Crystal oscillator structure and method for rate detection

Abstract

The invention is suitable for the technical field of crystal oscillator detection, and provides a crystal oscillator structure and method for rate detection, the crystal oscillator structure for rate detection comprises a bottom support, and the bottom support is provided with a bearing mechanism for placing a crystal oscillator detection sheet; and the flexible connecting structure is used for pressing the crystal oscillator detection sheet on the bearing mechanism, and the flexible connecting structure is connected with a wire, so that longer continuous production capacity of a coating film can be ensured, meanwhile, the stability of the film layer is greatly improved, and the consistency of the film layer is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal oscillator detection, and specifically to a crystal oscillator structure and method for rate detection. Background Art

[0002] In the silicon-based OLED industry, a crystal oscillator detection system is often used. This structure adopts a rotation method, and only one crystal oscillator chip is used for detection each time. At most 12 crystal oscillator chips for detection can be installed in a single system. In actual use, it will become a bottleneck in production and cannot ensure a continuous and stable output of production capacity. The quality of each crystal oscillator has slight differences, and during the installation process, individual crystal oscillators may also show abnormalities, which cannot be controlled and will also cause losses to product quality.

[0003] After a single crystal oscillator chip is used up, it will switch to the next one. Since the control method uses the PID method, detection cannot be performed during the switching process, resulting in a significant increase in the actual plating rate. After the switching is completed, since it needs to be adjusted to the target value, it will then drop significantly; each increase and decrease will cause instability in the repeatability of the film thickness.

[0004] Therefore, in view of the above current situation, there is an urgent need to provide a crystal oscillator structure and method for rate detection to overcome the deficiencies in current practical applications. Summary of the Invention

[0005] The purpose of the present invention is to provide a crystal oscillator structure and method for rate detection, aiming to solve the problems in the above background art.

[0006] The present invention is implemented as follows. A crystal oscillator structure for rate detection includes:

[0007] A bottom tray, on which a bearing mechanism for placing a crystal oscillator detection chip is provided;

[0008] And a flexible connection structure for pressing the crystal oscillator detection chip on the bearing mechanism, and a wire is connected to the flexible connection structure.

[0009] As a further scheme of the present invention: The bearing mechanism includes a first fixed base provided on the bottom tray, and a plurality of circular holes for placing crystal oscillator detection chips are opened on the first fixed base. A trapezoidal through hole is opened in the middle of the bottom tray. The bearing mechanism further includes an electric push rod for driving the first fixed base to move up, down, left, and right.

[0010] As a further scheme of the present invention: The first fixed base is of a circular structure.

[0011] As a further scheme of the present invention: The first fixed base is of a rectangular structure.

[0012] As a further solution of the present invention: The bearing mechanism includes a second fixed base disposed on the bottom support, and a plurality of circular holes for placing crystal oscillator detection chips are formed on the second fixed base, and a trapezoidal through hole is formed at the top of the bottom support.

[0013] As a further solution of the present invention: The second fixed base is an O-shaped strip structure, and a driven member is further disposed inside the second fixed base. The bearing mechanism further includes at least one motor, and a driving member for driving the driven member to work is disposed on the output shaft of the motor.

[0014] As a further solution of the present invention: The driving member is a gear, and the driven member is a metal chain meshing with the gear.

[0015] As a further solution of the present invention: The second fixed base is an I-shaped strip structure, and a driven member is further disposed on the second fixed base. The bearing mechanism further includes at least one motor, and a driving member for driving the driven member to work is disposed on the output shaft of the motor.

[0016] As a further solution of the present invention: The driving member is a gear, and the driven member is a rack meshing with the gear.

[0017] A detection method uses the crystal oscillator structure for rate detection described above. The method includes the following steps:

[0018] Step 1: Set a threshold according to the frequency characteristics of the crystal oscillator itself.

[0019] Step 2: Use the crystal oscillator structure for rate detection to calculate parameters such as the average value of the plating rate and the average value of power within 10 - 30 seconds before the crystal oscillator detection chip is switched.

[0020] Step 3: Switch the crystal oscillator detection chip. The switching process takes 10 seconds. During this time, the plating rate of the crystal oscillator system uses a virtual value and maintains the real power value. During the process of switching the crystal oscillator detection chip, the calibration crystal oscillator detection chip in the calibration device starts to monitor. After the switching is completed, continue to use the main monitoring crystal oscillator detection chip.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows: When switching to the next crystal oscillator detection chip, the value read by the crystal oscillator structure for rate detection is compared with the value of the calibration device. In the case of deviation, by modifying the parameter factor, it is matched with the value of the calibration device to ensure numerical consistency.

[0022] The crystal oscillator structure for rate detection of the present invention can ensure longer continuous output of the coating production capacity, greatly improve the stability of the film layer, and ensure the consistency of the film layer. Description of the Drawings

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0024] Figure 1 It is a schematic structural diagram of a calibration device.

[0025] Figure 2 It is a schematic structural diagram of a crystal oscillator structure for rate detection provided by the present invention Figure 1 。

[0026] Figure 3 It is a schematic structural diagram of the first fixed base in a crystal oscillator structure for rate detection provided by the present invention Figure 1 。

[0027] Figure 4 It is a schematic structural diagram of the first fixed base in a crystal oscillator structure for rate detection provided by the present invention Figure 2 。

[0028] Figure 5 It is a schematic structural diagram of a crystal oscillator structure for rate detection provided by the present invention Figure 2 。

[0029] Figure 6 It is a schematic structural diagram of the second fixed base in a crystal oscillator structure for rate detection provided by the present invention Figure 1 。

[0030] Figure 7 It is a schematic structural diagram of the second fixed base in a crystal oscillator structure for rate detection provided by the present invention Figure 2 。

[0031] Figure 8 It is a flowchart of a detection method provided by the present invention.

[0032] In the drawings: 100 - calibration device, 101 - shutter, 102 - power rotating shaft, 103 - crystal oscillator detection piece, 104 - flexible connection structure, 105 - bottom support, 106 - first fixed base, 122 - electric push rod, 141 - power motor, 142 - second fixed base, 151 - driving member, 152 - driven member. Specific Embodiments

[0033] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0034] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0035] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] The following further explains and illustrates the present invention in combination with specific embodiments.

[0037] Please refer to Figures 1 - 7 , a crystal oscillator structure for rate detection provided by an embodiment of the present invention includes:

[0038] A base 105, on which a bearing mechanism for placing a crystal oscillator detection sheet 103 is provided;

[0039] And a flexible connection structure 104 for pressing the crystal oscillator detection sheet 103 on the bearing mechanism, and a wire is connected to the flexible connection structure 104.

[0040] In the embodiment of the present invention, the crystal oscillator structure for rate detection of the present invention can ensure longer continuous output of coating production capacity, and at the same time greatly improve the stability of the film layer and ensure the consistency of the film layer.

[0041] In an embodiment of the present invention, please refer to Figures 2 - 4, the bearing mechanism includes a first fixed base 106 disposed on the bottom bracket 105, and a plurality of circular holes for placing the crystal oscillator detection chips 103 are formed on the first fixed base 106. A trapezoidal through hole is formed in the middle of the bottom bracket 105. The bearing mechanism further includes an electric push rod 122 for driving the first fixed base 106 to move up, down, left and right;

[0042] The first fixed base 106 is of a circular structure;

[0043] The first fixed base 106 is of a rectangular structure.

[0044] In this embodiment, the first fixed bases 106 of different shapes can install more crystal oscillator detection chips 103 per unit area to improve the service life of the crystal oscillator system. The electric push rod 122 drives the first fixed base 106 to move up, down, left and right, which is convenient for switching the crystal oscillator detection chips 103.

[0045] In an embodiment of the present invention, please refer to Figures 5 - 7 , the bearing mechanism includes a second fixed base 142 disposed on the bottom bracket 105, and a plurality of circular holes for placing the crystal oscillator detection chips 103 are formed on the second fixed base 142. A trapezoidal through hole is formed at the top of the bottom bracket 105;

[0046] The second fixed base 142 is of an O-shaped belt structure, and a driven member 152 is further disposed inside the second fixed base 142. The bearing mechanism further includes at least one set of motors 141, and a driving member 151 for driving the driven member 152 to work is disposed on the output shaft of the motor 141;

[0047] The driving member 151 is a gear, and the driven member 152 is a metal chain meshing with the gear;

[0048] The second fixed base 142 is of an I-shaped belt structure, and a driven member 152 is further disposed on the second fixed base 142. The bearing mechanism further includes at least one set of motors 141, and a driving member 151 for driving the driven member 152 to work is disposed on the output shaft of the motor 141;

[0049] The driving member 151 is a gear, and the driven member 152 is a rack meshing with the gear.

[0050] In this embodiment, through the cooperation setting of the motor 141 and the driving member 151, the driven member 152 can be used to drive the second fixed base 142 to move, which is convenient for switching the crystal oscillator detection chips 103.

[0051] Please refer to Figures 1 - 8 , a detection method provided by an embodiment of the present invention uses the crystal oscillator structure for rate detection as described above. The method includes the following steps:

[0052] Step 1: Set a threshold according to the frequency characteristics of the crystal oscillator itself.

[0053] Step 2: Use the crystal oscillator structure for rate detection to calculate parameters such as the average plating rate and the average power value within about 10 - 30 seconds before the crystal oscillator detection piece is switched.

[0054] Step 3: Switch the crystal oscillator detection piece. The switching process takes about 10 seconds. During this time, the plating rate of the crystal oscillator system uses a virtual value and maintains the real power value. During the process of switching the crystal oscillator detection piece, the calibration crystal oscillator detection piece in the calibration device starts to monitor. After the switching is completed, continue to use the main monitoring crystal oscillator detection piece.

[0055] In this embodiment, the crystal oscillator detects the plating rate in real time. When it is consumed, the crystal oscillator detection piece needs to be switched. The switching standard takes the natural frequency value of the crystal oscillator as a reference, sets a threshold, and when it is lower than the threshold, start to switch or switch after a fixed delay. During the switching process, the detection is in a parameterless state. Due to the change in power, the plating rate has exceeded the specification range. At this time, by maintaining a fixed power and using the plating rate value in the previous 10 - 30 seconds as a virtual value, continue the coating, which does not affect the coherence of the coating, thus ensuring the stability of the film thickness; during the process of switching the crystal oscillator detection piece, the crystal oscillator piece in the calibration device 100 starts to monitor. After the switching is completed, continue to use the main monitoring crystal oscillator piece; the calibration device 100 can adopt the existing public technology. Specifically, it includes a base 105 for placing the crystal oscillator detection piece 103, and the base 105 is provided with through holes. It also includes a flexible connection structure 104 for pressing the crystal oscillator detection piece 103. A wire is connected to the flexible connection structure 104. The calibration device 100 further includes a shutter 101 and a power rotating shaft 102 for driving the shutter 101 to move. Under the power of the power rotating shaft 102, the switchable function of the shutter 101 is realized. The crystal oscillator detection piece 103 is used for real-time detection of the plating rate of the film layer, and the base 105 is used to fix and hold the crystal oscillator detection piece 103. The flexible connection structure 104 has elasticity and is used for signal transmission. The calibration device 100 is placed close to the crystal oscillator structure for rate detection, and the detection value of the crystal oscillator system of the calibration device 100 is used as a reference to calibrate and monitor the deviation value of the crystal oscillator structure for rate detection;

[0056] When switching to the next crystal oscillator detection piece 103, the value read by the crystal oscillator structure for rate detection is compared with the value of the calibration device 100. In case of deviation, by modifying the parameter factor, match it to the value of the calibration device 100 to ensure numerical consistency.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A crystal oscillator structure for rate detection, characterized in that: It comprises a base (105), on which a bearing mechanism for placing a crystal oscillator detection sheet (103) is arranged; And a flexible connection structure (104) for pressing a crystal oscillator detection sheet (103) on a supporting mechanism, wherein a wire is connected to the flexible connection structure (104).

2. The crystal oscillator structure for rate detection according to claim 1, characterized in that: The bearing mechanism comprises a first fixed base (106) arranged on a base (105), and the first fixed base (106) is provided with a plurality of groups of circular holes for placing a crystal oscillator detection sheet (103), a trapezoidal through hole is provided in the middle of the base (105), and the bearing mechanism also comprises an electric push rod (122) for driving the first fixed base (106) to move up, down, left and right.

3. The crystal oscillator structure for rate detection according to claim 2, characterized in that: The first fixed base (106) is a circular structure.

4. The crystal oscillator structure for rate detection according to claim 2, characterized in that: The first fixed base (106) is a rectangular structure.

5. The crystal oscillator structure for rate detection according to claim 1, characterized in that: The bearing mechanism comprises a second fixed base (142) arranged on the base (105), and the second fixed base (142) is provided with a plurality of groups of circular holes for placing the crystal oscillator detection sheet (103), and the top of the base (105) is provided with a trapezoidal through hole.

6. The crystal oscillator structure for rate detection according to claim 5, characterized in that: The second fixed base (142) is an O-shaped belt structure, and a driven member (152) is also arranged inside the second fixed base (142). The supporting mechanism also includes at least one set of motors (141), and a driving member (151) for driving the driven member (152) to work is arranged on the output shaft of the motor (141).

7. The crystal oscillator structure for rate detection according to claim 6, characterized in that: The driving member (151) is a gear, and the driven member (152) is a metal chain meshing with the gear.

8. The crystal oscillator structure for rate detection according to claim 5, characterized in that: The second fixed base (142) is an I-shaped belt structure, and a driven member (152) is also arranged on the second fixed base (142). The supporting mechanism also includes at least one set of motors (141), and a driving member (151) for driving the driven member (152) to work is arranged on the output shaft of the motor (141).

9. The crystal oscillator structure for rate detection according to claim 8, characterized in that: The driving member (151) is a gear, and the driven member (152) is a rack meshing with the gear.

10. A detection method, characterized in that: Using the crystal oscillator structure for rate detection according to any one of claims 1 to 9, the method comprises the following steps: Step 1: Set the threshold value according to the frequency characteristics of the crystal oscillator. Step 2: Use the crystal oscillator structure of rate detection to detect the plating rate, and calculate the average plating rate, average power and other parameters within 10-30 seconds before the crystal oscillator detection piece is switched; Step 3: Switch the crystal oscillator detection piece. The switching process takes 10 seconds. During this time, the crystal oscillator system plating rate uses a virtual value and maintains the real power value. During the switching process, the calibration device starts monitoring with the crystal oscillator detection piece. After the switch is completed, continue to use the main monitoring crystal oscillator detection piece.

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