Loading and unloading device for cylindrical target material

Abstract

The invention relates to the technical field of target material processing, in particular to a cylindrical target material loading and unloading device which comprises a loading and unloading platform, target material bodies are arranged on the loading and unloading platform at equal intervals, a sintering furnace is arranged on one side of the loading and unloading platform, a transportation part is arranged above the loading and unloading platform and comprises a base, and a first vertical plate and a second vertical plate are arranged on the base. A first limiting hole is formed in the first vertical plate, a second limiting hole is formed in the second vertical plate, a first sliding block and a second sliding block are slidably connected into the first limiting hole and the second limiting hole correspondingly, a driving air cylinder is hinged to the base, the telescopic end of the driving air cylinder is connected with the first sliding block, and the first sliding block is rotationally connected with a clamping frame. According to the conveying device for the target material body, the horizontally-arranged target material body can be conveniently erected and conveyed to a sintering furnace in the conveying process, and the carrying efficiency of the target material body is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of target processing, and particularly relates to a loading and unloading device for a cylindrical target. Background Art

[0002] Currently, the shapes of ITO targets can be divided into two types. One is a planar indium tin oxide target, and the other is a circular rotating indium tin oxide target. The circular rotating indium tin oxide target is widely used because of its high utilization rate and cost savings.

[0003] Among them, the sintering of the cylindrical target is one of the most important links in the production process. Before sintering the cylindrical target, the staff needs to place the cylindrical target vertically. Previously, this was completed by the combined efforts of 4 people. The method is as follows: 2 people stand on the sintering furnace trolley, hold the top of the cylindrical target, and the other 2 people lift the target vertically from below, supporting the bottom of the cylindrical target. The 4 people cooperate to place the target on the sintering furnace trolley.

[0004] On December 20, 2019, a patent with the publication number CN209815587U and the name of a circular target handling device was published. It includes a transport vehicle, a lifting part provided on the transport vehicle, and a grasping part provided on the lifting part. The grasping part includes a horizontal axis provided on the lifting part, a ring fixed on the horizontal axis, a through hole opened on the ring, a cylinder provided in the through hole, and an air compressor installed on the transport vehicle. This utility model is used to handle circular targets, reduce the bruising of circular targets, and improve the handling efficiency. However, the applicant found that this invention requires manual or auxiliary tools to first stand the circular target vertically, and then the ring is sleeved on the circular target to carry out subsequent transportation of the circular target, and the handling efficiency needs to be improved. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to provide a loading and unloading device for a cylindrical target to solve the problem that the handling efficiency needs to be improved.

[0006] For the above purposes, the present invention provides a loading and unloading device for a cylindrical target, which includes a loading and unloading platform. The target bodies are arranged on the loading and unloading platform at equal intervals. One side of the loading and unloading platform is provided with a sintering furnace, and a sintering table is arranged on the sintering furnace. Above the loading and unloading platform, there is a transport member for vertically placing the target bodies horizontally placed on the loading and unloading platform onto the sintering table. The transport member includes a base, on which a first vertical plate and a second vertical plate are arranged. The first vertical plate and the second vertical plate are arranged in parallel. A first limiting hole is formed in the first vertical plate. The first limiting hole includes a first horizontal extension section, an arc-shaped corner section, and a first vertical extension section. The first horizontal extension section is connected to the first vertical extension section through the arc-shaped corner section. A second limiting hole is formed in the second vertical plate. The second limiting hole includes a second horizontal extension section, a right-angle corner section, a second vertical extension section, and an inclined groove. The second horizontal extension section is connected to the second vertical extension section through the right-angle corner section. The middle upper part of the right-angle corner section is connected to the inclined groove. A first slider and a second slider are respectively slidably connected in the first limiting hole and the second limiting hole. A driving cylinder is hinged on the base, and the telescopic end of the driving cylinder is connected to the first slider. The first slider is rotatably connected to a clamping frame. The first slider is rotatably arranged in the middle of the clamping frame. One end of the clamping frame is connected to a clamping plate, and a suction cup for adsorbing and clamping the target body is arranged on the clamping plate. On the side of the first slider away from the clamping plate, there is the second slider rotatably connected to the clamping frame.

[0007] Optionally, an inclined downward groove is arranged on the side of the first horizontal extension section away from the arc-shaped corner section. The height of the end of the inclined downward groove connected to the first horizontal extension section is higher than that of the other end of the inclined downward groove. The end of the second horizontal extension section is also connected to an inclined downward groove. The first horizontal extension section and the second horizontal extension section are at the same height, and the two inclined downward grooves are arranged in the same way.

[0008] Optionally, the transport member is connected to the loading and unloading platform through a manipulator. The manipulator includes a front-back moving member and a left-right moving member. The front-back moving member includes a front-back cylinder, and the left-right moving member includes a left-right cylinder. One end of the front-back cylinder is connected to the loading and unloading platform, and the other end of the front-back cylinder is connected to one end of the left-right cylinder. The other end of the left-right cylinder is connected to the base on the transport member. The manipulator is used to control the transport member to move back and forth, left and right above the loading and unloading platform.

[0009] Optionally, a lifting cylinder is arranged between the other end of the left-right cylinder and the base. The lifting cylinder is used to adjust the height of the transport member.

[0010] Optionally, a plurality of placement areas for placing the target body are evenly arranged on the sintering table. A baffle is arranged on one side of the placement area. A vertical rotating shaft is arranged on the baffle. Two clamping half-rings located above the placement area are connected to the rotating shaft. A control member for controlling the two clamping half-rings to swing towards or away from each other to clamp or release the target body is arranged on the sintering furnace.

[0011] Optionally, a plurality of silicon carbide crossbeams are arranged at equal intervals on the sintering table. A gasket member placed on the silicon carbide crossbeam is arranged on each placement area. The gasket member includes four square alumina gaskets, and the four square alumina gaskets are arranged in a square shape.

[0012] Optionally, a circular gasket ring is arranged on the gasket member.

[0013] Optionally, white fused alumina sand is sprinkled between the gasket member and the circular gasket ring and on the upper end surface of the circular gasket ring.

[0014] Optionally, one of the clamping half-rings is fixedly connected to the side wall of the rotating shaft. A rotating sleeve is rotatably sleeved outside the rotating shaft. The other clamping half-ring is fixedly connected to the rotating sleeve. The control member is used to control the rotating sleeve to rotate clockwise and the rotating shaft to rotate counterclockwise or the rotating sleeve to rotate counterclockwise and the rotating shaft to rotate clockwise.

[0015] Optionally, the control member includes a control motor. The output end of the control motor is connected to a first rotating shaft. The first rotating shaft is coaxially connected to a first gear. A second gear meshing with the first gear is arranged on the rotating shaft. The rotating sleeve is connected to the first rotating shaft through a belt drive.

[0016] Advantages of the present invention: For a loading and unloading device of a cylindrical target provided by the present invention, when it is necessary to transport the target body horizontally arranged on the loading and unloading platform to the sintering furnace, the driving cylinder is started. The driving cylinder first contracts and resets, and the suction cups under the clamping plates adsorb and clamp the target body on the loading and unloading platform. After being fixed, the driving cylinder starts to extend, and the clamping frame moves vertically upward. At this time, the first slider and the second slider slide vertically upward in the first vertical extension section and the second vertical extension section respectively. When the first slider slides upward into the arc corner section, the second slider first slides in the vertical section of the right-angle corner section and then enters the inclined groove. At this time, the first slider reaches the upper part of the arc corner section. After that, the second slider moves from the inclined groove to the horizontal section of the right-angle corner section, and the first slider moves from the arc corner section to the first horizontal extension section. At this time, the clamping frame changes from a vertical state to a horizontal state, and the target body clamped by the clamping plate changes from a horizontal state to a vertical state. Then, the first slider and the second slider slide in the first horizontal extension section and the second horizontal extension section respectively, and transport the vertical target body to the placement area on the sintering furnace, which is convenient for erecting the horizontally arranged target body during transportation and transporting it to the sintering furnace, improving the handling efficiency of the target body. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a top view structural diagram of the loading and unloading platform and the sintering furnace of the present invention;

[0019] Figure 2 is Figure 1 an enlarged structural diagram at A in

[0020] Figure 3 It is a structural diagram of the transport member of the present invention;

[0021] Figure 4 It is a structural diagram of the first limiting hole of the present invention;

[0022] Figure 5 It is a structural diagram of the second limiting hole of the present invention.

[0023] In the figure: 1, loading and unloading platform; 2, transport piece; 3, sintering furnace; 4, sintering table; 5, placement area; 6, baffle; 7, gasket piece; 8, circular gasket ring; 9, rotating shaft; 10, clamping semi-ring; 11, base; 12, first vertical plate; 13, second vertical plate; 14, first limiting hole; 15, second limiting hole; 16, first horizontal extension section; 17, arc-shaped corner section; 18, first vertical extension section; 19, second horizontal extension section; 20, right-angle corner section; 21, second vertical extension section; 22, driving cylinder; 23, clamping frame; 24, first slider; 25, second slider; 26, clamping plate; 27, inclined groove; 28, inclined downward groove; 29, target body. Detailed implementation manners

[0024] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the following further describes the present invention in detail with reference to specific embodiments and the accompanying drawings.

[0025] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present invention should be the ordinary meanings understood by those of ordinary skill in the field to which the present invention belongs. The "first", "second" and similar terms used in the present invention do not denote any order, quantity or importance, but are only used to distinguish different components. The terms such as "including" or "comprising" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left" and "right" are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0026] Such as Figures 1 to 5As shown in the figure, a loading and unloading device for a cylindrical target includes a loading and unloading platform 1. On the loading and unloading platform 1, target bodies 29 are arranged at equal intervals. The loading and unloading platform 1 is provided with a long strip-shaped arc-shaped placement groove for horizontally placing the target bodies 29. One side of the loading and unloading platform 1 is provided with a sintering furnace 3, and a sintering table 4 is arranged on the sintering furnace 3. Above the loading and unloading platform 1, there is a transport member 2 for vertically placing the target bodies 29 horizontally placed on the loading and unloading platform 1 onto the sintering table 4. The transport member 2 includes a base 11. On the base 11, a first vertical plate 12 and a second vertical plate 13 are arranged. The first vertical plate 12 and the second vertical plate 13 are arranged in parallel. A first limiting hole 14 is formed in the first vertical plate 12. The first limiting hole 14 includes a first horizontal extension section 16, an arc-shaped corner section 17, and a first vertical extension section 18. The first horizontal extension section 16 is communicated with the first vertical extension section 18 through the arc-shaped corner section 17. A second limiting hole 15 is formed in the second vertical plate 13. The second limiting hole 15 includes a second horizontal extension section 19, a right-angle corner section 20, a second vertical extension section 21, and an inclined groove 27. The second horizontal extension section 19 is communicated with the second vertical extension section 21 through the right-angle corner section 20. The middle upper part of the right-angle corner section 20 is communicated with the inclined groove 27. A first slider 24 and a second slider 25 are respectively slidably connected in the first limiting hole 14 and the second limiting hole 15. A driving cylinder 22 is hingedly arranged on the base 11. The driving cylinder 22 is located between the first vertical plate 12 and the second vertical plate 13. The telescopic end of the driving cylinder 22 is connected with the first slider 24. The first slider 24 is rotatably connected with a clamping frame 23. The first slider 24 is rotatably arranged in the middle of the clamping frame 23. One end of the clamping frame 23 is connected with a clamping plate 26. A suction cup for adsorbing and clamping the target body 29 is arranged on the clamping plate 26. On the side of the first slider 24 away from the clamping plate 26, there is the second slider 25 rotatably connected with the clamping frame 23.

[0027] When it is necessary to transport the target body 29 horizontally arranged on the loading and unloading platform 1 to the sintering furnace 3, the driving cylinder 22 is started. The driving cylinder 22 first contracts and resets. The suction cups under the clamping plates 26 adsorb and clamp the target body 29 on the loading and unloading platform 1. After being fixed, the driving cylinder 22 starts to extend, and the clamping frame 23 moves vertically upward. At this time, the first slider 24 and the second slider 25 slide vertically upward in the first vertical extension section 18 and the second vertical extension section 21 respectively. When the first slider 24 slides upward into the arc corner section 17, the second slider 25 first slides in the vertical section of the right-angle corner section 20 and then enters the inclined groove 27. At this time, the first slider 24 reaches the upper part of the arc corner section 17. Then, the second slider 25 moves from the inclined groove 27 to the horizontal section of the right-angle corner section 20, and the first slider 24 moves from the arc corner section 17 to the first horizontal extension section 16. At this time, the clamping frame 23 changes from a vertical state to a horizontal state, and the target body 29 clamped by the clamping plate 26 changes from a horizontal state to a vertical state. Then, the first slider 24 and the second slider 25 slide in the first horizontal extension section 16 and the second horizontal extension section 19 respectively, and transport the vertical target body 29 to the placement area 5 on the sintering furnace 3, improving the handling efficiency of the target body 29.

[0028] On one side of the first horizontal extension section 16 away from the arc corner section 17, there is an inclined downward groove 28. The height of the end of the inclined downward groove 28 connected to the first horizontal extension section 16 is higher than the other end of the inclined downward groove 28. The end of the second horizontal extension section 19 is also communicated with an inclined downward groove 28. The first horizontal extension section 16 and the second horizontal extension section 19 are at the same height, and the two inclined downward grooves 28 are arranged in the same way. The inclined downward groove 28 is convenient for placing the erected target body 29 into the placement area 5.

[0029] In order to facilitate the control of the relative movement between the transport member 2 and the loading and unloading platform 1, facilitate the movement of the transport member 2 above the target body 29 to be transported on the loading and unloading platform 1, and further facilitate the subsequent transportation of the target body 29, the transport member 2 can be connected to the loading and unloading platform 1 through a manipulator. The manipulator includes a front and rear moving member and a left and right moving member. The front and rear moving member includes a front and rear cylinder, and the left and right moving member includes a left and right cylinder. One end of the front and rear cylinder is connected to the loading and unloading platform 1, and the other end of the front and rear cylinder is connected to one end of the left and right cylinder. The other end of the left and right cylinder is connected to the base 11 on the transport member 2. The manipulator is used to control the front, rear, left, and right movement of the transport member 2 above the loading and unloading platform 1.

[0030] Between the other end of the left and right cylinder and the base 11, there is a lifting cylinder, and the lifting cylinder is used to adjust the height of the transport member 2.

[0031] A plurality of placement areas 5 for placing the target body 29 are uniformly arranged on the sintering table 4. A baffle 6 is arranged on one side of the placement area 5. A vertical rotating shaft 9 is arranged on the baffle 6. Two clamping half-rings 10 located above the placement area 5 are connected to the rotating shaft 9. A control member for controlling the two clamping half-rings 10 to swing towards or away from each other to clamp or release the target body 29 is arranged on the sintering furnace 3. On the one hand, the two clamping half-rings 10 facilitate the fixation of the target body 29. On the other hand, the two clamping half-rings 10 facilitate the restriction of the outer part of the lower part of the target body 29. When the target body 29 is sintered subsequently, the target body 29 is released onto the two clamping half-rings 10 under the action of its own gravity, improving the utilization rate of the target body 29, and the target body 29 is significantly improved.

[0032] A plurality of silicon carbide crossbeams are arranged on the sintering table 4 at equal intervals. A gasket member 7 placed on the silicon carbide crossbeams is arranged on each placement area 5. The gasket member 7 includes four square alumina gaskets, and the four square alumina gaskets are arranged in a square shape.

[0033] A circular gasket ring 8 is arranged on the gasket member 7, and the target body 29 is placed on the circular gasket ring 8.

[0034] White fused alumina sand is sprinkled between the gasket member 7 and the circular gasket ring 8 and on the upper end surface of the circular gasket ring 8. The white fused alumina sand is used for the rolling effect when the target body 29 shrinks.

[0035] One of the clamping half-rings 10 is fixedly connected to the side wall of the rotating shaft 9. A rotating sleeve is rotatably sleeved outside the rotating shaft 9. The other clamping half-ring 10 is fixedly connected to the rotating sleeve. The control member is used to control the rotating sleeve to rotate clockwise and the rotating shaft 9 to rotate counterclockwise or the rotating sleeve to rotate counterclockwise and the rotating shaft 9 to rotate clockwise, so that the two clamping half-rings 10 can swing towards each other to clamp the target body 29 or swing away from each other to release the target body 29.

[0036] The control member may include a control motor. The output end of the control motor is connected to a first rotating shaft. The first rotating shaft is coaxially connected with a first gear. A second gear meshing with the first gear is arranged on the rotating shaft 9. The rotating sleeve is connected to the first rotating shaft through a belt drive. When the control motor is started, it drives the first rotating shaft to rotate. The first gear and the second gear are in meshing transmission, and the rotation directions of the first gear and the second gear are opposite, so that the rotation directions of the rotating sleeve and the rotating shaft 9 are opposite. When the rotating shaft 9 rotates clockwise, it drives the rotating sleeve to rotate counterclockwise. When the rotating shaft 9 rotates counterclockwise, it drives the rotating sleeve to rotate clockwise.

[0037] Those of ordinary skill in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention is limited to these examples. The present invention is not limited to the above-described embodiments, that is, it does not mean that the present invention must rely on the above methods and structures to be implemented; under the concept of the present invention, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations in different aspects of the present invention as described above, which are not provided in detail for the sake of brevity.

[0038] Embodiments of the present invention are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A loading and unloading device for cylindrical targets, comprising a loading and unloading platform, on which target bodies are arranged at equal intervals, and a sintering furnace is arranged on one side of the loading and unloading platform, characterized in that: The sintering furnace is provided with a sintering table, and a transport member for vertically placing the target body horizontally placed on the loading and unloading platform to the sintering table is provided above the loading and unloading platform, and the transport member includes a base, and a first vertical plate and a second vertical plate are provided on the base, and the first vertical plate and the second vertical plate are arranged in parallel, and a first limiting hole is opened on the first vertical plate, and the first limiting hole includes a first horizontal extension section, an arc-shaped corner section and a first vertical extension section, and the first horizontal extension section is connected with the first vertical extension section through the arc-shaped corner section, and a second limiting hole is opened on the second vertical plate, and the second limiting hole includes a second horizontal extension section, a right-angle corner section, a second vertical extension section and an oblique The second horizontal extension section is connected with the second vertical extension section through a right-angle corner section, the middle oblique upper end of the right-angle corner section is connected with an oblique groove, the first limiting hole and the second limiting hole are respectively slidably connected with a first slider and a second slider, a driving cylinder is hingedly arranged on the base, the telescopic end of the driving cylinder is connected to the first slider, the first slider is rotatably connected with a clamping frame, the first slider is rotatably arranged in the middle of the clamping frame, one end of the clamping frame is connected with a clamping plate, the clamping plate is provided with a suction cup for adsorbing and clamping the target body, and the second slider rotatably connected to the clamping frame is provided on the side of the first slider away from the clamping plate.

2. A cylindrical target loading and unloading device according to claim 1, characterized in that: A downward sloping groove is provided on one side of the first horizontal extension section away from the arc-shaped corner section, and the height of one end of the downward sloping groove connected to the first horizontal extension section is higher than the other end of the downward sloping groove. The end of the second horizontal extension section is also connected to the downward sloping groove. The first horizontal extension section and the second horizontal extension section are at the same height, and the two downward sloping grooves are arranged in the same manner.

3. The cylindrical target loading and unloading device according to claim 1, characterized in that: The transport piece is connected to the loading and unloading platform through a manipulator, the manipulator includes a front and rear moving piece and a left and right moving piece, the front and rear moving piece includes a front and rear cylinder, the left and right moving piece includes a left and right cylinder, one end of the front and rear cylinder is connected to the loading and unloading platform, the other end of the front and rear cylinder is connected to one end of the left and right cylinder, the other end of the left and right cylinder is connected to the base on the transport piece, and the manipulator is used to control the transport piece to move forward, backward, left and right above the loading and unloading platform.

4. A cylindrical target loading and unloading device according to claim 3, characterized in that: A lifting cylinder is arranged between the other ends of the left and right cylinders and the base, and the lifting cylinder is used to adjust the height of the transported object.

5. The cylindrical target loading and unloading device according to claim 1, characterized in that: The sintering table is evenly provided with a plurality of placement areas for placing the target body, a baffle is provided on one side of the placement area, a vertical rotating shaft is provided on the baffle, two clamping half rings located above the placement area are connected to the rotating shaft, and a control component is provided on the sintering furnace for controlling the two clamping half rings to swing toward or away from each other, thereby clamping or releasing the target body.

6. The cylindrical target loading and unloading device according to claim 5, characterized in that: A plurality of silicon carbide beams are arranged at equal intervals on the sintering table, and each placement area is provided with a gasket member placed on the silicon carbide beam. The gasket member includes four square alumina gaskets, and the four square alumina gaskets are arranged in a square shape.

7. The cylindrical target loading and unloading device according to claim 6, characterized in that: A circular gasket is arranged on the gasket piece.

8. The cylindrical target loading and unloading device according to claim 7, characterized in that: White corundum sand is sprinkled between the gasket and the circular gasket ring and on the upper end surface of the circular gasket ring.

9. The cylindrical target loading and unloading device according to claim 5, characterized in that: One of the clamping half rings is fixedly connected to the side wall of the rotating shaft, a rotating sleeve is provided outside the rotating shaft, and the other clamping half ring is fixedly connected to the rotating sleeve. The control member is used to control the rotating sleeve to rotate clockwise and the rotating shaft to rotate counterclockwise or the rotating sleeve to rotate counterclockwise and the rotating shaft to rotate clockwise.

10. A method for loading and unloading a cylindrical target according to claim 9, characterized in that: The control component includes a control motor, the output end of the control motor is connected to a first rotating shaft, the first rotating shaft is coaxially connected to a first gear, a second gear meshing with the first gear is arranged on the rotating shaft, and the rotating sleeve is connected to the first rotating shaft through a belt drive.

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