Machining device and method for inclined exhaust hole of vacuum pump rotor

Abstract

The invention provides a machining device and method for a vacuum pump rotor ventilation inclined hole, and belongs to the technical field of vacuum pump machining. Comprising a four-axis main body, a four-axis supporting bridge plate is fixed to the four-axis main body, locking baffles are fixedly installed on the two sides of the four-axis supporting bridge plate, a vacuum pump rotor is clamped on the locking baffles, the four-axis supporting bridge plate is rotated till an inclined hole to be machined rotates in the vertical direction, machining coordinates of the inclined hole after rotation are calculated, and the inclined hole is machined through the vacuum pump rotor. The tool is simple in structure, rapid in clamping and suitable for small-batch research and development and large-scale production, the machining process is simplified through tool and coordinate conversion, the machining difficulty and cost are reduced, the production efficiency is improved, and dependence on high-end equipment is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum pump processing, and in particular relates to a processing device and method for a vacuum pump rotor exhaust inclined hole. Background Art

[0002] The semiconductor vacuum pump rotor is the soul component of the semiconductor vacuum pump, a high-precision and sophisticated equipment that integrates modern material science, precision mechanical design and advanced manufacturing technology. Its complex and delicate structure plays a vital role in ensuring the key performance indicators of the vacuum pump, such as efficient pumping, stable operation and extended service life. The special-shaped vents on the rotor, which have been precisely calculated and ingeniously designed, are not simply a stack of geometric patterns, but carry the complex mission of optimizing airflow dynamics, improving pumping efficiency and maintaining system stability. During the design and manufacturing stage of these vents, the requirements for dimensional accuracy meet the strict standards of the micron or even nanometer level, and the surface finish must also be maintained at an extremely high level to ensure that the airflow can maintain extremely low resistance and turbulence when passing through these tiny and complex channels, thereby maximizing energy utilization and further improving the overall working efficiency and system stability of the vacuum pump.

[0003] Traditional processing methods, such as relying on high-end CNC machine tools or specially customized special equipment for precision milling, drilling or laser cutting, can meet processing needs to a certain extent, but the high cost of equipment purchase and maintenance, complex and time-consuming operation procedures, and highly specialized skills requirements for operators together constitute a major obstacle to the large-scale production and application promotion of semiconductor vacuum pumps. Especially in the context of the rapid development of the current semiconductor industry, the demand for high-performance, high-stability, and long-life vacuum pumps is growing, and the limitations of traditional processing methods are becoming more and more obvious. It is not only difficult to meet the market's urgent demand for efficient production, but also to a certain extent restricts the further innovation and widespread application of semiconductor vacuum pump technology.

[0004] Therefore, exploring and developing more efficient, economical and flexible processing technologies has become a key issue that needs to be urgently addressed in the current semiconductor vacuum pump manufacturing field. Summary of the invention

[0005] The purpose of the present invention is to overcome the problems of long processing cycle and complicated processing in traditional processing methods, and to provide a processing device and method for exhaust inclined holes of a vacuum pump rotor.

[0006] In order to achieve the above object, the present invention adopts the following technical solution: A device for processing oblique ventilation holes of a vacuum pump rotor comprises a four-axis main body, a four-axis support bridge plate is fixed on the four-axis main body, stop baffles are fixedly installed on both sides of the four-axis support bridge plate, and the vacuum pump rotor is clamped on the stop baffles.

[0007] The stop baffle includes a front stop baffle and a rear stop baffle. Grooves are formed at the tops of the front stop baffle and the rear stop baffle, and both ends of the vacuum pump rotor are clamped in the grooves.

[0008] Front stop plates and rear stop plates are arranged at both ends of the vacuum pump rotor.

[0009] It includes a front pressing plate and a rear pressing plate. The front pressing plate is installed at the top end of the front stop baffle, and the rear pressing plate is installed at the top end of the rear stop baffle.

[0010] Semicircular holes are formed at the bottoms of the front pressing plate and the rear pressing plate. The sizes and positions of the semicircular holes correspond to those of the grooves.

[0011] The semicircular holes and the grooves form a through-hole structure, and the inner diameter of the through-hole matches the outer diameter of both ends of the vacuum pump rotor.

[0012] A processing method for the ventilation inclined holes of a vacuum pump rotor. The stop baffle is installed on both sides of the four-axis support bridge plate, the vacuum pump rotor is clamped on the stop baffle, the four-axis support bridge plate is rotated until the inclined hole to be processed rotates to the vertical direction, and the inclined hole is processed through the vacuum pump rotor.

[0013] The method for processing the inclined holes of the vacuum pump rotor is as follows: Taking the center of the four-axis main body as the coordinate origin, defining L1 as the horizontal distance from the rotation center to the hole in the straight state of the hole position and serving as the Y-direction coordinate, H as the height of the inclined hole and serving as the Z-direction coordinate, the four-axis support bridge plate as the X-axis direction, and A as the included angle between the axis of the inclined hole and the central axis; Rotate the four-axis support bridge plate around the X axis to make the axis of the inclined hole parallel to the Z axis, and decompose the original coordinates to the rotated coordinate system through trigonometric functions; Calculate the new coordinate D of the rotated inclined hole in the Y direction and the actual height FL1 in the Z direction; Control the machining path according to the coordinate values (D, FL1).

[0014] The calculation method for the new coordinate D of the rotated inclined hole in the Y direction and the actual height FL1 in the Z direction is as follows: The new coordinate of the rotated inclined hole in the Y direction is D: D = FL2 - L·sin(A), where FL2 = L1·sin(A); The actual height of the rotated inclined hole in the Z direction is FL1: FL1 = H / sin(A); The values of H and the angle A are measured again.

[0015] The values of L1, H, and the angle A are obtained by measuring with a tooling and a 3D model.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The present invention provides a processing device and method for the ventilation inclined holes of a vacuum pump rotor, including a four-axis main body. A four-axis support bridge plate is fixed on the four-axis main body. Stopping baffles are fixedly installed on both sides of the four-axis support bridge plate. The vacuum pump rotor is clamped on the stopping baffles. Rotate the four-axis support bridge plate until the inclined hole to be processed rotates to the vertical direction, calculate the machining coordinates of the rotated inclined hole, and process the inclined hole through the vacuum pump rotor. The tooling structure of the present invention is simple, the clamping is fast, and it is suitable for small-batch research and development and large-scale production. The processing process is simplified through the tooling and coordinate transformation, the processing difficulty and cost are reduced, the production efficiency is improved, and the dependence on high-end equipment is reduced.

[0017] Furthermore, through the design of the four-axis main body and the four-axis support bridge plate, the device can achieve multi-dimensional precise positioning and stable support, thereby ensuring the position accuracy of the vacuum pump rotor during the processing. This not only greatly improves the machining accuracy of the ventilation inclined holes, but also shortens the processing cycle and improves the overall production efficiency.

[0018] Furthermore, the setting of the front stopping baffle and the rear stopping baffle, as well as the grooves opened at their tops, provide a stable clamping position for the vacuum pump rotor, effectively preventing possible shaking or offset during the processing. This design enhances the stability of the processing and further guarantees the processing quality of the ventilation inclined holes.

[0019] Furthermore, the introduction of the front stopping plate and the rear stopping plate, as well as the front pressing plate and the rear pressing plate, makes the installation and fixation of the vacuum pump rotor simpler and faster. At the same time, the design of these components also facilitates disassembly and cleaning, reducing the maintenance cost of the device.

[0020] Furthermore, the through-hole structure composed of the semi-circular hole and the groove, the inner diameter of which matches the outer diameter of both ends of the vacuum pump rotor. This design enables the device to be applicable to vacuum pump rotors of different specifications and models, enhancing the versatility and adaptability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, so they should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative efforts.

[0022] Figure 1 It is a device diagram of the present invention; Figure 2 It is a schematic diagram before and after the rotation of the device of the present invention; Figure 3Schematic diagram of the coordinates of the inclined holes to be processed by the device of the present invention; Explanation of the reference numerals in the figure: 1. Four-axis main body; 2. Vacuum pump rotor; 3. Four-axis support bridge plate; 4. Front stop baffle; 5. Front pressing plate; 6. Front stop plate; 7. Rear stop plate; 8. Rear stop baffle; 9. Rear pressing plate. Detailed implementation mode

[0023] In the following text, only some exemplary embodiments are simply described. As those skilled in the art can recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the present invention. Therefore, the drawings and the description are considered to be exemplary in nature rather than restrictive.

[0024] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present invention.

[0025] In the present invention, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, an electrical connection, or a communication connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature can include the direct contact between the first and second features, or can include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under" and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is lower than that of the second feature.

[0027] It should be understood that when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0028] It should also be understood that the terms used in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. As used in the specification of the present invention and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms.

[0029] It should be further understood that the term "and / or" used in the specification of the present invention and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0030] Schematic diagrams of various structures according to the disclosed embodiments of the present invention are shown in the drawings. These drawings are not drawn to scale, where certain details are enlarged for the purpose of clear expression, and some details may be omitted. The shapes of various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary, and may deviate in practice due to manufacturing tolerances or technical limitations. Those skilled in the art can additionally design regions / layers with different shapes, sizes, and relative positions according to actual requirements.

[0031] The embodiments of the present invention will be described in detail below with reference to the drawings.

[0032] Embodiment 1 As Figure 1 shown, a processing device for the ventilation inclined holes of a vacuum pump rotor includes a four-axis main body 1. A four-axis support bridge plate 3 is fixed on the four-axis main body 1. A front stop baffle 4 and a rear stop baffle 8 are respectively fixed on both sides of the four-axis support bridge plate 3. Grooves are respectively opened at the tops of the front stop baffle 4 and the rear stop baffle 8. Both ends of the vacuum pump rotor 2 are clamped in the grooves. A front pressing plate 5 is installed at the top of the front stop baffle 4, and a rear pressing plate 9 is installed at the top of the rear stop baffle 8. Semi-circular holes are opened at the bottoms of the front pressing plate 5 and the rear pressing plate 9. The aperture size of the semi-circular holes is the same as the outer diameter of both ends of the vacuum pump rotor 2. A through hole is formed by the semi-circular holes of the pressing plates and the grooves of the stop baffles. Both ends of the vacuum pump rotor 2 are fixed in the through hole; Further, a front stop plate 6 and a rear stop plate 7 are installed inside the stop baffles at both ends of the vacuum pump rotor 2 for positioning and fixing the rotor. During operation, the rotor is subjected to various forces such as gas pressure and friction, which may cause the rotor to axially move. The presence of the front stop plate 6 and the rear stop plate 7 can effectively prevent such movement, thus maintaining the stable operation of the rotor.

[0033] Embodiment 2 A processing device for the ventilation inclined holes of a vacuum pump rotor has the following usage method: The front stop plate 6 and the rear stop plate 7 are sleeved on both ends of the vacuum pump rotor 2, then the front stop baffle 4 and the rear stop baffle 8 are fixed at both ends of the four-axis support bridge plate 3, and then the vacuum pump rotor 2 is installed at the grooves of the front stop baffle 4 and the rear stop baffle 8, and the front pressing plate 5 and the rear pressing plate 9 are respectively fixed on the front stop baffle 4 and the rear stop baffle 8 to fix the vacuum pump rotor 2 and maintain the stable operation of the vacuum pump rotor 2. Its clamping fit is a micro-gap fit.

[0034] After the installation is completed, the tightness of the tooling is detected by the coloring method to judge whether the closeness between the toolings is qualified. If the detection is qualified, the processing of the ventilation inclined holes is carried out. The specific method is as follows: As Figures 2 to 3 shown, 1) Taking the center of the four-axis main body 1 as the origin (the black and white circles in the figure), a workpiece coordinate system (X, Y, Z) is established; The L1 direction is the Y-direction coordinate in the straight state of the hole position, and L1 is the horizontal distance from the rotation center to the hole; The H direction is the Z-direction coordinate in the straight state of the hole position, and H is the height of the inclined hole; A is the angle between the axis of the inclined hole and the central axis; The direction of the four-axis support bridge plate 3 is the X-axis direction; φD is the diameter of the inclined hole; The values of L1, H, φD and the angle A are obtained by measuring the tooling and the 3D model.

[0035] 2) Rotate the four-axis support bridge plate 3 (i.e., rotate around the X axis) to make the axis of the inclined hole parallel to the Z axis. At this time: Compensate the angle of the inclined hole by rotation to make the processing direction of the inclined hole perpendicular, and decompose the original coordinates to the rotated coordinate system through trigonometric functions; The new coordinate of the rotated inclined hole in the Y direction is D: D = FL2 - L·sin(A), where FL2 = L1·sin(A); The actual height of the rotated inclined hole in the Z direction is FL1: FL1 = H / sin(A); the values of H and the angle A are re-measured; In summary, the coordinate values of the ventilation inclined hole after rotation are (D, FL1), and the machining path is controlled according to the coordinate values.

[0036] Finally, it should be noted that the above embodiments only describe the basic principles, main features and advantages of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic features of the present invention, the present invention can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be construed as limiting the claimed invention.

[0037] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art. The above content is only to illustrate the technical idea of the present invention, and the protection scope of the present invention cannot be limited thereby. Any modification made on the basis of the technical solution according to the technical idea proposed by the present invention falls within the protection scope of the claims of the present invention.

Claims

1. A device for processing inclined ventilation holes of vacuum pump rotors, characterized in that: It comprises a four-axis main body (1), a four-axis support bridge plate (3) being fixed on the four-axis main body (1), stop baffles being fixedly installed on both sides of the four-axis support bridge plate (3), and a vacuum pump rotor (2) being clamped on the stop baffles.

2. A vacuum pump rotor ventilation inclined hole processing device according to claim 1, characterized in that: The stop baffle comprises a front stop baffle (4) and a rear stop baffle (8), and grooves are provided on the tops of the front stop baffle (4) and the rear stop baffle (8), and the two ends of the vacuum pump rotor (2) are clamped on the grooves.

3. A vacuum pump rotor ventilation inclined hole processing device according to claim 2, characterized in that: A front stop plate (6) and a rear stop plate (7) are provided at both ends of the vacuum pump rotor (2).

4. A vacuum pump rotor ventilation inclined hole processing device according to claim 2, characterized in that: It comprises a front pressing plate (5) and a rear pressing plate (9), wherein the front pressing plate (5) is mounted on the top end of the front stop baffle (4), and the rear pressing plate (9) is mounted on the top end of the rear stop baffle (8).

5. A vacuum pump rotor ventilation inclined hole processing device according to claim 4, characterized in that: Semicircular holes are provided at the bottom of the front pressing plate (5) and the rear pressing plate (9), and the size and position of the semicircular holes correspond to those of the grooves.

6. A vacuum pump rotor ventilation inclined hole processing device according to claim 4, characterized in that: The semicircular hole and the groove form a through hole structure, and the inner diameter of the through hole matches the outer diameters of the two ends of the vacuum pump rotor (2).

7. A method for machining an inclined ventilation hole of a vacuum pump rotor as claimed in claims 1 to 6, characterized in that: The stop baffle is mounted on both sides of the four-axis support bridge plate (3), the vacuum pump rotor (2) is clamped on the stop baffle, the four-axis support bridge plate (3) is rotated until the inclined hole to be processed is rotated to a vertical direction, the processing coordinates of the inclined hole after rotation are calculated, and the inclined hole is processed by the vacuum pump rotor (2).

8. A method for machining an inclined ventilation hole of a vacuum pump rotor according to claim 7, characterized in that: The method for machining the inclined hole of the vacuum pump rotor (2) is as follows: Taking the center of the four-axis main body (1) as the coordinate origin, define L1 as the horizontal distance from the rotation center to the hole in the straight state and as the Y-direction coordinate, H as the height of the inclined hole and as the Z-direction coordinate, the four-axis support bridge plate as the X-axis direction, and A as the angle between the axis of the inclined hole and the center axis; The rotating four-axis support bridge plate (3) rotates around the X-axis so that the axis of the inclined hole is parallel to the Z-axis, and the original coordinates are decomposed into a rotated coordinate system by trigonometric functions; Calculate the new coordinate D of the inclined hole in the Y direction and the actual height FL1 in the Z direction after rotation; Control the machining path according to the coordinate value (D, FL1).

9. A method for machining an inclined ventilation hole of a vacuum pump rotor according to claim 8, characterized in that: The calculation method of the new coordinate D of the inclined hole in the Y direction and the actual height FL1 in the Z direction after the rotation is as follows: The new coordinate of the inclined hole in the Y direction after rotation is D: D = FL2-L·sin(A), Where, FL2 = L1 sin(A); The actual height of the inclined hole in the Z direction after rotation is FL1: FL1=H / sin(A); The values ​​of H and angle A are remeasured.

10. A method for machining an inclined ventilation hole of a vacuum pump rotor according to claim 9, characterized in that: The values ​​of L1, H and angle A are obtained by measuring the tooling and the 3D model.

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