A spatial spectrum collection method and system of a spectral confocal sensor illumination system

Abstract

The application belongs to the field of optical measurement, and specifically discloses a spatial spectrum acquisition method and system of a spectral confocal sensor illumination system, which comprises determining the initial spatial position of a fiber acquisition point, obtaining discrete spectrum distribution data of an illumination space; obtaining the light intensity maximum value of a target wavelength in different height directions, combining to generate the chief ray of the target wavelength and determining the focusing position of the target wavelength; obtaining the spectrum focal plane position of each wavelength in space; multiplying the spectrum focal plane position and the step number of each direction, and combining with the initial spatial position to obtain the actual coordinate value of the focal plane in the sensor coordinate system, determine the first mapping relationship of the wavelength and the height, determine the three-dimensional mapping relationship of the wavelength, the pixel and the height at the focal plane position according to the first mapping relationship and the second mapping relationship, and perform performance analysis on the spectral confocal sensor based on the three-dimensional mapping relationship. The application can improve the performance analysis efficiency and accuracy of the line spectrum confocal sensor.

Description

Technical Field

[0001] This application belongs to the field of optical measurement, and more specifically, relates to a spatial spectral acquisition method and system for a spectral confocal sensor illumination system. Background Technology

[0002] As modern industrial manufacturing enters the era of intelligent manufacturing, the demand for precise measurement of the three-dimensional morphology of industrial products is increasing. Spectroscopic confocal imaging technology, as a non-contact measurement method, is gradually becoming an important tool in the field of industrial inspection due to its advantages such as tomography, fast sampling speed, and high detection accuracy.

[0003] Most existing spectral confocal sensors are point-scanning spectral confocal systems, which can obtain the height of a single point in a single measurement. Combined with mechanical scanning in a two-dimensional plane, they can achieve precise detection of the three-dimensional shape of objects. However, due to limitations such as the mechanical scanning speed, the detection efficiency of point spectral confocal sensors used in large-scale industrial inspection is relatively low. By reducing mechanical scanning in a certain dimension using line sampling, line-scanning spectral confocal sensors are formed, which greatly improves the detection efficiency. However, the addition of a line light source and a slit makes the optical system more complex.

[0004] Currently, there is limited work on line-spectral confocal sensors, with most studies relying on simulations to derive the wavelength-height-pixel mapping relationship. However, in practical applications, the addition of line sampling transforms the detection system into an imaging spectrometer. To reduce computation, wavelength is often disregarded, and the height is directly derived from the pixels using the pixel-height mapping relationship, ignoring the influence of wavelength on the line-spectral confocal sensor. This results in poor efficiency and low accuracy in performance analysis of line-spectral confocal sensors.

[0005] Therefore, how to accurately analyze the mapping relationship at the actual focal plane and improve the efficiency and accuracy of performance analysis of line spectrum confocal sensors has become a key problem that needs to be solved by existing technologies. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the purpose of this application is to provide a spatial spectral acquisition method and system for a spectral confocal sensor illumination system, aiming to solve the problems of poor analysis efficiency and low accuracy of existing linear spectral confocal sensors.

[0007] To achieve the above objectives, in a first aspect, this application provides a spatial spectral acquisition method for a spectral confocal sensor illumination system, comprising:

[0008] The initial spatial position of the fiber optic acquisition point is determined by using a spectral confocal sensor, and discrete spectral distribution data of the illumination space is obtained by three-dimensional displacement scanning based on the initial spatial position.

[0009] The target wavelength is selected from the longitudinal-height group data of the discrete spectral distribution data, the maximum light intensity of the target wavelength in different height directions is obtained, the main ray of the target wavelength is generated by combining them, and the focusing position of the target wavelength is determined.

[0010] The wavelength principal ray generation and focus position extraction operations are performed on the horizontal group data of discrete spectral distribution data. Combined with the focus position in the vertical-depth direction space, the spectral focal plane position of each wavelength in space is obtained.

[0011] Multiply the position of the spectral focal plane by the number of steps in each direction, and combine this with the initial spatial position to obtain the actual coordinates of the focal plane in the sensor coordinate system, and determine the first mapping relationship between wavelength and height.

[0012] A second mapping relationship between pixels and height of the spectral confocal sensor is determined. Based on the first and second mapping relationships, a three-dimensional mapping relationship between wavelength, pixels, and height at the focal plane position is determined, so as to perform performance analysis of the spectral confocal sensor based on the three-dimensional mapping relationship.

[0013] Optionally, the method for determining the initial spatial position includes:

[0014] The location information of spatial positioning points near the optical fiber acquisition point is extracted using a spectral confocal sensor.

[0015] Determine the relative distance between the fiber optic acquisition point and the spatial positioning point, and calculate the coordinate position of the fiber optic acquisition point based on the position information of the spatial positioning point and the relative distance.

[0016] The optical fiber acquisition point is moved from its coordinate position to a designated position, and this designated position is used as the initial spatial position for spatial spectrum acquisition.

[0017] Optionally, the method for determining the discrete spectral distribution data of the illumination space includes:

[0018] Starting from the starting point, a step scan is performed along the first direction. After completing a preset number of steps, the scan is turned to the second direction. The scan is performed in the opposite direction of the first direction. The above scanning process is repeated until the preset number of steps is completed in the second direction, thereby obtaining multiple sets of spectral data combining the first and second directions.

[0019] Return to the starting point and perform a step scan along the third direction. Repeat the above scanning process until the third direction completes the preset number of steps to obtain discrete spectral distribution data in three-dimensional space.

[0020] Wherein, the first direction, the second direction, and the third direction are the height direction, the longitudinal direction, and the transverse direction of the three-dimensional coordinate system, respectively.

[0021] Optionally, the method for determining the focusing position of the target wavelength includes:

[0022] Take longitudinal-height group data from the discrete spectral distribution data, and extract the light intensity data of the target wavelength from the longitudinal-height group data;

[0023] The maximum value of the light intensity data is determined for the same height, and is used as the focal point and focused light intensity at that height;

[0024] Iterate through all altitudes and obtain the maximum light intensity at each altitude to serve as the focal point and focused light intensity at each altitude.

[0025] By integrating the focusing position and focusing light intensity corresponding to each height, the light intensity and position of the principal ray of the target wavelength in the vertical-height space are generated;

[0026] The maximum value of the light intensity of the main ray is taken to obtain the maximum light intensity of the target wavelength in the longitudinal-height space and the focusing position.

[0027] Optionally, the method for determining the first mapping relationship between wavelength and altitude includes:

[0028] Based on the focal plane position, the position coordinates of the line spectrum confocal sensor are determined in units of step count;

[0029] The position coordinates are converted into coordinates in the sensor coordinate system to obtain the spatial position corresponding to the wavelength.

[0030] Establish a mapping relationship between wavelength and altitude based on the spatial location corresponding to the wavelength.

[0031] Optionally, the second mapping relationship between the pixels and height of the sensor is obtained by calibrating the spectral confocal sensor using a precision displacement stage and a plane mirror.

[0032] Optionally, the spectral confocal sensor is either a point scanning spectral confocal sensor or a line spectral confocal sensor.

[0033] Secondly, this application also provides a spatial spectral acquisition system for a spectral confocal sensor illumination system, comprising:

[0034] The spectral acquisition module collects the spectral distribution of the illuminated space;

[0035] The spatial positioning module for acquisition points is used to locate the position of the fiber optic acquisition points;

[0036] The displacement control module is used to move the fiber optic acquisition point by stepping in the horizontal, vertical and height directions respectively;

[0037] The data processing module is used to execute any of the spatial spectral acquisition methods described above.

[0038] Optionally, the spectral acquisition module includes a small-core-diameter multimode optical fiber, an obliquely positioned multimode optical fiber fixing device, and a spectrometer; the acquisition point spatial positioning module includes a positioning ball and an optical fiber; and the displacement control module includes a triaxial displacement stage.

[0039] Thirdly, this application provides an electronic device, comprising: at least one memory for storing a program; and at least one processor for executing the program stored in the memory, wherein when the program stored in the memory is executed, the processor is configured to execute the method described in the first aspect or any possible implementation thereof.

[0040] Fourthly, this application provides a computer-readable storage medium storing a computer program that, when run on a processor, causes the processor to perform the method described in the first aspect or any possible implementation thereof.

[0041] Fifthly, this application provides a computer program product that, when run on a processor, causes the processor to perform the method described in the first aspect or any possible implementation thereof.

[0042] It is understood that the beneficial effects of the second to fifth aspects mentioned above can be found in the relevant descriptions in the first aspect mentioned above, and will not be repeated here.

[0043] Overall, the technical solutions conceived in this application have the following beneficial effects compared with the prior art:

[0044] (1) This application obtains discrete spectral distribution data through three-dimensional displacement scanning and generates the principal ray by combining the maximum intensity of the target wavelength, which can accurately determine the focusing position and ensure an accurate description of the spatial distribution of the focal plane. Through comprehensive analysis of horizontal and vertical data, the position of the spectral focal plane in space for each wavelength is obtained. Combined with the initial spatial position and step value, the actual coordinates of the focal plane in the sensor coordinate system are accurately calculated, providing a reliable foundation for the establishment of subsequent mapping relationships. In addition, by constructing a three-dimensional mapping relationship between wavelength, pixel and height, the actual distribution at the spectral focal plane can be reflected intuitively and efficiently, realizing the accurate correspondence between spectral information and spatial position. This provides quantitative data support for the performance analysis of line spectrum confocal sensors and significantly improves the efficiency and accuracy of the analysis.

[0045] (2) This application obtains the wavelength-height mapping relationship of the focal plane by collecting and analyzing the spectral distribution of the illumination space, which enables the analysis of the dispersion linearity of the illumination space and the evaluation of the dispersion capability of the illumination system. When measuring multi-layer samples, it is necessary to pay attention to the influence of refraction of different wavelengths on the measurement results. Therefore, obtaining the wavelength-height-pixel mapping relationship is of certain significance for the measurement of multi-layer samples by spectral confocal sensors. Attached Figure Description

[0046] Figure 1 This is a schematic flowchart of the spatial spectrum acquisition method of the spectral confocal sensor illumination system provided in the embodiments of this application;

[0047] Figure 2 This is a schematic diagram of a three-dimensional scanning method according to an embodiment of this application;

[0048] Figure 3 This is a schematic diagram of the illumination system and detection system of the line spectrum confocal sensor according to an embodiment of this application;

[0049] Figure 4 This is a schematic diagram of the spatial spectral acquisition system of the spectral confocal sensor illumination system provided in this application embodiment;

[0050] Figure 5 This is a schematic diagram of the dispersed light at a certain height in the line spectrum confocal sensor illumination system according to an embodiment of this application.

[0051] Figure 6 This is a diagram showing the wavelength-height mapping result of the line spectrum confocal sensor according to an embodiment of this application.

[0052] Figure 7 This is a schematic diagram of the structure of the electronic device provided in the embodiments of this application. Detailed Implementation

[0053] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0054] In this article, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. The symbol " / " in this article indicates that the related objects are in an "or" relationship; for example, A / B means A or B.

[0055] The terms "first" and "second," etc., used in the specification and claims herein are used to distinguish different objects, not to describe a specific order of objects. For example, "first response message" and "second response message," etc., are used to distinguish different response messages, not to describe a specific order of response messages.

[0056] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0057] In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more, for example, multiple processing units means two or more processing units, multiple elements means two or more elements, etc.

[0058] The embodiments of this application are described below with reference to the accompanying drawings.

[0059] Reference Figure 1 This application provides a spatial spectral acquisition method for a spectral confocal sensor illumination system, comprising:

[0060] S101. The initial spatial position of the fiber optic acquisition point is determined using a spectral confocal sensor, and discrete spectral distribution data of the illumination space is obtained by three-dimensional displacement scanning based on the initial spatial position;

[0061] S102. Select the target wavelength from the longitudinal-height group data of the discrete spectral distribution data, obtain the maximum light intensity of the target wavelength in different height directions, combine them to generate the main ray of the target wavelength, and determine the focusing position of the target wavelength;

[0062] S103. Perform wavelength principal ray generation and focus position extraction operations on the horizontal group data of discrete spectral distribution data, and combine the focus position in the vertical-depth direction space to obtain the spectral focal plane position of each wavelength in space;

[0063] S104. Multiply the position of the spectral focal plane by the number of steps in each direction, and combine it with the initial spatial position to obtain the actual coordinate value of the focal plane in the sensor coordinate system, and determine the first mapping relationship between wavelength and height;

[0064] S105. Determine the second mapping relationship between the pixels and the height of the spectral confocal sensor, and determine the three-dimensional mapping relationship between the wavelength, pixels and height at the focal plane position based on the first mapping relationship and the second mapping relationship, so as to perform performance analysis of the spectral confocal sensor based on the three-dimensional mapping relationship.

[0065] Specifically, firstly, the initial spatial position of the fiber optic acquisition point is determined by using a spectral confocal sensor in step S101, and then discrete spectral distribution data of the illumination space is obtained by three-dimensional displacement scanning based on the initial position.

[0066] It should be noted that, prior to this step, a spatial spectrum acquisition system for the spectral confocal sensor illumination system needs to be designed, including a spatial spectrum acquisition module, a displacement control module for the acquisition device, and a spatial positioning module for the fiber optic acquisition point. These modules are used to acquire the spatial spectrum and the spatial position of the fiber optic acquisition point relative to the linear spectral confocal sensor, respectively, and to control the movement of the fiber optic acquisition point.

[0067] After determining the initial spatial position of the fiber optic acquisition point using a spectral confocal sensor, the position of the fiber optic acquisition point is adjusted by a displacement control module to obtain X*Y*Z discrete spectral distributions of the illumination space by scanning in three-dimensional space. Here, X, Y, and Z correspond to the horizontal, vertical, and height of the three-dimensional spatial coordinate system, respectively, and the values ​​of X, Y, and Z represent the number of steps in the three scanning directions.

[0068] Reference Figure 2 , Figure 2 This is a schematic diagram of a three-dimensional scanning method according to an embodiment of this application.

[0069] The spectral confocal sensor can be either a point scanning spectral confocal sensor or a line spectral confocal sensor.

[0070] Secondly, in step S102, the target wavelength is selected from the longitudinal-height group data of the discrete spectral distribution data, the maximum light intensity of the target wavelength in different height directions is obtained, the main ray of the target wavelength is generated by combining them, and its focusing position is determined.

[0071] In the longitudinal-height data set, the intensity distribution of the target wavelength at different altitudes is analyzed to identify the intensity maxima, which represent the principal rays of the target wavelength. By combining these maxima, the focal point of the wavelength in space can be determined.

[0072] Next, in step S103, wavelength principal ray generation and focus position extraction operations are performed on the horizontal group data of the discrete spectral distribution data. Combined with the focus position in the vertical-depth direction space, the spectral focal plane position of each wavelength in space is obtained.

[0073] The horizontal group data reflects the distribution characteristics of wavelengths in the horizontal direction. By generating the principal ray and extracting the focal position, and combining it with the focal position in the vertical direction, the position of the spectral focal plane of each wavelength in three-dimensional space can be determined.

[0074] Then, in step S104, the position of the spectral focal plane is multiplied by the number of steps in each direction, and combined with the initial spatial position to obtain the actual coordinates of the focal plane in the sensor coordinate system, thus determining the first mapping relationship between wavelength and height. By multiplying the focal plane position by the step value of the three-dimensional displacement scan and combining it with the initial spatial position, the specific coordinates of the focal plane in the sensor coordinate system can be calculated. Simultaneously, based on the focal plane position and wavelength information, the first mapping relationship between wavelength and height is established, providing a foundation for subsequent analysis.

[0075] Finally, in step S105, a second mapping relationship between the pixels and height of the spectral confocal sensor is determined. Based on the first and second mapping relationships, a three-dimensional mapping relationship between the wavelength, pixels, and height at the focal plane position is determined, allowing for performance analysis of the spectral confocal sensor based on this three-dimensional mapping relationship. The second mapping relationship between the pixels and height of the sensor is obtained through calibration of the spectral confocal sensor using a precision displacement stage and a plane mirror.

[0076] By analyzing the characteristics of the spectral confocal sensor, a second mapping relationship between pixels and height is established. Combined with the first mapping relationship, a three-dimensional mapping relationship of wavelength, pixels, and height is finally constructed.

[0077] The three-dimensional mapping relationship of wavelength-height-pixel can be applied to evaluate the detection signal of the spectral confocal system, thereby improving the measurement performance of the surface morphology of three-dimensional samples and the tomographic thickness of transparent samples. This makes the spectral confocal technology show significant advantages in online inspection in fields such as 3C product manufacturing and semiconductor packaging.

[0078] This application embodiment utilizes a spectral confocal sensor to determine the initial spatial position of the fiber optic acquisition point and performs a three-dimensional displacement scan, enabling efficient acquisition of discrete spectral distribution data of the illumination space. Extracting the maximum intensity of the target wavelength from the discrete spectral distribution data and generating the principal ray allows for accurate determination of the focusing position of each wavelength in space. This not only improves the accuracy of focusing characteristic extraction but also provides crucial data support for subsequent determination of the spectral focal plane position, ensuring the accuracy of wavelength analysis. By combining the spectral focal plane position with step values ​​in each direction and determining the three-dimensional mapping relationship between wavelength, pixel, and height, a precise correspondence between spectral information and spatial position is achieved. This three-dimensional mapping relationship provides quantitative data support for the performance analysis of the line spectral confocal sensor, significantly improving the efficiency and reliability of the analysis.

[0079] Optionally, the method for determining the initial spatial position includes:

[0080] The location information of spatial positioning points near the optical fiber acquisition point is extracted using a spectral confocal sensor.

[0081] Determine the relative distance between the fiber optic acquisition point and the spatial positioning point, and calculate the coordinate position of the fiber optic acquisition point based on the position information of the spatial positioning point and the relative distance.

[0082] The optical fiber acquisition point is moved from its coordinate position to a designated position, and this designated position is used as the initial spatial position for spatial spectrum acquisition.

[0083] Specifically, this embodiment describes a method for confirming the initial spatial location of spectral acquisition, including the following steps:

[0084] The spacing near the fiber optic acquisition point is extracted using a spectral confocal sensor. Spatial location of spatial positioning point 1 The coordinates of the fiber optic acquisition point are obtained. ,in These are the coordinates of the fiber optic acquisition point in the spectral confocal sensor coordinate system.

[0085] Move the fiber optic acquisition point to As the starting point for spatial spectrum acquisition, the position of the fiber optic acquisition point is adjusted by the displacement control module to obtain X*Y*Z discrete spectral distributions of the illumination space by scanning in three-dimensional space. X, Y, and Z correspond to the horizontal, vertical, and height of the three-dimensional spatial coordinate system, respectively, and the values ​​of X, Y, and Z represent the number of steps in the three scanning directions.

[0086] Optionally, the method for determining the discrete spectral distribution data of the illumination space includes:

[0087] Starting from the starting point, a step scan is performed along the first direction. After completing a preset number of steps, the scan is turned to the second direction. The scan is performed in the opposite direction of the first direction. The above scanning process is repeated until the preset number of steps is completed in the second direction, thereby obtaining multiple sets of spectral data combining the first and second directions.

[0088] Return to the starting point and perform a step scan along the third direction. Repeat the above scanning process until the third direction completes the preset number of steps to obtain discrete spectral distribution data in three-dimensional space.

[0089] Wherein, the first direction, the second direction, and the third direction are the height direction, the longitudinal direction, and the transverse direction of the three-dimensional coordinate system, respectively.

[0090] Specifically, the first direction, the second direction, and the third direction correspond to the Z, Y, and X directions of the three-dimensional coordinate system, respectively.

[0091] The method for obtaining discrete spectral distribution data in this embodiment is as follows:

[0092] Starting from the initial point, first step y steps in the Y direction, then step z steps in the Z direction, then step y steps in the opposite direction, and so on, taking Z steps in the Z direction to obtain Y*Z sets of spectral data. Note that the initial point should be consistent during the forward and backward steps to facilitate subsequent calculations.

[0093] Based on the above steps, after acquiring a set of Y*Z spectral data, return to the initial acquisition position, then step a distance x in the X direction, repeat the above steps, step X steps, to obtain X*Y*Z sets of discrete spectra.

[0094] Optionally, the method for determining the focusing position of the target wavelength includes:

[0095] Take longitudinal-height group data from the discrete spectral distribution data, and extract the light intensity data of the target wavelength from the longitudinal-height group data;

[0096] The maximum value of the light intensity data is determined for the same height, and is used as the focal point and focused light intensity at that height;

[0097] Iterate through all altitudes and obtain the maximum light intensity at each altitude to serve as the focal point and focused light intensity at each altitude.

[0098] By integrating the focusing position and focusing light intensity corresponding to each height, the light intensity and position of the principal ray of the target wavelength in the vertical-height space are generated;

[0099] The maximum value of the light intensity of the main ray is taken to obtain the maximum light intensity of the target wavelength in the longitudinal-height space and the focusing position.

[0100] This application embodiment achieves accurate extraction and quantitative analysis of the focusing characteristics of the target wavelength in the longitudinal-height space through a systematic step design and data processing method.

[0101] First, longitudinal-height group data are extracted from the discrete spectral distribution data obtained from the three-dimensional displacement scan. These data reflect the spectral distribution characteristics of the target wavelength in different height directions.

[0102] Next, the light intensity data of the target wavelength is extracted from the longitudinal-height group data. The maximum value of the light intensity data is determined for the same height, which is used as the aggregation position and focused light intensity at that height. By traversing all heights, the maximum light intensity and its corresponding aggregation position at each height are obtained, ensuring that the full-range focusing characteristics of the target wavelength in the longitudinal-height space are completely extracted.

[0103] Subsequently, the focusing position and focused light intensity corresponding to each height are integrated to generate the principal ray intensity and principal ray position of the target wavelength in the vertical-height space. The principal ray intensity reflects the light intensity distribution of the target wavelength in different height directions, while the principal ray position represents the focusing trajectory of the target wavelength in the vertical-height space.

[0104] Finally, the maximum intensity of the generated principal ray is taken to obtain the maximum intensity of the target wavelength in the longitudinal-height space and its corresponding focusing position.

[0105] This application ensures the accurate extraction of the focusing characteristics of the target wavelength by analyzing the maximum light intensity at each height. By integrating the focusing position and focused light intensity, it generates the intensity and position of the principal ray, providing an intuitive reference for the analysis of the focusing characteristics of the target wavelength. Furthermore, by determining the maximum light intensity and focusing position, it provides quantitative analysis results for the focusing characteristics of the target wavelength, offering crucial data support for subsequent applications. This not only improves the efficiency and accuracy of performance analysis for line spectral confocal sensors but also provides reliable technical support for applications such as three-dimensional morphology measurement and transparent sample tomographic thickness analysis.

[0106] Optionally, the method for determining the first mapping relationship between wavelength and altitude includes:

[0107] Based on the focal plane position, the position coordinates of the line spectrum confocal sensor are determined in units of step count;

[0108] The position coordinates are converted into coordinates in the sensor coordinate system to obtain the spatial position corresponding to the wavelength.

[0109] Establish a mapping relationship between wavelength and altitude based on the spatial location corresponding to the wavelength.

[0110] Specifically, the following is a detailed description of the solution, explaining its implementation process and technical details step by step:

[0111] First, based on the focal plane position, the position coordinates of the line spectrum confocal sensor are determined in units of step count. The focal plane position is obtained through three-dimensional displacement scanning and spectral analysis, representing the focused region of the target wavelength in space. The step count is the number of steps the displacement module moves in the three-dimensional scan, reflecting the specific position of the focal plane in the X, Y, and Z directions. By using the focal plane position (… By combining the number of steps, the position coordinates of the line spectral confocal sensor in the scanning space can be calculated. ).

[0112] Secondly, the calculated position coordinates are converted to coordinates in the sensor coordinate system. The sensor coordinate system is the reference coordinate system for the line spectrum confocal sensor; through coordinate transformation, the focal plane position can be unified into the sensor coordinate system. Finally, based on the spatial position corresponding to the wavelength, a mapping relationship between wavelength and height is established.

[0113] This application also provides a spatial spectral acquisition system for a spectral confocal sensor illumination system, comprising:

[0114] The spectral acquisition module collects the spectral distribution of the illuminated space;

[0115] The spatial positioning module for acquisition points is used to locate the position of the fiber optic acquisition points;

[0116] The displacement control module is used to move the fiber optic acquisition point by stepping in the horizontal, vertical and height directions respectively;

[0117] The data processing module is used to execute any of the spatial spectral acquisition methods described above.

[0118] Optionally, the spectral acquisition module includes a small-core-diameter multimode optical fiber, an obliquely positioned multimode optical fiber fixing device, and a spectrometer; the acquisition point spatial positioning module includes a positioning ball and an optical fiber; and the displacement control module includes a triaxial displacement stage.

[0119] The following section further elaborates on the spatial spectral distribution and wavelength-height-pixel mapping relationship of the focal plane in a line spectrum confocal sensor illumination system.

[0120] like Figure 3 As shown, the line spectrum confocal system includes an illumination system module responsible for dispersing and focusing the broadband light source generated by the LED onto samples at different heights. The light reflected from the sample is used to obtain pixel data through a detection system, and the pixel positions on the camera differ for samples at different heights. The height-pixel position is obtained by calibrating the peak pixel positions corresponding to different sample heights. However, the wavelength of the illumination space is not calibrated against the sample height during this process. Therefore, this application proposes a spatial spectrum acquisition method, a focal plane extraction method, and a spatial spectrum acquisition system for a line spectrum confocal sensor illumination system.

[0121] The spatial spectral acquisition system includes a small-core-diameter multimode fiber. The core diameter of the multimode fiber represents the size of the spatial sampling point, and a small core diameter ensures that the spatial sampling point is small enough. Preferably, the small-core-diameter multimode fiber has a core diameter of 20-50 μm.

[0122] Reference Figure 4 , Figure 4 This is a schematic diagram of a space spectrum acquisition system.

[0123] A spectrometer receives spectra collected by multimode optical fibers.

[0124] Displacement stage, moving fiber optic acquisition point.

[0125] The fiber optic positioning device obtains the position of the fiber optic acquisition point by positioning the small ball in the sensor coordinate system.

[0126] The multimode fiber is fixed using a 45° tilting device and a fiber flange, for the following reasons:

[0127] Because the illumination system and detection system of the line spectrum confocal sensor are separated, the sensor's illumination space is incident on the sample at a 45-degree angle. Therefore, in order to obtain the illumination space spectrum, the light is collected from the illumination system at a 45-degree angle.

[0128] To obtain the three-dimensional spatial spectral distribution, the displacement stage is controlled to perform a serpentine step-scan scanning motion in the Y, Z, and X directions to collect light from the illuminated space.

[0129] Regarding the results of the embodiments, refer to Figure 5 and Figure 6 , Figure 5 This is a schematic diagram of the dispersed light at a certain height in a line-spectrum confocal sensor illumination system. Figure 6 The image shows the wavelength-height mapping results for the illumination space of a line-spectrum confocal sensor. It can be seen that the wavelength-height mapping is inconsistent at different X values ​​in the longitudinal section. Figure 6 and Figure 5 The phenomena shown are consistent.

[0130] It is understood that the detailed functional implementation of each of the above units / modules can be found in the description in the aforementioned method embodiments, and will not be repeated here.

[0131] It should be understood that the above-described device is used to execute the methods in the above embodiments. The implementation principle and technical effect of the corresponding program modules in the device are similar to those described in the above methods. The working process of the device can be referred to the corresponding process in the above methods, and will not be repeated here.

[0132] Reference Figure 7 Based on the methods in the above embodiments, this application provides an electronic device that may include: a processor 710, a communications interface 720, a memory 730, and a communication bus 740. The processor 710, communications interface 720, and memory 730 communicate with each other via the communication bus 740. The processor 710 may call logical instructions stored in the memory 730 to execute the methods in the above embodiments.

[0133] Furthermore, the logical instructions in the aforementioned memory 730 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application.

[0134] Based on the methods in the above embodiments, this application provides a computer-readable storage medium storing a computer program that, when run on a processor, causes the processor to execute the methods in the above embodiments.

[0135] Based on the methods in the above embodiments, this application provides a computer program product that, when run on a processor, causes the processor to execute the methods in the above embodiments.

[0136] It is understood that the processor in the embodiments of this application can be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. A general-purpose processor can be a microprocessor or any conventional processor.

[0137] The method steps in this application embodiment can be implemented in hardware or by a processor executing software instructions. The software instructions can consist of corresponding software modules, which can be stored in random access memory (RAM), flash memory, read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), registers, hard disks, portable hard disks, CD-ROMs, or any other form of storage medium known in the art. An exemplary storage medium is coupled to the processor, enabling the processor to read information from and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and the storage medium can reside in an ASIC.

[0138] In the above embodiments, implementation can be achieved entirely or partially through software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented entirely or partially as a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted through the computer-readable storage medium. The computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that integrates one or more available media. The available medium can be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., solid-state disk (SSD)).

[0139] It is understood that the various numerical designations used in the embodiments of this application are merely for the convenience of description and are not intended to limit the scope of the embodiments of this application.

[0140] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A spatial spectral acquisition method for a spectral confocal sensor illumination system, characterized in that, include: The initial spatial position of the fiber optic acquisition point is determined by using a spectral confocal sensor, and discrete spectral distribution data of the illumination space is obtained by three-dimensional displacement scanning based on the initial spatial position. The target wavelength is selected from the longitudinal-height group data of the discrete spectral distribution data, the maximum light intensity of the target wavelength in different height directions is obtained, the main ray of the target wavelength is generated by combining them, and the focusing position of the target wavelength is determined. Perform wavelength principal ray generation and focus position extraction operations on the horizontal group data of discrete spectral distribution data, and combine the focus position in the vertical-depth direction space to obtain the spectral focal plane position of each wavelength in space; Multiply the position of the spectral focal plane by the number of steps in each direction, and combine this with the initial spatial position to obtain the actual coordinates of the focal plane in the sensor coordinate system, and determine the first mapping relationship between wavelength and height. A second mapping relationship between pixels and height of the spectral confocal sensor is determined. Based on the first and second mapping relationships, a three-dimensional mapping relationship between wavelength, pixels, and height at the focal plane position is determined, so as to perform performance analysis of the spectral confocal sensor based on the three-dimensional mapping relationship.

2. The spatial spectral acquisition method of the spectral confocal sensor illumination system according to claim 1, characterized in that, The method for determining the initial spatial position includes: The location information of spatial positioning points near the optical fiber acquisition point is extracted using a spectral confocal sensor. Determine the relative distance between the fiber optic acquisition point and the spatial positioning point, and calculate the coordinate position of the fiber optic acquisition point based on the position information of the spatial positioning point and the relative distance. The optical fiber acquisition point is moved from its coordinate position to a designated position, and this designated position is used as the initial spatial position for spatial spectrum acquisition.

3. The spatial spectral acquisition method of the spectral confocal sensor illumination system according to claim 1, characterized in that, The method for determining the discrete spectral distribution data of the illumination space includes: Starting from the starting point, a step scan is performed along the first direction. After completing a preset number of steps, the scan is turned to the second direction. The scan is performed in the opposite direction of the first direction. The above scanning process is repeated until the preset number of steps is completed in the second direction, thereby obtaining multiple sets of spectral data combining the first and second directions. Return to the starting point and perform a step scan along the third direction. Repeat the above scanning process until the third direction completes the preset number of steps to obtain discrete spectral distribution data in three-dimensional space. Wherein, the first direction, the second direction, and the third direction are the height direction, the longitudinal direction, and the transverse direction of the three-dimensional coordinate system, respectively.

4. The spatial spectral acquisition method of the spectral confocal sensor illumination system according to claim 1, characterized in that, The method for determining the focusing position of the target wavelength includes: Take longitudinal-height group data from the discrete spectral distribution data, and extract the light intensity data of the target wavelength from the longitudinal-height group data; The maximum value of the light intensity data is determined for the same height, and is used as the focal point and focused light intensity at that height; Iterate through all altitudes and obtain the maximum light intensity at each altitude to serve as the focal point and focused light intensity at each altitude. By integrating the focusing position and focusing light intensity corresponding to each height, the light intensity and position of the principal ray of the target wavelength in the vertical-height space are generated; The maximum value of the light intensity of the main ray is taken to obtain the maximum light intensity of the target wavelength in the longitudinal-height space and the focusing position.

5. The spatial spectral acquisition method of the spectral confocal sensor illumination system according to claim 1, characterized in that, The method for determining the first mapping relationship between wavelength and altitude includes: Based on the focal plane position, the position coordinates of the line spectrum confocal sensor are determined in units of step count; The position coordinates are converted into coordinates in the sensor coordinate system to obtain the spatial position corresponding to the wavelength. Establish a mapping relationship between wavelength and altitude based on the spatial location corresponding to the wavelength.

6. The spatial spectral acquisition method of the spectral confocal sensor illumination system according to claim 1, characterized in that, The second mapping relationship between the pixels and height of the sensor is obtained by calibrating the spectral confocal sensor using a precision displacement stage and a plane mirror.

7. The spatial spectral acquisition method of the spectral confocal sensor illumination system according to claim 1, characterized in that, The spectral confocal sensor can be either a point scanning spectral confocal sensor or a line spectral confocal sensor.

8. A spatial spectral acquisition system for a spectral confocal sensor illumination system, characterized in that, include: The spectral acquisition module collects the spectral distribution of the illuminated space; The spatial positioning module for acquisition points is used to locate the position of the fiber optic acquisition points; The displacement control module is used to move the fiber optic acquisition point by stepping in the horizontal, vertical and height directions respectively; A data processing module is used to execute the spatial spectral acquisition method according to any one of claims 1-7.

9. The spatial spectral acquisition system of the spectral confocal sensor illumination system according to claim 8, characterized in that, The spectral acquisition module includes a small-core-diameter multimode optical fiber, an obliquely positioned multimode optical fiber fixing device, and a spectrometer; the acquisition point spatial positioning module includes a positioning ball and an optical fiber; and the displacement control module includes a three-axis displacement stage.

10. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is run on the processor, it causes the processor to perform the method as described in any one of claims 1-7.

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