0029] In some embodiments, a support 221 may be fixed on the outer wheel 220 , the first sinusoidal rod 321 is fixedly connected to the support 221 , and the rotating member 500 is rotatably connected to the outer wheel 220 via a bearing 222 .

[0030] The adjustment stroke of the first piezoelectric actuator 322 and the second piezoelectric actuator 460 can reach 500 μrad, and the resolution can reach 10 nrad, which can be applied to a high-precision, high-stability and high-resolution monochromator.

[0031] In some embodiments, the outer wheel 220 may be equipped with a first angle encoder 700, through which the rotation angle of the outer wheel 220 (i.e., the rotation angle of the monochromator crystal 610 around the X-axis) can be measured, and the first angle encoder 700, the first motor 311 and the first piezoelectric actuator 322 can form a control closed loop with a control device (not shown in the figure), thereby automatically adjusting the pitch angle of the monochromator crystal 610. The rotating member 500 may be provided with a second angle encoder for measuring the rotation angle of the rotating member 500 (i.e., the rotation angle of the monochromator crystal 610 around the Y-axis), and the second angle encoder, the second motor 420 and the second piezoelectric actuator 460 can form a control closed loop with the control device, thereby automatically adjusting the roll angle of the monochromator crystal 610.

[0032] In some embodiments, a first limiting structure 223 may be provided on the outer wheel 220, and a second limiting structure 110 and a third limiting structure 120 may be provided on the base 100, the second limiting structure 110 and the third limiting structure 120 are arranged relatively to each other, and the first limiting structure 223 is located between the second limiting structure 110 and the third limiting structure 120, and the first limiting structure 223 cooperates with the second limiting structure 110 and the third limiting structure 120 respectively to limit the position of the first limiting structure 223, thereby limiting the rotation angle of the outer wheel 220. For example, when the outer wheel 220 rotates along the first direction until the first limiting structure 223 contacts the second limiting structure 110, the first limiting structure 223 will be limited by the second limiting structure 110, and the outer wheel 220 will not be able to continue to rotate along the first direction. When the outer wheel 220 rotates along the second direction opposite to the first direction until it contacts the third limiting structure 120, the first limiting structure 223 will be limited by the third limiting structure 120, and the outer wheel 220 will not be able to continue to rotate along the second direction. Therefore, the first limiting structure 223 can only move between the second limiting structure 110 and the third limiting structure 120, and the rotation angle of the outer wheel 220 is also limited thereby.

[0033] In some embodiments, a fourth limiting structure is disposed on the fixing frame 410 , and a fifth limiting structure is disposed on the rotating member 500 . The fourth limiting structure and the fifth limiting structure 500 cooperate with each other to limit the rotation angle of the rotating member 500 .

[0034] In the adjustment mechanism of the monochromator crystal in the embodiment of the present invention, the motion conversion component 440 of the second drive mechanism 400 can convert the Y-direction motion into the X-direction motion, so that the second motor 420, the second motor head 430, etc. can be arranged along the Y-direction, and the second piezoelectric actuator 460 is arranged along the X-direction, thereby greatly optimizing the spatial limitation of the second drive mechanism 400; the first drive mechanism 300 is arranged along the Z-direction as a whole, and does not interfere with the second drive mechanism 400, so the space utilization rate is higher and the structure is more compact.

[0035] The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. The above embodiment of the present invention can also be modified in various ways. That is, all simple, equivalent changes and modifications made according to the claims and the description of the present invention fall within the scope of protection of the claims of the present invention. The contents not described in detail in the present invention are all conventional technical contents.

Claims

1. An adjustment mechanism for a monochromator crystal, characterized in that: It includes a base, a flexible hinge wheel, a first driving mechanism and a second driving mechanism, wherein the flexible hinge wheel includes an inner wheel, an outer wheel and a plurality of flexible hinge joints, the inner wheel is located inside the outer wheel, the two ends of each of the flexible hinge joints are respectively connected to the inner wheel and the outer wheel and can be elastically deformed under the action of external force, the inner wheel and the first driving mechanism are both fixed on the base, the first driving mechanism is connected to the outer wheel and is used to apply a Z-direction force to the outer wheel so that the outer wheel rotates around the X-axis relative to the inner wheel; a rotating member is provided on the outer wheel, the rotating member is rotatably connected to the outer wheel and can rotate around the Y-axis relative to the outer wheel; the second driving mechanism is fixed on the outer wheel and connected to the rotating member, and is used to drive the rotating member to rotate around the Y-axis; a clamping mechanism is fixed on the rotating member, and the clamping mechanism is used to fix the monochromator crystal.

2. The adjustment mechanism of the monochromator crystal according to claim 1, characterized in that: The first driving mechanism includes a first telescopic component and a second telescopic component, the first telescopic component includes a first motor and a first motor head, the first motor is connected to the first motor head so that the first motor head moves in the Z direction, the second telescopic component includes a first sinusoidal rod, a first piezoelectric actuator and a first elastic member, the first piezoelectric actuator has a first piezoelectric actuator head, the first piezoelectric actuator is configured to move the first piezoelectric actuator head in the Z direction based on the piezoelectric effect, the first sinusoidal rod is fixed on the first piezoelectric actuator and fixedly connected to the outer wheel, the first piezoelectric actuator head and the first motor head are supported against each other, and the first elastic member is respectively connected to the base and the first piezoelectric actuator, and is used to provide an elastic force toward the first motor head to the first piezoelectric actuator so that the first motor head and the first piezoelectric actuator head remain in contact.

3. The adjustment mechanism of the monochromator crystal according to claim 2, characterized in that: The second driving mechanism includes a fixed frame, a second motor, a second motor head, a motion conversion assembly, a second sinusoidal rod, a second piezoelectric actuator and a second elastic member, the fixed frame is fixedly connected to the outer wheel, the second motor is fixed to the fixed frame, the second motor is connected to the second motor head, and is used to make the second motor head move in the Y direction, the second motor head is connected to the motion conversion assembly, the second sinusoidal rod is respectively fixed to the fixed frame and the second piezoelectric actuator, the second piezoelectric actuator has a second piezoelectric actuator head, and the second piezoelectric actuator is configured based on the piezoelectric effect. The second piezoelectric actuator head is made to move in the X direction, the second piezoelectric actuator head is connected to the motion conversion assembly, and the second elastic member is respectively connected to the second piezoelectric actuator and the fixed frame to provide an elastic force toward the fixed frame to the second piezoelectric actuator; the motion conversion assembly is used to move in the X direction in response to the movement of the second motor head in the Y direction, and make the second piezoelectric actuator head, the second piezoelectric actuator and the second sinusoidal rod move in the X direction; the second sinusoidal rod is connected to the rotating member, and the movement of the second sinusoidal rod in the X direction causes the rotating member to rotate around the Y axis.

4. The adjustment mechanism of the monochromator crystal according to claim 3, characterized in that: The first motor is fixed on the base through a first fixing base.

5. The adjustment mechanism of the monochromator crystal according to claim 3, characterized in that: A second fixing seat is provided on the base, one end of the first elastic member is connected to the second fixing seat, and the other end of the first elastic member is connected to the first piezoelectric actuator.

6. The adjustment mechanism of the monochromator crystal according to claim 3, characterized in that: The motion conversion assembly includes a shell, a first wedge block and a second wedge block. The shell is fixed on the fixed frame. The first wedge block and the second wedge block are both slidably arranged in the shell. The first wedge block can move in the Y direction relative to the shell, and the second wedge block can move in the X direction relative to the shell. The first wedge block has a first inclined surface, and the second wedge block has a second inclined surface. The first inclined surface and the second inclined surface are slidably matched. The second motor head is connected to the first wedge block, and the second piezoelectric actuator head supports the second wedge block.

7. The adjustment mechanism of the monochromator crystal according to claim 1, characterized in that: A support is provided on the outer wheel, and the rotating member is rotatably connected to the outer wheel via a bearing.

8. The adjustment mechanism of the monochromator crystal according to claim 1, characterized in that: The outer wheel is provided with a first angle encoder, and the first angle encoder is used to measure the rotation angle of the outer wheel; the rotating member is provided with a second angle encoder, and the second angle encoder is used to measure the rotation angle of the rotating member.

9. The adjustment mechanism of the monochromator crystal according to claim 1, characterized in that: The outer wheel is provided with a first limiting structure, and the base is provided with a second limiting structure and a third limiting structure, the second limiting structure and the third limiting structure are arranged relatively to each other, the first limiting structure is located between the second limiting structure and the third limiting structure, and the first limiting structure cooperates with the second limiting structure and the third limiting structure respectively to limit the position of the first limiting structure and the rotation angle of the outer wheel.

10. The adjustment mechanism of the monochromator crystal according to claim 3, characterized in that: The fixing frame is provided with a fourth limiting structure, and the rotating member is provided with a fifth limiting structure. The fourth limiting structure and the fifth limiting structure cooperate with each other to limit the rotation angle of the rotating member.

Images